WO1998050945A3 - Low density film for low dielectric constant applications - Google Patents
Low density film for low dielectric constant applications Download PDFInfo
- Publication number
- WO1998050945A3 WO1998050945A3 PCT/US1998/009295 US9809295W WO9850945A3 WO 1998050945 A3 WO1998050945 A3 WO 1998050945A3 US 9809295 W US9809295 W US 9809295W WO 9850945 A3 WO9850945 A3 WO 9850945A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- particles
- film
- dielectric constant
- particle layer
- deposit
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3694—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer having a composition gradient through its thickness
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/008—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character comprising a mixture of materials covered by two or more of the groups C03C17/02, C03C17/06, C03C17/22 and C03C17/28
- C03C17/009—Mixtures of organic and inorganic materials, e.g. ormosils and ormocers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K7/00—Use of ingredients characterised by shape
- C08K7/22—Expanded, porous or hollow particles
- C08K7/24—Expanded, porous or hollow particles inorganic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K7/00—Use of ingredients characterised by shape
- C08K7/22—Expanded, porous or hollow particles
- C08K7/24—Expanded, porous or hollow particles inorganic
- C08K7/26—Silicon- containing compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
- H01L21/02186—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing titanium, e.g. TiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/022—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
- C03C2217/42—Coatings comprising at least one inhomogeneous layer consisting of particles only
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
- C03C2218/328—Partly or completely removing a coating
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU73718/98A AU7371898A (en) | 1997-05-07 | 1998-05-06 | Low density film for low dielectric constant applications |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US85236297A | 1997-05-07 | 1997-05-07 | |
US08/852,362 | 1997-05-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1998050945A2 WO1998050945A2 (en) | 1998-11-12 |
WO1998050945A3 true WO1998050945A3 (en) | 1999-03-11 |
Family
ID=25313123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/009295 WO1998050945A2 (en) | 1997-05-07 | 1998-05-06 | Low density film for low dielectric constant applications |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU7371898A (en) |
WO (1) | WO1998050945A2 (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6469390B2 (en) * | 1999-01-26 | 2002-10-22 | Agere Systems Guardian Corp. | Device comprising thermally stable, low dielectric constant material |
JP3827056B2 (en) | 1999-03-17 | 2006-09-27 | キヤノンマーケティングジャパン株式会社 | Method for forming interlayer insulating film and semiconductor device |
JP3600507B2 (en) | 2000-05-18 | 2004-12-15 | キヤノン販売株式会社 | Semiconductor device and manufacturing method thereof |
JP3532830B2 (en) | 2000-05-24 | 2004-05-31 | キヤノン販売株式会社 | Semiconductor device and manufacturing method thereof |
JP2002009069A (en) | 2000-06-22 | 2002-01-11 | Canon Sales Co Inc | Method for forming film |
JP3934343B2 (en) | 2000-07-12 | 2007-06-20 | キヤノンマーケティングジャパン株式会社 | Semiconductor device and manufacturing method thereof |
US6420276B2 (en) | 2000-07-21 | 2002-07-16 | Canon Sales Co., Inc. | Semiconductor device and semiconductor device manufacturing method |
US6500752B2 (en) | 2000-07-21 | 2002-12-31 | Canon Sales Co., Inc. | Semiconductor device and semiconductor device manufacturing method |
US6835669B2 (en) | 2000-07-21 | 2004-12-28 | Canon Sales Co., Inc. | Film forming method, semiconductor device and semiconductor device manufacturing method |
JP3545364B2 (en) | 2000-12-19 | 2004-07-21 | キヤノン販売株式会社 | Semiconductor device and manufacturing method thereof |
JP2005504433A (en) * | 2001-07-18 | 2005-02-10 | トリコン ホールディングス リミティド | Low dielectric constant layer |
JP3701626B2 (en) | 2001-12-06 | 2005-10-05 | キヤノン販売株式会社 | Manufacturing method of semiconductor device |
US9061317B2 (en) | 2002-04-17 | 2015-06-23 | Air Products And Chemicals, Inc. | Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants |
ATE499458T1 (en) * | 2002-04-17 | 2011-03-15 | Air Prod & Chem | METHOD FOR PRODUCING A POROUS SIZE LAYER |
JP3859540B2 (en) | 2002-05-14 | 2006-12-20 | 松下電器産業株式会社 | Low dielectric constant insulating film forming material |
US6825130B2 (en) | 2002-12-12 | 2004-11-30 | Asm Japan K.K. | CVD of porous dielectric materials |
DE102012108704A1 (en) | 2012-09-17 | 2014-03-20 | Osram Opto Semiconductors Gmbh | Method for fixing a matrix-free electrophoretically deposited layer on a semiconductor chip and radiation-emitting semiconductor component |
JP2020527626A (en) | 2017-07-20 | 2020-09-10 | サウジ アラビアン オイル カンパニー | Mitigation of condensate banking using surface modification |
WO2020154063A1 (en) | 2019-01-23 | 2020-07-30 | Saudi Arabian Oil Company | Mitigation of condensate and water banking using functionalized nanoparticles |
JP2022096300A (en) * | 2020-12-17 | 2022-06-29 | 積水化成品工業株式会社 | Hollow resin particle used in resin composition for semiconductor member |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4849284A (en) * | 1987-02-17 | 1989-07-18 | Rogers Corporation | Electrical substrate material |
US4865875A (en) * | 1986-02-28 | 1989-09-12 | Digital Equipment Corporation | Micro-electronics devices and methods of manufacturing same |
US5055342A (en) * | 1990-02-16 | 1991-10-08 | International Business Machines Corporation | Fluorinated polymeric composition, fabrication thereof and use thereof |
JPH0697298A (en) * | 1992-09-14 | 1994-04-08 | Fujitsu Ltd | Forming method of semiconductor device insulating film |
US5354611A (en) * | 1990-02-21 | 1994-10-11 | Rogers Corporation | Dielectric composite |
JPH07112126A (en) * | 1993-08-27 | 1995-05-02 | Asahi Glass Co Ltd | Organosol dispersed in fluorine-containing solvent |
US5614250A (en) * | 1992-12-29 | 1997-03-25 | International Business Machines Corporation | Coated filler and use thereof |
US5776828A (en) * | 1995-10-31 | 1998-07-07 | Micron Technology, Inc. | Reduced RC delay between adjacent substrate wiring lines |
US5801092A (en) * | 1997-09-04 | 1998-09-01 | Ayers; Michael R. | Method of making two-component nanospheres and their use as a low dielectric constant material for semiconductor devices |
-
1998
- 1998-05-06 WO PCT/US1998/009295 patent/WO1998050945A2/en active Application Filing
- 1998-05-06 AU AU73718/98A patent/AU7371898A/en not_active Abandoned
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4865875A (en) * | 1986-02-28 | 1989-09-12 | Digital Equipment Corporation | Micro-electronics devices and methods of manufacturing same |
US4849284A (en) * | 1987-02-17 | 1989-07-18 | Rogers Corporation | Electrical substrate material |
US5055342A (en) * | 1990-02-16 | 1991-10-08 | International Business Machines Corporation | Fluorinated polymeric composition, fabrication thereof and use thereof |
US5354611A (en) * | 1990-02-21 | 1994-10-11 | Rogers Corporation | Dielectric composite |
JPH0697298A (en) * | 1992-09-14 | 1994-04-08 | Fujitsu Ltd | Forming method of semiconductor device insulating film |
US5614250A (en) * | 1992-12-29 | 1997-03-25 | International Business Machines Corporation | Coated filler and use thereof |
JPH07112126A (en) * | 1993-08-27 | 1995-05-02 | Asahi Glass Co Ltd | Organosol dispersed in fluorine-containing solvent |
US5776828A (en) * | 1995-10-31 | 1998-07-07 | Micron Technology, Inc. | Reduced RC delay between adjacent substrate wiring lines |
US5801092A (en) * | 1997-09-04 | 1998-09-01 | Ayers; Michael R. | Method of making two-component nanospheres and their use as a low dielectric constant material for semiconductor devices |
Also Published As
Publication number | Publication date |
---|---|
AU7371898A (en) | 1998-11-27 |
WO1998050945A2 (en) | 1998-11-12 |
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