WO1999065639A1 - Laser drilling of holes in materials - Google Patents
Laser drilling of holes in materials Download PDFInfo
- Publication number
- WO1999065639A1 WO1999065639A1 PCT/GB1999/001875 GB9901875W WO9965639A1 WO 1999065639 A1 WO1999065639 A1 WO 1999065639A1 GB 9901875 W GB9901875 W GB 9901875W WO 9965639 A1 WO9965639 A1 WO 9965639A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser
- wavelength
- holes
- wavelengths
- materials
- Prior art date
Links
- 239000000463 material Substances 0.000 title claims abstract description 136
- 238000005553 drilling Methods 0.000 title claims abstract description 64
- 230000005855 radiation Effects 0.000 claims abstract description 108
- 238000000034 method Methods 0.000 claims abstract description 74
- 239000002019 doping agent Substances 0.000 claims abstract description 40
- 238000010521 absorption reaction Methods 0.000 claims abstract description 35
- 239000003989 dielectric material Substances 0.000 claims abstract description 25
- 230000003287 optical effect Effects 0.000 claims description 17
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 16
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 12
- 239000001569 carbon dioxide Substances 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 7
- 239000011347 resin Substances 0.000 claims description 7
- 229910010293 ceramic material Inorganic materials 0.000 claims description 6
- 239000004642 Polyimide Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 239000004593 Epoxy Substances 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229910052574 oxide ceramic Inorganic materials 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 2
- 238000004080 punching Methods 0.000 claims description 2
- 125000003700 epoxy group Chemical group 0.000 claims 1
- 229920000647 polyepoxide Polymers 0.000 claims 1
- 235000013824 polyphenols Nutrition 0.000 claims 1
- 238000003491 array Methods 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract description 2
- 230000009102 absorption Effects 0.000 description 24
- 230000003595 spectral effect Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 2
- 229910052689 Holmium Inorganic materials 0.000 description 2
- 229910017502 Nd:YVO4 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 2
- 239000004760 aramid Substances 0.000 description 2
- 229920003235 aromatic polyamide Polymers 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 2
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0029—Etching of the substrate by chemical or physical means by laser ablation of inorganic insulating material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
- B23K2101/35—Surface treated articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/10—Aluminium or alloys thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/12—Copper or alloys thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/30—Organic material
- B23K2103/42—Plastics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/095—Dispersed materials, e.g. conductive pastes or inks for polymer thick films, i.e. having a permanent organic polymeric binder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0104—Properties and characteristics in general
- H05K2201/0112—Absorbing light, e.g. dielectric layer with carbon filler for laser processing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
- H05K3/0035—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material of blind holes, i.e. having a metal layer at the bottom
Definitions
- This invention relates to laser drilling of holes in materials, and particularly to the treating of materials to enhance the quality and ease of drilling therein.
- Spectral wavelength regions are defined as: ultraviolet: 190 - 400nm, visible: 400 - 700nm, near infrared: 700nm - 1.5 ⁇ m, mid infrared: 1.5 - 8 ⁇ m, and far infrared: 8 - lOO ⁇ m.
- the absorption depth (of 1 ) of a material of a photon or photons is defined as the reciprocal of the absorption coefficient ( ⁇ ) of the material at the wavelength of the photon or photons.
- a method of laser drilling one or more holes in a material comprising treating the material to change its absorption depth at one or more wavelengths, and drilling one or more holes in the material using a laser emitting radiation at the wavelength or wavelengths.
- the method may comprise treating the material such that its absorption depth at the wavelength or wavelengths is decreased.
- the method may comprise treating the material such that its absorption depth at the wavelength or wavelengths is in the range 0.01-lO ⁇ m, more preferably in the range 0.1-l ⁇ m.
- treating the material to change the absorption depth thereof, the efficacy of laser drilling holes therein may be increased.
- treating the material will not adversely affect other properties thereof, such as its dielectric behaviour, mechanical strength, flexibility, adhesive properties or thermal properties.
- the method may comprise treating the material by adding one or more dopants thereto, or by irradiating the material e.g. with electromagnetic radiation, or by particle bombardment, or by heating the material e.g. using a laser radiation source, or by material layering, or by lamination treatment, or by a combination of any of these.
- a method of laser drilling one or more holes in a material comprising treating the material such that the absorption depth thereof is changed at a wavelength or wavelengths by adding one or more dopants thereto, and drilling one or more holes in the material using a laser radiation source emitting radiation at the wavelength or wavelengths.
- a method of laser drilling one or more holes in more than one material comprising treating one or more of the materials such that the absorption depth thereof is changed at a wavelength or wavelengths by adding one or more dopants thereto, and drilling one or more holes in the materials using a laser radiation source emitting radiation at the wavelength or wavelengths.
- the methods of the second and third aspects of the invention may comprise treating the or each material such that its absorption depth at the wavelength or wavelengths is decreased.
- the methods may comprise treating the or each material such that its absorption depth at the wavelength or wavelengths is in the range 0.01-lO ⁇ m, more preferably 0.1-l ⁇ m.
- the laser radiation at the wavelength or wavelengths will then be strongly absorbed by the or each treated material, particularly at the surface thereof. Such absorption will create a rapid temperature and pressure rise which induces a miniexplosion at the surface of the material.
- a small crater is left behind as particulates or gaseous products are expelled away, which can be deepened by the continued application of laser radiation and a hole thus drilled with precision and control.
- laser drilling can produce high quality holes with good wall edge definition and an almost complete lack of heat degradation and collateral damage to surrounding unexposed regions of the material and material below the drilling site.
- suitable dopants chosen to decrease the absorption depth at appropriate wavelength (s) laser radiation sources having the lowest running costs and highest reliability etc. can be incorporated into tools used for drilling high quality holes.
- the or each dopant may be an organic dopant. Additionally or alternatively, the or each dopant may be a molecular dopant. Additionally or alternatively, the or each dopant may be a dye molecule, for example C 42 H 34 O 6 Cl 2 , C 40 H 30 S 2 O 4 Cl 2 or C 50 H 43 O 6 Cl, or an ink, particularly a coloured or black ink. Small or even trace concentrations of the or each dopant may be added to the or each material. For example, the percentage concentration of the or each dopant in the or each material may be a few percent or less, e.g. may be in the range 1-5%. The concentration of the or each dopant which is added to the or each material may depend on the absorption coefficient of the or each dopant.
- the threshold laser radiation fluence required for drilling holes in a material is approximately linearly proportional to the absorption depth of the material. Addition of the or each dopant to the or each material may also decrease the threshold laser radiation fluence required to drill a hole, and may enhance the drilling efficiency.
- the or each or some of the materials which are doped may be a dielectric material.
- the or each or some of the materials which are doped may be a polymer, dielectric material.
- the or each or some of the materials which are doped may be a resin, epoxy, phenolic, polyimide, or polytetrafluoethylene material, or an oxide ceramic material, nitride ceramic material or carbide ceramic material.
- the or each or some of the materials which are doped may contain embedded fibres such as aramid, glass, silica or carbon which provide added reinforcing strength.
- the or each or some of the materials which are not doped may be a non-dielectric material, e.g. a metal material, e.g.
- the material or materials may form part of an electrical package, e.g. a PCB or a PWB or a BGA or a MCM.
- the materials may comprise one or more dielectric materials, and one or more non-dielectric materials. These may form part of an electrical package.
- the dielectric and non-dielectric materials may have one or more holes drilled therein using a laser radiation source comprising a single laser. This simplifies the process of drilling packages comprising such materials, increases the drilling speeds and reduces the processing costs involved.
- the or each or some of the materials which are doped may form part of an ink jet printer, and the particularly the array of nozzles thereof.
- the or each or some of the materials which are doped may be a non- wetting material, or a polyimide material, or a polymer material, particularly a fluorinated polymer material.
- Such materials may be used in the array of nozzles of an ink jet printer, where it is necessary to provide the material with one or more holes.
- the methods may comprise laser drilling the or each or some of the holes using a punching mode. In this mode the focal spot size and shape of the radiation from the laser radiation source may determine the diameter of the hole being drilled.
- the methods may comprise laser drilling holes using a trepanning mode. In this mode the radiation from the laser radiation source, preferably concentrated in some way, may be moved in a circular, elliptical or spiral motion defining the hole diameter.
- the methods may comprise using a laser radiation source comprising one or more lasers.
- the methods may comprise using a laser radiation source emitting radiation having a wavelength or wavelengths in the visible region.
- the methods may comprise using a laser radiation source emitting radiation having a wavelength or wavelengths in the infrared range.
- the methods may comprise using a laser radiation source comprising one or more neodymium (Nd) lasers, the Nd being provided in conjunction with a host.
- the host may be a crystalline host, and/or may be a glass host.
- the or each Nd laser may be a Nd:YAG laser which may emit radiation having a wavelength of 1.064 ⁇ m, and/or a Nd:YLF laser which may emit radiation having a wavelength of 1.047 ⁇ m, and/or a Nd:YVO 4 laser which may emit radiation having a wavelength of 1.064 ⁇ m.
- the methods may comprise using a laser radiation source comprising one or more carbon dioxide (CO 2 ) lasers which may emit radiation having a wavelength in the range 9 - ll ⁇ m.
- the methods may comprise using a laser radiation source comprising one or more solid state titanium:sapphire lasers, or erbium, holmium or diode lasers.
- the methods may comprise using a laser radiation source comprising one or more gas excimer, copper vapour, HF, DF, carbon monoxide, or liquid dye lasers.
- the methods may comprise using a laser radiation source comprising one or more lasers and one or more optical elements which act to change the wavelength of the radiation produced by the or each laser.
- the optical element or elements may be nonlinear, and may comprise a harmonic generator, a wavelength mixer, an optical parametric oscillator or an optical parametric amplifier, or a combination of any of these.
- the methods may comprise using a laser radiation source comprising a combination of any of the above lasers.
- the methods may comprise using a pulsed laser radiation source.
- the duration of the radiation pulses may depend on the type of material or materials being drilled.
- the duration of the pulses may be in the range lnsec - 1msec.
- the pulse duration should be sufficiently short to minimize the heat affected zone (HAZ) in the material or materials.
- HAZ heat affected zone
- the size of the HAZ predicted theoretically is 2 ⁇ , where ⁇ is the thermal diffusivity of the material and ⁇ is the duration of each pulse.
- t may be less than lOO ⁇ sec.
- the methods may comprise using a pulsed laser radiation source comprising one or more CO 2 lasers, which may be transversely-excited at atmospheric pressure (TEA) or rf-excited.
- the or each CO 2 laser may produce pulses of radiation of less than 1msec duration at repetition frequencies exceeding 100Hz.
- the methods may comprise using a pulsed laser radiation source comprising one or more Nd lasers, which may be pumped by flashlamps or by laser diodes, or may be Q-switched.
- the or each Nd laser may produce pulses of radiation of less than 200nsec duration at repetition frequencies exceeding 1kHz.
- the or each hole may have a diameter in the range l-1000 ⁇ m, more preferably 10-100 ⁇ m.
- the methods preferably comprise drilling holes at a rate or rates of 100 holes/sec or more.
- the methods may comprise laser drilling microvia holes in the material or materials of, for example, an electrical package.
- the microvia holes may be blind and/or through microvia holes.
- the laser drilling apparatus may be able to carry out the method of the first aspect of the invention or the method of the second aspect of the invention or the method of the third aspect of the invention or any combination of the methods.
- the laser drilling apparatus may comprise a laser radiation source comprising one or more lasers.
- the laser drilling apparatus may comprise a laser radiation source emitting radiation having a wavelength or wavelengths in the visible region.
- the laser drilling apparatus may comprise a laser radiation source emitting radiation having a wavelength or wavelengths in the infrared range.
- the laser radiation source may comprise one or more Nd lasers, the Nd being provided in conjunction with a host.
- the host may be a crystalline host, and/or may be a glass host.
- the or each Nd laser may be a Nd:YAG laser which may emit radiation having a wavelength of 1.064 ⁇ m, and/or a Nd:YLF laser which may emit radiation having a wavelength of 1.047 ⁇ m, and/or a Nd:YVO 4 laser which may emit radiation having a wavelength of 1.064 ⁇ m.
- the laser radiation source may comprise one or more CO 2 lasers which may emit radiation having a wavelength in the range 9 - ll ⁇ m.
- the laser radiation source may comprise one or more solid state titanium: sapphire lasers, or erbium, holmium or diode lasers.
- the laser radiation source may comprise one or more gas excimer, copper vapour, HF, DF, carbon monoxide, or liquid dye lasers.
- the laser radiation source may comprise one or more lasers and one or more optical elements which act to change the wavelength of the radiation produced by the or each laser.
- the optical element or elements may be nonlinear, and may comprise a harmonic generator, a wavelength mixer, an optical parametric oscillator or an optical parametric amplifier, or a combination of any of these.
- the laser radiation source may comprise a combination of any of the above lasers.
- the laser drilling apparatus may comprise a pulsed laser radiation source.
- the duration of the radiation pulses may depend on the type of material or materials being drilled.
- the duration of the pulses may be in the range lnsec - 1msec.
- the pulse duration should be sufficiently short to minimize the heat affected zone (HAZ) in the material or materials.
- HAZ heat affected zone
- the size of the HAZ predicted theoretically is 2 ⁇ , where ⁇ is the thermal diffusivity of the material and x is the duration of each pulse.
- x may be less than lOO ⁇ sec.
- the pulsed laser radiation source may comprise one or more CO 2 lasers, which may be transversely-excited at atmospheric pressure (TEA) or rf-excited to produce pulses of radiation.
- the or each CO 2 laser may produce pulses of radiation of less than 1msec duration at repetition frequencies exceeding 100Hz.
- the laser radiation source may comprise one or more Nd lasers, which may be pumped by flashlamps or by laser diodes, or may be Q-switched.
- the or each Nd laser may produce pulses of radiation of less than 200nsec duration at repetition frequencies exceeding 1kHz.
- the laser drilling apparatus may comprise one or more optical components, such as computer-controlled, moving-magnet, galvanometer scanning mirrors.
- the or each or some of the optical components may act to shape the radiation from the laser radiation source. Additionally or alternatively, the or each or some of the optical components may act to image an object e.g. an aperture placed in the radiation from the laser radiation source. Additionally or alternatively, the or each or some of the optical components may act to concentrate e.g. focus the radiation from the laser radiation source. Additionally or alternatively, the or each or some of the optical components may act to position the radiation from the laser radiation source on the surface of the or each material. Positioning is preferably carried out with high speed and accuracy.
- the or each or some of the optical components may act to position the radiation from the laser radiation source onto different locations on the surface of the or each material. Additionally or alternatively, the or each material may be moved underneath the radiation from the laser radiation source. The or each material may be moved using a motorised table or tables.
- the laser drilling apparatus preferably drills holes in the diameter range l-1000 ⁇ m, more preferably 10-100 ⁇ m.
- the laser drilling apparatus preferably drills holes at a rate or rates of 100 holes/sec or more.
- the laser drilling apparatus preferably drills holes at a cost in the region of or less than 1 cent per 1000 holes.
- a doped material having one or more dopants therein which change the absorption depth of the doped material at a wavelength or wavelengths.
- the absorption depth of the doped material may be in the range 0.01- lO ⁇ m, more preferably 0.1-l ⁇ m.
- the or each or some of the dopants may be an organic dopant. Additionally or alternatively, the or each or some of the dopants may be a molecular dopant. Additionally or alternatively the or each or some of dopants may be a dye molecule, for example C 42 H 34 O 6 Cl 2 , C 40 H 30 S 2 O 4 Cl 2 or C 50 H 43 O 6 Cl, or an ink, particularly a coloured or black ink. Small or even trace concentrations of the or each dopant may be added to the or each material.
- the percentage concentration of the or each dopant in the or each material may be a few percent or less, e.g. may be in the range 1-5%.
- the doped material may comprise a dielectric material.
- the doped material may comprise a polymer dielectric material.
- the doped material may be a resin, epoxy, phenolic, polyimide, or polytetrafluoethylene material, or an oxide ceramic material, a nitride ceramic material or a carbide ceramic material.
- the doped material may contain embedded fibres such as aramid, glass, silica or carbon which provide added reinforcing strength.
- the doped material may form part of an electrical package, e.g. a PCB or a PWB or a BGA or a MCM.
- the doped material may form part of an ink jet printer, particularly the nozzle thereof.
- Figure 1 is a schematic representation of a laser drilling apparatus according to the fourth aspect of the invention.
- Figure 2 illustrates a four-layer printed circuit board
- Figure 3 shows the variation of absorption depth versus wavelength from the ultraviolet to mid-infrared spectral regions of an undoped resin material used in the construction of the dielectric layer in
- Figure 4 shows the absorbance versus wavelength in the ultraviolet and near-infrared spectral regions of the dye molecule C 40 H 30 S 2 O 4 Cl 2 .
- Figure 1 shows a laser drilling apparatus 1 comprising a pulsed laser radiation source comprising a Nd:YAG laser 2, emitting radiation at a wavelength of 1.064 ⁇ m, with an average power in the range 10-30W.
- the Nd:YAG laser is pumped by laser diodes, and is Q-switched to produce pulses of radiation each with a duration in the range 20-100nsec, at repetition frequencies in the range 1-lOOkHz.
- the apparatus further comprises beam shaping components 3,4,5 and computer-controlled, moving-magnet, galvanometer scanning mirrors 6,7 used to position a focused beam 8 of laser radiation from the Nd:YAG laser onto the surface of the doped material 9 being drilled placed on an optical platform 10.
- the apparatus also comprises motorised tables 11 , 12 so that the material can be moved underneath the beam 8.
- the doped material 9 comprises part of a four-layer printed circuit board ( Figure 2) .
- the board comprises a substrate core 15, electrically insulating dielectric layers 16 and conducting layers 17 of copper metal. Blind 18 and through 19 microvia holes are drilled in the board using the beam of radiation 8, which, after metal plating through the hole, provide electrical interconnections between the layers.
- the dielectric layers 16 are 70 ⁇ m thick, and are composed of the doped material 9 which is a resin-based material.
- the absorption depth versus wavelength spectrum of the undoped resin-based material is shown in Figure 3.
- the undoped material is relatively transmissive having an absorption depth greater than lO ⁇ m.
- the absorption depth of the material is approximately 22 ⁇ m. Using this laser to drill holes in this material will give unsatisfactory hole quality.
- Figure 4 shows the absorbance spectrum of the dye molecule C 40 H 30 S 2 O 4 Cl 2 when dissolved in dichloroethane solvent.
- This molecule may be used as a dopant in a dielectric material, and possibly the resin-based dielectric material 9.
- the peak of its absorption in the visible and near infrared spectral regions occurs at l ⁇ m wavelength, close to the wavelengths of the various Nd lasers.
- a dopant concentration of only a few percent or less added to a dielectric material enables high quality blind and through microvia holes to be drilled in a board containing a dielectric material doped with this molecule using a Nd laser radiation source.
- This laser radiation source can also drill blind and through microvia holes in the metal layers of the board.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99957032A EP1105248A1 (en) | 1998-06-13 | 1999-06-14 | Laser drilling of holes in materials |
JP2000554501A JP2002518181A (en) | 1998-06-13 | 1999-06-14 | Laser drilling on materials |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9812725.1A GB9812725D0 (en) | 1998-06-13 | 1998-06-13 | The use of material dopants for improving performance of machines to laser drill microvia holes in printed circuit boards and other electrical packages |
GB9812725.1 | 1998-06-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999065639A1 true WO1999065639A1 (en) | 1999-12-23 |
Family
ID=10833672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB1999/001875 WO1999065639A1 (en) | 1998-06-13 | 1999-06-14 | Laser drilling of holes in materials |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1105248A1 (en) |
JP (1) | JP2002518181A (en) |
GB (1) | GB9812725D0 (en) |
WO (1) | WO1999065639A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1306160A1 (en) * | 2000-05-23 | 2003-05-02 | Sumitomo Heavy Industries, Ltd. | Laser drilling method |
WO2009103946A1 (en) * | 2008-02-23 | 2009-08-27 | M-Solv Limited | Laser processing a workpiece |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014010175A1 (en) * | 2014-07-09 | 2016-01-14 | Hydac Filtertechnik Gmbh | filter element |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0388009A1 (en) * | 1989-02-14 | 1990-09-19 | General Electric Company | Method for forming via holes in polymer materials |
DE4000561A1 (en) * | 1990-01-10 | 1991-07-11 | Laser Lab Goettingen Ev | Energy ray ablation esp. of plastics e.g. PMMA - using dopant forming gas on absorption of one photon to increase efficiency and give clean hole |
EP0500110A1 (en) * | 1991-02-21 | 1992-08-26 | Hewlett-Packard Company | Process of photo-ablating at least one stepped opening extending through a polymer material, and a nozzle plate having stepped openings |
WO1998008645A2 (en) * | 1996-08-27 | 1998-03-05 | British Polythene Limited | Apparatus for perforating web like materials |
-
1998
- 1998-06-13 GB GBGB9812725.1A patent/GB9812725D0/en not_active Ceased
-
1999
- 1999-06-14 EP EP99957032A patent/EP1105248A1/en not_active Withdrawn
- 1999-06-14 WO PCT/GB1999/001875 patent/WO1999065639A1/en not_active Application Discontinuation
- 1999-06-14 JP JP2000554501A patent/JP2002518181A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0388009A1 (en) * | 1989-02-14 | 1990-09-19 | General Electric Company | Method for forming via holes in polymer materials |
DE4000561A1 (en) * | 1990-01-10 | 1991-07-11 | Laser Lab Goettingen Ev | Energy ray ablation esp. of plastics e.g. PMMA - using dopant forming gas on absorption of one photon to increase efficiency and give clean hole |
EP0500110A1 (en) * | 1991-02-21 | 1992-08-26 | Hewlett-Packard Company | Process of photo-ablating at least one stepped opening extending through a polymer material, and a nozzle plate having stepped openings |
WO1998008645A2 (en) * | 1996-08-27 | 1998-03-05 | British Polythene Limited | Apparatus for perforating web like materials |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1306160A1 (en) * | 2000-05-23 | 2003-05-02 | Sumitomo Heavy Industries, Ltd. | Laser drilling method |
EP1306160A4 (en) * | 2000-05-23 | 2006-12-27 | Sumitomo Heavy Industries | Laser drilling method |
WO2009103946A1 (en) * | 2008-02-23 | 2009-08-27 | M-Solv Limited | Laser processing a workpiece |
US9067277B2 (en) | 2008-02-23 | 2015-06-30 | M-Solv Ltd. | Laser processing a workpiece |
Also Published As
Publication number | Publication date |
---|---|
JP2002518181A (en) | 2002-06-25 |
GB9812725D0 (en) | 1998-08-12 |
EP1105248A1 (en) | 2001-06-13 |
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