WO2000076064A1 - Converter for surface acoustic waves - Google Patents

Converter for surface acoustic waves Download PDF

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Publication number
WO2000076064A1
WO2000076064A1 PCT/DE2000/001807 DE0001807W WO0076064A1 WO 2000076064 A1 WO2000076064 A1 WO 2000076064A1 DE 0001807 W DE0001807 W DE 0001807W WO 0076064 A1 WO0076064 A1 WO 0076064A1
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WO
WIPO (PCT)
Prior art keywords
tine
sub
transducer
tines
groups
Prior art date
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PCT/DE2000/001807
Other languages
German (de)
French (fr)
Inventor
Günter Martin
Original Assignee
Tele Filter Zweigniederlassung Der Dover Germany Gmbh
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Publication date
Application filed by Tele Filter Zweigniederlassung Der Dover Germany Gmbh filed Critical Tele Filter Zweigniederlassung Der Dover Germany Gmbh
Priority to JP2001502230A priority Critical patent/JP4520678B2/en
Priority to US09/980,342 priority patent/US6577041B1/en
Priority to EP00951199A priority patent/EP1190484B1/en
Publication of WO2000076064A1 publication Critical patent/WO2000076064A1/en

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
    • H03H9/14505—Unidirectional SAW transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14547—Fan shaped; Tilted; Shifted; Slanted; Tapered; Arched; Stepped finger transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14558—Slanted, tapered or fan shaped transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14552—Transducers of particular shape or position comprising split fingers

Definitions

  • the invention relates to the field of electrical engineering / electronics.
  • Objects for which the application is possible and expedient are components based on surface acoustic waves, such as, for example, broadband bandpass filters and delay lines.
  • Transducers for surface acoustic waves which are composed of tine groups arranged on a piezoelectric substrate, each consisting of at least two tines, and in which at least some tine groups are constructed in such a way that they differ from the other tine groups with regard to the wave amplitude they excite differentiate.
  • interdigital converters with a tapering structure are composed of groups of tines, which consist of three tines. Two of these tines form a pair of non-reflective tines, while the third tine is a reflector tine.
  • the distance between the center lines of the reflector tine and the tine of the pair of tines adjacent to this reflector tine is 3p ⁇ g / 8.
  • p 2g is the length of a group of tines along a straight line that is parallel to the Collecting electrodes run a predetermined distance from one of these collecting electrodes.
  • each tine group has a preferred direction in terms of the wave ampute generated.
  • a converter structure of this type is a single phase unidirectional transducer, abbreviated as SPUDT. If the width of the reflector tine is p zg / 4 or 3p, ⁇ / 8, the tine groups are referred to as EWC or DART cells. As long as single phase unidirectional converters are not designed as tapering structures, they are suitable for filters with low attenuation up to approx. 1 bandwidth. However, phase unidirectional converters are combined with the principle of tapering structures, which m
  • the filter can be realized with low Emfugedampfung even up to at least 50 bandwidth.
  • Weight wave amplitudes so that they span the entire
  • the aperture of the transducers involved are essentially constant, is described in m DD 208 512 [3]. It is there not about phase unidirectional converters, but converters which, together with a converter with overlap weighting, form a transversal filter and, because of their weighting, improve the blocking selection compared to the use of uniform converters.
  • the tine groups of said transducers are parallel to one another and therefore do not form a tapering structure. Each tine group is composed of two tines of the same width.
  • the amplitude which is essentially homogeneous over the entire aperture, but is nevertheless weighted, is ensured by dividing some prong groups in two sub-converters with the same aperture and electrically connecting these sub-converters in series.
  • tine groups modified in this way are referred to as structured tine groups.
  • the weighting factor of a structured tine group described in m [3] is ⁇ . in relation to an unmodified tine group. This is a consequence of the series connection of two identical sub-converters of a tine group, as a result of which the voltage H applied to a structured tine group is equal to the converter voltage.
  • Weighting factors equal to 0 or ⁇ 1, is too coarse to be able to simulate a continuous weighting function with sufficient accuracy.
  • the filter implemented in this way can deviate considerably from the requirements of the filter specification, especially in the restricted area, although the use of the continuous weighting function, which, however, is only of theoretical importance here, ensured that the requirements were met.
  • the invention is based on the object of changing transducers for acoustic surface waves of the known type in such a way that, despite the essentially homogeneous amplitude profile, other weighting factors than 0 or ⁇ 1 can also be realized.
  • Transducers of the known type are considered to be those which are composed of tine groups arranged on a piezoelectric substrate, each consisting of at least two tines, and collecting electrodes, and in which at least some tine groups are constructed in such a way that they differ from the other tine groups in terms of the wave amplitude they excited.
  • the tines in their entirety form a structure tapering in the tine direction and
  • At least some tine groups are divided into a number of sub-converters in the tine direction and these sub-converters are electrically connected in a row.
  • the weighting method described which is combined with the tapered alignment of the transducer tines, is of little importance for transducers without a tapered tine alignment, because in this case the overlap weighting is available, which is also usually used.
  • the use of overlap weighting with tapered tine alignment is not useful because it would negate its advantages. For this reason, only weighting methods can be used that modify the electrical voltage on the tines.
  • the weighting method described is able to do this.
  • the claimed combination of features surprisingly offers an improved solution to the weighting problem in transducers with a tapered tine orientation.
  • the invention can be expediently configured as follows.
  • all sub-converters have the same aperture.
  • all tine groups contain two or three tines. It is particularly expedient if two tines of a tine group form a pair of tines, the tines of a pair of tines being of the same width and connected to different collecting electrodes and being arranged with respect to one another in such a way that the pair of tines is reflection-free and the third tine is a reflector tine. Special versions of this are that the Zmken groups are designed as EWC or DART cells.
  • the structured tine groups can have one prong of a sub-converter connected to the other prong of the following sub-converter or to the same prong of the following sub-converter in an electrically conductive manner.
  • the tine groups consist of a pair of tines and a reflector tine
  • the reflector tine and a tine of the pair of tines can be electrically conductively connected to a sub-group of tines in each sub-converter of the structured tine groups.
  • each tine sub-group is electrically conductively connected to that tine of the following sub-converter of the same tine group that does not belong to a tine sub-group.
  • at least one tine sub-group is also possible for at least one tine sub-group to be electrically conductively connected to the tine sub-group of the following sub-converter of the same tine group.
  • the approximation of the weighting to the continuous function for amplitude or reflection factor weighting can be supported if the widths of the tines belonging to the respective tine pair or the width of the reflector tines in at least one tine group differ from or differ from those in the other tine groups. It is expedient if there are structured groups of bricks with different numbers of sub-converters, each with the same aperture. On the other hand, all structured interest groups can also be subdivided into the same number of sub-converters, each with the same aperture.
  • Said transducer can, however, also contain at least two adjacent Zmken groups, the number of sub-transducers with the same aperture is the same. In this case, it is expedient to connect the sub-tine groups of the adjacent tine groups to one another in an electrically conductive manner.
  • a transducer according to the invention is the input and / or output transducer of an acoustic surface wave filter
  • the drawing shows an acoustic surface wave filter in which two transducers for acoustic surface waves are arranged on a piezoelectric substrate.
  • the converter 2 is composed of the rubber groups 21, 22 and 23 and the collecting electrodes 24 and 25 composed. All tine edges are inclined relative to one another in such a way that the entire tine arrangement forms a structure tapering in the direction of the collecting electrode 25.
  • Zmken phenomenon 21, 22 and 23 are DART cells.
  • the tine groups 21 and 23, apart from the different inclination of their tines, are constructed identically. Therefore only the Zmkenen 23 is described in more detail. It is divided into sub-converters with the same aperture 231 and 232.
  • the sub-converter 231 and 232 consists of the tines forming a pair of tines 2311 and 2312 or 2321 and 2322 and the reflector tines 2313 and 2323.
  • the tines 2311 and 2312 or 2321 and 2322 are the each form a pair of teeth, p zg / 8 wide and are spaced from their center lines by p z N 4.
  • p - is the length of the rubber group 22 along a straight line which runs parallel to the collecting electrodes 24 and 25 m from a predetermined distance from one of these collecting electrodes.
  • the reflector tines 2313 and 2323 have a width of 3p zg / 8.
  • the distance of the center line of the prong 2312 or 2322 from the center line of the respective reflector prong 2313 or 2323 is 3p zg / 8.
  • the reflector prong 2313 and the prong 2311 are connected via the electrically conductive connection 233 to a sub-group of tines, the connection 233 being at the same time a collecting electrode of the sub-converter 231.
  • the electrically conductive connection of the prongs 2321 and 2323 of the sub-converter 232 is established by the collecting electrode 25.
  • the tine sub-group of the sub-converter 231 consisting of the tines 2311 and 2313 is electrically conductively connected to that prong 2322 of the following sub-converter 232 of the same tine group 23 which does not belong to the tine sub-group consisting of the tines 2321 and 2323.
  • the subconverters 231 and 232 are therefore electrically connected in series.
  • the converter 3 is composed of the Zmken weakness 31, 32 and 33 and the collecting electrodes 34 and 35. All tine edges are inclined relative to one another in such a way that the entire tine arrangement forms a structure tapering in the direction of the collecting electrode 35.
  • the tine groups 31 and 33 apart from the different inclination of their tines, are constructed identically. Therefore, only the Zmkenen 33 is described in more detail. It is subdivided into sub-converters with the same aperture 331 and 332.
  • the sub-converter 331 and 332 consists of the tines 3311, 3312 and 3313 and 3321, 3322 and 3323. All these tines and all the gaps between them are pzg / 6 wide.
  • p zg is the length of the grout group 32 along a straight line which runs parallel to the collecting electrodes 34 and 35 m from a predetermined distance from one of these collecting electrodes.
  • the tines 3313 and 3311 are connected to a sub-group of tines via the electrically conductive connection 333, the connection 333 also being a collecting electrode of the sub-converter 331.
  • the electrically conductive connection of the tines 3321 and 3323 of the sub-converter 332 is established by the collecting electrode 35.
  • the tine sub-group consisting of tines 3311 and 3313 of the sub-converter 331 is electrically conductively connected to that tine 3322 of the following sub-converter 332 of the same tine group 33 which does not belong to the tine sub-group consisting of the tines 3321 and 3323.
  • the subconverters 331 and 332 are consequently electrically connected in series.
  • the Zmke 3312 and the Zmken 3311 and 3313 tine sub-group and between the tines 3322 and the tine sub-group formed from tines 3321 and 3323 a voltage half as high as between the collecting electrodes 34 and 35, which leads to the wave amplitudes generated by the tine groups 31 and 33 being half as large as the amplitude generated by the tine group 32.
  • the converter 2 is operated as an input converter and the converter 3 as an output converter of the acoustic surface wave filter.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

The aim of the invention is to modify prior art converters for surface acoustic waves in such a way that, despite an essentially homogeneous amplitude profile, other weighting factors can also be realized as 0 or ±1. The invention considers converters of the prior art that consist of prong groups which are comprised of at least two prongs, are arranged on a piezoelectric substrate, and which are assembled to form collector electrodes. According to the invention, at least some of the prong groups are constructed in such a way that they differ from the remaining prong groups with regard to the wave amplitude excited thereby. In order to fulfill the aim of the invention, a combination of the following features is provided: a) the prongs form, in their entirety, a structure which tapers in a prong direction, and; b) at least some of the prong groups (21; 23; 31; 33), designated as structured prong groups, are subdivided, in a prong direction, into a number of subconverters (231; 232; 331; 332) and these subconverters are electrically connected in series. The invention can be used in components which function on the basis of surface acoustic waves, for example, in broadband band-pass filters and in delay lines.

Description

Wandler für akustische OberflächenwellenSurface acoustic wave transducer
Technisches GebietTechnical field
Die Erfindung bezieht sich auf das Gebiet Elektrotechnik/ Elektronik. Objekte, bei denen die Anwendung möglich und zweckmäßig ist, sind Bauelemente auf der Basis akustischer Oberflächenwellen, wie beispielsweise breitbandige Bandpassfilter und Verzögerungsleitungen.The invention relates to the field of electrical engineering / electronics. Objects for which the application is possible and expedient are components based on surface acoustic waves, such as, for example, broadband bandpass filters and delay lines.
Stand der TechnikState of the art
Es sind Wandler für akustische Oberflächenwellen bekannt, die aus auf einem piezoelektrischen Substrat angeordneten Zinkengruppen, die jeweils aus mindestens zwei Zinken bestehen, zusammengesetzt sind und bei dem wenigstens einige Zinkengruppen so aufgebaut sind, dass sie sich von den übrigen Zinkengruppen hinsichtlich der von ihnen angeregten Wellenamplitude unterscheiden.Transducers for surface acoustic waves are known which are composed of tine groups arranged on a piezoelectric substrate, each consisting of at least two tines, and in which at least some tine groups are constructed in such a way that they differ from the other tine groups with regard to the wave amplitude they excite differentiate.
Bei einer speziellen Ausführung (WO 97/10646) [1] sind interdigitale Wandler mit sich verjüngender Struktur aus Zinkengruppen zusammengesetzt, die aus drei Zinken bestehen. Zwei dieser Zinken bilden ein reflexionsloses Zinkenpaar, während die jeweils dritte Zinke eine Reflektorzinke ist. Typischerweise beträgt der Abstand zwischen den Mittellinien der Reflektorzinke und der dieser Reflektorzinke benachbarten Zinke des Zinkenpaares 3pΣg/8. p2g ist dabei die Länge einer Zinkengruppe längs einer Geraden, die parallel zu den Sammeleiektroden m vorgegebenem Abstand von einer dieser Sammelelektroden verlauft. Infolgedessen hat ede Zinkengruppe eine hinsichtlich der erzeugten Wellenamputude bevorzugte Richtung. Deshalb ist eine Wandlerstruktur dieser Art ein Emphasen-Unidirektionalwandler (Single Phase Unidirectional Transducer, abgekürzt als SPUDT) . Wenn die Breite der Reflektorzinke pzg/4 bzw. 3p,α/8 betragt, so werden die Zinkengruppen als EWC- bzw. DART-Zellen bezeichnet. Solange Emphasen-Unidirektionalwandler nicht als sich verjungende Strukturen ausgelegt sind, sind sie für Filter mit niedriger Emfugeda pfung bis zu ca. 1 Bandbreite geeignet. Werden Emphasen-Unidirektionalwandler jedoch mit dem Prinzip sich verjungender Strukturen kombiniert, was mIn a special version (WO 97/10646) [1], interdigital converters with a tapering structure are composed of groups of tines, which consist of three tines. Two of these tines form a pair of non-reflective tines, while the third tine is a reflector tine. Typically, the distance between the center lines of the reflector tine and the tine of the pair of tines adjacent to this reflector tine is 3p Σg / 8. p 2g is the length of a group of tines along a straight line that is parallel to the Collecting electrodes run a predetermined distance from one of these collecting electrodes. As a result, each tine group has a preferred direction in terms of the wave ampute generated. Therefore, a converter structure of this type is a single phase unidirectional transducer, abbreviated as SPUDT. If the width of the reflector tine is p zg / 4 or 3p, α / 8, the tine groups are referred to as EWC or DART cells. As long as single phase unidirectional converters are not designed as tapering structures, they are suitable for filters with low attenuation up to approx. 1 bandwidth. However, phase unidirectional converters are combined with the principle of tapering structures, which m
[1] der Fall ist, so sind Filter mit niedriger Emfugedampfung sogar bis mindestens 50& Bandbreite realisierbar.[1] the case, so the filter can be realized with low Emfugedampfung even up to at least 50 bandwidth.
Um das Übertragungsverhalten der beschriebenen Filter m gewünschter Weise einstellen zu können, ist eine Wichtung der von den einzelnen Zinkengruppen erzeugten Wellenamplituden erforderlich. Die Methode der Uberlappungswichtung, die von Transversalflltern her bekannt ist, kann hier nicht ohne gravierende Nachteile angewendet werden, we l die Amplituden über die gesamte Apertur der beteiligten Wandler im wesentlichen konstant sein müssen. Bei einer weiteren speziellen Ausfuhrung, die der vorliegenden Erfindung am nächsten kommt, ist dieses Problem durch Luckenwichtung gelost (H. Yatsuda, IEEE Transactions on Ultrasonics, Ferroelectrics and Freguency Control vol. 41, March 1997, S. 453-459) [2] .In order to be able to set the transmission behavior of the described filters in the desired manner, weighting of the wave amplitudes generated by the individual tine groups is necessary. The method of overlap weighting, which is known from transverse filters, cannot be used here without serious disadvantages, since the amplitudes must be essentially constant over the entire aperture of the transducers involved. In another special embodiment that comes closest to the present invention, this problem is solved by gap weighting (H. Yatsuda, IEEE Transactions on Ultrasonics, Ferroelectrics and Freguency Control vol. 41, March 1997, pp. 453-459) [2] .
Eine andere Art, die von Zinkengruppen erzeugtenAnother type produced by groups of tines
Wellenamplituden so zu Wichten, dass sie über die gesamteWeight wave amplitudes so that they span the entire
Apertur der beteiligten Wandler im wesentlichen konstant sind, ist m DD 208 512 [3] beschrieben. Es handelt sich dort nicht um Emphasen-Unidirektionalwandler, sondern um Wandler, die zusammen mit einem Wandler mit Uberlappungswichtung em Transversalfllter bilden und infolge ihrer Wichtung die Sperrselektion im Vergleich zur Verwendung uniformer Wandler verbessern. Die Zinkengruppen der besagten Wandler sind zueinander parallel und bilden deshalb keine sich verjungende Struktur. Jede Zinkengruppe ist aus zwei gleich breiten Zinken zusammengesetzt. Die über die gesamte Apertur im wesentlichen homogene, aber trotzdem gewichtete Amplitude wird dadurch gewährleistet, dass einige Zinkengruppen m zwei Subwandler mit gleicher Apertur unterteilt und diese Subwandler elektrisch in Reihe geschaltet sind. Diese so modifizierten Zinkengruppen werden als strukturierte Zinkengruppen bezeichnet. Der Wichtungsfaktor einer m [3] beschriebenen strukturierten Zinkengruppe betragt ~ . im Verhältnis zu einer nicht modifizierten Zinkengruppe. Das ist eine Folge der Reihenschaltung zwei identischer Subwandler einer Zinkengruppe, wodurch die an einer strukturierten Zinkengruppe liegende Spannung H der Wandlerspannung betragt.The aperture of the transducers involved are essentially constant, is described in m DD 208 512 [3]. It is there not about phase unidirectional converters, but converters which, together with a converter with overlap weighting, form a transversal filter and, because of their weighting, improve the blocking selection compared to the use of uniform converters. The tine groups of said transducers are parallel to one another and therefore do not form a tapering structure. Each tine group is composed of two tines of the same width. The amplitude, which is essentially homogeneous over the entire aperture, but is nevertheless weighted, is ensured by dividing some prong groups in two sub-converters with the same aperture and electrically connecting these sub-converters in series. These tine groups modified in this way are referred to as structured tine groups. The weighting factor of a structured tine group described in m [3] is ~ . in relation to an unmodified tine group. This is a consequence of the series connection of two identical sub-converters of a tine group, as a result of which the voltage H applied to a structured tine group is equal to the converter voltage.
Es ist üblich, mit geeigneten Verfahren anhand der Filterspezifikation stetige Wichtungsfunktionen zu bestimmen und diese anschließend m eine Luckenwichtung zu konvertieren. Die Losung [2] hat den Nachteil, dass m manchen Fallen die Luckenwichtung, die lediglichIt is common to use suitable methods to determine continuous weighting functions based on the filter specification and then to convert them into a gap weighting. The solution [2] has the disadvantage that in some cases the gap weighting, the only
Wichtungsfaktoren gleich 0 oder ±1 zulasst, zu grob ist, um eine stetige Wichtungsfunktion mit hinreichender Genauigkeit nachbilden zu können. Infolgedessen kann das so implementierte Filter insbesondere im Sperrbereich erheblich von den Forderungen der Filterspezifikation abweichen, obwohl die Anwendung der stetigen Wichtungsfunktion, die hier allerdings lediglich theoretische Bedeutung hat, die Erfüllung der Forderungen gewährleistet hatte. Darstellung der ErfindungWeighting factors equal to 0 or ± 1, is too coarse to be able to simulate a continuous weighting function with sufficient accuracy. As a result, the filter implemented in this way can deviate considerably from the requirements of the filter specification, especially in the restricted area, although the use of the continuous weighting function, which, however, is only of theoretical importance here, ensured that the requirements were met. Presentation of the invention
Der Erfindung liegt die Aufgabe zugrunde, Wandler für akustische Oberflachenwellen der bekannten Art so zu verandern, dass trotz im wesentlichen homogenen Amplitudenprofils auch andere Wichtungsfaktoren als 0 oder ±1 realisiert werden können.The invention is based on the object of changing transducers for acoustic surface waves of the known type in such a way that, despite the essentially homogeneous amplitude profile, other weighting factors than 0 or ± 1 can also be realized.
Als Wandlern der bekannten Art werden dabei solche betrachtet, die aus auf einem piezoelektrischen Substrat angeordneten Zinkengruppen, die jeweils aus mindestens zwei Zinken bestehen, und Sammelelektroden zusammengesetzt sind, und bei denen wenigstens einige Zinkengruppen so aufgebaut sind, dass sie sich von den übrigen Zinkengruppen hinsichtlich der von ihnen angeregten Wellenamplitude unterscheiden.Transducers of the known type are considered to be those which are composed of tine groups arranged on a piezoelectric substrate, each consisting of at least two tines, and collecting electrodes, and in which at least some tine groups are constructed in such a way that they differ from the other tine groups in terms of the wave amplitude they excited.
Die Aufgabe ist mit dem im Patentanspruch 1 beschriebenen Wandler für akustische Oberflachenwellenfilter gelost. Die Unteranspruche geben Ausfuhrungsarten der Erfindung an.The object is achieved with the transducer for acoustic surface wave filters described in claim 1. The subclaims indicate embodiments of the invention.
Zur Losung der Aufgabe ist die Kombination folgender Merkmale vorgesehen:The combination of the following features is intended to solve the task:
a) die Zinken bilden m ihrer Gesamtheit eine sich m Zinkenrichtung verjungende Struktur unda) the tines in their entirety form a structure tapering in the tine direction and
b) wenigstens einige Zinkengruppen, bezeichnet als strukturierte Zinkengruppen, sind m Zinkenrichtung m eine Anzahl von Subwandlern unterteilt und diese Subwandler sind elektrisch m Reihe geschaltet.b) at least some tine groups, referred to as structured tine groups, are divided into a number of sub-converters in the tine direction and these sub-converters are electrically connected in a row.
Diese Merkmalekombmation gestattet es, die Vorteile der sich verjungenden Wandlerstrukturen mit der Anwendung unstetiger Wichtungsverfahren zu kombinieren, die feiner abgestufte Wichtungsfaktoren als die Luckenwichtung erlauben. Wenn eine strukturierte Zinkengruppe m N identische, elektrisch in Reihe geschaltete Subwandler unterteilt ist, so ist der Wichtungsfaktor dieser Zinkengruppe gleich ±1/N. Neben den für die Luckenwichtung charakteristischen Wichtungsfaktoren 0 und ±1 sind demzufolge weitere Wichtungsfaktoren, z. B. ±1/2 und ±1/3, einstellbar.This combination of features allows the advantages of the tapering transducer structures to be discontinuous with the application Combine weighting methods that allow finer graded weighting factors than gap weighting. If a structured tine group is divided into m N identical, electrically connected sub-converters, the weighting factor of this tine group is equal to ± 1 / N. In addition to the weighting factors 0 and ± 1, which are characteristic for gap weighting, other weighting factors, e.g. B. ± 1/2 and ± 1/3, adjustable.
Das beschriebene Wichtungsverfahren, das mit der verjungten Ausrichtung der Wandlerzinken kombiniert ist, hat für Wandler ohne verjungte Zinkenausrichtung eine geringe Bedeutung, weil in diesem Fall die Uberlappungswichtung zur Verfugung steht, die auch gewöhnlich angewendet wird. Im Gegensatz dazu ist die Anwendung der Uberlappungswichtung bei verjüngter Zinkenausrichtung nicht sinnvoll, weil diese deren Vorteile zunichte machen wurde. Deshalb sind nur solche Wichtungsverfahren anwendbar, welche die elektrische Spannung an den Zinken modifizieren. Das beschriebene Wichtungsverfahren ist m der Lage, das zu bewirken. Obwohl für Wandler ohne verjungte Zinkenausrichtung von geringer Bedeutung, bietet die beanspruchte Merkmalekombmation überraschender Weise eine verbesserte Losung des Wichtungsproblems bei Wandlern mit verjüngter Zinkenausrichtung.The weighting method described, which is combined with the tapered alignment of the transducer tines, is of little importance for transducers without a tapered tine alignment, because in this case the overlap weighting is available, which is also usually used. In contrast, the use of overlap weighting with tapered tine alignment is not useful because it would negate its advantages. For this reason, only weighting methods can be used that modify the electrical voltage on the tines. The weighting method described is able to do this. Although of minor importance for transducers without a tapered tine orientation, the claimed combination of features surprisingly offers an improved solution to the weighting problem in transducers with a tapered tine orientation.
Die Erfindung kann wie folgt zweckmäßig ausgestaltet sein.The invention can be expediently configured as follows.
Gemäß einer ersten zweckmäßigen Ausgestaltung haben alle Subwandler die gleiche Apertur.According to a first expedient embodiment, all sub-converters have the same aperture.
Außerdem ist es zweckmäßig, wenn alle Zinkengruppen zwei oder drei Zinken enthalten. Besonders zweckmäßig ist es, wenn jeweils zwei Zmken einer Zinkengruppe ein Zinkenpaar bilden, wobei die Zinken eines Zinkenpaares gleich breit und an verschiedene Sammelelektroden angeschlossen sind sowie so zueinander angeordnet sind, dass das Zinkenpaar insgesamt reflexionslos ist und die jeweils dritte Zinke eine Reflektorzinke ist. Spezielle Ausfuhrungen davon sind, dass die Zmkengruppen als EWC- oder DART-Zellen ausgebildet sind.It is also useful if all tine groups contain two or three tines. It is particularly expedient if two tines of a tine group form a pair of tines, the tines of a pair of tines being of the same width and connected to different collecting electrodes and being arranged with respect to one another in such a way that the pair of tines is reflection-free and the third tine is a reflector tine. Special versions of this are that the Zmken groups are designed as EWC or DART cells.
Wenn die Zmkengruppen aus zwei Zmken bestehen, kann den strukturierten Zmkengruppen eine Zinke eines Subwandlers mit der jeweils anderen Zinke des folgenden Subwandlers oder mit der gleichen Zinke des folgenden Subwandlers elektrisch leitend verbunden sein.If the tine groups consist of two tines, the structured tine groups can have one prong of a sub-converter connected to the other prong of the following sub-converter or to the same prong of the following sub-converter in an electrically conductive manner.
Wenn die Zmkengruppen aus einem Zinkenpaar und einer Reflektorzinke bestehen, so können m jedem Subwandler der strukturierten Z kengruppen die Reflektorzinke und eine Zinke des Zinkenpaares elektrisch leitend zu einer Zinkenuntergruppe verbunden sein.If the tine groups consist of a pair of tines and a reflector tine, the reflector tine and a tine of the pair of tines can be electrically conductively connected to a sub-group of tines in each sub-converter of the structured tine groups.
Weiterhin ist es zweckmäßig, wenn jede Zinkenuntergruppe mit derjenigen Zinke des folgenden Subwandlers derselben Zinkengruppe elektrisch leitend verbunden ist, die nicht zu einer Zinkenuntergruppe gehört. Es ist aber auch möglich, dass wenigstens eine Zinkenuntergruppe mit der Zinkenuntergruppe des folgenden Subwandlers derselben Zinkengruppe elektrisch leitend verbunden ist.Furthermore, it is expedient if each tine sub-group is electrically conductively connected to that tine of the following sub-converter of the same tine group that does not belong to a tine sub-group. However, it is also possible for at least one tine sub-group to be electrically conductively connected to the tine sub-group of the following sub-converter of the same tine group.
Die Approximation der Wichtung an die stetige Funktion zur Amplituden- bzw. Reflexionsfaktorwichtung kann unterstutzt werden, wenn sich die Breiten der zum jeweiligen Zinkenpaar gehörenden Zmken bzw. sich die Breite der Reflektorzinke in wenigstens einer Zinkengruppe von denen m den übrigen Zmkengruppen unterscheiden bzw. unterscheidet. Es ist zweckmäßig, wenn strukturierte Zmkengruppen mit unterschiedlicher Anzahl von Subwandlern mit jeweils gleicher Apertur vorhanden sind. Andererseits können alle strukturierten Zmkengruppen auch m die gleiche Anzahl von Subwandlern mit jeweils gleicher Apertur unterteilt sein.The approximation of the weighting to the continuous function for amplitude or reflection factor weighting can be supported if the widths of the tines belonging to the respective tine pair or the width of the reflector tines in at least one tine group differ from or differ from those in the other tine groups. It is expedient if there are structured groups of bricks with different numbers of sub-converters, each with the same aperture. On the other hand, all structured interest groups can also be subdivided into the same number of sub-converters, each with the same aperture.
Besagter Wandler kann aber auch wenigstens zwei benachbarte Zmkengruppen enthalten, deren Anzahl von Subwandlern mit gleicher Apertur gleich ist. In diesem Fall ist es zweckmäßig, die Zinkenuntergruppen der benachbarten Zmkengruppen elektrisch leitend miteinander zu verbinden.Said transducer can, however, also contain at least two adjacent Zmken groups, the number of sub-transducers with the same aperture is the same. In this case, it is expedient to connect the sub-tine groups of the adjacent tine groups to one another in an electrically conductive manner.
Schließlich ist es überaus zweckmäßig, wenn em erfmdungsgemaßer Wandler der Eingangs- und/oder Ausgangswandler eines akustischen OberflachenwellenflltersFinally, it is extremely expedient if a transducer according to the invention is the input and / or output transducer of an acoustic surface wave filter
Die Erfindung ist nachstehend anhand eines Ausfuhrungsbeispiels und einer zugehörigen Zeichnung naher erläutert .The invention is explained below with reference to an exemplary embodiment and an associated drawing.
Kurze Beschreibung der ZeichnungenBrief description of the drawings
Die Zeichnung zeigt em akustisches Oberflachenwellenfilter, bei dem auf einem piezoelektrischen Substrat zwei Wandlern für akustische Oberflachenwellen angeordnet sind.The drawing shows an acoustic surface wave filter in which two transducers for acoustic surface waves are arranged on a piezoelectric substrate.
Bester Weg zur Ausfuhrung der ErfindungBest way to carry out the invention
Bei dem m der Zeichnung dargestellten akustischen Oberflachenwellenfilter sind auf einem piezoelektrischen Substrat 1 zwei Wandler 2 und 3 für akustische Oberflachenwellen angeordnet. Der Wandler 2 ist aus den Zmkengruppen 21, 22 und 23 sowie aus den Sammelelektroden 24 und 25 zusammengesetzt. Alle Zinkenkanten sind so gegeneinander geneigt, dass die gesamte Zinkenanordnung eine sich m Richtung der Sammelelektrode 25 verjungende Struktur bildet. Die Zmkengruppen 21, 22 und 23 sind DART-Zellen. Die Zmkengruppen 21 und 23 sind, von der unterschiedlichen Neigung ihrer Zinken abgesehen, identisch aufgebaut. Deshalb wird lediglich die Zmkengruppe 23 naher beschrieben. Sie ist die Subwandler mit gleicher Apertur 231 und 232 unterteilt. Der Subwandler 231 bzw. 232 besteht aus den em Zmkenpaar bildenden Zinken 2311 und 2312 bzw. 2321 und 2322 sowie der Reflektorzinke 2313 bzw. 2323. Dem Aufbau einer DART-Zelle entsprechend, sind die Zinken 2311 und 2312 bzw. 2321 und 2322, die jeweils e Zmkenpaar bilden, pzg/8 breit und haben einen Abstand ihrer Mittellinien von pzN 4 . p -, ist dabei die Lange der Zmkengruppe 22 längs einer Geraden, die parallel zu den Sammelelektroden 24 und 25 m vorgegebenem Abstand von einer dieser Sammelelektroden verlauft. Die Reflektorzinken 2313 und 2323 haben eine Breite von 3pzg/8. Der Abstand der Mittellinie der Zinke 2312 bzw. 2322 von der Mittellinie der jeweiligen Reflektorzinke 2313 bzw. 2323 betragt 3pzg/8. Im Subwandler 231 sind die Reflektorzinke 2313 und die Zinke 2311 über die elektrisch leitende Verbindung 233 zu einer Zinkenuntergruppe verbunden, wobei die Verbindung 233 gleichzeitig eine Sammelelektrode des Subwandlers 231 ist. Die elektrisch leitende Verbindung der Zinken 2321 und 2323 des Subwandlers 232 ist durch die Sammelelektrode 25 hergestellt. Somit ist die aus den Zinken 2311 und 2313 bestehende Zinkenuntergruppe des Subwandlers 231 mit derjenigen Zinke 2322 des folgenden Subwandlers 232 derselben Zmkengruppe 23 elektrisch leitend verbunden, die nicht zu der aus den Zinken 2321 und 2323 bestehenden Zinkenuntergruppe gehört. Die Subwandler 231 und 232 sind demzufolge elektrisch m Reihe geschaltet. Infolgedessen liegt zwischen der Zinke 2312 und der aus den Zinken 2311 und 2313 gebildeten Zinkenuntergruppe sowie zwischen der Zinke 2322 und der aus den Zinken 2321 und 2323 gebildeten Zinkenuntergruppe eine halb so große Spannung wie zwischen den Sammelektroden 24 und 25, was dazu fuhrt, dass die von den Zmkengruppen 21 und 23 erzeugten Wellenamplituden halb so groß sind wie die von der Zmkengruppe 22 erzeugte Amplitude .In the acoustic surface wave filter shown in the drawing, two transducers 2 and 3 for acoustic surface waves are arranged on a piezoelectric substrate 1. The converter 2 is composed of the rubber groups 21, 22 and 23 and the collecting electrodes 24 and 25 composed. All tine edges are inclined relative to one another in such a way that the entire tine arrangement forms a structure tapering in the direction of the collecting electrode 25. Zmkengruppen 21, 22 and 23 are DART cells. The tine groups 21 and 23, apart from the different inclination of their tines, are constructed identically. Therefore only the Zmkengruppe 23 is described in more detail. It is divided into sub-converters with the same aperture 231 and 232. The sub-converter 231 and 232 consists of the tines forming a pair of tines 2311 and 2312 or 2321 and 2322 and the reflector tines 2313 and 2323. According to the structure of a DART cell, the tines 2311 and 2312 or 2321 and 2322 are the each form a pair of teeth, p zg / 8 wide and are spaced from their center lines by p z N 4. p -, is the length of the rubber group 22 along a straight line which runs parallel to the collecting electrodes 24 and 25 m from a predetermined distance from one of these collecting electrodes. The reflector tines 2313 and 2323 have a width of 3p zg / 8. The distance of the center line of the prong 2312 or 2322 from the center line of the respective reflector prong 2313 or 2323 is 3p zg / 8. In the sub-converter 231, the reflector prong 2313 and the prong 2311 are connected via the electrically conductive connection 233 to a sub-group of tines, the connection 233 being at the same time a collecting electrode of the sub-converter 231. The electrically conductive connection of the prongs 2321 and 2323 of the sub-converter 232 is established by the collecting electrode 25. Thus, the tine sub-group of the sub-converter 231 consisting of the tines 2311 and 2313 is electrically conductively connected to that prong 2322 of the following sub-converter 232 of the same tine group 23 which does not belong to the tine sub-group consisting of the tines 2321 and 2323. The subconverters 231 and 232 are therefore electrically connected in series. As a result, there is between the tine 2312 and the tine sub-assembly formed from the tines 2311 and 2313, and between the tine 2322 and the tine subassembly formed from the tines 2321 and 2323 are half the voltage between the collecting electrodes 24 and 25, which leads to the wave amplitudes generated by the tine groups 21 and 23 being half the amplitude generated by the tine group 22 .
Der Wandler 3 ist aus den Zmkengruppen 31, 32 und 33 sowie aus den Sammelelektroden 34 und 35 zusammengesetzt. Alle Zinkenkanten sind so gegeneinander geneigt, dass die gesamte Zinkenanordnung eine sich m Richtung der Sammelelektrode 35 verjungende Struktur bildet. Die Zmkengruppen 31 und 33 sind, von der unterschiedlichen Neigung ihrer Zinken abgesehen, identisch aufgebaut. Deshalb wird lediglich die Zmkengruppe 33 naher beschrieben. Sie ist m die Subwandler mit gleicher Apertur 331 und 332 unterteilt. Der Subwandler 331 bzw. 332 besteht aus den Zinken 3311, 3312 und 3313 bzw. 3321, 3322 und 3323. Alle diese Zinken sowie alle Lucken zwischen ihnen sind pzg /6 breit. pzg ist dabei die Lange der Zmkengruppe 32 längs einer Geraden, die parallel zu den Sammelelektroden 34 und 35 m vorgegebenem Abstand von einer dieser Sammelelektroden verlauft. Im Subwandler 331 sind die Zinken 3313 und 3311 über die elektrisch leitende Verbindung 333 zu einer Zinkenuntergruppe verbunden, wobei die Verbindung 333 gleichzeitig eine Sammelelektrode des Subwandlers 331 ist. Die elektrisch leitende Verbindung der Zmken 3321 und 3323 des Subwandlers 332 ist durch die Sammelelektrode 35 hergestellt. Somit ist die aus den Zmken 3311 und 3313 bestehende Zinkenuntergruppe des Subwandlers 331 mit derjenigen Zmke 3322 des folgenden Subwandlers 332 derselben Zmkengruppe 33 elektrisch leitend verbunden, die nicht zu der aus den Zinken 3321 und 3323 bestehenden Zinkenuntergruppe gehört. Die Subwandler 331 und 332 sind demzufolge elektrisch in Reihe geschaltet. Infolgedessen liegt zwischen der Zmke 3312 und der aus den Zmken 3311 und 3313 gebildeten Zinkenuntergruppe sowie zwiscnen der Zmke 3322 und der aus den Zmken 3321 und 3323 gebildeten Zinkenuntergruppe eine halb so große Spannung wie zwischen den Sammelektroden 34 und 35, was dazu fuhrt, dass die von den Zmkengruppen 31 und 33 erzeugten Wellenamplituden halb so groß sind wie die von der Zmkengruppe 32 erzeugte Amplitude .The converter 3 is composed of the Zmkengruppen 31, 32 and 33 and the collecting electrodes 34 and 35. All tine edges are inclined relative to one another in such a way that the entire tine arrangement forms a structure tapering in the direction of the collecting electrode 35. The tine groups 31 and 33, apart from the different inclination of their tines, are constructed identically. Therefore, only the Zmkengruppe 33 is described in more detail. It is subdivided into sub-converters with the same aperture 331 and 332. The sub-converter 331 and 332 consists of the tines 3311, 3312 and 3313 and 3321, 3322 and 3323. All these tines and all the gaps between them are pzg / 6 wide. p zg is the length of the grout group 32 along a straight line which runs parallel to the collecting electrodes 34 and 35 m from a predetermined distance from one of these collecting electrodes. In the sub-converter 331, the tines 3313 and 3311 are connected to a sub-group of tines via the electrically conductive connection 333, the connection 333 also being a collecting electrode of the sub-converter 331. The electrically conductive connection of the tines 3321 and 3323 of the sub-converter 332 is established by the collecting electrode 35. Thus, the tine sub-group consisting of tines 3311 and 3313 of the sub-converter 331 is electrically conductively connected to that tine 3322 of the following sub-converter 332 of the same tine group 33 which does not belong to the tine sub-group consisting of the tines 3321 and 3323. The subconverters 331 and 332 are consequently electrically connected in series. As a result, the Zmke 3312 and the Zmken 3311 and 3313 tine sub-group and between the tines 3322 and the tine sub-group formed from tines 3321 and 3323 a voltage half as high as between the collecting electrodes 34 and 35, which leads to the wave amplitudes generated by the tine groups 31 and 33 being half as large as the amplitude generated by the tine group 32.
Der Wandler 2 wird als Eingangswandler und der Wandler 3 als Ausgangswandler des akustischen Oberflachenwellenfllters betrieben . The converter 2 is operated as an input converter and the converter 3 as an output converter of the acoustic surface wave filter.

Claims

Patentansprüche claims
1. Wandler für akustische Oberflachenwellen, der aus auf einem piezoelektrischen Substrat (1) angeordneten Z kengruppen (21-23/31-33), die jeweils aus mindestens zwei Zinken bestehen, und Sammelelektroden (2 ; 25; 34 ; 35) zusammengesetzt ist, gekennzeichnet durch die Kombination folgender Merkmale:1. transducer for surface acoustic waves, which is composed of Z kengruppen (21-23 / 31-33) arranged on a piezoelectric substrate (1), each consisting of at least two prongs, and collecting electrodes (2; 25; 34; 35) , characterized by the combination of the following features:
b) die Zinken bilden m ihrer Gesamtheit eine sich in Zinkenrichtung verjungende Struktur undb) the tines in their entirety form a tapering structure and
b) wenigstens einige Zmkengruppen (21 ; 23; 31; 33 ) , bezeichnet als strukturierte Zmkengruppen, sind mb) at least some Zmke groups (21; 23; 31; 33), referred to as structured Zmke groups, are m
Zinkenrichtung m eine Anzahl von SubwandlernTine direction m a number of sub-converters
(231;232; 331; 332) unterteilt und diese Subwandler sind elektrisch m Reihe geschaltet, wodurch sie sich von den übrigen Zmkengruppen hinsichtlich der von ihnen angeregten Wellenamplitude unterscheiden.(231; 232; 331; 332) and these sub-converters are electrically connected in series, which means that they differ from the rest of the groups in terms of the wave amplitude they excite.
2. Wandler für akustische Oberflachenwellen nach Anspruch 1, dadurch gekennzeichnet, dass alle Subwandler2. transducer for acoustic surface waves according to claim 1, characterized in that all sub-transducers
(231;232;331;332) die gleiche Apertur haben.(231; 232; 331; 332) have the same aperture.
3. Wandler für akustische Oberflachenwellen nach Anspruch 1, dadurch gekennzeichnet, dass jede Zmkengruppe zwei Zinken enthalt .3. transducer for acoustic surface waves according to claim 1, characterized in that each tine group contains two tines.
4. Wandler für akustische Oberflachenwellen nach Anspruch 1, dadurch gekennzeichnet, dass ede Zmkengruppe (21-23; 31- 33) drei Zinken enthalt.4. transducer for acoustic surface waves according to claim 1, characterized in that each Zmkengruppe (21-23; 31- 33) contains three prongs.
5. Wandler für akustische Oberflachenwellen nach Anspruch 4, dadurch gekennzeichnet, dass jeweils zwei Zinken (2311+2312 ,-2321+2322 ; 3312+ 3313 ; 3322+3323) einer5. transducer for acoustic surface waves according to claim 4, characterized in that two prongs each (2311 + 2312, -2321 + 2322; 3312+ 3313; 3322 + 3323) one
Z kengruppe (23; 33) em Zmkenpaar bilden, wobei die Zmken eines Zinkenpaares gleich breit und an verschiedene Sammelelektroden (24 ; 25; 34 ; 35) angeschlossen sind sowie so zueinander angeordnet sind, dass das Zmkenpaar insgesamt reflexionslos ist und die jeweils dritte Zmke (2313;2323;3311;3321) eine Reflektorzinke ist.Z ken group (23; 33) form a pair of tines, the tines of a pair of tines having the same width and being connected to different collecting electrodes (24; 25; 34; 35) and being arranged with respect to one another in such a way that the pair of tines is reflection-free and the third tines (2313; 2323; 3311; 3321) is a reflector tine.
6. Wandler für akustische Oberflachenwellen nach Anspruch 5, dadurch gekennzeichnet, dass jede Z kengruppe (21-23; 31-6. transducer for acoustic surface waves according to claim 5, characterized in that each Z kengruppe (21-23; 31-
33) eine DART-Zelle ist.33) is a DART cell.
7. Wandler für akustische Oberflachenwellen nach Anspruch 5, dadurch gekennzeichnet, dass jede Z kengruppe (21-23; 31- 33) eine EWC-Zelle ist.7. transducer for acoustic surface waves according to claim 5, characterized in that each Z kengruppe (21-23; 31- 33) is an EWC cell.
8. Wandler für akustische Oberflachenwellen nach Anspruch 3, dadurch gekennzeichnet, dass m den strukturierten Z kengruppen eine Zmke eines Subwandlers mit der jeweils anderen Zmke des folgenden Subwandlers elektrisch leitend verbunden ist.8. transducer for acoustic surface waves according to claim 3, characterized in that m the structured Z ken groups a Zmke of a sub-converter with the other Zmke of the following sub-converter is electrically connected.
9. Wandler für akustische Oberflachenwellen nach Anspruch 3, dadurch gekennzeichnet, dass m den strukturierten Zmkengruppen eine Zmke eines Subwandlers mit der gleichen Zmke des folgenden Subwandlers elektrisch leitend verbunden ist.9. transducer for acoustic surface waves according to claim 3, characterized in that m the structured Zmke groups a Zmke of a sub-converter with the same Zmke of the following sub-converter is electrically connected.
10. Wandler für akustische Oberflachenwellen nach Anspruch 5, dadurch gekennzeichnet, dass m jedem Subwandler10. transducer for acoustic surface waves according to claim 5, characterized in that m each sub-transducer
(231; 232; 331; 332) der strukturierten Zmkengruppen(231; 232; 331; 332) of the structured interest groups
(231;232;331;332) die Reflektorzinke (2313 ; 2323; 3311 ; 3321 ) und eine Zmke (2311 ; 2321 ; 3313 ; 3323) des Zinkenpaares elektrisch leitend zu einer Zinkenuntergruppe verbunden sind. (231; 232; 331; 332) the reflector tine (2313; 2323; 3311; 3321) and a tine (2311; 2321; 3313; 3323) of the pair of tines are electrically connected to form a tine sub-group.
11. Wandler für akustische Oberflachenwellen nach Anspruch 10, dadurch gekennzeichnet, dass ede Zinkenuntergruppe (2311+2313;3311+3313) mit derjenigen Zmke (2322;3322) des folgenden Subwandlers (232; 332) derselben Zmkengruppe (23;33) elektrisch leitend verbunden ist, die nicht zu einer Zinkenuntergruppe gehört.11. Transducer for acoustic surface waves according to claim 10, characterized in that each tine sub-group (2311 + 2313; 3311 + 3313) with that Zmke (2322; 3322) of the following sub-converter (232; 332) of the same group of tines (23; 33) is electrically conductive which is not part of a tine sub-group.
12. Wandler für akustische Oberflachenwellen nach Anspruch 10, dadurch gekennzeichnet, dass wenigstens eine12. transducer for acoustic surface waves according to claim 10, characterized in that at least one
Zinkenuntergruppe mit der Zinkenuntergruppe des folgenden Subwandlers derselben Zmkengruppe elektrisch leitend verbunden ist.Tine sub-group is electrically connected to the tine sub-group of the following sub-converter of the same tine group.
13. Wandler für akustische Oberflachenwellen nach Anspruch 5, dadurch gekennzeichnet, dass sich die Breiten der zum jeweiligen Zmkenpaar gehörenden Zinken (2311;2312;2321;2322;3312;3313;3322;3323) in wenigstens einer Zmkengruppe (21-23; 31 ; 33 ) von denen m den übrigen Zmkengruppen unterscheiden.13. A transducer for acoustic surface waves according to claim 5, characterized in that the widths of the tines belonging to the respective pair of tines (2311; 2312; 2321; 2322; 3312; 3313; 3322; 3323) are in at least one tine group (21-23; 31 ; 33) from which m distinguish the other groups of bricks.
14. Wandler f r akustische Oberflachenwellen nach Anspruch 5, dadurch gekennzeichnet, dass sich die Breite der Reflektorzinke (2313; 2323; 3311; 3321 ) m wenigstens einer Zinkengruppe (21-23; 31; 33) von denen m den übrigen Zmkengruppen unterscheidet.14. Transducer for acoustic surface waves according to claim 5, characterized in that the width of the reflector tine (2313; 2323; 3311; 3321) m of at least one tine group (21-23; 31; 33) differs from that m of the other tine groups.
15. Wandler für akustische Oberflachenwellen nach Anspruch 2, dadurch gekennzeichnet, dass strukturierte Z kengruppen (21 ; 23 ; 31 ; 33 ) mit unterschiedlicher Anzahl von Subwandlern (231 ; 232 ; 331 ; 332 ) mit jeweils gleicher Apertur vorhanden sind.15. A transducer for acoustic surface waves according to claim 2, characterized in that structured Z ken groups (21; 23; 31; 33) with different numbers of sub-transducers (231; 232; 331; 332) are present, each with the same aperture.
16. Wandler für akustische Oberflachenwellen nach Anspruch 2, dadurch gekennzeichnet, dass alle strukturierten Zmkengruppen (21 ; 23 ; 31 ; 33 ) m die gleiche Anzahl von Subwandlern (231; 232 ; 331 ; 332 ) mit jeweils gleicher Apertur unterteilt sind.16. transducer for acoustic surface waves according to claim 2, characterized in that all structured Zmkengruppen (21; 23; 31; 33) m the same number of sub-converters (231; 232; 331; 332) are divided with the same aperture.
17. Wandler für akustische Oberflachenwellen nach Anspruch 2, dadurch gekennzeichnet, dass dieser wenigstens zwei benachbarte Zmkengruppen enthalt, deren Anzahl von Subwandlern mit gleicher Apertur gleich ist.17. transducer for acoustic surface waves according to claim 2, characterized in that it contains at least two adjacent Zmkengruppen, the number of sub-transducers with the same aperture is the same.
18. Wandler für akustische Oberflachenwellen nach Anspruch 10 und 17, dadurch gekennzeichnet, dass die Zinkenuntergruppen der benachbarten Zmkengruppen elektrisch leitend miteinander verbunden sind.18. Transducer for surface acoustic waves according to claim 10 and 17, characterized in that the tine subgroups of the adjacent tine groups are connected to one another in an electrically conductive manner.
19. Verwendung eines Wandlers für akustische19. Using a transducer for acoustic
Oberflachenwellen nach Anspruch 1 als Eingangs- und/oderSurface waves according to claim 1 as input and / or
Ausgangswandler eines akustischen Oberflachenwellenfllters . Output converter of an acoustic surface wave filter.
PCT/DE2000/001807 1999-06-03 2000-05-30 Converter for surface acoustic waves WO2000076064A1 (en)

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JP2001502230A JP4520678B2 (en) 1999-06-03 2000-05-30 Surface acoustic wave transducer
US09/980,342 US6577041B1 (en) 1999-06-03 2000-05-30 Converter for surface acoustic waves
EP00951199A EP1190484B1 (en) 1999-06-03 2000-05-30 Converter for surface acoustic waves

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DE19925800A DE19925800C1 (en) 1999-06-03 1999-06-03 Surface acoustic wave transducer
DE19925800.7 1999-06-03

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DE19925800C1 (en) 2000-12-21
JP2003501933A (en) 2003-01-14
EP1190484A1 (en) 2002-03-27
JP4520678B2 (en) 2010-08-11
KR20020013569A (en) 2002-02-20
KR100735925B1 (en) 2007-07-06
EP1190484B1 (en) 2004-07-28
US6577041B1 (en) 2003-06-10

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