WO1999021067A3 - Regulateur de flux massique et procedes associes - Google Patents

Regulateur de flux massique et procedes associes Download PDF

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Publication number
WO1999021067A3
WO1999021067A3 PCT/US1998/021981 US9821981W WO9921067A3 WO 1999021067 A3 WO1999021067 A3 WO 1999021067A3 US 9821981 W US9821981 W US 9821981W WO 9921067 A3 WO9921067 A3 WO 9921067A3
Authority
WO
WIPO (PCT)
Prior art keywords
mass flow
flow controller
related methods
technique
providing
Prior art date
Application number
PCT/US1998/021981
Other languages
English (en)
Other versions
WO1999021067A2 (fr
Inventor
Faramarz Frank Azima
Original Assignee
Faramarz Frank Azima
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/953,449 external-priority patent/US6026834A/en
Priority claimed from US08/953,715 external-priority patent/US6062077A/en
Application filed by Faramarz Frank Azima filed Critical Faramarz Frank Azima
Priority to AU10988/99A priority Critical patent/AU1098899A/en
Publication of WO1999021067A2 publication Critical patent/WO1999021067A2/fr
Publication of WO1999021067A3 publication Critical patent/WO1999021067A3/fr

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)

Abstract

La présente invention concerne une technique de régulation des flux de fluide à travers un dispositif (10) régulateur de flux massique ('RFM') dans différentes directions. La technique comprend un dispositif (10) présentant une nouvelle conception d'ensemble soupape de commande permettant de produire sélectivement une configuration en amont ou en aval sans échanger des pièces ou requérir de pièces supplémentaires ainsi qu'un nouvel ensemble de détection (22) présentant un tube de détection (26) porté sur une forme (500) par des plaques de connexion (302A-302D).
PCT/US1998/021981 1997-10-17 1998-10-16 Regulateur de flux massique et procedes associes WO1999021067A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU10988/99A AU1098899A (en) 1997-10-17 1998-10-16 Mass flow controller and related methods

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US08/953,449 US6026834A (en) 1997-10-17 1997-10-17 Fluid mass flow controller device and method
US08/953,715 1997-10-17
US08/953,449 1997-10-17
US08/953,715 US6062077A (en) 1997-10-17 1997-10-17 Techniques for making and using a sensing assembly for a mass flow controller

Publications (2)

Publication Number Publication Date
WO1999021067A2 WO1999021067A2 (fr) 1999-04-29
WO1999021067A3 true WO1999021067A3 (fr) 1999-10-28

Family

ID=27130337

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/021981 WO1999021067A2 (fr) 1997-10-17 1998-10-16 Regulateur de flux massique et procedes associes

Country Status (2)

Country Link
AU (1) AU1098899A (fr)
WO (1) WO1999021067A2 (fr)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4484472A (en) * 1983-02-16 1984-11-27 Emerson Electric Co. Concentric rod and tube sensor for thermal mass flow controller and flow meter
US4487062A (en) * 1983-03-30 1984-12-11 Sierra Instruments, Inc. Mass flowmeter
US4517838A (en) * 1982-11-12 1985-05-21 Ohkura Electric Co., Ltd. Thermal mass flow meter
US4519246A (en) * 1981-12-21 1985-05-28 Advanced Semiconductor Materials International, N.V. Improved flow meter
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
US4815280A (en) * 1986-05-27 1989-03-28 Stec Inc. Thermal flow meter
WO1992020006A2 (fr) * 1991-04-26 1992-11-12 Unit Instruments, Inc. Detecteur thermique de flux massique
US5191793A (en) * 1984-03-12 1993-03-09 Tylan Corporation Fluid mass flow meter device with reduced attitude sensitivity
US5259243A (en) * 1991-01-04 1993-11-09 Dxl International, Inc. Flow sensor
WO1994009344A1 (fr) * 1992-10-16 1994-04-28 Unit Instruments, Inc. Regulateur de debit massique thermique dote d'un capteur thermique de debit massique orthogonal
US5347861A (en) * 1990-08-11 1994-09-20 Stec Inc. Thermal mass flow meter

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4519246A (en) * 1981-12-21 1985-05-28 Advanced Semiconductor Materials International, N.V. Improved flow meter
US4517838A (en) * 1982-11-12 1985-05-21 Ohkura Electric Co., Ltd. Thermal mass flow meter
US4484472A (en) * 1983-02-16 1984-11-27 Emerson Electric Co. Concentric rod and tube sensor for thermal mass flow controller and flow meter
US4487062A (en) * 1983-03-30 1984-12-11 Sierra Instruments, Inc. Mass flowmeter
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
US5191793A (en) * 1984-03-12 1993-03-09 Tylan Corporation Fluid mass flow meter device with reduced attitude sensitivity
US4815280A (en) * 1986-05-27 1989-03-28 Stec Inc. Thermal flow meter
US5347861A (en) * 1990-08-11 1994-09-20 Stec Inc. Thermal mass flow meter
US5259243A (en) * 1991-01-04 1993-11-09 Dxl International, Inc. Flow sensor
WO1992020006A2 (fr) * 1991-04-26 1992-11-12 Unit Instruments, Inc. Detecteur thermique de flux massique
WO1994009344A1 (fr) * 1992-10-16 1994-04-28 Unit Instruments, Inc. Regulateur de debit massique thermique dote d'un capteur thermique de debit massique orthogonal

Also Published As

Publication number Publication date
WO1999021067A2 (fr) 1999-04-29
AU1098899A (en) 1999-05-10

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