WO2001071817A2 - Dmos transistor having a trench gate electrode and method of making the same - Google Patents
Dmos transistor having a trench gate electrode and method of making the same Download PDFInfo
- Publication number
- WO2001071817A2 WO2001071817A2 PCT/US2001/040310 US0140310W WO0171817A2 WO 2001071817 A2 WO2001071817 A2 WO 2001071817A2 US 0140310 W US0140310 W US 0140310W WO 0171817 A2 WO0171817 A2 WO 0171817A2
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- WIPO (PCT)
- Prior art keywords
- trench
- body region
- dmos transistor
- insulating layer
- substrate
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title description 3
- 210000000746 body region Anatomy 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 19
- 229920005591 polysilicon Polymers 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 206010010144 Completed suicide Diseases 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 5
- 230000015556 catabolic process Effects 0.000 description 9
- 239000002019 doping agent Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 230000002411 adverse Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
- H01L29/42368—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity the thickness being non-uniform
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4916—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
- H01L29/4925—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement
- H01L29/4933—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement with a silicide layer contacting the silicon layer, e.g. Polycide gate
Definitions
- the present invention relates generally to MOSFET transistors and more generally to DMOS transistors having a trench structure.
- DMOS Double diffused MOS transistors are a type of MOSFET (Metal On Semiconductor Field Effect Transistor) that use two sequential diffusion steps aligned to the same edge to form the transistor regions.
- MOSFET Metal On Semiconductor Field Effect Transistor
- DMOS transistors are typically employed as power transistors to provide high voltage, high current devices for power integrated circuit applications. DMOS transistors provide higher current per unit area when low forward voltage drops are required.
- a typical discrete DMOS circuit includes two or more individual DMOS transistor cells which are fabricated in parallel.
- the individual DMOS transistor cells share a common drain contact (the substrate), while their sources are all shorted together with metal and their gates are shorted together by polysilicon.
- the discrete DMOS circuit is constructed from a matrix of smaller transistors, it behaves as if it were a single large transistor.
- DMOS transistor is a so-called trench DMOS transistor in which the channel is formed vertically and the gate is formed in a trench extending between the source and drain.
- the trench which is lined with a thin oxide layer and filled with polysilicon, allows less constricted current flow and thereby provides lower values of specific on-resistance. Examples of trench DMOS transistors are disclosed in U.S. Patent Nos. 5,072,266, 5,541,425, and 5,866,931.
- trenched DMOS transistor 10 includes heavily doped substrate 11, upon which is formed an epitaxial layer 12, which is more lightly doped than substrate 11.
- Metallic layer 13 is formed on the bottom of substrate 11, allowing an electrical contact 14 to be made to substrate 11.
- DMOS transistors also include source regions 16a, 16b, 16c, and 16d, and body regions 15a and 15b.
- Epitaxial region 12 serves as the drain.
- Substrate 11 is relatively highly doped with N-type dopants
- epitaxial layer 12 is relatively lightly doped with N type dopants
- source regions 16a, 16b, 16c, and 16d are relatively highly doped with N type dopants
- body regions 15a and 15b are relatively highly doped with P type dopants.
- a doped polycrystalline silicon gate electrode 18 is formed within a trench, and is electrically insulated from other regions by gate dielectric layer 17 formed on the bottom and sides of the trench containing gate electrode 18. The trench extends into the heavily doped substrate 11 to reduce any resistance caused by the flow of carriers through the lightly doped epitaxial layer 12, but this structure also limits the drain-to-source breakdown voltage of the transistor.
- a drain electrode 14 is connected to the back surface of the substrate 11, a source electrode 22 is connected to the source regions 16 and the body regions 15, and a gate electrode 19 is connected to the polysilicon 18 that fills the trench.
- the device's on-resistance decreases because an accumulation layer forms along the side-wall of the trench.
- the drain-to-source breakdown voltage decreases with increasing trench depth. This latter trend occurs because the depletion layer extending along the trench upon application of a reverse bias voltage cannot spread as the distance between the substrate and the bottom of the trench decreases. As a result, the electric field is concentrated at the bottom corner of the trench and thus breakdown occurs at this point. While the electric field can be reduced by increasing the thickness of the gate oxide layer lining the trench, this adversely effects the on-resistance of the device.
- Y. Baba et al. in Proc. of ISPSD & IC, p300, 1992, discloses a trench DMOS transistor having a relatively low on-resistance and a high drain-to-source breakdown voltage.
- a transistor with such characteristics is accomplished by providing a double gate oxide structure that has a thicker gate oxide layer at the bottom of the trench and a thinner gate oxide layer along the side-walls of the upper portion of the trench. This arrangement provides a more optimal trade-off between the device's on-resistance and its drain-to-source breakdown voltage.
- the thickness of the gate oxide region is increased where it can most effectively reduce the electric field at the bottom of the trench; however, the remainder of the gate oxide layer has a reduced thickness so that the on-resistance is minimally impacted.
- trench DMOS transistor shown in the previously mentioned reference is that it can be difficult to produce the double gate oxide structure, particularly at high transistor cell densities when the width of the trench becomes narrow.
- Another limitation of the device shown in FIG. 1 is that at high switching speeds its switching losses are relatively large because of its gate charge, which leads to increased capacitance.
- a trench DMOS transistor having a double gate oxide structure that is relatively simple to manufacture, particularly at high trench cell densities when the trench is narrow and which has a reduced gate charge to reduce switching losses.
- a trench DMOS transistor cell is formed on a substrate of a first conductivity type.
- a body region which has a second conductivity type, is located on the substrate. At least one trench extends through the body region and the substrate.
- An insulating layer lines the trench.
- the insulating layer includes first and second portions that contact one another at an interface. The first portion of the insulating layer has a layer thickness greater than the second portion. The interface is located at a depth above a lower boundary of the body region.
- a conductive electrode is formed in the trench so that it overlies the insulating layer.
- a source region of the first conductivity type is formed in the body region adjacent to the trench.
- the interface is located at a depth between an upper and lower boundary of the body region.
- the conductive electrode is formed from polysilicon.
- the conductive electrode may be formed in whole or in part from suicide.
- the insulating layer is an oxide layer.
- a trench DMOS transistor structure which includes a plurality of individual trench DMOS transistor cells formed on a substrate of a first conductivity type.
- Each of the individual trench DMOS transistor cells include a body region, which has a second conductivity type, located on the substrate. At least one trench extends through the body region and the substrate.
- An insulating layer lines the trench.
- the insulating layer includes first and second portions that contact one another at an interface.
- the first portion of the insulating layer has a layer thickness greater than the second portion.
- the interface is located at a depth above a lower boundary of the body region.
- a conductive electrode is formed in the trench so that it overlies the insulating layer.
- a source region of the first conductivity type is formed in the body region adjacent to the trench.
- At least one of the individual trench DMOS transistor cells has a closed cell geometry.
- at least one of the individual trench DMOS transistor cells has an open cell geometry.
- FIG. 1 shows a cross-sectional view of a conventional DMOS transistor.
- FIG. 2 shows a cross-sectional view of another conventional DMOS transistor that employs a double gate structure.
- FIG. 3 shows a cross-sectional view of one embodiment of the DMOS transistor constructed in accordance with the present invention.
- FIG. 4 is a simulation showing the on-resistance for the DMOS transistor shown in FIG. 3 when the reverse bias applied between the gate and source is 10 V and 4.5 V.
- FIG. 2 shows a conventional DMOS transistor having a double oxide gate structure such as disclosed in the previously cited reference to Y. Baba et al.
- the trench DMOS transistor 110 includes heavily doped substrate 111, upon which is formed an epitaxial layer 112, which is more lightly doped than substrate 1 1 1.
- Metallic layer 1 13 is formed on the bottom of substrate 111, allowing an electrical contact 114 to be made to substrate 111.
- the DMOS transistor also includes source regions 116a, 116b, 1 16c, and 116d, and body regions 115a and 115b.
- Epitaxial region 1 12 serves as the drain.
- FIG. 1 shows a conventional DMOS transistor having a double oxide gate structure such as disclosed in the previously cited reference to Y. Baba et al.
- the trench DMOS transistor 110 includes heavily doped substrate 111, upon which is formed an epitaxial layer 112, which is more lightly doped than substrate 1 1 1.
- Metallic layer 1 13 is formed on the bottom of substrate 111
- substrate 111 is relatively highly doped with N-type dopants
- epitaxial layer 112 is relatively lightly doped with N type dopants
- source regions 1 16a, 1 16b, 116c, and 1 16d are relatively highly doped with N type dopants
- body regions 115a and 1 15b are relatively highly doped with P type dopants.
- a doped polycrystalline silicon gate electrode 118 is formed within a trench, and is electrically insulated from other regions by gate dielectric layer 1 17 formed on the bottom and sides of the trench containing gate electrode 118. The trench extends into the heavily doped substrate 111 to reduce any resistance caused by the flow of carriers through the lightly doped epitaxial layer 112. However, as previously mentioned, this structure also limits the drain-to-source breakdown voltage of the transistor.
- This problem is alleviated in FIG. 2 by increasing the thickness of the gate oxide layer in the bottom portion of the trench to define thick oxide layer 125 and decreasing its thickness in the upper portion of the trench to define thin oxide layer 127.
- the interface 129 between the thick gate oxide layer 125 and the thin gate oxide layer 127 is located in epitaxial region 112.
- the electric field at the bottom of the trench is reduced, thus increasing the drain-to-source breakdown voltage, while the on-resistance of the device remains low because the thick gate oxide layer 125 does not extend throughout the entire trench.
- the device is completed in a conventional manner by connecting a drain electrode 1 14 to the back surface of the substrate 111, connecting a source electrode 122 to the source regions 116 and the body regions 115, and connecting a gate electrode 119 to the polysilicon 1 18 that fills the trench.
- the double gate structure shown in FIG. 2 is fabricated by the following process steps. First, the trench is etched after the source regions 1 16 and body regions 115 have been formed in epitaxial region 1 12 by diffusion. Next, the thick gate oxide layer 125 is deposited by chemical vapor deposition (CVD) followed by deposition of a first polysilicon layer 130 adjacent to the trench. The thick oxide layer 125 is then etched back to a depth below the body regions to define interface 129. Finally, the thin oxide layer 127 is deposited followed by deposition of a second polysilicon layer 131. First and second polysilicon layers 130 and 131 constitute gate electrode 118.
- CVD chemical vapor deposition
- the step of etching back the thick gate oxide layer 125 becomes problematic for narrow and deep trenches. That is, etching is difficult when the trench has a high aspect ratio. This problem arises because a wet etch is employed and it becomes difficult to continuously refresh the etchant in a deep trench. For instance, it is not feasible to form the gate structure shown in FIG. 2 for trenches having a width less than about 0.5 microns.
- FIG. 3 shows an exemplary embodiment of the invention.
- like elements are denoted by like reference numerals.
- the interface 129 is located at a depth between the top boundary 135 of the body region 1 15 and a bottom boundary 133 of the body region 1 15.
- the location of interface 129 in the inventive structure is adjusted so that the thick gate oxide layer 125 does not need to be etched back to an impractical depth when forming the thin oxide layer 127.
- the prior art structure shown in FIG. 2 locates the interface 129 at a depth corresponding to epitaxial layer 112 rather than the body regions 115a and 1 15b.
- the present invention is easier to fabricate than the prior art structure because the portion of the thick oxide layer 125 that must be etched back to allow formation of the thin oxide layer 127 does not extend as deep within the trench. Accordingly, the problems associated with etching the thick oxide layer that arise when the trench has a high aspect ratio are reduced so that in the present invention the trench can be made correspondingly narrower before etching problems arise.
- the inventive structure offers a more optimal trade-off between its on-resistance and drain-to-source breakdown voltage.
- a primary advantage of the present invention is that because the portion of the total gate oxide layer occupied by the thick oxide layer 125 is increased relative to the prior art structure shown in the FIG. 2, the gate to drain charge of the device and hence its capacitance is reduced without adversely effecting the on-resistance. As previously mentioned, this advantageously reduces switching losses in the device.
- the inventive DMOS device shown in FIG. 3 may be fabricated in accordance with any conventional processing technique.
- the double gate structure may be fabricated in accordance with the process steps set forth above in connection with the FIG. 2 structure and disclosed in the Y. Baba et al. reference.
- the thin oxide layer 127 is formed, the thick oxide layer 125 is etched back until it is eliminated and then a subsequent oxide layer is deposited to form thin oxide layer 127.
- the present invention may employ this technique, it may also employ an alternative technique in which the thick oxide layer 127 is etched back just enough to form the thin oxide layer 125. In this way a second oxide deposition step is avoided and both oxide layers 125 and 127 are formed in a single deposition.
- FIG. 4 is the result of a simulation that was performed showing the on- resistance (normalized to a uniform oxide layer 700 angstroms thick) for the inventive structure when the gate bias applied between the gate and source is 10 V and 4.5 V.
- the abscissa represents the location of the interface 129 in a trench that is 2 microns deep. That is, a depth of zero corresponds to a structure having no thin oxide layer and a depth of 2 microns corresponds to a structure having no thick oxide layer.
- FIG. 4 is the result of a simulation that was performed showing the on- resistance (normalized to a uniform oxide layer 700 angstroms thick) for the inventive structure when the gate bias applied between the gate and source is 10 V and 4.5 V.
- the abscissa represents the location of the interface 129 in a trench that is 2 microns deep. That is, a depth of zero corresponds to a structure having no thin oxide layer and a depth of 2 microns corresponds to a structure having no thick oxide layer.
- the second polysilicon layer 131 of the gate electrode which is deposited after the thin gate oxide layer 127, is formed from suicide rather than polysilicon.
- the first polysilicon layer 130 or even both polysilicon layers 130 and 131 may be replaced with suicide.
- Suicide is advantageously employed because of its reduced resistance relative polysilicon and hence it contributes to a reduction in switching losses. This configuration increases the switching speed of the resulting device.
- the method of the present invention may be used to form a trench DMOS in which the conductivities of the various semiconductor regions are reversed from those described herein.
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Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01925129A EP1269549B1 (en) | 2000-03-17 | 2001-03-16 | DMOS transistor cell having a trench gate electrode, and corresponding DMOS transistor and method of making the same |
AU5172001A AU5172001A (en) | 2000-03-17 | 2001-03-16 | Trench dmos transistor having a double gate structure |
DE60140350T DE60140350D1 (en) | 2000-03-17 | 2001-03-16 | DMOS transistor cell with a trench gate electrode, and corresponding DMOS transistor and method for its production |
JP2001569897A JP5081358B2 (en) | 2000-03-17 | 2001-03-16 | Double diffusion metal oxide semiconductor transistor having trench gate electrode and method for manufacturing the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US53113800A | 2000-03-17 | 2000-03-17 | |
US09/531,138 | 2000-03-17 |
Publications (3)
Publication Number | Publication Date |
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WO2001071817A2 true WO2001071817A2 (en) | 2001-09-27 |
WO2001071817A3 WO2001071817A3 (en) | 2002-07-04 |
WO2001071817A9 WO2001071817A9 (en) | 2003-02-06 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/US2001/040310 WO2001071817A2 (en) | 2000-03-17 | 2001-03-16 | Dmos transistor having a trench gate electrode and method of making the same |
Country Status (9)
Country | Link |
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US (1) | US6518127B2 (en) |
EP (1) | EP1269549B1 (en) |
JP (1) | JP5081358B2 (en) |
KR (1) | KR100766874B1 (en) |
CN (2) | CN101800243B (en) |
AU (1) | AU5172001A (en) |
DE (1) | DE60140350D1 (en) |
TW (1) | TW479363B (en) |
WO (1) | WO2001071817A2 (en) |
Cited By (6)
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DE10234996A1 (en) * | 2002-03-19 | 2003-10-16 | Infineon Technologies Ag | Production of a transistor arrangement comprises inserting a trench in a process layer of a semiconductor substrate, and forming a drift zone, a channel zone and a source zone in the process zone |
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US7005351B2 (en) | 2002-03-19 | 2006-02-28 | Infineon Technologies Ag | Method for fabricating a transistor configuration including trench transistor cells having a field electrode, trench transistor, and trench configuration |
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DE10234996A1 (en) * | 2002-03-19 | 2003-10-16 | Infineon Technologies Ag | Production of a transistor arrangement comprises inserting a trench in a process layer of a semiconductor substrate, and forming a drift zone, a channel zone and a source zone in the process zone |
US7005351B2 (en) | 2002-03-19 | 2006-02-28 | Infineon Technologies Ag | Method for fabricating a transistor configuration including trench transistor cells having a field electrode, trench transistor, and trench configuration |
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US8269282B2 (en) | 2009-12-22 | 2012-09-18 | Infineon Technologies Ag | Semiconductor component and method for producing a semiconductor component |
Also Published As
Publication number | Publication date |
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JP5081358B2 (en) | 2012-11-28 |
US6518127B2 (en) | 2003-02-11 |
CN101800243A (en) | 2010-08-11 |
WO2001071817A9 (en) | 2003-02-06 |
TW479363B (en) | 2002-03-11 |
EP1269549B1 (en) | 2009-11-04 |
WO2001071817A3 (en) | 2002-07-04 |
JP2004500716A (en) | 2004-01-08 |
KR20020081458A (en) | 2002-10-26 |
CN1428007A (en) | 2003-07-02 |
DE60140350D1 (en) | 2009-12-17 |
CN101800243B (en) | 2012-11-07 |
EP1269549A2 (en) | 2003-01-02 |
KR100766874B1 (en) | 2007-10-15 |
US20010023961A1 (en) | 2001-09-27 |
AU5172001A (en) | 2001-10-03 |
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