WO2001007864A3 - Method and apparatus for performing calibration-based absolute shape measurement using phase-shifting projected fringe profilometry - Google Patents

Method and apparatus for performing calibration-based absolute shape measurement using phase-shifting projected fringe profilometry Download PDF

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Publication number
WO2001007864A3
WO2001007864A3 PCT/US2000/019834 US0019834W WO0107864A3 WO 2001007864 A3 WO2001007864 A3 WO 2001007864A3 US 0019834 W US0019834 W US 0019834W WO 0107864 A3 WO0107864 A3 WO 0107864A3
Authority
WO
WIPO (PCT)
Prior art keywords
phase
profilometry
shape measurement
projected fringe
absolute shape
Prior art date
Application number
PCT/US2000/019834
Other languages
French (fr)
Other versions
WO2001007864A2 (en
Inventor
Hongyu Liu
Benjamin A. Bard
Original Assignee
Hongyu Liu
Bard Benjamin A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hongyu Liu, Bard Benjamin A filed Critical Hongyu Liu
Priority to AU61157/00A priority Critical patent/AU6115700A/en
Publication of WO2001007864A2 publication Critical patent/WO2001007864A2/en
Publication of WO2001007864A3 publication Critical patent/WO2001007864A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2416—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures of gears

Abstract

A method and apparatus for performing absolute shape measurement using phase-shifting projected fringe profilometry. Techniques are disclosed to permit calibration of the optical system's distortion characteristics in both phase and lateral directions. Such a calibration utilizes specialized examination surfaces, methods to examine those surfaces and algorithms to process the acquired data, all of which are provided by the present invention. A novel calibration tool incorporating improved examination surfaces is also disclosed.
PCT/US2000/019834 1999-07-21 2000-07-21 Method and apparatus for performing calibration-based absolute shape measurement using phase-shifting projected fringe profilometry WO2001007864A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU61157/00A AU6115700A (en) 1999-07-21 2000-07-21 Method and apparatus for performing calibration-based absolute shape measurementusing phase-shifting projected fringe profilometry

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14484699P 1999-07-21 1999-07-21
US60/144,846 1999-07-21

Publications (2)

Publication Number Publication Date
WO2001007864A2 WO2001007864A2 (en) 2001-02-01
WO2001007864A3 true WO2001007864A3 (en) 2009-11-19

Family

ID=22510418

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/019834 WO2001007864A2 (en) 1999-07-21 2000-07-21 Method and apparatus for performing calibration-based absolute shape measurement using phase-shifting projected fringe profilometry

Country Status (2)

Country Link
AU (1) AU6115700A (en)
WO (1) WO2001007864A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2686638A1 (en) * 2011-03-17 2014-01-22 Cadscan Limited Scanner
US10330465B2 (en) * 2014-08-08 2019-06-25 Applied Research Associates, Inc. Systems, methods, and apparatuses for measuring deformation of a surface
JP2019510658A (en) * 2016-03-14 2019-04-18 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ Calibration of additive manufacturing equipment
CN108088387A (en) * 2017-12-21 2018-05-29 重庆大学 Six degree of freedom gear measuring system based on digital raster
DE102019114892A1 (en) * 2019-06-03 2020-12-03 Klingelnberg Gmbh Roughness standard and method for calibrating and / or checking a roughness probe system of a gear cutting machine, gear measuring system and reference element
CN111189408A (en) * 2020-01-08 2020-05-22 西安工业大学 Three-dimensional measuring device and measuring method for tooth surface of projection Moire gear
CN111256612A (en) * 2020-01-21 2020-06-09 河南科技大学 Machine vision-based method for measuring straight tooth involute small-modulus gear
CN112013787B (en) * 2020-10-21 2021-01-26 四川大学 Blade three-dimensional contour reconstruction method based on blade self-characteristics

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5129724A (en) * 1991-01-29 1992-07-14 Wyko Corporation Apparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sample
WO1999028704A1 (en) * 1997-12-02 1999-06-10 Universita' Degli Studi Di Brescia Process for the measurement of three dimensional (3d) profiles by means of structured light projection
US6040910A (en) * 1998-05-20 2000-03-21 The Penn State Research Foundation Optical phase-shift triangulation technique (PST) for non-contact surface profiling

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5129724A (en) * 1991-01-29 1992-07-14 Wyko Corporation Apparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sample
WO1999028704A1 (en) * 1997-12-02 1999-06-10 Universita' Degli Studi Di Brescia Process for the measurement of three dimensional (3d) profiles by means of structured light projection
US6040910A (en) * 1998-05-20 2000-03-21 The Penn State Research Foundation Optical phase-shift triangulation technique (PST) for non-contact surface profiling

Also Published As

Publication number Publication date
AU6115700A (en) 2001-02-13
WO2001007864A2 (en) 2001-02-01

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