AU1633300A - Proof mass support for accelerometers - Google Patents

Proof mass support for accelerometers

Info

Publication number
AU1633300A
AU1633300A AU16333/00A AU1633300A AU1633300A AU 1633300 A AU1633300 A AU 1633300A AU 16333/00 A AU16333/00 A AU 16333/00A AU 1633300 A AU1633300 A AU 1633300A AU 1633300 A AU1633300 A AU 1633300A
Authority
AU
Australia
Prior art keywords
accelerometers
proof mass
mass support
support
proof
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU16333/00A
Inventor
Martin V. Moody
Ho Jung Paik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Maryland at Baltimore
Original Assignee
University of Maryland at Baltimore
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Maryland at Baltimore filed Critical University of Maryland at Baltimore
Publication of AU1633300A publication Critical patent/AU1633300A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
AU16333/00A 1998-11-25 1999-11-24 Proof mass support for accelerometers Abandoned AU1633300A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11003098P 1998-11-25 1998-11-25
US60110030 1998-11-25
PCT/US1999/027864 WO2000031550A1 (en) 1998-11-25 1999-11-24 Proof mass support for accelerometers

Publications (1)

Publication Number Publication Date
AU1633300A true AU1633300A (en) 2000-06-13

Family

ID=22330872

Family Applications (1)

Application Number Title Priority Date Filing Date
AU16333/00A Abandoned AU1633300A (en) 1998-11-25 1999-11-24 Proof mass support for accelerometers

Country Status (2)

Country Link
AU (1) AU1633300A (en)
WO (1) WO2000031550A1 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005000109A2 (en) 2003-06-27 2005-01-06 University Of Maryland Biotechnology Institute Quaternary nitrogen heterocyclic compounds for detecting aqueous monosaccharides in physiological fluids
MX2007010301A (en) 2005-10-06 2008-03-04 Tech Resources Pty Ltd Gravity gradiometer.
WO2008061272A1 (en) 2006-11-20 2008-05-29 Technological Resources Pty Limited A gravity gradiometer
CA2690893A1 (en) 2006-11-20 2008-05-29 Technological Resources Pty Limited A gravity gradiometer
WO2008061273A1 (en) * 2006-11-20 2008-05-29 Technological Resources Pty Limited A gravity gradiometer
CA2691032A1 (en) * 2006-11-20 2008-05-29 Technological Resources Pty Limited A gravity gradiometer
AU2007249127A1 (en) * 2006-11-20 2008-06-05 Technological Resources Pty. Limited A gravity gradiometer
CA2690958C (en) 2006-11-20 2015-06-30 Technological Resources Pty Limited A gravity gradiometer
AU2007251890B2 (en) * 2006-11-20 2013-07-04 Technological Resources Pty. Limited A gravity gradiometer
AU2007249049B2 (en) * 2006-11-23 2013-07-04 Technological Resources Pty. Limited Gravity gradiometer
JP2010510499A (en) 2006-11-23 2010-04-02 テクノロジカル リソーシーズ プロプライエタリー リミテッド Gravity gradiometer
ZA200710808B (en) 2006-11-23 2009-03-25 Tech Resources Pty Ltd Gravity gradiometer
EP2089741B1 (en) 2006-11-23 2015-03-25 Technological Resources PTY. Limited Gravity gradiometer
EP1949140A4 (en) 2006-11-23 2010-12-08 Tech Resources Pty Ltd Gravity gradiometer
CA2612677A1 (en) 2006-11-23 2008-05-23 Technological Resources Pty. Limited Compensation for unwanted accelerations in a gravity gradiometer
CA2612683A1 (en) 2006-11-23 2008-05-23 Technological Resources Pty. Limited Gravity gradiometer
CA2612602A1 (en) 2006-11-23 2008-05-23 Technological Resources Pty, Limited. Gravity gradiometer
JP5888411B2 (en) * 2012-04-27 2016-03-22 株式会社村田製作所 Acceleration sensor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5000817A (en) * 1984-10-24 1991-03-19 Aine Harry E Batch method of making miniature structures assembled in wafer form
US4928203A (en) * 1989-02-28 1990-05-22 United Technologies Capacitive accelerometer with hinges on top and bottom surface
FR2667157B1 (en) * 1990-09-25 1994-06-10 Sextant Avionique RESONATOR MICRO-ACCELEROMETER AND MANUFACTURING METHOD.
US5369057A (en) * 1993-12-21 1994-11-29 Delco Electronics Corporation Method of making and sealing a semiconductor device having an air path therethrough
EP0753156B1 (en) * 1994-03-28 2001-07-25 I/O Sensors, Inc. Sensor structure with l-shaped spring legs
US5777226A (en) * 1994-03-28 1998-07-07 I/O Sensors, Inc. Sensor structure with L-shaped spring legs
US5656778A (en) * 1995-04-24 1997-08-12 Kearfott Guidance And Navigation Corporation Micromachined acceleration and coriolis sensor

Also Published As

Publication number Publication date
WO2000031550A1 (en) 2000-06-02

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase