WO1997015049A1 - Magnetic disk and magnetic recording/reproduction apparatus - Google Patents

Magnetic disk and magnetic recording/reproduction apparatus Download PDF

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Publication number
WO1997015049A1
WO1997015049A1 PCT/JP1995/002132 JP9502132W WO9715049A1 WO 1997015049 A1 WO1997015049 A1 WO 1997015049A1 JP 9502132 W JP9502132 W JP 9502132W WO 9715049 A1 WO9715049 A1 WO 9715049A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic disk
magnetic
film
protective film
data area
Prior art date
Application number
PCT/JP1995/002132
Other languages
French (fr)
Japanese (ja)
Inventor
Takayuki Nakakawaji
Mituyoshi Shouji
Tomoe Takamura
Hiroshi Sasaki
Shuji Imazeki
Yutaka Ito
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Priority to PCT/JP1995/002132 priority Critical patent/WO1997015049A1/en
Priority to KR19980702811A priority patent/KR100318175B1/en
Priority to CNA021406391A priority patent/CN1492399A/en
Priority to JP51567697A priority patent/JP3409856B2/en
Priority to DE69532975T priority patent/DE69532975T2/en
Priority to US09/051,711 priority patent/US6296917B1/en
Priority to EP95934829A priority patent/EP0856837B1/en
Publication of WO1997015049A1 publication Critical patent/WO1997015049A1/en

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/72Protective coatings, e.g. anti-static or antifriction
    • G11B5/725Protective coatings, e.g. anti-static or antifriction containing a lubricant, e.g. organic compounds
    • G11B5/7253Fluorocarbon lubricant
    • G11B5/7257Perfluoropolyether lubricant
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/72Protective coatings, e.g. anti-static or antifriction
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/72Protective coatings, e.g. anti-static or antifriction
    • G11B5/726Two or more protective coatings
    • G11B5/7262Inorganic protective coating
    • G11B5/7264Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon
    • G11B5/7266Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon comprising a lubricant over the inorganic carbon coating
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B2220/00Record carriers by type
    • G11B2220/20Disc-shaped record carriers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/90Magnetic feature
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/30Self-sustaining carbon mass or layer with impregnant or other layer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/3154Of fluorinated addition polymer from unsaturated monomers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/3154Of fluorinated addition polymer from unsaturated monomers
    • Y10T428/31544Addition polymer is perhalogenated

Definitions

  • the present invention relates to a magnetic disk and a magnetic recording / reproducing apparatus, and more particularly to a magnetic disk and a magnetic recording / reproducing apparatus having a high recording density.
  • Hard-type magnetic recording / reproducing devices have been reduced in diameter of magnetic disks, and have been reduced in size and weight and have higher recording density.
  • the distance between the magnetic disks and the magnetic head that is, the flying height of the head has decreased.
  • the magnetic head will be in a perfect contact state (contact)
  • the recording / reproducing of the magnetic head and the operating conditions of the magnetic head and the magnetic disk become more severe.
  • a head slider equipped with a magnetic disk and a magnetic head The time required for action in the contact state (hereinafter abbreviated as contact sliding) increases, the kinetic friction and wear generated during disk startup increase, and the disk surface becomes smoother.
  • the maximum static friction force (hereinafter, abbreviated as "adhesion") generated between the DonoDisks increases. If the kinetic friction and wear increase due to the contact action, disc crashes and head wear occur intermittently, making recording and reproduction impossible. Also, if strong adhesion occurs, serious problems such as the inability to start the disk and damage to the head will occur.
  • a head slider And the area where the contact / start / stop occurs when the disk starts and stops (hereinafter abbreviated as CSS area) and the area where the head records and plays back while the disk is running (hereinafter abbreviated as data area) A magnetic disk has been developed that separates Generally, the CSS area is formed on the inner periphery of the magnetic disk, and the surface of the magnetic disk is roughened to prevent sticking. On the other hand, in the data area, the surface of the magnetic disk is smoothed to maintain stable head flying.
  • several lubricating films and lubricating techniques corresponding to a magnetic disk in which a CSS area and a data area are separated have been disclosed.
  • Japanese Patent Application Laid-Open No. 6-36277 discloses that protrusions having a height of about 5 nm are formed on the CSS area and the rail surface of the slider to prevent sticking.
  • Japanese Patent Application Laid-Open No. Hei 6-111292 discloses that a liquid lubricant is applied to the CSS area and a solid lubricant is used for the data area.
  • the lubricant used for magnetic disks is a perfluoropolyether compound having a functional group to be adsorbed on the disk surface.
  • the lubricating film composed of this lubricant forms a layer firmly adsorbed on the disk surface and a layer weakly adsorbed or not adsorbed.
  • the strongly adsorbed lubricating layer does not desorb from the disk surface, whereas the less adsorbed lubricating layer easily desorbs from the disk surface.
  • the continuous sliding durability required in the CSS area requires that a part of the lubricant be transferred to the sliding surface of the head slider at the time of action to form a stable friction state.
  • a weak lubricant layer plays an important role. For this reason, sufficient reliability cannot be ensured unless there is a weakly adsorbed layer in the CSS area.
  • lubricant aggregates between the head disks and seeks. It is necessary to prevent excessive lubrication of the lubricant by the head, and a layer of weak adsorption that easily moves on the disk surface adversely affects adhesion, contrary to continuous sliding durability. . For this reason, in the data area, it is necessary to reduce the number of weakly adsorbed layers.
  • the thickness of the lubricant film in the data area will inevitably be reduced.
  • the contact sliding in the data area is small compared to the CSS area, in the magnetic disk drive where the flying height of the head is further reduced in the future, the head and the disk are in contact even in the data area. The chance of sliding increases, and it is highly likely that continuous sliding durability will be required even in the data area in the near future. Therefore, the thickness of the lubricating film in the data area must not be large enough to withstand single contact sliding. And the film thickness cannot be reduced.
  • Japanese Patent Laid-Open No. 6-1 discloses that a liquid lubricant is applied to the CSS area and a solid lubricant is used to the data area.
  • a liquid lubricant is applied to the CSS area and a solid lubricant is used to the data area.
  • JP-A-11292 discloses that the characteristics of the lubricating film required in each region can be secured in JP-A-11292, there is a disadvantage that the process of forming the lubricating film is complicated.
  • Japanese Patent Application Laid-Open No. 4-53027 discloses that the thickness of the lubricating layer in the data area is made thinner than the thickness of the lubricating layer in the CSS area. Is secured. However, it is necessary to ensure continuous sliding durability even in the data region, and the thickness of the lubricating film cannot be reduced. Therefore, the above-mentioned Japanese Patent Application Laid-Open No. 4-53027 is not sufficient. As described above, at present, there is no effective method for s
  • An object of the present invention is to solve the above-mentioned problems of the prior art, to provide an effective method for ensuring sufficient sliding reliability for a disk on which a CSS area and a data area are formed, and to provide a high-performance method using this method.
  • Another object of the present invention is to provide a simple magnetic disk and a magnetic recording / reproducing apparatus. Disclosure of the invention
  • a lubricating layer having weak adsorption is reduced as much as possible in order to achieve low adhesion, and the magnetic head and the magnetic disk which are generated sporadically.
  • To easily form a lubricating film with a thickness that can withstand contact sliding use a lubricant that strongly adheres to the surface of the magnetic disk, or apply a treatment after applying the lubricant.
  • the CSS area taking into account the fact that sufficient continuous sliding durability is ensured and the fact that the lubricant easily transfers to the head slider side, it is possible to adsorb an adsorbent lubricant that is difficult to stick.
  • a method for intentionally forming a weak lubricating layer in the cs S region was devised. Specifically, it is a magnetic disk, a method of manufacturing a magnetic disk, and a magnetic recording / reproducing apparatus described below.
  • a first means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating.
  • a CSS area having a surface roughness of Ra 10 nm or more; and a data area having a surface roughness of Ra 3 nm or less where the magnetic head slider is located during rotation of the magnetic disk.
  • the following general formulas (I) to (! ⁇ ) are provided on the surface of the protective film.
  • the second means is a fixing method in which the lubricating film in the first means is not washed and removed with a perfluorocarbon-based solvent but is firmly fixed to the surface of the protective film and washed and removed with a perfluorocarbon-based solvent.
  • This is a magnetic disk composed of a weak lubricant.
  • the third means is to sequentially laminate a base film, a magnetic film, and a protective film on a non-magnetic substrate.
  • a magnetic disk wherein when the magnetic disk starts rotating and when the magnetic disk stops rotating, the surface of the protective film on which the magnetic head slider is located has a roughness of Ra1Onm or more; And a data area where the roughness of the surface of the protective film where the magnetic head slider is located is 3 nm or less, and the surface of the protective film is represented by the general formulas (I) to (! 0).
  • a fourth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially stacked on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating.
  • a lubricating film having a film thickness of 1.5 nm or more formed in the CSS region is formed.
  • a lubricating film with a thickness of 1 nm or more formed in the data area It is a magnetic disk provided.
  • Fifth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating.
  • a CSS area having a surface roughness of Ra 10 nm or more; and a data area having a surface roughness of Ra 3 nm or less where the magnetic head slider is located during rotation of the magnetic disk.
  • the magnetic disk includes a lubricating film having a thickness of 1.5 nm or more formed in the CSS region and a lubricating film having a thickness of 1 nm or more formed in the data region.
  • Sixth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating.
  • a CSS area having a surface roughness of Ra 10 nm or more; and a data area having a surface roughness of Ra 3 nm or less where a magnetic head slider is located during rotation of the magnetic disk.
  • the entire surface of the magnetic disk After applying a lubricant containing the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C. or more, or Alternatively, the data area is irradiated with ultraviolet light, the entire surface of the magnetic disk is washed with a perfluorocarbon solvent, and then the data area is selected from the perfluoropolyether compounds of the general formulas (I) to ( ⁇ ).
  • the lubricating film having a thickness of 1.5 nm or more formed in the CSS region and the data region are formed. This is a magnetic disk provided with a formed lubricating film having a thickness of 1 nm or more.
  • a seventh means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts and stops rotating.
  • the surface of the protective film where the surface of the protective film is located has a roughness of Ra1 O nm or more, and the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk has a surface roughness of Ra3.
  • a lubricant containing at least one of the perfluoropolyether compounds represented by the general formulas (I) to (m) on the surface of the protective film The entire surface of the magnetic disk is heated to 80 ° C.
  • the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays, and then the CSS area is washed with a perfluorocarbon solvent. And the one in the C S S region. 5 n m lubricating film thickness was formed on the following, a magnetic disk manufacturing method for forming a 1 n m or more thickness lubricating film of the data area.
  • An eighth means is the method of manufacturing a magnetic disk according to the seventh means, wherein the entire surface of the magnetic disk is washed with a perfluorocarbon solvent, and then the pars of the general formulas (1) to (! ⁇ ) are added to the CSS region.
  • a perfluoropolyether compound having an adsorptive functional group selected from a fluoropolyether compound is applied to form a lubricating film having a thickness of 1.5 nm or more in the CSS region. Forming a lubricating film having a thickness of 1 nm or more in the data area.
  • a ninth means is the magnetic disk manufacturing method according to the seventh means, wherein the entire surface of the magnetic disk is washed with a perfluorocarbon-based solvent, and then the perfluoropolyether-based compound represented by any of the general formulas (I) to (!!) is used.
  • a magnetic disk manufacturing method for forming a lubricating film having a thickness of 1 nm or more in the data area is the magnetic disk manufacturing method according to the seventh means, wherein the entire surface of the magnetic disk is washed with a perfluorocarbon-based solvent, and then the perfluoropolyether-based compound represented by any of the general formulas (I) to (!!) is used.
  • a tenth means is the method of manufacturing a magnetic disk according to the seventh means, wherein the entire surface of the magnetic disk is ripened to 80 ° C. or higher or irradiated with ultraviolet light, and then subjected to the general formulas (I) to (! ⁇ ).
  • a perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds of (1) to the entire surface of the magnetic disk, and then washing the data area with a perfluorocarbon solvent
  • a perfluoro-opened polyether compound having a chemically reactive functional group selected from the perfluoropolyether compounds represented by the general formulas (I) to (! ⁇ ) is applied, and 1.5 nm or more is applied to the CSS region.
  • a method of manufacturing a magnetic disk comprising forming a lubricating film having a thickness of 1 nm and a lubricating film having a thickness of 1 nm or more in the data area.
  • the first means includes a magnetic head, a magnetic head slider having a magnetic head mounted thereon, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate.
  • the roughness of the surface of the protective film on which the magnetic head slider 1 is located is Ra10 nm or more when the magnetic disk starts and stops rotating.
  • the protection in which the magnetic head slider is positioned during rotation of the magnetic disk is A data area having a film surface roughness of Ra 3 nm or less, and at least one of the perfluoropolyether compounds represented by the general formulas (I) to (! ⁇ ) on the protective film surface.
  • a lubricating film including the above is formed, and the lubricating film is composed of a lubricant firmly fixed to the surface of the protective film and a lubricant weakly fixed, and fixing the lubricating film formed in the CSS region.
  • the ratio of the weak lubricant is 10% or more of the total amount of the lubricant in the CSS region, and the ratio of the weak lubricant for fixing the lubricant film formed in the data region is the lubrication of the data region. Less than 10% of the total amount of the agent, and the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area.
  • the dynamic friction coefficient is 1.5 or less, the dynamic friction coefficient is 1.0 or less, and the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the CSS region is 1.0 or less, and the dynamic friction coefficient is 0.5 or less. It is a magnetic recording and reproducing device.
  • the first means comprises a magnetic head, a magnetic head slider equipped with a magnetic head, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate.
  • the surface roughness of the protective film on which the magnetic head slider 1 is located is Ra10IIm or more.
  • a data area where the roughness of the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk is less than Ra 3 nm.
  • the data area is then washed with a perfluorocarbon solvent, and the lubricating film formed in the CSS area has a thickness of 1.5 nm or more, and the lubricating film formed in the data area has a thickness of 1 nm. Film thickness of nm or more
  • the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1.0 or less in the data area. This is a magnetic recording and reproducing device with a maximum static friction coefficient of 1.0 or less and a dynamic friction coefficient of 0.5 or less between the magnetic disk and the magnetic disk.
  • a thirteenth means is the magnetic recording / reproducing apparatus according to the first means, wherein the magnetic disk is configured such that after cleaning the data area with a perfluorocarbon solvent, the CSS area has the general formula (I )
  • a perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds represented by the following formulas (1) to (3) is applied, and the lubricating film formed in the CSS region has a thickness of 1.5 nm or more.
  • a magnetic recording / reproducing apparatus wherein the lubricating film formed in the data area has a thickness of 1 nm or more.
  • a fifteenth means is the magnetic recording / reproducing apparatus according to the twenty-second means, wherein the magnetic disk is provided with the following general formula (I):
  • a perfluoropolyether compound having a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether compounds represented by (! ⁇ ) is applied to form the above-mentioned CSS region.
  • the magnetic recording / reproducing apparatus has a lubricating film having a thickness of 1.5 nm or more and a lubricating film formed in the data area having a thickness of 1 nm or more.
  • the fifteenth means includes a magnetic head, a magnetic head slider equipped with a magnetic head, and a magnetic disk in which an F ground film, a magnetic film, and a protective film are sequentially stacked on a non-magnetic substrate.
  • the roughness of the surface of the protective film on which the magnetic head slider 1 is located is Ra10 nm or more when the magnetic disk starts and stops rotating.
  • the surface of the protective film, on which the magnetic head slider 1 is positioned during rotation of the magnetic disk has a data area with a roughness of Ra 3 nm or less, and the surface of the protective film has the general formula (I) to (! ⁇ ).
  • the entire surface of the magnetic disk After applying at least one or more of the perfluoropolyether compounds represented by the formula (1) to the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated at 80 ° C or higher, or the entire surface of the magnetic disk or the The data area is irradiated with ultraviolet light, and the perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds represented by the above general formulas (I) to (! ⁇ ) is applied to the magnetic disk. After applying to the entire surface and then cleaning the data area with a perfluoro-opening carbon-based solvent, a chemical selected from the perfluoropolyether compounds represented by the general formulas ( ⁇ ) to (!
  • a perfluoropolyether compound having a reactive group is applied, and the lubricating film formed in the CSS region has a thickness of 1.5 nm or more, and the lubricating film formed in the data region has a thickness of 1 nm or more.
  • the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1.0 or less in the data area.
  • This magnetic recording / reproducing device has a maximum static friction coefficient between the head slider and the magnetic disk of 1.0 or less and a dynamic friction coefficient of 0.5 or less.
  • a sixteenth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating.
  • a CSS area where the surface roughness of the film is Ra1 Onm or more, and a data area where the roughness of the surface of the protective film where the magnetic head slider is located during rotation of the magnetic disk is Ra3 nm or less.
  • the following general formulas (IV) to (XII) on the surface of the protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating.
  • a lubricant containing at least one or more perfluoropolyether-based compounds after applying a lubricant containing at least one or more perfluoropolyether-based compounds to the entire surface of the magnetic disk.
  • a lubricant containing at least one or more perfluoropolyether-based compounds By heating to 0 ° C or more or irradiating the entire surface of the magnetic disk or the data area with ultraviolet rays, and then cleaning the CSS area with a perfluorocarbon-based solvent, And a lubricating film having a thickness of 1.5 nm or more formed in the data area and a lubricating film having a thickness of 1 nm or more formed in the data area.
  • a seventeenth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a nonmagnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts rotating and stops rotating.
  • the CSS area where the film surface roughness is Ra 1 O nm or more, and the data where the surface roughness of the protective film where the magnetic head slider is located during rotation of the magnetic disk is Ra 3 nm or less.
  • the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays. Then, the entire surface of the magnetic disk is washed with a perfluorocarbon solvent, and the general area is applied to the CSS area.
  • a perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds of the formulas (VII) to (XII) is applied, and a film thickness of 1.5 nm or more is formed on the CSS region. And a lubricating film having a thickness of 1 nm or more formed in the data area.
  • the eighteenth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating.
  • a CSS area having a surface roughness of Ra1 O nm or more; and a data area having a surface roughness of Ra3 nm or less where the magnetic head slider is located during rotation of the magnetic disk.
  • the magnetic disk includes a lubricating film having a thickness of 1.5 nm or more formed in the CSS region and a lubricating film having a thickness of 1 nm or more formed in the data region.
  • the nineteenth means is that, in a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, the protective film in which the magnetic head slider is positioned when the magnetic disk starts rotating and stops rotating.
  • a CSS area having a surface roughness of Ra1 O nm or more; and a data area having a surface roughness of Ra3 nm or less where the magnetic head slider is located during rotation of the magnetic disk.
  • a perfluoropolyether compound having an adsorptive functional group selected from the group consisting of: is applied to the entire surface of the magnetic disk, and then the data area is washed with a carbon-based solvent having a perfluoro opening.
  • a twenty-first means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • a method for manufacturing a magnetic disk comprising washing with a carbon-based solvent, forming a lubricating film having a thickness of 1.5 nm or more in the CSS region, and forming a lubricating film having a thickness of 1 nm or more in the data region. .
  • a twenty-first means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • a second means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • a magnetic disk manufacturing method in which a material is applied, a lubricating film having a thickness of 1.5 nm or more is formed in the CSS region, and a lubricating film having a thickness of 1 nm or more is formed in the data region.
  • a second means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • the roughness of the surface of the protective film where Ra is located is Ra10 nm or more
  • the roughness of the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk Forming a data area of Ra 3 nm or less, and then forming on the surface of the protective film selected from the perfluoropolyether compounds represented by the general formulas (IV) to (VI) on the surface of the protective film.
  • the twenty-fourth means includes a magnetic head, a magnetic head slider having a magnetic head mounted thereon, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate.
  • the roughness of the surface of the protective film on which the magnetic head slider 1 is located is Ra10 nm or more when the magnetic disk starts and stops rotating.
  • a data area where the surface of the protective film on which the magnetic head slider 1 is located during rotation of the magnetic disk has a roughness of Ra 3 nm or less, and then the surface of the protective film has the general formula (IV) ) To (Xffl), after applying at least one or more of the perfluoropolyether-based compounds over the entire surface of the magnetic disk, ripening the entire surface of the magnetic disk at 80 ° C or higher, or Or the data area is purple After irradiating with an external ray, the data area was washed with a carbon-based solvent having a perforated opening.
  • the thickness of the lubricating film formed in the data area is 1 nm or more, and the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1 nm.
  • the dynamic friction coefficient is less than 1.0, the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the CSS area is less than 1.0, and the dynamic friction coefficient is less than 0.5. It is a recording and reproducing device.
  • the twenty-fifth means is a magnetic head having a magnetic head, a magnetic head slider having a magnetic head mounted thereon, and a magnetic disk having a base film, a magnetic film, and a protective film sequentially laminated on a non-magnetic substrate.
  • the surface of the protective film on which the magnetic head slider 1 is located has a roughness of Ra10 nm or more, and a CSS area.
  • the surface of the protective film, on which the magnetic head slider 1 is positioned during rotation of the magnetic disk has a data area with a roughness of Ra 3 nm or less. Then, the surface of the protective film has the general formula (IV) to (IV).
  • Xffl a perfluoropolyether compound having an adsorptive functional group selected from perfluoropolyether compounds selected from perfluoropolyether compounds
  • the lubricating film formed in the CSS region has a thickness of 1.5 nm or more.
  • the lubricant film formed in the data area has a thickness of 1 nm or more, the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1 or less. 2.0 or less, and the maximum static friction coefficient generated between the magnetic head slider 1 and the magnetic disk in the CSS region is 1.0 or less,
  • a magnetic recording / reproducing device having a dynamic friction coefficient of 0.5 or less.
  • the twenty-sixth means includes a magnetic head, a magnetic head slider having a magnetic head mounted thereon, and a magnetic disk having a base film, a magnetic film, and a protective film sequentially laminated on a non-magnetic substrate.
  • the roughness of the surface of the protective film on which the magnetic head slider 1 is located is Ra10 nm or more when the magnetic disk starts and stops rotating.
  • a data area in which the surface of the protective film on which the magnetic head slider 1 is located during rotation of the magnetic disk has a roughness of Ra 3 nm or less.
  • the surface of the protective film has the general formula (IV) After applying at least one or more of the perfluoropolyether compounds represented by (XD1) to the entire surface of the magnetic disk, the entire surface of the magnetic disk is ripened at 80 ° C. or higher, or the entire surface of the magnetic disk is Or the data area After irradiating with outside light, and then cleaning the data area with a perfluorinated carbon-based solvent, it chemically reacts with the surface of the protective film selected from the perfluorinated polyether compounds represented by the general formulas (IV) to (VI).
  • a lubricating film formed in the CSS region has a thickness of 1.5 nm or more, and a lubricating film formed in the data region has a thickness of 1 nm or more.
  • the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1.0 or less in the data area.
  • This magnetic recording and reproducing device has a maximum static friction coefficient between magnetic disks of 1.0 or less and a dynamic friction coefficient of 0.5 or less.
  • a twenty-seventh means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating.
  • the data area is washed with a perfluorocarbon-based solvent, and then a functional group chemically reacting with the surface of the protective film selected from the perfluoropolyether-based compounds represented by the general formulas (IV) to (VI) is added.
  • a lubricating film formed in the CSS region has a thickness of 1.5 nm or more, and a lubricating film formed in the data region has a thickness of 1 nm or more,
  • the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less and the dynamic friction coefficient is 1.0 or less in the data area, and the maximum friction coefficient between the magnetic head slider and the magnetic disk is 1.0 or less in the CSS area.
  • the magnetic recording and reproducing device has a maximum static friction coefficient of 1.0 or less and a dynamic friction coefficient of 0.5 or less.
  • a twenty-eighth means is the magnetic disk according to the first means, wherein the diameter of the magnetic disk is 88.9M or less.
  • a twentieth means is the magnetic disk according to the seventh means, wherein the diameter of the magnetic disk is 88.9 dragons or less.
  • a thirtieth means is the magnetic disk according to the first means, wherein the diameter of the magnetic disk is 88.9111111 or less.
  • the present invention is based on the assumption that the CSS area has a strong fixed lubricant and a weak fixed lubricant. It is a technology that can secure continuous sliding durability by forming a lubricating layer that is composed and a lubricating layer that is mainly composed of a strongly fixed lubricant in the data area to reduce adhesion. In this case, the thickness of the lubricating layer in the data area where the amount of the weakly fixed lubricant is small needs to be increased to some extent in order to cope with accidental contact action in the data area due to the recent decrease in flying height.
  • FIG. 1 is an external view of a magnetic disk manufactured in Example 1 and a cross-sectional view of a boundary 3 between a CSS area and a data zone.
  • FIG. 2 is a schematic diagram of a measuring device for the CSS test and the adhesion test.
  • FIG. 3 is a sectional view of the magnetic recording / reproducing apparatus according to the embodiment of the present invention.
  • a fluororesin particle having a diameter of 0.5 ⁇ is electrostatically applied to a region of the magnetic disk having a radius of 15 mm to 2 Onun, and the entire surface of the magnetic disk is etched with oxygen to a thickness of 10 nm. It was washed off.
  • cylindrical protrusions having a diameter of 0.5 ⁇ were uniformly formed in a region with a radius of 15 nun force and a radius of 20 mm.
  • a CSS area with a center line average roughness of Ra 15 nm is formed in the area with a radius of 15 to 2 mm, and the other areas are smooth with a center line average roughness of Ra 1.2 nm.
  • Data area is formed.
  • a method in which the disk is rotated while the data area is immersed in a fluorine-based solvent a method in which the fluorine-based solvent ejected from the nozzle is applied only to the data area while rotating the disk using a spinner.
  • a method using a spinner is employed. The number of revolutions of the spinner is 100 O rpm, and the ejection amount of the fluorine-based solvent from the nozzle is 50 ml / min.
  • the sputtered magnetic disk fabricated in this way has a lubricating layer that chemically reacts with the disk surface in the CSS region, that is, a strongly fixed lubricating layer and a weakly fixed lubricating layer composed of a perfluoropolyether compound (XI). Layers are formed. Furthermore, only a strongly fixed lubricating layer composed mostly of perfluoropolyether compound (IV) is formed in the data area. The thickness of the lubricating layer in the data area is 2.2 nm, and the thickness of the lubricating layer in the CSS area is 2.7 nm.
  • FIG. 1 shows an external view of a magnetic disk manufactured in this example and a cross-sectional view of a boundary 3 between the CSS area and the data area.
  • FIG. 2 shows the outline of the measuring device.
  • the magnetic disk 7 to be measured is mounted on a spindle 8 directly connected to the motor 1 at the bottom of the apparatus, and is fixed with a disk holder 9.
  • Heads slider 1 2 is of the in-line data Eve rail surface is in contact with the rotating direction and the forward direction of the disk (A 1 2 ⁇ 3 T i C steel 2 0 T), is connected to the load cell 1 0 It is fixed to arm 13.
  • the stage 11 to which the load cell 10 is fixed is movable in the radial direction, and the evaluation at each track is It is possible.
  • the frictional force generated between the head slider 12 and the magnetic disk 7 by rotating the motor is measured by a load cell.
  • the disk was repeatedly rotated and stopped at short intervals, and the CSS was performed up to 100,000 times.
  • the number of CSSs is 1, 50, 100, 500, 100, 0, 0, 0, 0, 0, 0, 0
  • the disk was stopped, the head was brought into contact for 2 seconds, and then the maximum kinetic friction force was measured when rotating at 1 Orpm.
  • the number of times the disk crashed C S S was also measured.
  • a disk crash is a condition in which the carbon protective film underlying the lubricating film has been completely worn and the magnetic film has been exposed.If the crash occurs, a sliding mark that can be visually observed is generated, and the number of CSSs up to that point was measured and the experiment was stopped.
  • the maximum kinetic friction force when the disk crashed in less than 100,000 times the maximum kinetic friction coefficient up to the number of times SS the disk crashed was used.
  • the maximum rotation speed of the disk is 540 Orpm, and the pressing load of the head is 3.0 g.
  • the head in the data area, the head is usually in a floating state, so the disk was operated for 20 hours with the head floating.
  • the time was measured at 4 hours, 8 hours, 12 hours, 16 hours, and 20 hours (at the end of measurement) from the start of the experiment.
  • the disk was stopped, and the maximum kinetic friction force was measured when the head was brought into contact for 2 seconds and then rotated at 1 Orpm, as in the measurement in the CSS area.
  • the adhesion was measured by bringing the head's slider into contact with the disk for 12 hours, then rotating the disk at low speed, and measuring the maximum static friction force generated immediately after the rotation. The measurement is for the head pressing load in both the CSS area and the data area. The test was performed at 3.0 g and a disk rotation speed of 1 rpm. Table 1 shows the above evaluation results.
  • Example 2 The same sputtered magnetic disk as in Example 1 was prepared. Next, a solution was prepared by dissolving 0.005 wt% of a perfluoropolyether compound (VI) represented by the following general formula (VI) in the same fluorine-based solvent as in Example 1, and the same conditions as in Example 1 were used. After the dip coating, heat treatment was performed at 120 ° C. for 10 minutes, and then the entire surface of the magnetic disk was washed with the same fluorine-based solvent. In this case, the thickness of the lubricating layer is 0.75 mn.
  • a perfluoropolyether compound (VI) represented by the following general formula (VI) in the same fluorine-based solvent as in Example 1, and the same conditions as in Example 1 were used. After the dip coating, heat treatment was performed at 120 ° C. for 10 minutes, and then the entire surface of the magnetic disk was washed with the same fluorine-based solvent. In this case, the thickness of the lubricating layer is 0.75 mn.
  • Example 2 The same sputtered magnetic disk as in Example 1 was prepared. Next, a solution was prepared by dissolving a perfluoropolyether compound (Xffl) represented by the following structural formula (Xffl) in the same fluorine-based solvent as in Example 1 at a concentration of 0.05 wt%, and dehydrated under the same conditions. After heat treatment at 110 ° C for 2 hours after the tip coating, the entire surface was washed with the same fluorine-based solvent. The thickness of this lubricating layer is 0.8 nm.
  • Xffl perfluoropolyether compound represented by the following structural formula (Xffl)
  • FIG. 1 The magnetic disk manufactured in Example 1 was mounted on a 3.5-inch magnetic recording / reproducing apparatus.
  • Figure 3 shows a schematic diagram of the device. While operating this magnetic recording / reproducing apparatus and the same type 3.5-inch magnetic recording / reproducing apparatus (Comparative Example 5) on which the magnetic disk manufactured in Comparative Example 2 was mounted, the power was temporarily turned off once and the data area was forcibly forced. And left for 24 hours. As a result, after restarting, the magnetic disk device of the present embodiment was started and no abnormality was found in recording / reproducing, whereas the magnetic recording / reproducing device of Comparative Example 5 could not be started and recording / reproducing became impossible. Was. As a result of checking the disk in the device of Comparative Example 5, it was found that strong adhesion occurred between the head slider and the disk in the data area.
  • Example 1 The same sputtered magnetic disk as in Example 1 was prepared. Next, the following general formula (IV) used in Example 1
  • a solution (1) was prepared by dissolving the perfluoropolyether compound (IV) in a fluorine-based solvent (PF5052, manufactured by Sumitomo 3M) at a concentration of 0.01% by weight.
  • This solution (1) was applied to a magnetic disk by dipping under the same conditions as in Example 1, dried sufficiently, and then heat-treated at 100 ° C. for 2 hours. In this case, the thickness of the lubricating layer is 1.3 nm.
  • the disk manufactured in this manner was subjected to the CSS test and the adhesion test in the same manner as in Example 1. Table 1 shows the results.
  • Example 1 The same sputtered magnetic disk as in Example 1 was prepared. Next, the following general formula (IV) used in Example 1
  • a solution (2) was prepared by dissolving it in a fluorine-based solvent (PF5052, manufactured by Sumitomo 3M) at a concentration of 0.01 wt%. This solution (2) was applied to a magnetic disk by dipping under the same conditions as in Example 1. The thickness of the lubrication layer in both the data area and the CSS area is 2.7 nm. The disk manufactured in this manner was subjected to the CSS test and the adhesion test in the same manner as in Example 1. Table 1 shows the results. [Comparative Example 3]
  • Example 2 The same sputtered magnetic disk as in Example 1 was prepared. Next, the following structural formula (VI) used in Example 2 was used.
  • perfluoropolyether compound (VI) is 0. 0 0 7 wt% dissolved in the fluorine-based solvent (VI) - C 2 F ⁇
  • a solution was prepared, applied in the same manner as in Example 1, and only the data area was washed with the same fluorine-based solvent.
  • the thickness of the lubrication layer in the data area is 0.75M, and the thickness of the lubrication layer in the CSS area is 1.84 nm.
  • a CSS test and an adhesion test were performed on the disk thus manufactured in the same manner as in Example 1. Table 1 shows the results.
  • Example 3 The same sputtered magnetic disk as in Example 1 was prepared. Next, the following structural formula (xm) used in Example 3
  • the magnetic disk manufactured in Comparative Example 2 was mounted on a 3.5-inch magnetic recording / reproducing apparatus with the magnetic disk manufactured in Example 1, and the power was temporarily turned off during operation, the apparatus was forcibly stopped, and left for 24 hours. Later, it was restarted.
  • the magnetic recording / reproducing apparatus of this comparative example could not be started, and recording / reproducing became impossible. This is because strong adhesion between the head slider and the disk occurred due to the presence of many weakly adsorbed lubricants in the data area.

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Magnetic Record Carriers (AREA)
  • Lubricants (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

A magnetic disk having a lubricating film that covers a data region and a CSS region formed on the surface thereof. The lubricating film secures low tackiness and low sliding friction in the data region, and secures CSS durability in the CSS region. Since the problem of lubrication between the magnetic disk and a magnetic head can be avoided either in normal operation or in the event of an abrupt stop of the disk drive, high reliability can be secured. The present invention provides also a magnetic recording/reproduction apparatus using the disk. Because the lubricating film formed in the data region of the magnetic disk is firmly fixed to the surface of the magnetic disk, it hardly invites adhesion and has a sufficient film thickness for securing durability under sliding friction. The lubricating film in the CSS region comprises both a lubricant having high fixing force and a lubricant having low fixing force to the surface of the magnetic disk, it has high CSS durability. It is therefore possible to obtain a high-reliability magnetic disk and a high-reliability magnetic recording/reproduction apparatus.

Description

明 細 書  Specification
磁気ディスク並びに磁気記録再生装置 技術分野  Magnetic disk and magnetic recording / reproducing device
本発明は、 磁気ディスク並びに磁気記録再生装置に係り、 特に高い記 録密度を有する磁気ディスク並びに磁気記録再生装置に関する。 背景技術  The present invention relates to a magnetic disk and a magnetic recording / reproducing apparatus, and more particularly to a magnetic disk and a magnetic recording / reproducing apparatus having a high recording density. Background art
ハー ドタイプの磁気記録再生装置は、 磁気ディスクの小径化並びに装 置の小型軽量化と高記録密度化が進んでいる。 磁気ディスクの高記録密 度化に伴い磁気ディスクと磁気へッ ドの間の距離すなわちへッ ド浮上量 が低下しており、 近い将来磁気ヘッ ドと磁気ディスクとは、 完全な接触 状態 (コンタク 卜) で記録再生することになリ、 磁気へッ ドと磁気ディ スクとの措動条件は一層苛酷になる。 また、 高記録密度化にはヘッ ド浮 上量の低下とともに浮上を安定させるために磁気ディスク表面をより平 滑化する必要がある . このため、 磁気ディスクと磁気ヘッ ドを搭載した ヘッ ドスライダーとの間では、 接触状態で措動 (以後、 接触摺動と略称 する。 ) する時間が増大し、 ディスク起動中に発生する動摩擦力や摩耗 が増すことと、 ディスク表面の平滑化によってへッ ドノディスク間に発 生する最大静止摩擦力 (以後、 粘着と略称する。 ) が増大する。 接触措 動で動摩擦力や摩耗が増すと、 ディスククラッシュやへッ ド摩耗が断続 的に発生し、 記録再生ができなくなる。 また、 強い粘着が発生するとデ イ スクが起動できなくなったり、 へッ ドを損傷する等の重大な問題が発 生する。  Hard-type magnetic recording / reproducing devices have been reduced in diameter of magnetic disks, and have been reduced in size and weight and have higher recording density. As the recording density of magnetic disks has increased, the distance between the magnetic disks and the magnetic head, that is, the flying height of the head has decreased. In the near future, the magnetic head will be in a perfect contact state (contact However, the recording / reproducing of the magnetic head and the operating conditions of the magnetic head and the magnetic disk become more severe. To increase the recording density, it is necessary to smooth the surface of the magnetic disk in order to stabilize the floating as the flying height of the head decreases. For this reason, a head slider equipped with a magnetic disk and a magnetic head The time required for action in the contact state (hereinafter abbreviated as contact sliding) increases, the kinetic friction and wear generated during disk startup increase, and the disk surface becomes smoother. The maximum static friction force (hereinafter, abbreviated as "adhesion") generated between the DonoDisks increases. If the kinetic friction and wear increase due to the contact action, disc crashes and head wear occur intermittently, making recording and reproduction impossible. Also, if strong adhesion occurs, serious problems such as the inability to start the disk and damage to the head will occur.
上記問題を解決する手段として磁気ディ スク停止中にへッ ドスライ ダ 一が待機すると共にディスク起動時と停止時にコンタク ト · スター ト · ス トップする領域 (以後、 C S S領域と略称する。 ) とディスク起動中 にヘッ ドが記録再生する領域 (以後、 データ領域と略称) とを分離した 磁気ディスクが開発されている。 一般に C S S領域は、 磁気ディスクの 内周部に形成されており、 粘着を防ぐために磁気ディスクの表面を粗く している。 一方、 データ領域は、 安定したヘッ ド浮上を維持するために 磁気ディスクの表面を滑らかにしている。 これまで、 C S S領域とデ一 タ領域を分けた磁気ディスクに対応した潤滑膜や潤滑技術が幾つか開示 されている。 例えば特開平 6— 36277号公報には C S S領域とスライダー のレール面に高さが約 5 n mの突起を形成し、 粘着を防止することを開 示している。 また、 特開平 6— 1 1 1 292 号公報は C S S領域には液体の潤 滑剤を塗布し、 データ領域には固体潤滑剤を使用することを開示してい る。 これらの従来技術は、 デ一タ領域と C S S領域とを形成した磁気デ ィスクに対応した潤滑膜についての技術であり、 データ領域と C S S領 域の各領域で要求される潤滑膜の措動特性をある程度実現できる技術で ある。 C S S領域とデータ領域でのへッ ドノディスク間の措動状態から 各領域で必要となる潤滑膜を考えると、 C S S領域では、 磁気ディスク 表面を粗くすれば粘着はある程度軽滅できるものの、 ディスク起動時と 停止時にへッ ドとディスクが接触措動することから連続摺動耐久性に優 れた潤滑膜も必要となる。 一方、 データ領域では、 ディスクの面粗さが 小さいことが必要であり しかも粘着が小さな潤滑膜が必要である。 これ は、 ヘッ ドスライダーがデータ領域内にある時に、 装置に異常が発生し てディスクが急停止した場合、 面粗さが小さいデータ領域内でディスク と接触して強い粘着を起こす可能性があるためである。 すなわち、 CSS 領域とデータ領域に形成される潤滑膜には、 それぞれ異なる潤滑性能の 潤滑膜が要求される。 As a means to solve the above problem, a head slider And the area where the contact / start / stop occurs when the disk starts and stops (hereinafter abbreviated as CSS area) and the area where the head records and plays back while the disk is running (hereinafter abbreviated as data area) A magnetic disk has been developed that separates Generally, the CSS area is formed on the inner periphery of the magnetic disk, and the surface of the magnetic disk is roughened to prevent sticking. On the other hand, in the data area, the surface of the magnetic disk is smoothed to maintain stable head flying. Until now, several lubricating films and lubricating techniques corresponding to a magnetic disk in which a CSS area and a data area are separated have been disclosed. For example, Japanese Patent Application Laid-Open No. 6-36277 discloses that protrusions having a height of about 5 nm are formed on the CSS area and the rail surface of the slider to prevent sticking. Further, Japanese Patent Application Laid-Open No. Hei 6-111292 discloses that a liquid lubricant is applied to the CSS area and a solid lubricant is used for the data area. These conventional technologies relate to a technology for a lubricating film corresponding to a magnetic disk having a data region and a CSS region. This is a technology that can achieve some degree of Considering the lubricating film required in each area based on the action between the head disk in the CSS area and the data area, if the magnetic disk surface is roughened in the CSS area, the adhesion can be reduced to some extent, but when the disk starts up Since the head and the disk come into contact with each other at the time of stop, a lubricating film with excellent continuous sliding durability is also required. On the other hand, in the data area, the surface roughness of the disk must be small and a lubricating film with low adhesion is required. This is because when the head slider is in the data area and the disk suddenly stops due to an error in the device, strong adhesion may occur due to contact with the disk in the data area with small surface roughness. That's why. In other words, the lubrication films formed in the CSS area and the data area have different lubrication performances. A lubricating film is required.
現在、 磁気ディスクに使用されている潤滑剤は、 ディスク表面に吸着 するための官能基を有するパーフロロポリエーテル系化合物である。 こ の潤滑剤により構成される潤滑膜は、 ディスク表面に強固に吸着した層 と吸着の弱いあるいは吸着していない層を形成している。 例えば、 ディ スクをパーフロロカーボン系溶剤で洗浄した場合、 強固に吸着した潤滑 層は、 ディスク表面から脱離しないのに対し、 吸着の弱い潤滑層は、 容 易にディスク表面から脱離する。 C S S領域で要求される連続摺動耐久 性としては、 潤滑剤の一部が措動時にへッ ドスライダーの摺動面に移着 して安定な摩擦状態を形成する必要があるので、 吸着の弱い潤滑剤の層 が重要な役割を果たしている。 このため、 C S S領域に吸着の弱い層が なければ十分な信頼性を確保できない。 これに対し、 データ領域で要求 される低粘着性に関しては、 装置の異常でディスクが急停止してデータ 領域で接触状態になった際のへッ ドノディスク間への潤滑剤の凝集とシ ーク時のへッ ドによる過度の潤滑剤のかき集めを防止する必要があり、 ディスク表面を移動しやすい吸着の弱い層は、 連続摺動耐久性とは逆に 粘着に对し悪影響を及ぼすことになる。 このため、 データ領域では、 吸 着の弱い層をなるベく少なくする必要がある。 従来の吸着型潤滑剤をデ ィスク全面に塗布してデータ領域だけを洗浄して吸着の弱い層を取リ除 く と、 必然的にデータ領域の潤滑膜の膜厚が薄くなる。 しかしながら、 現在は C S S領域に比べてデ一タ領域での接触摺動は軽微であるものの、 今後もへッ ド浮上量が更に低下する磁気ディスク装置では、 データ領域 でもヘッ ドとディスクとが接触摺動する機会が増加し、 近い将来、 デ一 タ領域でも連続摺動耐久性が要求される可能性が強い。 従って、 データ 領域の潤滑膜は、 単発的な接触摺動にも耐え得る程度の膜厚を確保しな ければならず、 膜厚を薄くできない状況にある。 Currently, the lubricant used for magnetic disks is a perfluoropolyether compound having a functional group to be adsorbed on the disk surface. The lubricating film composed of this lubricant forms a layer firmly adsorbed on the disk surface and a layer weakly adsorbed or not adsorbed. For example, when a disk is washed with a perfluorocarbon-based solvent, the strongly adsorbed lubricating layer does not desorb from the disk surface, whereas the less adsorbed lubricating layer easily desorbs from the disk surface. The continuous sliding durability required in the CSS area requires that a part of the lubricant be transferred to the sliding surface of the head slider at the time of action to form a stable friction state. A weak lubricant layer plays an important role. For this reason, sufficient reliability cannot be ensured unless there is a weakly adsorbed layer in the CSS area. On the other hand, with regard to the low adhesiveness required in the data area, when the disk suddenly stops due to a device error and comes into contact with the data area, lubricant aggregates between the head disks and seeks. It is necessary to prevent excessive lubrication of the lubricant by the head, and a layer of weak adsorption that easily moves on the disk surface adversely affects adhesion, contrary to continuous sliding durability. . For this reason, in the data area, it is necessary to reduce the number of weakly adsorbed layers. If a conventional adsorption-type lubricant is applied to the entire surface of the disc and only the data area is cleaned to remove the weakly adsorbed layer, the thickness of the lubricant film in the data area will inevitably be reduced. However, at present, although the contact sliding in the data area is small compared to the CSS area, in the magnetic disk drive where the flying height of the head is further reduced in the future, the head and the disk are in contact even in the data area. The chance of sliding increases, and it is highly likely that continuous sliding durability will be required even in the data area in the near future. Therefore, the thickness of the lubricating film in the data area must not be large enough to withstand single contact sliding. And the film thickness cannot be reduced.
この様な技術課題に対し、 前記従来技術の手法を考えると、 C S S領 域には液体の潤滑剤を塗布し、 データ領域には固体潤滑剤を使用するこ とを開示した特開平 6— 1 1 1292 号公報では各領域で要求される潤滑膜の 特性を確保できるが、 潤滑膜の形成プロセスが複雑になる不利な点があ る。 また特開平 4— 53027号公報では、 データ領域の潤滑層の膜厚を CSS 領域の潤滑層の膜厚より薄くすることを開示しデータ領域での低粘着性 と C S S領域での連続摺動耐久性を確保している。 しかしながら、 デー タ領域でも連続摺動耐久性を確保する必要があり、 潤滑膜の膜厚も薄く できないため、 上記の特開平 4— 53027号公報でも十分とは言えない。 こ の様に現在のところ C S S領域とデータ領域を形成したディスクに対し、 十分な摺動信頼性を確保できる有効な手法がない。  To address such technical problems, considering the above-mentioned conventional technique, Japanese Patent Laid-Open No. 6-1 discloses that a liquid lubricant is applied to the CSS area and a solid lubricant is used to the data area. Although the characteristics of the lubricating film required in each region can be secured in JP-A-11292, there is a disadvantage that the process of forming the lubricating film is complicated. Japanese Patent Application Laid-Open No. 4-53027 discloses that the thickness of the lubricating layer in the data area is made thinner than the thickness of the lubricating layer in the CSS area. Is secured. However, it is necessary to ensure continuous sliding durability even in the data region, and the thickness of the lubricating film cannot be reduced. Therefore, the above-mentioned Japanese Patent Application Laid-Open No. 4-53027 is not sufficient. As described above, at present, there is no effective method for securing sufficient sliding reliability for a disk in which the CSS area and the data area are formed.
本発明の目的は上記従来技術の問題点を解決し、 C S S領域とデータ 領域を形成したディスクに対し、 十分な摺動信頼性を確保できる有効な 手法を提供すると共にこの手法を適用した高性能な磁気ディスクと磁気 記録再生装置を提供することにある。 発明の開示  An object of the present invention is to solve the above-mentioned problems of the prior art, to provide an effective method for ensuring sufficient sliding reliability for a disk on which a CSS area and a data area are formed, and to provide a high-performance method using this method. Another object of the present invention is to provide a simple magnetic disk and a magnetic recording / reproducing apparatus. Disclosure of the invention
前記課題の解決手段として、 磁気ディスク上のデータ領域では、 低粘 着とするために吸着の弱い潤滑層をなるベく少なく し、 且つ単発的に発 生する磁気へッ ドと磁気ディスクとの接触摺動にも耐え得る膜厚の潤滑 膜を容易に形成するために、 磁気ディスク表面に強固に吸着する潤滑剤 を使用するか又は潤滑剤塗布後に処理を施す。 また、 C S S領域では、 十分な連続摺動耐久性を確保することと、 潤滑剤がへッ ドスライダー側 へ容易に移着することとを加味し、 粘着しにくい吸着性潤滑剤を吸着の 弱い潤滑層として意図的に cs S領域に形成する手法を考案した。 具体 的には以下に示す磁気ディスク, 磁気ディスク製造方法、 並びに磁気記 録再生装置である。 As a means for solving the above-mentioned problem, in the data area on the magnetic disk, a lubricating layer having weak adsorption is reduced as much as possible in order to achieve low adhesion, and the magnetic head and the magnetic disk which are generated sporadically. To easily form a lubricating film with a thickness that can withstand contact sliding, use a lubricant that strongly adheres to the surface of the magnetic disk, or apply a treatment after applying the lubricant. In addition, in the CSS area, taking into account the fact that sufficient continuous sliding durability is ensured and the fact that the lubricant easily transfers to the head slider side, it is possible to adsorb an adsorbent lubricant that is difficult to stick. A method for intentionally forming a weak lubricating layer in the cs S region was devised. Specifically, it is a magnetic disk, a method of manufacturing a magnetic disk, and a magnetic recording / reproducing apparatus described below.
第 1の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層し た磁気ディスクにおいて、 該磁気ディスクの回転起動時と回転停止時に 磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m 以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスラ ィダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域 とを備え、 前記保護膜表面に下記一般式 ( I ) 〜 (! Π)  A first means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating. A CSS area having a surface roughness of Ra 10 nm or more; and a data area having a surface roughness of Ra 3 nm or less where the magnetic head slider is located during rotation of the magnetic disk. And the following general formulas (I) to (! Π) are provided on the surface of the protective film.
R 1 - X- (C F2 C F20)m- (C F20)n-X- R 2 … ( I )R 1-X- (CF 2 CF 20 ) m- (CF 20 ) n -X- R 2… (I)
F(C Fi C F2 C F2- 0)n- C2 F<-X- R 3 - (Π) F (CF i CF 2 CF 2 - 0) n - C 2 F <-X- R 3 - (Π)
F - (C F (C FJ- C F2-0)n- C F (C F3)-X- R 4 … ( m ) (但し、 m, nは整数、 R l, R 2 , R 3, R 4は炭化水素鎖、 Xは 2 価の結合基) で表されるパーフロロポリエーテル系化合物の少なく とも 一つ以上を含む潤滑膜が形成され、 該潤'滑膜が前記保護膜表面に強固に 固定される潤滑剤と弱く固定される潤滑剤とから構成され、 前記 C S S 領域に形成される前記潤滑膜の固定の弱い潤滑剤の割合が、 前記。 S S 領域の潤滑剤総量に対して 1 0 %以上であり、 前記データ領域に形成さ れる前記潤滑膜の固定の弱い潤滑剤の割合が前記データ領域の潤滑剤総 量に対して 1 0 %未満である磁気ディスクである。 F-(CF (C FJ- CF 2 -0) n -CF (CF 3 ) -X- R 4… (m) (where m and n are integers, and R l, R 2, R 3 and R 4 are A lubricating film containing at least one perfluoropolyether compound represented by a hydrocarbon chain, X is a divalent linking group), and the lubricating film is firmly fixed to the surface of the protective film. The ratio of the weakly-fixed lubricant of the lubricating film formed in the CSS region is 10% with respect to the total amount of the lubricant in the SS region. This is the magnetic disk in which the ratio of the lubricant that fixes the lubricating film formed in the data area is less than 10% of the total amount of the lubricant in the data area.
第 2の手段は、 第 1の手段における潤滑膜が、 パーフロロカーボン系 溶剤で洗浄除去されずに前記保護膜表面に強固に固定される潤滑剤とパ 一フロロカーボン系溶剤で洗浄除去される固定の弱い潤滑剤とから構成 される磁気ディスクである。  The second means is a fixing method in which the lubricating film in the first means is not washed and removed with a perfluorocarbon-based solvent but is firmly fixed to the surface of the protective film and washed and removed with a perfluorocarbon-based solvent. This is a magnetic disk composed of a weak lubricant.
第 3の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層し た磁気ディスクにおいて、 該磁気ディスクの回転起動時と回転停止時に 磁気へッ ドスライダーが位置する前記保護膜表面の粗さが R a 1 O n m 以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスラ ィダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域 とを備え、 前記保護膜表面に前記一般式 ( I ) 〜 (! 0 ) で表されるパー フロロポリエーテル系化合物の少なく とも一つ以上を含む潤滑剤を前記 磁気ディスク全面に塗布後、 前記磁気ディスク全面を 8 0 °C以上に加熱 あるいは、 全面もしくは前記データ領域に紫外線照射し、 次いで前記 C S S領域をパーフロロカーボン系溶剤で洗浄することにより、 前記 C S S領域に形成した 1 . 5 n m 以上の膜厚の潤滑膜と前記デ一タ領域 に形成した 1 n m以上の膜厚の潤滑膜とを備えた磁気ディスクである。 第 4の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層し た磁気ディスクにおいて、 該磁気ディスクの回転起動時と回転停止時に 磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m 以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスラ ィダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域 とを備え、 前記保護膜表面に前記一般式 ( I ) 〜 (! Π ) で表されるパー フロロポリエーテル系化合物の少なく とも一つ以上を含む潤滑剤を前記 磁気ディスク全面に塗布後、 前記磁気ディスク全面を 8 0 °C以上に加熱 あるいは、 全面もしくは前記データ領域に紫外線照射し、 次いで前記磁 気ディスク全面をパーフロロカーボン系溶剤で洗浄し、 次に前記 C S S 領域に上記一般式 ( I ) 〜 (m ) のパーフロロポリエーテル系化合物か ら選択される吸着性の官能基を有するパーフロロポリエーテル系化合物 を塗布することにより、 前記 C S S領域に形成した 1 . 5 n m 以上の膜 厚の潤滑膜と前記データ領域に形成した 1 n m以上の膜厚の潤滑膜とを 備えた磁気ディスクである。 The third means is to sequentially laminate a base film, a magnetic film, and a protective film on a non-magnetic substrate. A magnetic disk, wherein when the magnetic disk starts rotating and when the magnetic disk stops rotating, the surface of the protective film on which the magnetic head slider is located has a roughness of Ra1Onm or more; And a data area where the roughness of the surface of the protective film where the magnetic head slider is located is 3 nm or less, and the surface of the protective film is represented by the general formulas (I) to (! 0). After applying a lubricant containing at least one perfluoropolyether compound to the entire surface of the magnetic disk, heating the entire surface of the magnetic disk to 80 ° C. or higher, or irradiating the entire surface or the data area with ultraviolet rays, Next, the CSS region is washed with a perfluorocarbon-based solvent to form a lubricating film having a thickness of 1.5 nm or more formed in the CSS region and a lubricating film having a thickness of 1 nm or more formed in the data region. With Magnetic disk. A fourth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially stacked on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating. A CSS area having a surface roughness of Ra 10 nm or more; and a data area having a surface roughness of Ra 3 nm or less where the magnetic head slider is located during rotation of the magnetic disk. After applying a lubricant containing at least one or more perfluoropolyether compounds represented by the general formulas (I) to (! Π) on the surface of the protective film, The entire surface of the magnetic disk is heated to 80 ° C. or higher, or the entire surface or the data region is irradiated with ultraviolet rays, and then the entire surface of the magnetic disk is washed with a perfluorocarbon-based solvent. ~ (M By applying a perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds of (1), a lubricating film having a film thickness of 1.5 nm or more formed in the CSS region is formed. A lubricating film with a thickness of 1 nm or more formed in the data area It is a magnetic disk provided.
第 5の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層し た磁気ディスクにおいて、 該磁気ディスクの回転起動時と回転停止時に 磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m 以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスラ ィダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域 とを備え、 前記保護膜表面に前記一般式 ( I ) 〜 (! Π ) で表されるパ一 フロロポリエーテル系化合物の少なく とも一つ以上を含む潤滑剤を前記 磁気ディスク全面に塗布後、 前記磁気ディスク全面を 8 0 °C以上に加熱 あるいは、 前記磁気ディスク全面もしくは前記データ領域を紫外線照射 し、 次いで前記磁気デイ スク全面をパーフロロカーボン系溶剤で洗浄し、 次に前記データ領域に前記一般式 ( I ) 〜 (m ) のパーフロロポリエー テル系化合物内から選択される前記保護膜表面と化学的に反応する官能 基を有するパーフロロポリエーテル系化合物を塗布することにより、 前 記 C S S領域に形成した 1 . 5 n m 以上の膜厚の潤滑膜と前記データ領 域に形成した 1 n m以上の膜厚の潤滑膜とを備えた磁気ディスクである。 第 6の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層し た磁気ディスクにおいて、 該磁気ディスクの回転起動時と回転停止時に 磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m 以上である C S S領域と、 前記磁気ディスクの回転中に磁気へヅ ドスラ ィダ—が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域 とを備え、 前記保護膜表面に前記一般式 ( I ) 〜 (! Π ) で表される前記 保護膜表面と化学的に反応する官能基を有するパーフロロポリエーテル 系化合物の少なく とも一つ以上を含む潤滑剤を前記磁気ディスク全面に 塗布後、 前記磁気ディスク全面を 8 0 °C以上に加熱あるいは、 全面もし くは前記データ領域に紫外線照射し、 次いで前記磁気ディスク全面をパ 一フロロカーボン系溶剤で洗浄し、 次にデータ領域に前記一般式 ( I ) 〜 (ΙΠ ) のパーフロロポリエーテル系化合物から選択される前記保護膜 表面と化学的に反応する官能基を有するパーフロロポリエーテル系化合 物を塗布することにより、 前記 C S S領域に形成した 1 . 5 n m 以上の 膜厚の潤滑膜と前記データ領域に形成した 1 n m以上の膜厚の潤'滑膜と を備えた磁気ディスクである。 Fifth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating. A CSS area having a surface roughness of Ra 10 nm or more; and a data area having a surface roughness of Ra 3 nm or less where the magnetic head slider is located during rotation of the magnetic disk. After applying a lubricant containing at least one of the polyfluoropolyether compounds represented by the general formulas (I) to (! Π) on the surface of the protective film, The entire surface of the magnetic disk is heated to 80 ° C. or higher, or the entire surface of the magnetic disk or the data area is irradiated with ultraviolet light, and then the entire surface of the magnetic disk is washed with a perfluorocarbon solvent. By applying a perfluoropolyether compound having a functional group which chemically reacts with the surface of the protective film selected from the perfluoropolyether compounds represented by the general formulas (I) to (m), The magnetic disk includes a lubricating film having a thickness of 1.5 nm or more formed in the CSS region and a lubricating film having a thickness of 1 nm or more formed in the data region. Sixth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating. A CSS area having a surface roughness of Ra 10 nm or more; and a data area having a surface roughness of Ra 3 nm or less where a magnetic head slider is located during rotation of the magnetic disk. And at least one or more perfluoropolyether compounds having a functional group chemically reactive with the surface of the protective film represented by the general formulas (I) to (! () On the surface of the protective film. After applying a lubricant containing the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C. or more, or Alternatively, the data area is irradiated with ultraviolet light, the entire surface of the magnetic disk is washed with a perfluorocarbon solvent, and then the data area is selected from the perfluoropolyether compounds of the general formulas (I) to (ΙΠ). By applying a perfluoropolyether compound having a functional group that chemically reacts with the surface of the protective film, the lubricating film having a thickness of 1.5 nm or more formed in the CSS region and the data region are formed. This is a magnetic disk provided with a formed lubricating film having a thickness of 1 nm or more.
第 7の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を順 に積層した磁気ディスクの製造方法において、 該磁気ディスクの回転起 動時と回転停止時に磁気へッ ドスライダ一が位置する前記保護膜表面の 粗さが R a 1 O n m以上である C S S領域と、 前記磁気ディスクの回転 中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 3 nm 以下のデータ領域とを形成し、 次に前記保護膜表面に前記一般式 ( I ) 〜 (m ) で表されるパーフロロポリエーテル系化合物の少なく とも一つ 以上を含む潤滑剤を前記磁気ディスク全面に塗布し、 次いで前記磁気デ イ スク全面を 8 0 °C以上に加熱あるいは、 前記磁気ディスク全面もしく は前記データ領域に紫外線照射し、 次いで前記 C S S領域をパーフロロ カーボン系溶剤で洗浄することにより、 前記 C S S領域に 1 . 5 n m 以 上の膜厚の潤滑膜を形成し、 前記データ領域に 1 n m以上の膜厚の潤滑 膜を形成する磁気ディスク製造方法である。  A seventh means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts and stops rotating. The surface of the protective film where the surface of the protective film is located has a roughness of Ra1 O nm or more, and the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk has a surface roughness of Ra3. and a lubricant containing at least one of the perfluoropolyether compounds represented by the general formulas (I) to (m) on the surface of the protective film. The entire surface of the magnetic disk is heated to 80 ° C. or higher, or the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays, and then the CSS area is washed with a perfluorocarbon solvent. And the one in the C S S region. 5 n m lubricating film thickness was formed on the following, a magnetic disk manufacturing method for forming a 1 n m or more thickness lubricating film of the data area.
第 8の手段は、 第 7の手段に記載の磁気ディスク製造方法において、 前記磁気ディスク全面をパーフロロカーボン系溶剤で洗浄した後、 前記 C S S領域に前記一般式 ( 1 ) 〜 (! Π ) のパーフロロポリエーテル系化 合物から選択される吸着性の官能基を有するパーフロロポリエーテル系 化合物を塗布し、 前記 C S S領域に 1 . 5 n m以上 の膜厚の潤滑膜を形 成し、 前記データ領域に 1 n m以上の膜厚の潤滑膜を形成する磁気ディ スク製造方法である。 An eighth means is the method of manufacturing a magnetic disk according to the seventh means, wherein the entire surface of the magnetic disk is washed with a perfluorocarbon solvent, and then the pars of the general formulas (1) to (! Π) are added to the CSS region. A perfluoropolyether compound having an adsorptive functional group selected from a fluoropolyether compound is applied to form a lubricating film having a thickness of 1.5 nm or more in the CSS region. Forming a lubricating film having a thickness of 1 nm or more in the data area.
第 9の手段は、 第 7の手段に記載の磁気ディスク製造方法において、 前記磁気ディスク全面をパーフロロカーボン系溶剤で洗浄した後、 前記 一般式 ( I ) 〜 (! Π ) のパーフロロポリエーテル系化合物から選択され る前記保護膜表面と化学的に反応する官能基を有するパーフロロポリエ 一テル系化合物を塗布し、 前記 C S S領域に 1 . 5 n m 以上の膜厚の潤 滑膜を形成し、 前記データ領域に 1 n m以上の膜厚の潤滑膜を形成する 磁気ディスク製造方法である。  A ninth means is the magnetic disk manufacturing method according to the seventh means, wherein the entire surface of the magnetic disk is washed with a perfluorocarbon-based solvent, and then the perfluoropolyether-based compound represented by any of the general formulas (I) to (!!) is used. Applying a perfluoropolyester-based compound having a functional group that chemically reacts with the surface of the protective film selected from the compound to form a lubricating film having a thickness of 1.5 nm or more in the CSS region; A magnetic disk manufacturing method for forming a lubricating film having a thickness of 1 nm or more in the data area.
第 1 0の手段は、 第 7の手段に記載の磁気ディスク製造方法において、 前記磁気ディスク全面を 8 0 °C以上に加熟あるいは、 紫外線照射した後、 前記一般式 ( I ) 〜 (! Π ) のパ一フロロポリエーテル系化合物から選択 される吸着性の官能基を有するパーフロロポリエーテル系化合物を前記 磁気ディスク全面に塗布し、 次に前記データ領域をパーフロロカーボン 系溶剤で洗浄した後、 前記一般式 ( I ) 〜 (! Π ) のパーフロロポリエー テル化合物から選択される化学的に反応する官能基を有するパーフロ口 ポリエーテル系化合物を塗布し、 前記 C S S領域に 1 . 5 n m 以上の膜 厚の潤滑膜を形成し、 前記データ領域に 1 n m以上の膜厚の潤'滑膜を形 成する磁気ディスク製造方法である。  A tenth means is the method of manufacturing a magnetic disk according to the seventh means, wherein the entire surface of the magnetic disk is ripened to 80 ° C. or higher or irradiated with ultraviolet light, and then subjected to the general formulas (I) to (! 全面). After applying a perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds of (1) to the entire surface of the magnetic disk, and then washing the data area with a perfluorocarbon solvent, A perfluoro-opened polyether compound having a chemically reactive functional group selected from the perfluoropolyether compounds represented by the general formulas (I) to (! Π) is applied, and 1.5 nm or more is applied to the CSS region. A method of manufacturing a magnetic disk, comprising forming a lubricating film having a thickness of 1 nm and a lubricating film having a thickness of 1 nm or more in the data area.
第 1 1 の手段は、 磁気へッ ドと、 磁気へッ ドを搭載した磁気へッ ドス ライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁 気ディスクとを備えた磁気記録再生装置において、 該磁気ディスクが磁 気ディスクの回転起動時と回転停止時に前記磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位置する前記保護 膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面 に前記一般式 ( I ) 〜 (! Π ) で表されるパーフロロポリエーテル系化合 物の少なく とも一つ以上を含む潤滑膜が形成され、 該潤滑膜が前記保護 膜表面に強固に固定される潤滑剤と弱く固定される潤滑剤とから構成さ れ、 前記 C S S領域に形成される前記潤滑膜の固定の弱い潤滑剤の割合 力、 前記 C S S領域の潤滑剤総量に対して 1 0 %以上であり、 前記デー タ領域に形成される前記潤滑膜の固定の弱い潤滑剤の割合が前記データ 領域の潤滑剤総量に対して 1 0 %未満であり、 前記データ領域で前記磁 気へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数がThe first means includes a magnetic head, a magnetic head slider having a magnetic head mounted thereon, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate. In the magnetic recording / reproducing apparatus, the roughness of the surface of the protective film on which the magnetic head slider 1 is located is Ra10 nm or more when the magnetic disk starts and stops rotating. And the protection in which the magnetic head slider is positioned during rotation of the magnetic disk. A data area having a film surface roughness of Ra 3 nm or less, and at least one of the perfluoropolyether compounds represented by the general formulas (I) to (! に) on the protective film surface. A lubricating film including the above is formed, and the lubricating film is composed of a lubricant firmly fixed to the surface of the protective film and a lubricant weakly fixed, and fixing the lubricating film formed in the CSS region. The ratio of the weak lubricant is 10% or more of the total amount of the lubricant in the CSS region, and the ratio of the weak lubricant for fixing the lubricant film formed in the data region is the lubrication of the data region. Less than 10% of the total amount of the agent, and the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area.
1 . 5以下, 動摩擦係数が 1 . 0以下であり前記 C S S領域で前記磁気へ ッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数が 1 . 0 以下, 動摩擦係数が 0 . 5以下である磁気記録再生装置である。 The dynamic friction coefficient is 1.5 or less, the dynamic friction coefficient is 1.0 or less, and the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the CSS region is 1.0 or less, and the dynamic friction coefficient is 0.5 or less. It is a magnetic recording and reproducing device.
第 1 2の手段は、 磁気へッ ドと、 磁気へッ ドを搭載した磁気へッ ドス ライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁 気ディスクとを備えた磁気記録再生装置において、 該磁気ディスクが磁 気ディスクの回転起動時と回転停止時に前記磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 1 0 II m以上である C S S領域と、 前肯己磁気ディスクの回転中に磁気へッ ドスライダ一が位置する前記保護 膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面 に前記一般式 ( 1 ) 〜 (! Π ) で表されるパーフロロポリエーテル系化合 物の少なく とも一つ以上を前記磁気ディスク全面に塗布後、 前記磁気デ イスク全面を 8 0 °C以上で加熱あるいは、 前記磁気ディスク全面もしく は前記データ領域を紫外線照射し、 次に前記データ領域をパーフロ口力 一ボン系溶剤で洗浄し、 前記 C S S領域に形成した潤滑膜が 1 . 5 n m 以上の膜厚であり前記データ領域に形成した潤滑膜が 1 n m以上の膜厚 であり、 前記データ領域で前記磁気へッ ドスライダ一と磁気ディスク間 で発生する最大静止摩擦係数が 1 . 5以下, 動摩擦係数が 1 . 0以下であ り前記 C S S領域で前記磁気へッ ドスライダ一と磁気ディスク間で発生 する最大静止摩擦係数が 1 . 0以下, 動摩擦係数が 0 . 5以下である磁気 記録再生装置である。 The first means comprises a magnetic head, a magnetic head slider equipped with a magnetic head, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate. In the magnetic recording / reproducing apparatus, when the magnetic disk starts and stops rotating, the surface roughness of the protective film on which the magnetic head slider 1 is located is Ra10IIm or more. And a data area where the roughness of the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk is less than Ra 3 nm. After applying at least one or more of the perfluoropolyether-based compounds represented by (!) To the entire surface of the magnetic disk, heating the entire surface of the magnetic disk at 80 ° C. or higher, or Purple over the entire surface or the data area The data area is then washed with a perfluorocarbon solvent, and the lubricating film formed in the CSS area has a thickness of 1.5 nm or more, and the lubricating film formed in the data area has a thickness of 1 nm. Film thickness of nm or more The maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1.0 or less in the data area. This is a magnetic recording and reproducing device with a maximum static friction coefficient of 1.0 or less and a dynamic friction coefficient of 0.5 or less between the magnetic disk and the magnetic disk.
第 1 3の手段は、 第 1 2の手段に記載の磁気記録再生装置において、 前記磁気ディスクが、 前記データ領域をパーフロロ力一ボン系溶剤で洗 浄後、 前記 C S S領域に前記一般式 ( I ) 〜 (ΠΙ ) で表されるパーフロ ロボリエーテル系化合物から選択される吸着性の官能基を有するパーフ ロロポリエーテル系化合物を塗布し、 前記 C S S領域に形成した潤滑膜 が 1 . 5 n m 以上の膜厚であリ前記データ領域に形成した潤'滑膜が l nm 以上の膜厚であることを特徴とする磁気記録再生装置である。  A thirteenth means is the magnetic recording / reproducing apparatus according to the first means, wherein the magnetic disk is configured such that after cleaning the data area with a perfluorocarbon solvent, the CSS area has the general formula (I ) A perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds represented by the following formulas (1) to (3) is applied, and the lubricating film formed in the CSS region has a thickness of 1.5 nm or more. A magnetic recording / reproducing apparatus, wherein the lubricating film formed in the data area has a thickness of 1 nm or more.
第 1 4の手段は、 第 1 2の手段に記載の磁気記録再生装置において、 前記磁気ディスクが、 前記データ領域をパーフロロカーボン系溶剤で洗 浄後、 前記磁気ディスク全面に前記一般式 ( I ) 〜 (! Π ) で表されるパ 一フロロポリエーテル系化合物から選択される該保護膜表面と化学的に 反応する官能基を有するパーフロロポリエーテル系化合物を塗布し、 前 記 C S S領域に形成した潤滑膜が 1 . 5 n m 以上の膜厚であり前記デー タ領域に形成した潤滑膜が 1 n m以上の膜厚である磁気記録再生装置で ある。  A fifteenth means is the magnetic recording / reproducing apparatus according to the twenty-second means, wherein the magnetic disk is provided with the following general formula (I): A perfluoropolyether compound having a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether compounds represented by (! Π) is applied to form the above-mentioned CSS region. The magnetic recording / reproducing apparatus has a lubricating film having a thickness of 1.5 nm or more and a lubricating film formed in the data area having a thickness of 1 nm or more.
第 1 5の手段は、 磁気へッ ドと、 磁気へッ ドを搭載した磁気へッ ドス ライダーと、 非磁性基板上に F地膜, 磁性膜, 保護膜を順に積層した磁 気ディスクとを備えた磁気記録再生装置において、 該磁気ディスクが磁 気ディスクの回転起動時と回転停止時に前記磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位置する前記保護 膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面 に前記一般式 ( I ) 〜 (! Π) で表されるパーフロロポリエーテル系化合 物の少なく とも一つ以上を前記磁気ディスク全面に塗布後、 前記磁気デ ィスク全面を 8 0°C以上で加熱あるいは、 前記磁気ディスク全面もしく は前記データ領域を紫外線照射し、 前記一般式 ( I ) 〜 (! Π) で表され るパーフロロポリエーテル系化合物から選択される吸着性の官能基を有 するパーフロロポリエーテル系化合物を前記磁気ディスク全面に塗布し、 次に前記データ領域をパーフロ口カーボン系溶剤で洗浄した後、 前記一 般式 ( 〗 ) 〜 (! Π) で表されるパーフロロポリエーテル化合物から選択 される化学的に反応する官能基を有するパーフロロポリエーテル系化合 物を塗布し、 前記 C S S領域に形成した潤滑膜が 1. 5 n m 以上の膜厚 であり前記データ領域に形成した潤滑膜が 1 n m以上の膜厚であり、 前 記データ領域で前記磁気へッ ドスライダ一と磁気ディスク間で発生する 最大静止摩擦係数が 1. 5 以下, 動摩擦係数が 1. 0 以下であり前記 C S S領域で前記磁気へッ ドスライダ一と磁気ディスク間で発生する最 大静止摩擦係数が 1. 0以下, 動摩擦係数が 0. 5以下である磁気記録再 生装置である。 The fifteenth means includes a magnetic head, a magnetic head slider equipped with a magnetic head, and a magnetic disk in which an F ground film, a magnetic film, and a protective film are sequentially stacked on a non-magnetic substrate. In the magnetic recording / reproducing apparatus, the roughness of the surface of the protective film on which the magnetic head slider 1 is located is Ra10 nm or more when the magnetic disk starts and stops rotating. When, The surface of the protective film, on which the magnetic head slider 1 is positioned during rotation of the magnetic disk, has a data area with a roughness of Ra 3 nm or less, and the surface of the protective film has the general formula (I) to (! Π). After applying at least one or more of the perfluoropolyether compounds represented by the formula (1) to the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated at 80 ° C or higher, or the entire surface of the magnetic disk or the The data area is irradiated with ultraviolet light, and the perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds represented by the above general formulas (I) to (! Π) is applied to the magnetic disk. After applying to the entire surface and then cleaning the data area with a perfluoro-opening carbon-based solvent, a chemical selected from the perfluoropolyether compounds represented by the general formulas (〗) to (! Π) A perfluoropolyether compound having a reactive group is applied, and the lubricating film formed in the CSS region has a thickness of 1.5 nm or more, and the lubricating film formed in the data region has a thickness of 1 nm or more. The maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1.0 or less in the data area. This magnetic recording / reproducing device has a maximum static friction coefficient between the head slider and the magnetic disk of 1.0 or less and a dynamic friction coefficient of 0.5 or less.
第 1 6の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層 した磁気ディスクにおいて、 該磁気ディスクの回転起動時と回転停止時 に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 1 Onm 以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスラ ィダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域 とを備え、 前記保護膜表面に下記一般式 (IV) 〜 (XII)  A sixteenth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating. A CSS area where the surface roughness of the film is Ra1 Onm or more, and a data area where the roughness of the surface of the protective film where the magnetic head slider is located during rotation of the magnetic disk is Ra3 nm or less. And the following general formulas (IV) to (XII) on the surface of the protective film.
F (C F2 C F2 C F20),- C2 F4- C 0 NH - C3 Hc - S i (0 C2 H J3 … (IV)F (CF 2 CF 2 CF 2 0),-C 2 F 4 -C 0 NH-C 3 H c -S i (0 C 2 HJ 3 … (IV)
F (C F (C F3)- C F20)r.-C F (C F3)- C0NH- C3 Hc F (CF (CF 3 )-CF 2 0) r .-CF (CF 3 )-C0NH- C 3 H c
一 S i (O C2 H … (V)One S i (OC 2 H… (V)
(C2 H。〇)3 S i - C3 He -NHC0- (C F2 C F20)m (C 2 H.Rei) 3 S i - C 3 H e -NHC0- (CF 2 CF 2 0) m
- (C Fz O)n-CONH- C3 H6 - S i (O C2 H5)3 … (VI) CE H5 - O - C6 H4 - H3 N+ "O C 0 - (C F2 C Fz 0)ra -(CF z O) n -CONH- C 3 H 6 -S i (OC 2 H 5 ) 3 … (VI) C E H 5 -O-C 6 H 4 -H 3 N + "OC 0-(CF 2 CF z 0) ra
— (C F2〇) n— C O〇一 +N H3 - Ce H4 - O - CB H5 … (VE) F (C F2 C F2 C F2— 0)n— C2 F,— C H2 〇 H … (VI)— (CF 2 〇) n — CO〇 一+ NH 3 -C e H 4 -O-C B H 5 … (VE) F (CF 2 CF 2 CF 2 — 0) n — C 2 F, — CH 2 〇 H… (VI)
HO- CH2- (C F2 C F20)m-(C F20)„- C H2 O H … (IX) HO— (CH2 CH2—〇)p— CH2 C F2— (C F2 C F20)m HO- CH 2- (CF 2 CF 2 0) m- (CF 2 0) „-CH 2 OH… (IX) HO— (CH 2 CH 2 —〇) p — CH 2 CF 2 — (CF 2 CF 2 0) m
-(C F20)n- OC F2 C H2(0- CH2 CHjQ- OH … (X) F (C F2 C F2 C F20)n- C2 F4- C00" +NH3— Ce H,—〇-(CF 2 0) n -OC F 2 CH 2 (0- CH 2 CHj Q -OH… (X) F (CF 2 CF 2 CF 2 0) n -C 2 F 4 -C00 "+ NH 3 — C e H, —〇
― Ce H5 … (XI)― C e H 5 … (XI)
F(C F (C F3)- C F20)n- C F (C F3)- COO~ +N H3 F (CF (CF 3 )-CF 20 ) n -CF (CF 3 )-COO ~ + NH 3
— H,—〇一 Ce H5 … (ΧΠ) — H, —〇 一 C e H 5 … (ΧΠ)
H, (C F2 C F20)m-(C F20)n H , (CF 2 CF 2 0) m- (CF 2 0) n
- … (Xffl)
Figure imgf000015_0001
-… ( Xffl)
Figure imgf000015_0001
(但し、 m, n , p, qは整数) で表されるパ一フロロポリエーテル系 化合物の少なく とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗 布後、 前記磁気ディスク全面を 8 0°C以上に加熱あるいは、 前記磁気デ イスク全面もしくは前記データ領域に紫外線照射し、 次いで前記 C S S 領域をパーフロロカーボン系溶剤で洗浄することにより、 前記 C S S領 域に形成した 1 . 5 n m 以上の膜厚の潤滑膜と前記データ領域に形成し た 1 n m以上の膜厚の潤滑膜とを備えたことを特徴とする磁気ディスク である。 (Where m, n, p, and q are integers) after applying a lubricant containing at least one or more perfluoropolyether-based compounds to the entire surface of the magnetic disk. By heating to 0 ° C or more or irradiating the entire surface of the magnetic disk or the data area with ultraviolet rays, and then cleaning the CSS area with a perfluorocarbon-based solvent, And a lubricating film having a thickness of 1.5 nm or more formed in the data area and a lubricating film having a thickness of 1 nm or more formed in the data area.
第 1 7の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層 した磁気ディスクにおいて、 該磁気ディスクの回転起動時と回転停止時 に磁気へッ ドスライダーが位置する前記保護膜表面の粗さが R a 1 O nm 以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスラ ィダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域 とを備え、 前記保護膜表面に前記一般式 (IV ) 〜 (XII ) で表されるパー フロロポリエーテル系化合物の少なくとも一つ以上を含む潤滑剤を前記 磁気ディスク全面に塗布後、 前記磁気ディスク全面を 8 0 °C以上に加熱 あるいは、 前記磁気ディスク全面もしくは前記データ領域に紫外線照射 し、 次いで前記磁気ディスク全面をパーフロロカーボン系溶剤で洗浄し、 前記 C S S領域に前記一般式 (VII ) 〜 (XII ) のパーフロロポリエーテル 系化合物から選択される吸着性の官能基を有するパーフロロポリエーテ ル系化合物を塗布し、 前記 C S S領域に形成した 1 . 5 n m 以上の膜厚 の潤滑膜と前記データ領域に形成した 1 n m以上の膜厚の潤滑膜とを備 えた磁気ディスクである。  A seventeenth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a nonmagnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts rotating and stops rotating. The CSS area where the film surface roughness is Ra 1 O nm or more, and the data where the surface roughness of the protective film where the magnetic head slider is located during rotation of the magnetic disk is Ra 3 nm or less. A lubricant containing at least one of the perfluoropolyether compounds represented by the general formulas (IV) to (XII) on the surface of the protective film. The entire surface of the magnetic disk is heated to 80 ° C. or more, or the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays.Then, the entire surface of the magnetic disk is washed with a perfluorocarbon solvent, and the general area is applied to the CSS area. A perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds of the formulas (VII) to (XII) is applied, and a film thickness of 1.5 nm or more is formed on the CSS region. And a lubricating film having a thickness of 1 nm or more formed in the data area.
第 1 8の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層 した磁気ディスクにおいて、 該磁気ディスクの回転起動時と回転停止時 に磁気ヘッ ドスライダーが位置する前記保護膜表面の粗さが R a 1 O nm 以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスラ ィダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域 とを備え、 前記保護膜表面に前記一般式 (IV ) 〜 ( ) で表されるパー フロロポリエーテル系化合物の少なくとも一つ以上を含む潤滑剤を前記 磁気ディスク全面に塗布後、 前記磁気ディスク全面を 8 0 °C以上に加熱 あるいは、 前記磁気ディスク全面もしくは前記データ領域に紫外線照射 し、 次いで前記データ領域をパ一フロロカーボン系溶剤で洗浄し、 前記 データ領域に前記一般式 (IV ) 〜 ( VI ) のパーフロロポリエーテル系化 合物から選択される該保護膜表面と化学的に反応する官能基を有するパ 一フロロポリエーテル系化合物を塗布し、 前記 C S S領域に形成した 1 . 5 n m 以上の膜厚の潤'滑膜と前記データ領域に形成した 1 n m以上 の膜厚の潤滑膜とを備えた磁気ディスクである。 The eighteenth means is a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating. A CSS area having a surface roughness of Ra1 O nm or more; and a data area having a surface roughness of Ra3 nm or less where the magnetic head slider is located during rotation of the magnetic disk. A lubricant containing at least one of perfluoropolyether compounds represented by the general formulas (IV) to () on the surface of the protective film. After coating the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C. or higher.Or, the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays.Then, the data area is washed with a perfluorocarbon-based solvent. Applying a perfluoropolyether compound having a functional group chemically reactive with the surface of the protective film selected from the perfluoropolyether compounds represented by the general formulas (IV) to (VI) to the region; The magnetic disk includes a lubricating film having a thickness of 1.5 nm or more formed in the CSS region and a lubricating film having a thickness of 1 nm or more formed in the data region.
第 1 9の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層 した磁気ディスクにおいて、 該磁気ディスクの回転起動時と回転停止時 に磁気ヘッ ドスライダーが位置する前記保護膜表面の粗さが R a 1 O nm 以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスラ ィダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域 とを備え、 前記保護膜表面に前記一般式 (IV ) 〜 (VI ) で表されるパー フロロポリエーテル系化合物の少なく とも一つ以上を含む潤滑剤を前記 磁気ディスク全面に塗布後、 前記磁気ディスク全面を 8 0 °C以上に加熱 あるいは、 前記磁気ディスク全面もしくは前記データ領域に紫外線照射 し、 次いで前記保護膜表面に前記一般式 (W ) 〜 (Xffl ) で表されるパー フロロポリエーテル系化合物から選択される吸着性の官能基を有するパ 一フロロポリエーテル系化合物を前記磁気ディ スク全面に塗布し、 次に 前記データ領域をパーフロ口カーボン系溶剤で洗浄し、 次に前記一般式 ( IV ) 〜 (VI ) のパーフロロポリエーテル系化合物から選択される該保 護膜表面と化学的に反応する官能基を有するパーフロロポリエーテル系 化合物を塗布し、 前記 C S S領域に形成した 1 . 5 n m 以上の膜厚の潤 滑膜と前記データ領域に形成した 1 n m以上の膜厚の潤'滑膜とを備えた 磁気ディスクである。 The nineteenth means is that, in a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, the protective film in which the magnetic head slider is positioned when the magnetic disk starts rotating and stops rotating. A CSS area having a surface roughness of Ra1 O nm or more; and a data area having a surface roughness of Ra3 nm or less where the magnetic head slider is located during rotation of the magnetic disk. After applying a lubricant containing at least one or more perfluoropolyether compounds represented by the general formulas (IV) to (VI) on the surface of the protective film, The entire surface of the disk is heated to 80 ° C. or higher, or the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays, and then the surface of the protective film is formed of a perfluoropolyether represented by any of the general formulas (W) to (Xffl). Compound A polyfluoropolyether compound having an adsorptive functional group selected from the group consisting of: is applied to the entire surface of the magnetic disk, and then the data area is washed with a carbon-based solvent having a perfluoro opening. ) To (VI), a perfluoropolyether compound having a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether compounds described in (1) to (6). and a lubricating membrane with a thickness of 1 nm or more formed in the data area. It is a magnetic disk.
第 2 0の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を 順に積層した磁気ディスクの製造方法において、 該磁気ディスクの回転 起動時と回転停止時に磁気へッ ドスライダ一が位置する前記保護膜表面 の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回 転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが  A twenty-first means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating. Where the roughness of the surface of the protective film where Ra is located is Ra10 nm or more, and the roughness of the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk.
R a 3 n m以下のデータ領域とを形成し、 次に前記保護膜表面に前記一 般式 (IV ) 〜 (X D1 ) で表されるパーフロロポリエ一テル系化合物の少な く とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗布後、 前記磁 気ディスク全面を 8 0 °C以上に加熱あるいは、 前記磁気ディスク全面も しくは前記データ領域に紫外線照射し、 次いで前記データ領域をパーフ ロロカーボン系溶剤で洗浄し、 前記 C S S領域に 1 . 5 n m 以上の膜厚 の潤'滑膜を形成し、 前記データ領域に 1 n m以上の膜厚の潤滑膜を形成 する磁気ディスク製造方法である。 Forming a data area of Ra 3 nm or less, and then forming at least one or more of perfluoropolyether compounds represented by the general formulas (IV) to (XD1) on the surface of the protective film. Is applied to the entire surface of the magnetic disk, and then the entire surface of the magnetic disk is heated to 80 ° C. or higher, or the entire surface of the magnetic disk or the data area is irradiated with ultraviolet light. A method for manufacturing a magnetic disk, comprising washing with a carbon-based solvent, forming a lubricating film having a thickness of 1.5 nm or more in the CSS region, and forming a lubricating film having a thickness of 1 nm or more in the data region. .
第 2 1 の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を 順に積層した磁気ディスクの製造方法において、 該磁気ディスクの回転 起動時と回転停止時に磁気へッ ドスライダ一が位置する前記保護膜表面 の粗さが R a 1 O n m以上である C S S領域と、 前記磁気ディスクの回 転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが  A twenty-first means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating. Where the roughness of the surface of the protective film where Ra is located is Ra1 O nm or more, and the roughness of the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk.
R a 3 n m以下のデータ領域とを形成し、 次に前記保護膜表面に前記一 般式 (IV ) 〜 (xm) で表されるパーフロロポリエーテル系化合物の少な く とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗布後、 前記磁 気ディスク全面を 8 0 °C以上に加熱あるいは、 前記磁気ディスク全面も しくは前記データ領域に紫外線照射し、 次いで前記磁気ディスク全面を パーフロロカーボン系溶剤で洗浄し、 前記 C S S領域に前記一般式(W ) 〜 (XH ) のパーフロロポリエーテル系化合物から選択される吸着性の官 能基を有するパーフロロポリエーテル系化合物を塗布し、 前記 C S S領 域に 1 . 5 n m 以上の膜厚の潤滑膜を形成し、 前記データ領域に 1 n m 以上の膜厚の潤'滑膜を形成する磁気ディスク製造方法である。 Forming a data area of Ra 3 nm or less, and then containing at least one or more of the perfluoropolyether compounds represented by the general formulas (IV) to (xm) on the surface of the protective film. After applying a lubricant to the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C. or higher, or the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays. After washing with a solvent, the general formula (W) To a perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds (XH) to (XH), and a lubricating film having a thickness of 1.5 nm or more is applied to the CSS region. Forming a lubricating film having a thickness of 1 nm or more in the data area.
第 2 2の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を 順に積層した磁気ディスクの製造方法において、 該磁気ディスクの回転 起動時と回転停止時に磁気へッ ドスライダ一が位置する前記保護膜表面 の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回 転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが  A second means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating. Where the roughness of the surface of the protective film where Ra is located is Ra10 nm or more, and the roughness of the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk.
R a 3 n m以下のデータ領域とを形成し、 次に前記保護膜表面に前記一 般式 (IV ) 〜 (XII ) で表されるパーフロロポリエーテル系化合物の少な く とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗布後、 前記磁 気ディスク全面を 8 0 °C以上に加熱あるいは、 前記磁気ディスク全面も しくは前記データ領域に紫外線照射し、 次いで前記磁気ディスク全面を パーフロロカーボン系溶剤で洗浄し、 前記データ領域に前記一般式(IV ) 〜 (VI ) のパーフロロポリエーテル系化合物から選択される前記保護膜 表面と化学的に反応する官能基を有するパーフロロポリエーテル系化合 物を塗布し、 前記 C S S領域に 1 . 5 n m 以上の膜厚の潤滑膜を形成し、 前記データ領域に 1 n m以上の膜厚の潤滑膜を形成する磁気ディスク製 造方法である。 Forming a data area of Ra 3 nm or less, and then containing at least one or more of the perfluoropolyether compounds represented by the general formulas (IV) to (XII) on the surface of the protective film. After applying a lubricant to the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C. or higher, or the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays. Washing with a solvent, and a perfluoropolyether compound having a functional group chemically reactive with the surface of the protective film selected from the perfluoropolyether compounds represented by the general formulas (IV) to (VI) in the data area. A magnetic disk manufacturing method in which a material is applied, a lubricating film having a thickness of 1.5 nm or more is formed in the CSS region, and a lubricating film having a thickness of 1 nm or more is formed in the data region.
第 2 3の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を 順に積層した磁気ディスクの製造方法において、 該磁気ディスクの回転 起動時と回転停止時に磁気へッ ドスライダ一が位置する前記保護膜表面 の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回 転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域とを形成し、 次に前記保護膜表面に前記一 般式 (IV )〜(VI ) で表されるパーフロロポリエーテル系化合物から選択 される前記保護膜表面と化学的に反応する官能基を有するパーフロロポ リエーテル系化合物を少なくとも一つ以上を前記磁気ディスク全面に塗 布し、 前記磁気ディスク全面を 8 0 °C以上で加熱あるいは、 紫外線照射 した後、 前記一般式 (VI!)〜(XII ) で表されるパーフロロポリエーテル系 化合物から選択される吸着性の官能基を有するパーフロロポリエーテル 系化合物を前記磁気ディスク全面に塗布し、 次に前記データ領域をパー フロロカーボン系溶剤で洗浄し、 次に前記一般式 (IV ) 〜 (VI ) のパー フロロポリエーテル系化合物から選択される前記保護膜表面と化学的に 反応する官能基を有するパーフロロポリエーテル系化合物を塗布し、 前 記 C S S領域に 1 . 5 n m 以上の膜厚の潤滑膜を形成し、 前記データ領 域に 1 n m以上の膜厚の潤滑膜を形成する磁気ディスク製造方法である。 第 2 4の手段は、 磁気へッ ドと、 磁気へッ ドを搭載した磁気へッ ドス ライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁 気ディスクとを備えた磁気記録再生装置において、 該磁気ディスクが磁 気ディスクの回転起動時と回転停止時に前記磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディ スクの回転中に磁気へッ ドスライダ一が位置する前記保護 膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 次に前記保護膜 表面に前記一般式 (IV ) 〜 (Xffl ) で表されるパーフロロポリエーテル系 化合物の少なく とも一つ以上を前記磁気ディスク全面に塗布後、 前記磁 気ディスク全面を 8 0 °C以上で加熟あるいは、 前記磁気ディスク全面も しくは前記データ領域を紫外線照射し、 次に前記データ領域をパーフロ 口カーボン系溶剤で洗浄し、 前記 C S S領域に形成した潤滑膜が 1 . 5 n m以上の膜厚であリ前記データ領域に形成した潤滑膜が 1 n m以上の 膜厚であり、 前記データ領域で前記磁気へッ ドスライダ一と磁気ディス ク間で発生する最大静止摩擦係数が 1 . 5以下, 動摩擦係数が 1 . 0以下 であり前記 C S S領域で前記磁気へッ ドスライダ一と磁気ディスク間で 発生する最大静止摩擦係数が 1 . 0以下, 動摩擦係数が 0 . 5以下である 磁気記録再生装置である。 A second means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating. Where the roughness of the surface of the protective film where Ra is located is Ra10 nm or more, and the roughness of the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk. Forming a data area of Ra 3 nm or less, and then forming on the surface of the protective film selected from the perfluoropolyether compounds represented by the general formulas (IV) to (VI) on the surface of the protective film. After applying at least one or more perfluoropolyether-based compounds having a chemically reactive functional group to the entire surface of the magnetic disk, and heating or irradiating the entire surface of the magnetic disk at 80 ° C. or higher, the general formula A perfluoropolyether compound having an adsorptive functional group selected from perfluoropolyether compounds represented by (VI!) To (XII) is applied to the entire surface of the magnetic disk. After washing with a perfluorocarbon-based solvent, a functional group chemically reacting with the surface of the protective film selected from the perfluoropolyether-based compounds represented by the general formulas (IV) to (VI) is provided. A magnetic disk in which a perfluoropolyether compound to be applied is coated, a lubricating film having a thickness of 1.5 nm or more is formed in the CSS region, and a lubricating film having a thickness of 1 nm or more is formed in the data region. It is a manufacturing method. The twenty-fourth means includes a magnetic head, a magnetic head slider having a magnetic head mounted thereon, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate. In the magnetic recording / reproducing apparatus, the roughness of the surface of the protective film on which the magnetic head slider 1 is located is Ra10 nm or more when the magnetic disk starts and stops rotating. And a data area where the surface of the protective film on which the magnetic head slider 1 is located during rotation of the magnetic disk has a roughness of Ra 3 nm or less, and then the surface of the protective film has the general formula (IV) ) To (Xffl), after applying at least one or more of the perfluoropolyether-based compounds over the entire surface of the magnetic disk, ripening the entire surface of the magnetic disk at 80 ° C or higher, or Or the data area is purple After irradiating with an external ray, the data area was washed with a carbon-based solvent having a perforated opening. The thickness of the lubricating film formed in the data area is 1 nm or more, and the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1 nm. The dynamic friction coefficient is less than 1.0, the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the CSS area is less than 1.0, and the dynamic friction coefficient is less than 0.5. It is a recording and reproducing device.
第 2 5の手段は、 磁気ヘッ ドと、 磁気ヘッ ドを搭載した磁気へッ ドス ライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁 気ディスクとを備えた磁気記録再生装置において、 該磁気ディスクが磁 気ディスクの回転起動時と回転停止時に前記磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位置する前記保護 膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 次に前記保護膜 表面に前記一般式 (IV ) 〜 (XII ) で表されるパーフロロポリエーテル系 化合物の少なく とも一つ以上を前記磁気ディスク全面に塗布後、 前記磁 気ディスク全面を 8 0 °C以上で加熱あるいは、 前記磁気ディスク全面も しくは前記データ領域を紫外線照射し、 次に前記ディスク全面をパーフ ロロカーボン系溶剤で洗浄し、 前記 C S S領域に前記一般式 (W ) 〜 The twenty-fifth means is a magnetic head having a magnetic head, a magnetic head slider having a magnetic head mounted thereon, and a magnetic disk having a base film, a magnetic film, and a protective film sequentially laminated on a non-magnetic substrate. In the recording / reproducing apparatus, when the magnetic disk starts and stops rotating, the surface of the protective film on which the magnetic head slider 1 is located has a roughness of Ra10 nm or more, and a CSS area. The surface of the protective film, on which the magnetic head slider 1 is positioned during rotation of the magnetic disk, has a data area with a roughness of Ra 3 nm or less. Then, the surface of the protective film has the general formula (IV) to (IV). XII), after applying at least one or more of the perfluoropolyether-based compound to the entire surface of the magnetic disk, heating the entire surface of the magnetic disk at 80 ° C. or higher, or Data area And external irradiation, then washing the entire disk surface with perforations Rollo carbon-based solvent, the C S S region in the general formula (W) ~
( Xffl ) のパーフロロポリエーテル系化合物から選択される吸着性の官能 基を有するパーフロロポリエーテル系化合物を塗布し、 前記 C S S領域 に形成した潤滑膜が 1 . 5 n m 以上の膜厚であり前記データ領域に形成 した潤滑膜が 1 n m以上の膜厚であり、 前記データ領域で前記磁気へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数が 1 . 5 以 下, 動摩擦係数が 1 . 0 以下であり前記 C S S領域で前記磁気へッ ドス ライダ一と磁気ディスク間で発生する最大静止摩擦係数が 1 . 0 以下, 動摩擦係数が 0 . 5 以下である磁気記録再生装置である。 (Xffl) a perfluoropolyether compound having an adsorptive functional group selected from perfluoropolyether compounds selected from perfluoropolyether compounds, and the lubricating film formed in the CSS region has a thickness of 1.5 nm or more. The lubricant film formed in the data area has a thickness of 1 nm or more, the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1 or less. 2.0 or less, and the maximum static friction coefficient generated between the magnetic head slider 1 and the magnetic disk in the CSS region is 1.0 or less, A magnetic recording / reproducing device having a dynamic friction coefficient of 0.5 or less.
第 2 6の手段は、 磁気へッ ドと、 磁気へッ ドを搭載した磁気へッ ドス ライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁 気ディスクとを備えた磁気記録再生装置において、 該磁気ディスクが磁 気ディスクの回転起動時と回転停止時に前記磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位置する前記保護 膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 次に前記保護膜 表面に前記一般式 (IV ) 〜 (XD1 ) で表されるパーフロロポリエーテル系 化合物の少なく とも一つ以上を前記磁気ディスク全面に塗布後、 前記磁 気ディスク全面を 8 0 °C以上で加熟あるいは、 前記磁気ディスク全面も しくは前記データ領域を紫外線照射し、 次に前記データ領域をパーフロ 口カーボン系溶剤で洗浄した後、 前記一般式 (IV ) 〜 (VI ) のパーフロ 口ポリエーテル系化合物から選択される前記保護膜表面と化学的に反応 する官能基を有するパーフロロポリエーテル系化合物を塗布し、 前記 C S S領域に形成した潤滑膜が 1 . 5 n m 以上の膜厚であり前記データ 領域に形成した潤滑膜が 1 n m以上の膜厚であり、 前記データ領域で前 記磁気へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数 が 1 . 5以下, 動摩擦係数が 1 . 0以下であり前記 C S S領域で前記磁気 へヅ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数が 1. 0 以下, 動摩擦係数が 0 . 5以下である磁気記録再生装置である。  The twenty-sixth means includes a magnetic head, a magnetic head slider having a magnetic head mounted thereon, and a magnetic disk having a base film, a magnetic film, and a protective film sequentially laminated on a non-magnetic substrate. In the magnetic recording / reproducing apparatus, the roughness of the surface of the protective film on which the magnetic head slider 1 is located is Ra10 nm or more when the magnetic disk starts and stops rotating. And a data area in which the surface of the protective film on which the magnetic head slider 1 is located during rotation of the magnetic disk has a roughness of Ra 3 nm or less. Then, the surface of the protective film has the general formula (IV) After applying at least one or more of the perfluoropolyether compounds represented by (XD1) to the entire surface of the magnetic disk, the entire surface of the magnetic disk is ripened at 80 ° C. or higher, or the entire surface of the magnetic disk is Or the data area After irradiating with outside light, and then cleaning the data area with a perfluorinated carbon-based solvent, it chemically reacts with the surface of the protective film selected from the perfluorinated polyether compounds represented by the general formulas (IV) to (VI). A lubricating film formed in the CSS region has a thickness of 1.5 nm or more, and a lubricating film formed in the data region has a thickness of 1 nm or more. The maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1.0 or less in the data area. This magnetic recording and reproducing device has a maximum static friction coefficient between magnetic disks of 1.0 or less and a dynamic friction coefficient of 0.5 or less.
第 2 7の手段は、 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を 順に積層した磁気ディスクの製造方法において、 該磁気ディスクの回転 起動時と回転停止時に磁気へッ ドスライダ一が位置する前記保護膜表面 の粗さが R a 1 O n m以上である C S S領域と、 前記磁気ディ スクの回 転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが A twenty-seventh means is a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein a magnetic head slider is provided when the magnetic disk starts rotating and stops rotating. Where the roughness of the surface of the protective film where R is located is not less than Ra1Onm, and the rotation speed of the magnetic disk. The roughness of the protective film surface where the magnetic head slider 1 is located during
R a 3 n m以下のデータ領域とを形成し、 次に前記保護膜表面に前記一 般式 (IV ) 〜 ( VI ) で表されるパーフロロポリエーテル系化合物から選 択される前記保護膜表面と化学的に反応する官能基を有するパーフロロ ポリエーテル系化合物を少なく とも一つ以上を前記磁気ディスク全面に 塗布し、 前記磁気ディスク全面を 8 0 °C以上で加熱あるいは、 紫外線照 射した後、 前記一般式 (W ) 〜 (XID ) で表されるパーフロロポリエーテ ル系化合物から選択される吸着性の官能基を有するパーフロロポリエー テル系化合物を前記磁気ディスク全面に塗布し、 次に前記データ領域を パーフロロカーボン系溶剤で洗浄し、 次に前記一般式 (IV ) 〜 (VI ) の パーフロロポリエーテル系化合物から選択される前記保護膜表面と化学 的に反応する官能基を有するパーフロロポリエーテル系化合物を塗布し、 前記 C S S領域に形成した潤滑膜が 1 . 5 n m 以上の膜厚であり前記デ ータ領域に形成した潤滑膜が 1 n m以上の膜厚であり、 前記データ領域 で前記磁気へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦 係数が 1 . 5以下, 動摩擦係数が 1 . 0以下であり前記 C S S領域で前記 磁気へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数が 1 . 0以下, 動摩擦係数が 0 . 5以下である磁気記録再生装置である。 第 2 8の手段は、 第 1 の手段において該磁気ディ スクの直径が 88. 9M 以下である磁気ディスクである。 Forming a data area of Ra 3 nm or less, and then forming the surface of the protective film selected from the perfluoropolyether compounds represented by the general formulas (IV) to (VI) on the surface of the protective film. After applying at least one or more perfluoropolyether compounds having a functional group chemically reacting with the entire surface of the magnetic disk, heating the entire surface of the magnetic disk at 80 ° C. or higher, or irradiating with ultraviolet light, A perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds represented by the general formulas (W) to (XID) is applied to the entire surface of the magnetic disk. The data area is washed with a perfluorocarbon-based solvent, and then a functional group chemically reacting with the surface of the protective film selected from the perfluoropolyether-based compounds represented by the general formulas (IV) to (VI) is added. A lubricating film formed in the CSS region has a thickness of 1.5 nm or more, and a lubricating film formed in the data region has a thickness of 1 nm or more, The maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less and the dynamic friction coefficient is 1.0 or less in the data area, and the maximum friction coefficient between the magnetic head slider and the magnetic disk is 1.0 or less in the CSS area. The magnetic recording and reproducing device has a maximum static friction coefficient of 1.0 or less and a dynamic friction coefficient of 0.5 or less. A twenty-eighth means is the magnetic disk according to the first means, wherein the diameter of the magnetic disk is 88.9M or less.
第 2 9の手段は、 第 7の手段において該磁気ディスクの直径が 88. 9龍 以下である磁気ディスクである。  A twentieth means is the magnetic disk according to the seventh means, wherein the diameter of the magnetic disk is 88.9 dragons or less.
第 3 0の手段は、 第 1 1 の手段において該磁気ディスクの直径が 88. 9 111111以下である磁気ディスクである。  A thirtieth means is the magnetic disk according to the first means, wherein the diameter of the magnetic disk is 88.9111111 or less.
本発明は、 C S S領域には固定の強い潤滑剤と固定の弱い潤滑剤とで 構成される潤滑層を形成して連続摺動耐久性を確保し、 データ領域には 主に固定の強い潤'滑剤で構成される潤滑層を形成して粘着を軽減できる 技術である。 この際、 固定の弱い潤滑剤が少ないデータ領域の潤滑層は、 近年の浮上量低下による偶発的なデータ領域での接触措動にも対応する ため、 膜厚もある程度厚くする必要がある。 このため、 反応型や高吸着 性の官能基を有する潤滑剤を選択したり加熱や UV処理で固定の強い潤 '滑剤の層を厚くするだけでなく、 データ領域のみ再塗布する。 逆に CSS 領域では、 固定の弱い潤滑剤が少ない場合、 再度 C S S領域に潤滑剤を 塗布する。 この様な構成の潤滑膜を形成することによりデータ領域と C S S領域の各領域で要求される摺動性能を満足できる信頼性の高い磁 気ディスク並びに磁気ディスク装置を得ることができる。 図面の簡単な説明 The present invention is based on the assumption that the CSS area has a strong fixed lubricant and a weak fixed lubricant. It is a technology that can secure continuous sliding durability by forming a lubricating layer that is composed and a lubricating layer that is mainly composed of a strongly fixed lubricant in the data area to reduce adhesion. In this case, the thickness of the lubricating layer in the data area where the amount of the weakly fixed lubricant is small needs to be increased to some extent in order to cope with accidental contact action in the data area due to the recent decrease in flying height. For this reason, not only select a reactive type or a lubricant having a highly adsorptive functional group, or thicken the layer of a highly fixed lubricant by heating or UV treatment, but also reapply only the data area. Conversely, if the amount of weakly fixed lubricant in the CSS area is low, apply the lubricant to the CSS area again. By forming a lubricating film having such a configuration, it is possible to obtain a highly reliable magnetic disk and magnetic disk device that can satisfy the sliding performance required in each of the data area and the CSS area. BRIEF DESCRIPTION OF THE FIGURES
第 1図は本実施例 1で作製した磁気ディスクの外観図並びに C S S領 域とデータゾーンの境界部 3の断面図である。  FIG. 1 is an external view of a magnetic disk manufactured in Example 1 and a cross-sectional view of a boundary 3 between a CSS area and a data zone.
第 2図は C S S試験と粘着試験の測定装置の概略図である。  FIG. 2 is a schematic diagram of a measuring device for the CSS test and the adhesion test.
第 3図は本発明実施例の磁気記録再生装置の断面図である。 発明を実施するための最良の形態  FIG. 3 is a sectional view of the magnetic recording / reproducing apparatus according to the embodiment of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION
以下本発明の実施例を示すが、 本発明はこれらの実施例によって限定 されない。  Hereinafter, examples of the present invention will be described, but the present invention is not limited to these examples.
〔実施例 1〕  (Example 1)
表面を鏡面研磨した直径 3. 5 インチのアルミ合金製基板の上に NiP 下地膜 Ι Ο μ πι, C r膜 0. 5 μ πι , C o— C r— P t膜 6 0 n m, 力 一ボン保護膜 2 0 ri mを順にスパッタ リ ングで形成した磁気ディ スクを 準備した。 次に、 この磁気ディスクの半径 1 5mmから 2 Onunの領域に直 径 0. 5 μ πι のフッ素樹脂粒子を静電塗布し、 磁気ディスク全面を酸素 によって 1 0 n mエッチングした後、 フッ素樹脂粒子を水洗除去した。 これによリ半径 1 5 nun力、ら 2 0 mmの領域に直径 0. 5 μ πι の円筒状突起 を均一に形成した。 すなわち、 半径 1 5 から 2 ΟΜの領域には中心線 平均粗さで R a 1 5 n mの C S S領域が形成され、 それ以外の領域は、 中心線平均粗さで R a 1 . 2 n m の平滑なデータ領域が形成されている。 次に、 下記一般式 (IV) で示される NiP base film 0.5 μππ, Cr film 0.5 μππ, Co—Cr—Pt film 60 nm on a 3.5-inch-diameter aluminum alloy substrate with mirror-polished surface A magnetic disk formed by sputtering a carbon protective film 20 Got ready. Next, a fluororesin particle having a diameter of 0.5 μππ is electrostatically applied to a region of the magnetic disk having a radius of 15 mm to 2 Onun, and the entire surface of the magnetic disk is etched with oxygen to a thickness of 10 nm. It was washed off. As a result, cylindrical protrusions having a diameter of 0.5 μππ were uniformly formed in a region with a radius of 15 nun force and a radius of 20 mm. That is, a CSS area with a center line average roughness of Ra 15 nm is formed in the area with a radius of 15 to 2 mm, and the other areas are smooth with a center line average roughness of Ra 1.2 nm. Data area is formed. Next, represented by the following general formula (IV)
F (C F2 C F2 C F20)n- C2 F, - C O N H - C3 He F (CF 2 CF 2 CF 2 0) n - C 2 F, - CONH - C 3 H e
- S i (〇 C2 H … (IV) パーフロロポリエーテル系化合物 (IV) をフッ素系溶剤 (住友 3 M社製, PF5052) に 0. 0 1 w t % の濃度で溶解させた溶液 ( 1 ) を作製した。 この溶液 ( 1 ) をディ ップ法により磁気ディスクに塗布し、 十分乾燥さ せた。 ディ ップ塗布の条件は、 以下の通りである。 -S i (〇C 2 H… (IV) A solution of perfluoropolyether compound (IV) dissolved in a fluorinated solvent (Sumitomo 3M, PF5052) at a concentration of 0.01 wt% (1 The solution (1) was applied to a magnetic disk by a dipping method and dried sufficiently.The conditions for the dip coating were as follows.
溶液への浸入速度 : 1 Onun/ s  Penetration rate into solution: 1 Onun / s
溶液中での滞留時間 : 1 8 0 s  Residence time in solution: 180 s
溶液からの引き上げ速度 : 2 . 5 I/ S  Speed of withdrawal from solution: 2.5 I / S
次に塗布した磁気ディスクを 1 0 0 °Cで 2 h加熱処理した。 これによ つて、 このパーフロロポリエーテル系化合物 (IV) は、 保護膜表面と化 学的に反応してディスク表面に強固に固定される。 その後、 下記一般式 (XI) で示される  Next, the applied magnetic disk was heated at 100 ° C. for 2 hours. As a result, the perfluoropolyether compound (IV) chemically reacts with the surface of the protective film and is firmly fixed on the disk surface. Then, it is represented by the following general formula (XI)
F (C F2 C F2 C F2〇)n— C2 F4 _ C〇 0— +N H3 - C6 H4 - 0 一 C6 H5 … (XI) パーフロロポリエーテル系化合物 (XI) をフッ素系溶剤 (住友 3 M社製, PF5052) に 0. 0 0 1 w t % の濃度で溶解させた溶液 ( 2 ) を上記の条 件でディ ップ法により磁気ディスクに塗布し、 十分乾燥させた。 次に、 この塗布ディスクのデータ領域のみを上記フッ素系溶剤により 洗浄した。 洗浄はデータ領域をフッ素系溶剤に浸潰した状態でディスク を回転させる方法とスピンナーを利用してディスクを回転させながらノ ズルから噴出されるフッ素系溶剤をデータ領域にのみ当てる方式がある。 本実施例では、 スピンナーを利用する方式を採用した。 スピンナ一の回 転数は、 1 0 0 O rpm でノズルからのフッ素系溶剤の噴出量は 5 0 m l / min である。 F (CF 2 CF 2 CF 2 〇) n — C 2 F 4 _ C〇 0— + NH 3 -C 6 H 4 -0.1 C 6 H 5 … (XI) Perfluoropolyether compound (XI) The solution (2) dissolved in a fluorine-based solvent (PF5052, manufactured by Sumitomo 3M, Ltd.) at a concentration of 0.01 wt% was In this case, it was applied to a magnetic disk by a dipping method and dried sufficiently. Next, only the data area of the coated disk was washed with the fluorine-based solvent. There are two types of cleaning: a method in which the disk is rotated while the data area is immersed in a fluorine-based solvent, and a method in which the fluorine-based solvent ejected from the nozzle is applied only to the data area while rotating the disk using a spinner. In this embodiment, a method using a spinner is employed. The number of revolutions of the spinner is 100 O rpm, and the ejection amount of the fluorine-based solvent from the nozzle is 50 ml / min.
このようにして作製したスパッタ磁気デイスクは、 C S S領域にディ スク表面と化学的に反応した潤滑層、 すなわち固定の強い潤滑層とパー フロロポリエーテル系化合物 (XI ) で構成される固定の弱い潤滑層とが 形成されている。 さらに、 データ領域には殆どがパーフロロポリエーテ ル系化合物 (IV ) で構成される固定の強い潤滑層のみが形成されている。 データ領域の潤滑層の膜厚は 2 . 2 n m , C S S領域の潤'滑層の膜厚は 2 . 7 n m である。 第 1 図に本実施例で作製した磁気ディスクの外観図 並びに C S S領域とデータ領域の境界部 3の断面図を示す。  The sputtered magnetic disk fabricated in this way has a lubricating layer that chemically reacts with the disk surface in the CSS region, that is, a strongly fixed lubricating layer and a weakly fixed lubricating layer composed of a perfluoropolyether compound (XI). Layers are formed. Furthermore, only a strongly fixed lubricating layer composed mostly of perfluoropolyether compound (IV) is formed in the data area. The thickness of the lubricating layer in the data area is 2.2 nm, and the thickness of the lubricating layer in the CSS area is 2.7 nm. FIG. 1 shows an external view of a magnetic disk manufactured in this example and a cross-sectional view of a boundary 3 between the CSS area and the data area.
前記のスパッタ磁気ディスクについて C S S (Contact - Start - Stop) 試験と粘着試験を下記の実験条件で実施した。 第 2図に測定装置の概要 を示す。  A CSS (Contact-Start-Stop) test and an adhesion test were performed on the sputtered magnetic disk under the following experimental conditions. Fig. 2 shows the outline of the measuring device.
測定する磁気ディスク 7は、 装置下部のモータ一と直結のスピン ドル 8に取り付け、 ディスク押さえ 9で固定している。 ヘッ ドスライダー 1 2は、 ディスクの回転方向と順方向にレール面が接するインラインタ イブ ( A 1 23 T i C製 2 0 T ) のものであり、 ロー ドセル 1 0に接続 されているアーム 1 3に固定されている。 ロー ドセル 1 0を固定してい るステージ 1 1 は、 半径方向に移動可能であり、 各トツラクでの評価が 可能である。 モーターを回転させることによりヘッ ドスライダー 1 2 と 磁気ディスク 7間で発生する摩擦力をロー ドセルで測定する。 The magnetic disk 7 to be measured is mounted on a spindle 8 directly connected to the motor 1 at the bottom of the apparatus, and is fixed with a disk holder 9. Heads slider 1 2 is of the in-line data Eve rail surface is in contact with the rotating direction and the forward direction of the disk (A 1 23 T i C steel 2 0 T), is connected to the load cell 1 0 It is fixed to arm 13. The stage 11 to which the load cell 10 is fixed is movable in the radial direction, and the evaluation at each track is It is possible. The frictional force generated between the head slider 12 and the magnetic disk 7 by rotating the motor is measured by a load cell.
C S S評価実験において、 C S S領域では、 ディスクの回転と停止を 短い周期で繰り返して行い、 C S S回数 1 0万回まで実施した。 この間、 C S S回数 1 回, 5 0回, 1 0 0回, 5 0 0回, 1 0 0 0回, 5 0 0 0 回, 1 0 0 0 0回その後は、 1 0 0 0 0回毎にディスクを停止させ、 へ ッ ドを 2秒間接触させた後 1 Orpm で回転させた時の最大動摩擦力を測 定した。 また、 ディスクがクラッシュする C S S回数も測定した。 ディ スクのクラッシュは、 潤滑膜の下地であるカーボン保護膜が完全に摩耗 し、 磁性膜が露出した状態であり、 クラッシュが発生すると目視で確認 できる摺動痕が発生し、 そこまでの C S S回数を測定し、 実験を中止し た。 なお、 1 0万回以下でディスクがクラッシュした場合の最大動摩擦 力は、 ディスクがクラッシュしたじ S S回数までの最大動摩擦係数を採 用した。 ディスクの最大回転数は 5 4 0 Orpm で、 へッ ドの押し付け荷 重は 3. 0 g である。 一方、 データ領域では、 ヘッ ドは通常浮上した状 態にあるので、 へッ ドを浮上させた状態で 2 0時間ディスクを稼働させ た。 ただし、 磁気ディスク装置の偶発的なトラブルでディスクが停止し た場合を想定し、 実験開始から 4時間, 8時間, 1 2時間, 1 6時間, 2 0時間 (測定終了時) の各時点でディスクを停止させ、 C S S領域で の測定と同様、 ヘッ ドを 2秒間接触させた後 1 Orpm で回転させた時の 最大動摩擦力を測定した。 また、 ディスク表面の摺動痕についても観察 し、 クラッシュの場合は、 その時点で実験を中止した。  In the CSS evaluation experiment, in the CSS region, the disk was repeatedly rotated and stopped at short intervals, and the CSS was performed up to 100,000 times. During this time, the number of CSSs is 1, 50, 100, 500, 100, 0, 0, 0, 0, 0, 0, 0 The disk was stopped, the head was brought into contact for 2 seconds, and then the maximum kinetic friction force was measured when rotating at 1 Orpm. The number of times the disk crashed C S S was also measured. A disk crash is a condition in which the carbon protective film underlying the lubricating film has been completely worn and the magnetic film has been exposed.If the crash occurs, a sliding mark that can be visually observed is generated, and the number of CSSs up to that point Was measured and the experiment was stopped. For the maximum kinetic friction force when the disk crashed in less than 100,000 times, the maximum kinetic friction coefficient up to the number of times SS the disk crashed was used. The maximum rotation speed of the disk is 540 Orpm, and the pressing load of the head is 3.0 g. On the other hand, in the data area, the head is usually in a floating state, so the disk was operated for 20 hours with the head floating. However, assuming that the disk stopped due to accidental trouble with the magnetic disk unit, the time was measured at 4 hours, 8 hours, 12 hours, 16 hours, and 20 hours (at the end of measurement) from the start of the experiment. The disk was stopped, and the maximum kinetic friction force was measured when the head was brought into contact for 2 seconds and then rotated at 1 Orpm, as in the measurement in the CSS area. We also observed sliding marks on the disk surface, and in the event of a crash, stopped the experiment at that point.
粘着の測定は、 へッ ド ' スライダーとディスクを 1 2時間接触させた 後、 ディスクを低速で回転させ、 回転直後に発生する最大静止摩擦力を 測定した。 測定は、 C S S領域, データ領域ともヘッ ドの押し付け荷重 3. 0 g , ディスク回転数 1 rpm で行った。 第 1表に上記の評価結果を 示す。 The adhesion was measured by bringing the head's slider into contact with the disk for 12 hours, then rotating the disk at low speed, and measuring the maximum static friction force generated immediately after the rotation. The measurement is for the head pressing load in both the CSS area and the data area. The test was performed at 3.0 g and a disk rotation speed of 1 rpm. Table 1 shows the above evaluation results.
第 1 表 Table 1
C S S試験 粘 ¾ g (験 C S S test viscosity ¾ g (test
C S S領域 データ領域 最大静止摩擦力( g f ) 最大動摩 クラッシュまで 最大動摩 摺動痕発生ま  C S S area Data area Maximum static friction force (g f) Maximum dynamic friction Until a crash Maximum dynamic friction
し b > T¾域 つ—タ P貝域 擦力(gf) の C S S回数 擦力(gf) での時間(h) 実施例 1 1. 8 6 〉 1 0 0 0 0 0 2. 1 6 > 2 0 1.8 6 2. 1 2 実施例 2 1. 6 7 〉 1 0 0 0 0 0 2. 3 8 > 2 0 1.9 5 2. 3 6 実施例 3 1. 9 〉 1 0 0 0 0 0 2. 0 1 > 2 0 1.6 6 2. 3 比較例 1 7.8 6 5 0 0 0 3. 1 2 > 2 0 1.3 5 2. 3 1 比較例 2 1. 8 2 〉 1 0 0 0 0 0 3. 5 1 > 2 0 1. 8 6 2 7. 6 比較例 3 1.6 2 〉 1 0 0 0 0 0 1 2. 6 8 1.9 2 2. 2 8 比較例 4 1. 5 1 〉 1 0 0 0 0 0 2. 9 5 > 2 0 1.6 9 3 2. 8 B> T¾ area i-P shell area Friction (gf) CSS times Friction (gf) time (h) Example 1 1.86 6〉 1 0 0 0 0 0 2.16> 2 0 1.8 6 2.12 Example 2 1.6.7 7> 1 0 0 0 0 0 2.38> 2 0 1.9 5 2.36 Example 3 1.9> 1 0 0 0 0 0 2.0 1> 2 0 1.6 6 2.3 Comparative example 1 7.8 6 5 0 0 0 3.12> 2 0 1.3 5 2.3 1 Comparative example 2 1.82 2〉 1 0 0 0 0 0 3.5 1> 2 0 1.8 6 2 7.6 Comparative example 3 1.6 2〉 1 0 0 0 0 0 1 2.6.8 8 1.9 2 2.28 Comparative example 4 1. 5 1〉 1 0 0 0 0 0 2.9 5> 2 0 1.6 9 3 2.8
本実施例を、 同じ磁気ディスク表面に本実施例で使用したパーフロロ ポリエーテル系化合物 (IV) だけを塗布した比較例 1 と比較すると、 本 実施例では、 データ領域, C S S領域とも C S S試験, 粘着試験で良好 な結果が得られているのに対し、 比較例 1ではデータ領域での粘着は低 いものの、 C S S領域での C S S試験でディスクがクラッシュしている。 また、 本実施例と同様にパーフロロポリエーテル系化合物 (IV) の次に パーフロロポリエーテル系化合物 (XI) を塗布して、 データ領域の洗浄 を行わない比較例 2では、 C S S領域での結果は良好であるのに対し、 データ領域で強い粘着が発生している。 This example is compared with Comparative Example 1 in which only the perfluoropolyether compound (IV) used in this example was applied to the same magnetic disk surface. In this example, both the data area and the CSS area were subjected to the CSS test and the adhesion. While good results were obtained in the test, in Comparative Example 1, the disk crashed in the CSS test in the CSS area, although the adhesion in the data area was low. In Comparative Example 2 in which the perfluoropolyether compound (XI) was applied after the perfluoropolyether compound (IV) and the data area was not cleaned in the same manner as in the present example, The results are good, but there is strong sticking in the data area.
〔実施例 2〕  (Example 2)
実施例 1 と同じスパッタ磁気ディスクを準備した。 次に下記一般式 (VI) に示すパーフロロポリエーテル化合物 (VI) を実施例 1 と同じフ ッ素系溶剤に 0.0 0 5 w t % 溶解した溶液を作製し、 実施例 1 と同条 件でディ ップ塗布後 1 2 0°Cで 1 0分間熱処理した後、 同じフッ素系溶 剤にて磁気ディスク全面を洗浄した。 この場合の潤滑層の膜厚は 0.75mn である。  The same sputtered magnetic disk as in Example 1 was prepared. Next, a solution was prepared by dissolving 0.005 wt% of a perfluoropolyether compound (VI) represented by the following general formula (VI) in the same fluorine-based solvent as in Example 1, and the same conditions as in Example 1 were used. After the dip coating, heat treatment was performed at 120 ° C. for 10 minutes, and then the entire surface of the magnetic disk was washed with the same fluorine-based solvent. In this case, the thickness of the lubricating layer is 0.75 mn.
(C2 H5〇)3 S i - C3 He - N H C0-(C F2 C F20)m (C 2 H 5 〇) 3 S i - C 3 H e - NH C0- (CF 2 CF 2 0) m
-(C F20)n- CON H- C3 He- S i (0 C2 HJ3 … (VI) 次に ト'記一般式 (VI) に示すフッ素系潤滑剤 (VI) を前記フッ素系溶 剤に 0.0 0 7 w t %溶解させた溶液を作製し、 - (CF 2 0) n - CON H- C 3 H e - S i (0 C 2 HJ 3 ... (VI) then fluorolubricant shown in bets' following general formula (VI) (VI) the fluorine A 0.007 wt% solution was prepared in the
F(C F2 C F2 C F2— 0)。— C, — C H2 OH … (VI) 実施例 1 と同様に塗布し、 データ領域のみ同フッ素系溶剤にて洗浄した。 さらに上記のパーフロロポリエーテル化合物 (VI) の 0.0 0 5 w t % 溶液をデータ領域にスピンナ一を使用し再度塗布した。 データー領域の 潤滑層の膜厚は 1.9 6 n mで、 C S S領域の潤滑層の膜厚は、 1.84 n mである c F (CF 2 CF 2 CF 2 — 0). — C, — CH 2 OH (VI) Coating was performed in the same manner as in Example 1, and only the data area was washed with the same fluorine-based solvent. Further, a 0.005 wt% solution of the above perfluoropolyether compound (VI) was applied again to the data area using a spinner. The thickness of the lubrication layer in the data area is 1.96 nm, and the thickness of the lubrication layer in the CSS area is 1.84 nm. c that is nm
本実施例で作製した潤滑膜の C S S特性と粘着特性を実施例 1 と同様 の手法で測定した。 第 1表に結果を示す。 本実施例においてパーフロロ ポリエーテル化合物 (VI ) を再度塗布しなかった比較例 3と比較して本 実施例の結果は、 C S S特性並びに粘着特性の両方において優れている のに対し、 比較例 3では C S Sゾーンでは本実施例と同等であるのに対 し、 データ領域で摺動痕が発生している。 これはデータゾーンではへッ ドは浮上しているものの、 浮上量が低いためにディスク回転中にもへッ ドとディスクが接触していると考えられ、 比較例 3ではデータ領域の潤 滑層が十分な摺動耐久性を維持できるほどの膜厚でないことが原因であ る。  The CSS properties and adhesive properties of the lubricating film produced in this example were measured in the same manner as in Example 1. Table 1 shows the results. Compared to Comparative Example 3 in which the perfluoropolyether compound (VI) was not applied again in this example, the results of this example were superior in both CSS properties and adhesive properties. In the CSS zone, a sliding mark is generated in the data area, while being the same as in the present embodiment. This is thought to be due to the fact that the head floats in the data zone, but because of the low flying height, the head is in contact with the disk even during disk rotation. Is not enough to maintain sufficient sliding durability.
〔実施例 3〕  (Example 3)
実施例 1 と同じスパッタ磁気ディスクを準備した。 次に下記構造式 (Xffl ) に示すパーフロロポリエーテル化合物 (Xffl ) を実施例 1 と同じフ ッ素系溶剤に 0 . 0 0 5 w t % で溶解させた溶液を作製し、 同条件でデ ィ ップ塗布後 1 1 0 °Cで 2時間熱処理した後、 同じフッ素系溶剤にて全 面を洗浄した。 この潤滑層の膜厚は 0 . 8 n m である。  The same sputtered magnetic disk as in Example 1 was prepared. Next, a solution was prepared by dissolving a perfluoropolyether compound (Xffl) represented by the following structural formula (Xffl) in the same fluorine-based solvent as in Example 1 at a concentration of 0.05 wt%, and dehydrated under the same conditions. After heat treatment at 110 ° C for 2 hours after the tip coating, the entire surface was washed with the same fluorine-based solvent. The thickness of this lubricating layer is 0.8 nm.
Figure imgf000031_0001
次に下記構造式 (vn ) に示すパーフロロポリエーテル化合物 (VH ) を 前記フッ素系溶剤に 0 . 0 0 7 w t %溶解させた溶液を作製し、
Figure imgf000031_0001
Next, a solution was prepared by dissolving 0.07 wt% of a perfluoropolyether compound (VH) represented by the following structural formula (vn) in the fluorine-based solvent,
H。一 0 - H ,— H 3 N + 一 0 C 0 -(C F 2 C F 2〇)ra - (C F20)n- C O O" +NH3- CE H< - 0- CG H6 … ( ) 実施例 1 と同様に塗布し、 データ領域のみ 1 1 0°Cで 2時間熱処理した 後、 同フッ素系溶剤にて洗浄した。 データ領域の膜厚は、 1. 8 5 n m、 C S S領域の潤'滑層の膜厚は、 2. 3 1 n m である。 本実施例で作製し た潤滑膜の C S S特性と粘着特性を実施例 1 と同様の手法で測定した。 第 1表に結果を示す。 本実施例においてパーフロロポリエーテル化合物H. One 0-H, — H 3 N + one 0 C 0-(CF 2 CF 2 〇) ra -(CF 2 0) n -COO " + NH 3 -C E H < -0-C G H 6 … () Coated in the same manner as in Example 1, and heat treated only at the data area at 110 ° C for 2 hours After that, the film was washed with the same fluorine-based solvent, and the thickness of the data region was 1.85 nm, and the thickness of the lubricating layer in the CSS region was 2.31 nm. The CSS properties and adhesive properties of the lubricating film were measured in the same manner as in Example 1. The results are shown in Table 1. In this example, the perfluoropolyether compound was used.
( ) を塗布した後、 データ領域の洗浄をしなかった比較例 4 と比較し て本実施例の結果は、 C S S特性並びに粘着特性の両方において優れて いるのに対し、 比較例 4の C S S領域は本実施例と同等であるのが、 デ ータ領域に強い粘着を生じた。 Compared to Comparative Example 4 in which the data area was not cleaned after the application of (), the results of this example were superior in both CSS properties and adhesive properties, whereas the CSS area of Comparative Example 4 was excellent. Was equivalent to the present example, but produced strong adhesion in the data area.
〔実施例 4〕  (Example 4)
実施例 1 で作製した磁気ディスクを 3. 5 ィンチ用磁気記録再生装置 に搭載した。 第 3図に装置の概略図を示す。 この磁気記録再生装置と比 較例 2で作製した磁気ディスクを搭載した同型の 3. 5 ィンチ用磁気記 録再生装置 (比較例 5 ) を稼働中に電源を一旦切って強制的にデータ領 域内で停止させ、 2 4時間放置した。 その後再起動させた結果、 本実施 例の磁気ディスク装置は起動して記録再生に異常は認められなかったの に対し、 比較例 5の磁気記録再生装置は起動できず、 記録再生が不能と なった。 比較例 5の装置内のディスクを確認した結果、 データ領域でへ ッ ドスライダーとディスク間で強い粘着が発生していることが判った。  The magnetic disk manufactured in Example 1 was mounted on a 3.5-inch magnetic recording / reproducing apparatus. Figure 3 shows a schematic diagram of the device. While operating this magnetic recording / reproducing apparatus and the same type 3.5-inch magnetic recording / reproducing apparatus (Comparative Example 5) on which the magnetic disk manufactured in Comparative Example 2 was mounted, the power was temporarily turned off once and the data area was forcibly forced. And left for 24 hours. As a result, after restarting, the magnetic disk device of the present embodiment was started and no abnormality was found in recording / reproducing, whereas the magnetic recording / reproducing device of Comparative Example 5 could not be started and recording / reproducing became impossible. Was. As a result of checking the disk in the device of Comparative Example 5, it was found that strong adhesion occurred between the head slider and the disk in the data area.
[比較例 1 〕  [Comparative Example 1]
実施例 1 と同じスパッタ磁気ディスクを準備した。 次に、 実施例 1で 使用した下記一般式 (IV)  The same sputtered magnetic disk as in Example 1 was prepared. Next, the following general formula (IV) used in Example 1
F (C F2 C F2 C F20)n- C2 F4- CONH- C3 HE F (CF 2 CF 2 CF 2 0) n- C 2 F 4 -CONH- C 3 H E
— S i (0 H … (IV) のパーフロロポリエーテル系化合物 (IV) をフッ素系溶剤 (住友 3 M社 製, PF5052) に 0.0 1 w t % の濃度で溶解させた溶液 ( 1 ) を作製し た。 この溶液 ( 1 ) を実施例 1 と同条件でディ ップ法により磁気ディス クに塗布し、 十分乾燥させた後、 1 0 0°Cで 2 h加熱処理した。 この場 合の潤滑層の膜厚は、 1.3 n m ある。 このようして作製したディスク について、 実施例 1 と同様に C S S試験と粘着試験を実施した。 第 1表 に結果を示す。 — S i (0 H… (IV) A solution (1) was prepared by dissolving the perfluoropolyether compound (IV) in a fluorine-based solvent (PF5052, manufactured by Sumitomo 3M) at a concentration of 0.01% by weight. This solution (1) was applied to a magnetic disk by dipping under the same conditions as in Example 1, dried sufficiently, and then heat-treated at 100 ° C. for 2 hours. In this case, the thickness of the lubricating layer is 1.3 nm. The disk manufactured in this manner was subjected to the CSS test and the adhesion test in the same manner as in Example 1. Table 1 shows the results.
[比較例 2〕  [Comparative Example 2]
実施例 1 と同じスパッタ磁気ディスクを準備した。 次に、 実施例 1で 使用した下記一般式 (IV)  The same sputtered magnetic disk as in Example 1 was prepared. Next, the following general formula (IV) used in Example 1
F(C F2 C F2 C F20)n- C2 F4- CONH-C3 He F (CF 2 CF 2 CF 2 0) n - C 2 F 4 - CONH-C 3 H e
- S i (0 C2 H … (IV) のパーフロロポリエーテル系化合物 (IV) をフッ素系溶剤 (住友 3 M社 製, PF5052) に 0.0 1 w t % の濃度で溶解させた溶液 ( 1 ) を作製し た。 この溶液 ( 1 ) を実施例 1 と同条件でディ ップ法により磁気ディス クに塗布し、 十分乾燥させた後、 1 0 0 °Cで 2 h加熱処理した。 次に実 施例 1で使用した下記構造式 (H) -A solution of perfluoropolyether compound (IV) of Si (0 C 2 H… (IV) dissolved in a fluorine-based solvent (PF5052, manufactured by Sumitomo 3M) at a concentration of 0.01 wt% (1) This solution (1) was applied to a magnetic disk by dipping under the same conditions as in Example 1, dried sufficiently, and then heat-treated at 100 ° C. for 2 hours. The following structural formula (H) used in Example 1
F (C F2 C F2 C Fz O)n - C2 F,- C O O~ TN H3 - C6 H4 - 0 - C6 H5 … (XI) のパ一フロロポリエーテル系化合物 (XI) をフッ素系溶剤 (住友 3 M社 製, PF5052) に 0.0 0 1 w t % の濃度で溶解させた溶液 ( 2 ) を作製 した。 この溶液 ( 2 ) を実施例 1 と同条件でディ ップ法により磁気ディ スクに塗布した。 データ領域と C S S領域とも潤滑層の膜厚は、 2.7 n mある。 このようにして作製したディスクについて、 実施例 1 と同様 に C S S試験と粘着試験を実施した。 第 1表に結果を示す。 〔比較例 3 ] F (CF 2 CF 2 CF z O) n -C 2 F, -COO ~ T NH 3 -C 6 H 4 -0 -C 6 H 5 … (XI) A solution (2) was prepared by dissolving it in a fluorine-based solvent (PF5052, manufactured by Sumitomo 3M) at a concentration of 0.01 wt%. This solution (2) was applied to a magnetic disk by dipping under the same conditions as in Example 1. The thickness of the lubrication layer in both the data area and the CSS area is 2.7 nm. The disk manufactured in this manner was subjected to the CSS test and the adhesion test in the same manner as in Example 1. Table 1 shows the results. [Comparative Example 3]
実施例 1 と同じスパッタ磁気ディスクを準備した。 次に実施例 2で使 用した下記構造式 (VI)  The same sputtered magnetic disk as in Example 1 was prepared. Next, the following structural formula (VI) used in Example 2 was used.
(C2 H6〇)3 S i - C3 H6 - N H C O-(C Fz C Fa O)m (C 2 H 6 〇) 3 S i-C 3 H 6 -NHC O- (CF z CF a O) m
- (C F20)n- C 0N H - C3 He - S i (O C, H6)3 … (VI) のパーフロロポリエーテル化合物 (VI) を実施例 1 と同じフッ素系溶剤 に 0. 0 0 5 w t % で溶解させた溶液を作製し、 同条件でディ ップ塗布 後 1 1 0°Cで 2時間熱処理した後、 同じフッ素系溶剤にて全面を洗浄し た。 - (CF 2 0) n - C 0N H - C 3 H e - S i (OC, H 6) 3 ... 0 perfluoropolyether compound (VI) in the same fluorinated solvent as in Example 1 (VI) A solution dissolved at 0.05 wt% was prepared, dip coated under the same conditions, heat-treated at 110 ° C. for 2 hours, and then the entire surface was washed with the same fluorine-based solvent.
次に実施例 2で使用した下記構造式 (W)  Next, the following structural formula (W) used in Example 2
F (C F2 C F2 C F2 - 0)n- C2 F<- CH2 O H … (VI) のパーフロロポリエーテル化合物(VI) を前記フッ素系溶剤に 0. 0 0 7 w t %溶解させた溶液を作製し、 実施例 1 と同様に塗布し、 データ領域 のみ同フッ素系溶剤にて洗浄した。 データ領域の潤滑層の膜厚は 0.75M で、 C S S領域の潤滑層の膜厚は 1. 8 4 n m である。 このようにして 作製したディスクについて、 実施例 1 と同様に C S S試験と粘着試験を 実施した。 第 1表に結果を示す。 F (CF 2 CF 2 CF 2 - 0) n - and CH 2 OH ... perfluoropolyether compound (VI) is 0. 0 0 7 wt% dissolved in the fluorine-based solvent (VI) - C 2 F < A solution was prepared, applied in the same manner as in Example 1, and only the data area was washed with the same fluorine-based solvent. The thickness of the lubrication layer in the data area is 0.75M, and the thickness of the lubrication layer in the CSS area is 1.84 nm. A CSS test and an adhesion test were performed on the disk thus manufactured in the same manner as in Example 1. Table 1 shows the results.
[比較例 4〕  [Comparative Example 4]
実施例 1 と同じスパッタ磁気ディスクを準備した。 次に、 実施例 3で 使用した下記構造式 (xm)  The same sputtered magnetic disk as in Example 1 was prepared. Next, the following structural formula (xm) used in Example 3
H2 (C F2 C F20)m— (C F20)n … (Xffl)
Figure imgf000034_0001
のパーフロロポリエーテル化合物 (Xffl) を実施例 1 と同じフッ素系溶剤 に 0.0 0 5 w t % で溶解させた溶液を作製し、 同条件でディ ップ塗布 後 1 1 0°Cで 2時間熱処理した後、 同じフッ素系溶剤にて全面を洗浄し た。
H 2 (CF 2 CF 2 0) m — (CF 2 0) n … (Xffl)
Figure imgf000034_0001
A perfluoropolyether compound (Xffl) was dissolved in the same fluorine-based solvent as in Example 1 at a concentration of 0.005 wt%, and a dip was applied under the same conditions, followed by heat treatment at 110 ° C for 2 hours. After that, the entire surface was washed with the same fluorine-based solvent.
次に実施例 3で使用した下記構造式 (W)  Next, the following structural formula (W) used in Example 3
Ce H5 - 0 - Ce H, - H3 N+ _〇 C〇一(C F2 C F 2〇)m C e H 5 - 0 - C e H, - H 3 N + _〇 C_〇 one (CF 2 CF 2 〇) m
-(C F20)n- C O O— +N H3 - CB H4 - O - C6 H5 ··· ( ) のパーフロロポリエーテル化合物(W) を前記フッ素系溶剤に 0.0 0 7 w t %溶解させた溶液を作製し、 実施例 3と同様にディスク全面に塗布 した。 データ領域, C S S領域とも潤滑層の膜厚は、 2.3 1 n m であ る。 このようにして作製したディスクについて、 実施例 1 と同様に CSS 試験と粘着試験を実施した。 第 1表に結果を示す。 - (CF 2 0) n - COO- + NH 3 - C B H 4 - O - C 6 H 5 ··· () perfluoropolyether compound (W) in the fluorinated solvent of 0.0 0 7 wt% A dissolved solution was prepared and applied to the entire surface of the disk in the same manner as in Example 3. The thickness of the lubricant layer in both the data area and the CSS area is 2.31 nm. The disk manufactured in this manner was subjected to the CSS test and the adhesion test in the same manner as in Example 1. Table 1 shows the results.
〔比較例 5〕  (Comparative Example 5)
比較例 2で作製した磁気ディスクを実施例 1で作製した磁気ディスク を 3.5 インチ用磁気記録再生装置に搭載し、 稼働中に電源を一旦切つ て装置を強制的に停止させ、 24時間放置した後、 再起動させた。 その 結果、 前記の通り本比較例の磁気記録再生装置は起動できず、 記録再生 が不能となった。 これは、 データ領域に吸着の弱い潤滑剤が多く存在す るために、 へッ ドスライダーとディスク間で強い粘着が発生したためで ある。  The magnetic disk manufactured in Comparative Example 2 was mounted on a 3.5-inch magnetic recording / reproducing apparatus with the magnetic disk manufactured in Example 1, and the power was temporarily turned off during operation, the apparatus was forcibly stopped, and left for 24 hours. Later, it was restarted. As a result, as described above, the magnetic recording / reproducing apparatus of this comparative example could not be started, and recording / reproducing became impossible. This is because strong adhesion between the head slider and the disk occurred due to the presence of many weakly adsorbed lubricants in the data area.

Claims

請 求 の 範 囲 The scope of the claims
1. 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディス クにおいて、 該磁気ディスクの回転起動時と回転停止時に磁気へッ ドス ライダーが位置する前記保護膜表面の粗さが R a 1 O n m以上である 1. In a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a nonmagnetic substrate, the roughness of the surface of the protective film where the magnetic head slider is located when the magnetic disk starts and stops rotating. Is not less than Ra1Onm
C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式 ( I ) 〜 (! Π) A CSS area; and a data area in which the surface of the protective film on which the magnetic head slider 1 is located during rotation of the magnetic disk has a roughness of Ra 3 nm or less. ) ~ (! Π)
R 1 - X- (C F2 C F20)m- (C F20)n-X- R 2 … ( I )R 1-X- (CF 2 CF 20 ) m- (CF 20 ) n -X- R 2… (I)
F (C F2 C F2 C F3- 0)n- C2 F4- X- R 3 … ( Π ) F (CF 2 CF 2 CF 3 - 0) n - C 2 F 4 - X- R 3 ... (Π)
F - (C F (C Fa)- C F2 - 0)n- C F (C F3)-X- R 4 ··· (HI) (但し、 m, nは整数、 R l, R 2 , R 3, R 4は炭化水素鎖、 Xは 2 価の結合基) で表されるパーフロロポリエーテル系化合物の少なく とも 一つ以上を含む潤滑膜が形成され、 該潤滑膜が前記保護膜表面に強固に 固定される潤滑剤と弱く固定される潤滑剤とから構成され、 前記 C S S 領域に形成される前記潤滑膜の固定の弱い潤滑剤の割合が、 前記 C S S 領域の潤滑剤総量に対して 1 0 %以上であり、 前記データ領域に形成さ れる前記潤滑膜の固定の弱い潤滑剤の割合が前記データ領域の潤滑剤総 量に対して 1 0 %未満であることを特徴とする磁気ディスク。 F - (CF (CF a) - CF 2 - 0) n - CF (CF 3) -X- R 4 ··· (HI) ( where, m, n are integers, R l, R 2, R 3, R 4 is a hydrocarbon chain, and X is a divalent linking group), and a lubricating film containing at least one or more perfluoropolyether compounds represented by the following formula is formed. It is composed of a fixed lubricant and a weakly fixed lubricant, and the ratio of the weakly fixed lubricant of the lubricant film formed in the CSS region is 10% with respect to the total amount of the lubricant in the CSS region. The magnetic disk according to the above, wherein the ratio of the lubricant for fixing the lubricating film formed in the data area is less than 10% with respect to the total amount of the lubricant in the data area.
2. 前記潤滑膜が、 バーフロロカーボン系溶剤で洗浄除去されずに前記 保護膜表面に強固に固定される潤滑剤とパーフロロカーボン系溶剤で洗 浄除去される固定の弱い潤滑剤とから構成されることを特徴とする請求 の範囲第 1項に記載の磁気ディスク。  2. The lubricating film is composed of a lubricant that is firmly fixed to the surface of the protective film without being washed and removed with a perfluorocarbon solvent and a weakly fixed lubricant that is washed and removed with a perfluorocarbon solvent. The magnetic disk according to claim 1, wherein:
3. 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディス クにおいて、 該磁気ディスクの回転起動時と回転停止時に磁気へッ ドス ライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m以上である c s s領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式 ( I ) 〜 (! Π) 3. In a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, the surface roughness of the protective film where the magnetic head slider is located when the magnetic disk starts and stops rotating. Is Ra 10 nm or more a css area; and a data area in which the surface of the protective film on which the magnetic head slider 1 is positioned during rotation of the magnetic disk has a roughness of Ra 3 nm or less. ) ~ (! Π)
R 1 - X- (C F2 C F20)m- (C F20)n-X- R 2 … ( I )R 1-X- (CF 2 CF 20 ) m- (CF 20 ) nX- R 2… (I)
F (C F2 C F2 C F2 -0)n- C2 F,-X- R 3 ·'· (Π) F - (C F (C F3)-C F2 - 0)„- C F (C F3)-X- R … (m) (但し、 m, nは整数、 R l, R 2 , R 3, R 4は炭化水素鎖、 Xは 2 価の結合基) で表されるパーフロロポリエーテル系化合物の少なく とも 一つ以上を含む潤滑剤を前記磁気ディスク全面に塗布後、 前記磁気ディ スク全面を 8 0°C以上に加熱あるいは、 全面もしくは前記データ領域に 紫外線照射し、 次いで前記 C S S領域をパーフロロカーボン系溶剤で洗 浄することにより、 前記 C S S領域に形成した 1.5 n m 以上の膜厚の 潤滑膜と前記データ領域に形成した 1 n m以上の膜厚の潤滑膜とを備え たことを特徴とする磁気ディスク。 F (CF 2 CF 2 CF 2 -0) n - C 2 F, -X- R 3 · '· (Π) F - (CF (CF 3) -CF 2 - 0) "- CF (CF 3) - X-R… (m) (where m and n are integers, R l, R 2, R 3 and R 4 are hydrocarbon chains, and X is a divalent linking group). After applying a lubricant containing at least one of the following to the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C. or more, or the entire surface or the data area is irradiated with ultraviolet rays, and then the CSS area is By cleaning with a fluorocarbon solvent, a lubricating film having a thickness of 1.5 nm or more formed in the CSS region and a lubricating film having a thickness of 1 nm or more formed in the data region are provided. Magnetic disk.
4. 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディス クにおいて、 該磁気ディスクめ回転起動時と回転停止時に磁気へッ ドス ライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式 ( I ) 〜 (! D)  4. In a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, the surface of the protective film on which the magnetic head slider 1 is located when the magnetic disk starts rotating and stops rotating. A CSS region having a roughness of Ra 10 nm or more, and a data region having a roughness of Ra 3 nm or less on the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk. The following general formulas (I) to (! D)
R 1 — X -(C F2 C F20)。,一(C F20)n - X— R 2 … ( I )R 1 — X-(CF 2 CF 20 ). , One (CF 2 0) n -X—R 2… (I)
F (C F2 C F2 C F2 -0)n- C2 F,-X- R 3 - ( Π )F (CF 2 CF 2 CF 2 -0) n -C 2 F, -X- R 3-(Π)
F - (C F (C F3)- C F2 - 0)n-C F (C F3)-X- R 4 … ( m ) (但し、 m, nは整数、 R l, R 2, R 3, R 4は炭化水素鎖、 Xは 2 価の結合基) で表されるパーフロロポリエーテル系化合物の少なく とも 一つ以上を含む潤滑剤を前記磁気ディスク全面に塗布後、 前記磁気ディ スク全面を 8 0 °C以上に加熟あるいは、 全面もしくは前記データ領域に 紫外線照射し、 次いで前記磁気ディスク全面をパーフロロカーボン系溶 剤で洗浄し、 次に前記 C S S領域に上記一般式 ( I ) 〜 (! Π) のパ一フ ロロポリエーテル系化合物から選択される吸着性の官能基を有するパー フロロポリエーテル系化合物を塗布することにより、 前記 C S S領域に 形成した 1. 5 n m 以上の膜厚の潤滑膜と前記データ領域に形成した 1 n m以上の膜厚の潤滑膜とを備えたことを特徴とする磁気ディスク。 F - (CF (CF 3) - CF 2 - 0) n -CF (CF 3) -X- R 4 ... (m) ( where, m, n are integers, R l, R 2, R 3, R 4 Is a hydrocarbon chain, and X is a divalent linking group). After applying a lubricant containing at least one to the entire surface of the magnetic disk, the entire surface of the magnetic disk is ripened to 80 ° C. or higher, or the entire surface or the data area is irradiated with ultraviolet rays. After washing with a solvent, a perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds represented by the above general formulas (I) to (! に) in the CSS region. A lubricating film having a thickness of 1.5 nm or more formed in the CSS region and a lubricating film having a thickness of 1 nm or more formed in the data region. .
5. 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディス クにおいて、 該磁気ディスクの回転起動時と回転停止時に磁気へッ ドス ライダーが位置する前記保護膜表面の粗さが R a 1 O n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式 ( I ) 〜 (! Π) 5. In a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, the roughness of the surface of the protective film where the magnetic head slider is located when the magnetic disk starts and stops rotating. A data area where the roughness of the surface of the protective film on which the magnetic head slider 1 is located during rotation of the magnetic disk is less than Ra 3 nm. The following general formulas (I) to (! Π)
R 1 - X- (C F? C F20)ro- (C Fi O)n- X- R 2 … ( I )R 1-X- (CF ? CF 20 ) ro- (CF i O) n -X- R 2… (I)
F (C F2 C Fi C F2 - 0)n- C2 F,- X- R 3 - ( Π ) F (CF 2 CF i CF 2 - 0) n - C 2 F, - X- R 3 - (Π)
F -(C F (C F3)- C F, - 0)n-C F (C F3)- X- R 4 ··· (m) (但し、 m, nは整数、 R l , R 2, R 3, R 4は炭化水素鎖、 Xは 2 価の結合基) で表されるパーフロロポリエーテル系化合物の少なく とも 一つ以上を含む潤滑剤を前記磁気ディスク全面に塗布後、 前記磁気ディ スク全面を 8 0 °C以上に加熱あるいは、 前記磁気ディスク全面もしくは 前記データ領域を紫外線照射し、 次いで前記磁気ディスク全面をパ一フ ロロカーボン系溶剤で洗浄し、 次に前記データ領域に上記一般式 ( I )F-(CF (CF 3 )-CF,-0) n -CF (CF 3 )-X-R 4 (m) (where m and n are integers, R l, R 2, R 3, R 4 is a hydrocarbon chain, and X is a divalent linking group) After applying a lubricant containing at least one or more perfluoropolyether compounds represented by Heat to 80 ° C. or higher, or irradiate the entire surface of the magnetic disk or the data area with ultraviolet rays, and then wash the entire surface of the magnetic disk with a perfluorocarbon-based solvent. )
〜 (m) のパーフロロポリエーテル系化合物から選択される前記保護膜 表面と化学的に反応する官能基を有するパ—フロロポリエーテル系化合 物を塗布することにより、 前記 C S S領域に形成した 1.5 n m 以上の 膜厚の潤滑膜と前記データ領域に形成した 1 nm以上の膜厚の潤滑膜と を備えたことを特徴とする磁気ディスク。 And (m) a perfluoropolyether compound having a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether compounds. A magnetic disk comprising: a lubricant film having a thickness of 1.5 nm or more formed in the CSS region by applying an object; and a lubricant film having a thickness of 1 nm or more formed in the data region.
6. 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディス クにおいて、 該磁気ディスクの回転起動時と回転停止時に磁気へッ ドス ライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式 ( I ) 〜 (! Π)  6. In a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, a rough surface of the protective film where the magnetic head slider is located when the magnetic disk starts rotating and stops rotating. A CSS region having a roughness of Ra 10 nm or more, and a data region having a roughness of Ra 3 nm or less on the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk. The following general formulas (I) to (! Π) are formed on the surface of the protective film.
R 1 - X- (C F2 C F20)m- (C Fz O)n- X- R 2 … ( I )R 1-X- (CF 2 CF 20 ) m- (CF z O) n -X- R 2… (I)
F (C F2 C F2 C Fz - 0)n- C2 F4-X- R 3 -" ( Π )F (CF 2 CF 2 CF z -0) n -C 2 F 4 -X- R 3-"(Π)
F - (C F (C F3)-C F2 - 0)n- C F (C F3)- X- R 4 … ( ΙΠ ) (但し、 m, nは整数、 R l, R 2 , R 3 , R 4は炭化水素鎖、 Xは 2 価の結合基) で表される前記保護膜表面と化学的に反応する官能基を有 するパーフロロポリエーテル系化合物の少なく とも一つ以上を含む潤滑 剤を前記磁気ディスク全面に塗布後、 前記磁気ディスク全面を 8 0°C以 上に加熱あるいは、 全面もしくは前記データ領域に紫外線照射し、 次い で前記磁気ディスク全面をパーフロロカーボン系溶剤で洗浄し、 次にデ ータ領域に上記一般式 ( 1 ) 〜 (! Π) のパーフロロポリエーテル系化合 物から選択される前記保護膜表面と化学的に反応する官能基を有するパ 一フロロポリエーテル系化合物を塗布することにより、 前記 C S S領域 に形成した 1. 5 n m 以上の膜厚の潤滑膜と前記データ領域に形成した 1 n m以上の膜厚の潤滑膜とを備えたことを特徴とする磁気ディスク。 F - (CF (CF 3) -CF 2 - 0) n - CF (CF 3) - X- R 4 ... (ΙΠ) ( where, m, n are integers, R l, R 2, R 3, R 4 Is a hydrocarbon chain, and X is a divalent bonding group). A lubricant containing at least one perfluoropolyether compound having a functional group chemically reacting with the surface of the protective film represented by After coating the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C. or higher, or the entire surface or the data area is irradiated with ultraviolet light, and then the entire surface of the magnetic disk is washed with a perfluorocarbon solvent. In the data region, a perfluoropolyether compound having a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether compounds represented by the general formulas (1) to (! Π) is used. By applying, a lubricating film with a thickness of 1.5 nm or more formed in the CSS area and the data area A magnetic disk comprising a formed lubricating film having a thickness of 1 nm or more.
7. 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を順に積層した磁 気ディスクの製造方法において、 該磁気ディスクの回転起動時と回転停 止時に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 1 O n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へ ッ ドスライダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデ ータ領域とを形成し、 次に前記保護膜表面に下記一般式 ( I ) 〜 (!□) R 1 - X- (C F2 C F20)ni- (C F20)n- X- R 2 … ( I )7. In a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, the magnetic disk starts and stops rotating. The surface area of the protective film where the magnetic head slider is located when the magnetic head is stopped, and a surface area where the magnetic head slider is located during rotation of the magnetic disk. A data region having a roughness of Ra 3 nm or less is formed, and then the following general formulas (I) to (! □) R 1 -X- (CF 2 CF 20 ) ni- (CF 2 0) n -X-R 2… (I)
F(C F! C F2 C F2- 0)n- Ci F4-X- R 3 - ( Π ) F (CF CF 2 CF 2 - ! 0) n - C i F 4 -X- R 3 - (Π)
F— (C F ( C F3 ) - C F2—〇)n— C F (C F3 ) - X— R 4 … (ΙΠ) (但し、 m, nは整数、 R l , R 2 , R 3, R 4は炭化水素鎖、 Xは 2 価の結合基) で表されるパーフロロポリエーテル系化合物の少なく とも 一つ以上を含む潤滑剤を前記磁気ディスク全面に塗布し、 次いで前記磁 気ディスク全面を 8 0°C以上に加熱あるいは、 前記磁気ディスク全面も しくは前記デ一タ領域に紫外線照射し、 次いで前記 C S S領域をパーフ ロロカーボン系溶剤で洗浄することにより、 前記 C S S領域に 1. 5ηπι 以上の膜厚の潤滑膜を形成し、 前記データ領域に i n m以上の膜厚の潤 搰膜を形成することを特徴とする磁気ディスク製造方法。 F— (CF (CF 3 )-CF 2 —〇) n — CF (CF 3 )-X—R 4… (ΙΠ) (where m and n are integers, R l, R 2, R 3 and R 4 Is a hydrocarbon chain, and X is a divalent linking group). A lubricant containing at least one perfluoropolyether compound represented by the following formula is applied to the entire surface of the magnetic disk. By heating to 0 ° C or more or irradiating the entire surface of the magnetic disk or the data area with ultraviolet rays, and then washing the CSS area with a perfluorocarbon-based solvent, the CSS area is not less than 1.5ηπι A method for manufacturing a magnetic disk, comprising: forming a lubricating film having a film thickness; and forming a lubricating film having a film thickness of at least inm in the data area.
8. 請求の範囲第 7項に記載の磁気ディスク製造方法において、 前記磁 気ディスク全面をパ一フロロカーボン系溶剤で洗浄した後、 前記 C S S 領域に前記一般式 ( I ) 〜 (! Π) のパーフロロポリエーテル系化合物か ら選択される吸着性の官能基を有するパーフロロポリエーテル系化合物 を塗布し、 前記 C S S領域に 1. 5 n m 以上の膜厚の潤'滑膜を形成し、 前記データ領域に 1 n m以上の膜厚の潤滑膜を形成することを特徴とす る磁気ディスク製造方法。  8. The method of manufacturing a magnetic disk according to claim 7, wherein after cleaning the entire surface of the magnetic disk with a fluorocarbon-based solvent, the pars of the general formulas (I) to (! Π) are added to the CSS region. A perfluoropolyether compound having an adsorptive functional group selected from a fluoropolyether compound is applied to form a lubricating film having a thickness of 1.5 nm or more in the CSS region. A method for manufacturing a magnetic disk, comprising forming a lubricating film having a thickness of 1 nm or more in a region.
9. 請求の範囲第 7項に記載の磁気ディスク製造方法において、 前記磁 気ディスク全面をパーフロロカーボン系溶剤で洗浄した後、 前記一般式 ( I ) 〜 (! Π) のパーフロロポリエーテル系化合物から選択される前記 保護膜表面と化学的に反応する官能基を有するパーフロロポリエーテル 系化合物を塗布し、 前記 C S S領域に 1.5 n m 以上の膜厚の潤滑膜を 形成し、 前記データ領域に 1 n m以上の膜厚の潤滑膜を形成することを 特徴とする磁気ディスク製造方法。 9. The method for manufacturing a magnetic disk according to claim 7, wherein the entire surface of the magnetic disk is washed with a perfluorocarbon-based solvent, and then the perfluoropolyether-based compound represented by any of the general formulas (I) to (!!) is used. Selected from the above A perfluoropolyether compound having a functional group that chemically reacts with the protective film surface is applied, a lubricating film having a thickness of 1.5 nm or more is formed in the CSS region, and a film thickness of 1 nm or more is formed in the data region. A method for manufacturing a magnetic disk, comprising: forming a lubricating film.
1 0. 請求の範囲第 7項に記載の磁気ディスク製造方法において、 前記 磁気ディスク全面を 8 0°C以上に加熱あるいは、 紫外線照射した後、 前 記一般式 ( I ) 〜 (! Π) のパーフロロポリエーテル系化合物から選択さ れる吸着性の官能基を有するパーフロロポリエーテル系化合物を前記磁 気ディスク全面に塗布し、 次に前記データ領域をパーフロロカーボン系 溶剤で洗浄した後、 前記一般式 ( I ) 〜 (! Π) のパーフロロポリエーテ ル化合物から選択される化学的に反応する官能基を有するパーフロロポ リエーテル系化合物を塗布し、 前記 C S S領域に 1.5 n m 以上の膜厚 の潤滑膜を形成し、 前記データ領域に 1 n m以上の膜厚の潤滑膜を形成 することを特徴とする磁気ディスク製造方法。  10. The method of manufacturing a magnetic disk according to claim 7, wherein the entire surface of the magnetic disk is heated to 80 ° C. or higher or irradiated with ultraviolet light, and then the magnetic head of any of the above general formulas (I) to (! Π) is used. After applying a perfluoropolyether compound having an adsorptive functional group selected from a perfluoropolyether compound to the entire surface of the magnetic disk, and then cleaning the data area with a perfluorocarbon solvent, A perfluoropolyether compound having a chemically reactive functional group selected from the perfluoropolyether compounds of formulas (I) to (! Π) is applied, and a lubricating film having a thickness of 1.5 nm or more is formed on the CSS region. Forming a lubricating film having a thickness of 1 nm or more in the data area.
1 1. 磁気へッ ドと、 磁気へッ ドを搭載した磁気へッ ドスライダ一と、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディスクと を備えた磁気記録再生装置において、 該磁気ディスクが磁気ディスクの 回転起動時と回転停止時に前記磁気へッ ドスライダ一が位置する前記保 護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディ スクの回転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さ が R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式 1 1. A magnetic recording / reproducing apparatus equipped with a magnetic head, a magnetic head slider equipped with a magnetic head, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate. Wherein the magnetic disk has a CSS region in which the surface of the protective film on which the magnetic head slider 1 is located has a roughness of Ra 10 nm or more when the magnetic disk starts and stops rotating, and the magnetic disk The surface of the protective film on which the magnetic head slider 1 is located during the rotation of the magnetic head has a data area having a roughness of Ra 3 nm or less.
( I ) 〜 (ΙΠ) (I)-(ΙΠ)
R 1 — X -(C C F2〇)„一( C F20)n - X— R 2 … ( I )R 1 — X-(CCF 2 〇) „(CF 20 ) n -X—R 2… (I)
F (C F2 C F2 C F2 - 0)n- C2 F4-X- R 3 … ( Π ) F (CF 2 CF 2 CF 2 - 0) n - C 2 F 4 -X- R 3 ... (Π)
F—(C F (C F3)— C F2— 0)n— C F (C FJ— X— R 4 … ( ΠΙ ) (但し、 m, nは整数、 R l , R 2, R 3, R 4は炭化水素鎖、 Xは 2 価の結合基) で表されるパーフロロポリエーテル系化合物の少なく とも 一つ以上を含む潤滑膜が形成され、 該潤滑膜が前記保護膜表面に強固に 固定される潤滑剤と弱く固定される潤滑剤とから構成され、 前記 C S S 領域に形成される前記潤滑膜の固定の弱い潤滑剤の割合が、 前記 C S S 領域の潤滑剤総量に対して 1 0 %以上であり、 前記データ領域に形成さ れる前記潤滑膜の固定の弱い潤滑剤の割合が前記データ領域の潤滑剤総 量に対して 1 0 %未満であり、 前記データ領域で前記磁気へッ ドスライ ダ一と磁気ディスク間で発生する最大静止摩擦係数が 1. 5 以下, 動摩 擦係数が 1.0 以下であり前記 C S S領域で前記磁気へッ ドスライダー と磁気ディスク間で発生する最大静止摩擦係数が 1.0 以下, 動摩擦係 数が 0.5 以下であることを特徴とする磁気記録再生装置。 F— (CF (CF 3 ) — CF 2 — 0) n — CF (C FJ— X— R 4… (ΠΙ) (Where m and n are integers, R l, R 2, R 3, and R 4 are hydrocarbon chains, and X is a divalent linking group). A lubricating film including a lubricant firmly fixed to the surface of the protective film and a lubricant weakly fixed to the surface of the protective film, wherein the lubricating film formed in the CSS region is weakly fixed. The ratio of the lubricant is 10% or more with respect to the total amount of the lubricant in the CSS region, and the ratio of the weakly fixed lubricant of the lubricant film formed in the data region is equal to the total amount of the lubricant in the data region. The maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1.0 or less in the data area. Maximum static friction coefficient generated between the magnetic head slider and the magnetic disk 1.0, the magnetic recording and reproducing apparatus kinetic friction coefficient is equal to or more than 0.5.
1 2. 磁気ヘッ ドと、 磁気ヘッ ドを搭載した磁気ヘッ ドスライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディスクと を備えた磁気記録再生装置において、 該磁気ディスクが磁気ディスクの 回転起動時と回転停止時に前記磁気へッ ドスライダ一が位置する前記保 護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディ スクの回転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さ が R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式 1 2. In a magnetic recording / reproducing apparatus including a magnetic head, a magnetic head slider equipped with a magnetic head, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially stacked on a non-magnetic substrate, When the magnetic disk starts and stops rotating, the surface of the protective film on which the magnetic head slider 1 is located has a roughness of Ra10 nm or more, and the magnetic disk is rotating. The surface of the protective film where the magnetic head slider 1 is located has a data region with a roughness of Ra 3 nm or less.
( I ) 〜 (m) (I)-(m)
R 1 - X-(C F2 C F20)ni- (C F20),-X- R 2 … ( I )R 1-X- (CF 2 CF 20 ) ni- (CF 20 ),-X- R 2… (I)
F (C F, C F2 C F2 _ 0)n - C2 F,— X - R 3 … ( Π )F (CF, CF 2 CF 2 _ 0) n -C 2 F, — X-R 3… (Π)
F -(C F (C F3)- C F2 - 0)n- C F (C F3)-X- R 4 … (m) (但し、 m, nは整数、 R l , R 2 , R 3, R 4は炭化水素鎖、 Xは 2 価の結合基) で表されるパーフロロポリエーテル系化合物の少なく とも 一つ以上を前記磁気ディスク全面に塗布後、 前記磁気ディスク全面を 8 0 "C以上で加熱あるいは、 前記磁気ディスク全面もしくは前記データ 領域を紫外線照射し、 次に前記データ領域をパーフロロカーボン系溶剤 で洗浄し、 前記 C S S領域に形成した潤滑膜が 1 . 5 n m 以上の膜厚で あり前記データ領域に形成した潤滑膜が 1 n m以上の膜厚であり、 前記 データ領域で前記磁気へッ ドスライダ一と磁気ディスク間で発生する最 大静止摩擦係数が 1 . 5以下, 動摩擦係数が 1 . 0以下であり前記 C S S 領域で前記磁気へッ ドスライダ一と磁気ディスク間で発生する最大静止 摩擦係数が 1 . 0 以下, 動摩擦係数が 0 . 5 以下であることを特徴とす る磁気記録再生装置。 F - (CF (CF 3) - CF 2 - 0) n - CF (CF 3) -X- R 4 ... (m) ( where, m, n are integers, R l, R 2, R 3, R 4 Is a hydrocarbon chain, and X is a divalent linking group). After applying one or more over the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated at 80 ° C. or higher, or the entire surface of the magnetic disk or the data region is irradiated with ultraviolet light, and then the data region is exposed with a perfluorocarbon solvent. After the cleaning, the lubricating film formed in the CSS region has a thickness of 1.5 nm or more, the lubricating film formed in the data region has a thickness of 1 nm or more, and the magnetic head slider has a thickness of 1 nm or more in the data region. The maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the CSS area is 1.5 or less, and the maximum static friction coefficient generated between the magnetic disk and the magnetic disk is 1 or less. A magnetic recording / reproducing apparatus characterized by having a dynamic friction coefficient of 0.5 or less and a dynamic friction coefficient of 0.5 or less.
1 3 . 請求の範囲第 1 2項に記載の磁気記録再生装置において、 前記磁 気ディスクが、 前記データ領域をパーフロロカーボン系溶剤で洗浄後、 前記 C S S領域に前記一般式 ( i )〜(m ) で表されるパ一フロロポリエ 一テル系化合物から選択される吸着性の官能基を有するパーフロロポリ エーテル系化合物を塗布し、 前記 C S S領域に形成した潤滑膜が 1 . 5 n m以上の膜厚であり前記データ領域に形成した潤滑膜が 1 n m以上の 膜厚であることを特徴とする磁気記録再生装置。  13. The magnetic recording / reproducing apparatus according to claim 12, wherein the magnetic disk cleans the data area with a perfluorocarbon-based solvent, and then adds the general formulas (i) to (m) to the CSS area. The perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds represented by the formula (1) is applied, and the lubricating film formed in the CSS region has a thickness of 1.5 nm or more. A magnetic recording / reproducing apparatus, wherein the lubricating film formed in the data area has a thickness of 1 nm or more.
1 4 . 請求の範囲第 1 2項に記載の磁気記録再生装置において、 前記磁 気ディスク力^ 前記データ領域をパーフロロカーボン系溶剤で洗浄後、 前記磁気ディスク全面に前記一般式 ( I )〜(! Π ) で表されるパーフロロ ポリエーテル系化合物から選択される該保護膜表面と化学的に反応する 官能基を有するパーフロロポリエーテル系化合物を塗布し、 前記 C S S 領域に形成した潤滑膜が 1 . 5 n m 以上の膜厚であり前記データ領域に 形成した潤搰膜が 1 n m以上の膜厚であることを特徴とする磁気記録再 生装置。 14. The magnetic recording / reproducing apparatus according to claim 12, wherein the magnetic disk force and the data area are cleaned with a perfluorocarbon-based solvent, and then the general formulas (I) to (I) are applied to the entire surface of the magnetic disk. Π) A perfluoropolyether compound having a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether compound represented by the formula (1) is applied, and the lubricating film formed in the CSS region is formed by the following method. A magnetic recording / reproducing apparatus having a thickness of at least 5 nm and a thickness of the moisture film formed in the data area of at least 1 nm.
1 5. 磁気へッ ドと、 磁気へッ ドを搭載した磁気へッ ドスライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディスクと を備えた磁気記録再生装置において、 該磁気ディスクが磁気ディスクの 回転起動時と回転停止時に前記磁気へッ ドスライダ一が位置する前記保 護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディ スクの回転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さ が R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式1 5. A magnetic recording / reproducing apparatus including a magnetic head, a magnetic head slider equipped with a magnetic head, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially stacked on a non-magnetic substrate. Wherein the magnetic disk has a CSS region in which the surface of the protective film on which the magnetic head slider 1 is located has a roughness of Ra 10 nm or more when the magnetic disk starts and stops rotating, and the magnetic disk The surface of the protective film on which the magnetic head slider 1 is located during the rotation of the magnetic head has a data area having a roughness of Ra 3 nm or less.
( I ) 〜 (m) (I)-(m)
R l - X- (C F2 C F20)m- (C F? 0)n- X- R 2 … ( I )R l-X- (CF 2 CF 2 0) m- (CF ? 0) n -X- R 2… (I)
F (C F2 C F2 C F2 - 0)n- Ci F4-X- R 3 - ( Π ) F (CF 2 CF 2 CF 2 - 0) n - C i F 4 -X- R 3 - (Π)
F - (C F (C F3)- C F2 - 0)n- C F (C Fa)- X- R 4 … ( ΙΠ ) (但し、 m, nは整数、 R l, R 2, R 3, R 4は炭化水素鎖、 Xは 2 価の結合基) で表されるパーフロロポリエーテル系化合物の少なく とも 一つ以上を前記磁気ディスク全面に塗布後、 前記磁気ディスク全面を 8 0°C以上で加熱あるいは、 前記磁気ディスク全面もしくは前記データ 領域を紫外線照射し、 前記一般式 ( I ) 〜 (! Π) で表されるパーフロロ ポリエーテル系化合物から選択される吸着性の官能基を有するパーフロ 口ポリエーテル系化合物を前記磁気ディスク全面に塗布し、 次に前記デ —タ領域をパーフロロカーボン系溶剤で洗浄した後、 前記一般式 ( I ) 〜 (ΙΠ) で表されるパーフロロポリエーテル化合物から選択される化学 的に反応する官能基を有するパーフロ口ポリエーテル系化合物を塗布し、 前記 C S S領域に形成した潤滑膜が 1. 5 n m 以上の膜厚であり前記デ ータ領域に形成した潤滑膜が 1 n m以上の膜厚であり、 前記データ領域 で前記磁気へッ ドスライダ一と磁気ディ スク間で発生する最大静止摩擦 係数が 1. 5 以下, 動摩擦係数が 1. 0 以下であり前記 C S S領域で前 記磁気へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数 が 1. 0 以下, 動摩擦係数が 0. 5 以下であることを特徴とする磁気記 録再生装置。 F - (CF (CF 3) - CF 2 - 0) n- CF (CF a) - X- R 4 ... (ΙΠ) ( where, m, n are integers, R l, R 2, R 3, R 4 Is a hydrocarbon chain, and X is a divalent linking group). At least one or more perfluoropolyether compounds represented by the following formulas are applied to the entire surface of the magnetic disk, and the entire surface of the magnetic disk is heated at 80 ° C or higher. Alternatively, the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays, and a perfluoropolyether having an adsorptive functional group selected from the perfluoropolyether compounds represented by the general formulas (I) to (!). A system compound is applied to the entire surface of the magnetic disk, and the data region is washed with a perfluorocarbon solvent, and then selected from the perfluoropolyether compounds represented by the general formulas (I) to (ΙΠ). Perfluorinated polyethers with chemically reactive functional groups The lubricating film formed in the CSS region has a thickness of 1.5 nm or more, and the lubricating film formed in the data region has a thickness of 1 nm or more. The maximum static friction coefficient generated between the magnetic head slider and the magnetic disk is 1.5 or less, and the dynamic friction coefficient is 1.0 or less. A magnetic recording / reproducing apparatus characterized in that the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk is 1.0 or less and the dynamic friction coefficient is 0.5 or less.
1 6. 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディ スクにおいて、 該磁気ディスクの回転起動時と回転停止時に磁気へッ ド スライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式 (IV) 〜 (Xffl)  1 6. In a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, the magnetic head slider is located on the surface of the protective film where the magnetic head slider 1 is positioned when the magnetic disk starts rotating and stops rotating. A CSS area having a roughness of Ra 10 nm or more; and a data area having a roughness of Ra 3 nm or less on the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk. The following general formulas (IV) to (Xffl)
F (C F2 C F2 C F20)n- C2 F4- C 0NH - C3 Ht F (CF 2 CF 2 CF 2 0) n - C 2 F 4 - C 0NH - C 3 H t
— S i (0 C2 H ··· (IV)— S i (0 C 2 H ··· (IV)
F (C F (C FJ- C Fi O)n- C F (C FJ- C ONH - C3 H6 F (CF (C FJ- CF i O) n -CF (C FJ- C ONH-C 3 H 6
— S i (O Cz H … ( V)— S i (OC z H… (V)
(C, H。 0)3 S i - C3 HE - NH CO- (C F2 C F20)m (C, H. 0) 3 S i-C 3 H E -NH CO- (CF 2 CF 20 ) m
- (C F20)n- C0NH - C3 H6 - S i (0 C2 H6)3 … (VI) C6 H, - O - C6 H4 - H3 N+ "0 C 0- (C F2 C F20)m -(CF 2 0) n -C0NH-C 3 H 6 -S i (0 C 2 H 6 ) 3 … (VI) C 6 H,-O-C 6 H 4 -H 3 N + "0 C 0- (CF 2 CF 2 0) m
- (C F, 0)„- CO O" +N Ha— Cs —〇一 Cs H。 … ( ) F(C FJ C F, C F2 - 0)„- C2 F4- C Hi 0H … (VII)-(CF, 0) „-CO O" + NH a — Cs —〇C s H. ... () F (CF J CF , CF 2 - 0) "- C 2 F 4 - CH i 0H ... (VII)
H 0- C HJ - (C F2 C FJ 0)m-(C F20)n- CH20H ··· (DC) H O- (C H2 C H2 - 0) - C H2 C F2 - (C F2 C F20)m H 0- CH J - (CF 2 CF J 0) m - (CF 2 0) n - CH 2 0H ··· (DC) H O- (CH 2 CH 2 - 0) - CH 2 CF 2 - (CF 2 CF 2 0) m
一(C F 20)n—〇 C F, C Hバ O - C H2 C H ー O H … (X) F (C F2 C F, C F20)„- CJ F< - C 00" +NH3— CE H4—〇One (CF 2 0) n —〇 CF, CH O-CH 2 CH ー OH… (X) F (CF 2 CF, CF 20 ) 0- C J F < -C 00 "+ NH 3 — C E H 4 —〇
- Ce H5 … (XI)-C e H 5 … (XI)
F (C F (C Fa)- C F20)n- C F (C F3)- C00" +N Ha F (CF (CF a) - CF 2 0) n - CF (CF 3) - C00 "+ NH a
- C6 H4- 0- CE H6 ··· (ΧΠ)
Figure imgf000046_0001
- C 6 H 4 - 0- C E H 6 ··· (ΧΠ)
Figure imgf000046_0001
(但し、 m, n , p , qは整数) で表されるパ一フロロポリエーテル系 化合物の少なく とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗 布後、 前記磁気ディスク全面を 8 0°C以上に加熱あるいは、 前記磁気デ ィスク全面もしくは前記データ領域に紫外線照射し、 次いで前記 C S S 領域をパーフロロカーボン系溶剤で洗浄することにより、 前記 C S S領 域に形成した 1.5 n m 以上の膜厚の潤滑膜と前記データ領域に形成し た 1 n m以上の膜厚の潤滑膜とを備えたことを特徴とする磁気ディスク t (Where m, n, p, and q are integers) after applying a lubricant containing at least one or more perfluoropolyether compounds to the entire surface of the magnetic disk, By heating to 0 ° C or higher or irradiating the entire surface of the magnetic disk or the data area with ultraviolet rays, and then cleaning the CSS area with a perfluorocarbon-based solvent, a film thickness of 1.5 nm or more formed in the CSS area. magnetic disks t of the lubricating film and a lubricant film having a thickness of 1 nm or more formed in the data area, comprising the
1 7. 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディ スクにおいて、 該磁気ディスクの回転起動時と回転停止時に磁気へッ ド スライダーが位置する前記保護膜表面の粗さが R a 1 O n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 3 II iu以下のデータ領域とを備え、 前記保護膜表面に下記 -般式 (IV) 〜 (XDI) 1 7. In a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, the surface roughness of the protective film where the magnetic head slider is located when the magnetic disk starts and stops rotating. And a data area having a roughness of Ra 3 II iu or less on the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk. The following general formulas (IV) to (XDI)
F(C F2 C F2 C Fz 0)n- C2 F4- C 0NH- C3 H6 F (CF 2 CF 2 CF z 0) n -C 2 F 4- C 0 NH- C 3 H 6
- S i (O C2 HJ3 … (IV)-S i (OC 2 HJ 3 … (IV)
F(C F (C F3)- C F20),1- C F (C F3)- C ONH- C3 HE F (CF (CF 3 )-CF 20 ), 1 -CF (CF 3 )-C ONH- C 3 H E
一 S i (0 C2 H … ( V)One S i (0 C 2 H… (V)
(C2 H50)3 S i — Ca HE - N H C O— (C F2 C F20)m (C 2 H 5 0) 3 S i — C a H E -NHCO— (CF 2 CF 20 ) m
一(C F20)n— C 0 N H— C3 Hs— S i (〇 C2 H。)3 … (VI)One (CF 2 0) n — C 0 NH — C 3 H s — S i (〇 C 2 H.) 3 … (VI)
C6 H6 - 0- Ce H,- H3N + 一 OC O- (C F2 C F20) - (C F20)n- C O O" +N H3 - CE H4 - O - C6 H6 … (VE) F (C F2 C F2 C F2 -0)n- Ci F4- CHi 0H … (VI) C 6 H 6 - 0- C e H, - H 3 N + one OC O- (CF 2 CF 2 0 ) -(CF 2 0) n-COO " + NH 3 -C E H 4 -O-C 6 H 6 … (VE) F (CF 2 CF 2 CF 2 -0) n -C i F 4 -CH i 0H … (VI)
H O- CH2 - (C F2 C F20)m-(C F20)n- C H2 OH … (K) H 0-(CHi CH2 - 0)P- CH2 C FJ- (C F2 C F2〇)m H O- CH 2- (CF 2 CF 2 0) m- (CF 2 0) n- CH 2 OH… (K) H 0- (CH i CH 2 -0) P -CH 2 CF J- (CF 2 CF 2 〇) m
-(C F20)n- 0C F2 CH2 (0-C H2 C H2)q- 0H … (X) F (C F2 C F2 C F2〇)n— C2 F4— CO O— +NH3— CS H,— 0-(CF 2 0) n -0C F 2 CH 2 (0-CH 2 CH 2 ) q -0H… (X) F (CF 2 CF 2 CF 2 〇) n — C 2 F 4 — CO O— + NH 3 — C S H, — 0
― CB H6 ·■· (XI)― C B H 6 ■ (XI)
F(C F (C F3)-C F20)n- C F (C F3)- C 00- +N H3 F (CF (CF 3 ) -CF 20 ) n -CF (CF 3 )-C 00- + NH 3
- Ce H,- 0- C6 HB ··· (ΧΠ) -C e H,-0- C 6 H B
H
Figure imgf000047_0001
H
Figure imgf000047_0001
(但し、 m, n , p , qは整数) で表されるパーフロロポリエーテル系 化合物の少なく とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗 布後、 前記磁気ディスク全面を 8 0°C以上に加熱あるいは、 前記磁気デ イ スク全面もしくは前記データ領域に紫外線照射し、 次いで前記磁気デ イスク全面をパーフロロカーボン系溶剤で洗浄し、 前記 C S S領域に前 記一般式 (VII) 〜 (Xffl) のパーフロロポリエーテル系化合物から選択さ れる吸着性の官能基を有するパーフロロポリエーテル系化合物を塗布し. 前記 C S S領域に形成した 1. 5 n m 以上の膜厚の潤滑膜と前記データ 領域に形成した 1 n m以上の膜厚の潤滑膜とを備えたことを特徴とする 磁気ディスク。  (Where m, n, p, and q are integers) after applying a lubricant containing at least one or more perfluoropolyether-based compounds to the entire surface of the magnetic disk, ° C or by irradiating the entire surface of the magnetic disk or the data region with ultraviolet rays, and then cleaning the entire surface of the magnetic disk with a perfluorocarbon-based solvent, and applying the above general formulas (VII) to (VII) to the CSS region. Xffl) is coated with a perfluoropolyether compound having an adsorptive functional group selected from perfluoropolyether compounds. A lubricating film with a thickness of 1.5 nm or more formed in the CSS region and the data A magnetic disk comprising a lubricating film having a thickness of 1 nm or more formed in a region.
1 8. 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディ スクにおいて、 該磁気ディスクの回転起動時と回転停止時に磁気へッ ド スライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式 (IV) 〜 (xm) 1 8. A magnetic layer in which an underlayer, a magnetic layer, and a protective layer are sequentially stacked on a non-magnetic substrate. In the disk, a CSS region in which the surface of the protective film on which the magnetic head slider 1 is located when the rotation of the magnetic disk is started and stopped is Ra 10 nm or more; The surface of the protective film on which the magnetic head slider 1 is located has a data area with a roughness of Ra 3 nm or less, and the surface of the protective film has the following general formula (IV) to (xm).
F (C F2 C F2 C F , 0)n- C2 F , - C O N H - C3 He F (CF 2 CF 2 CF, 0) n - C 2 F, - CONH - C 3 H e
_ S i (O H。)3 … (IV)_ S i (OH.) 3 … (IV)
F (C F (C F3 ) - C F20)n- C F (C FJ - C 0 N H - C3 He 一 S i (〇 C2 H … (V) F (CF (CF 3 )-CF 20 ) n -CF (C FJ-C 0 NH-C 3 He e S i (〇 C 2 H… (V)
(C2 HS〇)3 S i - C3 H6 - N H C O - (C F2 C F20)m (C 2 H S 〇) 3 S i-C 3 H 6 -NHCO-(CF 2 CF 20 ) m
一(C F20)n— C O N H— C3 He— S i (O C2 H … (VI)One (CF 2 0) n - CONH- C 3 H e - S i (OC 2 H ... (VI)
CE H5 - O - Ce H4 - H3 N+ — 0 C〇 -(C F2 C F20)m C E H 5 -O-C e H 4 -H 3 N + — 0 C〇-(CF 2 CF 20 ) m
一(C F20)n— C〇〇一 +N Ha - Ce H4 - 0 - C8 H6 … ( H) F (C F2 C F2 C F2 - 0) n- C2 F4 - C H20 H ··· (VI)One (CF 2 0) n - C_〇_〇 one + NH a - C e H 4 - 0 - C 8 H 6 ... (H) F (CF 2 CF 2 CF 2 - 0) n - C 2 F 4 - CH 2 0 H
H 0— C H2— (C F2 C F2 O 一(C F2〇)n— C H20 H … (DC) H O -(C H2 C H2 - 0)p - C H2 C F2— ( C F2 C F20)m H 0- CH 2 - (CF 2 CF 2 O one (CF 2 〇) n - CH 2 0 H ... (DC) HO - (CH 2 CH 2 - 0) p - CH 2 CF 2 - (CF 2 CF 2 0) m
- (C F20)n- 0 C F, C H2 (0 - C H2 C H2)¾- 0 H ··· (X) F C Fz C Fz C Fi O),,— C2 F*— C O O— +N H3 - C6 H4 - 0 一 H6 ··· (XI)-(CF 2 0) n -0 CF, CH 2 (0-CH 2 CH 2 ) ¾ -0 H ... (X) FC Fz C Fz C Fi O) ,,-C 2 F * — COO— + NH 3 - C 6 H 4 - 0 one H 6 ··· (XI)
F (C F (C F3) - C F? 0)n - C F (C F3 ) - C 00_ +N H3 F (CF (CF 3 )-CF ? 0) n -CF (CF 3 )-C 00 _ + NH 3
— Ce H4 - O— H。 … (ΧΠ) — C e H 4 -O— H. … (ΧΠ)
H - (C F2 C F20)m- (C F20) H- (CF 2 CF 20 ) m- (CF 20 )
H ··■ (XII)
Figure imgf000048_0001
(但し、 m, n, p , qは整数) で表されるパーフロロポリエーテル系 化合物の少なく とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗 布後、 前記磁気ディスク全面を 8 0°C以上に加熱あるいは、 前記磁気デ イスク全面もしくは前記データ領域に紫外線照射し、 次いで前記データ 領域をパーフロ口カーボン系溶剤で洗浄し、 前記データ領域に前記一般 式 ( I ) 〜 (! Π) のパーフロロポリエーテル系化合物から選択される該 保護膜表面と化学的に反応する官能基を有するパーフロロポリエーテル 系化合物を塗布し、 前記 C S S領域に形成した 1.5 n m 以上の膜厚の 潤滑膜と前記データ領域に形成した 1 n m以上の膜厚の潤滑膜とを備え たことを特徴とする磁気ディスク。
One H ... ■ (XII)
Figure imgf000048_0001
(Where m, n, p, and q are integers) after applying a lubricant containing at least one or more perfluoropolyether-based compound to the entire surface of the magnetic disk, ° C or by irradiating the entire surface of the magnetic disk or the data area with ultraviolet rays, and then cleaning the data area with a carbon-based solvent having a perfluoro opening, and applying the general formulas (I) to (! Π) to the data area. A lubricating film having a thickness of 1.5 nm or more formed in the CSS region by applying a perfluoropolyether compound having a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether compound selected from And a lubricating film having a thickness of 1 nm or more formed in the data area.
1 9. 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディ スクにおいて、 該磁気ディスクの回転起動時と回転停止時に磁気へッ ド スライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へッ ドスライダ一が位 置する前記保護膜表面の粗さが R a 3 n m以下のデータ領域とを備え、 前記保護膜表面に下記一般式'(IV) 〜 (VI)  1 9. In a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate, the magnetic head slider is located on the surface of the protective film where the magnetic head slider 1 is positioned when the magnetic disk starts and stops rotating. A CSS area having a roughness of Ra 10 nm or more; and a data area having a roughness of Ra 3 nm or less on the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk. The following general formulas (IV) to (VI) are formed on the surface of the protective film.
F (C F2 C F2 C F20)„ - C2 F4- C 0NH- C3 He F (CF 2 CF 2 CF 2 0) "- C 2 F 4 - C 0NH- C 3 H e
- S i (0 C2 HJ3 … (IV)-S i (0 C 2 HJ 3 … (IV)
F(C F (C F3)- C F20)n- C F (C Fa)- CONH- C3 H6 一 S i (〇 C2 H ··- (V) F (CF (CF 3) - CF 2 0) n - CF (CF a) - CONH- C 3 H 6 one S i (〇 C 2 H ·· - (V)
(C2 H50)3 S i - C3 H6 - NH C O- (C F2 C F20)m (C 2 H 5 0) 3 S i - C 3 H 6 - NH C O- (CF 2 CF 2 0) m
-(C F, 0)n- C 0NH - C3 HB - S i (OC2 H5)3 … (VI) (但し、 m, nは整数) で表されるパーフロロポリエーテル系化合物の 少なく とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗布後、 前 記磁気ディ スク全面を 8 0 °C以上に加熱あるいは、 前記磁気ディスク全 面もしくは前記データ領域に紫外線照射し、 次いで前記保護膜表面に下 記一般式 (VH) 〜 (Xffl) -(CF, 0) n -C 0 NH-C 3 H B -S i (OC 2 H 5 ) 3 … (VI) (where m and n are integers) After applying a lubricant containing at least one of them to the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C. or more, or The surface or the data area is irradiated with ultraviolet light, and then the following general formulas (VH) to (Xffl)
Ce H5 - 0 - Ce H4 - H3 N+ "0C 0- (C F2 C F20)m C e H 5 - 0C e H 4 - H 3 N + "0C 0- (CF 2 CF 2 0) m
- (C Fz 0)n- C 00" +N H3 - CB H, - 0 - Ce H5 - ( ) F (C F2 C F2 C F2 - 0)n- C2 F4 -C H2 O H … (VI) - (CF z 0) n - C 00 "+ NH 3 - C B H, - 0 - C e H 5 - () F (CF 2 CF 2 CF 2 - 0) n- C 2 F 4 -CH 2 OH … (VI)
H O- CH2 - (C F2 C Fi O)m-(C F20)n- C H2 OH … (K) H O-(C H2 C H2 - 0)P- CH2 C F2 - (C F2 C F2〇)ra H O- CH 2- (CF 2 CF i O) m- (CF 2 0) n -CH 2 OH… (K) H O- (CH 2 CH 2 -0) P -CH 2 CF 2- (CF 2 CF 2 〇) ra
-(C F20)n- O C F? C H2 (0- C Hz C H2)q- OH … (X) F (C F2 C F2 C F20)n- C2 F,- C00~ +N H3— CS H,—〇 — H5 … (XI)-(CF 2 0) n -OCF ? CH 2 (0- CH z CH 2 ) q -OH… (X) F (CF 2 CF 2 CF 2 0) n -C 2 F,-C00 ~ + NH 3 — C S H, —〇 — H 5 … (XI)
F (C F (C F3)- C F20)n- C F (C F3)- C OO_ +N H F (CF (CF 3 ) -CF 20 ) n-CF (CF 3 ) -C OO _ + NH
- C6 H4- 0- C6 H (M) - C 6 H 4 - 0- C 6 H (M)
H2
Figure imgf000050_0001
H 2
Figure imgf000050_0001
(但し、 m, n , p , qは整数) で表されるパーフロロポリエーテル系 化合物から選択される吸着性の官能基を有するパーフロロポリエーテル 系化合物を前記磁気ディ スク全面に塗布し、 次に前記データ領域をパー フロロカーボン系溶剤で洗浄し、 次に前記一般式 (IV)〜(V1) のパ一フ ロロポリエーテル系化合物から選択される該保護膜表面と化学的に反応 する官能基を有するパーフ口口ポリエーテル系化合物を塗布し、 前記 C S S領域に形成した 1. 5 n m 以上の膜厚の潤滑膜と前記データ領域 に形成した 1 n m以上の膜厚の潤滑膜とを備えたことを特徴とする磁気 ディスク。 (Where m, n, p, and q are integers) a perfluoropolyether compound having an adsorptive functional group selected from perfluoropolyether compounds represented by the following formulas: Next, the data area is washed with a perfluorocarbon-based solvent, and then a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether-based compounds represented by the general formulas (IV) to (V1). A lubricating film having a thickness of 1.5 nm or more formed in the CSS region and a lubricating film having a thickness of 1 nm or more formed in the data region. Characterized by magnetism disk.
2 0. 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を順に積層した 磁気ディスクの製造方法において、 該磁気ディスクの回転起動時と回転 停止時に磁気へッ ドスライ ダ一が位置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へ ッ ドスライダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデ ータ領域とを形成し、 次に前記保護膜表面に下記一般式 (IV) 〜 (Xffl) F (C F2 C Fz C F20)n- C2 F,- C ON H - C3 HE 20. In a method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, a magnetic head slider is positioned when the magnetic disk starts rotating and stops rotating. A CSS region where the surface roughness of the protective film is Ra10 nm or more; and a data area where the surface roughness of the protective film where the magnetic head slider 1 is positioned during rotation of the magnetic disk is Ra3 nm or less. And the following general formulas (IV) to (Xffl) F (CF 2 CF z CF 20 ) n -C 2 F,-C ON H-C 3 H E
— S i (O C2 H ··· (IV)— S i (OC 2 H ··· (IV)
F (C F (C F3) - C F2〇)n - C F (C F3) - C ON H— C3 He F (CF (CF 3) - CF 2 〇) n - CF (CF 3) - C ON H- C 3 H e
- S i (0 C2 HJ3 ··· (V)-S i (0 C 2 HJ 3
( C2 H60)3 S i - C3 H6 -NH CO- (C F2 C F20)m (C 2 H 60 ) 3 S i-C 3 H 6 -NH CO- (CF 2 CF 20 ) m
— (C F2〇)n— C ONH— C3 HE— S i (〇 C2 H5)3 … (VI) Ce H5 - 0- Cc H4-H3 N+ ~OC O- (C F2 C F20)m - (CF 2 〇) n - C ONH- C 3 H E - S i ( 〇 C 2 H 5) 3 ... ( VI) C e H 5 - 0- C c H 4 -H 3 N + ~ OC O- (CF 2 CF 2 0) m
一(C F2〇)n— C 00— +NH3- Ce H4- 0- C6 Hs … ( ) F (C F2 C F2 C F2 - 0)n- C2 F,- C H? O H … (VI)One (CF 2 〇) n - C 00- + NH 3 - C e H 4 - 0- C 6 H s ... () F (CF 2 CF 2 CF 2 - 0) n - C 2 F, -? CH OH … (VI)
H O- CH2 - (C F, C F20)ro- (C F20)I, - C H20 H … (IX) H〇—(C H2 C H2— 0)D— C H2 C F2— (C F2 C F20)„ H O- CH 2 - (CF, CF 2 0) ro - (CF 2 0) I, - CH 2 0 H ... (IX) H_〇- (CH 2 CH 2 - 0) D - CH 2 CF 2 - ( CF 2 CF 2 0) „
— (C F2〇)n— 0 C F2 CH2 (0— C H2 C H ー O H … (X)— (CF 2 〇) n — 0 CF 2 CH 2 (0— CH 2 CH ー OH… (X)
F(C F2 C F2 C Fz 0)r. - C2 F4- C 00' N H3 - C6 H, - 0 一 H5 … (XI) F (CF 2 CF 2 CF z 0) r.- C 2 F 4 -C 00 'NH 3 -C 6 H,-0-1 H 5 … (XI)
- +  -+
F (C F (C FJ- C F20)n - C F (C F3)- C 00 N H F (CF (C FJ- CF 20 ) n -CF (CF 3 )-C 00 NH
- CK H4 - 0 - CE H6 (ΧΠ) - C K H 4 - 0 - C E H 6 (ΧΠ)
、z , Z
H? C C H20 C H20- (C F2 C F20)n - (C F20)n ヽ XX
Figure imgf000052_0001
? H CCH 2 0 CH 2 0- (CF 2 CF 2 0) n - (CF 2 0) nヽXX
Figure imgf000052_0001
(但し、 m, n, p , qは整数) で表されるパーフロロポリエーテル系 化合物の少なく とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗 布後、 前記磁気ディスク全面を 8 0°C以上に加熱あるいは、 前記磁気デ イ スク全面もしくは前記データ領域に紫外線照射し、 次いで前記データ 領域をパーフロロカーボン系溶剤で洗浄し、 前記 C S S領域に 1. 5mn 以上の膜厚の潤滑膜を形成し、 前記データ領域に 1 n m以上の膜厚の潤 滑膜を形成することを特徴とする磁気ディスク製造方法。  (Where m, n, p, and q are integers) after applying a lubricant containing at least one or more perfluoropolyether-based compound to the entire surface of the magnetic disk, ° C or more, or irradiate the entire surface of the magnetic disk or the data area with ultraviolet rays, then wash the data area with a perfluorocarbon solvent, and apply a lubricating film with a thickness of 1.5 mn or more to the CSS area. Forming a lubricating film having a thickness of 1 nm or more in the data area.
2 1. 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を順に積層した 磁気ディスクの製造方法において、 該磁気ディスクの回転起動時と回転 停止時に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 2 1. A method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating. The roughness of the protective film surface is Ra
1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁気へ ッ ドスライダ一が位置する前記保護膜表面の粗さが R a 3 n m以下のデ ータ領域とを形成し、 次に前記保護膜表面に下記一般式 (IV) 〜 (xm)Forming a CSS region having a thickness of 10 nm or more and a data region having a roughness of Ra 3 nm or less on the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk; The following general formulas (IV) to (xm)
F(C F2 C F2 C Fz 0)n- C2 F4- C0NH - C3 He F (CF 2 CF 2 CF z 0) n - C 2 F 4 - C0NH - C 3 H e
一 S i (〇 C2 H … (IV) F (C F (C FJ - C F, 0)n - C F (C F3) - C〇NH— C3 HS One S i (〇 C 2 H… (IV) F (CF (C FJ-CF, 0) n -CF (CF 3 )-C〇NH— C 3 H S
一 S 丄 (◦ C, H … ( V) (C2 H50)3 S i - C3 H6 - N H CO- (C F2 C F20)m One S丄(◦ C, H ... (V ) (C 2 H 5 0) 3 S i - C 3 H 6 - NH CO- (CF 2 CF 2 0) m
-(C F20)n- C 0NH - C3 H6 - S i (O C2 Hj3 … (VI) C E H 6 - O - C 6 H 4 - H , N + 一〇 C〇一(C F2 C F20)m -(CF 2 0) n -C 0 NH-C 3 H 6 -S i (OC 2 Hj 3 … (VI) C E H 6 -O-C 6 H 4 -H, N + one C〇 one (CF 2 CF 2 0) m
- (C F20)n- C OO" +NHa -Ce H4- 0- Ce H5 … ( ) - (CF 2 0) n - C OO "+ NH a -C e H 4 - 0- C e H 5 ... ()
F (C F? C F? C F? - 0); - C7 F4- C H? 0H … (VI) H 0- CH2 - (C F2 C Fz 0)m- (C F20)n- C Hi 0H ··· (DC) H〇一(C H2 CH2—〇)p— C H2 C F2— ( C F 2 C F20)m F (CF CF CF - 0? ??); -? C 7 F 4 - CH 0H ... (VI) H 0- CH 2- (CF 2 CF z 0) m- (CF 2 0) n -CH i 0H ··· (DC) H〇 (CH 2 CH 2 —〇) p — CH 2 CF 2 — ( CF 2 CF 2 0) m
一(C F20)n—〇 C F2 C H2 (〇一 C H2 C H2)q—〇 H … (X) F(C F2 C F2 C F20)n- C2 F4- C 00~ +NH3— CS H4— 0 One (CF 2 0) n —〇 CF 2 CH 2 (〇One CH 2 CH 2 ) q —〇 H… (X) F (CF 2 CF 2 CF 20 ) n -C 2 F 4 -C 00 ~ + NH 3 — C S H 4 — 0
- C6 H5 … (XI)-C 6 H 5 … (XI)
F (C F (C F3) - C F,〇)n- C F (C F3) - C OO一 +N H3 F (CF (CF 3 )-CF, 〇) n -CF (CF 3 )-C OO + NH 3
- Ce H4- 0- C6 H5 … ( ) - C e H 4 - 0- C 6 H 5 ... ()
HH
Figure imgf000053_0001
Figure imgf000053_0001
(但し、 m, n , p , qは整数) で表されるパーフロロポリエーテル系 化合物の少なく とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗 布後、 前記磁気ディスク全面を 8 0°C以上に加熱あるいは、 前記磁気デ イ スク全面もしくは前記データ領域に紫外線照射し、 次いで前記磁気デ イスク全面をパーフロロ 'カーボン系溶剤で洗浄し、 前記 C S S領域に前 記一般式 (IV) 〜 (xm) のパ一フロロポリエーテル系化合物から選択さ れる吸着性の官能基を有するパーフロロポリエーテル系化合物を塗布し, 前記 C S S領域に 1.5 n m 以上の膜厚の潤滑膜を形成し、 前記データ 領域に 1 n m以上の膜厚の潤滑膜を形成することを特徴とする磁気ディ スク製造方法。  (Where m, n, p, and q are integers) after applying a lubricant containing at least one or more perfluoropolyether-based compounds to the entire surface of the magnetic disk, ° C or above, or the entire surface of the magnetic disk or the data area is irradiated with ultraviolet rays, and then the entire surface of the magnetic disk is washed with a perfluorocarbon-based solvent. (Xm) a perfluoropolyether compound having an adsorptive functional group selected from the perfluoropolyether compounds of (xm), and a lubricating film having a thickness of 1.5 nm or more is formed in the CSS region; A method for manufacturing a magnetic disk, comprising forming a lubricating film having a thickness of 1 nm or more in a data area.
2 2. 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を順に積層した 磁気ディスクの製造方法において、 該磁気ディスクの回転起動時と回転 停止時に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 1 O n m以上である C S S領域と、 前記磁気ディスクの回転中に磁 気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 3 n m以下 のデータ領域とを形成し、 次に前記保護膜表面に下記一般式(IV)〜(ΧΙΕ) F (C F2 C FJ C Fi O)n- C2 F4- CONH- C3 He 2 2. A method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts and stops rotating. The roughness of the protective film surface Forming a CSS region with Ra1 O nm or more and a data region with a roughness of Ra3 nm or less on the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk; said protective layer surface by the following general formula (IV) ~ (ΧΙΕ) F in (CF 2 CF J CF i O ) n- C 2 F 4 - CONH- C 3 H e
一 S i (0 C2 HJ3 - (IV)One S i (0 C 2 HJ 3- (IV)
F (C F (C FJ - C F20)n— C F (C FJ— C ONH - C3 HS F (CF (C FJ-CF 2 0) n — CF (C FJ— C ONH-C 3 H S
— S i (〇 C2 H … ( V)— S i (〇 C 2 H… (V)
(C2 H, 0)3 S i - C3 He-NHC0- (C FJ C F20)m (C 2 H, 0) 3 S i - C 3 H e -NHC0- (CF J CF 2 0) m
- (C F20)n-C 0 H - C3 H6- S i (0 C2 HJ3 … (VI) C6 H5 -0- CE H4 - H3 N+ "0C 0- (C F2 C F20)m -(CF 2 0) n -C 0 H-C 3 H 6 -S i (0 C 2 HJ 3 … (VI) C 6 H 5 -0- C E H 4 -H 3 N + "0C 0- ( CF 2 CF 2 0) m
- (C F20)n- C O O" +N H3 - CE H4 - O - C6 H6 … (W) F (C F2 C F2 C F2 - 0)n- C2 F4- C H2 OH … (VI) - (CF 2 0) n - COO "+ NH 3 - C E H 4 - O - C 6 H 6 ... (W) F (CF 2 CF 2 CF 2 - 0) n - C 2 F 4 - CH 2 OH … (VI)
H 0-C H, - (C F2 C F20)m-(C F20)n- C Hi 0H … (IX) H〇—(C H2 CH2— 0)P— C H2 C F2— (C F2 C F20)m H 0-CH,-(CF 2 CF 2 0) m- (CF 2 0) n -CH i 0H… (IX) H〇— (CH 2 CH 2 — 0) P — CH 2 CF 2 — (CF 2 CF 2 0) m
-(C F20)n- 0C F2 CH2 (0- CH2 C HJq- 0H … (X) F (C F2 C F2 C F20)„- C2 F4- C 00" +N H3 - C6 H4 - 0-(CF 2 0) n -0C F 2 CH 2 (0- CH 2 C HJ q -0H… (X) F (CF 2 CF 2 CF 2 0) „-C 2 F 4 -C 00" + NH 3 - C 6 H 4 - 0
- Ce H6 … (XI)-C e H 6 … (XI)
F (C F (C Fa)- C F20)n- C F (C F3)- C 00" +N H3 F (CF (CF a) - CF 2 0) n - CF (CF 3) - C 00 "+ NH 3
- C6 H4 - 0 - C6 H5 … (ΧΠ) C F2 C F20)m-(C Fi 0)n … (Xffl)
Figure imgf000054_0001
- C 6 H 4 - 0 - C 6 H 5 ... (ΧΠ) CF 2 CF 2 0) m - (CF i 0) n ... (Xffl)
Figure imgf000054_0001
(但し、 m, n , p, qは整数) で表されるパーフロロポリエーテル系 0 化合物の少なく とも一つ以上を含む潤滑剤を前記磁気ディスク全面に塗 布後、 前記磁気ディスク全面を 8 0°C以上に加熱あるいは、 前記磁気デ イ スク全面もしくは前記データ領域に紫外線照射し、 次いで前記磁気デ ィスク全面をパーフロロカーボン系溶剤で洗浄し、 前記データ領域に前 記一般式 (IV) 〜 (VI) のパーフロロポリエーテル系化合物から選択さ れる前記保護膜表面と化学的に反応する官能基を有するパーフロロポリ エーテル系化合物を塗布し、 前記 C S S領域に 1. 5 n m 以上の膜厚の 潤滑膜を形成し、 前記データ領域に 1 n m以上の膜厚の潤滑膜を形成す ることを特徴とする磁気ディスク製造方法。 (However, m, n, p, and q are integers) After applying a lubricant containing at least one compound to the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C. or higher, or ultraviolet light is applied to the entire surface of the magnetic disk or the data region. Next, the entire surface of the magnetic disk is washed with a perfluorocarbon-based solvent, and the data area is chemically treated with the surface of the protective film selected from the perfluoropolyether-based compounds represented by the general formulas (IV) to (VI). Apply a perfluoropolyether compound having a reactive functional group, form a lubricating film with a thickness of 1.5 nm or more in the CSS area, and form a lubricating film with a thickness of 1 nm or more in the data area. A method of manufacturing a magnetic disk.
2 3. 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を順に積層した 磁気ディスクの製造方法において、 該磁気ディスクの回転起動時と回転 停止時に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが  2 3. A method for manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially laminated on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts rotating and stops rotating. The roughness of the protective film surface
R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁 気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 3 n m以下 のデータ領域とを形成し、 次に前記保護膜表面に下記一般式(IV)〜(VI) F (C F2 C F2 C F2〇 ー C2 F,— C ON H - C3 HS Forming a CSS region having a Ra of 10 nm or more and a data region having a roughness of Ra 3 nm or less on the surface of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk; On the surface of the protective film, the following general formulas (IV) to (VI) F (CF 2 CF 2 CF 2 〇—C 2 F, — C ON H—C 3 H S
- S i (0 C, H - (IV) -S i (0 C, H-(IV)
F (C F (C F3)— C F20)n— C F (C F3) - C ONH - C3 HS F (CF (CF 3 ) —CF 2 0) n — CF (CF 3 )-C ONH-C 3 H S
— S i (〇 C2 H … (V)— S i (〇 C 2 H… (V)
(C2 H5〇)3 S i - C3 H6 -NHCO- (C F2 C F20). (C 2 H 5 〇) 3 Si-C 3 H 6 -NHCO- (CF 2 CF 20 ).
- (C FJ 0),- C O NH - C3 H6- S i (0C2 HJ3 … (VI) (但し、 m, nは整数) で表されるパーフロロポリエーテル系化合物か ら選択される前記保護膜表面と化学的に反応する官能基を有するバーフ ロロポリエーテル系化合物を少なくとも一つ以上を前記磁気ディスク全 面に塗布し、 前記磁気ディスク全面を 8 0で以上で加熱あるいは、 紫外 線照射した後、 下記一般式 (VK) 〜 (XE1) -(CF J 0),-CO NH -C 3 H 6 -S i (0C 2 HJ 3 … (VI) (where m and n are integers) selected from perfluoropolyether compounds At least one bar fluoropolyether compound having a functional group that chemically reacts with the surface of the protective film is applied to the entire surface of the magnetic disk, and the entire surface of the magnetic disk is heated at 80 or more, or ultraviolet. After irradiation, the following general formula (VK) ~ (XE1)
C6 H5 - 0- C6 H4- H3 N+ "0 C 0- (C F2 C F20)m C 6 H 5 - 0- C 6 H 4 - H 3 N + "0 C 0- (CF 2 CF 2 0) m
— (C F20 一 C〇〇— +N H3 - Cs H4 - 0 - Ce H6 … ( ) F (C F2 C F2 C F2 - 0)n- C2 F4- CH20H … (VI)- (CF 2 0 one C_〇_〇- + NH 3 - C s H 4 - 0 - C e H 6 ... () F (CF 2 CF 2 CF 2 - 0) n - C 2 F 4 - CH 2 0H ... (VI)
H0-CH2 -(C F2 C F20)m-(C F20)n- CH20 H … (IX) H O-(C H2 CH2 - 0)P- C H2 C F2 - (C F, C F20)m H0-CH 2- (CF 2 CF 2 0) m- (CF 2 0) n -CH 2 0 H… (IX) H O- (CH 2 CH 2 -0) P -CH 2 CF 2- (CF, CF 2 0) m
_ (C F 2 〇)n— 0 C F2 C H 0 - C H2 C H — 0 H … (X) F CC F. C F^ F. Ojn- C. F.- C OO- +NH3 - Ce H,- 0_ (CF 2 〇) n — 0 CF 2 CH 0-CH 2 CH — 0 H… (X) F CC F. CF ^ F. Ojn- CF- C OO- + NH 3 -C e H,-0
- C 6 H 6 … ) F (C F (C F3)- C F20)n- C F (C F3)- C 00" +NH3 -C 6 H 6 …) F (CF (CF 3 )-CF 20 ) n -CF (CF 3 )-C 00 "+ NH 3
— CE H,— 0— CS H ··· (ΧΠ) — C E H, — 0— C S H ··· (ΧΠ)
H (C F2 C F20)m-(C F20) H (CF 2 CF 20 ) m- (CF 20 )
- … (xm)
Figure imgf000056_0001
-… (Xm)
Figure imgf000056_0001
(但し、 m, n , p qは整数) で表されるパーフロロポリエーテル系 化合物から選択される吸着性の官能基を有するパーフロロポリエーテル 系化合物を前記磁気ディスク全面に塗布し、 次に前記データ領域をパー フロロカーボン系溶剤で洗浄し、 次に前記一般式 (IV) 〜 (VI) のパ一 フロロポリエーテル系化合物から選択される前記保護膜表面と化学的に 反応する官能基を有するパーフロロポリエーテル系化合物を塗布し、 前 記 C S S領域に 1.5 n m 以上の膜厚の潤滑膜を形成し、 前記データ領 域に 1 n m以上の膜厚の潤滑膜を形成することを特徴とする磁気ディ ス ク製造方法。 (Where m, n, and pq are integers) a perfluoropolyether compound having an adsorptive functional group selected from perfluoropolyether compounds represented by the following formula: The data area is washed with a perfluorocarbon-based solvent, and then a part having a functional group chemically reactive with the surface of the protective film selected from the perfluoropolyether-based compounds represented by the general formulas (IV) to (VI) is used. A magnetic layer formed by applying a fluoropolyether compound, forming a lubricating film having a thickness of 1.5 nm or more in the CSS region, and forming a lubricating film having a thickness of 1 nm or more in the data region. Disk manufacturing method.
24. 磁気ヘッ ドと、 磁気ヘッ ドを搭載した磁気ヘッ ドスライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディスクと を備えた磁気記録再生装置において、 該磁気ディスクが磁気ディスクの 回転起動時と回転停止時に前記磁気へッ ドスライダ一が位置する前記保 護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディ スクの回転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さ が R a 3 n m以下のデータ領域とを備え、 次に前記保護膜表面に下記一 般式 (IV) 〜 (X 24. A magnetic recording / reproducing apparatus including a magnetic head, a magnetic head slider having a magnetic head mounted thereon, and a magnetic disk having a non-magnetic substrate on which a base film, a magnetic film, and a protective film are laminated in this order. When the magnetic disk starts rotating and stops rotating, the surface of the protective film on which the magnetic head slider 1 is located has a roughness of Ra10 nm or more, and during rotation of the magnetic disk. The surface of the protective film on which the magnetic head slider 1 is located has a data area with a roughness of Ra 3 nm or less. Then, the following general formulas (IV) to (X)
F (C F2 C F2 C Fz 0)n- C2 F4- C0 NH- C3 H6 F (CF 2 CF 2 CF z 0) n -C 2 F 4 -C0 NH- C 3 H 6
— S i ( 0 C2 H ··· (IV)— S i (0 C 2 H ··· (IV)
F(C F (C F3)- C F20)n- C F (C F3)- C 0NH- C3 H6 F (CF (CF 3) - CF 2 0) n- CF (CF 3) - C 0NH- C 3 H 6
_ S i (O H。)3 … ( V)_ S i (OH.) 3 … (V)
(C2 Hs 0)3 S i - C3 Hs - N H C O-(C F2 C F20)m (C 2 H s 0) 3 S i-C 3 H s -NHC O- (CF 2 CF 20 ) m
-(C F20)n- C 0NH - C3 H6 - S i (O C2 H6)a … (VI) Ce H6 - OU - H3 N+ — O CO -(C F2 C F20)m -(CF 2 0) n -C 0 NH-C 3 H 6 -S i (OC 2 H 6 ) a … (VI) C e H 6 -OU-H 3 N + — O CO-(CF 2 CF 20 ) m
- (C F20)n - C 00一 +NH3 - Ce H,- 0- C6 H5 ··■ (VH) F(C F2 C F2 C F2- 0)n- CJ F4- CH20 H … (VI) - (CF 2 0) n - C 00 one + NH 3 - C e H, - 0- C 6 H 5 ·· ■ (VH) F (CF 2 CF 2 CF 2 - 0) n - C J F 4 - CH 2 0 H… (VI)
H O- CH2 - (C F2 C F20)m-(C F20)n- CH2 O H … (DC) H O— (CH2 CH2—〇)P— C HZ C F2— ( C F, C F20). H O- CH 2- (CF 2 CF 20 ) m- (CF 2 0) n- CH 2 OH… (DC) HO— (CH 2 CH 2 —〇) P — CH Z CF 2 — (CF, CF 2 0).
_(C F2〇)n—〇 C F2 C H2 (0— CH2 C H2)q—〇 H (X)_ (CF 2 〇) n —〇 CF 2 CH 2 (0— CH 2 CH 2 ) q —〇 H (X)
F(C F2 C F2 C F20)n- C2 F,- COO" +NH3 - H. 0 一 Cc H5 (XI)F (CF 2 CF 2 CF 2 0) n -C 2 F,-COO "+ NH 3- H. 0-1 C c H 5 (XI)
F(C F (C F3)- C F20)n- C F (C F3)- C 00~ +N H F (CF (CF 3 )-CF 20 ) n -CF (CF 3 )-C 00 ~ + NH
- Ce H4- 0- Ce H6 (ΧΠ) ffl)
Figure imgf000058_0001
- C e H 4 - 0- C e H 6 (ΧΠ) ffl)
Figure imgf000058_0001
(但し、 m, n, p , qは整数) で表されるパ一フロロポリエーテル系 化合物の少なく とも一つ以上を前記磁気ディスク全面に塗布後、 前記磁 気ディスク全面を 8 0 °C以上で加熱あるいは、 前記磁気ディスク全面も しくは前記データ領域を紫外線照射し、 次に前記データ領域をパ一フ口 口カーボン系溶剤で洗浄し、 前記 C S S領域に形成した潤滑膜が 1. 5 n m以上の膜厚であり前記データ領域に形成した潤滑膜が 1 n m以上の 膜厚であり、 前記データ領域で前記磁気へッ ドスライダ一と磁気ディス ク間で発生する最大静止摩擦係数が 1.5 以下, 動摩擦係数が 1.0 以 下であり前記 C S S領域で前記磁気へッ ドスライダ一と磁気ディスク間 で発生する最大静止摩擦係数が 1.0 以下, 動摩擦係数が 0.5 以下で あることを特徴とする磁気記録再生装置。  (However, m, n, p, and q are integers) After applying at least one or more of the polyfluoropolyether-based compounds to the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C or more. Heating, or irradiating the entire surface of the magnetic disk or the data area with ultraviolet rays, and then cleaning the data area with a carbon-based solvent. The lubricant film formed in the data area has a thickness of 1 nm or more, and the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less. A magnetic recording / reproducing apparatus, wherein a dynamic friction coefficient is 1.0 or less, and a maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the CSS region is 1.0 or less, and a dynamic friction coefficient is 0.5 or less.
2 5. 磁気へッ ドと、 磁気へッ ドを搭載した磁気へッ ドスライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディスクと を備えた磁気記録再生装置において、 該磁気ディスクが磁気ディスクの 回転起動時と回転停止時に前記磁気へッ ドスライダ一が位置する前記保 護膜表面の粗さが R a 1 O n m以上である C S S領域と、 前記磁気ディ スクの回転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さ が R a 3 n m以下のデータ領域とを備え、 次に前記保護膜表面に下記一 般式 (IV) 〜 (xm)  2 5. A magnetic recording / reproducing apparatus equipped with a magnetic head, a magnetic head slider equipped with a magnetic head, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially laminated on a non-magnetic substrate. In the above, when the magnetic disk starts and stops rotating, the surface of the protective film on which the magnetic head slider 1 is located has a roughness of Ra 1 O nm or more; The surface of the protective film on which the magnetic head slider 1 is located during the rotation of the magnetic head has a data area with a roughness of Ra 3 nm or less. Then, the following general formulas (IV) to (xm) are provided on the surface of the protective film.
F (C F2 C F2 C F20)r. - C2 F,- C ONH - C3 H6 一 S i (〇 C2 H6 )3 ·' (IV) F (C F (C F3) - C F2〇)n— C F (C F3)— C ONH - C3 H F (CF 2 CF 2 CF 20 ) r .- C 2 F,-C ONH-C 3 H 6 One S i (〇 C 2 H 6 ) 3 · '(IV) F (CF (CF 3 )-CF 2 〇) n — CF (CF 3 ) — C ONH-C 3 H
— S i (O C2 H ·· (V) (C2 H50)3 S i一 C3 He— NHC O— (C F2 C F2〇)ra - S i (OC 2 H ·· (V) (C 2 H 5 0) 3 S i one C 3 H e - NHC O- ( CF 2 CF 2 〇) ra
-(C F20)n- C 0NH- C3 He - S i (OC2HJ3 ·' (VI) CE H, - O - CE H4 - H3 N+ — O C 0 -(C F2 C F20)m - (CF 2 0) n - C 0NH- C 3 H e - S i (OC 2 HJ 3 · '(VI) C E H, - OC E H 4 - H 3 N + - OC 0 - (CF 2 CF 2 0) m
一(C F2 〇) n_ C〇 0— +N H3 - C6 H4 - 0 - CK H6 - ( ) F (C F2 C F2 C F2 - 0)n- C2 F4- C H2 OH ·· (W) H O - C H2 - (C F2 C F20)ro-(C F20) n- C H2 OH '· ( ) H O- (C Hz C H2 - 0)P- CH2 C F2 - (C F2 C F20)m One (CF 2 〇) n _ C_〇 0- + NH 3 - C 6 H 4 - 0 - C K H 6 - () F (CF 2 CF 2 CF 2 - 0) n - C 2 F 4 - CH 2 OH ·· (W) HO - CH 2 - (CF 2 CF 2 0) ro - (CF 2 0) n- CH 2 OH '· () H O- (CH z CH 2 - 0) P - CH 2 CF 2- (CF 2 CF 2 0) m
-(C F20)n- 0C F2 CH2 (0- C H2 C HJq- 0H ·· (X) F (C F2 C F2 C F20)n- C2 F4- C OO" +N H3 - CB H. 〇-(CF 2 0) n -0C F 2 CH 2 (0- CH 2 C HJ q -0HF (CF 2 CF 2 CF 20 ) n -C 2 F 4 -C OO " + NH 3 -C B H. 〇
- C6 HB ·· (XI) F(C F (C F3)- C F20)n- C F (C F3)- C 00" +N H3 -C 6 H B ... (XI) F (CF (CF 3 )-CF 20 ) n -CF (CF 3 )-C 00 " + NH 3
- C6 H,- 0- C6 H6 ·· (ΧΠ) -C 6 H,-0- C 6 H 6
,0, , 0,
0^x^x P CH20C H, 0- (C F2 C F20)m- (C F20)n 0 ^ x ^ x P CH 2 0C H, 0- (CF 2 CF 2 0) m- (CF 2 0) n
- O C H 2 O C … (XII)
Figure imgf000059_0001
-OCH 2 OC… (XII)
Figure imgf000059_0001
(但し、 m, n , p, qは整数) で表されるパーフロロポリエーテル系 化合物の少なく とも一つ以上を前記磁気ディスク全面に塗布後、 前記磁 気ディ スク全面を 8 0°C以上で加熟あるいは、 前記磁気ディスク全面も しくは前記データ領域を紫外線照射し、 次に前記ディスク全面をパーフ 口ロカ一ボン系溶剤で洗浄し、 前記 C S S領域に前記一般式(VI!)〜(Xffi) のパーフロロポリエーテル系化合物から選択される吸着性の官能基を有 するパーフロロポリエーテル系化合物を塗布し、 前記 C S S領域に形成 した潤滑膜が 1. 5 n m 以上の膜厚であり前記データ領域に形成した潤 滑膜が 1 n m以上の膜厚であり、 前記データ領域で前記磁気へッ ドスラ イダーと磁気ディスク間で発生する最大静止摩擦係数が 1. 5 以下, 動 摩擦係数が 1. 0 以下であり前記 C S S領域で前記磁気へッ ドスライダ 一と磁気ディスク間で発生する最大静止摩擦係数が 1.0 以下, 動摩擦 係数が 0. 5 以下であることを特徵とする磁気記録再生装置。 (However, m, n, p, and q are integers) After applying at least one or more perfluoropolyether-based compounds over the entire surface of the magnetic disk, the entire surface of the magnetic disk is heated to 80 ° C or more. Or irradiating the entire surface of the magnetic disk or the data area with ultraviolet light, and then cleaning the entire surface of the disk with a perforated solvent based solvent. Xffi) The perfluoropolyether compound having an adsorptive functional group selected from the above perfluoropolyether compounds was applied, and the lubricating film formed in the CSS region had a thickness of 1.5 nm or more, and the above data The lubricating film formed in the area has a thickness of 1 nm or more, and the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1. A magnetic recording / reproducing apparatus, wherein the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the CSS area is 1.0 or less and the dynamic friction coefficient is 0.5 or less in the CSS region.
2 6. 磁気へッ ドと、 磁気へッ ドを搭載した磁気へッ ドスライダーと、 非磁性基板上に下地膜, 磁性膜, 保護膜を順に積層した磁気ディスクと を備えた磁気記録再生装置において、 該磁気ディスクが磁気ディスクの 回転起動時と回転停止時に前記磁気へッ ドスライダ一が位置する前記保 護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディ スクの回転中に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さ が R a 3 n m以下のデータ領域とを備え、 次に前記保護膜表面に下記一 般式 (IV) 〜 (XE1) 2 6. A magnetic recording / reproducing apparatus equipped with a magnetic head, a magnetic head slider equipped with a magnetic head, and a magnetic disk in which a base film, a magnetic film, and a protective film are sequentially stacked on a non-magnetic substrate. Wherein the magnetic disk has a CSS region in which the surface of the protective film on which the magnetic head slider 1 is located has a roughness of Ra 10 nm or more when the magnetic disk starts and stops rotating, and the magnetic disk The surface of the protective film on which the magnetic head slider 1 is located during the rotation of the magnetic head has a data area with a roughness of Ra 3 nm or less. Then, the following general formulas (IV) to (XE1) are provided on the surface of the protective film.
F (C F2 C Fi C Fi O)n- C2 F< - C O NH - C3 Hs F (CF 2 CF i CF i O) n - C 2 F <- CO NH - C 3 H s
— S i (O C2 H ··· (IV)— S i (OC 2 H ··· (IV)
F (C F (C FJ— C F2〇)n— C F (C F3)— C〇NH— C3 HS F (CF (C FJ— CF 2 〇) n — CF (CF 3 ) — C〇NH— C 3 H S
- S i (O C2 H ··· (V)-S i (OC 2 H
( C 2 H 5 O ) S i - C3 HE - NH C O - (C F2 C F20)m (C 2 H 5 O) S i-C 3 H E -NH CO-(CF 2 CF 20 ) m
- (C F20)n- C ONH - C3 HE - S i (0 C2 HJ3 ··· (VI)-(CF 2 0) n -C ONH-C 3 H E -S i (0 C 2 HJ 3
C6 H5 - O - CB H4 - H3 N+ 一〇 C〇一(C F2 C F20)m C 6 H 5 -O-C B H 4 -H 3 N + one C one (CF 2 CF 20 ) m
_ (C F2 O),,— C O〇一 + N H3 - CB H4 - 0- C6 H5 … ( )_ (CF 2 O) ,, - CO_〇 one + NH 3 - C B H 4 - 0- C 6 H 5 ... ()
F (C F? C F2 C F2 - 0)„- C2 F4- C H2 O H ··· (VI) H〇一 C H2— (C F2 C F20)m— (C F20)"- C H20 H ··· (DO H 0-(CH2 CH2- 0)P- CH2 C F? - (C F2 C F2〇)ra F (CF CF 2 CF 2 - ? 0) "- C 2 F 4 - CH 2 OH ··· (VI) H_〇 one CH 2 - (CF 2 CF 2 0) m - (CF 2 0) "- CH 2 0 H ··· (DO H 0- (CH 2 CH 2 - 0) P - CH 2 CF -? ( CF 2 CF 2 〇) ra
一(C F2〇)n - 0 C F2 C H2 (O— C H2 C H2 )q - O H ··· (X) F (C F2 C F2 C F20)n- C2 F4- C 00~ +N H3 - Ce H, - OOne (CF 2 〇) n -0 CF 2 CH 2 (O— CH 2 CH 2 ) q -OH (X) F (CF 2 CF 2 CF 2 0) n -C 2 F 4 -C 00 ~ + NH 3 -C e H,-O
- CE H6 … (XI)-C E H 6 … (XI)
F (C F (C F3) - C F2〇)n C F (C F3)- C O O— +N H3 F (CF (CF 3 )-CF 2 〇) n CF (CF 3 )-COO— + NH 3
- Ce H4 - O - CG H5 … (ΧΠ) -C e H 4 -O-C G H 5 … (ΧΠ)
H c 0^^[ C H2 OC H20- (C F? C F20)m-(C F20),;
Figure imgf000061_0001
H c 0 ^^ [CH 2 OC H 2 0- (CF CF 2 0?) M - (CF 2 0),;
Figure imgf000061_0001
(但し、 m, n, p, qは整数) で表されるパーフロロポリエーテル系 化合物の少なく とも一つ以上を前記磁気ディスク全面に塗布後、 前記磁 気ディスク全面を 8 0°C以上で加熱あるいは、 前記磁気ディスク全面も しくは前記データ領域を紫外線照射し、 次に前記データ領域をパーフロ 口カーボン系溶剤で '冼浄した後、 前記一般式 (IV) 〜 (VI) のパ一フ口 ロボリエーテル系化合物から選択される前記保護膜表面と化学的に反応 する官能基を有するパーフロロポリエーテル系化合物を塗布し、 前記 C S S領域に形成した潤滑膜が 1. 5 n m 以上の膜厚であり前記データ 領域に形成した潤滑膜が 1 n m以上の膜厚であり、 前記データ領域で前 記磁気へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数 が 1.5 以下, 動摩擦係数が 1.0 以下であり前記 C S S領域で前記磁気 へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数が 1.0 以下, 動摩擦係数が 0. 5 以下であることを特徴とする磁気記録再生装 置。 (Where m, n, p, and q are integers) after applying at least one or more perfluoropolyether compounds represented by the following formulas to the entire surface of the magnetic disk, and then heating the entire surface of the magnetic disk at 80 ° C. or more. After heating or irradiating the entire surface of the magnetic disk or the data area with ultraviolet rays, and then cleaning the data area with a carbon-based solvent having a perforated opening, the powders of the general formulas (IV) to (VI) are obtained. perfluoropolyether compounds having the protective layer surface and the chemically reactive functional group selected from the mouth Roborieteru compound is applied, a lubricating film formed on the CSS area 1. 5 n m or more thickness The lubricating film formed in the data area has a thickness of 1 nm or more, and the maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the data area is 1.5 or less, and the dynamic friction coefficient is 1.0 or less. Below A magnetic recording / reproducing apparatus characterized in that a maximum static friction coefficient generated between the magnetic head slider and the magnetic disk in the CSS region is 1.0 or less and a dynamic friction coefficient is 0.5 or less. Place.
2 7. 非磁性基板上に下地膜, 磁性膜, 保護膜, 潤滑膜を順に積層した 磁気ディスクの製造方法において、 該磁気ディスクの回転起動時と回転 停止時に磁気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 1 0 n m以上である C S S領域と、 前記磁気ディスクの回転中に磁 気へッ ドスライダ一が位置する前記保護膜表面の粗さが R a 3 n m以下 のデータ領域とを形成し、 次に前記保護膜表面に下記一般式(IV) ~( VI) F(C F2 C F2 C F20)n- C2 F4- CONH - C3 H6 2 7. A method of manufacturing a magnetic disk in which a base film, a magnetic film, a protective film, and a lubricating film are sequentially stacked on a non-magnetic substrate, wherein the magnetic head slider is positioned when the magnetic disk starts rotating and stops rotating. The CSS area where the surface roughness of the protective film is Ra 10 nm or more, and the data where the surface roughness of the protective film where the magnetic head slider 1 is located during rotation of the magnetic disk is Ra 3 nm or less. Then, the following general formulas (IV) to (VI) F (CF 2 CF 2 CF 20 ) n -C 2 F 4 -CONH-C 3 H 6 are formed on the surface of the protective film.
— S i (0 C2 H。)3 ·■· (IV)— S i (0 C 2 H.) 3 · ■ · (IV)
F(C F (C F3)- C F20)n- C F (C F3)- C 0NH - C3 He F (CF (CF 3) - CF 2 0) n - CF (CF 3) - C 0NH - C 3 H e
- S i (O C, HJ, ··· (V) -S i (O C, HJ,
(C2 H。 0)3 S i - C3 H6 -NHC 0- (C F, C F20)m (C 2 H. 0) 3 S i-C 3 H 6 -NHC 0- (CF, CF 20 ) m
— (C F2〇)n— C〇 N H— C3 He— S i (〇 C2 H。)3 ·■· (VI)- (CF 2 〇) n - C_〇 NH- C 3 H e - S i ( 〇 C 2 H.) 3 · ■ · (VI)
(但し、 m, nは整数) で表されるパーフロロポリエーテル系化合物か ら選択される前記保護膜表面と化学的に反応する官能基を有するパーフ ロロポリエーテル系化合物を少なく とも一つ以上を前記磁気ディスク全 面に塗布し、 前記磁気ディスク全面を 8 0°C以上で加熱あるいは、 紫外 線照射した後、 下記一般式 (W) 〜 ( ) (Where m and n are integers) at least one or more perfluoropolyether compounds having a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether compounds represented by Is applied to the entire surface of the magnetic disk, and the entire surface of the magnetic disk is heated at 80 ° C. or higher or is irradiated with ultraviolet light.
Ce H5 - 0 - C, H4 - H3 N + - 0C 0- (C F2 C F20)m C e H 5 - 0C, H 4 - H 3 N + - 0C 0- (CF 2 CF 2 0) m
一(C F20)n— C〇 〇_ 十 N H3— CB H,— 〇一 Cs HB ( ) F (C F2 C F2 C F2 - 0)„ - C2 F,- C H2 O H (VI) H0- C H2 - (C F2 C Fi 0),-(C F20)„- C H20 H (DO HO— (C H2 C H2 一 〇) ー C H2 C F2 一 ( C F2 C F20), One (CF 2 0) n - C_〇 〇_ tens NH 3 - C B H, - 〇 one C s H B () F ( CF 2 CF 2 CF 2 - 0) "- C 2 F, - CH 2 OH (VI) H0- CH 2 - ( CF 2 CF i 0), - (CF 2 0) "- CH 2 0 H (DO HO- (CH 2 CH 2 ten) over CH 2 CF 2 one (CF 2 CF 2 0),
一(C F20)n—〇C F2 C H2 (〇一 C H2 C H2)q—〇H (X)One (CF 2 0) n —〇CF 2 CH 2 (〇 一 CH 2 CH 2 ) q —〇H (X)
F (C F2 C FJ C FJ 0),- C2 F4- C 00" N H H,— 0 一 H6 … (XI)F (CF 2 CF J CF J 0),-C 2 F 4 -C 00 "NHH, — 0 One H 6 … (XI)
F (C F (C F3)- C F20)n- C F (C F3) - CO O— +N H3 F (CF (CF 3 ) -CF 20 ) n -CF (CF 3 )-CO O— + NH 3
- C6 H4- 0- CE H6 ··· (ΧΠ) - (C F2 C F20)ra-(C F20)n H - (XII)
Figure imgf000063_0001
- C 6 H 4 - 0- C E H 6 ··· (ΧΠ) - (CF 2 CF 2 0) ra - (CF 2 0) n H - (XII)
Figure imgf000063_0001
(但し、 m, n, p , qは整数) で表されるパーフロロポリエーテル系 化合物から選択される吸着性の官能基を有するパーフロロポリエーテル 系化合物を前記磁気ディスク全面に塗布し、 次に前記データ領域をパー フロロカーボン系溶剤で洗浄し、 次に前記一般式 (IV) 〜 (VI) のパー フロロポリエーテル系化合物から選択される前記保護膜表面と化学的に 反応する官能基を有するパーフロロポリエーテル系化合物を塗布し、 前 記 C S S領域に形成した潤滑膜が 1.5 n m 以上の膜厚であり前記デー タ領域に形成した潤滑膜が 1 n m以上の膜厚であり、 前記データ領域で 前記磁気へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係 数が 1.5 以下, 動摩擦係数が 1.0 以下であり前記 C S S領域で前記 磁気へッ ドスライダ一と磁気ディスク間で発生する最大静止摩擦係数が(Where m, n, p, and q are integers) a perfluoropolyether compound having an adsorptive functional group selected from perfluoropolyether compounds represented by the following formulas: Next, the data area is washed with a perfluorocarbon-based solvent, and then has a functional group that chemically reacts with the surface of the protective film selected from the perfluoropolyether-based compounds represented by the general formulas (IV) to (VI). A perfluoropolyether compound is applied, and the lubricating film formed in the CSS region has a thickness of 1.5 nm or more, and the lubricating film formed in the data region has a thickness of 1 nm or more. The maximum static friction coefficient generated between the magnetic head slider and the magnetic disk is 1.5 or less, and the dynamic friction coefficient is 1.0 or less, and between the magnetic head slider and the magnetic disk in the CSS region. The maximum static friction coefficient to be generated
1.0 以下, 動摩擦係数が 0.5 以下であることを特徴とする磁気記録 再生装置。 A magnetic recording / reproducing apparatus characterized by having a dynamic friction coefficient of 1.0 or less and a dynamic friction coefficient of 0.5 or less.
2 8. 請求の範囲第 1項において該磁気ディスクの直径が 8 8.9 nun 以 下であることを特徴とする磁気ディスク。  2 8. The magnetic disk according to claim 1, wherein the diameter of the magnetic disk is 8 8.9 nun or less.
2 9. 請求の範囲第 7項において該磁気ディスクの直径が 8 8.9 rom 以 下であることを特徴とする磁気ディ スク製造方法。 2 9. The method of manufacturing a magnetic disk according to claim 7, wherein the diameter of the magnetic disk is 88.9 rom or less.
3 0. 請求の範囲第 1 1 項において該磁気ディスクの直径が 8 8. 9 mm 以下であることを特徴とする磁気記録再生装置。 30. The magnetic recording / reproducing apparatus according to claim 11, wherein the diameter of the magnetic disk is 88.9 mm or less.
PCT/JP1995/002132 1995-10-18 1995-10-18 Magnetic disk and magnetic recording/reproduction apparatus WO1997015049A1 (en)

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CNA021406391A CN1492399A (en) 1995-10-18 1995-10-18 Magnetic disc and magnetic recording and playing device
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DE69532975T DE69532975T2 (en) 1995-10-18 1995-10-18 MAGNETIC PLATE AND MAGNETIC RECORDING / PLAYING DEVICE
US09/051,711 US6296917B1 (en) 1995-10-18 1995-10-18 Magnetic disk and magnetic recording/reproduction apparatus
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US6296917B1 (en) 2001-10-02
CN1492399A (en) 2004-04-28
EP0856837B1 (en) 2004-04-28
EP0856837A1 (en) 1998-08-05
KR100318175B1 (en) 2002-02-19
DE69532975D1 (en) 2004-06-03
KR19990064315A (en) 1999-07-26
EP0856837A4 (en) 1999-09-15
JP3409856B2 (en) 2003-05-26
DE69532975T2 (en) 2005-01-05

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