WO2000039563A1 - A method for manufacturing a calorimeter-related detector and a detector manufactured according to the method - Google Patents
A method for manufacturing a calorimeter-related detector and a detector manufactured according to the method Download PDFInfo
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- WO2000039563A1 WO2000039563A1 PCT/SE1999/002498 SE9902498W WO0039563A1 WO 2000039563 A1 WO2000039563 A1 WO 2000039563A1 SE 9902498 W SE9902498 W SE 9902498W WO 0039563 A1 WO0039563 A1 WO 0039563A1
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- Prior art keywords
- detector
- conductive
- ridges
- column
- metal layer
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
- H10N10/17—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device
Definitions
- the present invention relates to a method of manufacturing a calorimeter-related detector and to a detector manufactured in accordance with the method
- Calorimeters are used to determine different endothermic and/or exothermic reactions, among other things
- the present invention relates to a method of producing a calorimeter-related detector that has properties similar to the properties of thermocouples
- the present invention also relates to a detector comprised of a number of interconnected thermocouples or thermal elements produced in accordance with the method
- calorimeters that can be used to evaluate and determine heat changes in exothermic reactions
- calorimeters that can be used to evaluate and determine heat changes in exothermic reactions
- an enzyme i t which is adapted to the molecule concerned and which will function to split the molecule while emitting heat
- the heat generated is in relation to the value of said concentration, and when an enzyme is used as a molecule-splitting catalyst the concentration of 15 the molecule can be determined time after time
- the same detector and calorimeter can be used at different measuring occasions
- thermal elements are used to evaluate the heat generated in both of the aforesaid assaying methods
- kinetic measuring processes in which a medium to be measured has an established sample concentration and in which the time variation of the reaction is measured.
- the substrate used in this case is a silicon disc or chip coated with a layer of Si- nitride (SiN), which provides effective heat conductivity and effective electric insulation (Fig. 5a).
- SiN Si- nitride
- a grating or a number of ridges is/are formed on this surface
- Fig. 5b The grating is coated with metal layers so as to form two different electrical conductors at two different oblique angles (Fig. 5c), therewith forming a plurality of mutually sequential junctions from the one conductor to the other. This results in a stack of thermocouples.
- Another technical problem is one of realising how a detector and the electrically conductive paths and/or other electric and/or electronic components belonging to said detector can be produced within a limited surface region
- Another technical problem is one of realising how a topographic structure produced with high precision in, for instance, a silicon substrate either directly or through the medium of complementary means and representing or corresponding to a detector and/or a conductor path and/or electric, and/or electronic components can be transferred to form in plastic material a topographical structure whilst retaining the necessary precision, and then coating the topographical replica with one or more metal layers in a manner known per se so as to form said detector and also, when required, conductor paths, electric and/or electronic components and circuits and when applicable connection pads
- Another technical problem is one of realising how a detector that has the form of a thermal element and that has been produced in accordance with the present invention shall be positioned and how the topographical pattern shall be formed in the plastic material and also of realising the conditions required to coat the topographical pattern with one or more metal layers and the type of metals that shall be chosen so as to allow exposure and/ or reaction of solely the hot solder points or the like and not the cold solder points or the like, to the by-passing medium used for measuring purposes, such as a liquid, gas or gas mixture
- Another technical problem is one of realising what is required to insulate or isolate an integrated thermal element on a metal surface on an electrically insulated body or body part from the remainder of the surface without needing to employ lithographic methods to this end
- Another technical problem is one of realising how different ridges belonging to the topographical pattern or three-dimensional structure can be readily positioned in relation to one another so as to provide a series-coupling of thermal elements that are orientated in rows and columns and therewith provide a very compact detector surface that has a high density of thermal elements, regardless of whether the thermal elements are thermocouples or Bolometers
- Another technical problem is one of realising how the columns and/or rows of ridges shall be interconnected electrically when so required, and electrically isolated from one another when so required, by configuring the topographical structure and by choosing the metal layers and the method of their application in accordance herewith
- Another technical problem is one of realising how the topographical structure shall be formed within the measuring cell so as to provide the requisite connecting electrodes for an integrated detector, in addition to the thermal element
- a related technical problem in this regard is one of realising how the hot solder points or the like shall be covered by a heat-generating and heat-absorbing layer while the cold 5 solder points or the like are allowed to remain intact
- Still another technical problem is one of realising which type of metals shall be used when coating, e g the inner wall parts of the first cell-part so as to achieve the intended function of said first part and the intended change in resistance or o thermoelectric effect of the thermal elements formed
- another technical problem is one of realising the conditions necessary for mass-producing said integrated/measuring cell in a simple and cost-effective manner
- thermocouple-forming topographical structure With a starting point from an earlier known thermocouple-forming topographical structure, another technical problem is one of realising the conditions that are required for a similar topographical structure to form a portion of the first part of the measuring cell, and also to realise the advantages that are afforded hereby
- Another technical problem is one of realising the cost and production advantages that are afforded when one part of a two-part detector and a part of the detector surface-section may be produced by shaping the same such as moulding, pressing or embossing, against a die or mould that has a topographical surface section complementary to the topography required for the thermal element, where at least that part of the die or mould which corresponds to the detector is produced by electroplating or likewise treatment of a model of a surface section of the detector, where said model is produced by micromechanically working a substrate, such as a silicon substrate
- Another technical problem is one of realising the production advantages and cost advantages that are afforded by shaping, such as moulding, pressing or embossing, a part of a two-part detector cell and a part of a surface section of the detector against a complementary model of the detector-associated surface section
- Another technical problem is one of realising the metrological advantages that are afforded by giving the topographical structure a square, or essentially square, extension
- thermocouples SOLUTION a technical problem is one of providing conditions which enable a plurality of columns of ridges with series- connected thermal elements to be interconnected to form a single series of interconnected thermal elements, particularly thermocouples SOLUTION
- a calorimeter-related detector comprised of a thermal - element
- a method and a detector that are characterised in that the detector shall be formed on a base unit, that the part of the base unit that is intended to form the detector is comprised of one or more surface regions that is/are shaped to provide a topographical structure, that at
- the thermal element may comprise a Bolometer or a row of thermocouples
- topographical structure and/or said configuration including said electrically conductive coatings functions/function as one or more thermocouples by virtue of the first and the second metal layer or coating overlapping each other within discrete surface parts of the detector 25
- the detector is produced on a limited surface region, and electrical conductor paths and/or electric circuits and/or electronic circuits are produced in the same way adjacent the limited surface region
- the base structure of the detector is produced by shaping, such as moulding, pressing or embossing, said base structure against a mould or die that has a complementary topographical structure, and that at least one part of the die or mould, i e that part which corresponds to the surface section of said detector, is produced by electroplating or likewise treating a model that has a topographical configuration adapted for said detector, and that said model is produced by micromechanically working a substrate such as a silicon substrate
- the topographical structure can be produced with sufficient precision by shaping, e g moulding, pressing or embossing, the base structure against a mould or die that has said complementary topographical structure, and by producing at least a part of said mould or die, i e that part which corresponds to the surface section of said detector, by micromechanically working a substrate, such as a silicon substrate
- the base structure to form an integral part of the first cell part, and for the detector-associated surface parts to form a part of the inner surface of said cavity
- the cavity-associated surface sections can be coated at the same time as the detector-associated surface parts are coated, and with the same metal coatings
- the topographical structure may be adapted to provide requisite detector connection pads, and also electric conductor paths and/or electric circuits and/or electronic circuits
- the topographical part of the detector may comprise a number of so-called conductive ridges that have a first side surface, a second side surface and an upper surface, and to provide a so- 5 called conductive surface in between respective mutually adjacent ridges.
- the detector-associated base structure is coated with a layer of a first metal at a first angle relative to said base structure, and with a layer of a second metal at a second angle relative to said base structure, wherein the first o angle is adapted so that the first side surface and at least a part of the upper surface of respective conductive ridges and at least a part of the intermediate conductive surfaces will be coated with the layer of said first metal, and wherein said second angle is adapted so that the second side surface and at least a part of the upper surface of respective conductive ridges and at least a part of the 5 intermediate conductive surfaces will be coated with a layer of said second metal.
- the first and the second angles are adapted relative to one another such that the layer of said second metal will overlap and be in electrical contact with the layer of said first metal solely on the upper surface of 0 respective conductive ridges and on the intermediate conductive surfaces, such that the metal layers will form a series of electrically interconnected junctions between the first and the second metals.
- the metal layers in 5 the integrated part shall be electrically isolated from the metal layers within surrounding surface sections of the base structure.
- Requisite electrical insulation, or isolation, between the conductive ridges and surrounding metal layers is achieved in accordance with the present invention with 0 the aid of so-called insulating ridges that have associated so-called insulating surfaces that are positioned relative to one another and relative to said conductive ridges and also relative to said first and said second angle such that said insulating surfaces will be devoid of said first and said second metals.
- the conductive ridges will be given a configuration in which they form n-number of columns, these columns being designated column 1 , column 2, etc , up to column "n", and where the number of conductive ridges in each column is "m”, said columns being designated ridge 1 , ridge 2 to ridge "m", where "m" may be different in respect of reach column
- the first ridge in each column, with the exception of the "n"th column and the "m”th ridge in each column, with the exception of the last column form interconnection ridges, where the "m"th ridge in each column, with the exception of the last column, is electrically connected together with the first ridge of the next following column, whereby the junctions between the first and the second metal layers of all conductive ridges within all columns form said series of electrically interconnected junctions
- junctions between the first and second metal layers of all conductive ridges in all columns will form a common series of electrically interconnected junctions
- the electrical interconnection between an "m"th ridge in one column and a first ridge in an adjacent column is achieved by virtue of forming an electrically conductive surface section between the adjacent columns and connecting this conductive surface section to mutually interconnected ridges of adjacent columns while electrically insulating or isolating said conductive surface section from said adjacent columns in other respects
- thermocouple With the intention of providing connection electrodes for the thus formed thermocouple, it is proposed in accordance with the invention that the aforesaid series of conductive ridges form the series-connected thermocouple, that the metal coating or layer on a first or a second side surface of a first conductive ridge, or a conductive surface adjacent said first conductive ridge in said series of conductive ridges, forms a first connection electrode on the thermocouple, and that a first or a second side surface of a last conductive ridge, or an adjacent conductive surface of said last conductive ridge in said series of conductive ridges forms a second connection electrode on said thermocouple
- the heat-absorbent layer may comprise a layer of enzymes or some corresponding substance
- thermoelectric effect in the junction of the metal chosen for the first metal layer to the metal chosen for the second metal layer the first metal shall differ from the second metal It is also proposed in accordance with the invention that the two metals are gold covering chromium, which together provide a thermoelectric effect
- a detector constructed in accordance with said method reside in the ability of manufacturing a calorimeter-related detector of a nature that is especially adapted for the purpose in question and that can be produced in a simple and cost-effective manner
- a detector that includes a very large number of series- connected thermal elements can be produced in large volumes and with great precision. This enables detectors integrated in a calorimeter to be mass-produced, said detector being highly sensitive as a result of the large number of series- 5 connected thermal elements.
- the necessary detector model is produced with high precision by micromechanically working, e.g., a silicon base structure and the model transferred to a die or mould used in the mass production of gas cell base structures, for l o instance in a plastic material.
- Figure 1 is a highly simplified, schematic illustration of a calorimeter-
- Figure 2 is a schematic, side view of a portion of a first part of the detector
- Figure 3 is a schematic, somewhat enlarged side view of an inventive detector
- FIG. 4 illustrates a detector according to Figure 3 that includes two layers of different metals which form a number of series- connected thermal elements in the form of thermocouples,
- Figure 5 is a highly simplified and schematic illustration of a possible 5 conductor path, electric and/or electronic circuits, and connection pads that can be formed in accordance with the invention
- Figures 6a and 6b are schematic side views that illustrate how a detector- adapted base structure can be formed from a die or mould and a 0 model;
- Figure 7 illustrates a discrete detector applied to a part belonging to a measuring cell
- Figure 8 is a simplified illustration in side view that shows how a detector can be aligned or positioned
- Figure 9 illustrates schematically and from above how a detector can be isolated electrically from a surrounding metal layer
- Figure 10 is a schematic side view showing how a detector can be isolated electrically from a surrounding metal layer
- Figure 11 illustrates schematically and from above a detector that includes a plurality of columns of conductive ridges, and shows the columns interconnected electrically
- Figure 12 illustrates schematically and from above a detector according to
- Figure 13 illustrates schematically and from above how conductive and insulating ridges co-act to form a detector that may include a plurality of columns of conductive ridges
- Figure 14 illustrates schematically and in side view how conductive ridges can be adapted to absorb generated heat
- Figure 15 is a highly simplified, schematic illustration of a measuring cell where the inner surfaces of the measuring cell cavity have been provided with a number of detectors
- the invention relates to a method of, inter alia, producing a calorimeter-associated detector
- the invention provides a high degree of freedom with regard to positioning of the detector as a separate unit or as a unit that is integral with calorimeter components, such as the measuring cell
- FIG. 1 thus illustrates, among other things, a calorimeter-related detector 3, which is adapted to co-act with a sensor 1
- the illustrated sensor 1 includes a measuring cell 2 in which there is defined a cavity 21 that includes openings 21 A, 21 A' and/or openings 21 B through which a volume of med ⁇ um"G" intended for measuring purposes and being in a liquid or gaseous state, can enter and leave said cavity
- the detector 3 has connected thereto one or more electric circuits or electronic circuits 1 b which function to evaluate the intensity of the heat received in or generated in the detector 3 and to evaluate the properties of and/or the concentration of the medium “G" on the basis of the intensity of said heat, among other things
- the measuring cell 2 is normally constructed with the aid of a plurality of mechanical parts
- the measuring cell 2 is comprised of a combination of a first part or component 2A and a second part or component 2B, of which at least the part 2A is made of a plastic material and has been formed by some sort of moulding or pressing process or by embossment against a die or mould, such as to enable the interior of the measuring cell to be given an adapted interior shape, i e in the interior of the cavity 21
- the second part 2B may consist in a flat plate B or a base structure where the detector 3 can be formed on a surface 31 "
- the detector 3 is shown as a discrete component in Figure 1
- the surface of the detector 3 or at least parts of the surface of said detector is/are usually coated with two different metal layers M1 , M2 that consist of a selected first metal in a first layer M1 , and a selected second metal in a second layer M1
- the detector 3 is usually mounted 5 completely within the measuring cell 2
- the detector 3 is aligned in the best possible way to obtain a sufficiently good measuring signal It is also important that the detector 3 is sufficiently sensitive to the generated heat to be detected i ⁇
- thermal elements in the form of temperature dependent resistance elements such as Bolometers, or thermoelectric elements or thermocouples
- Bolometers or thermoelectric elements or thermocouples
- thermocouples The following description is concentrated, to a large extent, on the measures required to construct a detector 3 in the form of a number of series-connected thermocouples
- At least the detector 3 constitutes a part of a surface 2B
- This surface may consist in an outer part within the wall parts of the cavity 21 with
- connection lines drawn down towards the supporting base B in connection with the detector 3 of the Figure 1 illustration, where requisite connecting pads are formed
- Figure 3 shows, in accordance with the present invention, that the detector 3 is formed specifically as a discrete unit on a body having the form of an underlying or
- that part of the underlying support surface 31 that forms the actual detector 3 is comprised of one or more surface regions 3a formed topographically in a plastic element At least the surface region or regions 3a is/are coated with a first and a second electrically conductive metal layer M1 , M2, these layers being intended to form a thermocouple in accordance with Figure 4
- the topographic structure shall form from the electrically conductive layer a loop whose electrical resistance varies with temperature It is also possible to form a first and a second loop by means of a topographic structure where the first loop is allowed to be exposed to generated heat and where the second loop is remote or distanced from said generated heat as a result of the topographic structure, therewith enabling compensation to be made for variations in background temperature
- the first metal layer M1 is applied to the surface region 3a concerned at a first angle "b" other than 90D or the normal and that the second metal layer M2 is applied at a second angle ' c" other than 90 and differing from the first angle "b"
- These angles "b” and “c” normally he in one and the same plane
- the topographic structure and/or the form 3a provided with electrically conductive coatings provides the function of one or more several thermocouples, by virtue of the first and the second metal layers M1 , M2 being allowed to overlap within discrete surface parts of the detector
- Figure 5 shows the possibility of producing the detector 3 on a restricted surface region and to produce requisite electric circuitry 3' and/or electric and/or electronic circuits 3" and requisite connection pads 3'" within this restricted surface region in the same way as that described above, i e by coating a topographic structure with one or more metal layers from different angles
- the underlying support surface 31 is produced by shaping, such as moulding, pressing or embossing, against a die or mould 31 ', where at least a part of the mould corresponding to the detector 3, according to Figure 6b, is produced by electroplating a model 31 " of the detector 3, said model 31 " being produced by micromechanically working a substrate, such as a silicon substrate, where the topographic structure and/or configuration of the model 31 " is chosen to correspond to desired surface parts of the detector, electric conductor paths and/or electric and/or electronic circuits
- the base unit 31 shown in Figure 6a can be produced by shaping, such as moulding, pressing or embossing, said unit against a die or mould 31 ', where at least a part of the mould corresponds to the detector 3 produced by micromechanically working a substrate, such as a silicon substrate, where the topographical structure and/or configuration of the substrate 31' is complementa ⁇ ly dependent on desired detector-associated surface parts, electric conductor paths and/or electrical and/or electronic circuits
- Figure 7 shows that the base unit 31 may consist of a discrete of separate component and applied to the first part 2A and/or the second part 2B
- the most favourable embodiment for integrating the detector 3 in said cavity is that shown in Figure 3, where a base unit 31 is allowed to form an integral part of the first cell-part 2A, and where the detector-associated surface parts are an integral part of the surface belonging to said cavity 21
- the base unit 31 is a discrete component in accordance with Figure 7 or an integral part of the first part 2A and/or the second part 2B, it is possible to coat the cavity-associated surface sections and the detector-associated surface parts at one and the same time, preferably with the same metals
- the present invention also enables the topographic structure to be adapted to provide the requisite connection pads 3"' belonging to said detector 3, electric conductor paths 3 ' , and/or electric and/or electronic circuits 3"
- the electrical conductor paths 3' and/or the electrical and/or the electronic circuits 3" can be formed in the second part 2B
- the detector 3 may comprise an integral part of the first part 2A, illustrated in Figure 3, or the second part 2B
- the present method shall be applied when the formed detector 3 does not constitute an integral part of the first cell-part 2A
- each of these conductive ridges has a first side surface 5a, a second side surface 5b and an upper surface 5c
- An intermediate surface 6, designated here a conductive surface, is located between two mutually adjacent conductive ridges 5, 5'
- conductive ridges may be somewhat misleading, since the topographic structure has the form of a greatly reduced “skyscraper structure”, i e the structure is comprised of a plurality of narrow rods where the rods in one row (or column) may be slightly offset laterally with respect to the rods in adjacent alternate rows and with different rods of different heights
- the electrically non- 5 conductive base unit 31 is coated with the first metal M1 at a first angle "b" in relation to the detector surface, and with the second metal M2 at-a second angle "c" relative to said detector surface
- the first angle "b” shall be adapted so that the first side surface 5a and at least a 0 part of the upper surface 5c of respective conductive ridges 5, 5', 5", and at least a part of the intermediate conductive surfaces 6 will be coated with the first metal layer M1
- the second angel "c” shall be adapted so that the second side surface 5b and at least a part of the upper surface 5c of respective conductive ridges 5, 5', 5", and at least a part of the intermediate conductive surfaces 6 will be 5 coated with the second metal layer M2, in accordance with Figure 4
- the first and the second angles "b", “c” shall be adapted so that the second metal layer overlaps the first metal layer M1 on the upper surface 5c of respective conductive ridges 5 5' and on the intermediate conductive surfaces 6, 6' so as to 0 form an electric contact with M12, M21 , and so that the metal layers M1 , M2 will form a series of electrically coupled ridges or transitions M12, M12', M21 , M21 ' between the first and the second metals
- the integrated part is aligned relative to the angle of incidence "a" of the incident light 4 by positioning the detector 3 in relation to incident heat rays 4 such that said rays 4 will activate the upper surface 5c of respective conductive ridges, and such that the intermediate conductive surfaces 6 will e in the shade of the conductive ridges with respect to incident heat rays 4
- electric isolation, or insulation, 71 between the detector 3 and surrounding metal layers M1 R, M2R is achieved with the aid of insulating ridges 81 with adjacent insulating surfaces 91 belonging to the integrated part are so positioned relative to each other and relative to the conductive ridges 5, 5', 5" and relative to the first and to the second angle "b", "c" that both the first metal coating and the second metal coating will be absent on the insulated surfaces 71
- Figures 9 and 10 also show how a column of ridges is constructed It is desirable to obtain a large number of series-coupled transitions from one metal to the other metal, in order to enhance the resolution, or sensitivity, of the detector 3 If it is necessary to increase the number of series-connected transitions, the detector surface will obtain a pronounced oblong shape For reasons of measuring technology, however, it is desirable for the detector surface to have an essentially square shape
- the conductive ridges have a configuration which comprises a number of columns of mutually parallel conductive ridges, as shown in Figure 11 , where the number of columns is "n”, here designated column 1 (k1 ), column 2 (k2), and so on to column “n” (kn) where the number of conductive ridges in respective columns is "m”, here designated ridge 1 (a1 ), ridge 2 (a2) and so on up to ridge "m” (am) and where "m" may be different for respective columns
- Figure 12 illustrates an embodiment in which the electric interconnection 51 between two ridges of two mutually adjacent columns k1 , k2 can tie effected by forming an electrically conductive surface section 51 ' as said interconnection
- FIG. 13 illustrates that an essentially square thermocouple can be constructed by 10 combining electrically conductive ridges a1 , a2 with insulating ridges 81
- the series of electrically conductive ridges form the series-connected thermocouples, where the metal layer on a first or on a second side surface of a first conductive ridge k1 , a1
- I D or a conductive surface adjacent said first conductive ridge, in the series of conductive ridges forms a first connection electrode 53 on the series-connected thermocouple, and that a first or a second side surface of a last conductive ridge kn, am, or a conductive surface adjacent said last conductive ridge, in the series of conductive ridges, forms a second connection electrode 54 on the series-connected
- Figure 14 is intended to show in particular that when the detector 3 is adapted to detect generated heat, the upper surface 5c of a respective conductive ridge may be covered with a heat-absorbing or a heat-generating layer 55
- thermocouple shall absorb the greatest possible part of the thermal energy present
- the cold solder points, i e the conductive surfaces between the conductive ridges shall not be subjected to heat generation
- the heat-absorbing layer 55 may be comprised of a layer of enzymes or some corresponding substance
- the two metals M1 , M2 used shall be appropriate with respect to their thermoelectric properties.
- the first M1 shall differ from the second metal M2 and the metals shall provide a thermoelectric effect in coaction with one another.
- the two metals are gold and chromium respectively, where chromium is the first, innermost metal M1 , and gold is the second metal M2.
- a measuring cell can be provided or allocated with a plurality of detectors, within the concept of the invention. This possibility is illustrated in Figure 15, in which the first part 2A includes integrally two or more different detectors 31 , 32, and/or by providing the second part 2B or further second parts with one or more detectors 33, 34.
- the devices and apparatus illustrated have been greatly enlarged and greatly simplified.
- the cavity in a measuring cell will have dimensions in the regions of millimetres or a centimetre, whilst the detector and its ridges will have dimensions in the micrometer range.
- the present invention is not restricted to specific sizes of the components and said components may have any desired dimensions, in accordance with the requirements that prevail in respect of a particular application.
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- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
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Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99965703A EP1151277A1 (en) | 1998-12-29 | 1999-12-29 | A method for manufacturing a calorimeter-related detector and a detector manufactured according to the method |
JP2000591413A JP2002533715A (en) | 1998-12-29 | 1999-12-29 | Method of manufacturing calorimeter-related detector and detector manufactured by the method |
AU21387/00A AU2138700A (en) | 1998-12-29 | 1999-12-29 | A method for manufacturing a calorimeter-related detector and a detector manufactured according to the method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9804580A SE521792C2 (en) | 1998-12-29 | 1998-12-29 | Use of a detector in a calorimeter and a detector therefor |
SE9804580-0 | 1998-12-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000039563A1 true WO2000039563A1 (en) | 2000-07-06 |
Family
ID=20413892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/SE1999/002498 WO2000039563A1 (en) | 1998-12-29 | 1999-12-29 | A method for manufacturing a calorimeter-related detector and a detector manufactured according to the method |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1151277A1 (en) |
JP (1) | JP2002533715A (en) |
AU (1) | AU2138700A (en) |
SE (1) | SE521792C2 (en) |
WO (1) | WO2000039563A1 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4110653A1 (en) * | 1990-07-12 | 1992-01-23 | Landis & Gyr Betriebs Ag | Thermoelectric transducer with several thermoelement pairs - has first junction points with rows of first and second conductive material w.r.t. reference direction |
-
1998
- 1998-12-29 SE SE9804580A patent/SE521792C2/en not_active IP Right Cessation
-
1999
- 1999-12-29 EP EP99965703A patent/EP1151277A1/en not_active Withdrawn
- 1999-12-29 AU AU21387/00A patent/AU2138700A/en not_active Abandoned
- 1999-12-29 JP JP2000591413A patent/JP2002533715A/en active Pending
- 1999-12-29 WO PCT/SE1999/002498 patent/WO2000039563A1/en not_active Application Discontinuation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4110653A1 (en) * | 1990-07-12 | 1992-01-23 | Landis & Gyr Betriebs Ag | Thermoelectric transducer with several thermoelement pairs - has first junction points with rows of first and second conductive material w.r.t. reference direction |
Also Published As
Publication number | Publication date |
---|---|
JP2002533715A (en) | 2002-10-08 |
SE9804580D0 (en) | 1998-12-29 |
SE9804580L (en) | 2000-06-30 |
EP1151277A1 (en) | 2001-11-07 |
SE521792C2 (en) | 2003-12-09 |
AU2138700A (en) | 2000-07-31 |
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