WO2000002232A3 - Rapid thermal processing system having scanning temperature sensor - Google Patents

Rapid thermal processing system having scanning temperature sensor

Info

Publication number
WO2000002232A3
WO2000002232A3 PCT/US1999/014463 US9914463W WO0002232A3 WO 2000002232 A3 WO2000002232 A3 WO 2000002232A3 US 9914463 W US9914463 W US 9914463W WO 0002232 A3 WO0002232 A3 WO 0002232A3
Authority
WO
WIPO (PCT)
Prior art keywords
processing system
rapid thermal
thermal processing
temperature sensor
assembly
Prior art date
Application number
PCT/US1999/014463
Other languages
French (fr)
Other versions
WO2000002232A2 (en
Inventor
James E Fair
Fritz B Harris
Original Assignee
Intevac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intevac Inc filed Critical Intevac Inc
Publication of WO2000002232A2 publication Critical patent/WO2000002232A2/en
Publication of WO2000002232A3 publication Critical patent/WO2000002232A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/16—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by roller conveyors
    • C03B35/163—Drive means, clutches, gearing or drive speed control means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C03B29/06—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
    • C03B29/08—Glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/16—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by roller conveyors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • F26B13/008—Controlling the moisture profile across the width of the material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • F26B3/30—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun from infrared-emitting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F27B9/021—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces having two or more parallel tracks
    • F27B9/022—With two tracks moving in opposite directions
    • F27B9/023—With two tracks moving in opposite directions with a U turn at one end
    • F27B9/024—With two tracks moving in opposite directions with a U turn at one end with superimposed tracks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
    • F27D21/0014—Devices for monitoring temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • F27D99/0006—Electric heating elements or system
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/04—Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies
    • G01K13/06—Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies in linear movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • F27D99/0006—Electric heating elements or system
    • F27D2099/0008—Resistor heating

Abstract

A rapid thermal processing system for flat panel displays includes a processing chamber, a transport assembly for transporting a substrate through the processing chamber, a heating assembly and a temperature sensing assembly (180) for sensing the temperature of a substrate. The temperature sensing assembly (180) comprises a sensor and a carriage assembly for controllably moving the sensor, in one or two dimensions parallel to the substrate surface, relative to the processing chamber.
PCT/US1999/014463 1998-07-01 1999-06-24 Rapid thermal processing system having scanning temperature sensor WO2000002232A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9133898P 1998-07-01 1998-07-01
US60/091,338 1998-07-01

Publications (2)

Publication Number Publication Date
WO2000002232A2 WO2000002232A2 (en) 2000-01-13
WO2000002232A3 true WO2000002232A3 (en) 2000-03-30

Family

ID=22227258

Family Applications (3)

Application Number Title Priority Date Filing Date
PCT/US1999/014461 WO2000001628A1 (en) 1998-07-01 1999-06-24 Heating assembly for rapid thermal processing system
PCT/US1999/014462 WO2000001995A1 (en) 1998-07-01 1999-06-24 Substrate transport assembly for rapid thermal processing system
PCT/US1999/014463 WO2000002232A2 (en) 1998-07-01 1999-06-24 Rapid thermal processing system having scanning temperature sensor

Family Applications Before (2)

Application Number Title Priority Date Filing Date
PCT/US1999/014461 WO2000001628A1 (en) 1998-07-01 1999-06-24 Heating assembly for rapid thermal processing system
PCT/US1999/014462 WO2000001995A1 (en) 1998-07-01 1999-06-24 Substrate transport assembly for rapid thermal processing system

Country Status (4)

Country Link
US (2) US6204483B1 (en)
JP (2) JP3604082B2 (en)
KR (2) KR100393857B1 (en)
WO (3) WO2000001628A1 (en)

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US20120181265A1 (en) * 2010-07-15 2012-07-19 Despatch Industries Limited Partnership Firing furnace configuration for thermal processing system
US8938993B2 (en) * 2010-11-30 2015-01-27 Ut-Battelle, Llc Glass strengthening and patterning methods
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DE102012007141A1 (en) 2012-04-10 2013-10-10 Bernhard Spindler Venetian blinds
ITTO20120401A1 (en) * 2012-05-04 2013-11-05 Sasil S P A METHOD AND EQUIPMENT FOR THE RECOVERY OF WASTE OF PLANTS FOR THE PRODUCTION OF FIBER CONTINUOUSLY AND FOR THE DIRECT RECYCLING OF GLASS OBTAINED.
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US4601743A (en) * 1983-09-12 1986-07-22 Casso Solar Corporation Glass furnace with heat sensing means
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Also Published As

Publication number Publication date
JP3604082B2 (en) 2004-12-22
WO2000001628A1 (en) 2000-01-13
WO2000001995A1 (en) 2000-01-13
KR20010083869A (en) 2001-09-03
JP2003517405A (en) 2003-05-27
WO2000002232A2 (en) 2000-01-13
US6236021B1 (en) 2001-05-22
KR100405909B1 (en) 2003-11-14
US6204483B1 (en) 2001-03-20
KR100393857B1 (en) 2003-08-06
KR20010083868A (en) 2001-09-03
JP2002519620A (en) 2002-07-02

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