WO2001011565A3 - Apparatus and methods for the inspection of objects - Google Patents

Apparatus and methods for the inspection of objects Download PDF

Info

Publication number
WO2001011565A3
WO2001011565A3 PCT/IL2000/000468 IL0000468W WO0111565A3 WO 2001011565 A3 WO2001011565 A3 WO 2001011565A3 IL 0000468 W IL0000468 W IL 0000468W WO 0111565 A3 WO0111565 A3 WO 0111565A3
Authority
WO
WIPO (PCT)
Prior art keywords
image
boundaries
representation
inspection
user defined
Prior art date
Application number
PCT/IL2000/000468
Other languages
French (fr)
Other versions
WO2001011565A2 (en
Inventor
Sharon Duvdevani
Tally Gilat-Bernshtein
Eyal Klingbell
Meir Mayo
Shmuel Rippa
Zeev Smilansky
Original Assignee
Orbotech Ltd
Sharon Duvdevani
Gilat Bernshtein Tally
Eyal Klingbell
Meir Mayo
Shmuel Rippa
Zeev Smilansky
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11073120&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2001011565(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Orbotech Ltd, Sharon Duvdevani, Gilat Bernshtein Tally, Eyal Klingbell, Meir Mayo, Shmuel Rippa, Zeev Smilansky filed Critical Orbotech Ltd
Priority to JP2001516141A priority Critical patent/JP2003506801A/en
Priority to AU64655/00A priority patent/AU6465500A/en
Publication of WO2001011565A2 publication Critical patent/WO2001011565A2/en
Publication of WO2001011565A3 publication Critical patent/WO2001011565A3/en

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30152—Solder

Landscapes

  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Image Analysis (AREA)
  • Image Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

This invention discloses a system and method for inspecting objects, the method includes creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries within the image, acquiring an image of an object under inspection comprising a second representation of boundaries within the image, and comparing the second representation of boundaries to said at least partially vectorized first representation of boundaries, thereby to identify defects. A method and system for image processing in a software environment, the method including providing to a software based image processor a combination of user defined regions and defect triggers received from a hardware processor, and inspecting each of the user defined regions and regions surrounding hardware defect triggers each with a dynamically chosen set of inspection algorithms is also disclosed.
PCT/IL2000/000468 1999-08-05 2000-08-03 Apparatus and methods for the inspection of objects WO2001011565A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001516141A JP2003506801A (en) 1999-08-05 2000-08-03 Object inspection apparatus and method
AU64655/00A AU6465500A (en) 1999-08-05 2000-08-03 Apparatus and methods for the inspection of objects

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL131283A IL131283A (en) 1999-08-05 1999-08-05 Apparatus and methods for inspection of objects
IL131283 1999-08-05

Publications (2)

Publication Number Publication Date
WO2001011565A2 WO2001011565A2 (en) 2001-02-15
WO2001011565A3 true WO2001011565A3 (en) 2002-05-02

Family

ID=11073120

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2000/000468 WO2001011565A2 (en) 1999-08-05 2000-08-03 Apparatus and methods for the inspection of objects

Country Status (4)

Country Link
JP (1) JP2003506801A (en)
AU (1) AU6465500A (en)
IL (1) IL131283A (en)
WO (1) WO2001011565A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL133696A (en) 1999-12-23 2006-04-10 Orbotech Ltd Cam reference inspection of multi-color and contour images
US7355692B2 (en) 2004-03-05 2008-04-08 Orbotech Ltd System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery
US8855400B2 (en) * 2012-03-08 2014-10-07 Kla-Tencor Corporation Detection of thin lines for selective sensitivity during reticle inspection using processed images
US10713776B2 (en) * 2017-04-13 2020-07-14 Instrumental, Inc. Method for predicting defects in assembly units
CN112669302B (en) * 2020-12-30 2023-07-28 北京市商汤科技开发有限公司 Hanger defect detection method and device, electronic equipment and storage medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2687091A1 (en) * 1992-02-06 1993-08-13 Aerospatiale Method for automated ckecking of cuts made by a machine for cutting into a strip
US5619429A (en) * 1990-12-04 1997-04-08 Orbot Instruments Ltd. Apparatus and method for inspection of a patterned object by comparison thereof to a reference

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5619429A (en) * 1990-12-04 1997-04-08 Orbot Instruments Ltd. Apparatus and method for inspection of a patterned object by comparison thereof to a reference
FR2687091A1 (en) * 1992-02-06 1993-08-13 Aerospatiale Method for automated ckecking of cuts made by a machine for cutting into a strip

Also Published As

Publication number Publication date
IL131283A0 (en) 2001-01-28
AU6465500A (en) 2001-03-05
IL131283A (en) 2008-07-08
WO2001011565A2 (en) 2001-02-15
JP2003506801A (en) 2003-02-18

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