WO1999023391A3 - Cleaning apparatus and clamping chuck which can be used in said cleaning apparatus - Google Patents
Cleaning apparatus and clamping chuck which can be used in said cleaning apparatus Download PDFInfo
- Publication number
- WO1999023391A3 WO1999023391A3 PCT/GB1998/003277 GB9803277W WO9923391A3 WO 1999023391 A3 WO1999023391 A3 WO 1999023391A3 GB 9803277 W GB9803277 W GB 9803277W WO 9923391 A3 WO9923391 A3 WO 9923391A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- chuck
- bore
- engaging means
- cleaning apparatus
- cleaning device
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 239000000356 contaminant Substances 0.000 abstract 1
- -1 dirt Substances 0.000 abstract 1
- 239000000428 dust Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D1/00—Couplings for rigidly connecting two coaxial shafts or other movable machine elements
- F16D1/06—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end
- F16D1/08—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key
- F16D1/0829—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key with radial loading of both hub and shaft by an intermediate ring or sleeve
- F16D1/0841—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key with radial loading of both hub and shaft by an intermediate ring or sleeve due to axial loading of the ring or sleeve, e.g. Belleville washers
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Cleaning In General (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU10397/99A AU1039799A (en) | 1997-11-03 | 1998-11-03 | Cleaning apparatus and clamping chuck which can be used in said cleaning apparatus |
GB0007456A GB2345117A (en) | 1997-11-03 | 1998-11-03 | Cleaning apparatus and clamping chuck which can be used in said cleaning apparaus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9723210.2A GB9723210D0 (en) | 1997-11-03 | 1997-11-03 | Cleaning apparatus |
GB9723210.2 | 1997-11-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1999023391A2 WO1999023391A2 (en) | 1999-05-14 |
WO1999023391A3 true WO1999023391A3 (en) | 1999-10-21 |
Family
ID=10821505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB1998/003277 WO1999023391A2 (en) | 1997-11-03 | 1998-11-03 | Cleaning apparatus and clamping chuck which can be used in said cleaning apparatus |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU1039799A (en) |
GB (1) | GB9723210D0 (en) |
WO (1) | WO1999023391A2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117943368B (en) * | 2024-03-27 | 2024-06-07 | 山东中城智能制造产业园集团有限公司 | High-automation plate processing device |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1180477A (en) * | 1957-08-01 | 1959-06-04 | Commerce Internat Soc Et | Improvements to the means for wedging a mechanical component, in particular a pulley, on a rotating shaft |
FR1254761A (en) * | 1960-04-22 | 1961-02-24 | Basf Ag | Assembly of machine parts with shafts or axes |
GB864465A (en) * | 1957-08-16 | 1961-04-06 | Schaeffler Wilhelm | Improvements in or relating to adjustable-clearance antifriction bearings |
DE2444661A1 (en) * | 1974-09-18 | 1976-04-01 | Siemens Ag | Friction ring for installation of hub on shaft - is axially compressed between shaft step and clamp ring |
GB2096737A (en) * | 1981-03-26 | 1982-10-20 | Davall S & Sons Ltd | Tape transport apparatus |
WO1987003943A1 (en) * | 1985-12-23 | 1987-07-02 | Frederick Peter Kann | Roll support spindle |
US4961668A (en) * | 1989-10-30 | 1990-10-09 | Billco Manufacturing, Inc. | Quick-release hub assembly for mounting a wheel element to a shaft |
-
1997
- 1997-11-03 GB GBGB9723210.2A patent/GB9723210D0/en not_active Ceased
-
1998
- 1998-11-03 AU AU10397/99A patent/AU1039799A/en not_active Abandoned
- 1998-11-03 WO PCT/GB1998/003277 patent/WO1999023391A2/en active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1180477A (en) * | 1957-08-01 | 1959-06-04 | Commerce Internat Soc Et | Improvements to the means for wedging a mechanical component, in particular a pulley, on a rotating shaft |
GB864465A (en) * | 1957-08-16 | 1961-04-06 | Schaeffler Wilhelm | Improvements in or relating to adjustable-clearance antifriction bearings |
FR1254761A (en) * | 1960-04-22 | 1961-02-24 | Basf Ag | Assembly of machine parts with shafts or axes |
DE2444661A1 (en) * | 1974-09-18 | 1976-04-01 | Siemens Ag | Friction ring for installation of hub on shaft - is axially compressed between shaft step and clamp ring |
GB2096737A (en) * | 1981-03-26 | 1982-10-20 | Davall S & Sons Ltd | Tape transport apparatus |
WO1987003943A1 (en) * | 1985-12-23 | 1987-07-02 | Frederick Peter Kann | Roll support spindle |
US4961668A (en) * | 1989-10-30 | 1990-10-09 | Billco Manufacturing, Inc. | Quick-release hub assembly for mounting a wheel element to a shaft |
Also Published As
Publication number | Publication date |
---|---|
GB9723210D0 (en) | 1998-01-07 |
WO1999023391A2 (en) | 1999-05-14 |
AU1039799A (en) | 1999-05-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0812011A3 (en) | Cleaning agent | |
EP0953409A3 (en) | Wafer surface machining apparatus | |
CA2122402A1 (en) | Dual Jet Spray Cleaner | |
GB2368723B (en) | Electro-static chucking mechanism and surface processing apparatus | |
WO1999035505A3 (en) | Method for removing accumulated solder from probe card probing features | |
EP1055486A3 (en) | Dressing apparatus and polishing apparatus | |
WO2005118914A3 (en) | Substrate support system and method | |
WO2002013236A3 (en) | Method and apparatus for removing unwanted substance from semiconductor wafer | |
TWI256966B (en) | Chemical mechanical polishing slurry useful for copper substrates | |
MXPA03011185A (en) | Top-biased beneficial components on substrates. | |
AU7076101A (en) | Tool positioning system | |
AU2001282879A1 (en) | Methods and apparatus for processing microelectronic workpieces using metrology | |
AU8595498A (en) | A polishing composition including an inhibitor of tungsten etching | |
EP0647706A3 (en) | Reduced residue hard surface cleaner. | |
AU4691800A (en) | Method and system for cleaning a chemical mechanical polishing pad | |
MY123347A (en) | Planarization apparatus and method | |
EP1189497A3 (en) | Apparatus and method for mounting components on substrate | |
AU2001293125A1 (en) | Tool for applying resilient tape to chuck used for grinding or polishing wafers | |
EP0851474A3 (en) | Improvements in or relating to integrated circuits | |
EP0840540A3 (en) | Function extending apparatus for information processing device | |
WO2005046993A3 (en) | Printing surface preparation methods and apparatus incorporating same | |
EP1315242A3 (en) | Electrical interconnect assembly | |
HK1026067A1 (en) | Chemical mechanical abrasive composition for use in semiconductor processing | |
WO2003087018A3 (en) | Specimen holding apparatus | |
EP1453084A3 (en) | Post-etch cleaning treatment |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AL AM AT AU AZ BA BB BG BR BY CA CH CN CU CZ DE DK EE ES FI GB GD GE GH GM HR HU ID IL IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT UA UG US UZ VN YU ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): GH GM KE LS MW SD SZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
AK | Designated states |
Kind code of ref document: A3 Designated state(s): AL AM AT AU AZ BA BB BG BR BY CA CH CN CU CZ DE DK EE ES FI GB GD GE GH GM HR HU ID IL IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT UA UG US UZ VN YU ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A3 Designated state(s): GH GM KE LS MW SD SZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG |
|
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
ENP | Entry into the national phase |
Ref country code: GB Ref document number: 200007456 Kind code of ref document: A Format of ref document f/p: F |
|
122 | Ep: pct application non-entry in european phase |