WO2001050527A1 - A semiconductor device having a reduced signal processing time and a method of fabricating the same - Google Patents
A semiconductor device having a reduced signal processing time and a method of fabricating the same Download PDFInfo
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- WO2001050527A1 WO2001050527A1 PCT/US2000/020886 US0020886W WO0150527A1 WO 2001050527 A1 WO2001050527 A1 WO 2001050527A1 US 0020886 W US0020886 W US 0020886W WO 0150527 A1 WO0150527 A1 WO 0150527A1
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- porous
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title abstract description 8
- 238000012545 processing Methods 0.000 title description 15
- 239000011148 porous material Substances 0.000 claims abstract description 56
- 238000000034 method Methods 0.000 claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 30
- 238000001465 metallisation Methods 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 35
- 229910052710 silicon Inorganic materials 0.000 claims description 28
- 239000010703 silicon Substances 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 235000012239 silicon dioxide Nutrition 0.000 claims description 16
- 239000000377 silicon dioxide Substances 0.000 claims description 15
- 239000007858 starting material Substances 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 125
- 230000008569 process Effects 0.000 description 21
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- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000013461 design Methods 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
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- 239000010937 tungsten Substances 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
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- 238000005530 etching Methods 0.000 description 5
- -1 for example Chemical compound 0.000 description 5
- 206010010144 Completed suicide Diseases 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
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- 238000005137 deposition process Methods 0.000 description 1
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- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910021426 porous silicon Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229940095676 wafer product Drugs 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/7682—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing the dielectric comprising air gaps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76828—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76832—Multiple layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to fab ⁇ cating integrated circuit devices and, more particularly, to the formation of metallization layers exhibiting reduced signal processing time
- the present invention is directed to a method for solving, or at least reducing the effects of, some or all of the aforementioned problems
- the present invention is directed to a semiconductor device having reduced signal processing time and a method of making same
- the device is comprised of a layer of porous material having a density ranging from approximately 20-80% of the density from which the porous material is made, and a plurality of conductive interconnections formed in the layer of material
- One illustrative embodiment of the present invention comprises providing a layer of material having an original density, reducing the density of the layer of material to approximately 20-80% of the original density of the starting material, forming at least one opening in the layer with a reduced density, and forming a conductive interconnection in the opening
- FIG 1 shows a schematic cross-sectional view of a prior art semiconductor device
- FIGS 2A-2E show schematic cross-sectional views of a semiconductor device according to one illustrative embodiment of the present invention at successive procedural steps for fabricating the semiconductor device
- the present invention is directed to a semiconductor device having a reduced signal processing time, and a method of making same
- the present invention is applicable to a variety of technologies, e g , NMOS, PMOS,
- CMOS complementary metal-oxide-semiconductor
- CMOS complementary metal-oxide-semiconductor
- FIG 1 shows a schematic cross-sectional view of an illustrative semiconductor device, e g , a MOS transistor, fabricated on a semiconductor substrate 1 1 using a typical prior art process
- an interconnect dielectric material layer 1 local interconnect openings 14 are formed and filled with a metal, such as aluminum, cobalt, tungsten, etc , to form local interconnect metal plugs 2
- the local interconnect metal plugs 2 are connected to electrodes 3, which may consist of a metal silicide, for example, cobalt sihcide
- the electrodes 3 provide electrical contact to underlying active junctions 4 representing source and drain regions of the MOS structure
- a gate oxide 5, usually comprised of silicon dioxide, and a gate electrode 6, usually comprised of polysi con, are formed over the substrate 1 1
- a dielectric layer 7 is formed above a plana ⁇ zed surface 17 of the dielectric material layer 1
- contact openings 12 and wiring openings 13 are formed in the dielectric layer 7 and filled with an electrically conductive material, such as aluminum, tungsten, or copper, to form conductive contacts 8 and conductive lines 9.
- the dielectric layer 7 and the conductive material in the contact openings 12 and wiring openings 13 may be separated by a barrier layer 10, which may be comprised of a titanium layer and a titanium nitride layer.
- the openings 12, 13 may be filled with copper using a conventional dual- damascene process.
- the dielectric layer 7 is formed on the entire underlying MOS structure using, for example, a CVD (chemical vapor deposition) process.
- the dielectric layer 7 is patterned by known photolithography and etching processes to generate the contact openings 12 and the wiring openings 13. Due to the different lateral dimensions of the contact openings 12 and the wiring openings 13, the patterning step is performed twice (dual-damascene processing).
- the barrier layer 10 which may be comprised of two different layers, may be formed.
- the contact openings 12 and wiring openings 13 are filed with an electrically conductive material such as aluminum, copper, tungsten, etc., to form the conductive contacts 8 and conductive lines 9.
- an electrically conductive material such as aluminum, copper, tungsten, etc.
- excess metal and barrier material is polished back to a surface 15 of the dielectric layer 7.
- FIG. 1 shows a cross-sectional view of a portion of a wafer product 130 according to one illustrative embodiment of the present invention after the local interconnect processing has been completed.
- local interconnect openings 120 are formed and filled with local interconnect metal plugs 102.
- the local interconnect metal plugs 102 are in contact with electrodes 103, which may be made of a metal suicide, e.g., cobalt suicide.
- the electrodes 103 are in electrical contact with the active junctions 104, which form the drain and source regions of a MOS transistor.
- a gate electrode 106 is electrically isolated from the active junctions 104 by a gate oxide layer 105.
- a dielectric stack which may be comprised of silicon dioxide formed from tetraethoxysilane (TEOS) by an LPCVD or PECVD process, doped or undoped, and possibly comprising an anti-reflecting coating, with a typical thickness of about 700-800 nm, is formed.
- a lithography step is carried out wherein optical proximity correction may be employed depending on the feature size.
- the local interconnect openings 120 are formed by etching the dielectric layer 101, wherein the etching process stops on the etch stop layer (not shown).
- the etch stop layer is removed from the surface defined by the openings 120 by selective etching.
- the photoresist is removed and the wafer is cleaned.
- a barrier layer typically consisting of titanium/titanium nitride is formed in the openings 120 by, for example, a CVD process.
- the openings 120 are then filled in with a conductive material, such as tungsten, by, for example, a chemical vapor deposition process.
- FIG. 2B shows schematically a cross-section of a semiconductor device fabricated according to the principles of one embodiment of the present invention following the local interconnect processing shown in Figure
- an adhesion layer 107 is formed above the dielectric layer 101.
- the adhesion layer 107 may be comprised of a variety of materials, including, but not limited to, silicon dioxide, silicon oxynitride, silicon nitride, etc., and it may have a thickness ranging from approximately 50-1000 A.
- the adhesion layer 107 may be formed above the dielectric layer 101 by a variety of techniques, e.g., deposition.
- the adhesion layer 107 is comprised of a deposited layer of silicon dioxide having a thickness ranging from approximately 5-100 nm (50-1000 A).
- porous material layer 108 will be affixed above the dielectric layer 101.
- this may be accomplished by bonding the adhesion layer 109 to the adhesion layer 107, although the use of such adhesion layers may not be required.
- the adhesion layer 109 may be comprised of a variety of materials, including, but not limited to, silicon dioxide, silicon oxynitride, silicon nitride, etc., and it may have a thickness ranging from approximately 5-100 nm (50-1000 A).
- the adhesion layer 109 may be formed on the porous material layer 108 by a variety of techniques, e.g., deposition.
- the adhesion layer 109 is comprised of a deposited layer of silicon dioxide having a thickness ranging from approximately 5-100 nm(50-1000 A).
- the porous material layer 108 may be comprised of a variety of materials such as silicon, dielectric oxides, glass, quartz, spherical polymers, fluorinated silicon dioxide, fluorinated TEOS, HSQ, other semiconductors, dielectric compounds of semiconductors such as nitrides, etc. are also appropriate.
- the porous material layer 108 may have a thickness ranging from approximately 500-1500 nm (5000-15000 A).
- the porous material layer 108 is comprised of porous silicon having a thickness ranging from approximately 500-1500 nm (5000- 15000 A).
- the porous material layer 108 and the product wafer 130 with the MOS structure are processed separately.
- the porous material layer 108 may be made porous by any of a variety of known techniques, e.g., an annodic reaction process.
- the porous material layer 108 may be formed by taking an original starting material and reducing the density of the starting material by 20-80%.
- an undoped silicon wafer may be wet-etched with an electrolytic hydrofluoric acid to form the layer 108.
- an inert electrode may be attached to one surface of the silicon wafer, and an electric current may be applied while the wafer is exposed to the acid.
- the entire undoped silicon wafer may be thinned and concurrently made porous. It is also possible to treat the silicon wafer to obtain a porous layer of required thickness and to perform a deep hydrogen (H 2 ) implantation process to facilitate the separation of the porous layer 108 when transferring it to the product wafer 130.
- H 2 deep hydrogen
- the degree of porosity of the porous material layer 108 can be controlled by the applied current and process time, as is known by those skilled in the art.
- the control of the degree of porosity may also be controlled by the intensity of ultraviolet light directed on the wafer while the wafer is being etched by the hydrofluoric acid. In this case the degree of control, however, is not as high as the control effect obtained by variation of the supplied current.
- the porous material layer 108 will be formed so as to reduce the density of the original material used to form the porous material layer 108 by approximately 20-80%.
- the porous material layer 108 may be formed so as to have a density ranging from approximately 0.4656-1.8625 grams per cubic centimeter.
- the electrical resistivity of the porous material layer 108 comprised of silicon is substantially higher than that of solid silicon. That is, the adhesion layer 109 may be blanket-deposited on the porous material layer 108 to facilitate a subsequent low temperature wafer bonding step to be described more fully below.
- the porous material layer 108 may also need to be passivated by, for example, a low temperature oxidation process. That is, the porous material layer 108 may be subjected to a heating process at a temperature ranging from approximately 800-1 100°C in an oxygen environment. In the illustrative embodiment where the porous material layer 108 is comprised of approximately 500-1500 nm (5000-15000 A) of silicon, the porous material layer 108 may be subjected to a heating process at a temperature ranging from approximately 800- 1 100°C for a duration ranging from approximately 30- 180 minutes in an oxygen environment. Through this process, portions, if not all, of the porous material layer 108 comprised of silicon may be converted to silicon dioxide.
- Figure 2C depicts the semiconductor device after the porous material layer 108 has been joined to the product wafer 130 by low temperature direct wafer bonding, wherein the adhesion layers 107, 109 on the product wafer 130 and the porous material layer 108, respectively, adhere to each other.
- a plurality of openings 1 10 may also be formed in the porous material layer 108 by, for example, conventional etching-type processes.
- the openings 1 10 may be formed so as to be aligned with the local interconnect metal plugs 102, and they may be formed by any known method.
- the openings 1 10, 1 1 1 may be formed by dual lithography and etch-processing according to conventional dual-damascene processing.
- a protective layer 1 12 may also be formed above the porous material layer 108 prior to the formation of the openings 1 10, 1 1 1.
- the protective layer 1 12 may be provided as the porous material layer 108 may be reactive with subsequent processing operations.
- the protective layer 1 12 is comprised of silicon dioxide having a thickness ranging from 5-100 nm (50-1000 A).
- the thickness of the porous material layer 108, and hence the thickness of the first metallization layer, is determined by design and process requirements.
- the thickness of the porous layer 108 should be large enough to allow the formation of wiring lines having enough volume to accommodate sufficient electrically conductive material to guarantee a desired minimum electrical resistance of the wiring line.
- the aspect ratio of the contact and wiring line openings 1 10, 1 1 1 , and hence the thickness of the porous material layer 108, is restricted by the limitations of the selective etch processing during the dual damascene process.
- the vertical distance of adjacent metallization layers cannot arbitrarily be increased to reduce the stray capacitance.
- the dual damascene process for forming the contact openings 1 10 and the wiring line openings 1 1 1 is carried out after the porous material layer 108 has been bonded to the product wafer 130. It is also possible, however, to form a metallization layer comprised of, for example, the porous material layer 108, openings 1 10, 1 1 1, and/or layers 107, 109, completely separate from the product wafer 130 and to connect the porous material layer 108 with the product wafer 130 after finishing the formation of the porous material layer 108 Thus, the splitting of the manufacturing process may result in savings on production time since the porous material layer 108 and the product wafer 130 may be produced at the same time
- Figure 2D depicts a subsequent step in producing a semiconductor device according to one illustrative embodiment of the present invention
- a barrier layer 1 13 may be deposited on the structure as shown in Figure 2C Accordingly, the surfaces of the openings 1 10 and the surfaces of the openings 1 1 1 are covered by the barrier layer 1 13
- the barrier layer 1 13 may be comprised of a metal, a compound or a conductive ceramic, e g titanium nitride or tantalum nitride, having a high chemical stability to prevent any chemical reaction of the porous material layer 108 comprised of silicon with the contact metal to be filled in the openings 1 10, 1 11
- Figure 2E is a cross-sectional view of the semiconductor device comprised of an illustrative MOS structure and a porous material layer 108 according to one illustrative embodiment of the present invention
- the openings 1 10, 1 1 1 are filled with a conductive material, such as a metal, e g , copper, aluminum, or tungsten, to form
- the porous material layers 108 may be fabricated separately and possibly in advance so that they can be stacked and connected in accordance with the specific design requirements Furthermore, according to one embodiment of the present invention, a large portion of the entire dielectric material separating the MOS structure and the corresponding contacts 131 and wiring lines 133, l e , the dielectric layer 101 and the porous material layer 108, consists of mate ⁇ al having a low dielectric constant
- the porosity of the porous material layer 108 comprised of, for example, silicon is adjusted so as to result in a dielectric constant being approximately the same as the dielectric constant of air, ; e , about one, thereby reducing the dielectric constant of the insulating material within the metallization layer compared to a conventional metallization layer by about 50%
- a reduction of the stray capacitance of the wiring lines 133 of about 50% can be achieved, since the
- the present invention provides a semiconductor device in which a portion of the insulating area of the metallization layer exhibits a lower dielectric constant than metallization layers in conventional devices
- a porous material layer 108 comprised of materials such as any type of semiconducting material, dielectrics (glass, semiconductor oxides, etc ), which are suitable with respect to their dielectric constant and their properties of process handling
- the degree of porosity of the porous material layer 108 the dielectric constant of the layer can be adjusted close to the dielectric constant of air Accordingly, the stray capacitance of the metallization layer is reduced, thereby improving the electrical characteristics of the device
- the present invention provides a method for fabricating a semiconductor device having the features outlined above According to one illustrative embodiment of the method described herein the formation of a porous material layer 108 within a metallization layer may be performed separately from the formation of the product wafer 130 on a second substrate.
- the present invention allows the formation of the metallization layer, i.e., the formation of openings for contacts and wiring lines according to standard processing techniques, either on the product wafer 130 after the porous material layer 108 is formed on the product wafer 130, after the porous material layer 108 is transferred to the product wafer 130, or separately formed in the porous material layer 108, which, when completed, is then transferred to the product wafer 130.
- the metallization layer i.e., the formation of openings for contacts and wiring lines according to standard processing techniques
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Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00952341A EP1245045B1 (en) | 2000-01-05 | 2000-07-31 | A method of fabricating a semiconductor device having a reduced signal processing time |
JP2001550807A JP2003519924A (en) | 2000-01-05 | 2000-07-31 | Semiconductor device having reduced signal processing time and method of manufacturing the same |
DE60037599T DE60037599T2 (en) | 2000-01-05 | 2000-07-31 | MANUFACTURING METHOD FOR SEMICONDUCTOR ARRANGEMENT WITH REDUCED SIGNAL WAY DELAY TIME |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US09/475,572 US6541863B1 (en) | 2000-01-05 | 2000-01-05 | Semiconductor device having a reduced signal processing time and a method of fabricating the same |
US09/475,572 | 2000-01-05 |
Publications (1)
Publication Number | Publication Date |
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WO2001050527A1 true WO2001050527A1 (en) | 2001-07-12 |
Family
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Family Applications (1)
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PCT/US2000/020886 WO2001050527A1 (en) | 2000-01-05 | 2000-07-31 | A semiconductor device having a reduced signal processing time and a method of fabricating the same |
Country Status (6)
Country | Link |
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US (1) | US6541863B1 (en) |
EP (1) | EP1245045B1 (en) |
JP (1) | JP2003519924A (en) |
KR (1) | KR100698495B1 (en) |
DE (1) | DE60037599T2 (en) |
WO (1) | WO2001050527A1 (en) |
Cited By (1)
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CN100343996C (en) * | 2002-06-18 | 2007-10-17 | 三星电子株式会社 | Semiconductor device and producing method thereof |
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KR100350111B1 (en) * | 2000-02-22 | 2002-08-23 | 삼성전자 주식회사 | Wiring of Semiconductor Device and Method for Manufacturing Thereof |
US6566242B1 (en) * | 2001-03-23 | 2003-05-20 | International Business Machines Corporation | Dual damascene copper interconnect to a damascene tungsten wiring level |
US6756620B2 (en) * | 2001-06-29 | 2004-06-29 | Intel Corporation | Low-voltage and interface damage-free polymer memory device |
US7294567B2 (en) * | 2002-03-11 | 2007-11-13 | Micron Technology, Inc. | Semiconductor contact device and method |
JP2004014815A (en) * | 2002-06-07 | 2004-01-15 | Hitachi Ltd | Semiconductor device and method for manufacturing the same |
US7269155B2 (en) * | 2004-01-13 | 2007-09-11 | Meshnetworks, Inc. | System and method for achieving continuous connectivity to an access point or gateway in a wireless network following an on-demand routing protocol, and to perform smooth handoff of mobile terminals between fixed terminals in the network |
US7709903B2 (en) * | 2007-05-25 | 2010-05-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Contact barrier structure and manufacturing methods |
US7834456B2 (en) * | 2009-01-20 | 2010-11-16 | Raytheon Company | Electrical contacts for CMOS devices and III-V devices formed on a silicon substrate |
US8633520B2 (en) | 2010-10-21 | 2014-01-21 | Samsung Electronics Co., Ltd. | Semiconductor device |
KR20180030280A (en) * | 2016-09-12 | 2018-03-22 | 삼성전자주식회사 | Semiconductor device having an interconnection structure |
KR102450580B1 (en) * | 2017-12-22 | 2022-10-07 | 삼성전자주식회사 | Semiconductor Device having a Structure for Insulating Layer under Metal Line |
KR20220034785A (en) * | 2019-07-18 | 2022-03-18 | 도쿄엘렉트론가부시키가이샤 | A method of mitigating lateral film growth in area-selective deposition |
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- 2000-01-05 US US09/475,572 patent/US6541863B1/en not_active Expired - Lifetime
- 2000-07-31 KR KR1020027008757A patent/KR100698495B1/en not_active IP Right Cessation
- 2000-07-31 JP JP2001550807A patent/JP2003519924A/en active Pending
- 2000-07-31 EP EP00952341A patent/EP1245045B1/en not_active Expired - Lifetime
- 2000-07-31 WO PCT/US2000/020886 patent/WO2001050527A1/en active IP Right Grant
- 2000-07-31 DE DE60037599T patent/DE60037599T2/en not_active Expired - Lifetime
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Also Published As
Publication number | Publication date |
---|---|
DE60037599D1 (en) | 2008-02-07 |
KR100698495B1 (en) | 2007-03-23 |
KR20020065641A (en) | 2002-08-13 |
EP1245045B1 (en) | 2007-12-26 |
DE60037599T2 (en) | 2008-04-30 |
EP1245045A1 (en) | 2002-10-02 |
JP2003519924A (en) | 2003-06-24 |
US6541863B1 (en) | 2003-04-01 |
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