WO1999002242A1 - Adsorption apparatus and methods - Google Patents

Adsorption apparatus and methods Download PDF

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Publication number
WO1999002242A1
WO1999002242A1 PCT/US1998/013888 US9813888W WO9902242A1 WO 1999002242 A1 WO1999002242 A1 WO 1999002242A1 US 9813888 W US9813888 W US 9813888W WO 9902242 A1 WO9902242 A1 WO 9902242A1
Authority
WO
WIPO (PCT)
Prior art keywords
åtion
adso
bed
elements
housing
Prior art date
Application number
PCT/US1998/013888
Other languages
French (fr)
Inventor
Kristine M. Graham
Paul Peterson
Donald R. Monson
Jarren B. Mills
Timothy H. Grafe
Original Assignee
Donaldson Company, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/890,804 external-priority patent/US5964927A/en
Application filed by Donaldson Company, Inc. filed Critical Donaldson Company, Inc.
Priority to AU82877/98A priority Critical patent/AU8287798A/en
Publication of WO1999002242A1 publication Critical patent/WO1999002242A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0446—Means for feeding or distributing gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40084—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by exchanging used adsorbents with fresh adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4508—Gas separation or purification devices adapted for specific applications for cleaning air in buildings

Definitions

  • the present invention relates to an adso ⁇ tion bed and adso ⁇ tion filtering system for removing airborne contaminants from clean rooms, sick buildings, or other enclosed spaces.
  • Gas adso ⁇ tion beds are used in many industries to remove airborne contaminants, such as organic bases, to protect people, the environment and often, a critical manufacturing process or the products that are manufactured.
  • a specific example of an application for gas adso ⁇ tion beds is the semiconductor industry where products are manufactured in an ultra-clean environment, commonly known in the industry as a "clean room".
  • the manufacturing processes typically require the use of substances such as solvents to be used in the clean room environment.
  • the use of these substances presents a problem because vapors that are present or are a byproduct from the process may contaminate the air and other processes in the room, such as lithography processes using chemically amplified photoresists, if not properly removed.
  • environments may have several gases occurring naturally in the ambient air that contaminants that cannot be removed by particulate filters.
  • Typical contaminants are airborne are airborne bases, such as ammonia, organic amines, and N-Methyl-2-Pyrrolidone.
  • airborne bases such as ammonia, organic amines, and N-Methyl-2-Pyrrolidone.
  • contaminated air is often drawn through a granular adso ⁇ tion bed assembly having a frame and an adso ⁇ tion medium, such as activated carbon, retained within the frame.
  • the adso ⁇ tion medium adsorbs or chemically reacts with the gaseous contaminants from the air flow and allows clean air to be returned to the process and/or the clean room.
  • the removal efficiency is critical in order to protect the processes and the products.
  • the removal efficiency and capacity of the gaseous adso ⁇ tion bed is dependent upon a number of factors, such as the air velocity through the adso ⁇ tion bed, the depth of the bed, the type and amount of the adso ⁇ tion medium being used and the activity level and rate of the adso ⁇ tion medium. It is also important that for efficiency to be increased or maximized, the air leaking through voids between the tightly packed adso ⁇ tion bed granules and the frame should be eliminated.
  • the Osendorf patent shows beds which overcome the problems stated above, further improvements are possible.
  • the invention of application 08/890,804 is directed to an adso ⁇ tive filtering device and in particular to an adso ⁇ tive device that provides for balanced distribution through adso ⁇ tive beds, increased life and improved efficiency.
  • the invention of application 08/890,804 contemplates a modular system which provides for vertical as well as horizontal stacking of individual abso ⁇ tive beds.
  • the adso ⁇ tive beds are cartridge-type elements which include an internal arrangement of individual adso ⁇ tion filtering elements. Modules can also be connected in a side-by-side arrangement.
  • Each adso ⁇ tion module includes an inlet plenum and an outlet plenum with a vertical stack of adso ⁇ tion beds exposed therebetween.
  • the inlet and outlet plenums are arranged in a substantially vertical configuration with the flow entering and leaving from the top of the plenums.
  • the cross sectional areas of the plenums are designed with a ratio such that flow is distributed in a balanced manner to each of the adso ⁇ tion beds.
  • a single access door extends along the front of the module.
  • the adso ⁇ tion bed stack includes frame elements which support each of the adso ⁇ tion bed assemblies.
  • the frame includes side panels which seal to the housing of the module and also support a baffle.
  • the baffles are disposed between vertically adjacent adso ⁇ tion bed assemblies and act to direct air into the bottom of an adso ⁇ tion bed assembly immediately above the baffle and to direct air outward from an adso ⁇ tion bed assembly immediately below the baffle.
  • Each frame section includes a support to maintain the baffles at an angle. Inlet and outlet vents direct flow transversely along the width of the adso ⁇ tion bed assembly.
  • a honeycomb grid member inserts below the adso ⁇ tion bed assembly and above the baffle and directs the air substantially straight upward and provides proper orientation of the air engaging the individual adso ⁇ tion bed elements in the adso ⁇ tion bed assemblies.
  • the space between the baffle and the adso ⁇ tion bed assembly is such that the flow is distributed substantially evenly from front to back along the adso ⁇ tion bed.
  • An inflatable gasket in fluid communication with a compressed air supply seals to the planar top of the adso ⁇ tion bed assembly. It can be appreciated that each adso ⁇ tion bed assembly inserts through an opening in the front of each frame section and the single door serving all adso ⁇ tion bed assemblies along the front of each module. The gasket provides a seal to the downstream clean air side of the adso ⁇ tion bed. After passing through each adso ⁇ tion bed assembly, air strikes the bottom of the baffle, which directs the air rearward to the outlet plenum where it passes upward through the top of each module.
  • Each adso ⁇ tion bed assembly includes a housing having a planar top and bottom. Openings are formed in the top and bottom that allow air flow through adso ⁇ tion bed elements within the housing.
  • the upper surface includes a single planar member with flanges bent down to form openings.
  • Within the housing are disposed rectangular adso ⁇ tion beds which include a mesh screen retaining activated carbon or other adso ⁇ tive materials therebetween.
  • the mesh screens include channel members extending around the periphery of each element which are potted to the ends of the inside of the housing.
  • the screens also include a center post which prevents the screens from bowing outward under pressure.
  • the channels at the edge of the element have a midbed baffle which extends inward into the adso ⁇ tive material.
  • the baffle ensures that voids at the edge of the medium do not decrease the efficiency of the bed as the length of the path for gases passing along the edge are increased by the baffle extending inward.
  • the post at the center may include a flange extending transversely to the post to increase the length of the path of air passing along the center post.
  • Each element also includes a pre-filter and post-filter, typically an electrostatic type filter for retaining particles from the adso ⁇ tive material.
  • the adso ⁇ tion elements are arranged in a V-type cross-sectional configuration which provides for even distribution and pressure drop for each individual element.
  • the present invention concerns refinements and improvements to the adso ⁇ tion apparatus of the application serial number 08/890,804.
  • the invention is directed to an adso ⁇ tion bed arrangement comprising a plurality of adso ⁇ tion elements, a housing, and a gasket member between the housing and the adso ⁇ tion elements.
  • Each of the adso ⁇ tion elements has adso ⁇ tion media contained within a respective element.
  • Each of the adso ⁇ tion elements is selectively openable to provide access to the adso ⁇ tion media.
  • the elements are positioned within an interior of the housing, and the housing is selectively openable to provide access to the plurality of adso ⁇ tion elements. In this manner, the adso ⁇ tion elements can be accessed, opened, emptied of their existing media, and refilled with new, fresh adso ⁇ tion media.
  • the housing has first and second opposite panels, and a side panel.
  • the side panel is selectively removable to provide access to the adso ⁇ tion elements.
  • the gasket member is situated in between to provide a seal between the side panel and the adso ⁇ tion elements.
  • each of the adso ⁇ tion elements includes first and second opposite screens, and at least one open end. Adso ⁇ tion media is preferably removably packed between the first and second screens.
  • each adso ⁇ tion element open end is covered with a removable cover member.
  • each of the cover members comprises a urethane pad.
  • the adso ⁇ tion bed assemblies are arranged in a vertical stack in an adso ⁇ tion apparatus.
  • the invention is also directed to a method for changing filtering media in an adso ⁇ tion apparatus.
  • the method includes a step of removing an access panel from an adso ⁇ tion bed housing to expose a cover member covering an end of an adso ⁇ tion element.
  • the cover member is removed from the end of the adso ⁇ tion element to expose filtering media within the element.
  • the filtering media is then poured from the element.
  • new filtering media is added into the element.
  • the cover member is then replaced over the end of the element, and the access panel is replaced on the adso ⁇ tion bed housing.
  • a first prefilter is removed from the adso ⁇ tion bed housing through a slot in the housing. After the step of removing a first prefilter, a second, different and new prefilter is inserted through the slot in housing.
  • Figure 1 shows a perspective view of an adso ⁇ tion filtering system according to the principles of the invention described in the parent disclosure
  • Figure 2 shows a top plan view of an adso ⁇ tive system having two vertical stacks, described in the parent disclosure
  • Figure 3 shows a side sectional view of the adso ⁇ tive system shown in Figure 1 , described in the parent disclosure
  • Figure 4 shows a perspective view of a frame section, described in the parent disclosure
  • Figure 5 shows a side sectional view of a frame section shown in Figure 4, described in the parent disclosure
  • Figure 6 shows a side sectional view of an adso ⁇ tive bed assembly, described in the parent disclosure
  • Figure 7 shown a perspective view of the adso ⁇ tive bed cartridge shown in Figure 6, described in the parent disclosure
  • Figure 8 shows a side sectional view of a self-contained adso ⁇ tive bed element, described in the parent disclosure
  • Figure 9 shows a sectional view of the gasket for a frame module in a deflated state, described in the parent disclosure
  • Figure 10 shows a sectional view of the gasket for the frame module shown in Figure 9 in an inflated state, described in the parent disclosure
  • Figure 11 shows a diagrammatic view of an indicator system for detecting airborne organic bases, described in the parent disclosure
  • Figure 12 is an exploded, perspective view of one embodiment of an adso ⁇ tive bed assembly, according to principles of the present invention
  • Figure 13 is a cross-sectional, somewhat schematic, view of the embodiment of the adso ⁇ tive bed assembly illustrated in Figure 12, according to principles of the present invention.
  • a counter flow adso ⁇ tion module 22 of an adso ⁇ tive filtering system 20 The modules 22 can be joined together to form a higher capacity adso ⁇ tive system 20, as shown in Figure 2.
  • the system 20 provides for a plurality of cartridge-type adso ⁇ tion bed assemblies 24 receiving parallel flow with both vertical stacking shown most clearly in Figure 1, as well as horizontal stacking, as shown in Figure 2.
  • each module 22 includes an inlet 30 and an outlet 32 having flanges formed thereon for accepting a gasket and providing a sealed connection to upstream and downstream duct work.
  • the counter flow adso ⁇ tion module 22 includes an access door 38 pivoting along one vertical edge in a preferred configuration.
  • a housing is formed of sealed housing panels 42, forming a sealed enclosure with air escaping only through the inlet 30 and outlet 32.
  • the access door 38 also includes gaskets for an enclosed air tight housing.
  • each counter flow adso ⁇ tion module 22 supports a stack of the adso ⁇ tion bed assemblies 24.
  • a corresponding number of adso ⁇ tion bed assembly support frame sections 50 (Fig. 1) are stacked in a vertical configuration to form a frame 26 (Fig. 1) within the counter flow adso ⁇ tion bed module 22.
  • the adso ⁇ tion bed assembly support frame 26 can be stacked in any height corresponding to the desired number of adso ⁇ tion bed assemblies 24 that are to be used.
  • Extending vertically below the inlet 30 is an inlet plenum 34. Extending vertically below the outlet 32 is an outlet plenum 36.
  • the ratio of the cross sectional area of the inlet plenum 34 to the cross-sectional area of the outlet plenum 36 is .636. It has been found that such a ratio produces balanced flow between the various adso ⁇ tion bed assemblies 24. In this manner, the activated carbon or other adso ⁇ tion material in each adso ⁇ tion bed assembly 24 deteriorates at the same rate.
  • air flow is downward through the inlet plenum 34 and counterflow upward through the adso ⁇ tion bed assemblies 24 and in the outlet plenum 36.
  • the frame section 50 includes planar side panels 52 having substantially opposed parallelogram shaped sides 52.
  • the frame sections 50 are configured so that the vertical edges of sides 52 extend substantially vertically while the top and bottom edges are angled upward from front to rear, for receiving baffles and directing flow through the adso ⁇ tion bed assemblies 24, as explained hereinafter.
  • Support members 58 extend parallel to a front portion 140 of the frame section 50.
  • the supports 58 support a honeycomb panel 56, as shown in Figure 5.
  • a honeycomb panel 56 is a planar member having a hexagonal orifices formed therein in a honeycomb-like grid.
  • honeycomb panel 56 maintains flow upward and aids in balanced distribution into the adso ⁇ tion bed assemblies 24, as explained hereinafter.
  • the honeycomb panel supports 58 extend below flanges 64 and bed supports 54.
  • the bed supports 54 extend inward from each of the sides 52 and support an adso ⁇ tion bed assembly 24.
  • an inlet register 60 having a plurality of orifices formed therein which are spaced evenly apart for directing air evenly across an adso ⁇ tion bed inlet chamber 130 intermediate the top of a baffle 28 and a lower surface of an adso ⁇ tion bed assembly 24. It can be appreciated that the adso ⁇ tion bed inlet chamber 150 narrows from front to rear and aids in even distribution of the air flow from front to rear into the adso ⁇ tion bed assembly.
  • an outlet register 62 having a plurality of orifices spaced evenly apart thereon.
  • each frame section includes flanges 64 which attach to the baffle 28 (Fig. 3) and adjacent upper and lower frame sections 50. It can be appreciated that the seals and gaskets are used to ensure sealed air flow. It can be appreciated that with the sealed flow path and solid sides 52, all air is directed through the inlet and outlet registers 60 and 62 and through the adso ⁇ tion bed assembly 24.
  • an inflatable gasket 160 is used with each frame section 50, as shown in Figures 9 and 10.
  • the inflatable gasket 160 mounts below the flange 70 along a flat upper face 162.
  • the gasket 160 is rectangular generally corresponding to the outline to the shape of the rectangular flange 70.
  • the gasket 160 having an oblong inflatable cross section 164 when uninflated, as shown in Figure 9, extends downward when inflated, as shown in Figure 10, to engage the top of an adso ⁇ tion bed assembly 24, as explained hereinafter to form an air tight seal.
  • a stem 166 extends up to a fitting
  • the flange 70 includes a notch 72 for receiving the stem 166 leading to the fitting 66 mounted on one side 52.
  • An air line 78 extends on the outside of the side 52 from the fitting 66 through an orifice 74 in the front face 140 of the flange 64.
  • the air line 68 leads to a vertically extending portion of the air line 78 with flow extending through tees and other fittings 76 providing pressurized air to the inflatable gaskets 160.
  • the adso ⁇ tive bed assembly 24 includes a generally rectangular housing 80.
  • the housing 80 includes a top panel 82 having generally rectangular openings 110 formed therein and bent in flange portions 112 extending into the openings 110 providing a planar upper surface.
  • a bottom panel 84 includes a plurality of openings 110 having bent in flange portions 112.
  • the openings 110 define inlets and outlets for the adso ⁇ tion bed assembly 24.
  • the top and bottom panels 82 and 84 have a planar sealing surface, as explained hereinafter.
  • the housing 80 also includes rectangular sides 86 which are sealed to the top and bottom panels 82 and 84.
  • Typical sizes of housings 80 are 12x6x24 inches or 18x8x30 inches.
  • a plurality of adso ⁇ tion layer segments 90 disposed in a V-type angled configuration that aids in providing a smaller footprint. This configuration provides for distributing flow evenly through the various segments 90 within the housing 80, as shown by the flow arrows.
  • the configuration of the adso ⁇ tion layer elements 90 in addition to the baffle arrangement and plenum ratios provides for substantially even distribution to each segment 90 in the entire adso ⁇ tive filtering system 20 and therefore balanced deterioration of each segment 90. This provides for increased system life and for changing elements as they become spent at the same interval.
  • Each adso ⁇ tive layer element 90 includes a granular bed of adso ⁇ tive material 92, such as activated carbon.
  • Other suitable substances for the bed 92 of adso ⁇ tion granules include zeolites, sodium bisulfate, silica or other media.
  • the granules in the bed 92 are tightly packed to force contact with air flow through the bed.
  • the adso ⁇ tive bed 24 can filter out airborne contaminants such as airborne organic bases, ammonia, amines and N-methyl 12- pyrrolidone. These contaminants often cause defects in the sensitive semiconductor manufacturing processes.
  • the width of the bed 92 should be at least ten times the mean particle diameter of the granules in the bed 92.
  • the bed 92 is approximately .44 inches thick and in a thick embodiment, the bed 92 is approximately 1.1 inches thick.
  • Typical mean diameter of the granules in the bed 92 of activated carbon is 0.044 inches in a thin embodiment and 0.06 inches in a thick embodiment. This ensures that satisfactory removal of contaminants is achieved and that particles cannot pass through the adso ⁇ tion bed 24 without sufficient contact for removal.
  • the granular bed 92 is maintained between mesh screens 94 which are substantially rectangular in shape.
  • Around each of the screens 94 is a C-channel type frame 100.
  • the frame 100 is potted to the sides 86 of the adso ⁇ tion bed assembly housing 80 for an improved seal. Sealant 114 provides sealing to the top and bottom panels 82 and 84 respectively, as shown in Figure 8.
  • each adso ⁇ tion layer element 90 has associated pre-filter panels 96 and post-filter panels 98.
  • the panels 96 and 98 are generally electrostatic type filters or other filters and are generally rectangular in shape and are placed against the faces of the adso ⁇ tion layer elements.
  • the pre-filter 96 removes air borne particles prior to engaging the granular bed 92 and the adso ⁇ tion media and retains any dust from the adso ⁇ tive material inside the filter during shipping, handling and filter replacement.
  • the post-filter 98 ensures that any residual particles from the adso ⁇ tion layer element 90 is filtered before passing to the outlet 32. Referring now to Figure 8, there is shown a sectional view of an adso ⁇ tion layer element 90.
  • the adso ⁇ tion layer element 90 includes a very tightly packed granular bed 92.
  • filtering efficiency may be decreased as the contaminant gases may be able to proceed through the granular bed 92 with less contact against the individual granules. It has been found that by increasing the length of the path along the edges of the bed 92, the filtering efficiency at the edges of the bed 92 rise.
  • a mid-bed baffle 102 may be placed along the edge of the bed 92 extending inward from the C-channel 100. The increased length of the journey of a contaminant ensures greater exposure to the granular bed 92 and greater filtering efficiency.
  • a center post 104 may be added extending between the mesh screens 94.
  • a center post 104 which may include a retaining washer 107 engaging the outer periphery of each of the mesh screens 94.
  • a mid-bed flange acting as a baffle 106 may be used with the center post. This configuration ensures a longer journey of particles along the post 104 to overcome the possibility of effects from voids. It can also be appreciated however that as washers 106 tend to direct some of the flow away from the post, such a center post baffle 106 may not be necessary.
  • a compression member may be utilized at one end of the adso ⁇ tion element 90 to press inward against the granular bed 92 and ensure that a tightly packed arrangement is maintained.
  • the adso ⁇ tion bed assemblies 24 may be refillable, as one of the end panels of the sides 86 may be removable. The individual elements 90 may be replaced or the spent medium in the granular bed 92 may be emptied and active medium replaced.
  • a compression member well known in the art, may be added to a removable end cap in a refillable adso ⁇ tion bed assembly.
  • an indicator system 120 for detecting airborne contaminants there is shown an indicator system 120 for detecting airborne contaminants. It can be appreciated that with the present invention, it is advantageous to monitor the deterioration of the active adso ⁇ tion medium in the granular bed 92. Therefore, a sampling system may be used which predicts the deterioration of the medium. It can be appreciated that as the adso ⁇ tion elements 90 become spent, there is no visual or other indication that the filter elements are spent. Moreover, as the contaminant does not actually leave particles which may cause a change in flow or pressure, pressure monitoring systems used with conventional particle filters cannot be used.
  • the system 120 uses a probe 122 upstream of the adso ⁇ tion filters.
  • the system includes a pump 124 such as an ejector type pump to maintain flow.
  • An example of a suitable pump 124 is Model No. E-79700-00, available from Cole-Parmer Company.
  • the indicator system 120 has a sample flow that is proportional to the flow through the adso ⁇ tion bed assemblies 24.
  • a flow meter 126 having a valve is utilized which may be used to calibrate this system to obtain the desired flow rate. It can be appreciated that by changing the flow through the system, faster or slower rates of deterioration of the indicator 120 can be accomplished. Therefore, safety margins may be changed to meet the requirements of each adso ⁇ tion system 20.
  • the indicating system 120 also includes an indicator 128 including a tube 130 containing granules 132.
  • the granules 132 are preferably coated with a color changing substance that changes in response to a pH change. Therefore, as airborne contaminants which are typically bases reach the granules 132, the color of the spent granules will change. This change forms a front extending along the tube 130 which can be viewed. It can be appreciated that by monitoring the progress of the front along the tube 130, the deterioration stages of the adso ⁇ tion bed assemblies 24 may be monitored.
  • the sampling probe 122 is placed in the inlet plenum 34 so that untreated air is sampled.
  • the high standards of the adso ⁇ tive filtering requirements of the present invention negate the use of a downstream indicator which detects contaminants once they have passed through the adso ⁇ tive filtering system 20.
  • the delicate nature of the processes require that the adso ⁇ tive filters 24 cannot have a failure and must be changed prior to being completely spent, rather than immediately thereafter. Therefore, sampling of the air prior to treatment provides a satisfactory safety factor and an accurate predictor of the deterioration rate and life of the adso ⁇ tion layer elements 90.
  • the indicator is placed on the exterior of the door 38 of the counter flow adso ⁇ tion module 22. Operation
  • the adso ⁇ tive system 20 receives fully operational adso ⁇ tive bed assemblies 24. It can be appreciated that by opening the access door 38, as shown in Figure 1, the self-contained cartridge-type adso ⁇ tive bed assemblies 24 may be slid into the corresponding frame sections 50 through the opening formed in the front face 140 of each frame section 50. The adso ⁇ tion bed assemblies 24 rest on the supports 54 and are below the flange 70. It can be appreciated that the inflatable sealing gasket 160 extends downward from the flange 70 substantially around the periphery of the rectangular adso ⁇ tion bed assembly 24. In the uninflated state as shown in Figure 9, the gasket 160 does not engage the upper panel 82 of the adso ⁇ tion bed assembly housing 80.
  • the adso ⁇ tion bed assemblies 24 have been inserted, compressed air is delivered to the gaskets 160 and the inflatable tubing is expanded to the configuration shown in Figure 10 and is forced downward to engage the top panel 82 of the assembly housing 80. As the top panel 82 has a substantially planar surface, the seal between the gasket 160 and the adso ⁇ tion bed assembly housing 80 is uninterrupted, as no corners or other irregularities are encountered. Once the gasket 160 is inflated, the downstream clean air side of the filtering system is sealed from the upstream side. Following insertion of the adso ⁇ tion bed assemblies 24, the indication system 120 is calibrated to achieve the proper flow rate. When air enters the system, it passes in the top of each module 22 through the inlet 30 to the inlet plenum 34.
  • the ratio of the cross sectional area of the inlet plenum 34 to the outlet plenum 36 provides balanced distribution between the various adso ⁇ tion bed assemblies 24. Flow passes through each assembly 24 through the associated inlet register 60 on the front face 140 of the associated frame section 50. The flow encounters an upper face of one of the baffles
  • the inlet chamber 150 has a volume which provides for substantially balanced distribution from front to rear along the adso ⁇ tion bed assemblies 24. Once the flow passes through the honeycomb panel
  • the flow is directed in a substantially straight pattern upward.
  • the adso ⁇ tion layer elements 90 are angled at approximately ten degrees from vertical and receive even flow distribution, as indicated by the arrows in Figure 6.
  • the treated air continues to pass upward until engaging a lower face of the baffle 28 above the assembly 24 which directs the air from the outlet chamber 152 through the register outlet 62 at the rear face 142 of each frame section 50.
  • the baffle between vertically adjacent frame sections 50 and adso ⁇ tion bed assemblies 24 acts both to direct flow upward into the adso ⁇ tion bed assembly 24 above the baffle 28 and also directs air from the adso ⁇ tion bed assembly 24 below the baffle 28 outward. This decreases the overall height of the frame 26 and stack of adso ⁇ tion bed assemblies 24.
  • the filtered flow then passes to the outlet plenum 36 and up through the outlet 32.
  • the indicator system 20 signals changing of the adso ⁇ tion medium 92
  • the system is taken offline.
  • the access door 38 is opened to provide access to all the cartridge-like adso ⁇ tion bed assemblies 24.
  • the compressed air supply to the gaskets 160 is stopped and the gaskets 160 deflate to the position shown in Figure 9. At this time, the gaskets 160 do not engage to the top panel 82 of the adso ⁇ tion bed assemblies 24.
  • the adso ⁇ tion bed assemblies 24 may then be slid forward through the opening formed in the front face 140 of each frame section 50 and taken out through the access door 38. New adso ⁇ tion bed assemblies 24 may be inserted in their place and the inflatable gasket 160 reinflated.
  • the indicator 128 may be replaced so that monitoring may continue which coincides with the newly received adso ⁇ tion bed assemblies.
  • the system also provides for a filtration system with a much smaller footprint and with less size. Footprint savings of forty percent (40%) are possible as compared to prior systems, such as the Osendorf system of U.S. Patent No. 5,290,345. Such a savings is made without loss of efficiency or filter media volume. In addition, flow and pressure drop are substantially the same for the reduced system volume.
  • Adso ⁇ tion bed assembly 200 is shown generally at 200, in exploded view.
  • Adso ⁇ tion bed assembly 200 is generally analogous to adso ⁇ tion bed assembly 24, illustrated in Figure 7, with the exception of certain refinements and improvements.
  • adso ⁇ tion bed assembly 200 operates in accordance with the principles described above, in an adso ⁇ tion apparatus, such as that shown in Figure 1 at 20.
  • Adso ⁇ tion bed assembly 200 includes a housing 202 for supporting, holding, and containing a plurality of adso ⁇ tion elements 240.
  • housing 202 comprises a rectangular, box-shaped configuration having a first or top panel 204, and a second or bottom panel 206.
  • Top panel 204 defines a plurality of openings 208.
  • outlet openings 208 provide access to the housing interior, and in particular, to filters panels 260 (functioning as either prefilters or postfilters) to allow the filter panels 260 to be changed out.
  • bottom panel 206 defines a plurality of openings 212. Openings 212 are elongated slots, analogous to openings 208 in top panel 204. Inlet openings 212 allow for the flow of air to pass therethrough and into the interior of housing 202. Further, inlet openings 212 allow for the changeout and replacement of the pre- or post- filter panels 260, described in more detail below. In the embodiment illustrated, bottom panel 206 defines three inlet openings 212.
  • top and bottom panels 204, 206 are constructed of sheet metal.
  • top and bottom panels 204, 206 are identical, for the ease of manufacturing and assembly.
  • illustrated between top and bottom panels 204, 206 are a number of side panels 214.
  • housing 202 has a front side panel 216, and an opposite rear side panel 218.
  • the front side panel 216 includes a pair of handles 280, to aid in removing and replacing the bed assembly 200 in the apparatus 20.
  • side panel 220 and access panel 222 Disposed between front and rear panels 216, 218 are side panel 220 and access panel 222.
  • Side panel 220 is a solid, closed member to provide support and closure at one end of housing 202.
  • Access panel 222 defines a plurality of openings or access slots 224 therein.
  • Access slots 224 are elongated openings which are shaped and configured to hold and support an end of an adso ⁇ tion element.
  • access panel 222 defines five slots 224.
  • slots 224 are angled and configured in a V shape. That is, slots 224 are angled to conform to the profile of the adso ⁇ tion elements 240.
  • Housing 202 also includes a selectively removable access cover 226.
  • Cover 226 is removably mountable to access panel 222. That is, during operation of the adso ⁇ tion apparatus 20 using the bed arrangement 200, access cover 226 is securely mounted on to the access panel 222 to cover the access panel 222, and in cooperation with a gasket member 228, provide a sealing engagement against the adso ⁇ tion elements 240.
  • Access cover 226 is removable such that the adso ⁇ tion elements can be accessed, in order to change the filter element media.
  • Figure 12 illustrates the access cover 226 in an unmounted, or removed position. While a variety of operative embodiments are contemplated for allowing access cover 226 to be removably mounted to access panel 222, in the specific example illustrated, cover 226 is mountable and unmountable to access panel 222 by way of fasteners or screws 230.
  • Access panel 222 includes a series of threaded holes 232 for receiving the screws 230.
  • gasket member 228 includes a series of holes or apertures 234.
  • gasket member 228 is attached tightly to removable cover 226, which is attached securely to access panel 222 through the operation of screws 230 and holes 232.
  • housing 202 holds and contains and supports a plurality of adso ⁇ tion elements 240.
  • adso ⁇ tion elements 240 are analogous to adso ⁇ tion elements 90, described above.
  • elements 240 include a pair of oppositely disposed perforated members or screens 242, 244.
  • Extruded frame members 246, 248 extend between the first and second screens 242, 244 and help to hold the adso ⁇ tive media 250 therein.
  • Each of elements 240 also includes a mid-bed baffle 283 and a center post 284, generally analagous as described above with respect to baffle 102 and center post 104 (FIG. 8).
  • Center post 284 may include a flange acting as a baffle, analagous to flange 106 (FIG. 8).
  • Each of the elements 240 has a pair of opposite ends. When positioned inside of housing 202, one of the ends is closed by side panel 220. The other end is positioned in one of the slots 224 in access panel 222.
  • a cover member 254 is selectively positionable within slots 224 to cover the open end of elements 240.
  • each of the slots 224 has a cover member 254 positioned therein to cover the open end of the element 240 and block the media 250 from falling out.
  • each of cover members 254 comprises a rectangular compression pad 256, preferably made of a soft urethane material.
  • Each of compression pads 256 is squeezed into and fits snugly within slots 224. Compression pads keep the media 250 packed tightly between the screens 242, 244 and frame sections 246, 248.
  • the compression pad 256 comprises a material, for example soft urethane, which expands to fill the space which becomes available when the media 250 settles. Therefore, compression pads 256 function to maintain a tight, packed condition of the granules in the media
  • adso ⁇ tion bed assembly 200 includes a plurality of prefilter panels and postfilter panels which are removably mounted within housing 202.
  • filter panel assembly 260 is illustrated removed from housing 202, and in an exploded view.
  • the prefilter panels 96 and postfilter panels 98 are securely fastened and mounted to each adso ⁇ tion element 90.
  • the prefilter and postfilter panels are not rigidly secured and fastened to each of the adso ⁇ tion elements 240. Rather, the prefilter panels and postfilter panels are removably positionable and mountable between each of the adso ⁇ tive elements 240, to allow the prefilter and postfilter panels to be changed out.
  • each of the prefilter and postfilter panel assemblies 260 includes filter media 262 and support mesh 264.
  • Media 262 has a triangular or V shaped cross section, generally in the profile shape of the adso ⁇ tion elements 240 arranged in their V shaped pattern.
  • Media 262 is preferably clay coated newsback with electrostatic media heat sealed thereon.
  • Support mesh 264 also has a triangular or V-shaped cross section, and functions to support and hold the media 262 during air flow.
  • Media 262 is insertable in openings 208, 212, to be positioned between adjacent adso ⁇ tion elements 240.
  • Double stick tape between the media 262 and the top and bottom 204, 206 functions to removably mount and secure the media 262 to the housing 202.
  • the support mesh 262 is formed into a V-shape which is slightly larger than the V-shape of the media 262. When the support mesh 264 is positioned inside of the media 262, the edges of the support mesh 264 snap under the edges of the clay coated newsback of the media
  • the direction of airflow is shown flowing from an inlet side at arrows 268, through openings 212, through the adso ⁇ tion elements 240, out through openings 208, and out at arrows 270.
  • the filter panel assemblies 260 on the upstream side 268 function as prefilters 272, while filter panel assemblies 260 on the downstream side function as postfilters 274.
  • Prefilters 272 remove airborne particles prior to engaging the adso ⁇ tion element 240 and granular media 250 and retain any dust from the adso ⁇ tive material inside of the filter during shipping.
  • the postfilters 274 ensure that any residual particles from the adso ⁇ tive element 240 is filtered before passing downstream.
  • Each of the prefilters 272 and postfilters 274 is removable and replaceable from the adso ⁇ tive bed assembly 200. Specifically, each of the prefilters 272 may be removed through the slots or openings 212 in the bottom panel 206. Each of the postfilters 274 may be removed through the openings or slots 208 in the top panel 204.
  • the adso ⁇ tive bed assembly 200 allows for convenient changing of the filtering media. After a period of use, it may be desirable to discard the old, spent media 250 and replace it with new, fresh media.
  • the indicating system 120 indicates to the operator when it is time to replace the adso ⁇ tive media 250.
  • the adso ⁇ tive bed assembly is removed from the adso ⁇ tive apparatus 20 through the access door 38.
  • the cover 226 is removed from the adso ⁇ tion bed housing 202 to expose the compression pads 256.
  • screws 230 are unscrewed from the access panel 222.
  • Cover 226 is then removed from the access panel 222, which breaks the seal provided by gasket member 228.
  • Each of the compression pads 256 is then removed from the slots 224 covering the ends of each of the adso ⁇ tive elements 240. This exposes the media granules 250.
  • the housing 202 is then tilted or angled relative to the horizontal, and the spent filter media 250 is poured from each of the adso ⁇ tive elements 240.
  • second or new or fresh granular, spherical, or rod-shaped media 250 is filled in each element 240. That is, the media 250 is deposited between the opposing screens 242, 244 and the opposing frames 246, 248 by pouring it or depositing it through slots 224 in the access panel
  • Cover 226 having gasket member 228 secured thereto is again positioned to cover access panel 222 and compression pads 256.
  • Cover 226 is refastened to housing 202 through screws 230. As cover 226 is tightened against access panel 222, gasket member 228 is compressed to form a seal between cover
  • Each ofthe filter panel assemblies 260 may also be replaced.
  • the operator grasps the pre- or post- filter media 262 through the respective opening 208 or 212.
  • the filter panel assembly 260 may be slid out through the appropriate opening (either 208 or 212) and discarded.
  • a second, new filter panel assembly 260 (functioning as either a prefilter 272 or postfilter 274) may be positioned between the adso ⁇ tive elements 240 by inserting the second, new media 262 and support mesh 264 through the associated opening 208 or 212.
  • Double stick tape is applied to the outer surface of media 262 in order to adhere the media 262 to the respective top or bottom panel 204, 206.
  • each ofthe top panel 204, bottom panel 206, front side panel 216, rear side panel 218, side panel 220, access panel 222 and cover 226 is constructed of aluminum.
  • Each ofthe top panels 204 and bottom panels 206 has dimensions of about 10-15 by 22-27 inches, typically about 13.2 inches by 24.7 inches.
  • Each ofthe openings 208, 210 has a length of about 20-25 inches, typically about 23.2 inches, and a width of about 1-3 inches, typically about 2.3 inches.
  • One ofthe openings is narrower than the other two, and has a width of about 0.5-2.5 inches, typically about 1.2 inches.
  • Each ofthe openings 210, 212 is spaced from an adjacent opening by about 1-4 inches, typically about 2.5 inches.
  • Each of the front side panels 216 has a length of about 22-27 inches, typically about 24.5 inches, and a height of about 4-7 inches, typically about 5.9 inches.
  • Each ofthe rear side panels 218 has a length of about 22-27 inches, typically about 24.5 inches, and a height of about 4-7 inches, typically about 5.9 inches.
  • Side panel 220 has a length of about 10-15 inches, typically about 13.1 inches, and a height of about 4-7 inches, typically about 5.9 inches.
  • Access panel 222 has a length of about 10-15 inches, typically about 13.1 inches, and a height of about 4-7 inches, typically about 5.9 inches.
  • Each of slots 224 has a width of about 0.4-1 inch, typically about 0.7 inches.
  • Each of slots 224 has a flanged rib projecting from a planar surface of access panel 222. The flanged rib 282 projects a distance of about 0.25-0.75 inches, typically about 0.5 inches from the planar portion ofthe access panel 222!
  • the access cover 226 has a length of about 10-15 inches, typically about 13 inches, and a height of about 4-6 inches, typically about 5 inches. It is constructed of a pre-anodized aluminum 0.125 inches thick. It includes 6-12 holes, typically about 8 holes, for providing screws 230 to pass therethrough. Each ofthe holes has a 0.25 inch diameter with a 0.116 inch deep chamfer.
  • the gasket member 228 is constructed from low-perm polyurethane foam material having a thickness of about 0.07-0.25 inches, typically about 0.125 inches. It includes 8 holes having a diameter of 0.25 inches, for reception ofthe screws 230.
  • Each ofthe adso ⁇ tive elements 240 has an overall length of about 22-27 inches, typically about 24.4 inches, and a height of about 4-7 inches, typically about 5.9 inches.
  • Each ofthe screens 242, 244 is a perforated member with about 0.25-0.4 inch, typically about 0.33 inch, diameter holes in stainless steel. The screens are spaced a distance of about 0.75- 1.5 inches, typically about 1.2 inches from each other.
  • the elements 240 are arranged in a V-shape relative to each other. The angle between adjacent elements 240 is about 15-30 degrees, typically about 21 degrees.
  • Each ofthe prefilter assemblies 272 and postfilter assemblies 274 is constructed of 0.2-0.5 inch, typically about 0.30 inch, thick newsback clay coated on one side. Electrostatic media is heat sealed to the non clay-coated side.
  • the support mesh 264 has a length of about 18-25 inches, typically about 22 inches, and each of the sides ofthe V has a length of about 3-5 inches, typically about 4 inches. The distance between the end tips ofthe support mesh 264 is about 2.5-3.5 inches, typically about 3 inches.
  • Support mesh 264 is constructed of 1 inch by 1 inch stainless steel welded 0.08 wire mesh.

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Abstract

An adsorption bed arrangement includes a plurality of adsorption elements, a housing, and a gasket member. Each of the adsorption elements has adsorption media contained within a respective element. Each of the adsorption elements are selectively openable to provide access to the adsorption media. The housing defines an interior, a plurality of inlet openings, and a plurality of outlet openings. The plurality of adsorption elements are positioned within the housing interior. The housing is selectively openable to provide access to the plurality of adsorption elements. The gasket member is between the housing and the adsorption elements. A method for changing filtering media in an adsorption apparatus includes steps of removing an access panel from an adsorption bed housing to expose a cover member covering an end of an adsorption element; removing the cover member from the end of the adsorption element to expose filtering media within the element; and pouring the filtering media from the element.

Description

ADSORPTION APPARATUS AND METHODS
Background
1. Field of the Invention
The present invention relates to an adsoφtion bed and adsoφtion filtering system for removing airborne contaminants from clean rooms, sick buildings, or other enclosed spaces.
2. Related Art
Gas adsoφtion beds are used in many industries to remove airborne contaminants, such as organic bases, to protect people, the environment and often, a critical manufacturing process or the products that are manufactured. A specific example of an application for gas adsoφtion beds is the semiconductor industry where products are manufactured in an ultra-clean environment, commonly known in the industry as a "clean room". The manufacturing processes typically require the use of substances such as solvents to be used in the clean room environment. The use of these substances presents a problem because vapors that are present or are a byproduct from the process may contaminate the air and other processes in the room, such as lithography processes using chemically amplified photoresists, if not properly removed. In addition, environments may have several gases occurring naturally in the ambient air that contaminants that cannot be removed by particulate filters.
Typical contaminants are airborne are airborne bases, such as ammonia, organic amines, and N-Methyl-2-Pyrrolidone. To eliminate the problem, contaminated air is often drawn through a granular adsoφtion bed assembly having a frame and an adsoφtion medium, such as activated carbon, retained within the frame. The adsoφtion medium adsorbs or chemically reacts with the gaseous contaminants from the air flow and allows clean air to be returned to the process and/or the clean room. The removal efficiency is critical in order to protect the processes and the products. The removal efficiency and capacity of the gaseous adsoφtion bed is dependent upon a number of factors, such as the air velocity through the adsoφtion bed, the depth of the bed, the type and amount of the adsoφtion medium being used and the activity level and rate of the adsoφtion medium. It is also important that for efficiency to be increased or maximized, the air leaking through voids between the tightly packed adsoφtion bed granules and the frame should be eliminated.
Moreover, it is also important to have balanced flow distribution should more than one bed be used in parallel, so that all the beds can be changed at substantially the same interval while achieving a long life span for each bed. If flow is not distributed evenly, certain beds must be replaced before they are fully spent in order to maintain an acceptable safety factor. Moreover, it is important to accurately predict the adsoφtion activity of a bed that is typical of the deterioration rate of the active adsoφtion medium in the adsoφtion beds. An example of such an adsoφtion bed and system is shown in U.S.
Patent 5,290,245, to Osendorf et al., and assigned to Donaldson Company, Inc., the Assignee of the present invention. Although the Osendorf patent shows beds which overcome the problems stated above, further improvements are possible.
It can be appreciated that if a measuring system could be utilized that uses a deterioration rate comparable to the adsoφtion beds, it can be reliably predicted when the beds will be spent. It can be appreciated that to maximize efficiency, even flow distribution should be accomplished with minimal pressure drop. The flow path along edges of adsoφtion medium in the beds should be longer to compensate for voids at the edges. Moreover, the footprint and space required for the adsoφtion beds and related flow distribution should be minimized. Such a system should provide a modular configuration for stacking of beds vertically and horizontally with easy removal and insertion and reliable sealing.
Summary of the Invention of Application 08/890,804
The invention of application 08/890,804 is directed to an adsoφtive filtering device and in particular to an adsoφtive device that provides for balanced distribution through adsoφtive beds, increased life and improved efficiency.
The invention of application 08/890,804 contemplates a modular system which provides for vertical as well as horizontal stacking of individual absoφtive beds. The adsoφtive beds are cartridge-type elements which include an internal arrangement of individual adsoφtion filtering elements. Modules can also be connected in a side-by-side arrangement. Each adsoφtion module includes an inlet plenum and an outlet plenum with a vertical stack of adsoφtion beds exposed therebetween. The inlet and outlet plenums are arranged in a substantially vertical configuration with the flow entering and leaving from the top of the plenums. The cross sectional areas of the plenums are designed with a ratio such that flow is distributed in a balanced manner to each of the adsoφtion beds. A single access door extends along the front of the module.
The adsoφtion bed stack includes frame elements which support each of the adsoφtion bed assemblies. The frame includes side panels which seal to the housing of the module and also support a baffle. The baffles are disposed between vertically adjacent adsoφtion bed assemblies and act to direct air into the bottom of an adsoφtion bed assembly immediately above the baffle and to direct air outward from an adsoφtion bed assembly immediately below the baffle. Each frame section includes a support to maintain the baffles at an angle. Inlet and outlet vents direct flow transversely along the width of the adsoφtion bed assembly. A honeycomb grid member inserts below the adsoφtion bed assembly and above the baffle and directs the air substantially straight upward and provides proper orientation of the air engaging the individual adsoφtion bed elements in the adsoφtion bed assemblies. The space between the baffle and the adsoφtion bed assembly is such that the flow is distributed substantially evenly from front to back along the adsoφtion bed. An inflatable gasket in fluid communication with a compressed air supply seals to the planar top of the adsoφtion bed assembly. It can be appreciated that each adsoφtion bed assembly inserts through an opening in the front of each frame section and the single door serving all adsoφtion bed assemblies along the front of each module. The gasket provides a seal to the downstream clean air side of the adsoφtion bed. After passing through each adsoφtion bed assembly, air strikes the bottom of the baffle, which directs the air rearward to the outlet plenum where it passes upward through the top of each module.
Each adsoφtion bed assembly includes a housing having a planar top and bottom. Openings are formed in the top and bottom that allow air flow through adsoφtion bed elements within the housing. The upper surface includes a single planar member with flanges bent down to form openings. Within the housing are disposed rectangular adsoφtion beds which include a mesh screen retaining activated carbon or other adsoφtive materials therebetween. The mesh screens include channel members extending around the periphery of each element which are potted to the ends of the inside of the housing. The screens also include a center post which prevents the screens from bowing outward under pressure. The channels at the edge of the element have a midbed baffle which extends inward into the adsoφtive material. The baffle ensures that voids at the edge of the medium do not decrease the efficiency of the bed as the length of the path for gases passing along the edge are increased by the baffle extending inward. Similarly, the post at the center may include a flange extending transversely to the post to increase the length of the path of air passing along the center post. Each element also includes a pre-filter and post-filter, typically an electrostatic type filter for retaining particles from the adsoφtive material. The adsoφtion elements are arranged in a V-type cross-sectional configuration which provides for even distribution and pressure drop for each individual element.
Summary of the Present Invention The present invention concerns refinements and improvements to the adsoφtion apparatus of the application serial number 08/890,804. The invention is directed to an adsoφtion bed arrangement comprising a plurality of adsoφtion elements, a housing, and a gasket member between the housing and the adsoφtion elements. Each of the adsoφtion elements has adsoφtion media contained within a respective element. Each of the adsoφtion elements is selectively openable to provide access to the adsoφtion media. The elements are positioned within an interior of the housing, and the housing is selectively openable to provide access to the plurality of adsoφtion elements. In this manner, the adsoφtion elements can be accessed, opened, emptied of their existing media, and refilled with new, fresh adsoφtion media.
Preferably, the housing has first and second opposite panels, and a side panel. The side panel is selectively removable to provide access to the adsoφtion elements. Preferably, the gasket member is situated in between to provide a seal between the side panel and the adsoφtion elements. Preferably, each of the adsoφtion elements includes first and second opposite screens, and at least one open end. Adsoφtion media is preferably removably packed between the first and second screens. In certain preferred arrangements, each adsoφtion element open end is covered with a removable cover member. Preferably, each of the cover members comprises a urethane pad.
In preferred arrangements, the adsoφtion bed assemblies are arranged in a vertical stack in an adsoφtion apparatus.
The invention is also directed to a method for changing filtering media in an adsoφtion apparatus. The method includes a step of removing an access panel from an adsoφtion bed housing to expose a cover member covering an end of an adsoφtion element. The cover member is removed from the end of the adsoφtion element to expose filtering media within the element. The filtering media is then poured from the element.
Preferably, after the step of pouring, new filtering media is added into the element. The cover member is then replaced over the end of the element, and the access panel is replaced on the adsoφtion bed housing.
In certain preferred methods, a first prefilter is removed from the adsoφtion bed housing through a slot in the housing. After the step of removing a first prefilter, a second, different and new prefilter is inserted through the slot in housing.
These features of novelty and various other advantages which characterize the invention are pointed out with particularity in the claims annexed hereto and forming a part hereof. However, for a better understanding of the invention, its advantages, and the objects obtained by its use, reference should be made to the drawings which form a further part hereof, and to the accompanying descriptive matter, in which there is illustrated and described a preferred embodiment of the invention.
Brief Description of the Drawings
Referring now to the drawings, wherein like reference numerals and letters indicate corresponding structure throughout the several views:
Figure 1 shows a perspective view of an adsoφtion filtering system according to the principles of the invention described in the parent disclosure; Figure 2 shows a top plan view of an adsoφtive system having two vertical stacks, described in the parent disclosure;
Figure 3 shows a side sectional view of the adsoφtive system shown in Figure 1 , described in the parent disclosure; Figure 4 shows a perspective view of a frame section, described in the parent disclosure;
Figure 5 shows a side sectional view of a frame section shown in Figure 4, described in the parent disclosure;
Figure 6 shows a side sectional view of an adsoφtive bed assembly, described in the parent disclosure;
Figure 7 shown a perspective view of the adsoφtive bed cartridge shown in Figure 6, described in the parent disclosure;
Figure 8 shows a side sectional view of a self-contained adsoφtive bed element, described in the parent disclosure; Figure 9 shows a sectional view of the gasket for a frame module in a deflated state, described in the parent disclosure;
Figure 10 shows a sectional view of the gasket for the frame module shown in Figure 9 in an inflated state, described in the parent disclosure;
Figure 11 shows a diagrammatic view of an indicator system for detecting airborne organic bases, described in the parent disclosure;
Figure 12 is an exploded, perspective view of one embodiment of an adsoφtive bed assembly, according to principles of the present invention; and Figure 13 is a cross-sectional, somewhat schematic, view of the embodiment of the adsoφtive bed assembly illustrated in Figure 12, according to principles of the present invention.
Detailed Description of the Preferred Embodiment of Application 08/890,804
Referring now to the drawings, and in particular to Figure 1, there is shown a counter flow adsoφtion module 22 of an adsoφtive filtering system 20. The modules 22 can be joined together to form a higher capacity adsoφtive system 20, as shown in Figure 2. The system 20 provides for a plurality of cartridge-type adsoφtion bed assemblies 24 receiving parallel flow with both vertical stacking shown most clearly in Figure 1, as well as horizontal stacking, as shown in Figure 2.
With the present configuration, the height and width of the number of adsoφtion bed assemblies 24 can be designed to accommodate the filter and flow requirements of each particular system. Referring again to Figure 1, each module 22 includes an inlet 30 and an outlet 32 having flanges formed thereon for accepting a gasket and providing a sealed connection to upstream and downstream duct work. The counter flow adsoφtion module 22 includes an access door 38 pivoting along one vertical edge in a preferred configuration. A housing is formed of sealed housing panels 42, forming a sealed enclosure with air escaping only through the inlet 30 and outlet 32. The access door 38 also includes gaskets for an enclosed air tight housing.
Referring now to Figure 3, each counter flow adsoφtion module 22 supports a stack of the adsoφtion bed assemblies 24. A corresponding number of adsoφtion bed assembly support frame sections 50 (Fig. 1) are stacked in a vertical configuration to form a frame 26 (Fig. 1) within the counter flow adsoφtion bed module 22. The adsoφtion bed assembly support frame 26 can be stacked in any height corresponding to the desired number of adsoφtion bed assemblies 24 that are to be used.
Extending vertically below the inlet 30 is an inlet plenum 34. Extending vertically below the outlet 32 is an outlet plenum 36. To provide for balanced distribution of flow between the multiple adsoφtion bed assemblies 24, the ratio of the cross sectional area of the inlet plenum 34 to the cross-sectional area of the outlet plenum 36 is .636. It has been found that such a ratio produces balanced flow between the various adsoφtion bed assemblies 24. In this manner, the activated carbon or other adsoφtion material in each adsoφtion bed assembly 24 deteriorates at the same rate. As the inlet 30 and outlet 32 are both on the top, air flow is downward through the inlet plenum 34 and counterflow upward through the adsoφtion bed assemblies 24 and in the outlet plenum 36.
Referring now to Figure 4, there is shown an individual adsoφtion bed frame section 50. The frame section 50 includes planar side panels 52 having substantially opposed parallelogram shaped sides 52. The frame sections 50 are configured so that the vertical edges of sides 52 extend substantially vertically while the top and bottom edges are angled upward from front to rear, for receiving baffles and directing flow through the adsoφtion bed assemblies 24, as explained hereinafter. Support members 58 extend parallel to a front portion 140 of the frame section 50. The supports 58 support a honeycomb panel 56, as shown in Figure 5. A honeycomb panel 56 is a planar member having a hexagonal orifices formed therein in a honeycomb-like grid. Such a honeycomb panel 56 maintains flow upward and aids in balanced distribution into the adsoφtion bed assemblies 24, as explained hereinafter. The honeycomb panel supports 58 extend below flanges 64 and bed supports 54. The bed supports 54 extend inward from each of the sides 52 and support an adsoφtion bed assembly 24.
At the front face 140 of the frame section 50 is an inlet register 60 having a plurality of orifices formed therein which are spaced evenly apart for directing air evenly across an adsoφtion bed inlet chamber 130 intermediate the top of a baffle 28 and a lower surface of an adsoφtion bed assembly 24. It can be appreciated that the adsoφtion bed inlet chamber 150 narrows from front to rear and aids in even distribution of the air flow from front to rear into the adsoφtion bed assembly. In a similar but opposite configuration, at a rear face 142 of each frame section 50, is an outlet register 62 having a plurality of orifices spaced evenly apart thereon. The space between the bottom of a baffle 28 and the upper portion of an adsoφtion bed assembly 24 forms an outlet chamber 152 which increases in height from front to rear. The configuration of the inlet chamber 150 and outlet chamber 152 provides for counter flow from below and up through an adsoφtion bed assembly 24, as well as from front to rear from the inlet 30 and the inlet plenum 34, to the outlet 32 and the outlet plenum 36, as shown for example in Figure 3. Referring again to Figures 4 and 5, each frame section includes flanges 64 which attach to the baffle 28 (Fig. 3) and adjacent upper and lower frame sections 50. It can be appreciated that the seals and gaskets are used to ensure sealed air flow. It can be appreciated that with the sealed flow path and solid sides 52, all air is directed through the inlet and outlet registers 60 and 62 and through the adsoφtion bed assembly 24.
To ensure that air does not leak around the adsoφtion bed assemblies 24, an inflatable gasket 160 is used with each frame section 50, as shown in Figures 9 and 10. The inflatable gasket 160 mounts below the flange 70 along a flat upper face 162. The gasket 160 is rectangular generally corresponding to the outline to the shape of the rectangular flange 70. The gasket 160, having an oblong inflatable cross section 164 when uninflated, as shown in Figure 9, extends downward when inflated, as shown in Figure 10, to engage the top of an adsoφtion bed assembly 24, as explained hereinafter to form an air tight seal. A stem 166 extends up to a fitting
66, as shown in Figure 4. It can be appreciated that by sealing on the top of an adsoφtion bed assembly 24, the seal is made on the downstream or filtered clean air side. This configuration assures that no contaminants pass downstream on the clean air side.
The flange 70 includes a notch 72 for receiving the stem 166 leading to the fitting 66 mounted on one side 52. An air line 78 extends on the outside of the side 52 from the fitting 66 through an orifice 74 in the front face 140 of the flange 64. The air line 68 leads to a vertically extending portion of the air line 78 with flow extending through tees and other fittings 76 providing pressurized air to the inflatable gaskets 160.
Referring now to Figures 6 and 7, there is shown an adsoφtive bed assembly, generally designated 24. The adsoφtive bed assembly 24 includes a generally rectangular housing 80. The housing 80 includes a top panel 82 having generally rectangular openings 110 formed therein and bent in flange portions 112 extending into the openings 110 providing a planar upper surface. Similarly, a bottom panel 84 includes a plurality of openings 110 having bent in flange portions 112. The openings 110 define inlets and outlets for the adsoφtion bed assembly 24. It can be appreciated that the top and bottom panels 82 and 84 have a planar sealing surface, as explained hereinafter. The housing 80 also includes rectangular sides 86 which are sealed to the top and bottom panels 82 and 84. Typical sizes of housings 80 are 12x6x24 inches or 18x8x30 inches. As shown in Figure 6, within the housing are a plurality of adsoφtion layer segments 90 disposed in a V-type angled configuration that aids in providing a smaller footprint. This configuration provides for distributing flow evenly through the various segments 90 within the housing 80, as shown by the flow arrows. The configuration of the adsoφtion layer elements 90, in addition to the baffle arrangement and plenum ratios provides for substantially even distribution to each segment 90 in the entire adsoφtive filtering system 20 and therefore balanced deterioration of each segment 90. This provides for increased system life and for changing elements as they become spent at the same interval.
Each adsoφtive layer element 90 includes a granular bed of adsoφtive material 92, such as activated carbon. Other suitable substances for the bed 92 of adsoφtion granules include zeolites, sodium bisulfate, silica or other media. The granules in the bed 92 are tightly packed to force contact with air flow through the bed. In this manner, the adsoφtive bed 24 can filter out airborne contaminants such as airborne organic bases, ammonia, amines and N-methyl 12- pyrrolidone. These contaminants often cause defects in the sensitive semiconductor manufacturing processes. In a preferred embodiment, it has been found that the width of the bed 92 should be at least ten times the mean particle diameter of the granules in the bed 92. In a thin embodiment, the bed 92 is approximately .44 inches thick and in a thick embodiment, the bed 92 is approximately 1.1 inches thick. Typical mean diameter of the granules in the bed 92 of activated carbon is 0.044 inches in a thin embodiment and 0.06 inches in a thick embodiment. This ensures that satisfactory removal of contaminants is achieved and that particles cannot pass through the adsoφtion bed 24 without sufficient contact for removal. The granular bed 92 is maintained between mesh screens 94 which are substantially rectangular in shape. Around each of the screens 94 is a C-channel type frame 100. The frame 100 is potted to the sides 86 of the adsoφtion bed assembly housing 80 for an improved seal. Sealant 114 provides sealing to the top and bottom panels 82 and 84 respectively, as shown in Figure 8.
In addition, each adsoφtion layer element 90 has associated pre-filter panels 96 and post-filter panels 98. The panels 96 and 98 are generally electrostatic type filters or other filters and are generally rectangular in shape and are placed against the faces of the adsoφtion layer elements. The pre-filter 96 removes air borne particles prior to engaging the granular bed 92 and the adsoφtion media and retains any dust from the adsoφtive material inside the filter during shipping, handling and filter replacement. The post-filter 98 ensures that any residual particles from the adsoφtion layer element 90 is filtered before passing to the outlet 32. Referring now to Figure 8, there is shown a sectional view of an adsoφtion layer element 90. The adsoφtion layer element 90 includes a very tightly packed granular bed 92. It can be appreciated that although flow through the center of the bed 92 encounters little effect from the sides, near the edges of the bed 92, and against the frame channel members 100, there are voids formed due to the planar surface proximate the round or unevenly shaped granules from the bed 92. The curving surfaces of individual granules cannot fill all voids against the planar edges.
It can be appreciated that filtering efficiency may be decreased as the contaminant gases may be able to proceed through the granular bed 92 with less contact against the individual granules. It has been found that by increasing the length of the path along the edges of the bed 92, the filtering efficiency at the edges of the bed 92 rise. A mid-bed baffle 102 may be placed along the edge of the bed 92 extending inward from the C-channel 100. The increased length of the journey of a contaminant ensures greater exposure to the granular bed 92 and greater filtering efficiency. In addition, a center post 104 may be added extending between the mesh screens 94. It can be appreciated that under pressure, the screens 94 may bow outward and resettling of the granules of the bed 92 may occur leading to less efficiency. To maintain the screens 94 at their normal substantially planar configuration, a center post 104 is added which may include a retaining washer 107 engaging the outer periphery of each of the mesh screens 94. As there may be some edge effects from the center post 104, a mid-bed flange acting as a baffle 106, may be used with the center post. This configuration ensures a longer journey of particles along the post 104 to overcome the possibility of effects from voids. It can also be appreciated however that as washers 106 tend to direct some of the flow away from the post, such a center post baffle 106 may not be necessary.
In addition to retaining the screens, a compression member may be utilized at one end of the adsoφtion element 90 to press inward against the granular bed 92 and ensure that a tightly packed arrangement is maintained. It can also be appreciated that the adsoφtion bed assemblies 24 may be refillable, as one of the end panels of the sides 86 may be removable. The individual elements 90 may be replaced or the spent medium in the granular bed 92 may be emptied and active medium replaced. It can also be appreciated that a compression member, well known in the art, may be added to a removable end cap in a refillable adsoφtion bed assembly.
Referring now to Figure 11, there is shown an indicator system 120 for detecting airborne contaminants. It can be appreciated that with the present invention, it is advantageous to monitor the deterioration of the active adsoφtion medium in the granular bed 92. Therefore, a sampling system may be used which predicts the deterioration of the medium. It can be appreciated that as the adsoφtion elements 90 become spent, there is no visual or other indication that the filter elements are spent. Moreover, as the contaminant does not actually leave particles which may cause a change in flow or pressure, pressure monitoring systems used with conventional particle filters cannot be used. It can be appreciated that by utilizing an indicator system which has a deterioration rate proportional to that of the adsoφtion bed assembly, an indicator can predict the life of the adsoφtion bed assemblies and when a change should be made. The system 120 uses a probe 122 upstream of the adsoφtion filters. The system includes a pump 124 such as an ejector type pump to maintain flow. An example of a suitable pump 124 is Model No. E-79700-00, available from Cole-Parmer Company. The indicator system 120 has a sample flow that is proportional to the flow through the adsoφtion bed assemblies 24. To facilitate this, a flow meter 126 having a valve is utilized which may be used to calibrate this system to obtain the desired flow rate. It can be appreciated that by changing the flow through the system, faster or slower rates of deterioration of the indicator 120 can be accomplished. Therefore, safety margins may be changed to meet the requirements of each adsoφtion system 20.
The indicating system 120 also includes an indicator 128 including a tube 130 containing granules 132. The granules 132 are preferably coated with a color changing substance that changes in response to a pH change. Therefore, as airborne contaminants which are typically bases reach the granules 132, the color of the spent granules will change. This change forms a front extending along the tube 130 which can be viewed. It can be appreciated that by monitoring the progress of the front along the tube 130, the deterioration stages of the adsoφtion bed assemblies 24 may be monitored. In a preferred embodiment, the sampling probe 122 is placed in the inlet plenum 34 so that untreated air is sampled. It can be appreciated that the high standards of the adsoφtive filtering requirements of the present invention negate the use of a downstream indicator which detects contaminants once they have passed through the adsoφtive filtering system 20. The delicate nature of the processes require that the adsoφtive filters 24 cannot have a failure and must be changed prior to being completely spent, rather than immediately thereafter. Therefore, sampling of the air prior to treatment provides a satisfactory safety factor and an accurate predictor of the deterioration rate and life of the adsoφtion layer elements 90. For easy monitoring, the indicator is placed on the exterior of the door 38 of the counter flow adsoφtion module 22. Operation
To facilitate effective treatment of the contaminated air, the adsoφtive system 20 receives fully operational adsoφtive bed assemblies 24. It can be appreciated that by opening the access door 38, as shown in Figure 1, the self-contained cartridge-type adsoφtive bed assemblies 24 may be slid into the corresponding frame sections 50 through the opening formed in the front face 140 of each frame section 50. The adsoφtion bed assemblies 24 rest on the supports 54 and are below the flange 70. It can be appreciated that the inflatable sealing gasket 160 extends downward from the flange 70 substantially around the periphery of the rectangular adsoφtion bed assembly 24. In the uninflated state as shown in Figure 9, the gasket 160 does not engage the upper panel 82 of the adsoφtion bed assembly housing 80. However, once the adsoφtion bed assemblies 24 have been inserted, compressed air is delivered to the gaskets 160 and the inflatable tubing is expanded to the configuration shown in Figure 10 and is forced downward to engage the top panel 82 of the assembly housing 80. As the top panel 82 has a substantially planar surface, the seal between the gasket 160 and the adsoφtion bed assembly housing 80 is uninterrupted, as no corners or other irregularities are encountered. Once the gasket 160 is inflated, the downstream clean air side of the filtering system is sealed from the upstream side. Following insertion of the adsoφtion bed assemblies 24, the indication system 120 is calibrated to achieve the proper flow rate. When air enters the system, it passes in the top of each module 22 through the inlet 30 to the inlet plenum 34. As explained above, the ratio of the cross sectional area of the inlet plenum 34 to the outlet plenum 36 provides balanced distribution between the various adsoφtion bed assemblies 24. Flow passes through each assembly 24 through the associated inlet register 60 on the front face 140 of the associated frame section 50. The flow encounters an upper face of one of the baffles
28, which is angled upward and directs flow through the honeycomb panel 56 into the adsoφtion bed assembly 24. The inlet chamber 150 has a volume which provides for substantially balanced distribution from front to rear along the adsoφtion bed assemblies 24. Once the flow passes through the honeycomb panel
56, the flow is directed in a substantially straight pattern upward. The adsoφtion layer elements 90 are angled at approximately ten degrees from vertical and receive even flow distribution, as indicated by the arrows in Figure 6. The treated air continues to pass upward until engaging a lower face of the baffle 28 above the assembly 24 which directs the air from the outlet chamber 152 through the register outlet 62 at the rear face 142 of each frame section 50. It can be appreciated that the baffle between vertically adjacent frame sections 50 and adsoφtion bed assemblies 24 acts both to direct flow upward into the adsoφtion bed assembly 24 above the baffle 28 and also directs air from the adsoφtion bed assembly 24 below the baffle 28 outward. This decreases the overall height of the frame 26 and stack of adsoφtion bed assemblies 24. The filtered flow then passes to the outlet plenum 36 and up through the outlet 32. When the indicator system 20 signals changing of the adsoφtion medium 92, the system is taken offline. The access door 38 is opened to provide access to all the cartridge-like adsoφtion bed assemblies 24. The compressed air supply to the gaskets 160 is stopped and the gaskets 160 deflate to the position shown in Figure 9. At this time, the gaskets 160 do not engage to the top panel 82 of the adsoφtion bed assemblies 24. The adsoφtion bed assemblies 24 may then be slid forward through the opening formed in the front face 140 of each frame section 50 and taken out through the access door 38. New adsoφtion bed assemblies 24 may be inserted in their place and the inflatable gasket 160 reinflated. In addition, the indicator 128 may be replaced so that monitoring may continue which coincides with the newly received adsoφtion bed assemblies.
It can be appreciated that with the described invention, parallel flow is maintained with a system that has substantially self balancing flow to each adsoφtion bed assembly and to each adsoφtion bed element 90 within each assembly 24. Such a flow pattern ensures that deterioration is constant among all elements 90. This avoids problems such as occur with non-balanced systems wherein one element 90 becomes spent earlier than predicted or earlier than remaining elements. Such lack of balanced flow distribution can lead to changing of non-spent elements prior to the required time or failure of the system, which can be costly and damaging.
In addition, the system also provides for a filtration system with a much smaller footprint and with less size. Footprint savings of forty percent (40%) are possible as compared to prior systems, such as the Osendorf system of U.S. Patent No. 5,290,345. Such a savings is made without loss of efficiency or filter media volume. In addition, flow and pressure drop are substantially the same for the reduced system volume.
Detailed Description of the Present Preferred Embodiments The present invention concerns refinements and improvements to the adsoφtion apparatus of application Serial No. 08/890,804.
In reference now to Figure 12, an adsoφtion bed assembly is shown generally at 200, in exploded view. Adsoφtion bed assembly 200 is generally analogous to adsoφtion bed assembly 24, illustrated in Figure 7, with the exception of certain refinements and improvements. However, adsoφtion bed assembly 200 operates in accordance with the principles described above, in an adsoφtion apparatus, such as that shown in Figure 1 at 20.
Adsoφtion bed assembly 200 includes a housing 202 for supporting, holding, and containing a plurality of adsoφtion elements 240. In the specific embodiment illustrated, housing 202 comprises a rectangular, box-shaped configuration having a first or top panel 204, and a second or bottom panel 206. Top panel 204 defines a plurality of openings 208. In the embodiment illustrated, there are three elongated slots or openings 208, which when assembled in an adsoφtion apparatus, such as that illustrated in Figure 1 at 20, function as outlet openings. Further, as described in more detail below, outlet openings 208 provide access to the housing interior, and in particular, to filters panels 260 (functioning as either prefilters or postfilters) to allow the filter panels 260 to be changed out. Still referring to Figure 12, bottom panel 206 defines a plurality of openings 212. Openings 212 are elongated slots, analogous to openings 208 in top panel 204. Inlet openings 212 allow for the flow of air to pass therethrough and into the interior of housing 202. Further, inlet openings 212 allow for the changeout and replacement of the pre- or post- filter panels 260, described in more detail below. In the embodiment illustrated, bottom panel 206 defines three inlet openings 212.
Preferably, top and bottom panels 204, 206 are constructed of sheet metal. Preferably, top and bottom panels 204, 206 are identical, for the ease of manufacturing and assembly. Still in reference to Figure 12, illustrated between top and bottom panels 204, 206 are a number of side panels 214. Specifically, housing 202 has a front side panel 216, and an opposite rear side panel 218. The front side panel 216 includes a pair of handles 280, to aid in removing and replacing the bed assembly 200 in the apparatus 20. Disposed between front and rear panels 216, 218 are side panel 220 and access panel 222. Side panel 220 is a solid, closed member to provide support and closure at one end of housing 202.
Access panel 222 defines a plurality of openings or access slots 224 therein. Access slots 224 are elongated openings which are shaped and configured to hold and support an end of an adsoφtion element. In the embodiment illustrated, access panel 222 defines five slots 224. As can be seen Figure 12, slots 224 are angled and configured in a V shape. That is, slots 224 are angled to conform to the profile of the adsoφtion elements 240.
Housing 202 also includes a selectively removable access cover 226. Cover 226 is removably mountable to access panel 222. That is, during operation of the adsoφtion apparatus 20 using the bed arrangement 200, access cover 226 is securely mounted on to the access panel 222 to cover the access panel 222, and in cooperation with a gasket member 228, provide a sealing engagement against the adsoφtion elements 240.
Access cover 226 is removable such that the adsoφtion elements can be accessed, in order to change the filter element media. Figure 12 illustrates the access cover 226 in an unmounted, or removed position. While a variety of operative embodiments are contemplated for allowing access cover 226 to be removably mounted to access panel 222, in the specific example illustrated, cover 226 is mountable and unmountable to access panel 222 by way of fasteners or screws 230. Access panel 222 includes a series of threaded holes 232 for receiving the screws 230. As can also be seen in Figure 12, gasket member 228 includes a series of holes or apertures 234. When assembled in a configuration to be used in an adsoφtion apparatus such as that shown at 20 in
Figure 1, gasket member 228 is attached tightly to removable cover 226, which is attached securely to access panel 222 through the operation of screws 230 and holes 232.
In reference now to Figure 13, housing 202 holds and contains and supports a plurality of adsoφtion elements 240. In the embodiment illustrated in Figure 13, there are five adsoφtion elements 240 shown. Adsoφtion elements 240 are analogous to adsoφtion elements 90, described above. As such, elements 240 include a pair of oppositely disposed perforated members or screens 242, 244.
Extruded frame members 246, 248 extend between the first and second screens 242, 244 and help to hold the adsoφtive media 250 therein. Each of elements 240 also includes a mid-bed baffle 283 and a center post 284, generally analagous as described above with respect to baffle 102 and center post 104 (FIG. 8). Center post 284 may include a flange acting as a baffle, analagous to flange 106 (FIG. 8). Each of the elements 240 has a pair of opposite ends. When positioned inside of housing 202, one of the ends is closed by side panel 220. The other end is positioned in one of the slots 224 in access panel 222.
A cover member 254 is selectively positionable within slots 224 to cover the open end of elements 240. In the embodiment illustrated, each of the slots 224 has a cover member 254 positioned therein to cover the open end of the element 240 and block the media 250 from falling out. Specifically, each of cover members 254 comprises a rectangular compression pad 256, preferably made of a soft urethane material. Each of compression pads 256 is squeezed into and fits snugly within slots 224. Compression pads keep the media 250 packed tightly between the screens 242, 244 and frame sections 246, 248. During shipping, the media 250, for example media of carbon spheres, rods, or granules, may settle. The compression pad 256 comprises a material, for example soft urethane, which expands to fill the space which becomes available when the media 250 settles. Therefore, compression pads 256 function to maintain a tight, packed condition of the granules in the media
250. As mentioned above, a gasket member 228 is positioned between access cover 226 and access panel 222. Gasket member 228 is compressed between access cover 226 and access panel 222 to provide a tight seal along the ends of the adsoφtion elements 240. Preferably, gasket member 228 comprises a soft, compressible material, preferably foamed urethane. In reference again to Figure 12, adsoφtion bed assembly 200 includes a plurality of prefilter panels and postfilter panels which are removably mounted within housing 202. In Figure 12, filter panel assembly 260 is illustrated removed from housing 202, and in an exploded view.
In the filter elements 90 described in the parent application, the prefilter panels 96 and postfilter panels 98 are securely fastened and mounted to each adsoφtion element 90. In this embodiment of adsoφtion elements 240, the prefilter and postfilter panels are not rigidly secured and fastened to each of the adsoφtion elements 240. Rather, the prefilter panels and postfilter panels are removably positionable and mountable between each of the adsoφtive elements 240, to allow the prefilter and postfilter panels to be changed out.
In the example illustrated in Figures 12 and 13, each of the prefilter and postfilter panel assemblies 260 includes filter media 262 and support mesh 264. Media 262 has a triangular or V shaped cross section, generally in the profile shape of the adsoφtion elements 240 arranged in their V shaped pattern. Media 262 is preferably clay coated newsback with electrostatic media heat sealed thereon.
Support mesh 264 also has a triangular or V-shaped cross section, and functions to support and hold the media 262 during air flow. Media 262 is insertable in openings 208, 212, to be positioned between adjacent adsoφtion elements 240. Double stick tape between the media 262 and the top and bottom 204, 206 functions to removably mount and secure the media 262 to the housing 202. The support mesh 262 is formed into a V-shape which is slightly larger than the V-shape of the media 262. When the support mesh 264 is positioned inside of the media 262, the edges of the support mesh 264 snap under the edges of the clay coated newsback of the media
262, and thereby secure the mesh 264 to the media 262.
In Figure 13, the direction of airflow is shown flowing from an inlet side at arrows 268, through openings 212, through the adsoφtion elements 240, out through openings 208, and out at arrows 270. The filter panel assemblies 260 on the upstream side 268 function as prefilters 272, while filter panel assemblies 260 on the downstream side function as postfilters 274. Prefilters 272 remove airborne particles prior to engaging the adsoφtion element 240 and granular media 250 and retain any dust from the adsoφtive material inside of the filter during shipping. The postfilters 274 ensure that any residual particles from the adsoφtive element 240 is filtered before passing downstream.
Each of the prefilters 272 and postfilters 274 is removable and replaceable from the adsoφtive bed assembly 200. Specifically, each of the prefilters 272 may be removed through the slots or openings 212 in the bottom panel 206. Each of the postfilters 274 may be removed through the openings or slots 208 in the top panel 204.
The adsoφtive bed assembly 200 allows for convenient changing of the filtering media. After a period of use, it may be desirable to discard the old, spent media 250 and replace it with new, fresh media. In the example described above, the indicating system 120 indicates to the operator when it is time to replace the adsoφtive media 250. To change the media in this embodiment, the adsoφtive bed assembly is removed from the adsoφtive apparatus 20 through the access door 38. The cover 226 is removed from the adsoφtion bed housing 202 to expose the compression pads 256. In order to remove the access panel 226, screws 230 are unscrewed from the access panel 222. Cover 226 is then removed from the access panel 222, which breaks the seal provided by gasket member 228. Each of the compression pads 256 is then removed from the slots 224 covering the ends of each of the adsoφtive elements 240. This exposes the media granules 250. The housing 202 is then tilted or angled relative to the horizontal, and the spent filter media 250 is poured from each of the adsoφtive elements 240. After each of the elements 240 is drained of or emptied of the old, spent media 250, second or new or fresh granular, spherical, or rod-shaped media 250 is filled in each element 240. That is, the media 250 is deposited between the opposing screens 242, 244 and the opposing frames 246, 248 by pouring it or depositing it through slots 224 in the access panel
222. The second, new granular media is packed into place between the screens 242,
244 and frames 246, 248, and then the compression pads 256 are again positioned or placed within slots 224. Cover 226 having gasket member 228 secured thereto is again positioned to cover access panel 222 and compression pads 256. Cover 226 is refastened to housing 202 through screws 230. As cover 226 is tightened against access panel 222, gasket member 228 is compressed to form a seal between cover
226 and adsoφtion elements 240. Each ofthe filter panel assemblies 260 (i.e., either a prefilter 272 or postfilter 274) may also be replaced. To replace the filter panel assemblies 260, the operator grasps the pre- or post- filter media 262 through the respective opening 208 or 212. The filter panel assembly 260 may be slid out through the appropriate opening (either 208 or 212) and discarded. A second, new filter panel assembly 260 (functioning as either a prefilter 272 or postfilter 274) may be positioned between the adsoφtive elements 240 by inserting the second, new media 262 and support mesh 264 through the associated opening 208 or 212. Double stick tape is applied to the outer surface of media 262 in order to adhere the media 262 to the respective top or bottom panel 204, 206. After the granular adsoφtive media 250 is changed and the prefilters
272 and postfilters 274 are replaced, as desired, the adsoφtive bed assembly 200 are again placed into the adsoφtive apparatus housing 20 through the access door 38. Inflatable gasket 160 is again reinflated.
Preferred materials and dimensions It will be understood that a wide variety of specific configurations and applications are feasible, using techniques described herein. In this section, a particular adsoφtive bed assembly is described.
In the housing 202, each ofthe top panel 204, bottom panel 206, front side panel 216, rear side panel 218, side panel 220, access panel 222 and cover 226 is constructed of aluminum. Each ofthe top panels 204 and bottom panels 206 has dimensions of about 10-15 by 22-27 inches, typically about 13.2 inches by 24.7 inches. Each ofthe openings 208, 210 has a length of about 20-25 inches, typically about 23.2 inches, and a width of about 1-3 inches, typically about 2.3 inches. One ofthe openings is narrower than the other two, and has a width of about 0.5-2.5 inches, typically about 1.2 inches. Each ofthe openings 210, 212 is spaced from an adjacent opening by about 1-4 inches, typically about 2.5 inches. Each of the front side panels 216 has a length of about 22-27 inches, typically about 24.5 inches, and a height of about 4-7 inches, typically about 5.9 inches. Each ofthe rear side panels 218 has a length of about 22-27 inches, typically about 24.5 inches, and a height of about 4-7 inches, typically about 5.9 inches. Side panel 220 has a length of about 10-15 inches, typically about 13.1 inches, and a height of about 4-7 inches, typically about 5.9 inches.
Access panel 222 has a length of about 10-15 inches, typically about 13.1 inches, and a height of about 4-7 inches, typically about 5.9 inches. Each of slots 224 has a width of about 0.4-1 inch, typically about 0.7 inches. Each of slots 224 has a flanged rib projecting from a planar surface of access panel 222. The flanged rib 282 projects a distance of about 0.25-0.75 inches, typically about 0.5 inches from the planar portion ofthe access panel 222!
The access cover 226 has a length of about 10-15 inches, typically about 13 inches, and a height of about 4-6 inches, typically about 5 inches. It is constructed of a pre-anodized aluminum 0.125 inches thick. It includes 6-12 holes, typically about 8 holes, for providing screws 230 to pass therethrough. Each ofthe holes has a 0.25 inch diameter with a 0.116 inch deep chamfer.
The gasket member 228 is constructed from low-perm polyurethane foam material having a thickness of about 0.07-0.25 inches, typically about 0.125 inches. It includes 8 holes having a diameter of 0.25 inches, for reception ofthe screws 230.
Each ofthe adsoφtive elements 240 has an overall length of about 22-27 inches, typically about 24.4 inches, and a height of about 4-7 inches, typically about 5.9 inches. Each ofthe screens 242, 244 is a perforated member with about 0.25-0.4 inch, typically about 0.33 inch, diameter holes in stainless steel. The screens are spaced a distance of about 0.75- 1.5 inches, typically about 1.2 inches from each other. The elements 240 are arranged in a V-shape relative to each other. The angle between adjacent elements 240 is about 15-30 degrees, typically about 21 degrees.
Each ofthe prefilter assemblies 272 and postfilter assemblies 274 is constructed of 0.2-0.5 inch, typically about 0.30 inch, thick newsback clay coated on one side. Electrostatic media is heat sealed to the non clay-coated side. The support mesh 264 has a length of about 18-25 inches, typically about 22 inches, and each of the sides ofthe V has a length of about 3-5 inches, typically about 4 inches. The distance between the end tips ofthe support mesh 264 is about 2.5-3.5 inches, typically about 3 inches. Support mesh 264 is constructed of 1 inch by 1 inch stainless steel welded 0.08 wire mesh.
It is to be understood, however, that even though numerous characteristics and advantages ofthe present invention have been set forth in the foregoing description, together with details ofthe structure and function ofthe invention, the disclosure is illustrative only, and changes may be made in detail, especially in matters of shape, size and arrangement of parts within the principles of the invention to the full extent indicated by the broad general meaning ofthe terms in which the appended claims are expressed.

Claims

WHAT IS CLAIMED IS:
1. An adsoφtion bed cartridge comprising:
(a) a plurality of adsoφtion elements; each of said adsoφtion elements including:
(i) first and second, opposite screens;
(ii) adsoφtion media packed between said first and second, opposite screens; and
(iii) a baffle member having an edge; said baffle member being between said first and second, opposite screens; said baffle member edge extending into said adsoφtion media; and
(b) a cartridge housing defining an interior, at least one inlet opening, and at least one outlet opening;
(i) said plurality of adsoφtion elements being positioned within said cartridge housing interior.
2. An adsoφtion bed cartridge according to claim 1 wherein:
(a) each of said adsoφtion elements includes a first frame member supporting said screens; (i) each of said first frame members including one of said baffle members projecting therefrom and extending into said adsoφtion media.
3. An adsoφtion bed cartridge according to claim 2 wherein:
(a) each of said adsoφtion elements has first and second, opposite ends, and a second frame member; said first and second frame members being at said first and second opposite ends of each of said adsoφtion elements; (i) each of said second frame members including one of said baffle members projecting therefrom and extending into said adsoφtion media.
4. An adsoφtion bed cartridge according to any one of claims 2 or 3 wherein: (a) each of said adsoφtion elements includes a retaining member extending between said screens remote from said first and second frame members.
5. An adsoφtion bed cartridge according to any one of claims 1-4 wherein:
(a) each of said adsoφtion elements is selectively openable to provide access to said adsoφtion media; and
(b) said cartridge housing is selectively openable to provide access to said plurality of adsoφtion elements.
6. An adsoφtion bed cartridge according to any one of claims 1-5 further including: (a) a gasket member between said cartridge housing and said adsoφtion elements.
7. An adsoφtion bed cartridge according to any one of claims 1-6 wherein:
(a) each of said adsoφtion elements includes at least one open end; and further including,
(b) a plurality of selectively removable covers;
(i) each of said covers being oriented over a respective one of said adsoφtion element open ends; and (ii) each of said removable covers being positioned between said gasket member and a respective one of said adsoφtion elements.
8. An adsoφtion bed cartridge according to claim 7 wherein: (a) each of said covers comprises a compression pad.
9. An adsoφtion bed cartridge according to any one of claims 1 -8 wherein:
(a) said cartridge housing has first and second, opposite panels and a side panel; (i) said first panel defining a plurality of inlet openings; (ii) said second panel defining a plurality of outlet openings; and
(iii) said side panel being selectively removable to provide access to said adsoφtion elements.
10. An adsoφtion bed cartridge according to any one of claims 1-9 further including:
(a) a plurality of prefilter and postfilter panels; each of said prefilter and postfilter panels being removably oriented between adjacent adsoφtion elements.
11. An adsoφtion bed cartridge according to claim 10 wherein:
(a) each of said prefilter and postfilter panels is sized relative to said at least one inlet at least one outlet opening in said cartridge housing to be removably positionable through said inlet and outlet opening.
12. An adsoφtion bed cartridge according to any one of claims 1-11 wherein: (a) said adsoφtion elements are configured in a V-shape.
13. An adsoφtion bed cartridge according to claim 12 wherein:
(a) each of said adsoφtion elements is oriented at an angle of about 15- 30 degrees relative to adjacent adsoφtion element.
14. An adsoφtion bed cartridge according to any one of claims 1-13 wherein: (a) said adsoφtion media comprises carbon spheres, or rods, or granules.
15. An adsoφtion bed cartridge comprising:
(a) a plurality of adsoφtion elements; each of said adsoφtion elements having first and second, opposite ends, and adsoφtion media contained within a respective element;
(i) each of said adsoφtion elements being selectively openable to provide access to said adsoφtion media; (b) a cartridge housing defining an interior, a plurality of inlet openings, a plurality of outlet openings, and a side panel;
(i) said plurality of adsoφtion elements being positioned within said cartridge housing interior; (ii) said cartridge housing being selectively openable to provide access to said plurality of adsoφtion elements; and
(c) a gasket member compressed between said side panel of said cartridge housing and each of said first ends of said adsoφtion elements.
16. An adsoφtion bed cartridge according to claim 15 wherein:
(a) said cartridge housing has first and second, opposite panels and said side panel;
(i) said first panel defining said plurality of inlet openings; (ii) said second panel defining said plurality of outlet openings; (iii) said side panel being secured to said gasket member; and said side panel being selectively removable to provide access to said adsoφtion elements.
17. An adsoφtion bed cartridge according to any one of claims 15 or 16 wherein: (a) each of said adsoφtion elements includes: first and second, opposite screens; and each of said first ends of said adsoφtion elements being an open end;
(i) said adsoφtion media being removably packed between said first and second screens.
18. An adsoφtion bed cartridge according to claim 17 further including: (a) a plurality of selectively removable covers;
(i) each of said covers being oriented over a respective one of said adsoφtion element open ends; and (ii) each of said removable covers being positioned between said gasket member and a respective one of said adsoφtion elements.
19. An adsoφtion bed cartridge according to any one of claims 15-18 further including:
(a) a plurality of prefilter and postfilter panels; each of said prefilter and postfilter panels being removably oriented between adjacent adsoφtion elements.
20. An adsoφtion bed cartridge according to claim 19 wherein:
(a) each of said prefilter and postfilter panels is sized relative to said inlet and outlet openings to be removably positionable through said inlet and outlet openings.
21. An adsoφtion bed cartridge according to any one of claims 15-20 wherein:
(a) each of said adsoφtion elements includes a baffle member with an edge projecting between said first and second, opposite screens and extending into said adsoφtion media;
(b) said adsoφtion elements are configured in a V-shape; and
(c) said adsoφtion media comprises carbon spheres, or rods, or granules.
22. An adsoφtion apparatus comprising:
(a) a housing having an inlet, an outlet, and an inlet plenum in airflow communication with said inlet;
(b) a plurality of frame sections oriented within said housing; each of said frame sections being constructed and arranged for receiving a respective adsoφtion bed cartridge;
(c) an access door proximate said inlet plenum; and
(d) a plurality of baffles for directing airflow from said inlet plenum, below each of said frame sections, and through said outlet.
23. An adsoφtion apparatus according to claim 22 further comprising:
(a) a plurality of adsoφtion bed cartridges according to any one of claims 1-21; said plurality of adsoφtion bed cartridges being supported by said plurality of frame sections; and
(b) a sealing member between each of said adsoφtion bed cartridges and a respective one of said frame sections.
24. An adsoφtion apparatus according to claim 22 wherein:
(a) said plurality of adsoφtion bed cartridges is arranged in vertical alignment within said housing.
25. An adsoφtion apparatus according to claim 24 wherein:
(a) at least one of said plurality of baffles being between adjacent adsoφtion bed cartridges; said baffles for directing air: from said inlet plenum; to a region below said each of said plurality of adsoφtion bed cartridges; upwardly through said plurality of adsoφtion bed cartridges; and through said outlet.
26. An adsoφtion apparatus according to any one of claims 22-25 further comprising:
(a) a contaminant sensor in said inlet plenum.
27. A method for changing filtering media in an adsoφtion bed cartridge; the method comprising steps of:
(a) removing a gasket member from an adsoφtion bed cartridge to expose a plurality of cover members covering ends of a plurality of adsoφtion elements;
(b) removing a selected cover member from the end of a selected adsoφtion element to expose filtering media within the selected element; and
(c) pouring the filtering media from the selected element.
28. A method according to claim 27, further including:
(a) after said step of pouring, adding new filtering media into the selected element;
(b) replacing the selected cover member over the end ofthe selected element; and
(c) replacing the gasket member on the adsoφtion bed cartridge.
29. A method according to any one of claims 27 and 28, further including:
(a) removing a plurality of prefilters and postfilters from the adsoφtion bed cartridge through slots in the cartridge; and
(b) inserting a new plurality of prefilters and postfilters through the slots in the cartridge.
30. A method according to any one of claims 27-29 wherein:
(a) said step of removing a gasket member includes removing an access panel having the gasket member secured thereto, and breaking a seal between the access panel and the adsoφtion element.
31. A method according to any one of claims 27-30 wherein:
(b) said step of removing a selected cover member includes pulling a compression pad from the end ofthe selected adsoφtion element.
32. A method according to any one of claims 27-31 , further including:
(a) before said step of removing the gasket member from the adsoφtion bed cartridge, removing the adsoφtion bed cartridge from an adsoφtion apparatus including a housing, an inlet, and an outlet.
33. A method according to claim 32 wherein:
(a) said step of removing the adsoφtion bed cartridge from an adsoφtion apparatus includes moving an access door on the adsoφtion apparatus housing to expose an opening, selecting the adsoφtion bed cartridge from a plurality of adsoφtion bed cartridges, and removing the selected adsoφtion bed cartridge through the opening.
34. A method according to claim 33 wherein:
(a) after said step of pouring the filtering media from the selected element, inserting the adsoφtion bed cartridge into the adsoφtion apparatus housing through the opening.
35. A method for treating contaminated air comprising steps of:
(a) directing contaminated air through an inlet in a housing and to a location below each of a plurality of adsoφtion bed cartridges;
(b) removing at least a portion of contaminants from the contaminated air by directing the contaminated air upwardly through each ofthe adsoφtion bed cartridges to result in treated air; and
(c) directing the treated air through an outlet in the housing.
36. A method for treating contaminated air according to claim 35 wherein:
(a) said step of directing contaminated air through an inlet in a housing and to a location below each of a plurality of adsoφtion bed cartridges includes directing contaminated air into an inlet in a housing in an adsoφtion apparatus according to any one of claims 22-26.
37. A method for treating contaminated air according to any one of claims 35 and 36 wherein:
(a) said step of removing at least a portion of contaminants from the contaminated air includes directing the contaminated air upwardly through a plurality of adsoφtion bed cartridges according to any one of claims 1-21.
PCT/US1998/013888 1997-07-11 1998-07-07 Adsorption apparatus and methods WO1999002242A1 (en)

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US08/890,804 US5964927A (en) 1997-07-11 1997-07-11 Adsorption apparatus
US09/007,852 US6113674A (en) 1997-07-11 1998-01-15 Adsorption apparatus and methods
US09/007,852 1998-01-15

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