WO2000031550A1 - Support de masse d'epreuve pour accelerometres - Google Patents
Support de masse d'epreuve pour accelerometres Download PDFInfo
- Publication number
- WO2000031550A1 WO2000031550A1 PCT/US1999/027864 US9927864W WO0031550A1 WO 2000031550 A1 WO2000031550 A1 WO 2000031550A1 US 9927864 W US9927864 W US 9927864W WO 0031550 A1 WO0031550 A1 WO 0031550A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- support
- flexible supports
- proof mass
- housing
- flexible
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
Definitions
- the present invention relates to a proof mass support for accelerometers, and more particularly to a support for use with either angular or linear accelerometers.
- accelerometers are adapted to be utilized in many applications such as gravimeters,
- the present invention provides at least four different flexible supports for
- These flexible supports include a first pair which are generally planar and are spaced from one another and
- the flexible supports also include a second
- the supports are all substantially disposed in planes passing through th axis of rotation of the body of the proof mass.
- the planes are generally parallel with one another and are spaced from one another in the direction of motion of the device.
- the present invention has a construction wherein the housing, the proof mass
- the invention also provides a design which can be successfully employed at
- each of the flexible supports includes at least one sheet of
- Fig. 1 is a top perspective view of a proof mass support for an angular
- Fig. 2 is a top view of the support shown in Fig. 1 ;
- Fig. 3 is a sectional view taken along line 3-3 of Fig. 1;
- Fig. 4 is a top perspective view of a modified support for an angular
- Fig. 5 is a top view of the support shown in Fig. 4;
- Fig. 6 is a sectional view taken along line 6-6 of Fig. 5;
- Fig. 7 is a top perspective view of a proof mass support for a linear accelerometer
- Fig. 8 is a front view of the support shown in Fig. 7;
- Fig. 9 is a sectional view taken along line 9-9 of Fig. 8;
- Fig. 10 is a top perspective view of a modified support for a linear accelerometer
- Fig. 11 is a front view of the support shown in Fig. 10.
- Fig. 12 is a sectional view taken along line 12-12 of Fig. 11.
- FIG. 1-3 a single block of metal indicated generally by reference numeral 10 which includes a housing 12
- the proof mass includes two mass portions 16 and 18 connected to one another by an intermediate
- the proof mass is adapted to rotate about an axis of rotation 22 extending
- the proof mass portions 16 and 18 are of exactly the same dimensions and weight.
- proof mass will not respond to linear motion in any direction.
- the proof mass is supported from the housing by four spaced flexible supports
- the block of metal 10 is machined by electric discharge machining. Such machining produces four cut-outs 40, 42, 44, and 46 through the housing for receiving conventional sensors (not shown) which are usually in the form of capacitors or coils as is well-known in the art.
- the machining also provides a plurality of wall portions on the housing which are generally parallel with the outer side walls 50 and 52 of the proof mass portion 16 and which are spaced therefrom with a small clearance.
- the machining process produces four cut-outs 60, 62, 64 and 66 through the housing for receiving conventional sensors.
- the machining also provides a plurality of wall portions which are generally parallel with the outer side walls 70 and 72 of the proof mass portion 18 and which are spaced therefrom with a small
- flexible support 34 is formed by two parallel cut-out areas 80, 82 extending through the block of material 10 to define a sheet of material 84
- the sheet of material 84 provides nearly pure bending movement during operation, thereby causing the flexible support to function like a highly linear spring.
- Cut-out area 80 joins with a cut-out area 90 which in turn joins with a cut-out area 92 of the flexible support 30 which corresponds to the cutout area 80 of flexible support 34.
- a cut-out area 94 defines with parallel cut-out area 92 a sheet of material
- Sheet of material 96 also provides nearly pure bending movement during operation, thereby causing flexible support 30 to also function like a highly linear spring.
- Cut-out area 90 defines one side of the intermediate portion 20 joining the proof mass
- each flexible support being generally planar and being disposed substantially in a plane passing through axis 22.
- supports 30 and 36 is substantially disposed in a first plane, and a second pair of
- the four flexible supports 30, 32, 34, and 36 working together provide a flexible support which is compliant for rotation about the axis 22, but is stiff in the other degrees of freedom.
- Figs. 4-6 a modified form of proof mass support for angular accelerometers is shown wherein parts identical to those in Fig. 1-3 have been given the same reference numerals.
- the only difference in the structure shown in Figs. 4-6 lies in the structure of the modified flexible supports 30', 32', 34' and 36' wherein each of the supports includes two sheets of material which have pure bending movement
- flexible support 34' includes parallel cut-out
- Cut-out areas 100 and 104 are in communication with cut-out 64, while cut-out area 102 joins a cut-out area 114 defining one side of intermediate portion 20 of the proof mass. Cut-out area 114 joins with cut-out area 116 of flexible support 30', and cut-out area 116 corresponds to cut-out area 102 of flexible support 34'.
- Flexible support 30' also includes a pair of cut-out areas 120 and 122 which are parallel with cut-out area 116 and which define a pair of parallel sheets of material 124
- Flexible support 30' as well as flexible supports 32' and 36' are similar in construction and function to flexible support
- the device shown in Figs. 4-6 includes four different flexible supports spaced from one another, each flexible support being generally planar and being disposed substantially in a plane passing through axis 22.
- a first pair of flexible supports 30' and 36' is substantially disposed in a first plane
- a second pair of flexible supports 32' and 34' is substantially disposed in a second plane, the first and
- a proof mass support for a linear accelerometer is disclosed.
- a single block of metal 150 includes a housing 152 and a proof mass 154.
- the proof mass is supported from the housing by four spaced flexible supports 160, 162, 164, and 166.
- the block of metal is machined by electric discharge machining to provide cutouts 170 and 172 for receiving conventional sensors.
- Flexible support 160 is defined by two generally parallel cut-out areas 180 and 182 which define a sheet of material 184 therebetween for supporting the proof mass from the housing.
- Flexible support 162 is defined by two generally parallel cut-out
- Cut-out area 180 joins with a cut-out area 200 which in turn is in communication with cut-out 170 so that the proof mass has a small clearance
- the sheets of material 184 and 194 have nearly pure bending movement when the proof mass is deflected with respect to the housing.
- Cut-out areas 182 and 190 are joined by a cut-out area 202 which provides a small clearance between the proof mass and wall 152' of the housing. Cut-out area 192 joins with a cut-out area 204 which in turn is in communication with cut-out 172 so
- a first pair of flexible supports 160 and 164 are spaced from one another and are disposed substantially in a first plane.
- a second pair of flexible supports 162 and 166 are spaced from one another and are disposed in substantially a
- first and second planes are spaced from one another in a direction of motion indicated by arrow X-X in Fig. 8. Motions in the direction X-X will be sensed by movement of the proof mass in nearly pure bending at the edges of the sheets of material to form a highly linear spring, while the flexible supports are stiff in
- the flexible supports 160, 162, 164 and 166 may each extend the entire width W of the device as seen in Fig. 7, or they may extend less than half the width with four flexible supports at the back side of the device (hidden from view in Fig. 7) being
- a modified form of proof mass support for linear accelerometers wherein similar parts have been given the same reference numerals.
- the only difference in this form of the invention is that the modified flexible supports 160', 162', 164', and 166' each include two sheets of material rather than a single sheet as in embodiment of Figs. 7-9 to increase the linearity and compliance of
- cut-out area 182 has been extended to intersect with a cut-out area 210
- Cut-out areas 212 which joins with a cut-out area 212 parallel with cut-out area 182. Cut-out areas 212
- cut-out area 190 has been extended to intersect with a cut-out area 220 which joins with a cut-out area 222 parallel with cut-out area 192.
- Cut-out areas 222 and 192 define therebetween a sheet of material 224 which is parallel with sheet of material 194 and connected therewith by
- each of the flexible supports being generally planar.
- a first pair of flexible supports 160' and 164' are spaced from one another and are substantially disposed in a first plane.
- a second pair of flexible supports 162' and 166' are spaced from one another and are substantially disposed in
- first and second planes are spaced from one another in a direction of motion indicated by arrow Y-Y in Fig. 11. Motions in the direction Y-Y will be sensed by movement of the proof mass in pure bending at the edges of the sheets
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU16333/00A AU1633300A (en) | 1998-11-25 | 1999-11-24 | Proof mass support for accelerometers |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11003098P | 1998-11-25 | 1998-11-25 | |
US60/110,030 | 1998-11-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000031550A1 true WO2000031550A1 (fr) | 2000-06-02 |
Family
ID=22330872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1999/027864 WO2000031550A1 (fr) | 1998-11-25 | 1999-11-24 | Support de masse d'epreuve pour accelerometres |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU1633300A (fr) |
WO (1) | WO2000031550A1 (fr) |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008061282A1 (fr) | 2006-11-23 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
WO2008061278A1 (fr) * | 2006-11-23 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
WO2008061272A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
WO2008061277A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
WO2008061275A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
WO2008061276A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
WO2008061273A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
US7562460B2 (en) | 2006-11-23 | 2009-07-21 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7571547B2 (en) | 2006-11-23 | 2009-08-11 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7584544B2 (en) | 2006-11-20 | 2009-09-08 | Technological Resources Pty, Ltd. | Gravity gradiometer |
US7624635B2 (en) | 2006-11-23 | 2009-12-01 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7627954B2 (en) | 2006-11-23 | 2009-12-08 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7718804B2 (en) | 2003-06-27 | 2010-05-18 | University Of Maryland Biotechnology Institute | Quaternary nitrogen heterocyclic compounds for detecting aqueous monosaccharides in physiological fluids |
US7784343B2 (en) | 2005-10-06 | 2010-08-31 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7849739B2 (en) | 2006-11-23 | 2010-12-14 | Technological Resources Pty. Ltd. | Gravity gradiometer |
AU2007249049B2 (en) * | 2006-11-23 | 2013-07-04 | Technological Resources Pty. Limited | Gravity gradiometer |
AU2007251890B2 (en) * | 2006-11-20 | 2013-07-04 | Technological Resources Pty. Limited | A gravity gradiometer |
JPWO2013161597A1 (ja) * | 2012-04-27 | 2015-12-24 | 株式会社村田製作所 | 加速度センサ |
Citations (7)
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---|---|---|---|---|
US4928203A (en) * | 1989-02-28 | 1990-05-22 | United Technologies | Capacitive accelerometer with hinges on top and bottom surface |
US5000817A (en) * | 1984-10-24 | 1991-03-19 | Aine Harry E | Batch method of making miniature structures assembled in wafer form |
US5261277A (en) * | 1990-09-25 | 1993-11-16 | Sextant Avionique | Resonator micro-accelerometer |
US5369057A (en) * | 1993-12-21 | 1994-11-29 | Delco Electronics Corporation | Method of making and sealing a semiconductor device having an air path therethrough |
US5652384A (en) * | 1994-03-28 | 1997-07-29 | I/O Sensors, Inc. | Sensor structure with L-shaped spring legs |
US5656778A (en) * | 1995-04-24 | 1997-08-12 | Kearfott Guidance And Navigation Corporation | Micromachined acceleration and coriolis sensor |
US5777226A (en) * | 1994-03-28 | 1998-07-07 | I/O Sensors, Inc. | Sensor structure with L-shaped spring legs |
-
1999
- 1999-11-24 AU AU16333/00A patent/AU1633300A/en not_active Abandoned
- 1999-11-24 WO PCT/US1999/027864 patent/WO2000031550A1/fr active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5000817A (en) * | 1984-10-24 | 1991-03-19 | Aine Harry E | Batch method of making miniature structures assembled in wafer form |
US4928203A (en) * | 1989-02-28 | 1990-05-22 | United Technologies | Capacitive accelerometer with hinges on top and bottom surface |
US5261277A (en) * | 1990-09-25 | 1993-11-16 | Sextant Avionique | Resonator micro-accelerometer |
US5369057A (en) * | 1993-12-21 | 1994-11-29 | Delco Electronics Corporation | Method of making and sealing a semiconductor device having an air path therethrough |
US5652384A (en) * | 1994-03-28 | 1997-07-29 | I/O Sensors, Inc. | Sensor structure with L-shaped spring legs |
US5777226A (en) * | 1994-03-28 | 1998-07-07 | I/O Sensors, Inc. | Sensor structure with L-shaped spring legs |
US5656778A (en) * | 1995-04-24 | 1997-08-12 | Kearfott Guidance And Navigation Corporation | Micromachined acceleration and coriolis sensor |
Cited By (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7718804B2 (en) | 2003-06-27 | 2010-05-18 | University Of Maryland Biotechnology Institute | Quaternary nitrogen heterocyclic compounds for detecting aqueous monosaccharides in physiological fluids |
US8569502B2 (en) | 2003-06-27 | 2013-10-29 | Chris Geddes | Quaternary nitrogen heterocyclic compounds for detecting aqueous monosaccharides in physiological fluids |
US8338602B2 (en) | 2003-06-27 | 2012-12-25 | University Of Maryland, Baltimore County | Quaternary nitrogen heterocyclic compounds for detecting aqueous monosaccharides in physiological fluids |
US7975544B2 (en) | 2005-10-06 | 2011-07-12 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7823448B2 (en) | 2005-10-06 | 2010-11-02 | Technological Resources Pty. Ltd. | Actuatory and gravity gradiometer |
US8074515B2 (en) | 2005-10-06 | 2011-12-13 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7784343B2 (en) | 2005-10-06 | 2010-08-31 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7980130B2 (en) | 2005-10-06 | 2011-07-19 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7942054B2 (en) | 2005-10-06 | 2011-05-17 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7938003B2 (en) | 2005-10-06 | 2011-05-10 | Technological Resources Pty. Limited | Gravity gradiometer |
US7788974B2 (en) | 2005-10-06 | 2010-09-07 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7584544B2 (en) | 2006-11-20 | 2009-09-08 | Technological Resources Pty, Ltd. | Gravity gradiometer |
WO2008061276A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
US7596876B2 (en) | 2006-11-20 | 2009-10-06 | Technological Resources Pty. Ltd. | Gravity gradiometer |
AU2007251890B2 (en) * | 2006-11-20 | 2013-07-04 | Technological Resources Pty. Limited | A gravity gradiometer |
WO2008061272A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
US7814790B2 (en) | 2006-11-20 | 2010-10-19 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7714584B2 (en) | 2006-11-20 | 2010-05-11 | Technological Resources Pty. Ltd. | Gravity gradiometer |
WO2008061277A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
WO2008061273A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
WO2008061275A1 (fr) * | 2006-11-20 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
US8033170B2 (en) | 2006-11-20 | 2011-10-11 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7581327B2 (en) | 2006-11-20 | 2009-09-01 | Technological Recources Pty. Ltd. | Gravity gradiometer |
US7562461B2 (en) | 2006-11-20 | 2009-07-21 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7559149B2 (en) | 2006-11-22 | 2009-07-14 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7849739B2 (en) | 2006-11-23 | 2010-12-14 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7562460B2 (en) | 2006-11-23 | 2009-07-21 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7823449B2 (en) | 2006-11-23 | 2010-11-02 | Technological Resources Pty, Ltd. | Gravity gradiometer |
WO2008061282A1 (fr) | 2006-11-23 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
US7637153B2 (en) | 2006-11-23 | 2009-12-29 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7571547B2 (en) | 2006-11-23 | 2009-08-11 | Technological Resources Pty. Ltd. | Gravity gradiometer |
US7627954B2 (en) | 2006-11-23 | 2009-12-08 | Technological Resources Pty. Ltd. | Gravity gradiometer |
AU2007249049B2 (en) * | 2006-11-23 | 2013-07-04 | Technological Resources Pty. Limited | Gravity gradiometer |
US7624635B2 (en) | 2006-11-23 | 2009-12-01 | Technological Resources Pty. Ltd. | Gravity gradiometer |
WO2008061278A1 (fr) * | 2006-11-23 | 2008-05-29 | Technological Resources Pty Limited | Gradiomètre de gravité |
JPWO2013161597A1 (ja) * | 2012-04-27 | 2015-12-24 | 株式会社村田製作所 | 加速度センサ |
Also Published As
Publication number | Publication date |
---|---|
AU1633300A (en) | 2000-06-13 |
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