WO1997045156A3 - Systemes et procedes de chauffage et d'ablation des tissus utilisant des structures d'electrodes poreuses - Google Patents

Systemes et procedes de chauffage et d'ablation des tissus utilisant des structures d'electrodes poreuses Download PDF

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Publication number
WO1997045156A3
WO1997045156A3 PCT/US1997/001177 US9701177W WO9745156A3 WO 1997045156 A3 WO1997045156 A3 WO 1997045156A3 US 9701177 W US9701177 W US 9701177W WO 9745156 A3 WO9745156 A3 WO 9745156A3
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WO
WIPO (PCT)
Prior art keywords
crystal structure
crystal
methods
electrode structures
porous electrode
Prior art date
Application number
PCT/US1997/001177
Other languages
English (en)
Other versions
WO1997045156A2 (fr
WO1997045156A9 (fr
Inventor
David K Swanson
Dorin Panescu
James G Whayne
Patrick M Owens
Sidney D Fleischman
Russell B Thompson
Jerome Jackson
Original Assignee
Ep Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/644,605 external-priority patent/US5868736A/en
Priority claimed from US08/631,252 external-priority patent/US5797903A/en
Priority claimed from US08/631,074 external-priority patent/US6071278A/en
Priority claimed from US08/631,356 external-priority patent/US5840076A/en
Priority claimed from US08/634,334 external-priority patent/US5830213A/en
Priority claimed from US08/631,575 external-priority patent/US5961513A/en
Priority claimed from US08/631,577 external-priority patent/US5879348A/en
Priority claimed from US08/634,338 external-priority patent/US5846239A/en
Priority to JP53838397A priority Critical patent/JP4361136B2/ja
Application filed by Ep Technologies filed Critical Ep Technologies
Priority to CA002243481A priority patent/CA2243481C/fr
Priority to EP97944275A priority patent/EP0975386A4/fr
Publication of WO1997045156A2 publication Critical patent/WO1997045156A2/fr
Publication of WO1997045156A9 publication Critical patent/WO1997045156A9/fr
Publication of WO1997045156A3 publication Critical patent/WO1997045156A3/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/12—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by passing a current through the tissue to be heated, e.g. high-frequency current
    • A61B18/14—Probes or electrodes therefor
    • A61B18/1492—Probes or electrodes therefor having a flexible, catheter-like structure, e.g. for heart ablation
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00053—Mechanical features of the instrument of device
    • A61B2018/00059—Material properties
    • A61B2018/00065—Material properties porous
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00053—Mechanical features of the instrument of device
    • A61B2018/00059—Material properties
    • A61B2018/00071—Electrical conductivity
    • A61B2018/00083—Electrical conductivity low, i.e. electrically insulating
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00053—Mechanical features of the instrument of device
    • A61B2018/00059—Material properties
    • A61B2018/00089—Thermal conductivity
    • A61B2018/00095—Thermal conductivity high, i.e. heat conducting
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00053—Mechanical features of the instrument of device
    • A61B2018/00107—Coatings on the energy applicator
    • A61B2018/00113—Coatings on the energy applicator with foam
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00053—Mechanical features of the instrument of device
    • A61B2018/00107—Coatings on the energy applicator
    • A61B2018/00148—Coatings on the energy applicator with metal
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00053—Mechanical features of the instrument of device
    • A61B2018/00214—Expandable means emitting energy, e.g. by elements carried thereon
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00053—Mechanical features of the instrument of device
    • A61B2018/00214—Expandable means emitting energy, e.g. by elements carried thereon
    • A61B2018/0022—Balloons
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00053—Mechanical features of the instrument of device
    • A61B2018/00214—Expandable means emitting energy, e.g. by elements carried thereon
    • A61B2018/00267—Expandable means emitting energy, e.g. by elements carried thereon having a basket shaped structure
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00636—Sensing and controlling the application of energy
    • A61B2018/00696—Controlled or regulated parameters
    • A61B2018/00761—Duration
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00636—Sensing and controlling the application of energy
    • A61B2018/00773—Sensed parameters
    • A61B2018/00839—Bioelectrical parameters, e.g. ECG, EEG
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00636—Sensing and controlling the application of energy
    • A61B2018/00773—Sensed parameters
    • A61B2018/00886—Duration
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/12—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by passing a current through the tissue to be heated, e.g. high-frequency current
    • A61B18/1206—Generators therefor
    • A61B2018/1246—Generators therefor characterised by the output polarity
    • A61B2018/1253—Generators therefor characterised by the output polarity monopolar
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/12—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by passing a current through the tissue to be heated, e.g. high-frequency current
    • A61B18/14—Probes or electrodes therefor
    • A61B2018/1467—Probes or electrodes therefor using more than two electrodes on a single probe
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/12—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by passing a current through the tissue to be heated, e.g. high-frequency current
    • A61B18/14—Probes or electrodes therefor
    • A61B2018/1472—Probes or electrodes therefor for use with liquid electrolyte, e.g. virtual electrodes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2218/00—Details of surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2218/001—Details of surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body having means for irrigation and/or aspiration of substances to and/or from the surgical site
    • A61B2218/002—Irrigation

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Surgery (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Medical Informatics (AREA)
  • Otolaryngology (AREA)
  • Physics & Mathematics (AREA)
  • Cardiology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Molecular Biology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Surgical Instruments (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

La présente invention concerne des structures d'électrodes poreuses destinées à des systèmes et des procédés de chauffage et d'ablation des tissus permettant à l'énergie électrique de transport de se produire sensiblement sans perfusion de liquide.
PCT/US1997/001177 1996-01-19 1997-01-17 Systemes et procedes de chauffage et d'ablation des tissus utilisant des structures d'electrodes poreuses WO1997045156A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP97944275A EP0975386A4 (fr) 1996-01-19 1997-01-17 Systemes et procedes de chauffage et d'ablation des tissus utilisant des structures d'electrodes poreuses
CA002243481A CA2243481C (fr) 1996-01-19 1997-01-17 Systemes et procedes de chauffage et d'ablation des tissus utilisant des structures d'electrodes poreuses
JP53838397A JP4361136B2 (ja) 1996-01-19 1997-01-17 多孔質電極構造体を利用した組織の加熱切除システムと方法

Applications Claiming Priority (26)

Application Number Priority Date Filing Date Title
US1035496P 1996-01-19 1996-01-19
US1022596P 1996-01-19 1996-01-19
US1022396P 1996-01-19 1996-01-19
US60/010,354 1996-01-19
US60/010,225 1996-01-19
US60/010,223 1996-01-19
US63433996A 1996-04-12 1996-04-12
US63157396A 1996-04-12 1996-04-12
US08/631,573 1996-04-12
US08/634,338 US5846239A (en) 1996-04-12 1996-04-12 Tissue heating and ablation systems and methods using segmented porous electrode structures
US08/631,577 1996-04-12
US08/634,334 1996-04-12
US08/644,605 US5868736A (en) 1996-04-12 1996-04-12 Systems and methods to control tissue heating or ablation with porous electrode structures
US08/644,605 1996-04-12
US08/631,577 US5879348A (en) 1996-04-12 1996-04-12 Electrode structures formed from flexible, porous, or woven materials
US08/631,575 US5961513A (en) 1996-01-19 1996-04-12 Tissue heating and ablation systems and methods using porous electrode structures
US08/631,356 1996-04-12
US631,252 1996-04-12
US08/631,575 1996-04-12
US08/634,334 US5830213A (en) 1996-04-12 1996-04-12 Systems for heating and ablating tissue using multifunctional electrode structures
US08/631,356 US5840076A (en) 1996-04-12 1996-04-12 Tissue heating and ablation systems and methods using electrode structures with distally oriented porous regions
US08/631,074 1996-04-12
US08/634,338 1996-04-12
US08/631,074 US6071278A (en) 1996-02-28 1996-04-12 Tissue heating and ablation systems and methods using porous electrode structures with specified electrical resistivities
US08/634,339 1996-04-12
US08/631,252 US5797903A (en) 1996-04-12 1996-04-12 Tissue heating and ablation systems and methods using porous electrode structures with electrically conductive surfaces

Publications (3)

Publication Number Publication Date
WO1997045156A2 WO1997045156A2 (fr) 1997-12-04
WO1997045156A9 WO1997045156A9 (fr) 1998-03-12
WO1997045156A3 true WO1997045156A3 (fr) 2004-10-21

Family

ID=27584410

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/001177 WO1997045156A2 (fr) 1996-01-19 1997-01-17 Systemes et procedes de chauffage et d'ablation des tissus utilisant des structures d'electrodes poreuses

Country Status (2)

Country Link
EP (1) EP0975386A4 (fr)
WO (1) WO1997045156A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8932208B2 (en) 2005-05-26 2015-01-13 Maquet Cardiovascular Llc Apparatus and methods for performing minimally-invasive surgical procedures

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7052493B2 (en) 1996-10-22 2006-05-30 Epicor Medical, Inc. Methods and devices for ablation
US6500174B1 (en) * 1997-07-08 2002-12-31 Atrionix, Inc. Circumferential ablation device assembly and methods of use and manufacture providing an ablative circumferential band along an expandable member
US6097976A (en) * 1998-02-27 2000-08-01 Ep Technologies, Inc. Catheter distal end assemblies with bonded surface coatings
US6522930B1 (en) 1998-05-06 2003-02-18 Atrionix, Inc. Irrigated ablation device assembly
US6527767B2 (en) 1998-05-20 2003-03-04 New England Medical Center Cardiac ablation system and method for treatment of cardiac arrhythmias and transmyocardial revascularization
US6475179B1 (en) 2000-11-10 2002-11-05 New England Medical Center Tissue folding device for tissue ablation, and method thereof
AU2003209287A1 (en) 2002-01-15 2003-07-30 The Regents Of The University Of California System and method providing directional ultrasound therapy to skeletal joints
EP1503685B1 (fr) 2002-01-23 2012-10-31 The Regents of The University of California Appareil de traitement thermo-implantable
US7756583B2 (en) 2002-04-08 2010-07-13 Ardian, Inc. Methods and apparatus for intravascularly-induced neuromodulation
US8347891B2 (en) 2002-04-08 2013-01-08 Medtronic Ardian Luxembourg S.A.R.L. Methods and apparatus for performing a non-continuous circumferential treatment of a body lumen
CA2938411C (fr) 2003-09-12 2019-03-05 Minnow Medical, Llc Remodelage excentrique et/ou ablation d'une matiere atherosclereuse
US8396548B2 (en) 2008-11-14 2013-03-12 Vessix Vascular, Inc. Selective drug delivery in a lumen
US10154792B2 (en) 2005-03-01 2018-12-18 Checkpoint Surgical, Inc. Stimulation device adapter
CN101511292B (zh) 2005-03-28 2011-04-06 明诺医学有限公司 用于选择性地治疗动脉粥样硬化和其他目标组织的内腔电组织表征和调谐射频能量
AU2007310986B2 (en) 2006-10-18 2013-07-04 Boston Scientific Scimed, Inc. Inducing desirable temperature effects on body tissue
EP2455034B1 (fr) 2006-10-18 2017-07-19 Vessix Vascular, Inc. Système pour induire des effets de température souhaitables sur les tissus corporels
EP2076193A4 (fr) 2006-10-18 2010-02-03 Minnow Medical Inc Rayonnement radiofréquence accordé et caractérisation électrique des tissus pour traitement sélectif de tissus cibles
US8496653B2 (en) 2007-04-23 2013-07-30 Boston Scientific Scimed, Inc. Thrombus removal
JP2010540160A (ja) 2007-10-05 2010-12-24 マッケ カーディオバスキュラー，エルエルシー 最小限に侵襲的な外科的処置のための装置および方法
CN102271603A (zh) 2008-11-17 2011-12-07 明诺医学股份有限公司 得知或未得知组织形态的选择性能量积累
WO2010093603A1 (fr) 2009-02-11 2010-08-19 Boston Scientific Scimed, Inc. Dispositifs de cathéters d'ablation isolés et procédés d'utilisation
US8551096B2 (en) 2009-05-13 2013-10-08 Boston Scientific Scimed, Inc. Directional delivery of energy and bioactives
KR20130108067A (ko) 2010-04-09 2013-10-02 베식스 바스큘라 인코포레이티드 조직 치료를 위한 발전 및 제어 장치
CN103517731B (zh) 2011-04-08 2016-08-31 柯惠有限合伙公司 用于去除肾交感神经和离子电渗式药物传递的离子电渗式药物传递系统和方法
WO2013040201A2 (fr) 2011-09-14 2013-03-21 Boston Scientific Scimed, Inc. Dispositif d'ablation ayant de multiples modes d'ablation
WO2013040297A1 (fr) 2011-09-14 2013-03-21 Boston Scientific Scimed, Inc. Dispositif d'ablation équipé d'un ballonnet à conductivité ionique
CN104039257A (zh) 2012-01-10 2014-09-10 波士顿科学医学有限公司 电生理学系统
US8945015B2 (en) 2012-01-31 2015-02-03 Koninklijke Philips N.V. Ablation probe with fluid-based acoustic coupling for ultrasonic tissue imaging and treatment
US10709490B2 (en) 2014-05-07 2020-07-14 Medtronic Ardian Luxembourg S.A.R.L. Catheter assemblies comprising a direct heating element for renal neuromodulation and associated systems and methods
JP2017529169A (ja) 2014-10-13 2017-10-05 ボストン サイエンティフィック サイムド，インコーポレイテッドＢｏｓｔｏｎ Ｓｃｉｅｎｔｉｆｉｃ Ｓｃｉｍｅｄ，Ｉｎｃ． ミニ電極を用いた組織の診断および治療
US10603105B2 (en) 2014-10-24 2020-03-31 Boston Scientific Scimed Inc Medical devices with a flexible electrode assembly coupled to an ablation tip
EP3232969A1 (fr) 2014-12-18 2017-10-25 Boston Scientific Scimed Inc. Analyse de morphologie en temps réel pour évaluation de lésion
US10034707B2 (en) 2014-12-30 2018-07-31 Biosense Webster (Israel) Ltd. Catheter with irrigated tip electrode with porous substrate and high density surface micro-electrodes

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5499971A (en) * 1990-06-15 1996-03-19 Cortrak Medical, Inc. Method for iontophoretically delivering drug adjacent to a heart
US5562720A (en) * 1992-05-01 1996-10-08 Vesta Medical, Inc. Bipolar/monopolar endometrial ablation device and method
US5569241A (en) * 1994-06-24 1996-10-29 Vidacare, Inc. Thin layer ablation apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5499971A (en) * 1990-06-15 1996-03-19 Cortrak Medical, Inc. Method for iontophoretically delivering drug adjacent to a heart
US5562720A (en) * 1992-05-01 1996-10-08 Vesta Medical, Inc. Bipolar/monopolar endometrial ablation device and method
US5569241A (en) * 1994-06-24 1996-10-29 Vidacare, Inc. Thin layer ablation apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP0975386A4 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8932208B2 (en) 2005-05-26 2015-01-13 Maquet Cardiovascular Llc Apparatus and methods for performing minimally-invasive surgical procedures

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Publication number Publication date
EP0975386A1 (fr) 2000-02-02
EP0975386A4 (fr) 2000-02-02
WO1997045156A2 (fr) 1997-12-04

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