WO1999028077A3 - Vorrichtung zur homogenisierung eines licht- oder laserstrahls - Google Patents

Vorrichtung zur homogenisierung eines licht- oder laserstrahls Download PDF

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Publication number
WO1999028077A3
WO1999028077A3 PCT/DE1998/003509 DE9803509W WO9928077A3 WO 1999028077 A3 WO1999028077 A3 WO 1999028077A3 DE 9803509 W DE9803509 W DE 9803509W WO 9928077 A3 WO9928077 A3 WO 9928077A3
Authority
WO
WIPO (PCT)
Prior art keywords
light
homogenizing
laser beam
homogenizer element
laser
Prior art date
Application number
PCT/DE1998/003509
Other languages
English (en)
French (fr)
Other versions
WO1999028077A9 (de
WO1999028077A2 (de
Inventor
Rudolf Steiner
Detlef Russ
Original Assignee
Rodenstock Instr
Rudolf Steiner
Detlef Russ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rodenstock Instr, Rudolf Steiner, Detlef Russ filed Critical Rodenstock Instr
Publication of WO1999028077A2 publication Critical patent/WO1999028077A2/de
Publication of WO1999028077A3 publication Critical patent/WO1999028077A3/de
Publication of WO1999028077A9 publication Critical patent/WO1999028077A9/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements
    • G02B27/0983—Reflective elements being curved
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F2009/00861—Methods or devices for eye surgery using laser adapted for treatment at a particular location
    • A61F2009/00872—Cornea

Abstract

Beschrieben wird eine Vorrichtung zur Beleuchtung und/oder zur Bearbeitung einer Fläche und insbesondere zur Formung der Cornea mittels Licht, mit wenigstens einer Lichtquelle, die einen Licht- und insbesondere einen Laserstrahl emittiert, und einem optischen System, das den Licht- bzw. Laserstrahl auf die zu beleuchtende bzw. zu bearbeitende Fläche führt und das eine Einrichtung zur Strahlhomogenisierung aufweist. Die Erfindung zeichnet sich dadurch aus, daß die Einrichtung zur Strahlhomogenisierung wenigstens ein Homogenisier-Element mit einer Vielzahl von Facettenelementen aufweist, von denen jedes das auf dieses Facettenelement auftreffende Licht in etwa gleichmäßig auf zumindest eine Strahlquerschnittsfläche mit einem bestimmten Abstand vom Homogenisier-Element verteilt. Hierdurch wird unabhängig von der zeitlichen oder räumlichen Intensitätsverteilung oder der Divergenz oder der Modenstruktur eines Laserstrahls und unabhängig von etwaigen Justierfehlern über den Strahlquerschnitt eine Intensitätshomogenisierung besonderer Güte erzielt.
PCT/DE1998/003509 1997-12-02 1998-11-27 Vorrichtung zur homogenisierung eines licht- oder laserstrahls WO1999028077A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1997153344 DE19753344A1 (de) 1997-12-02 1997-12-02 Vorrichtung zur Homogenisierung eines Licht- oder Laserstrahls
DE19753344.2 1997-12-02

Publications (3)

Publication Number Publication Date
WO1999028077A2 WO1999028077A2 (de) 1999-06-10
WO1999028077A3 true WO1999028077A3 (de) 1999-07-15
WO1999028077A9 WO1999028077A9 (de) 1999-09-16

Family

ID=7850445

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1998/003509 WO1999028077A2 (de) 1997-12-02 1998-11-27 Vorrichtung zur homogenisierung eines licht- oder laserstrahls

Country Status (2)

Country Link
DE (1) DE19753344A1 (de)
WO (1) WO1999028077A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856630B2 (en) 2000-02-02 2005-02-15 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device
DE102004035489A1 (de) * 2004-07-19 2006-02-16 Jenoptik Laser, Optik, Systeme Gmbh Optisches System zur Umwandlung einer primären Intensitätsverteilung in eine vorgegebene, raumwinkelabhängige Intensitätsverteilung
DE102005005355B4 (de) * 2005-02-05 2018-05-09 Adc Automotive Distance Control Systems Gmbh Vorrichtung zur Formung eines Lichtstrahls

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4195913A (en) * 1977-11-09 1980-04-01 Spawr Optical Research, Inc. Optical integration with screw supports
US5414559A (en) * 1992-06-24 1995-05-09 Microlas Lasersystem Gmbh Device for homogenizing a light beam
DE4441579C1 (de) * 1994-11-22 1996-05-15 Rodenstock Instr Vorrichtung zur Formung der Cornea
FR2737786A1 (fr) * 1995-08-11 1997-02-14 Soc D Production Et De Rech Ap Dispositif optique pour homogeneiser un faisceau laser
US5610733A (en) * 1994-02-28 1997-03-11 Digital Optics Corporation Beam-homogenizer
JPH10244392A (ja) * 1997-03-04 1998-09-14 Semiconductor Energy Lab Co Ltd レーザー照射装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4195913A (en) * 1977-11-09 1980-04-01 Spawr Optical Research, Inc. Optical integration with screw supports
US5414559A (en) * 1992-06-24 1995-05-09 Microlas Lasersystem Gmbh Device for homogenizing a light beam
US5610733A (en) * 1994-02-28 1997-03-11 Digital Optics Corporation Beam-homogenizer
DE4441579C1 (de) * 1994-11-22 1996-05-15 Rodenstock Instr Vorrichtung zur Formung der Cornea
FR2737786A1 (fr) * 1995-08-11 1997-02-14 Soc D Production Et De Rech Ap Dispositif optique pour homogeneiser un faisceau laser
JPH10244392A (ja) * 1997-03-04 1998-09-14 Semiconductor Energy Lab Co Ltd レーザー照射装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 098, no. 014 31 December 1998 (1998-12-31) *

Also Published As

Publication number Publication date
WO1999028077A9 (de) 1999-09-16
DE19753344A1 (de) 1999-06-10
WO1999028077A2 (de) 1999-06-10

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