WO1997042657A1 - Composant electrique sous forme de circuit integre pour insertion a chaud dans un substrat et procedes pour sa fabrication - Google Patents
Composant electrique sous forme de circuit integre pour insertion a chaud dans un substrat et procedes pour sa fabrication Download PDFInfo
- Publication number
- WO1997042657A1 WO1997042657A1 PCT/FR1997/000789 FR9700789W WO9742657A1 WO 1997042657 A1 WO1997042657 A1 WO 1997042657A1 FR 9700789 W FR9700789 W FR 9700789W WO 9742657 A1 WO9742657 A1 WO 9742657A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- component
- wafer
- adhesive
- face
- grooves
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49503—Lead-frames or other flat leads characterised by the die pad
- H01L23/49513—Lead-frames or other flat leads characterised by the die pad having bonding material between chip and die pad
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/27—Manufacturing methods
- H01L2224/274—Manufacturing methods by blanket deposition of the material of the layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/83855—Hardening the adhesive by curing, i.e. thermosetting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/8388—Hardening the adhesive by cooling, e.g. for thermoplastics or hot-melt adhesives
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01058—Cerium [Ce]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01063—Europium [Eu]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01094—Plutonium [Pu]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/15165—Monolayer substrate
Definitions
- Electric component in the form of an integrated circuit for hot insertion into a substrate and methods for its manufacture
- Portable objects with an integrated circuit include a chip which incorporates the integrated circuit and electrical conductors which allow the connection of this circuit with a separate device.
- the position of the component in the reference frame of the card must be extremely precise (the tolerance is of the order of 50 ⁇ ) to meet the requirements of certain production techniques (for example by screen printing) of the electrical connections between the pads of the component and the contact pads carried by the card.
- certain production techniques for example by screen printing
- the patch in the reference frame of the card must be precisely position the patch in the reference frame of the card and to maintain this position against mechanical stresses that the card will undergo during its transport to hot insertion station.
- substrates which are not made of thermoplastic material to meet other requirements such as increased longevity, improved resistance, lower cost (wood, cardboard, etc.).
- the hot insertion is no longer then possible which requires from the manufacturer to have two different production facilities. This constraint is extremely burdensome financially since the manufacturing of smart cards is carried out in very large series and any alternative technology requires very large investments.
- the invention firstly has an electronic component in the form of an integrated circuit chip having an active face and an inactive face, intended to be inserted hot into a substrate.
- this component comprises at least on its inactive face a coating of heat-reactivable thermoplastic or thermosetting adhesive.
- a chip with a layer of adhesive on its inactive side has many advantages.
- One of them lies in the fact that by this layer, the chip can be held by gluing on the card in a fixed position, which makes it possible to transport the card and the chip to the insertion station.
- the second resides in the fact that this layer of adhesive at the time of hot insertion since it is either thermoplastic or thermosetting, reactivable hot, will constitute a better bond between the component and the substrate.
- this layer of adhesive will be able to constitute the hot deformable material which will bond the component to a non-thermo-substrate. plastic in which, for example, a cavity has already been arranged to house the component equipped with the adhesive coating.
- the adhesive coating will advantageously form a base projecting from the inactive face of the component.
- the lateral faces of the patch also include an adhesive coating.
- the invention also has as other objects methods of manufacturing such components.
- a first method which applies equally to a thermoplastic adhesive or a thermosetting adhesive
- the manufacture made from a wafer of a suitable material, one face of which incorporates a plurality of integrated circuits consists in providing the other face of this wafer with an adhesive coating, to equip this face dressed with an adherent support film and to individualize each component practicing a network of grooves of depth equal to the cumulative thickness of the wafer and the coating of glue.
- thermosetting adhesive another method can be used, namely providing the other side of the wafer with a coating of adhesive, equipping this coated side with an adherent support film, practicing a first network of grooves of depth equal to the thickness of the cake alone, and individualize each component by making a second network of grooves of width less than that of the grooves of the first network, at the bottom of these first grooves, and of depth equal to l thickness of the adhesive coating.
- Components are thus obtained which have a coating in the form of an overhanging base.
- thermosetting adhesives a second method consists in starting with a wafer, providing the inactive face of this wafer with a coating. of glue, to equip this face coated with an adherent support film, to practice a first network of grooves of depth equal to the thickness of the wafer, to fill this first network with a thermosetting glue and finally to individualize each component by practicing a second network of grooves inside the grooves of the first network, of width less than that of the first grooves and of depth equal to the combined thickness of the wafer and of the coating. A component is thus obtained which is covered with adhesive on its inactive face and each of its lateral faces.
- FIG. 1 partially illustrates a set of components according to the invention maintained on a support film
- FIG. 2 diagrammatically illustrates the means used for depositing fine adhesive on a silicon wafer
- FIG. 3 illustrates a set of components according to the invention maintained by a support film and provided with a layer of thermosetting adhesive
- FIG. 4 is an alternative embodiment of FIG. 3,
- Figure 1 illustrates in partial section, a set of electronic components 1 in the form of integrated circuit pads retained by a film 2 support
- each patch having an active face 3 and an inactive face 4.
- a coating 5 of glue firmly adhering to the tablet 1.
- FIG. 1 There are many ways to obtain the product represented in FIG. 1, but all of them comprise a first phase which consists, starting from a wafer 6 of a suitable material for incorporating integrated circuits on one of its faces 7, of cover the other face 8, that is to say the inactive face of this cake with a layer of the glue considered.
- Figure 2 illustrates such a cake.
- the wafer 6 incorporating a plurality of electronic circuits integrated on its face 7 is well known. Usually when this wafer is treated on its face 7, it is fitted directly with the film 2 on its face 8 and, by making a network of grooves in the wafer, each of the components forming an integrated circuit chip is individualized. These components are held by the film 2.
- its inactive face 8 is covered with an adhesive coating.
- the body to form the revé ⁇ ment of glue is a hot-melt or thermoplastic glue that low molecular weight or a polymerizable glue, being in liquid form
- a way of proceeding with a regular deposition on the face 8 of the wafer 6 consists in rapidly rotating this wafer by means of a rotary drive 9 and in pouring a few drops of this liquid product into the center of the wafer, the centrifugal force proceeding to the uniform spreading of the product.
- We can solidify this product by exposing side 8 as well coated either with the influence of temperature or with the influence of ultraviolet radiation depending on the nature of the adhesive used. This method is suitable when it is desired to obtain a relatively thin layer of adhesive 5 (FIG. 1).
- thermoplastic glue whose material is similar to the material of the substrate in which it is subsequently desired to insert the electronic component hot (polycarbonate for example)
- a cake is covered with a volatile solvent solution (ethanol for example) and immediately covered with a film of thermoplastic material (polycarbonate).
- the solvent is evaporated at low temperature (40 °) for a few hours.
- the film then adheres to the face 8 of the wafer.
- the latter is introduced into an oven where it is brought to the temperature of 180 ° for one hour (in the horizontal position, the active face 7 of the cake being turned towards the bottom). This operation makes it possible to soften the thermoplastic (polycarbonate which becomes sticky and which sticks intimately to the face 8 of the wafer).
- the above process can be accelerated by proceeding under pressure while maintaining the temperature.
- the wafer is pressed against a support, for example in polished glass, the film being sandwiched between this support and the wafer, this support having a coefficient of expansion compatible with that of the material constituting the wafer.
- the solvent operation can simply be omitted and the wafer and the film of thermoplastic material deposited on a flat surface, for example made of polished glass, and heating under compression of this assembly.
- the surface of the pressing member in contact should be with the thermoplastic film is treated so that this film when softened does not adhere to it.
- the adhesive used is a thermosetting adhesive which can be reactivated when hot, it suffices to present substrates at the appropriate temperature at the position for positioning the component on the substrate for adhesion to occur between the adhesive 5 and the upper surface of the substrate. It is even possible by an adequate formulation of the adhesive to obtain a solid adhesive under the component which, at room temperature, has a certain adhesive power (tack), allowing the component to be maintained on the substrate without even heating the latter. .
- FIG. 5 is a diagram which illustrates this bonding between a substrate 10 and a component 1 provided with an adhesive 5 either thermosetting or thermoplastic.
- thermosetting adhesive 5 substantially improves the connection between the component 1 and the substrate 10.
- FIG. 7 illustrates the hot insertion of a component 1 into a thermoplastic substrate 10, the substrate having a layer of thermoplastic adhesive and preferably made of the same material (for example polycarbonate) as that of the substrate 10.
- the two materials which were previously intimately bonded during bonding, for example by solvent or by addition of heat merge so that the insertion of component 1 has the same qualities as there had been no prior bonding of this component on the substrate.
- This procedure has the advantage of not introducing foreign bodies around the component when it is hot pressed into the substrate and of not disturbing the quality of the connection obtained.
- the materials 12, degraded on the one hand by the solvent or the heating during the bonding operation preceding the insertion operation are dispersed and distributed discontinuously away from the component, which is a pledge of good maintenance of this component in the mass of the substrate.
- each of the components 1 can be equipped with a layer of glue of substantial thickness. Thanks to this layer of adhesive, it is of course possible to obtain the bonding prior to the hot insertion of the component on a substrate, but above all it is possible to fix a component 1 in a substrate 13 which is made of thermosetting material. .
- Figures 8 and 9 illustrate this way of proceeding. In FIG. 8, it can be seen that the substrate 13 has been previously machined so that a cavity or a housing 14 is formed therein (by milling, by laser ablation, etc.).
- Component 1 has a layer of glue relatively large 5a on its inactive face and, by means of a heating punch 15, causes the softening of this layer of glue which flows and fills the space of the cavity 14 left free by the component l when there is pressed in by the punch 15, the excess of material being able to overflow and constituting a thin film 16 covering the substrate around the edges of the cavity, the bonding material being unable to creep between the punch 15 and the component 1 count given the extremely careful quality of the contact between these two elements.
- the adhesive which can be used can be a thermoplastic or a thermosetting material, hot reactivable, that is to say which will only reach its irreversible state after having been heated by the punch when it could have been deformed and creep during the heating operation.
- the component according to the invention makes it possible, as illustrated by FIGS. 8 and 9, to use the technique of hot insertion of a component even opposite a substrate which is not thermoplastic.
- the essential advantage of this arrangement is that the tools and installations for manufacturing portable objects carrying an integrated circuit can be unique whatever the substrates which are used to form the body of these portable objects.
- the variant embodiments illustrated by FIGS. 3 and 4 of an electronic component in accordance with the invention relate more particularly to those equipped with a thermosetting adhesive to improve the behavior of the components facing bending stresses imprinted on the portable object, especially when it comes in the form of a card.
- Figure 3 like Figure 1, illustrates a first embodiment in which after having equipped the wafer 6 with a uniform layer of thermosetting adhesive and having associated with this coated side a film support 2, the components were individualized in two stages. Firstly, on the wafer on the side of its active face, a network of grooves of width L and of depth equal to the thickness of the wafer 6, that is to say of each of the components 1, was produced. discover the coating 5 at the bottom of the groove. Then, inside the network of grooves 17, a second network of grooves 18 of width 1 less than the width L and of depth equal to the thickness of the adhesive coating was produced. Each component thus individualized therefore has a kind of glue base projecting from its inactive face.
- the width d of this peripheral overflow is equal to half the difference in the widths of the grooves and will preferably be substantially equal to the thickness of each component.
- this base 5 behaves as described above with regard to FIG. 5 with regard to the bonding of the component on a substrate.
- the flange of width d is folded down along the lateral faces of the component when the component is pressed into the substrate so that a relatively homogeneous layer of thermosetting adhesive is interposed between the thermoplastic material of the substrate and the component. It has been realized that in particular as regards the connection of the side walls of the component with the material, connection which is most stressed during the bending stresses mentioned above, the presence of a thermosetting glue to this level greatly improves the quality.
- FIG. 4 illustrates another embodiment of a component provided with a layer of thermosetting adhesive.
- the grooves thus produced are then filled with a thermosetting adhesive, taking of course every precaution to mask the active face of each component, by the very fact that the filling can only be done by this active face, and we then proceed to the making of 'A second network of grooves in the first network, but of smaller width to allow to remain along each side wall of each component a coating 19 of adhesive.
- the depth of the grooves in this second network is equal to the cumulative thickness of the wafer and of the layer of adhesive initially deposited on the inactive face of this wafer. It is therefore a component coated on five of its six faces which is hot pressed into a substrate made of thermoplastic material as illustrated in FIG. 8. The bonding of the component to this substrate is greatly improved.
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP97921930A EP0897595A1 (fr) | 1996-05-06 | 1997-05-05 | Composant electrique sous forme de circuit integre pour insertion a chaud dans un substrat et procedes pour sa fabrication |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9605625A FR2748350B1 (fr) | 1996-05-06 | 1996-05-06 | Composant electronique sous forme de circuit integre pour insertion a chaud dans un substrat et procedes pour sa fabrication |
FR96/05625 | 1996-05-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997042657A1 true WO1997042657A1 (fr) | 1997-11-13 |
Family
ID=9491857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR1997/000789 WO1997042657A1 (fr) | 1996-05-06 | 1997-05-05 | Composant electrique sous forme de circuit integre pour insertion a chaud dans un substrat et procedes pour sa fabrication |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0897595A1 (fr) |
FR (1) | FR2748350B1 (fr) |
WO (1) | WO1997042657A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000042648A1 (fr) * | 1999-01-11 | 2000-07-20 | Micron Technology, Inc. | Fixation d'un semi-conducteur a un substrat |
CN112599653A (zh) * | 2020-12-04 | 2021-04-02 | 杭州大和热磁电子有限公司 | 一种适于冷热交变的热电模块及其制作方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3600246A (en) * | 1968-05-17 | 1971-08-17 | Rca Corp | Method of making laminated semiconductor devices |
JPS59200438A (ja) * | 1983-04-28 | 1984-11-13 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
EP0359373A2 (fr) * | 1988-07-21 | 1990-03-21 | LINTEC Corporation | Ruban adhésif et son utilisation |
WO1994007267A1 (fr) * | 1992-09-14 | 1994-03-31 | Pierre Badehi | Procedes et appareils de la fabrication de dispositifs de circuit integre |
EP0615285A2 (fr) * | 1993-03-11 | 1994-09-14 | Btg International Limited | Montage d'un circuit électronique sur un substrat |
JPH06349866A (ja) * | 1993-06-10 | 1994-12-22 | Sumitomo Electric Ind Ltd | 半導体ウェハ及び半導体素子のダイボンディング方法 |
-
1996
- 1996-05-06 FR FR9605625A patent/FR2748350B1/fr not_active Expired - Fee Related
-
1997
- 1997-05-05 EP EP97921930A patent/EP0897595A1/fr not_active Ceased
- 1997-05-05 WO PCT/FR1997/000789 patent/WO1997042657A1/fr not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3600246A (en) * | 1968-05-17 | 1971-08-17 | Rca Corp | Method of making laminated semiconductor devices |
JPS59200438A (ja) * | 1983-04-28 | 1984-11-13 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
EP0359373A2 (fr) * | 1988-07-21 | 1990-03-21 | LINTEC Corporation | Ruban adhésif et son utilisation |
WO1994007267A1 (fr) * | 1992-09-14 | 1994-03-31 | Pierre Badehi | Procedes et appareils de la fabrication de dispositifs de circuit integre |
EP0615285A2 (fr) * | 1993-03-11 | 1994-09-14 | Btg International Limited | Montage d'un circuit électronique sur un substrat |
JPH06349866A (ja) * | 1993-06-10 | 1994-12-22 | Sumitomo Electric Ind Ltd | 半導体ウェハ及び半導体素子のダイボンディング方法 |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 009, no. 061 (E - 303) 19 March 1985 (1985-03-19) * |
PATENT ABSTRACTS OF JAPAN vol. 95, no. 003 28 April 1995 (1995-04-28) * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000042648A1 (fr) * | 1999-01-11 | 2000-07-20 | Micron Technology, Inc. | Fixation d'un semi-conducteur a un substrat |
US6541872B1 (en) | 1999-01-11 | 2003-04-01 | Micron Technology, Inc. | Multi-layered adhesive for attaching a semiconductor die to a substrate |
US6770164B1 (en) | 1999-01-11 | 2004-08-03 | Micron Technology, Inc. | Method for attaching a semiconductor die to a substrate |
CN112599653A (zh) * | 2020-12-04 | 2021-04-02 | 杭州大和热磁电子有限公司 | 一种适于冷热交变的热电模块及其制作方法 |
CN112599653B (zh) * | 2020-12-04 | 2023-03-10 | 杭州大和热磁电子有限公司 | 一种适于冷热交变的热电模块及其制作方法 |
Also Published As
Publication number | Publication date |
---|---|
FR2748350A1 (fr) | 1997-11-07 |
EP0897595A1 (fr) | 1999-02-24 |
FR2748350B1 (fr) | 2000-07-13 |
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