WO1998044343A3 - Verfahren zur erzeugung und zum einsatz von wirbelströmen zur erfassung von magnetischen und elektrischen materialeigenschaften - Google Patents

Verfahren zur erzeugung und zum einsatz von wirbelströmen zur erfassung von magnetischen und elektrischen materialeigenschaften Download PDF

Info

Publication number
WO1998044343A3
WO1998044343A3 PCT/DE1998/001002 DE9801002W WO9844343A3 WO 1998044343 A3 WO1998044343 A3 WO 1998044343A3 DE 9801002 W DE9801002 W DE 9801002W WO 9844343 A3 WO9844343 A3 WO 9844343A3
Authority
WO
WIPO (PCT)
Prior art keywords
eddy currents
sample
producing
materials
force
Prior art date
Application number
PCT/DE1998/001002
Other languages
English (en)
French (fr)
Other versions
WO1998044343A2 (de
Inventor
Uwe Hartmann
Original Assignee
Ams Holding Ges Fuer Angewandt
Uwe Hartmann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ams Holding Ges Fuer Angewandt, Uwe Hartmann filed Critical Ams Holding Ges Fuer Angewandt
Priority to EP98929213A priority Critical patent/EP0972190A2/de
Publication of WO1998044343A2 publication Critical patent/WO1998044343A2/de
Publication of WO1998044343A3 publication Critical patent/WO1998044343A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
    • G01Q60/54—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/825—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws by using magnetic attraction force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9013—Arrangements for scanning
    • G01N27/902—Arrangements for scanning by moving the sensors

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

Es wird ein Verfahren zu einer Erzeugung und zu einem Einsatz von Wirbelströmen zur Erfassung von Magnetfeldern und elektrischen Leitfähigkeiten von Materialien offenbart, das eine beeinflussungsfreie Messung der Magnetfelder und Leitfähigkeiten mit höchster Ortsauflösung erlaubt. Dabei werden zunächst entweder eine elektrisch leitfahige oder eine permanent-magnetische Spitze (1) einer Oberfläche (2) angenähert und dann Wirbelströme entweder in der Spitze oder in der Probe erzeugt. Die von den Wirbelströmen erzeugten Magnetfelder bewirken eine Kraft zwischen Probenoberfläche und Spitze, die gemessen wird und die von den jeweiligen Probeneigenschaften abhängt. Aus der Messung der Kraftwirkungen lassen sich dann die Probeneigenschaften bestimmen.
PCT/DE1998/001002 1997-04-01 1998-04-01 Verfahren zur erzeugung und zum einsatz von wirbelströmen zur erfassung von magnetischen und elektrischen materialeigenschaften WO1998044343A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP98929213A EP0972190A2 (de) 1997-04-01 1998-04-01 Verfahren zur erzeugung und zum einsatz von wirbelströmen zur erfassung von magnetischen und elektrischen materialeigenschaften

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19713418.1 1997-04-01
DE19713418A DE19713418A1 (de) 1997-04-01 1997-04-01 Erzeugung und Einsatz von Wirbelströmen zur Erfassung von magnetischen und elektrischen Materialeigenschafen

Publications (2)

Publication Number Publication Date
WO1998044343A2 WO1998044343A2 (de) 1998-10-08
WO1998044343A3 true WO1998044343A3 (de) 1998-12-30

Family

ID=7825123

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1998/001002 WO1998044343A2 (de) 1997-04-01 1998-04-01 Verfahren zur erzeugung und zum einsatz von wirbelströmen zur erfassung von magnetischen und elektrischen materialeigenschaften

Country Status (3)

Country Link
EP (1) EP0972190A2 (de)
DE (1) DE19713418A1 (de)
WO (1) WO1998044343A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005046910B4 (de) * 2005-09-21 2009-03-19 Technische Universität Ilmenau Verfahren und Anordnung zur berührungslosen Inspektion bewegter elektrisch leitfähiger Substanzen
DE102011056650B4 (de) 2011-12-20 2014-02-20 Technische Universität Ilmenau Verfahren und Anordnung zur Bestimmung der elektrischen Leitfähigkeit eines Werkstoffes

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293119A (en) * 1992-02-20 1994-03-08 Sqm Technology, Inc. Electromagnetic microscope for evaluation of electrically conductive and magnetic materials
US5465046A (en) * 1994-03-21 1995-11-07 Campbell; Ann. N. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5358251A (en) 1989-08-14 1994-10-25 Ashton James T Golf training aid/simulator
US5340111A (en) 1993-06-10 1994-08-23 Froelich David S Golf driving range platform
US5470074A (en) 1994-07-18 1995-11-28 Hotchkiss; Dennis B. Golf practice tee apparatus having selectively adjustable inclination for simulating uneven lies and method for use of same
US5558334A (en) 1995-08-16 1996-09-24 Roche; Mortimer P. Golf tee platform
US5549522A (en) 1996-01-03 1996-08-27 Chang; Po-Neng Golf practicing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293119A (en) * 1992-02-20 1994-03-08 Sqm Technology, Inc. Electromagnetic microscope for evaluation of electrically conductive and magnetic materials
US5465046A (en) * 1994-03-21 1995-11-07 Campbell; Ann. N. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PHILIP C.HOBBS, DAVID W.ABRAHAM ET AL.: "Magnetic force microscopy with 25 nm resolution.", APPLIED PHYSICS LETTERS, vol. 55, no. 22, 27 November 1989 (1989-11-27), new york, pages 2357 - 2359, XP000096264 *

Also Published As

Publication number Publication date
EP0972190A2 (de) 2000-01-19
DE19713418A1 (de) 1998-10-08
WO1998044343A2 (de) 1998-10-08

Similar Documents

Publication Publication Date Title
US4528856A (en) Eddy current stress-strain gauge
GEP20012591B (en) Device for Detection of Analytes
EP0309956A3 (de) Verfahren und Apparatur zum Prüfen von Halbleiter-Elementen
EP0357013A3 (de) Schaltung zum Messen eines magnetischen Feldes
BR0009371A (pt) Método e aparelho para a detecção de degradaçãode cabo de elevador usando energia elétrica oumagnética
AU4785497A (en) Sensor employing impedance measurements
EP0570148A3 (de) Elektrostatisches Voltmeter mit integrierten Hochspannungs-Schaltungen
AU2001282116A1 (en) Inspecting an object of electrically conducting material
MY114555A (en) Method and installation for measuring the thickness of a non-ferromagnetic conductive layer on a ferromagnetic conductive substrate
DE3766625D1 (de) Verfahren und vorrichtung zum messen des abstandes zweier sich relativ zueinander bewegender, einander gegenueberliegender flaechen.
AU2001285910A1 (en) Detecting an anomaly in an object of electrically conductive material
DE69905385T2 (de) Apparat und verfahren zur strommessung
EP0401852A3 (de) Oberflächenmikroskop
WO1998044343A3 (de) Verfahren zur erzeugung und zum einsatz von wirbelströmen zur erfassung von magnetischen und elektrischen materialeigenschaften
CA2279598A1 (en) Apparatus for determining properties of an electrically conductive object
KR860002757A (ko) 문자도형의 분할(segmentation) 장치
WO2001069204A3 (en) Methods of investigating corrosion
Sullivan Wheatstone bridge technique for magnetostriction measurements
WO2002095423A3 (de) Vorrichtung zur messung einer b-komponente eines magnetfeldes, magnetfeldsensor und strommesser
AU1576292A (en) Method for measuring mechanical stresses and fatigue conditions in steel
SE9804080L (sv) Elektrisk mätkomponent och användning av densamma
SU1415043A1 (ru) Устройство дл неразрушающего контрол
WO2001097340A3 (en) Apparatus and method for producing an ion channel microprobe
Flanders et al. Contactless magnetoresistance measurements with a rotating sample magnetometer
Jeanneret et al. Contactless measurements of the internal capacitance of a Corbino ring in the quantum Hall regime

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): JP US

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
AK Designated states

Kind code of ref document: A3

Designated state(s): JP US

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 1998929213

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 1998929213

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: JP

Ref document number: 1998541072

Format of ref document f/p: F

WWW Wipo information: withdrawn in national office

Ref document number: 1998929213

Country of ref document: EP