WO1999053205A1 - Dispositif amplificateur de debit pour courants fluidiques - Google Patents

Dispositif amplificateur de debit pour courants fluidiques Download PDF

Info

Publication number
WO1999053205A1
WO1999053205A1 PCT/EP1999/001199 EP9901199W WO9953205A1 WO 1999053205 A1 WO1999053205 A1 WO 1999053205A1 EP 9901199 W EP9901199 W EP 9901199W WO 9953205 A1 WO9953205 A1 WO 9953205A1
Authority
WO
WIPO (PCT)
Prior art keywords
control
channel
quantity amplifier
amplifier device
amplifier
Prior art date
Application number
PCT/EP1999/001199
Other languages
German (de)
English (en)
Inventor
Kurt Stoll
Michael Weinmann
Peter Post
Herbert Vollmer
Original Assignee
Festo Ag & Co.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo Ag & Co. filed Critical Festo Ag & Co.
Publication of WO1999053205A1 publication Critical patent/WO1999053205A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0832—Modular valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0846—Electrical details
    • F15B13/0857—Electrical connecting means, e.g. plugs, sockets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0875—Channels for electrical components, e.g. for cables or sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0885—Assembly of modular units using valves combined with other components
    • F15B13/0892—Valves combined with fluid components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/009—Fluid power devices

Abstract

L'invention concerne un dispositif amplificateur de débit pour courants fluidiques, comportant au moins un amplificateur de débit (2) micromécanique à régulation fluidique, obtenu selon un procédé de microstructuration. Cet amplificateur de débit comprend une chambre délimitée par deux corps stratifiés (3, 4) et subdivisée par une membrane de commande (6) mobile. La régulation fluidique permet de faire passer la membrane de commande (6) entre une position ouverte et une position fermée où elle pilote la jonction entre un canal d'alimentation (139 et un canal d'évacuation (14).
PCT/EP1999/001199 1998-04-11 1999-02-25 Dispositif amplificateur de debit pour courants fluidiques WO1999053205A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1998116283 DE19816283A1 (de) 1998-04-11 1998-04-11 Mengenverstärkereinrichtung für Fluidströme
DE19816283.9 1998-04-11

Publications (1)

Publication Number Publication Date
WO1999053205A1 true WO1999053205A1 (fr) 1999-10-21

Family

ID=7864348

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1999/001199 WO1999053205A1 (fr) 1998-04-11 1999-02-25 Dispositif amplificateur de debit pour courants fluidiques

Country Status (2)

Country Link
DE (1) DE19816283A1 (fr)
WO (1) WO1999053205A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013519422A (ja) * 2010-02-12 2013-05-30 デバイオテック・ソシエテ・アノニム マイクロメカニック受動的フローレギュレータ
US9971358B2 (en) 2013-01-10 2018-05-15 Debiotech S.A. Adjustable passive flow regulator

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG94753A1 (en) * 2001-02-06 2003-03-18 Inst Of High Performance Compu Microvalve devices
US6802342B2 (en) 2001-04-06 2004-10-12 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
EP1679121A3 (fr) * 2001-04-06 2006-07-26 Fluidigm Corporation Éléments et applications de circuit fluidique microfabriqués
DE102007012483B4 (de) * 2007-03-15 2013-07-04 Reinz-Dichtungs-Gmbh Ventil, Ölabscheider, Abscheideverfahren und deren Verwendung
EP3763439A1 (fr) * 2019-07-12 2021-01-13 Curiosity Diagnostics sp. z o.o Puce et soupape microfluidiques, procédé de production et utilisations

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989005417A1 (fr) * 1987-12-11 1989-06-15 Integrated Fluidics, Inc. Vanne a element de feuille souple
WO1994028318A1 (fr) * 1993-05-27 1994-12-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Microvanne
WO1995008716A2 (fr) * 1993-09-24 1995-03-30 Rosemount Analytical Inc. Vanne microusinee
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
DE4422943A1 (de) * 1994-06-30 1996-01-04 Bosch Gmbh Robert Vorrichtung für den Antrieb eines Mikroventils
WO1996028664A1 (fr) * 1995-03-14 1996-09-19 Baxter International Inc. Module electrofluidique normalise et ensemble de cartes a circuits imprimes personnalisees

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4858883A (en) * 1987-12-11 1989-08-22 Integrated Fluidics, Inc. Valve with flexible sheet member
DE3926647A1 (de) * 1989-08-11 1991-02-14 Bosch Gmbh Robert Verfahren zur herstellung eines mikroventils
US5176359A (en) * 1991-05-20 1993-01-05 Photovac International, Inc. Fluid control valve arrangement
DE19522806C2 (de) * 1995-06-23 1997-06-12 Karlsruhe Forschzent Verfahren zur Herstellung eines Mikromembranventils
US5971355A (en) * 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989005417A1 (fr) * 1987-12-11 1989-06-15 Integrated Fluidics, Inc. Vanne a element de feuille souple
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
WO1994028318A1 (fr) * 1993-05-27 1994-12-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Microvanne
WO1995008716A2 (fr) * 1993-09-24 1995-03-30 Rosemount Analytical Inc. Vanne microusinee
DE4422943A1 (de) * 1994-06-30 1996-01-04 Bosch Gmbh Robert Vorrichtung für den Antrieb eines Mikroventils
WO1996028664A1 (fr) * 1995-03-14 1996-09-19 Baxter International Inc. Module electrofluidique normalise et ensemble de cartes a circuits imprimes personnalisees

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013519422A (ja) * 2010-02-12 2013-05-30 デバイオテック・ソシエテ・アノニム マイクロメカニック受動的フローレギュレータ
US9867935B2 (en) 2010-02-12 2018-01-16 Debiotech S.A. Micromechanic passive flow regulator
US9971358B2 (en) 2013-01-10 2018-05-15 Debiotech S.A. Adjustable passive flow regulator

Also Published As

Publication number Publication date
DE19816283A1 (de) 1999-10-14

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