WO1997045874A3 - Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate - Google Patents
Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate Download PDFInfo
- Publication number
- WO1997045874A3 WO1997045874A3 PCT/IB1997/000465 IB9700465W WO9745874A3 WO 1997045874 A3 WO1997045874 A3 WO 1997045874A3 IB 9700465 W IB9700465 W IB 9700465W WO 9745874 A3 WO9745874 A3 WO 9745874A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- oxide layer
- silicon
- silicon layer
- layer
- thin
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P3/00—Waveguides; Transmission lines of the waveguide type
- H01P3/003—Coplanar lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Abstract
A microwave monolithic integrated circuit includes a coplanar waveguide (CPW) formed by a composite silicon structure constituted by a relatively high resistivity substrate, a first oxide layer on the upper surface thereof, a relatively thin silicon layer formed on the surface of the first oxide layer, and a very thin second oxide layer formed on the surface of the thin silicon layer. The silicon layer and the first oxide layer on which it is formed constitutes a silicon-on-insulator or SOI structure. A metallic signal line and ground planes are bonded to the surface of the second oxide layer. The zone of the thin silicon layer which extends between the ground planes is doped with an active impurity to produce high conductivity therein. As a result, the electric component of a quasi-TEM wave traversing the waveguide is substantially restricted to the thin silicon layer and does not penetrate to the underlying bulk silicon substrate. This achieves significantly reduced transmission loss and a quality factor Q in the vicinity of 17 for the CPW. Passive and active circuits may be formed in regions of the thin silicon layer other than those used for the CPW.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP97916616A EP0845157A2 (en) | 1996-05-30 | 1997-04-30 | Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate |
| JP9541896A JPH11510671A (en) | 1996-05-30 | 1997-04-30 | Microwave monolithic integrated circuit with coplanar waveguide with SOI composite substrate |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/655,170 | 1996-05-30 | ||
| US08/655,170 US5986331A (en) | 1996-05-30 | 1996-05-30 | Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1997045874A2 WO1997045874A2 (en) | 1997-12-04 |
| WO1997045874A3 true WO1997045874A3 (en) | 1998-02-12 |
Family
ID=24627805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/IB1997/000465 WO1997045874A2 (en) | 1996-05-30 | 1997-04-30 | Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5986331A (en) |
| EP (1) | EP0845157A2 (en) |
| JP (1) | JPH11510671A (en) |
| WO (1) | WO1997045874A2 (en) |
Families Citing this family (183)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6383849B1 (en) * | 1996-06-29 | 2002-05-07 | Hyundai Electronics Industries Co., Ltd. | Semiconductor device and method for fabricating the same |
| AU1814999A (en) * | 1997-12-15 | 1999-07-19 | Stratedge Corporation | Ceramic microelectronics package with co-planar waveguide feed-through |
| US6388290B1 (en) * | 1998-06-10 | 2002-05-14 | Agere Systems Guardian Corp. | Single crystal silicon on polycrystalline silicon integrated circuits |
| US6498550B1 (en) * | 2000-04-28 | 2002-12-24 | Motorola, Inc. | Filtering device and method |
| FR2812405B1 (en) * | 2000-07-27 | 2003-06-20 | Centre Nat Rech Scient | OPTICAL INTERCONNECTION SYSTEM FOR AN INTEGRATED CIRCUIT MADE ON A SELF SUBSTRATE |
| AU2002222205A1 (en) * | 2000-12-14 | 2002-06-24 | Bookham Technology Plc | Integrated optical devices |
| DE10105725B4 (en) * | 2001-02-08 | 2008-11-13 | Infineon Technologies Ag | Semiconductor chip with a substrate, an integrated circuit and a shielding device |
| US7084058B2 (en) | 2001-04-17 | 2006-08-01 | Micron Technology Inc. | Method of forming low-loss coplanar waveguides |
| US6490379B2 (en) | 2001-05-07 | 2002-12-03 | Corning Incorporated | Electrical transmission frequency of SiOB |
| US6737931B2 (en) | 2002-07-19 | 2004-05-18 | Agilent Technologies, Inc. | Device interconnects and methods of making the same |
| US7155172B2 (en) * | 2002-10-10 | 2006-12-26 | Battelle Memorial Institute | RFID receiver apparatus and method |
| US6988688B2 (en) * | 2003-08-08 | 2006-01-24 | Eastman Kodak Company | Web winding apparatus having traveling, gimbaled cinch roller and winding method |
| JP2005236956A (en) * | 2004-01-20 | 2005-09-02 | Matsushita Electric Ind Co Ltd | Microwave transmission line |
| FR2885735B1 (en) * | 2005-05-10 | 2007-08-03 | St Microelectronics Sa | INTEGRATED CIRCUIT WAVE GUIDE |
| US7586195B2 (en) * | 2006-10-02 | 2009-09-08 | Stmicroelectronics S.A. | Semiconductor device |
| US7969001B2 (en) * | 2008-06-19 | 2011-06-28 | Broadcom Corporation | Method and system for intra-chip waveguide communication |
| US8450846B2 (en) * | 2008-06-19 | 2013-05-28 | Broadcom Corporation | Method and system for communicating via flip-chip die and package waveguides |
| FR2951321B1 (en) * | 2009-10-08 | 2012-03-16 | St Microelectronics Sa | SEMICONDUCTOR DEVICE COMPRISING AN ELECTROMAGNETIC WAVEGUIDE |
| NL1039667C2 (en) * | 2012-06-11 | 2013-12-12 | Purac Biochem Bv | Quantification of lactide amounts in a polymeric matrix. |
| US10009065B2 (en) | 2012-12-05 | 2018-06-26 | At&T Intellectual Property I, L.P. | Backhaul link for distributed antenna system |
| US9113347B2 (en) | 2012-12-05 | 2015-08-18 | At&T Intellectual Property I, Lp | Backhaul link for distributed antenna system |
| US9525524B2 (en) | 2013-05-31 | 2016-12-20 | At&T Intellectual Property I, L.P. | Remote distributed antenna system |
| US9999038B2 (en) | 2013-05-31 | 2018-06-12 | At&T Intellectual Property I, L.P. | Remote distributed antenna system |
| US8897697B1 (en) | 2013-11-06 | 2014-11-25 | At&T Intellectual Property I, Lp | Millimeter-wave surface-wave communications |
| US9209902B2 (en) | 2013-12-10 | 2015-12-08 | At&T Intellectual Property I, L.P. | Quasi-optical coupler |
| US9692101B2 (en) | 2014-08-26 | 2017-06-27 | At&T Intellectual Property I, L.P. | Guided wave couplers for coupling electromagnetic waves between a waveguide surface and a surface of a wire |
| US9768833B2 (en) | 2014-09-15 | 2017-09-19 | At&T Intellectual Property I, L.P. | Method and apparatus for sensing a condition in a transmission medium of electromagnetic waves |
| US10063280B2 (en) | 2014-09-17 | 2018-08-28 | At&T Intellectual Property I, L.P. | Monitoring and mitigating conditions in a communication network |
| US9628854B2 (en) | 2014-09-29 | 2017-04-18 | At&T Intellectual Property I, L.P. | Method and apparatus for distributing content in a communication network |
| US9615269B2 (en) | 2014-10-02 | 2017-04-04 | At&T Intellectual Property I, L.P. | Method and apparatus that provides fault tolerance in a communication network |
| US9685992B2 (en) | 2014-10-03 | 2017-06-20 | At&T Intellectual Property I, L.P. | Circuit panel network and methods thereof |
| US9503189B2 (en) | 2014-10-10 | 2016-11-22 | At&T Intellectual Property I, L.P. | Method and apparatus for arranging communication sessions in a communication system |
| US9762289B2 (en) | 2014-10-14 | 2017-09-12 | At&T Intellectual Property I, L.P. | Method and apparatus for transmitting or receiving signals in a transportation system |
| US9973299B2 (en) | 2014-10-14 | 2018-05-15 | At&T Intellectual Property I, L.P. | Method and apparatus for adjusting a mode of communication in a communication network |
| US9577306B2 (en) | 2014-10-21 | 2017-02-21 | At&T Intellectual Property I, L.P. | Guided-wave transmission device and methods for use therewith |
| US9653770B2 (en) | 2014-10-21 | 2017-05-16 | At&T Intellectual Property I, L.P. | Guided wave coupler, coupling module and methods for use therewith |
| US9627768B2 (en) | 2014-10-21 | 2017-04-18 | At&T Intellectual Property I, L.P. | Guided-wave transmission device with non-fundamental mode propagation and methods for use therewith |
| US9312919B1 (en) | 2014-10-21 | 2016-04-12 | At&T Intellectual Property I, Lp | Transmission device with impairment compensation and methods for use therewith |
| US9769020B2 (en) | 2014-10-21 | 2017-09-19 | At&T Intellectual Property I, L.P. | Method and apparatus for responding to events affecting communications in a communication network |
| US9780834B2 (en) | 2014-10-21 | 2017-10-03 | At&T Intellectual Property I, L.P. | Method and apparatus for transmitting electromagnetic waves |
| US9564947B2 (en) | 2014-10-21 | 2017-02-07 | At&T Intellectual Property I, L.P. | Guided-wave transmission device with diversity and methods for use therewith |
| US9520945B2 (en) | 2014-10-21 | 2016-12-13 | At&T Intellectual Property I, L.P. | Apparatus for providing communication services and methods thereof |
| US9654173B2 (en) | 2014-11-20 | 2017-05-16 | At&T Intellectual Property I, L.P. | Apparatus for powering a communication device and methods thereof |
| US10243784B2 (en) | 2014-11-20 | 2019-03-26 | At&T Intellectual Property I, L.P. | System for generating topology information and methods thereof |
| US9997819B2 (en) | 2015-06-09 | 2018-06-12 | At&T Intellectual Property I, L.P. | Transmission medium and method for facilitating propagation of electromagnetic waves via a core |
| US9680670B2 (en) | 2014-11-20 | 2017-06-13 | At&T Intellectual Property I, L.P. | Transmission device with channel equalization and control and methods for use therewith |
| US9544006B2 (en) | 2014-11-20 | 2017-01-10 | At&T Intellectual Property I, L.P. | Transmission device with mode division multiplexing and methods for use therewith |
| US9461706B1 (en) | 2015-07-31 | 2016-10-04 | At&T Intellectual Property I, Lp | Method and apparatus for exchanging communication signals |
| US9954287B2 (en) | 2014-11-20 | 2018-04-24 | At&T Intellectual Property I, L.P. | Apparatus for converting wireless signals and electromagnetic waves and methods thereof |
| US10009067B2 (en) | 2014-12-04 | 2018-06-26 | At&T Intellectual Property I, L.P. | Method and apparatus for configuring a communication interface |
| US9742462B2 (en) | 2014-12-04 | 2017-08-22 | At&T Intellectual Property I, L.P. | Transmission medium and communication interfaces and methods for use therewith |
| US10340573B2 (en) | 2016-10-26 | 2019-07-02 | At&T Intellectual Property I, L.P. | Launcher with cylindrical coupling device and methods for use therewith |
| US9800327B2 (en) | 2014-11-20 | 2017-10-24 | At&T Intellectual Property I, L.P. | Apparatus for controlling operations of a communication device and methods thereof |
| US10144036B2 (en) | 2015-01-30 | 2018-12-04 | At&T Intellectual Property I, L.P. | Method and apparatus for mitigating interference affecting a propagation of electromagnetic waves guided by a transmission medium |
| US9876570B2 (en) | 2015-02-20 | 2018-01-23 | At&T Intellectual Property I, Lp | Guided-wave transmission device with non-fundamental mode propagation and methods for use therewith |
| US9749013B2 (en) | 2015-03-17 | 2017-08-29 | At&T Intellectual Property I, L.P. | Method and apparatus for reducing attenuation of electromagnetic waves guided by a transmission medium |
| US10224981B2 (en) | 2015-04-24 | 2019-03-05 | At&T Intellectual Property I, Lp | Passive electrical coupling device and methods for use therewith |
| US9705561B2 (en) | 2015-04-24 | 2017-07-11 | At&T Intellectual Property I, L.P. | Directional coupling device and methods for use therewith |
| US9948354B2 (en) | 2015-04-28 | 2018-04-17 | At&T Intellectual Property I, L.P. | Magnetic coupling device with reflective plate and methods for use therewith |
| US9793954B2 (en) | 2015-04-28 | 2017-10-17 | At&T Intellectual Property I, L.P. | Magnetic coupling device and methods for use therewith |
| US9748626B2 (en) | 2015-05-14 | 2017-08-29 | At&T Intellectual Property I, L.P. | Plurality of cables having different cross-sectional shapes which are bundled together to form a transmission medium |
| US9871282B2 (en) | 2015-05-14 | 2018-01-16 | At&T Intellectual Property I, L.P. | At least one transmission medium having a dielectric surface that is covered at least in part by a second dielectric |
| US9490869B1 (en) | 2015-05-14 | 2016-11-08 | At&T Intellectual Property I, L.P. | Transmission medium having multiple cores and methods for use therewith |
| US10679767B2 (en) | 2015-05-15 | 2020-06-09 | At&T Intellectual Property I, L.P. | Transmission medium having a conductive material and methods for use therewith |
| US10650940B2 (en) | 2015-05-15 | 2020-05-12 | At&T Intellectual Property I, L.P. | Transmission medium having a conductive material and methods for use therewith |
| US9917341B2 (en) | 2015-05-27 | 2018-03-13 | At&T Intellectual Property I, L.P. | Apparatus and method for launching electromagnetic waves and for modifying radial dimensions of the propagating electromagnetic waves |
| US10103801B2 (en) | 2015-06-03 | 2018-10-16 | At&T Intellectual Property I, L.P. | Host node device and methods for use therewith |
| US10348391B2 (en) | 2015-06-03 | 2019-07-09 | At&T Intellectual Property I, L.P. | Client node device with frequency conversion and methods for use therewith |
| US9866309B2 (en) | 2015-06-03 | 2018-01-09 | At&T Intellectual Property I, Lp | Host node device and methods for use therewith |
| US10812174B2 (en) | 2015-06-03 | 2020-10-20 | At&T Intellectual Property I, L.P. | Client node device and methods for use therewith |
| US9912381B2 (en) | 2015-06-03 | 2018-03-06 | At&T Intellectual Property I, Lp | Network termination and methods for use therewith |
| US10154493B2 (en) | 2015-06-03 | 2018-12-11 | At&T Intellectual Property I, L.P. | Network termination and methods for use therewith |
| US9913139B2 (en) | 2015-06-09 | 2018-03-06 | At&T Intellectual Property I, L.P. | Signal fingerprinting for authentication of communicating devices |
| US9608692B2 (en) | 2015-06-11 | 2017-03-28 | At&T Intellectual Property I, L.P. | Repeater and methods for use therewith |
| US10142086B2 (en) | 2015-06-11 | 2018-11-27 | At&T Intellectual Property I, L.P. | Repeater and methods for use therewith |
| US9820146B2 (en) | 2015-06-12 | 2017-11-14 | At&T Intellectual Property I, L.P. | Method and apparatus for authentication and identity management of communicating devices |
| US9667317B2 (en) | 2015-06-15 | 2017-05-30 | At&T Intellectual Property I, L.P. | Method and apparatus for providing security using network traffic adjustments |
| US9865911B2 (en) | 2015-06-25 | 2018-01-09 | At&T Intellectual Property I, L.P. | Waveguide system for slot radiating first electromagnetic waves that are combined into a non-fundamental wave mode second electromagnetic wave on a transmission medium |
| US9509415B1 (en) | 2015-06-25 | 2016-11-29 | At&T Intellectual Property I, L.P. | Methods and apparatus for inducing a fundamental wave mode on a transmission medium |
| US9640850B2 (en) | 2015-06-25 | 2017-05-02 | At&T Intellectual Property I, L.P. | Methods and apparatus for inducing a non-fundamental wave mode on a transmission medium |
| US10320586B2 (en) | 2015-07-14 | 2019-06-11 | At&T Intellectual Property I, L.P. | Apparatus and methods for generating non-interfering electromagnetic waves on an insulated transmission medium |
| US9628116B2 (en) | 2015-07-14 | 2017-04-18 | At&T Intellectual Property I, L.P. | Apparatus and methods for transmitting wireless signals |
| US9882257B2 (en) | 2015-07-14 | 2018-01-30 | At&T Intellectual Property I, L.P. | Method and apparatus for launching a wave mode that mitigates interference |
| US10148016B2 (en) | 2015-07-14 | 2018-12-04 | At&T Intellectual Property I, L.P. | Apparatus and methods for communicating utilizing an antenna array |
| US10205655B2 (en) | 2015-07-14 | 2019-02-12 | At&T Intellectual Property I, L.P. | Apparatus and methods for communicating utilizing an antenna array and multiple communication paths |
| US10044409B2 (en) | 2015-07-14 | 2018-08-07 | At&T Intellectual Property I, L.P. | Transmission medium and methods for use therewith |
| US10033108B2 (en) | 2015-07-14 | 2018-07-24 | At&T Intellectual Property I, L.P. | Apparatus and methods for generating an electromagnetic wave having a wave mode that mitigates interference |
| US9853342B2 (en) | 2015-07-14 | 2017-12-26 | At&T Intellectual Property I, L.P. | Dielectric transmission medium connector and methods for use therewith |
| US9722318B2 (en) | 2015-07-14 | 2017-08-01 | At&T Intellectual Property I, L.P. | Method and apparatus for coupling an antenna to a device |
| US9836957B2 (en) | 2015-07-14 | 2017-12-05 | At&T Intellectual Property I, L.P. | Method and apparatus for communicating with premises equipment |
| US10033107B2 (en) | 2015-07-14 | 2018-07-24 | At&T Intellectual Property I, L.P. | Method and apparatus for coupling an antenna to a device |
| US9847566B2 (en) | 2015-07-14 | 2017-12-19 | At&T Intellectual Property I, L.P. | Method and apparatus for adjusting a field of a signal to mitigate interference |
| US10341142B2 (en) | 2015-07-14 | 2019-07-02 | At&T Intellectual Property I, L.P. | Apparatus and methods for generating non-interfering electromagnetic waves on an uninsulated conductor |
| US10170840B2 (en) | 2015-07-14 | 2019-01-01 | At&T Intellectual Property I, L.P. | Apparatus and methods for sending or receiving electromagnetic signals |
| US9608740B2 (en) | 2015-07-15 | 2017-03-28 | At&T Intellectual Property I, L.P. | Method and apparatus for launching a wave mode that mitigates interference |
| US10090606B2 (en) | 2015-07-15 | 2018-10-02 | At&T Intellectual Property I, L.P. | Antenna system with dielectric array and methods for use therewith |
| US9793951B2 (en) | 2015-07-15 | 2017-10-17 | At&T Intellectual Property I, L.P. | Method and apparatus for launching a wave mode that mitigates interference |
| US9912027B2 (en) | 2015-07-23 | 2018-03-06 | At&T Intellectual Property I, L.P. | Method and apparatus for exchanging communication signals |
| US9871283B2 (en) | 2015-07-23 | 2018-01-16 | At&T Intellectual Property I, Lp | Transmission medium having a dielectric core comprised of plural members connected by a ball and socket configuration |
| US9948333B2 (en) | 2015-07-23 | 2018-04-17 | At&T Intellectual Property I, L.P. | Method and apparatus for wireless communications to mitigate interference |
| US9749053B2 (en) | 2015-07-23 | 2017-08-29 | At&T Intellectual Property I, L.P. | Node device, repeater and methods for use therewith |
| US10784670B2 (en) | 2015-07-23 | 2020-09-22 | At&T Intellectual Property I, L.P. | Antenna support for aligning an antenna |
| US9735833B2 (en) | 2015-07-31 | 2017-08-15 | At&T Intellectual Property I, L.P. | Method and apparatus for communications management in a neighborhood network |
| US10020587B2 (en) | 2015-07-31 | 2018-07-10 | At&T Intellectual Property I, L.P. | Radial antenna and methods for use therewith |
| US9967173B2 (en) | 2015-07-31 | 2018-05-08 | At&T Intellectual Property I, L.P. | Method and apparatus for authentication and identity management of communicating devices |
| US9904535B2 (en) | 2015-09-14 | 2018-02-27 | At&T Intellectual Property I, L.P. | Method and apparatus for distributing software |
| US9705571B2 (en) | 2015-09-16 | 2017-07-11 | At&T Intellectual Property I, L.P. | Method and apparatus for use with a radio distributed antenna system |
| US10079661B2 (en) | 2015-09-16 | 2018-09-18 | At&T Intellectual Property I, L.P. | Method and apparatus for use with a radio distributed antenna system having a clock reference |
| US10009063B2 (en) | 2015-09-16 | 2018-06-26 | At&T Intellectual Property I, L.P. | Method and apparatus for use with a radio distributed antenna system having an out-of-band reference signal |
| US10051629B2 (en) | 2015-09-16 | 2018-08-14 | At&T Intellectual Property I, L.P. | Method and apparatus for use with a radio distributed antenna system having an in-band reference signal |
| US10136434B2 (en) | 2015-09-16 | 2018-11-20 | At&T Intellectual Property I, L.P. | Method and apparatus for use with a radio distributed antenna system having an ultra-wideband control channel |
| US10009901B2 (en) | 2015-09-16 | 2018-06-26 | At&T Intellectual Property I, L.P. | Method, apparatus, and computer-readable storage medium for managing utilization of wireless resources between base stations |
| US9769128B2 (en) | 2015-09-28 | 2017-09-19 | At&T Intellectual Property I, L.P. | Method and apparatus for encryption of communications over a network |
| US9729197B2 (en) | 2015-10-01 | 2017-08-08 | At&T Intellectual Property I, L.P. | Method and apparatus for communicating network management traffic over a network |
| US10074890B2 (en) | 2015-10-02 | 2018-09-11 | At&T Intellectual Property I, L.P. | Communication device and antenna with integrated light assembly |
| US9882277B2 (en) | 2015-10-02 | 2018-01-30 | At&T Intellectual Property I, Lp | Communication device and antenna assembly with actuated gimbal mount |
| US9876264B2 (en) | 2015-10-02 | 2018-01-23 | At&T Intellectual Property I, Lp | Communication system, guided wave switch and methods for use therewith |
| US10051483B2 (en) | 2015-10-16 | 2018-08-14 | At&T Intellectual Property I, L.P. | Method and apparatus for directing wireless signals |
| US10355367B2 (en) | 2015-10-16 | 2019-07-16 | At&T Intellectual Property I, L.P. | Antenna structure for exchanging wireless signals |
| US10665942B2 (en) | 2015-10-16 | 2020-05-26 | At&T Intellectual Property I, L.P. | Method and apparatus for adjusting wireless communications |
| US9912419B1 (en) | 2016-08-24 | 2018-03-06 | At&T Intellectual Property I, L.P. | Method and apparatus for managing a fault in a distributed antenna system |
| US9860075B1 (en) | 2016-08-26 | 2018-01-02 | At&T Intellectual Property I, L.P. | Method and communication node for broadband distribution |
| US10291311B2 (en) | 2016-09-09 | 2019-05-14 | At&T Intellectual Property I, L.P. | Method and apparatus for mitigating a fault in a distributed antenna system |
| US11032819B2 (en) | 2016-09-15 | 2021-06-08 | At&T Intellectual Property I, L.P. | Method and apparatus for use with a radio distributed antenna system having a control channel reference signal |
| US10135147B2 (en) | 2016-10-18 | 2018-11-20 | At&T Intellectual Property I, L.P. | Apparatus and methods for launching guided waves via an antenna |
| US10340600B2 (en) | 2016-10-18 | 2019-07-02 | At&T Intellectual Property I, L.P. | Apparatus and methods for launching guided waves via plural waveguide systems |
| US10135146B2 (en) | 2016-10-18 | 2018-11-20 | At&T Intellectual Property I, L.P. | Apparatus and methods for launching guided waves via circuits |
| US10374316B2 (en) | 2016-10-21 | 2019-08-06 | At&T Intellectual Property I, L.P. | System and dielectric antenna with non-uniform dielectric |
| US9876605B1 (en) | 2016-10-21 | 2018-01-23 | At&T Intellectual Property I, L.P. | Launcher and coupling system to support desired guided wave mode |
| US9991580B2 (en) | 2016-10-21 | 2018-06-05 | At&T Intellectual Property I, L.P. | Launcher and coupling system for guided wave mode cancellation |
| US10811767B2 (en) | 2016-10-21 | 2020-10-20 | At&T Intellectual Property I, L.P. | System and dielectric antenna with convex dielectric radome |
| US10312567B2 (en) | 2016-10-26 | 2019-06-04 | At&T Intellectual Property I, L.P. | Launcher with planar strip antenna and methods for use therewith |
| US10498044B2 (en) | 2016-11-03 | 2019-12-03 | At&T Intellectual Property I, L.P. | Apparatus for configuring a surface of an antenna |
| US10225025B2 (en) | 2016-11-03 | 2019-03-05 | At&T Intellectual Property I, L.P. | Method and apparatus for detecting a fault in a communication system |
| US10224634B2 (en) | 2016-11-03 | 2019-03-05 | At&T Intellectual Property I, L.P. | Methods and apparatus for adjusting an operational characteristic of an antenna |
| US10291334B2 (en) | 2016-11-03 | 2019-05-14 | At&T Intellectual Property I, L.P. | System for detecting a fault in a communication system |
| US10178445B2 (en) | 2016-11-23 | 2019-01-08 | At&T Intellectual Property I, L.P. | Methods, devices, and systems for load balancing between a plurality of waveguides |
| US10340601B2 (en) | 2016-11-23 | 2019-07-02 | At&T Intellectual Property I, L.P. | Multi-antenna system and methods for use therewith |
| US10090594B2 (en) | 2016-11-23 | 2018-10-02 | At&T Intellectual Property I, L.P. | Antenna system having structural configurations for assembly |
| US10535928B2 (en) | 2016-11-23 | 2020-01-14 | At&T Intellectual Property I, L.P. | Antenna system and methods for use therewith |
| US10340603B2 (en) | 2016-11-23 | 2019-07-02 | At&T Intellectual Property I, L.P. | Antenna system having shielded structural configurations for assembly |
| US10361489B2 (en) | 2016-12-01 | 2019-07-23 | At&T Intellectual Property I, L.P. | Dielectric dish antenna system and methods for use therewith |
| US10305190B2 (en) | 2016-12-01 | 2019-05-28 | At&T Intellectual Property I, L.P. | Reflecting dielectric antenna system and methods for use therewith |
| US10637149B2 (en) | 2016-12-06 | 2020-04-28 | At&T Intellectual Property I, L.P. | Injection molded dielectric antenna and methods for use therewith |
| US9927517B1 (en) | 2016-12-06 | 2018-03-27 | At&T Intellectual Property I, L.P. | Apparatus and methods for sensing rainfall |
| US10020844B2 (en) | 2016-12-06 | 2018-07-10 | T&T Intellectual Property I, L.P. | Method and apparatus for broadcast communication via guided waves |
| US10694379B2 (en) | 2016-12-06 | 2020-06-23 | At&T Intellectual Property I, L.P. | Waveguide system with device-based authentication and methods for use therewith |
| US10135145B2 (en) | 2016-12-06 | 2018-11-20 | At&T Intellectual Property I, L.P. | Apparatus and methods for generating an electromagnetic wave along a transmission medium |
| US10439675B2 (en) | 2016-12-06 | 2019-10-08 | At&T Intellectual Property I, L.P. | Method and apparatus for repeating guided wave communication signals |
| US10326494B2 (en) | 2016-12-06 | 2019-06-18 | At&T Intellectual Property I, L.P. | Apparatus for measurement de-embedding and methods for use therewith |
| US10819035B2 (en) | 2016-12-06 | 2020-10-27 | At&T Intellectual Property I, L.P. | Launcher with helical antenna and methods for use therewith |
| US10382976B2 (en) | 2016-12-06 | 2019-08-13 | At&T Intellectual Property I, L.P. | Method and apparatus for managing wireless communications based on communication paths and network device positions |
| US10727599B2 (en) | 2016-12-06 | 2020-07-28 | At&T Intellectual Property I, L.P. | Launcher with slot antenna and methods for use therewith |
| US10755542B2 (en) | 2016-12-06 | 2020-08-25 | At&T Intellectual Property I, L.P. | Method and apparatus for surveillance via guided wave communication |
| US10389029B2 (en) | 2016-12-07 | 2019-08-20 | At&T Intellectual Property I, L.P. | Multi-feed dielectric antenna system with core selection and methods for use therewith |
| US10168695B2 (en) | 2016-12-07 | 2019-01-01 | At&T Intellectual Property I, L.P. | Method and apparatus for controlling an unmanned aircraft |
| US10139820B2 (en) | 2016-12-07 | 2018-11-27 | At&T Intellectual Property I, L.P. | Method and apparatus for deploying equipment of a communication system |
| US10243270B2 (en) | 2016-12-07 | 2019-03-26 | At&T Intellectual Property I, L.P. | Beam adaptive multi-feed dielectric antenna system and methods for use therewith |
| US9893795B1 (en) | 2016-12-07 | 2018-02-13 | At&T Intellectual Property I, Lp | Method and repeater for broadband distribution |
| US10446936B2 (en) | 2016-12-07 | 2019-10-15 | At&T Intellectual Property I, L.P. | Multi-feed dielectric antenna system and methods for use therewith |
| US10359749B2 (en) | 2016-12-07 | 2019-07-23 | At&T Intellectual Property I, L.P. | Method and apparatus for utilities management via guided wave communication |
| US10027397B2 (en) | 2016-12-07 | 2018-07-17 | At&T Intellectual Property I, L.P. | Distributed antenna system and methods for use therewith |
| US10547348B2 (en) | 2016-12-07 | 2020-01-28 | At&T Intellectual Property I, L.P. | Method and apparatus for switching transmission mediums in a communication system |
| US10938108B2 (en) | 2016-12-08 | 2021-03-02 | At&T Intellectual Property I, L.P. | Frequency selective multi-feed dielectric antenna system and methods for use therewith |
| US10326689B2 (en) | 2016-12-08 | 2019-06-18 | At&T Intellectual Property I, L.P. | Method and system for providing alternative communication paths |
| US10916969B2 (en) | 2016-12-08 | 2021-02-09 | At&T Intellectual Property I, L.P. | Method and apparatus for providing power using an inductive coupling |
| US10530505B2 (en) | 2016-12-08 | 2020-01-07 | At&T Intellectual Property I, L.P. | Apparatus and methods for launching electromagnetic waves along a transmission medium |
| US9911020B1 (en) | 2016-12-08 | 2018-03-06 | At&T Intellectual Property I, L.P. | Method and apparatus for tracking via a radio frequency identification device |
| US10777873B2 (en) | 2016-12-08 | 2020-09-15 | At&T Intellectual Property I, L.P. | Method and apparatus for mounting network devices |
| US10103422B2 (en) | 2016-12-08 | 2018-10-16 | At&T Intellectual Property I, L.P. | Method and apparatus for mounting network devices |
| US10389037B2 (en) | 2016-12-08 | 2019-08-20 | At&T Intellectual Property I, L.P. | Apparatus and methods for selecting sections of an antenna array and use therewith |
| US10411356B2 (en) | 2016-12-08 | 2019-09-10 | At&T Intellectual Property I, L.P. | Apparatus and methods for selectively targeting communication devices with an antenna array |
| US9998870B1 (en) | 2016-12-08 | 2018-06-12 | At&T Intellectual Property I, L.P. | Method and apparatus for proximity sensing |
| US10069535B2 (en) | 2016-12-08 | 2018-09-04 | At&T Intellectual Property I, L.P. | Apparatus and methods for launching electromagnetic waves having a certain electric field structure |
| US10601494B2 (en) | 2016-12-08 | 2020-03-24 | At&T Intellectual Property I, L.P. | Dual-band communication device and method for use therewith |
| US10340983B2 (en) | 2016-12-09 | 2019-07-02 | At&T Intellectual Property I, L.P. | Method and apparatus for surveying remote sites via guided wave communications |
| US10264586B2 (en) | 2016-12-09 | 2019-04-16 | At&T Mobility Ii Llc | Cloud-based packet controller and methods for use therewith |
| US9838896B1 (en) | 2016-12-09 | 2017-12-05 | At&T Intellectual Property I, L.P. | Method and apparatus for assessing network coverage |
| US9973940B1 (en) | 2017-02-27 | 2018-05-15 | At&T Intellectual Property I, L.P. | Apparatus and methods for dynamic impedance matching of a guided wave launcher |
| US10298293B2 (en) | 2017-03-13 | 2019-05-21 | At&T Intellectual Property I, L.P. | Apparatus of communication utilizing wireless network devices |
| CN206602182U (en) * | 2017-04-06 | 2017-10-31 | 京东方科技集团股份有限公司 | A kind of antenna structure and communication apparatus |
| EP3518280B1 (en) * | 2018-01-25 | 2020-11-04 | Murata Manufacturing Co., Ltd. | Electronic product having embedded porous dielectric and method of manufacture |
| WO2023212325A1 (en) * | 2022-04-29 | 2023-11-02 | Cornell University | Microwave annealer for semiconductor wafers |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0624223B2 (en) * | 1983-12-09 | 1994-03-30 | 株式会社東芝 | Microwave integrated circuit device |
| US4600907A (en) * | 1985-03-07 | 1986-07-15 | Tektronix, Inc. | Coplanar microstrap waveguide interconnector and method of interconnection |
| GB8613314D0 (en) * | 1986-06-02 | 1986-07-09 | Era Patents Ltd | Microwave apparatus |
| US5267020A (en) * | 1987-10-06 | 1993-11-30 | Stanford University | Gallium arsenide monolithically integrated sampling head using equivalent time sampling having a bandwidth greater than 100 ghz |
| US5014018A (en) * | 1987-10-06 | 1991-05-07 | Stanford University | Nonlinear transmission line for generation of picosecond electrical transients |
| US5449953A (en) * | 1990-09-14 | 1995-09-12 | Westinghouse Electric Corporation | Monolithic microwave integrated circuit on high resistivity silicon |
| US5604360A (en) * | 1992-12-04 | 1997-02-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a plurality of thin film transistors at least some of which have a crystalline silicon film crystal-grown substantially in parallel to the surface of a substrate for the transistor |
| US5625729A (en) * | 1994-08-12 | 1997-04-29 | Brown; Thomas G. | Optoelectronic device for coupling between an external optical wave and a local optical wave for optical modulators and detectors |
| US5481232A (en) * | 1995-04-19 | 1996-01-02 | New Jersey Institute Of Technology | Optically controlled multilayer coplanar waveguide phase shifter |
| US5559912A (en) * | 1995-09-15 | 1996-09-24 | International Business Machines Corporation | Wavelength-selective devices using silicon-on-insulator |
-
1996
- 1996-05-30 US US08/655,170 patent/US5986331A/en not_active Expired - Fee Related
-
1997
- 1997-04-30 WO PCT/IB1997/000465 patent/WO1997045874A2/en not_active Application Discontinuation
- 1997-04-30 JP JP9541896A patent/JPH11510671A/en active Pending
- 1997-04-30 EP EP97916616A patent/EP0845157A2/en not_active Withdrawn
Non-Patent Citations (2)
| Title |
|---|
| IEEE ELECTRON DEVICE LETTERS, Volume 12, No. 1, January 1991, ANTHONY L. CAVIGLIA, R.C. POTTER, L.J. WEST, "Microwave Preformance of SOI n-MOSFET's and Coplanar Waveguides", pages 26-27. * |
| IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, Volume 38, No. 12, December 1990, KE WU, RUEDIGER VAHLDIECK, "Propagation Characteristics of MIS Transmission Lines with Inhomogeneous Doping Profile", pages 1872-1878. * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11510671A (en) | 1999-09-14 |
| WO1997045874A2 (en) | 1997-12-04 |
| US5986331A (en) | 1999-11-16 |
| EP0845157A2 (en) | 1998-06-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO1997045874A3 (en) | Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate | |
| KR100420893B1 (en) | Microwave Integrated Circuit Passive Device Structure and Method for Reducing Signal Propagation Loss | |
| US5194833A (en) | Airbridge compensated microwave conductors | |
| US6639487B1 (en) | Wideband impedance coupler | |
| EP0845831B1 (en) | A millimeter waveguide and a circuit apparatus using the same | |
| EP0963001A3 (en) | Millimeter wave module and radio apparatus | |
| US5008639A (en) | Coupler circuit | |
| US5225797A (en) | Dielectric waveguide-to-coplanar transmission line transitions | |
| US5777528A (en) | Mode suppressing coplanar waveguide transition and method | |
| WO1996013858A3 (en) | Integrated microwave semiconductor device with active and passive components | |
| US5629654A (en) | Coplanar waveguide coupler | |
| JP3303226B2 (en) | Flip chip mounting structure | |
| JPH03148852A (en) | Semiconductor device | |
| WO1997042654A3 (en) | A method of making a monolithic microwave circuit with thick conductors | |
| US6388331B1 (en) | Bond pad having reduced capacitance and method for reducing capacitance of a bond pad | |
| US5777531A (en) | Semiconductor coplanar waveguide phase shifter | |
| US5773887A (en) | High frequency semiconductor component | |
| JPS644361B2 (en) | ||
| Baine et al. | Cross-talk suppression in SOI substrates | |
| Wang et al. | Finite Ground Coplanar lines on CMOS grade silicon with a thick embedded silicon oxide layer using micromachining techniques | |
| JPH0529809A (en) | Transmission line | |
| US7345326B2 (en) | Electric signal transmission line | |
| JPH07283340A (en) | Package for mounting semiconductor chip and semiconductor device with package | |
| Johansson et al. | High frequency losses in transmission lines made on SIMOX, bulk silicon and depleted silicon/silicon structures formed by wafer bonding | |
| JPH09139605A (en) | Resonance circuit device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AK | Designated states |
Kind code of ref document: A2 Designated state(s): JP |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 1997916616 Country of ref document: EP |
|
| ENP | Entry into the national phase |
Ref country code: JP Ref document number: 1997 541896 Kind code of ref document: A Format of ref document f/p: F |
|
| AK | Designated states |
Kind code of ref document: A3 Designated state(s): JP |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A3 Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
| WWP | Wipo information: published in national office |
Ref document number: 1997916616 Country of ref document: EP |
|
| WWW | Wipo information: withdrawn in national office |
Ref document number: 1997916616 Country of ref document: EP |