WO2000077489A1 - Procede et dispositif de representation de particules microscopiques - Google Patents

Procede et dispositif de representation de particules microscopiques Download PDF

Info

Publication number
WO2000077489A1
WO2000077489A1 PCT/EP2000/005269 EP0005269W WO0077489A1 WO 2000077489 A1 WO2000077489 A1 WO 2000077489A1 EP 0005269 W EP0005269 W EP 0005269W WO 0077489 A1 WO0077489 A1 WO 0077489A1
Authority
WO
WIPO (PCT)
Prior art keywords
particle
scattered light
radiation field
particles
illumination
Prior art date
Application number
PCT/EP2000/005269
Other languages
German (de)
English (en)
Inventor
Dirk David Goldbeck
Original Assignee
Dirk David Goldbeck
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dirk David Goldbeck filed Critical Dirk David Goldbeck
Publication of WO2000077489A1 publication Critical patent/WO2000077489A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N2015/025—Methods for single or grouped particles

Definitions

  • the invention relates to a method for particle imaging, in particular a method for detecting three-dimensional particle arrangements or movements, such as e.g. a method for measuring the positions and velocities of microscopic particles in a plasma.
  • the invention also relates to a device for implementing the method and applications of three-dimensional particle detection.
  • the object of the invention is to provide an improved method for particle imaging, with which the limitations of the conventional methods are overcome and which in particular enables the simultaneous recording of all three spatial coordinates for any static or dynamic particle arrangements.
  • the object of the invention is also to provide a device for implementing such an improved method and new uses of the method.
  • an illumination with a radiation field which is two-dimensionally extended perpendicular to its direction of propagation and which is composed of radiation components with different wavelengths is used.
  • the radiation field consisting of at least two spectrally different partial beams
  • a predetermined spatial wavelength and / or intensity distribution is given in accordance with the two-dimensional extent, so that a particle is irradiated depending on its position in the radiation field with a specific, position-dependent wavelength or several wavelengths, the associated ones Radiation components a posi- tion-dependent intensity ratio.
  • This simultaneous irradiation of all of the particles to be observed with a spatial wavelength or intensity distribution provides a wavelength or intensity coding in a scattered light image which is recorded by the particle arrangement in a direction which deviates from the direction of propagation of the radiation field for particle illumination.
  • the wavelength-selective recording of scattered light images of the particle arrangement provides for each particle two position coordinates from the two-dimensional scattered light image and a third position coordinate from the wavelength or intensity coding, so that the entire spatial coordinate information of all particles belonging to the particle arrangement can be determined simultaneously with a single image recording.
  • the radiation field comprises two fanned out partial beams of different wavelengths, the intensity of the first partial beam increasing homogeneously from one side to the other of the reference surface in a reference surface oriented perpendicular to the direction of propagation of the radiation field, while the intensity of the second partial beam is homogeneously reduced .
  • Two scattered light images corresponding to the two wavelengths of the partial beams are recorded and the spatial coordinates of the particle are determined for each particle from the ratios of the two associated scattered light intensities and the intensity profiles of the partial beams in the radiation field.
  • overlapping intensity profiles with three or more wavelengths can also be provided.
  • the invention is suitable for the observation of arbitrary particle arrangements.
  • the particle arrangement can be a single particle that is located in the observed spatial region or a multiplicity of particles.
  • the particles are e.g. B. in a carrier medium which is gaseous or can be fluid, freely movable.
  • a carrier medium which is gaseous or can be fluid, freely movable.
  • particles in a high-frequency plasma, aerosols or colloidal particles in a liquid can be imaged using the method according to the invention.
  • the particle size can vary depending on the application, the wavelengths of the radiation field for providing evaluable scattered light images preferably being selected on the basis of the Mie scattering.
  • the invention can also be used with scattered light images based on Rayleigh scattering.
  • the invention is implemented, for example, for particles with characteristic sizes in the range from 1 ⁇ m to 15 ⁇ m using visible light for the illuminating radiation field.
  • smaller particles for example with characteristic sizes in the nm range, can also be detected, radiation with shorter wavelengths, for example X-rays, being used for particle illumination, if necessary.
  • the invention has the following advantages. For the first time, real-time observation of the spatial arrangement and movement of particle arrangements is made possible with a single observation direction, with all 3 spatial coordinates of all particles being recorded simultaneously.
  • the imaging system is simply constructed from commercially available components and can easily be adapted to various measurement or imaging tasks. The image acquisition and evaluation takes place with high speed and reproducibility.
  • FIG. 2 is a schematic representation of an inventive appropriate device for detecting particle arrangements
  • FIG. 3 is a plan view of the structure of a device according to FIG. 2,
  • FIG. 4 shows a side view of the structure according to FIG. 3,
  • the particles 1 and 2 are located in a three-dimensional sample space with the spatial coordinates (x 0 , yi, z x ) and (x 0 , y 2 , z 2 ).
  • the particle arrangement is illustrated in the partial image at the top right of FIG. 1.
  • the y and z directions lie in the plane of the drawing.
  • the x direction extends vertically upwards from the plane of the drawing.
  • the particle arrangement is illuminated with an illumination direction and imaged with an observation direction. In general, the lighting and observation directions are not parallel to each other.
  • the observation angle between the two reference directions is selected depending on the application in order to achieve optimal scattered light images (see below).
  • the direction of illumination and the direction of observation are perpendicular to the xz and xy planes, so that the angle of observation is 90 °.
  • wavelength or color coding takes place with the illumination of the particles.
  • the particle illumination takes place with a radiation field extending transversely to the direction of illumination with a predetermined spatially inhomogeneous wavelength and / or intensity distribution.
  • the two-dimensional radiation field thus extends in a reference surface or plane that runs perpendicular to the drawing plane or parallel to the xz plane and is shown pivoted into the drawing plane in the left partial image of FIG. 1 for reasons of clarity.
  • the illuminating radiation field has a spatially inhomogeneous wavelength and / or intensity distribution.
  • the radiation field consists of partial beams of different wavelengths such that each point in the reference surface of the radiation field is penetrated by several partial beams of different wavelengths with location-specific intensity ratios (or alternatively by a partial beam with a location-specific wavelength). Since only a coding in the z direction (or generally: in the direction of observation) has to be carried out for the spatially resolved particle imaging, the radiation field is preferably composed only of two partial radiations of different wavelengths which have a predetermined intensity in the z direction. ⁇ S course I (z), but in the x-direction a (in each case z-dependent) constant intensity or a predetermined, z. B. have a known intensity profile through measurement.
  • the intensity profiles of the partial beams in the z direction are selected such that the first partial beam (A) has a decreasing intensity with increasing z values and, in the opposite direction, the second partial beam (B) has an increasing intensity. This situation is shown in Fig. 1 (top left).
  • the first particle 1 contains scattered light with a high proportion of the first wavelength ⁇ A and a small proportion of the second wavelength ⁇ B or from the second particle 2 scattered light with a large proportion of the second wavelength ⁇ B and a small portion of the first wavelength ⁇ A.
  • the invention now provides for two scattered light images to be taken in the direction of observation, each of which corresponds to the scattered light with one of the two wavelengths.
  • a filter-camera combination is used, which is explained in detail below.
  • the result of the image acquisition is illustrated in the partial image at the bottom right in FIG. 1.
  • the scattered light image corresponding to the first wavelength ⁇ A results in a high intensity Ii ( ⁇ A ) for the first particle 1 and a low intensity I 2 ( ⁇ A ) for the second particle 2.
  • the z coordinates of the particles can be calculated immediately, if necessary taking into account a calibration. Together with the x and y coordinates from the image acquisition, all three spatial coordinates result for each particle through the simultaneous acquisition and evaluation of the scattered light images.
  • the calibration or correction of this z-coordinate determination is particularly necessary if the particle arrangement comprises particles with a size distribution. Since particles of different sizes have different scattered light emission characteristics, a size correction must be carried out to evaluate the intensity ratios of the scattered light images, which correction is also derived from the scattered light images. This is done by determining the sum of the scattered light intensities of a particle in the wavelength-specific scattered light images
  • the calibration of the z-coordinate determination is also required in a corresponding manner if the particle arrangement comprises particles with different materials or shadowing effects (illuminated particles are covered by other illuminated or unilluminated particles).
  • intensity profile I (z) of the radiation field in the form of a Gaussian function
  • other intensity profiles can also be selected (e.g. straight ramp profiles or any monotonous intensity profiles, see below).
  • more than two can to
  • Partial beams are superimposed on the illuminating radiation field, each having different wavelengths, in which case a correspondingly larger number of scattered light images must be recorded. Finally, it is also possible to provide only an areally expanded partial beam with a spectral course in the z direction as the illumination radiation field.
  • the principle illustrated in FIG. 1 using the example of two particles can easily be extended to any number of particles, provided the particles do not obscure one another.
  • the schematic overview representation according to FIG. 2 shows a top view of an optical system for observing the particle arrangement 100 in a (not shown) plasma reactor.
  • the optical system which represents a first embodiment of the invention comprises an illuminating device 200 and an imaging device 300.
  • the illuminating device 200 is designed to generate the planar, wavelength-coded radiation field for particle illumination.
  • the imaging device 300 is provided to take scattered light images of the particle arrangement in accordance with the wavelength components contained in the radiation field.
  • the illuminating device 200 comprises two radiation sources 210, 220 for generating partial beams, which are superimposed with an overlay optics 230 and an aperture 240 is shaped into the desired radiation field.
  • the imaging device 300 comprises a beam splitter optics 310 for distributing the scattered light emanating from the particle arrangement 100 over two filter-camera combinations 320, 330.
  • the radiation sources 210, 220 are constructed essentially identically and each comprise a light source 211, 221, an expansion optics 212, 222, an optical spatial filter 213, 223 for forming the desired intensity profile of the respective partial beam and a collimator optics 214, 224.
  • the light sources 211, 221 are continuous wave lasers, e.g. gas lasers or diode lasers.
  • the light sources 211, 221 emit at different wavelengths, so that, for example, a green and a blue emission result. The wavelength difference is of the order of approx. 100 nm or below up to approx.
  • the wavelength difference is selected as a function of the scattering characteristic of the particles to be observed and is preferably set as small as possible in order to keep the wavelength-determined differences in the dependence of the scattered light measurement on the observation angle small.
  • the output power of the light sources 211, 221 is also selected depending on the application.
  • the intensity curve of the respective partial beam is set with the optical spatial filters 213, 214.
  • the reference numerals 215, 225 indicate the corresponding partial beam intensity profiles, which are set here in a Gaussian shape.
  • single-mode glass fibers or beam-shaping elements such as those described by FM Duckkey et al. in "Opt. Eng.”, Vol. 35, 1996, p. 3285 ff., can be provided for setting the intensity profile.
  • the beam-shaping elements can be used, for example, to set ramp-shaped intensity profiles with a predetermined slope.
  • the intensity profiles can alternatively also be generated by gray filter elements with wedge-shaped transmission profiles. »A.
  • the partial beams from the radiation sources 210, 220 are superimposed on the superimposing optics 230 in order to generate the desired radiation field.
  • the superimposition optics 230 is, for example, a beam splitter cube or, in particular to minimize the intensity losses in the optical system, a dichroic mirror which is set up to pass the partial beam from the radiation source 210 or to reflect the partial beam from the radiation source 220.
  • the partial beams are superimposed such that the maxi a of the intensity profiles are offset from one another by a predetermined distance in the z direction. A falling and a rising flank of the intensity profiles 215, 225 are thus superimposed to form the desired illumination radiation field.
  • the flanks 240 of the partial beams which do not participate in the desired superimposition are masked out with the aperture 240, so that the intensity profile designated by the reference numeral 241 results as shown in FIG. 1 (top left).
  • the particle arrangement 100 is irradiated with this radiation field, which has a spatially inhomogeneous wavelength composition in the z direction and a homogeneous or predetermined known wavelength composition in the x direction.
  • an imaging device eg optical lens
  • Characteristic cross-sectional dimensions of the aperture 240 or the illuminating radiation field are in the mm to cm range in the application shown.
  • the particle arrangement 100 is imaged with the imaging device 300 at a specific observation angle.
  • the beam splitter optics 310 is a beam splitter cube or, in turn, in particular for optimal use of the scattered light intensity, a dichroic mirror.
  • Each filter-camera combination 320, 330 each comprises a stray light filter 321, 331 and a camera 322, 332 for image recording.
  • the litter Light filters 321, 331 are preferably interference filters with transmission maxima at the emission wavelengths of the light sources 211 and 221, however, other wavelength-selective elements can alternatively be used as scattered light filters.
  • the cameras 322, 332 are preferably CCD cameras and are adjusted in such a way that both cameras record the same section of the particle arrangement 100. In special applications, it may be sufficient to use color-sensitive CCD cameras instead of the filter-camera combinations 320, 330, which are set up to record separate color separations of the scattered light image of the particle arrangement 100.
  • the imaging device is equipped with an imaging lens (not shown) with which the scattered light emanating from the particle arrangement 100 is directed onto the beam splitter optics 310.
  • This lens is preferably a telecentric lens with the smallest possible opening angle (preferably below +/- 0.05 °).
  • the correction device contains a combination of photodiodes which are designed to measure the intensities of the two lasers.
  • the photodiodes are preferably constructed with a beam splitter and interference filters, such as the filter-camera combinations 320 and 330, but are arranged behind the particles 100 in continuation of the beam direction of the original radiation field 241.
  • the correction device can also contain a further analyzer camera, which is designed to analyze the quality of the radiation field 241.
  • the analyzer camera can be used to detect any contamination (e.g. dust) or other disturbances in the particle path in the beam path. Detect lighting and measure the beam profile for subsequent calibration.
  • the analyzer camera is also arranged behind the particles 100 in continuation of the beam direction of the original radiation field 241.
  • a further laser-camera combination can be provided for the lateral illumination or observation of the particles 100.
  • This additional laser-camera combination serves to further increase the above-described image resolution achieved by wavelength or intensity coding in a reference direction perpendicular or oblique to the projections of the particle cloud imaged by the cameras 320, 321.
  • the laser is oriented in such a way that the particles are illuminated with an expanded laser beam from a reference direction which differs both from the direction of irradiation of the radiation field 241 and from the direction of observation of the imaging device 300.
  • the particles are at an angle of z. B. 90 ° compared to the reference direction.
  • the additional laser camera combination enables stereoscopic observation of the particles.
  • the angle between the radiation field 241 and the direction of observation of the imaging device 300 is not equal to 90 °.
  • FIGS. 3 and 4 A further embodiment of a device according to the invention for detecting three-dimensional particle arrangements in plasma reactors is shown in FIGS. 3 and 4 shown in plan view and side view.
  • the lighting device 200 and the imaging device 300 are fastened to a double pivot bearing 510 of a carrier system 500 via brackets 250, 350.
  • the double pivot bearing 510 is on a tripod 520 o arranged a holding bridge over the plasma chamber 400 and allows a horizontal pivoting of the illumination and imaging devices 200, 300 with respect to the sample chamber 400. With this, any observation angle for imaging the particle arrangement 100 in the sample chamber 400 can be set.
  • the sample chamber 400 is a plasma reactor known per se, which has transparent side walls for image acquisition. Details relating to the operation and control of the plasma reactor and the lighting and imaging devices 200, 300 are shown in FIGS. 3 and 4 not shown.
  • FIG. 5 shows two scattered light images of a uniform particle arrangement which corresponds to the green (top) and blue (bottom) scattered light components.
  • the particle images are each represented as black dots with a larger diameter for higher intensities and a smaller diameter for small intensities.
  • the particle arrangement shown is a group of particles of identical size.
  • the pictures show that the scattering intensity in the green spectral range for the Particles with larger z values is larger than for particles with smaller z values.
  • the reverse conditions result for the scattering intensity in the blue spectral range. This already shows qualitatively the advantageous function of the wavelength coding according to the invention in particle lighting.
  • Iges Iiety + Ibiau
  • the ratio of the scattering intensity I s to the lighting intensity I 0 is shown on a logarithmic scale for the various observation angles.
  • the irradiated particles have a radius of 1.69 ⁇ m.
  • the solid or dashed lines refer to the illumination and measurement of the scattered light with vertical or parallel polarization with respect to the plane spanned by the directions of illumination and observation.
  • the graphs show a strong dependence of the scattered light intensity on the observation angle.
  • the intensity ratio shown has a minimum, in particular at an observation angle of 90 °.
  • the advantage of the The arrangement shown in FIGS. 3 and 4 consists in the provision of the rotary bearing 510. In specific applications, the optimal 7AL scattered light conditions can be determined.
  • the invention is advantageously used in all technical processes in which particles are movable in three-dimensional spaces and are to be observed. For example, spraying or atomizing processes on nozzles can be observed and analyzed. It is also possible to observe the reaction spaces during etching or sputtering in chip production and to evaluate or control them with regard to the generation of dust. Another application relates to nuclear fusion technology. Dust formation processes occur in a fusion plasma chamber, which also have a disruptive effect.
  • One application of the invention consists in observing the locations and / or depositing the dust clouds.
  • a constructive use of the invention is possible in particular in connection with the manipulation of disordered or ordered particle clouds.
  • further applications of the invention lie in the observation of the manipulation (eg targeted deposition) of particles in nanotechnology, the observation of the Rayleigh scattering preferably being implemented here.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

La présente invention concerne la représentation d'un dispositif particulaire (100) faisant intervenir les étapes suivantes: éclairage d'une partie d'espace tridimensionnelle dans laquelle se déplace librement au moins une particule microscopique du dispositif particulaire (100), l'éclairage étant réalisé au moyen d'un champ de rayonnement d'éclairage comprenant au moins deux parties de rayonnement de spectres différents (215, 225), qui présentent des variations d'intensité données dans une direction de propagation perpendiculaire à une surface de référence; représentation d'images en lumière diffusée de la partie d'espace, les dites images représentant différentes longueurs d'onde du champ de rayonnement d'éclairage; et détermination d'une coordonnée spatiale de la particule à partir des variations d'intensité du champ de rayonnement d'éclairage et des intensités de lumière diffusée de la particule dans les images en lumière diffusée.
PCT/EP2000/005269 1999-06-10 2000-06-07 Procede et dispositif de representation de particules microscopiques WO2000077489A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19926494.5 1999-06-10
DE1999126494 DE19926494C2 (de) 1999-06-10 1999-06-10 Verfahren und Vorrichtung zur Abbildung von mikroskopisch kleinen Teilchen

Publications (1)

Publication Number Publication Date
WO2000077489A1 true WO2000077489A1 (fr) 2000-12-21

Family

ID=7910806

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2000/005269 WO2000077489A1 (fr) 1999-06-10 2000-06-07 Procede et dispositif de representation de particules microscopiques

Country Status (2)

Country Link
DE (1) DE19926494C2 (fr)
WO (1) WO2000077489A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003016885A1 (fr) 2001-08-16 2003-02-27 Krones Ag Procede et dispositif de controle de bouteilles fermees et remplies, en particulier dans la zone de la paroi laterale desdites bouteilles situee a proximite du fond
GB2494733A (en) * 2011-09-14 2013-03-20 Malvern Instr Ltd Measuring particle size distribution by light scattering

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7772579B2 (en) 2006-05-18 2010-08-10 Massachusetts Institute Of Technology Method and apparatus for simultaneously measuring a three dimensional position of a particle in a flow
US7821636B2 (en) 2006-05-18 2010-10-26 Massachusetts Institute Of Technology Method and apparatus for measuring a position of a particle in a flow
US7920261B2 (en) 2008-02-11 2011-04-05 Massachusetts Institute Of Technology Method and apparatus for detecting and discriminating particles in a fluid
DE102008025062B4 (de) * 2008-05-26 2016-07-28 Airbus Defence and Space GmbH Stroboskopisches Messvorrichtung und Verfahren hierzu

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1588650A (fr) * 1967-10-13 1970-04-17
JPS5786059A (en) * 1980-11-17 1982-05-28 Mitsubishi Heavy Ind Ltd Measuring device for flow trail
JPS62192630A (ja) * 1986-02-20 1987-08-24 Babcock Hitachi Kk 粒子濃度測定装置
US4988190A (en) * 1990-01-05 1991-01-29 Trustees Of Princeton University Absorption line filter window and method for velocity measurements by light scattering
JPH05297011A (ja) * 1992-04-20 1993-11-12 Mitsubishi Heavy Ind Ltd プラズマ流速計
US5883707A (en) * 1996-09-05 1999-03-16 Robert Bosch Gmbh Method and device for sensing three-dimensional flow structures
US5905568A (en) * 1997-12-15 1999-05-18 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Stereo imaging velocimetry

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2084099C (fr) * 1991-12-06 1996-06-18 James V. Bacus Methode et appareil d'analyse cellulaire automatisee
DE4200309A1 (de) * 1992-01-09 1993-07-15 Gerhard Arnold Dr Seiler Vorrichtung und verfahren zur ermittlung der stroemung eines stroemungsmediums
DE19713637C2 (de) * 1997-04-02 1999-02-18 Max Planck Gesellschaft Teilchenmanipulierung

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1588650A (fr) * 1967-10-13 1970-04-17
JPS5786059A (en) * 1980-11-17 1982-05-28 Mitsubishi Heavy Ind Ltd Measuring device for flow trail
JPS62192630A (ja) * 1986-02-20 1987-08-24 Babcock Hitachi Kk 粒子濃度測定装置
US4988190A (en) * 1990-01-05 1991-01-29 Trustees Of Princeton University Absorption line filter window and method for velocity measurements by light scattering
JPH05297011A (ja) * 1992-04-20 1993-11-12 Mitsubishi Heavy Ind Ltd プラズマ流速計
US5883707A (en) * 1996-09-05 1999-03-16 Robert Bosch Gmbh Method and device for sensing three-dimensional flow structures
US5905568A (en) * 1997-12-15 1999-05-18 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Stereo imaging velocimetry

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 006, no. 168 (P - 139) 2 September 1982 (1982-09-02) *
PATENT ABSTRACTS OF JAPAN vol. 012, no. 046 (P - 665) 12 February 1988 (1988-02-12) *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 092 (P - 1693) 15 February 1994 (1994-02-15) *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003016885A1 (fr) 2001-08-16 2003-02-27 Krones Ag Procede et dispositif de controle de bouteilles fermees et remplies, en particulier dans la zone de la paroi laterale desdites bouteilles situee a proximite du fond
GB2494733A (en) * 2011-09-14 2013-03-20 Malvern Instr Ltd Measuring particle size distribution by light scattering
CN104067105A (zh) * 2011-09-14 2014-09-24 马尔文仪器有限公司 用于通过光散射测量颗粒尺寸分布的设备和方法
US9869625B2 (en) 2011-09-14 2018-01-16 Malvern Instruments Limited Apparatus and method for measuring particle size distribution by light scattering

Also Published As

Publication number Publication date
DE19926494C2 (de) 2001-07-26
DE19926494A1 (de) 2000-12-21

Similar Documents

Publication Publication Date Title
EP2411787B1 (fr) Dispositif pour déterminer la granulométrie de particules
DE3913228C2 (de) Spektroskopiesystem diffuser Reflexion und Verfahren zum Erhalten eines diffusen Reflexionsspektrums
EP0924493B1 (fr) Mesurement du diamètre avec des bords de diffraction et correction électronique d'une pollution
DE69029694T2 (de) Verfahren und vorrichtung zur analyse der teilchengrösse
EP1145303A1 (fr) Dispositif et procede de controle optique de processus de fabrication de surfaces microstructurees dans la production de semi-conducteurs
DE102007052551A1 (de) Konfiguration eines Laser-Scanning -Mikroskops für eine Rasterbildkorrelationsspektroskopiemessung sowie Verfahren zur Durchführung und Auswertung einer solchen Messung
EP3056934B1 (fr) Tete de mesure d'un dispositif endoscopique et procede d'inspection et mesure d'un objet
DE10109929A1 (de) Vorrichtung zur Wellenfronterfassung
DE2360197A1 (de) Verfahren zur erhoehung der schaerfentiefe und/oder des aufloesungsvermoegens von lichtmikroskopen
DE102009000528A1 (de) Inspektionsvorrichtung und -verfahren für die optische Untersuchung von Objektoberflächen, insbesondere von Waferoberflächen
DE102021105946A1 (de) Messvorrichtung und Verfahren zur Rauheits- und/oder Defektmessung an einer Oberfläche
DE10155002A1 (de) Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
DE102012204674A1 (de) Strahlregelungsvorrichtung für einen EUV-Beleuchtungsstrahl
DE10118463A1 (de) Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
DE102016206088A1 (de) Verfahren zum Bestimmen der Dicke einer kontaminierenden Schicht und/oder der Art eines kontaminierenden Materials, optisches Element und EUV-Lithographiesystem
DE3436275A1 (de) Vorrichtung zum erzeugen von bildern mit hohem aufloesungsvermoegen ohne praezisionsoptiken
DE102012005417B4 (de) Vorrichtung und Verfahren zur winkelaufgelösten Streulichtmessung
DE19926494C2 (de) Verfahren und Vorrichtung zur Abbildung von mikroskopisch kleinen Teilchen
DE68904316T2 (de) Verfahren zur kontrastoptimierung im bild einer probe.
AT402860B (de) Verfahren und vorrichtung zur prüfung von transparenten gegenständen
DE2306764A1 (de) Mikroschwaerzungsmessverfahren und mikroschwaerzungsmesser bzw. mikrodensitometer
WO2017045982A1 (fr) Dispositif et procédé pour l'analyse confocale chromatique d'un échantillon
DE4324154A1 (de) Vorrichtung und Verfahren zur räumlich hochauflösenden Analyse mindestens einer Gaskomponente in einem Gasgemisch
DE4338307C1 (de) Verfahren zur optischen Detektion von Objekten oder Objektströmen, deren Oberflächen Licht zu reflektieren oder zu streuen imstande sind, die selbstaffine oder selbstähnliche oder fraktale Muster oder Strukturen aufweisen
EP1249698A1 (fr) Réflectomètre et procédé de détermination du facteur de réflexion d'un objet

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP KR RU SG US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP