WO2001071810A2 - High voltage solid state device termination - Google Patents
High voltage solid state device termination Download PDFInfo
- Publication number
- WO2001071810A2 WO2001071810A2 PCT/EP2001/002531 EP0102531W WO0171810A2 WO 2001071810 A2 WO2001071810 A2 WO 2001071810A2 EP 0102531 W EP0102531 W EP 0102531W WO 0171810 A2 WO0171810 A2 WO 0171810A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- charge
- termination region
- layer
- region
- layers
- Prior art date
Links
- 239000007787 solid Substances 0.000 title claims description 9
- 238000000034 method Methods 0.000 claims description 11
- 230000005684 electric field Effects 0.000 description 8
- 230000007423 decrease Effects 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
Definitions
- This invention relates to electronics, and more specifically, to an improved technique of terminating a solid state device.
- the invention has particular application in high voltage termination of charge compensated devices.
- Fig. 1 shows a side cross sectional view of an exemplary prior art VDMOS device.
- P doped regions 109 are repetitive along a top surface 114 and are typically kept at approximately ground voltage during operation of the device.
- the gate 1 11 may be operated at a conventional value of, for example, 15 volts.
- At the lower surface of the device is the 600 volt terminal 113.
- the voltage may ⁇ se to 1000 V or more.
- a region 107 is denoted T for termination, and must drop the 600 volts across the width of the region.
- T 107 may be on the order of 50 microns.
- FIG. 2 A top view of the arrangement of Fig. 1 is shown in Fig. 2.
- the border region 107 is the termination region, which must include some type of structure for dropping the 600 volts across only 50 micrometers
- Section 105 represents the active region of the device
- Fig 3 shows a typical p ⁇ or art structure for providing termination of such a high voltage device.
- a set of floating guard ⁇ ngs 302 is used to control the electric field dist ⁇ bution around the device pe ⁇ phery.
- the number of ⁇ ngs in the structure depends on the voltage rating of the device. For example, 8 rings are used for a 1,000 volt device.
- a three dimensional computer model enables the optimum ⁇ ng spacing to be determined so that each ring expe ⁇ ences a similar field intensity as the structure approaches avalanche breakdown
- the ⁇ ngs are passivated with polydox (oxygen-doped polycrystalhne silicon), which acts as an electrostatic screen and prevents external ionic charges inverting the lightly doped N- lnterface to form P- channels between the rings.
- the polydox is coated with layers of silicon nit ⁇ de and phosphorous doped oxide, as shown
- the surface area of the termination region of the device represents a source of added cost to the device. Specifically, the termination region is a substantial sized lateral width that must wrap entirely around the periphery of the device. This increases the cost of the device, and over the large number of chips per wafer, becomes a significant source of wasted cost and space.
- a multiple layer solid state device is constructed wherein each layer includes a varying charge profile extending laterally through the termination region, from the edge of the active (drift) region extending laterally towards the edge of the crystal.
- the charge profile represents the density of deposited charge as a specified cross section is traversed.
- the charge profile is different in different layers, so that each layer of the multiple layer device includes decreasing charge density as the termination layer is traversed laterally.
- a decreasing charge profile is also exhibited as a vertical cross section is traversed upwardly towards the source region of the device.
- the charge profile decreases substantially linearly along any cross section, lateral or vertical, resulting in a substantially uniform value of electric field strength.
- a preferred method of making the device comprises depositing volumes of charge along each layer in a multiple layer device, in the termination region.
- the volume of charge in each deposit (i.e., dot) or the spacing between the deposits may be varied, with such variation being different at different layers. This causes the field strength to remain substantially constant along any horizontal or vertical cross section.
- FIG. 1 is a cross sectional view of a semiconductor device, depicting the need for termination
- Fig. 2 is a top view of the arrangement of Fig. 1 ;
- Fig. 3 shows a prior art termination technique utilizing several floating P rings
- Fig. 4 is a conceptual representation of charge profiles in a semiconductor device, the charge profiles varying in accordance with the present invention
- Fig. 5 is an alternative embodiment of the present invention.
- Fig. 4 shows a conceptual diagram of a cross section through a multi layer device fabricated in accordance with the teachings of the present invention. While layers 403, 405, and 407 are shown, further layers are possible. Region 421 represents the active region of the device, and region 422 represents the termination region of the device. That active region may be constructed to behave electrically as any one or more of a variety of such devices, and is not critical to the present invention. Thus, we only discuss the termination region hereafter.
- Layers 403, 405 and 407 each include a charge profile which decreases as the layer is traversed laterally from region 421 to the outside of the device.
- the charge profile is constructed, in the arrangement of Fig. 4, such that the total charge is a function of lateral or vertical position. Hence, as shown in Fig. 4, more charge is deposited at 409 than at 411, and more charge is deposited at 411 than at 413, and even less charge is deposited at 415.
- the charge profile includes columns 409, 411 , 413, and 415.
- the successive reduction of total charge with linear dependence on position results in an electric field strength which is substantially constant over a lateral/vertical section.
- One way of accomplishing the decreasing charge profile uses the same mask as used for fabrication of the active device.
- the mask has a portion that extends over the termination region. That extended portion has plural openings which get smaller as one moves away from the active region.
- the discrete deposits of charge i.e., charge dots
- a similar decrease in charge is encountered as a vertical cross section is traversed. Specifically, looking only at column 409 of Fig. 4, as one traverses upward from row 403 to 405 to 407, less charge is deposited with each discrete deposit.
- the size of the openings in the mask used for each layer may vary, as depicted in Fig. 4.
- the small rectangles represent a three by four matrix of discrete deposits of charge, each of which has a different volume of charge contained therein.
- a typical geometry for such openings may range from approximately 2.5 to 40 microns squared.
- the electric field strength at any position within the termination region can be calculated from the spatial variation of charge.
- a desired electric field strength can be realized by judicious design of the charge profile.
- the lateral charge at any point in the termination region can be obtained by summing the contribution from each discrete charge region, subjected to a specified thermal anneal or drive. It is well known to those of skill in the art how to calculate a charge profile for a desired field strength, and how to calculate the field strength from the desired charge profile.
- the approximately 600 volts in the exemplary embodiment used herein must also be dropped from the bottom to the surface of the device.
- the same procedure is utilized upwardly along any column, in order to drop 600 volts across N layers, for devices of N layers deep.
- the invention may be fabricated in a convenient manner for multi layer devices. Specifically, in such multi layer devices the layers are each fabricated separately using a particular mask. The same masks can be utilized to lay down the termination region, with holes of varying size allowing for different amounts of charge. Notably, the mask for each layer would be different, since the openings in the mask that allow for the deposit of charge in the termination region are different. Thus, it is possible to have N different masks, one for each layer.
- the portion of the mask that corresponds to the active region may be the same for each mask, and the portion that corresponds to the termination region is different for each mask, in order to vary the profile.
- Fig. 5 shows a slightly different embodiment for accomplishing a similar objective as Fig. 4.
- the size of the discrete charge deposits is similar to each other.
- the distance between such discrete deposits varies as the termination region is laterally traversed.
- the same varying spacing can be found as a vertical cross section is traversed.
- distance 505 would be slightly less than distance 506.
- the same substantially constant electric field can be implemented by depositing the discrete charge deposits in equal amounts but further and further apart, as the cross section is traversed, rather than depositing the charge dots in less and less quantity at a fixed distance.
- a combination approach may be used as well, where the volume of charge in each deposit and the spacing are varied.
- the charge should be deposited in a manner that decreases with distance from the active (drift) region in a substantially linear manner. This causes a substantially constant electric field strength as one moves away from the active region. That means that the charge in each dot should decrease linearly with distance from the active region.
Landscapes
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thyristors (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Bipolar Transistors (AREA)
- Rectifiers (AREA)
- Non-Volatile Memory (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT01907578T ATE472174T1 (en) | 2000-03-20 | 2001-03-06 | HIGH VOLTAGE SEMICONDUCTOR ARRANGEMENT TERMINATION |
JP2001569891A JP2003528470A (en) | 2000-03-20 | 2001-03-06 | Terminal structure of high-pressure solid equipment |
EP01907578A EP1186050B1 (en) | 2000-03-20 | 2001-03-06 | High voltage solid state device termination |
DE60142424T DE60142424D1 (en) | 2000-03-20 | 2001-03-06 | HIGH VOLTAGE SEMICONDUCTOR DEVICE STATEMENTS |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/531,701 | 2000-03-20 | ||
US09/531,701 US6642558B1 (en) | 2000-03-20 | 2000-03-20 | Method and apparatus of terminating a high voltage solid state device |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001071810A2 true WO2001071810A2 (en) | 2001-09-27 |
WO2001071810A3 WO2001071810A3 (en) | 2002-01-03 |
Family
ID=24118686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2001/002531 WO2001071810A2 (en) | 2000-03-20 | 2001-03-06 | High voltage solid state device termination |
Country Status (6)
Country | Link |
---|---|
US (2) | US6642558B1 (en) |
EP (1) | EP1186050B1 (en) |
JP (1) | JP2003528470A (en) |
AT (1) | ATE472174T1 (en) |
DE (1) | DE60142424D1 (en) |
WO (1) | WO2001071810A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017105414A1 (en) * | 2015-12-15 | 2017-06-22 | General Electric Company | Edge termination designs for silicon carbide super-junction power devices |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6231825B1 (en) | 1999-07-29 | 2001-05-15 | Rohm And Haas Company | Production of sodium borohydride from sodium borohydride dihydrate in a fluidized bed dryer |
GB2373634B (en) * | 2000-10-31 | 2004-12-08 | Fuji Electric Co Ltd | Semiconductor device |
US7037814B1 (en) * | 2003-10-10 | 2006-05-02 | National Semiconductor Corporation | Single mask control of doping levels |
WO2006098728A2 (en) * | 2005-03-11 | 2006-09-21 | Amerisource Companies, Lp | Method and system for item delivery |
US9679602B2 (en) | 2006-06-14 | 2017-06-13 | Seagate Technology Llc | Disc drive circuitry swap |
US9305590B2 (en) | 2007-10-16 | 2016-04-05 | Seagate Technology Llc | Prevent data storage device circuitry swap |
US8101997B2 (en) | 2008-04-29 | 2012-01-24 | Infineon Technologies Austria Ag | Semiconductor device with a charge carrier compensation structure in a semiconductor body and method for its production |
US8154078B2 (en) * | 2010-02-17 | 2012-04-10 | Vanguard International Semiconductor Corporation | Semiconductor structure and fabrication method thereof |
US9306034B2 (en) * | 2014-02-24 | 2016-04-05 | Vanguard International Semiconductor Corporation | Method and apparatus for power device with multiple doped regions |
DE102015208097B4 (en) * | 2015-04-30 | 2022-03-31 | Infineon Technologies Ag | Manufacturing a semiconductor device by epitaxy |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6037632A (en) | 1995-11-06 | 2000-03-14 | Kabushiki Kaisha Toshiba | Semiconductor device |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1558506A (en) * | 1976-08-09 | 1980-01-03 | Mullard Ltd | Semiconductor devices having a rectifying metalto-semicondductor junction |
GB2089119A (en) | 1980-12-10 | 1982-06-16 | Philips Electronic Associated | High voltage semiconductor devices |
GB2104287B (en) * | 1981-08-21 | 1985-02-20 | Gen Electric Co Plc | Data storage devices |
GB2131603B (en) * | 1982-12-03 | 1985-12-18 | Philips Electronic Associated | Semiconductor devices |
DE3581348D1 (en) * | 1984-09-28 | 1991-02-21 | Siemens Ag | METHOD FOR PRODUCING A PN TRANSITION WITH A HIGH BREAKTHROUGH VOLTAGE. |
JPH0644578B2 (en) * | 1984-12-21 | 1994-06-08 | 三菱電機株式会社 | Charge transfer device |
US4648174A (en) * | 1985-02-05 | 1987-03-10 | General Electric Company | Method of making high breakdown voltage semiconductor device |
DE3715675A1 (en) * | 1987-05-11 | 1988-12-01 | Messerschmitt Boelkow Blohm | SEMICONDUCTOR ELEMENT |
US4927772A (en) * | 1989-05-30 | 1990-05-22 | General Electric Company | Method of making high breakdown voltage semiconductor device |
DE69209678T2 (en) * | 1991-02-01 | 1996-10-10 | Philips Electronics Nv | Semiconductor device for high voltage use and manufacturing method |
JP3192809B2 (en) * | 1993-03-12 | 2001-07-30 | 株式会社東芝 | High pressure silicon carbide Schottky diode |
EP0661753A1 (en) * | 1994-01-04 | 1995-07-05 | Motorola, Inc. | Semiconductor structure with field limiting ring and method for making |
US5486718A (en) * | 1994-07-05 | 1996-01-23 | Motorola, Inc. | High voltage planar edge termination structure and method of making same |
DE69525003T2 (en) * | 1994-08-15 | 2003-10-09 | Siliconix Inc., Santa Clara | Method of manufacturing a trench-structure DMOS transistor using seven masks |
US5967795A (en) * | 1995-08-30 | 1999-10-19 | Asea Brown Boveri Ab | SiC semiconductor device comprising a pn junction with a voltage absorbing edge |
KR970024275A (en) * | 1995-10-10 | 1997-05-30 | 김광호 | Transistor with increased safe operating area and manufacturing method thereof |
US5940721A (en) * | 1995-10-11 | 1999-08-17 | International Rectifier Corporation | Termination structure for semiconductor devices and process for manufacture thereof |
DE59707158D1 (en) | 1996-02-05 | 2002-06-06 | Infineon Technologies Ag | CONTROLLABLE SEMICONDUCTOR COMPONENT THROUGH FIELD EFFECT |
JPH09268202A (en) * | 1996-03-29 | 1997-10-14 | Mitsubishi Rayon Co Ltd | Syrup and production of the same |
US6002159A (en) * | 1996-07-16 | 1999-12-14 | Abb Research Ltd. | SiC semiconductor device comprising a pn junction with a voltage absorbing edge |
JP3632344B2 (en) * | 1997-01-06 | 2005-03-23 | 日産自動車株式会社 | Semiconductor device |
SE9700156D0 (en) * | 1997-01-21 | 1997-01-21 | Abb Research Ltd | Junction termination for Si C Schottky diode |
US5932894A (en) * | 1997-06-26 | 1999-08-03 | Abb Research Ltd. | SiC semiconductor device comprising a pn junction |
US6870201B1 (en) | 1997-11-03 | 2005-03-22 | Infineon Technologies Ag | High voltage resistant edge structure for semiconductor components |
SE512259C2 (en) * | 1998-03-23 | 2000-02-21 | Abb Research Ltd | Semiconductor device consisting of doped silicon carbide comprising a pn junction which exhibits at least one hollow defect and method for its preparation |
WO1999053550A1 (en) | 1998-04-08 | 1999-10-21 | Siemens Aktiengesellschaft | High-voltage edge termination for planar structures |
DE19816448C1 (en) * | 1998-04-14 | 1999-09-30 | Siemens Ag | Universal semiconductor wafer for high-voltage semiconductor components, their manufacturing process and their use |
US6096663A (en) * | 1998-07-20 | 2000-08-01 | Philips Electronics North America Corporation | Method of forming a laterally-varying charge profile in silicon carbide substrate |
US6355508B1 (en) * | 1998-09-02 | 2002-03-12 | Micron Technology, Inc. | Method for forming electrostatic discharge protection device having a graded junction |
DE19843659A1 (en) * | 1998-09-23 | 2000-04-06 | Siemens Ag | Semiconductor component with a structured semiconductor body |
DE69833743T2 (en) * | 1998-12-09 | 2006-11-09 | Stmicroelectronics S.R.L., Agrate Brianza | Manufacturing method of an integrated edge structure for high voltage semiconductor devices |
-
2000
- 2000-03-20 US US09/531,701 patent/US6642558B1/en not_active Expired - Lifetime
-
2001
- 2001-03-06 EP EP01907578A patent/EP1186050B1/en not_active Expired - Lifetime
- 2001-03-06 WO PCT/EP2001/002531 patent/WO2001071810A2/en active Application Filing
- 2001-03-06 DE DE60142424T patent/DE60142424D1/en not_active Expired - Lifetime
- 2001-03-06 JP JP2001569891A patent/JP2003528470A/en not_active Withdrawn
- 2001-03-06 AT AT01907578T patent/ATE472174T1/en not_active IP Right Cessation
-
2003
- 2003-11-12 US US10/706,836 patent/US6927103B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6037632A (en) | 1995-11-06 | 2000-03-14 | Kabushiki Kaisha Toshiba | Semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017105414A1 (en) * | 2015-12-15 | 2017-06-22 | General Electric Company | Edge termination designs for silicon carbide super-junction power devices |
Also Published As
Publication number | Publication date |
---|---|
WO2001071810A3 (en) | 2002-01-03 |
JP2003528470A (en) | 2003-09-24 |
US6927103B2 (en) | 2005-08-09 |
ATE472174T1 (en) | 2010-07-15 |
DE60142424D1 (en) | 2010-08-05 |
EP1186050A1 (en) | 2002-03-13 |
US6642558B1 (en) | 2003-11-04 |
EP1186050B1 (en) | 2010-06-23 |
US20040104430A1 (en) | 2004-06-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7429523B2 (en) | Method of forming schottky diode with charge balance structure | |
US6821824B2 (en) | Semiconductor device and method of manufacturing the same | |
US8653586B2 (en) | Superjunction device and method for manufacturing the same | |
US6677641B2 (en) | Semiconductor structure with improved smaller forward voltage loss and higher blocking capability | |
US6870201B1 (en) | High voltage resistant edge structure for semiconductor components | |
US7317213B2 (en) | Semiconductor device having super junction structure and method for manufacturing the same | |
JP3959125B2 (en) | Semiconductor device | |
US6927103B2 (en) | Method and apparatus of terminating a high voltage solid state device | |
US6949798B2 (en) | Semiconductor device | |
US20130075855A1 (en) | Manufacturing methods for accurately aligned and self-balanced superjunction devices | |
CN108369963B (en) | Edge termination design for silicon carbide super junction power devices | |
US9647059B2 (en) | Manufacturing methods for accurately aligned and self-balanced superjunction devices | |
US20060118812A1 (en) | Semiconductor device | |
US20190259873A1 (en) | Semiconductor device and semiconductor device manufacturing method | |
US7154177B2 (en) | Semiconductor device with edge structure | |
CN111989778A (en) | Small-spacing super junction MOSFET structure and method | |
CN108807506A (en) | The deep trouth super-junction MOSFET device and its processing technology of with groove grid structure | |
US11158705B2 (en) | Method for forming a superjunction transistor device | |
JP2006526287A (en) | Termination structure for semiconductor device and method of manufacturing the structure | |
WO2023249538A1 (en) | A semiconductor device comprising a lateral super junction field effect transistor | |
US20050259368A1 (en) | Method and apparatus of terminating a high voltage solid state device | |
US10038088B2 (en) | Power MOSFET having improved manufacturability, low on-resistance and high breakdown voltage | |
US20160247879A1 (en) | Trench semiconductor device layout configurations | |
US10217857B2 (en) | Super junction MOSFET and method of manufacturing the same | |
KR101084110B1 (en) | Photon Detecting Semiconductor Sensor Structure Based on Termination Technique using Resistive Poly-Silicon Layer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): JP |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2001907578 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref country code: JP Ref document number: 2001 569891 Kind code of ref document: A Format of ref document f/p: F |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
AK | Designated states |
Kind code of ref document: A3 Designated state(s): JP |
|
AL | Designated countries for regional patents |
Kind code of ref document: A3 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR |
|
WWP | Wipo information: published in national office |
Ref document number: 2001907578 Country of ref document: EP |