WO1999003011A1 - Chevron error correction and autofocus optics for laser scanner - Google Patents
Chevron error correction and autofocus optics for laser scanner Download PDFInfo
- Publication number
- WO1999003011A1 WO1999003011A1 PCT/US1998/012465 US9812465W WO9903011A1 WO 1999003011 A1 WO1999003011 A1 WO 1999003011A1 US 9812465 W US9812465 W US 9812465W WO 9903011 A1 WO9903011 A1 WO 9903011A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reflective
- medium
- relative
- reflective surface
- scan
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
- G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/047—Detection, control or error compensation of scanning velocity or position
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/10—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using flat picture-bearing surfaces
- H04N1/1008—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using flat picture-bearing surfaces with sub-scanning by translatory movement of the picture-bearing surface
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/10—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using flat picture-bearing surfaces
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
- H04N2201/04—Scanning arrangements
- H04N2201/047—Detection, control or error compensation of scanning velocity or position
- H04N2201/04753—Control or error compensation of scanning position or velocity
- H04N2201/04758—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area
- H04N2201/0476—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area using an optical, electro-optical or acousto-optical element
- H04N2201/04762—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area using an optical, electro-optical or acousto-optical element using a reflecting element
Definitions
- This invention relates to imaging in a scanning system and more specifically to bidirectional stage travel in a serpentine pattern in a raster scanning imaging system, and a method for correction for chevron error which occurs in such systems, as well as an auto focus mechanism for such systems.
- Raster scanning is well known and is used e.g. for imaging on a television screen.
- raster scanning a beam is scanned horizontally across the surface of the medium
- the beam is typically turned on and off in order to define pixels of an image or absence thereof at any particular point. At the end of each scan line the beam is returned to the beginning of the next line without scanning so all "writing" (imaging) is in one scan direction.
- the beam is translated vertically (orthogonal to the fast horizontal scan direction) by a small amount in order to reach the next scan line.
- the medium is moved vertically, i.e. in the direction orthogonal to the laser beam scan direction (the fast scan direction) .
- the medium is supported on a movable platform (a stage) which is not shown and the X and Y axis respectively indicate the scan direction, in this case of a laser beam, and the stage travel direction.
- This is called unidirectional printing since the stage only moves in one direction.
- the dotted lines indicate the return path at the end of each scan line.
- the laser (or other beam) scans in what is defined as the X horizontal direction and the substrate is moved on its stage in one of the perpendicular vertical (Y axis) directions, for instance the +Y direction.
- the angle error which occurs with the unidirectional printing of Fig. 1 is a constant value ⁇ for the entire image area and is easily overcome by a small rotation in the laser scan line relative to the medium. This is easily accomplished so as long as the stage travel velocity is a constant (constant both in magnitude and in direction) .
- a more complex situation occurs (as illustrated in Fig. 2) where the stage travel is bidirectional or nonconstant.
- the stage travel is bidirectional or nonconstant.
- the stage begins to translate in the opposite direction (from top to bottom, i.e. the -Y direction) for the next scan field after side- stepping a distance L.
- Fig. 2 therefore shows the situation where in the left field the stage direction of movement is upwards, i.e. along the +y axis going away from the origin, whereas for the adjacent scan field shown in the right portion of Fig. 2, the direction of stage travel is in the opposite direction. Under these circumstances the angle error changes polarity for adjacent stage travel paths, or raster imaging fields. It cannot be eliminated at all times with simple rotation of the scan direction of the laser beams. Since such bidirectional stage travel is highly desirable in a laser scanning system in order to increase throughout, i.e. to reduce stage travel time, then chevron or herringbone shaped artifacts occur in adjacent fields. This can be seen with reference to Fig.
- each line ideally is a straight line continuously over two scan fields as shown in Fig. 1.
- each line that crosses the raster imaging field border is actually a shallow "V" rather than the desired straight line, due to the junction between two adjacent but oppositely scanned fields.
- a group of these shallow V's forms a so-called chevron pattern or herringbone pattern which is an undesirable artifact due to the angle error ⁇ .
- the medium e.g. a printed circuit board substrate or a flat panel display substrate
- the medium may not have a perfectly flat surface due to manufacturing irregularities. These uneven portions of the surface may cause defocussing of the incident laser beam, thus reducing image quality. It would be useful to be able to overcome this focus problem also.
- the chevron artifacts i.e. the angle errors caused by bidirectional printing or by any nonconstant velocity stage travel, are overcome by dynamic (changing) rotation of the laser scan line in terms of its position on the medium.
- This is accomplished in one embodiment by providing two spaced apart sets of reflective surfaces (mirrors) including a folding path, where one of the two sets of reflective surfaces is dynamically rotatable or tiltable relative to the other.
- a control system is provided to measure the velocity of the translating stage and to dynamically provide the desired rotation of the scan line to eliminate any artifacts due to nonuniform stage speed and its resultant variable angle error ⁇ .
- a related but separate mechanism provides focussing correction by means of an autofocus (feedback focus) , wherein the two sets of reflected surfaces in the folding path are translated relative to one another under feedback control, thus providing autofocussing onto the medium.
- While the present disclosure is directed to a laser scanning system, it is to be appreciated that it is not so limited, and includes scanning optical systems using not only visible, infrared and ultraviolet light but other types of radiation. That is, it is generally applicable to a raster scanning system where the medium is moved in a direction orthogonal to the scan direction having nonconstant relative motion of the medium relative to a source of the scanning beam.
- the present chevron correction and auto focus are used in conjunction with a scan lens and relay optics (to increase working distance) as disclosed respectively in copending U.S. patent applications serial no. entitled "Anamorphic Scan Lens for Laser
- the relay optics disclosed in the above referenced application are interposed between the scan lens which forms and scans the laser beam(s) and the chevron correction and autofocus optics.
- the use of the relay optics is not necessary and indeed the present chevron correction and autofocus may be accomplished upstream of the relay optics, i.e. performed on the beam before it passes through the relay optics or performed in the absence of any relay optics.
- Fig. 1 shows unidirectional printing in the prior art.
- Fig. 2 shows bidirectional printing as known in the prior art and which illustrates the chevron problem addressed by the present invention.
- Fig. 3A shows reflective optics to perform chevron correction and focussing in accordance with this invention.
- Fig. 3B shows use of the optics of Fig. 3A for chevron correction.
- Fig. 3C shows use of the optics of Fig. 3A for focussing.
- Fig. 4 shows a mechanical drive for the optics of Fig. 3A.
- Fig. 3A shows in a side view a reflective optical system for providing scan line angle error (chevron) correction in accordance with this invention and also for dynamically focussing the beam on the medium. It is to be understood that Fig. 3A shows only the optical elements and beam rays and not the associated mountings or drive mechanisms.
- Each optical element 14, 16 which is of e.g. glass subtends an internal right angle (90°) as shown and includes respectively two sets of reflective surfaces 20, 22, and 24, 26 arranged on two right-angle reflective elements 14, 16.
- the present optics are used in a laser beam optical scanning system where the laser beam is in the ultraviolet spectrum, and hence the reflective surfaces 20, 22, 24, 26 are reflective of ultraviolet radiation, but this is of course not limiting.
- each reflective surface 20, 22, 24, 26 should be optically flat, e.g. to within 1/4 of a wavelength of the incident beam radiation for one specific example of system.
- Fig. 3A shows the incident radiation (beam) 30 from, in this case, a scan lens 34 not shown in detail but e.g. as described in the above-referenced application.
- the scan lens 34 provides the actual scanning movement of the beam; such scan lenses in general are well known.
- relay optics (not shown) as described in the above-referenced application are interposed between the scan lens 34 and the present chevron correction optics.
- the relay optics alternatively are present downstream of the chevron correction optics, or not present at all.
- the relay optics as described in the above-referenced application, increase working distance or change the laser beam diameter.
- the present chevron correction may be applied, in terms of the location of optical elements 14, 16, either prior to passage of the light beam through a relay optics, or in the absence thereof immediately above the image point, i.e. immediately above the medium or at an intermediary image plane .
- the incident radiation 30 reflects from the first reflective surface 20 of the first optical element 14 and then onto the first reflective surface 24 of the second optical element 16, onto the second reflective surface 26 of the second optical element 16 , and then onto the second reflective surface 22 of the first optical element 14, and then to the medium 40.
- the two optical elements 14, 16 in Fig. 3A are arranged to have no effect on the beam 30, i.e. the incident beam 30 from the scan lens is co-linear to beam 42, that is identical in both location and angle to the beam 42 transmitted to the medium 40.
- Fig. 3A depicts the neutral position.
- first and second reflective surfaces for each optical element 14, 16 are depicted as formed on a single monolithic substrate, this is only one embodiment. Placing both reflective surfaces on a single substrate makes it easier to achieve the 90° angles but this is not required, and in one embodiment the second optical element is two separate pieces bonded together. However, the pieces need not be bonded together, so long as they are held at the proper angle.
- the improvements in accordance with this invention are accomplished by moving the two optical elements 14, 16 of Fig. 3A relative to one another.
- the optical element 14 is rotated about the depicted x-axis relative to the optical element 16 as shown in Fig. 3B.
- the amount of rotation shown is exaggerated for clarity.
- the rotation of element 14 about the x-axis produces a displacement of the reflective surfaces 20, 22 in the +y direction an amount of z x tan0 in which z x is the location along the z-axis where the Fig. 3B view is located.
- This provides the altered beam path 42 as shown in Fig. 3B, with the beam 42 reflected from the second reflective surface 22 of the first optical element 14 being displaced along the x-axis direction an amount of 2z 1 tan0.
- the amount of inclination is dynamically variable, i.e. is changed during printing (imaging) .
- the amount of inclination is altered, for instance at the end of each scan field during bidirectional printing to be in the opposite direction of inclination, in order to eliminate the chevron artifacts and provide all of the scan lines with the desired orthogonality to the direction of scan, or at least so that they are all parallel from field-to-field, without the chevron artifact.
- the value d of Fig. 1 will be the beam brush width Vt x which equals N ⁇ , where N is the number of channels (beams) and ⁇ is the spacing between adjacent laser beams.
- Vt x the beam brush width
- the optical element is inclined an amount ⁇ such that ⁇ L0 is equal to one half of the beam brush width. This rotation about the x-axis results in a rotation of the output scanning line for chevron correction of ⁇ .
- the present inventors have found that it is advantageous to provide an autofocussing function using the same optical elements arranged as in Fig. 3A.
- the two optical elements 14, 16 are not rotated or tilted but instead are translated, i.e. moved relative to one another along the depicted x-axis.
- the first optical element 14 in two different positions, which are the neutral position of Fig. 3A (dotted line) and an extended position, in the extended position the length of the optical path is increased by a translation of the first optical element dx by distance 2dx.
- the beam must transverse this displacement dx twice between the first and second reflective elements.
- the optical path length increases. This allows adjustment of optical path length between the scan lens and the substrate surface and thus provides the focusing mechanism.
- the required amount of x- axis direction motion for focussing is very limited and is for instance +.lmm to achieve a focussing depth of +2mm.
- the amount of tilting or rotation needed for chevron correction to correct for bidirectional printing chevron angle error is only a fraction of a minute of arc and hence the drawings are intendedly exaggerated to better show this motion and inclination and are not to scale.
- one of the optical elements 14, 16 is held stationary and the other is translated along the x-axis. Again, which optical element is translated is not relevant in an optical sense but the relative x-axis translation provides the focussing effect. In one embodiment both elements 14, 16 are translated different amounts although this is more complicated mechanically.
- this detector includes a laser displacement transducer (not shown) which senses the location of the surface of the medium.
- This uses an auxiliary laser beam which tracks ahead of the scanning beam looking for irregularities in the surface by sensing defocussing of the reflected auxiliary laser beam, and in response controls the relative translation of the first and second reflective elements with the desired time lag built in, to compensate for the currently encountered irregularities in the medium surface by the scanning beam.
- the last type of movement of the optical elements is a relative displacement of the two optical elements along the y-axis. This would not affect the error angle or the focus but instead displaces the scan line in the x-axis direction. While this might be of use in some applications such as alignment, it is not directly pertinent to either the chevron correction or focussing. It is to be understood that various mechanical mounting arrangements and drives may be used to achieve the above described relative movements of the two optical elements of Fig. 3A.
- One version shown in Fig. 4 fixes the first optical element 14 on a rigid mounting (not shown) ; only the second optical element 16 is movable.
- the second optical element 16 for purposes of economy of fabrication, is actually two separate mirrored elements 16- a, 16-b adhesively bonded together, with only the lower element 16-b then adhesively bonded to the mount structure 50.
- This thermally isolates the upper reflective surface 24 from the lower reflective surface 26 and also from the mechanical elements which are heat generating.
- the lower reflective element 16-b of the second optical element 16 is mounted on the lower part of the mount structure 50 which in turn rides on a gimbal, i.e.
- the optical element 16 on its mounting structure 50 can rotate about the depicted x-axis relative to the cylindrical gimbal structure, to achieve the desired rotation of the optical element 16 relative to the optical element 14.
- Such gimbals are well known in the field of mechanical engineering and are not described further herein. It is of course important this be a relatively precise gimbal with minimum play so as to prevent unwanted motion of the second optical element 16.
- This rotation about the x- axis on the cylindrical gimbal structure 54 provides the desired tilting for chevron correction.
- the mount structure is actually driven relative to the cylindrical gimbal element by an electro-magnetic actuator.
- the desired rotation and movement of the gimbal can be accomplished also by for instance a piezoelectric actuator, or a motor with a cam.
- the above described translation movement along the x- axis is used for focussing.
- the second optical element 16 is moved and the first optical element 14 is held fixed but this is not limiting.
- the back of the mounting structure 50 as shown in Fig. 4 has the capability to translate with the associated second optical element 16 back and forth along the x-axis relative to the cylindrical gimbal structure 54.
- this x-axis translation is achieved by an air bearing 60 pushing against the rear surface of the mount structure 50.
- the air bearing 60 is spring loaded (not shown) so that the gimbal can return to its normal position in the absence of operation of the air bearing 60.
- Air bearing 60 is supplied by air via tube 62 to provide frictionless contact between bearing 60 and gimbal structure 54.
- sensors 70 mounted to sense the position (both in terms of rotation and translation) of the mounting structure 50 which holds the second reflective element 16.
- inductive sensors are used to detect the movement of this mounting structure both back and forth along the x-axis and also rotationally .
- the coarse rotational and translational movement are both detected by inductive sensors and in the fine range optical sensors are used.
- a laser diode/photosensor arrangement may be used to sense the position of the moveable optical element.
- a more direct means of focus finding and chevron angle error correction is accomplished by e.g. a conventional charge coupled device (CCD) sensor (not shown) which monitors a split-off portion of the scanning beam prior to its being incident upon the medium.
- CCD charge coupled device
- a beam splitter is provided, for instance in the chevron correction mirror assembly optics, which splits off a small portion of the laser beam and directs it to the CCD sensor in order to measure motion of the beam relative to the stage travel via a control system and provide feedback control to rotate the second optical element.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Facsimile Scanning Arrangements (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000502438A JP2003536088A (en) | 1997-07-08 | 1998-06-19 | Chevron error correction method and autofocus optical system for laser scanner |
EP98930260A EP0995143A1 (en) | 1997-07-08 | 1998-06-19 | Chevron error correction and autofocus optics for laser scanner |
KR1020007000088A KR20010021530A (en) | 1997-07-08 | 1998-06-19 | Chevron error correction and autofocus optics for laser scanner |
IL13374898A IL133748A0 (en) | 1997-07-08 | 1998-06-19 | Chevron error correction and autofocus optics for laser scanner |
CA002295549A CA2295549A1 (en) | 1997-07-08 | 1998-06-19 | Chevron error correction and autofocus optics for laser scanner |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5197497P | 1997-07-08 | 1997-07-08 | |
US60/051,974 | 1997-07-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999003011A1 true WO1999003011A1 (en) | 1999-01-21 |
Family
ID=21974585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/012465 WO1999003011A1 (en) | 1997-07-08 | 1998-06-19 | Chevron error correction and autofocus optics for laser scanner |
Country Status (7)
Country | Link |
---|---|
US (1) | US6107622A (en) |
EP (1) | EP0995143A1 (en) |
JP (1) | JP2003536088A (en) |
KR (1) | KR20010021530A (en) |
CA (1) | CA2295549A1 (en) |
TW (1) | TW376668B (en) |
WO (1) | WO1999003011A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1050772A2 (en) * | 1999-05-03 | 2000-11-08 | Elop Electro-Optics Industries Ltd. | Optical scanner |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10649071B2 (en) * | 2014-10-07 | 2020-05-12 | Konica Minolta, Inc. | Scanning optical system and radar |
JPWO2016056541A1 (en) * | 2014-10-07 | 2017-07-27 | コニカミノルタ株式会社 | Scanning optical system and radar |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5018808A (en) * | 1989-12-26 | 1991-05-28 | Eastman Kodak Company | Method and apparatus for beam displacement in a light beam scanner |
JPH06202019A (en) * | 1992-12-29 | 1994-07-22 | Sony Corp | Multi-beam scanning optical device |
US5383047A (en) * | 1993-06-22 | 1995-01-17 | Xerox Corporation | Ros bow compensation |
US5438449A (en) * | 1987-11-25 | 1995-08-01 | Raytheon Company | Beam pointing switch |
EP0686862A1 (en) * | 1994-06-06 | 1995-12-13 | Xerox Corporation | Two-element zoom lens for beam separation error correction |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4025154A (en) * | 1973-09-22 | 1977-05-24 | Olympus Optical Co., Ltd. | Optical scanning system |
US4154507A (en) * | 1977-12-08 | 1979-05-15 | Jersey Nuclear-Avco Isotopes, Inc. | Optical combiner/distributor using V-shaped mirror assembly |
US4729071A (en) * | 1986-11-03 | 1988-03-01 | Altman Stage Lighting Co. | Low-inertial beam direction lighting system |
US4777568A (en) * | 1986-11-03 | 1988-10-11 | Altman Stage Lighting Co. | Low-inertial beam direction lighting system |
JP3034637B2 (en) * | 1990-08-28 | 2000-04-17 | 株式会社リコー | Optical deflection element and optical scanning device |
JP3354162B2 (en) * | 1991-04-26 | 2002-12-09 | 富士通株式会社 | Scanning device |
US5416319A (en) * | 1993-12-03 | 1995-05-16 | Hughes Aircraft Company | Optical scanner with dual rotating wedge mirrors |
-
1998
- 1998-06-05 US US09/092,319 patent/US6107622A/en not_active Expired - Fee Related
- 1998-06-19 WO PCT/US1998/012465 patent/WO1999003011A1/en not_active Application Discontinuation
- 1998-06-19 JP JP2000502438A patent/JP2003536088A/en active Pending
- 1998-06-19 KR KR1020007000088A patent/KR20010021530A/en not_active Application Discontinuation
- 1998-06-19 EP EP98930260A patent/EP0995143A1/en not_active Ceased
- 1998-06-19 CA CA002295549A patent/CA2295549A1/en not_active Abandoned
- 1998-07-07 TW TW087110997A patent/TW376668B/en active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5438449A (en) * | 1987-11-25 | 1995-08-01 | Raytheon Company | Beam pointing switch |
US5018808A (en) * | 1989-12-26 | 1991-05-28 | Eastman Kodak Company | Method and apparatus for beam displacement in a light beam scanner |
JPH06202019A (en) * | 1992-12-29 | 1994-07-22 | Sony Corp | Multi-beam scanning optical device |
US5383047A (en) * | 1993-06-22 | 1995-01-17 | Xerox Corporation | Ros bow compensation |
EP0686862A1 (en) * | 1994-06-06 | 1995-12-13 | Xerox Corporation | Two-element zoom lens for beam separation error correction |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 018, no. 557 (P - 1817) 24 October 1994 (1994-10-24) * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1050772A2 (en) * | 1999-05-03 | 2000-11-08 | Elop Electro-Optics Industries Ltd. | Optical scanner |
EP1050772A3 (en) * | 1999-05-03 | 2003-02-12 | Elop Electro-Optics Industries Ltd. | Optical scanner |
Also Published As
Publication number | Publication date |
---|---|
US6107622A (en) | 2000-08-22 |
TW376668B (en) | 1999-12-11 |
KR20010021530A (en) | 2001-03-15 |
EP0995143A1 (en) | 2000-04-26 |
CA2295549A1 (en) | 1999-01-21 |
JP2003536088A (en) | 2003-12-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0827325B1 (en) | Multi-beam scanner with acousto-optic element for scanning imaging surfaces | |
JP4486323B2 (en) | Pixel position specifying method, image shift correcting method, and image forming apparatus | |
US5877494A (en) | Beam error correction using movable correction element | |
JP2000338432A (en) | Laser exposure device and its method | |
US6107622A (en) | Chevron correction and autofocus optics for laser scanner | |
US6087054A (en) | Detection and correction of skew between a reference and lenticules in lenticular material | |
JP2000180748A (en) | Division scanner and beam state adjusting method therefor | |
US5892610A (en) | Scanning system with error-correcting deflector | |
JP2000059566A (en) | Electrooptical image pickup unit | |
EP0827003B1 (en) | Multi-beam scanner with mechanically moving element for scanning imaging surfaces | |
JPH10133135A (en) | Light beam deflecting device | |
WO2005012978A1 (en) | Multibeam internal drum scanning system | |
JPS61295526A (en) | Photoscanner | |
JPH0222928B2 (en) | ||
JP4917926B2 (en) | Optical scanning apparatus and image forming apparatus | |
KR101012579B1 (en) | Image position adjusting apparatus and optical device | |
JP2749850B2 (en) | Optical deflection device | |
JPH10325929A (en) | Optical scanner | |
JP2020021070A (en) | Scanner arrangement for optical radiation | |
JPH11277793A (en) | Beam scanner | |
EP1059551A2 (en) | Apparatus for correcting scan line skew in an optical scanner | |
JP2001235698A (en) | Optical scanner | |
JP2004177524A (en) | Divided scanning and writing device | |
JP2000137181A (en) | Multibeam scanning optical device | |
JPH09247357A (en) | Document reader, and method and device for adjusting positions of its photodetecting element and image forming lens |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 133748 Country of ref document: IL |
|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): CA CN IL JP KR MX RU SG |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1998930260 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref document number: 2295549 Country of ref document: CA Ref country code: CA Ref document number: 2295549 Kind code of ref document: A Format of ref document f/p: F |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020007000088 Country of ref document: KR |
|
WWP | Wipo information: published in national office |
Ref document number: 1998930260 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 1020007000088 Country of ref document: KR |
|
WWR | Wipo information: refused in national office |
Ref document number: 1998930260 Country of ref document: EP |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 1998930260 Country of ref document: EP |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 1020007000088 Country of ref document: KR |