WO2000055103A3 - Beschichtete quarzglasbauteile und verfahren zur beschichtung - Google Patents

Beschichtete quarzglasbauteile und verfahren zur beschichtung Download PDF

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Publication number
WO2000055103A3
WO2000055103A3 PCT/DE2000/000818 DE0000818W WO0055103A3 WO 2000055103 A3 WO2000055103 A3 WO 2000055103A3 DE 0000818 W DE0000818 W DE 0000818W WO 0055103 A3 WO0055103 A3 WO 0055103A3
Authority
WO
WIPO (PCT)
Prior art keywords
quartz glass
glass components
coating
transparent
protective layer
Prior art date
Application number
PCT/DE2000/000818
Other languages
English (en)
French (fr)
Other versions
WO2000055103A2 (de
Inventor
Andreas Mucha
Lothar Siegert
Bernd Rother
Original Assignee
Andreas Mucha
Lothar Siegert
Bernd Rother
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Andreas Mucha, Lothar Siegert, Bernd Rother filed Critical Andreas Mucha
Priority to AU47413/00A priority Critical patent/AU4741300A/en
Priority to DE10080616T priority patent/DE10080616D2/de
Publication of WO2000055103A2 publication Critical patent/WO2000055103A2/de
Publication of WO2000055103A3 publication Critical patent/WO2000055103A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/11—Making porous workpieces or articles
    • B22F3/1121—Making porous workpieces or articles by using decomposable, meltable or sublimatable fillers
    • B22F3/1125—Making porous workpieces or articles by using decomposable, meltable or sublimatable fillers involving a foaming process
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/27—Oxides by oxidation of a coating previously applied
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/214—Al2O3
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • F27D99/0006—Electric heating elements or system
    • F27D2099/0028—Microwave heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Die Erfindung bezieht sich auf das Gebiet der Chemie und betrifft beschichtete Quarzglasbauteile, die beispielsweise im direkten Kontakt mit Metallschmelzen stehen und ein Verfahren zur Beschichtung. Die Aufgabe der Erfindung besteht in der Bereitstellung von Quarzglasbauteilen, die mindestens im infraroten und sichtbaren Spektralbereich transparent sind. Gelöst wird die Aufgabe durch beschichtete Quarzglasbauteile, die mit einer fest haftenden Schutzschicht aus Aluminiumoxid versehen sind, wobei diese Schutzschicht im sichtbaren und im infraroten Spektralbereich bis 2 νm Wellenlänge transparent oder mindestens zu 90 % transparent ist. Die Aufgabe wird weiterhin gelöst durch ein Verfahren zur Beschichtung von Quarzglasbauteilen, bei dem die Schutzschicht aus Aluminiumoxid entweder durch physikalische Abscheidung aus der Dampfphase oder durch chemische Abscheidung aus der Gasphase oder durch Aufbringen einer Aluminiumschicht und folgender Nachoxidation hergestellt wird.
PCT/DE2000/000818 1999-03-13 2000-03-10 Beschichtete quarzglasbauteile und verfahren zur beschichtung WO2000055103A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU47413/00A AU4741300A (en) 1999-03-13 2000-03-10 Coated quartz glass components and method for coating
DE10080616T DE10080616D2 (de) 1999-03-13 2000-03-10 Beschichtete Quarzglasbauteile und Verfahren zur Beschichtung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19911228.2 1999-03-13
DE19911228 1999-03-13

Publications (2)

Publication Number Publication Date
WO2000055103A2 WO2000055103A2 (de) 2000-09-21
WO2000055103A3 true WO2000055103A3 (de) 2000-12-28

Family

ID=7900856

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/000818 WO2000055103A2 (de) 1999-03-13 2000-03-10 Beschichtete quarzglasbauteile und verfahren zur beschichtung

Country Status (3)

Country Link
AU (1) AU4741300A (de)
DE (2) DE10080616D2 (de)
WO (1) WO2000055103A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10219812A1 (de) * 2002-05-02 2003-11-13 Univ Dresden Tech Bauteile mit kristallinen Beschichtungen des Systems Aluminiumoxid/Siliziumoxid und Verfahren zu deren Herstellung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3403378A1 (de) * 1984-02-01 1985-08-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Verfahren zur oberflaechenbehandlung eines quarzglassubstrates
JPH07157337A (ja) * 1993-12-06 1995-06-20 Sumitomo Metal Mining Co Ltd ガラス基材上へのアルミナ膜形成方法
EP0712815A1 (de) * 1994-11-21 1996-05-22 Saint-Gobain Vitrage Glasscheibe mit einer dünnen Beschichtung und Verfahren zu ihrer Ausbildung
JPH10139480A (ja) * 1996-10-31 1998-05-26 Toshiba Ceramics Co Ltd アルミナ被覆石英ガラス及びその製造方法並びに半導体製造装置用部品

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3403378A1 (de) * 1984-02-01 1985-08-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Verfahren zur oberflaechenbehandlung eines quarzglassubstrates
JPH07157337A (ja) * 1993-12-06 1995-06-20 Sumitomo Metal Mining Co Ltd ガラス基材上へのアルミナ膜形成方法
EP0712815A1 (de) * 1994-11-21 1996-05-22 Saint-Gobain Vitrage Glasscheibe mit einer dünnen Beschichtung und Verfahren zu ihrer Ausbildung
JPH10139480A (ja) * 1996-10-31 1998-05-26 Toshiba Ceramics Co Ltd アルミナ被覆石英ガラス及びその製造方法並びに半導体製造装置用部品

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Section Ch Week 199533, Derwent World Patents Index; Class L01, AN 1995-252148, XP002146423 *
DATABASE WPI Section Ch Week 199831, Derwent World Patents Index; Class L03, AN 1998-357255, XP002146422 *

Also Published As

Publication number Publication date
WO2000055103A2 (de) 2000-09-21
DE10080616D2 (de) 2001-08-30
DE10012316A1 (de) 2000-09-14
AU4741300A (en) 2000-10-04

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