WO1996010729A1 - Systeme ameliore de ligne de visee a mesure triaxiale utilisant un seul faisceau - Google Patents

Systeme ameliore de ligne de visee a mesure triaxiale utilisant un seul faisceau Download PDF

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Publication number
WO1996010729A1
WO1996010729A1 PCT/US1995/012668 US9512668W WO9610729A1 WO 1996010729 A1 WO1996010729 A1 WO 1996010729A1 US 9512668 W US9512668 W US 9512668W WO 9610729 A1 WO9610729 A1 WO 9610729A1
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WO
WIPO (PCT)
Prior art keywords
light
polarization
optical
beam splitter
analyzers
Prior art date
Application number
PCT/US1995/012668
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English (en)
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WO1996010729B1 (fr
Inventor
Karl Grodewald
Original Assignee
Drs/Photronics Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Drs/Photronics Corporation filed Critical Drs/Photronics Corporation
Priority to AU38881/95A priority Critical patent/AU3888195A/en
Priority to JP8512112A priority patent/JPH10506992A/ja
Priority to EP95938138A priority patent/EP0783663A4/fr
Publication of WO1996010729A1 publication Critical patent/WO1996010729A1/fr
Publication of WO1996010729B1 publication Critical patent/WO1996010729B1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C1/00—Measuring angles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Definitions

  • This invention relates generally to optical transceiver apparatus, and more
  • optical transceiver systems for measuring angular misalignment between two objects.
  • the invention is particularly useful as a tool for boresighting
  • gun turrets in the nose and pylons attached to short wing sections of the aircraft are provided for carrying short
  • Colvin discloses an optical alignment sensing apparatus for establishing the orientation of a body about three mutually orthogonal axes, in which a reference beam is focused between two pairs of detectors by two cylindrical lenses.
  • the light from light source 10 is projected by a condensing lens 11 through an aperture 12 in a screen 14.
  • the light from source 10 is collimated by lens 17 and travels to a truncated Porro prism 16 where a portion of the light is internally reflected from two silvered orthogonal faces 18 and 20, while the remaining portion passes through the truncated surface.
  • Porro prism 16 is mounted to a body 22 whose orientation is to be measured about three orthogonal axes.
  • a pair of cylindrical lenses 24 and 27 focus light passing through the truncated surface of Porro prism 16 as two orthogonal line images.
  • the line image produced by cylindrical lens 24 normally falls between a pair of photodetectors 30 and 31.
  • the line image produced by cylindrical lens 26 normally falls between a pair of detectors 34 and 35. Additional photodetectors 30, 31 , 34 and 35 provide electrical output when illuminated in dependence upon the orientation of body 22. Thus, if body 22 rotates about a first axis, the line image focused by cylindrical lens 26 will impinge upon detector 34 or detector 35, depending upon the direction of rotation. If body 22 rotates about an
  • the system measures roll, pitch and yaw errors.
  • the system measures X and Y axis displacement of a body, measures pitch and yaw error by detecting the angle of inclination of the body, and measures roll error by detecting the displacement of the body at two different positions. Signal fluctuations due to light source variations are corrected.
  • the system provides a separate displacement-detecting channel and angle-detecting channel.
  • the system utilizes the following elements to measure displacement, pitch, yaw and roll: laser light source 12, mirrors 13, 14, luminous flux magnifier 15 (including lens 15A, pinhole 15B, iris 15C and lens 15D), half mirror 16, 4-quadrant photosensor 17, polarizing beam splitter 18, quarter-wave plate 19, displacement magnifying corner cube prism 20 (elements 18, 19 and 20 forming a displacement magnifying module 21), position detecting 4-quadrant photosensor 22, second polarizing beam splitter 23, second quarter-wave plate 24, collimator lens 25 (elements 23, 24 and 25 constituting angle transfer means 26), and 4-quadrant photosensor 27.
  • laser light source 12 includes laser light source 12, mirrors 13, 14, luminous flux magnifier 15 (including lens 15A, pinhole 15B, iris 15C and lens 15D), half mirror 16, 4-quadrant photosensor 17, polarizing beam splitter 18, quarter-wave plate 19, displacement magnifying corner cube prism 20 (elements 18, 19 and 20 forming a displacement magnifying module 21), position detecting 4-quadrant photo
  • Fiedler (United States Patent No. 3,816,000), assigned to McDonnell Douglas Corporation, discloses a three axis alignment system including a laser, beam splitter, and angle sensing detector element positioned to respond to the laser beam to produce electrical signal outputs for use in aligning equipment in roll, pitch and yaw.
  • the single beam of coherent light generated by the laser is split into two parallel beams, the parallel beams are detected, and roll, pitch and yaw information is developed therefrom.
  • the patent to Beckwith, Jr. discloses a method for calibration of a coordinate measuring machine, including the use of a single laser beam system having a laser, retroreflectors, beam splits, and photodiodes.
  • the system is capable of measuring error in X, Y and Z axes for purposes of calibration.
  • the patent to Ames et al. (United States Patent No. 5,090,803), assigned to Lockheed Missiles & Space Company, Inc., discloses an optical coordinate transfer assembly providing angular correlation between spatially separated objects. Roll, pitch and yaw of a second directional device 12 relative to a first directional device 11 can be measured, using an optical alignment sensor 20 mounted on the first directional device 11 and a roof mirror/lens assembly 21 mounted on the second directional device 12. Plural light beams from the optical alignment sensor 20 are reflected by reflectors 35, 36 on the rooftop mirror/lens assembly 21 to linear arrays 69, 70, 78 of photodetectors, which generate electronic signals indicating angular discrepancies in three degrees of freedom.
  • the patent to Harris discloses an optical sensor including a device for permitting an operator to monitor the angular motion of a remote body about three orthogonal axes from a single observation point.
  • a compact passive target such as a corner cube prism is attached to the body.
  • the target reflects light beams representative of pitch, yaw and roll measurements.
  • the reflected light beams are optically sensed and reduced to components about the pitch, yaw an roll axes which are visually displayed through a single eyepiece.
  • this patent makes particular claims for (a) a unique analyzer, i.e., not at 90° and (b) employs a passive target and double path length since transmitter an receiver are co-housed.
  • Still another object of the invention is to provide such optical transceiver apparatus which utilizes only a single transmitted light beam rather than multiple light beams, and which provides a roll reference by polarizing a single collimated beam, rather than multiple sidebeams.
  • the present invention provides optical transceiver apparatus for measuring angular misalignment between two bodies in elevation, azimuth and roll utilizing a single optical path to measure roll, azimuth and elevation, and which provides a roll reference by polarizing a single collimated beam, rather than multiple sidebeams.
  • the optical transceiver apparatus In accordance with the present invention, the optical transceiver apparatus
  • the receiver includes first and second analyzer characterized by first and second planes of polarization which differ with respect to each other.
  • the optical transceiver apparatus includes circuitry for measuring these differences to provide a signal representative of angular misalignment between the two bodies in the roll axis.
  • the apparatus includes a single transmitter having a laser diode or other light source for producing a collimated beam of linearly polarized light, and a receiver having an elevation/azimuth (EL/AZ) channel and a roll channel sharing a common objective lens, wherein a beam splitter splits the beam generated by the laser diode between the two channels.
  • the beam splitter may be
  • ELVAZ channel lenses are used to focus light onto a position sensitive detector (PSD), while
  • a polarizing Thompson beam-splitting prism or other suitable optical elements divide the roll channel into two beams of differently polarized light which are then focused on light detectors.
  • FIG. 1 is a schematic diagram for roll only illustrating an embodime of optical transceiver apparatus in accordance with the present invention
  • FIG. 2 is a schematic diagram for roll only illustrating first and second polarization components utilized in the apparatus of FIG. 1 ;
  • FIG. 3 is a schematic representation of a second embodiment of the prese
  • FIG. 4 illustrates optical element details of an embodiment of the present invention
  • FIG. 5 illustrates the effect of a cube-type beam splitter on the rotation of a light bundle as utilized in the embodiment shown in FIG. 3;
  • FIG. 6 is an illustration of a collimator pair utilized for the detection of azimuth and elevation
  • FIG. 7 is an illustration of a collimator pair for azimuth and elevation
  • one collimator includes a 90 degree bend
  • FIG. 8 is a ray trace diagram of the collimator pair shown in FIG. 7 when t
  • collimators are substantially parallel but laterally misaligned
  • FIG. 9 is a schematic diagram of a circuit for measuring the output of a du
  • FIG. 10 is a schematic diagram of a circuit for generating roll detector output signals
  • FIG. 11 is a schematic diagram of a circuit for generating the output of the elevation/azimuth (ELVAZ) detector;
  • FIG. 12 depicts a circuit for processing the output of the roll, elevation and azimuth channels
  • FIG. 13 depicts control/display unit circuitry for the roll, elevation and azimuth channels.
  • FIG. 14 is a schematic diagram of an optical transmitter utilized in the embodiment shown in FIG. 4.
  • FIG. 1 shows optical transceiver apparatus for detecting angular roll misalignment between two bodies in accordance with the present invention.
  • the optical transceiver apparatus includes a transmitter 10 which generates a beam of polarized light 11.
  • the apparatus further includes a light receiver 12 which contains first and second analyzers 13, 14, respectively and light intensity detectors 15, 16 positioned behind the analyzers which may be photovoltaic detectors of conventional design.
  • the transmitter might be mounted on the fuselage, while the receiver might be mounted on a wing or pylon. Further, the transmitter might be mounted on the fuselage, while the receiver might be mounted on a wing or pylon. Further
  • the analyzers 13, 14 are characterized by polarization
  • Planes 17 and 18 are offset from each other by 90°. Thus, if polarized fight enters the receiver with a plane of polarization that is midway between the planes 17 and 18, then each analyzer will transmit substantially equal amounts of light.
  • the amount of light which passes through the analyzers will be at a level between the maximum transmission possible, which occurs when the plane of polarization of the received light is aligned with the plane of the polarization of the analyzer, and the minimum transmission possible, which occurs when the plane of polarization of the received light is offset from the plane of polarization of the analyzer by 90°.
  • the optical transceiver apparatus includes circuitry described hereinafter for measuring these differences to provide a signal representative of angular misalignment between the two bodies in the roll axis.
  • FIG. 3 depicts another embodiment of apparatus in accordance with the invention for detecting angular misalignment between first and second bodies.
  • the apparatus shown in FIG. 3 includes elements 34 for generating a beam of collimated light, which beam is then transmitted through a polarizer 33.
  • the polarizer 33 filters out all but one plane of polarization.
  • the transmitted light bundle then passes through the decollimating lens 32 which focuses the light bundle down to a small spot of light.
  • the now-converging light is transmitted through a non-polarizing beam splitter cube 31.
  • a first portion of the beam passes straight through the beam splitting cube without any change in its state of polarization.
  • the second portion of the beam is diverted 90° (in the upward direction in the diagram) with no change in that state of polarization.
  • a ray bundle passing through the beam splitter tube behaves as depicted in FIG. 5. If the ray bundle entering the beam splitter has a clockwise circular component, the bundle which passes straight through the beam splitter will also have a clockwise circular component. The ray bundle which is diverted 90°, however, will have a counterclockwise circular component.
  • the system includes analyzers 13 and 14 as well as light intensity detectors 15 and 16. It will be apparent that by employing an appropriate configuration of analyzers 13 and 14, the system will operate in accordance with the same principles illustrated in FIGS. 1 and 2.
  • analyzer 13 will increase its transmission of light and analyzer 14 will decrease its transmission of light. Conversely, if the source of polarized light rotates in the opposite direction, analyzer 14 will increase its transmission of light and analyzer 13 will decrease its transmission of light.
  • FIG. 4 Details of the optical components utilized in an embodiment of the invention are shown in FIG. 4, wherein optical measurement channels for elevation, azimuth
  • the illustrated system includes a laser diode 40, a polarizer 41 , a beam expander 42, air-spaced doublet collimator 43
  • the laser diode compared to other light sources, has several advantages. First, it is relatively efficient at converting electrical energy to light energy. In
  • polarizing element 41 is placed after the laser diode to filter out these impurities.
  • the beam expanding Barlow lens 42 provides the transmitter of the illustrated system with a large working aperture and short physical length. This is done to provide a uniform optical couple between the receiver and transmitter over a wide range of lateral shift between the two units.
  • the second polarizing element, Brewster plate 44, inclined at Brewster's angle eliminates impurities in the polarization caused by the optical elements themselves.
  • the receiver depicted in FIG. 3 utilizes a combination of a non- polarizing cube-type beam splitter followed by two polarizing elements
  • the receiver 12 of FIG. 4 utilizes a single component in the form of a Thompson polarizing beam splitter 13'.
  • the Thompson beam splitter 13' in accordance with well-characterized principles of construction thereof, provides two orthogonally polarized beams of light separated by an included angle of 45°. Polarization for this type of beam splitter is wavelength independent and has a high level of purity, providing an excellent extinction ratio.
  • the recollimation lens 47 located in front of the Thompson beam splitter 13' in FIG. 4 assures that the light passing through the beam splitter is a parallel ray bundle. This avoids or minimizes localized confusion of the polarization caused by the internal structures of the beam splitter.
  • the system shown in FIG. 4 provides a roll detection channel along with an elevation and azimuth (EL/AZ) measuring channel.
  • Beam splitter 45 directs a portion of the beam received from decollimating lens 48 down to the EL/AZ detector shown generally by reference numeral 46.
  • a perforated mirror type beam splitter is utilized. This consists of a plain metal mirror having an aperture through it. The central part of the converging ray bundle 49 passes through the hole in the center of the perforated mirror to the Thompson beam splitter 13'. The peripheral portion of the light bundle intersects with the mirror and is bent 90° to the EL/AZ detector 46.
  • the perforated mirror-type beam splitter depicted in the drawing degrades image resolution (i.e., spatial resolution) of the reflected energy, azimuth and elevation accuracy is not affected because of the detectors sense the centroid of the bundle of peripheral rays which are reflected by beam splitter 45.
  • the light which passes straight through the perforated mirror type beam splitter maintains a very high degree of polarization purity. This latter aspect is essential to efficient operation of the roll axis measurement channel.
  • Azimuth and Elevation Detection System The components of the EL/AZ detector 46 of FIG. 4 operate in accordance with the principals discussed hereinafter with respect to FIG. 6.
  • Mirror 51 redirects the light reflected by beam splitter 45 to field lens 52 which focuses it upon position sensitive detector 53.
  • collimators 70, 71 are each provided with an objective lens 73, 74, respectively.
  • Collimator 70 has a point source of light at the center of its field.
  • Collimator 71 is provided with a viewing area 75 with crosshairs at the center of its field of view.
  • collimator 70 projects a virtual image of a point source to infinity.
  • Collimator 71 decollimates the ray bundle and refocuses it into a real image as a point of light. If the optical axis of both
  • collimators are parallel to each other, the point of light will fall in the center of the field. However, if the optical axis of one collimator is tilted or rotated with respect to the other as shown in FIG. 6, the point of light moves off center as shown in viewing area 75.
  • both collimators are parallel to each other, the rays of each are also parallel to
  • FIG. 7 A variation of the FIG 8 configuration is depicted in FIG. 7.
  • the optical path of the receiver includes a 90° bend. In most cases this bend is employed to render the system more compact or to
  • the first surface mirror 61 bends the ray bundle 90°.
  • the image will move in and out. While the function of the collimator pair is not changed, the sense of direction will not be the same as that for the in-line system of FIG. 6. This difference is readily corrected as a matter of conventional optical practice.
  • a dual axis position sensing detector is placed directly in the plane of the cross-hairs and the point of light is focused directly on the active surface of the detector.
  • Position sensing detectors are available in two basic formats. Single axis detectors work in a single line only, and can measure either left-right or up-down. The measured translation must be
  • Dual axis detectors in contrast, have two axis of sensitivity, oriented at right angles to each other. Since
  • this type of detector can be obtained in configurations where the two axis are totally independent of each other, elevation and azimuth can be sensed as
  • the general mode of operation for position sensing detectors involves
  • This light can be directing a small light source onto the active surface of the detector. This light can be
  • a laser beam or a projected source such as a lamp filament or LED. Either the detector or the light source can move.
  • the dual axis detector 103 depicted in Figure 9 behaves as follows: meter 101 , connected between the elevation terminals E1 and E2, will deflect to the right as a point of light moves up the elevation arrow and to the left as the point of light moves down the arrow. Correspondingly, meter 102 deflects right as a spot moves to the right, and left as the spot moves left. As the spot moves about the surface of the detector, a unique combination of meter readings for 101 and 102, sign and magnitude, will define the quadrant and distance from center at which the point of light is located. If the spot is at the center of the detector 103, both meters will be centered. While the foregoing is illustrative of the functioning of position sensing detectors, most practical applications require the use of electronic differential amplification to increase the sensitivity and accuracy of the system.
  • Dual-axis detectors are commercially available in three different varieties.
  • the first variety is the spot type of detector, utilizing arrays of multiple photovoltaic detectors on a single substrate.
  • the advantages of spot detectors are their relatively low cost and high sensitivity when used in nulling systems.
  • One disadvantage of spot detectors is that if the illumination spot is directed entirely
  • a more recently developed detector referred to as the lateral-effect diode detector, is also available in both single and dual axis models. There are no lines of demarcation and the sensing effect is progressive as long as the illumination spot does not migrate off the detector surface.
  • This detector type is highly cost- effective if true vector information is required, provides reasonable linearity, and requires only simple electronics for dual axis sensing.
  • a disadvantage of lateral- effect diode detectors is that their linearity is not perfect and degrades further when the illumination spot moves off-axis.
  • the mechanical center of this type of detector is not necessarily its optical center.
  • the most recently developed position detecting sensor is the super-linear
  • FIGS. 10-12 depict details of electronic components utilized in conjunction with the embodiment of the invention shown in FIG. 4. Specifically, in the optical transceiver system shown in FIG. 4, each measurement axis utilizes two transimpedance amplifiers, one differential amplifier, one summing
  • the detectors for the roll channel are two photovoltaic units which are
  • the elevation and azimuth detector is a single unit having separate outputs.
  • FIG. 10 shows is the bias network for the roll channel. Output from photovoltaic sensors 114 and 115 are provided at points 111 and 112 respectively.
  • Bias is provided at 113.
  • FIG. 11 shows a bias network for the EL/AZ detector, which is a single unit having separate outputs.
  • Reference numerals 121 and 122 represent the elevation outputs.
  • Numerals 123 and 124 represent the azimuth outputs, while numeral 125 represents common.
  • the signal processing electronics in the optical head for all three channels is substantially identical.
  • An exemplary circuit is shown in FIG. 12.
  • the two transimpedance amplifiers 131 and 132 convert the current output of the detector into voltage.
  • the output of both amplifiers is fed into two mathematical elements, differential amplifier 133 and a summing amplifier 134.
  • the differential amplifier subtracts the signal from the transimpedance amplifier 132 from that of amplifier 131. If the signal from 132 is greater than from 131, then the output of 133 will be negative. Conversely, if the signal from 132 is less than the signal from 131, then the output will be positive. If the signals from 131 and 132 are equal, then the output will be zero and have no sign.
  • This circuit thus performs two mathematical functions and provides the direction of the vector. In particular, a positive output means that elevation is "up”, while a negative output means elevation is "down”. A "no output" signal indicates that the elevation is centered.
  • the summing amplifier adds the signals from 131 and 132. Since both 131 and 132 have positive values, the result will be positive.
  • the roll channel requires special attention.
  • the transimpedance amplifiers for the roll channel must be extremely well matched. They must also have the lowest noise figure possible, and thus the optimal configuration places the amplifiers as close as possible to the detectors.
  • FIG. 13 depicts exemplary control/display unit circuitry for one of the three measurement channels.
  • the signal processing electronics for all three channels are substantially identical, and consist of two DC restorer switches, one analog divider circuit, one sample and hold circuit, and one readout and scaling circuit, all of which are constructed in accordance with known engineering practice utilizing conventional components.
  • common clock circuit and power supply are provided for all three channels.
  • the signal input to the control/display unit electronics is via a resistor network and DC blocking capacitor 141.
  • the sum and difference inputs are substantially identical in format, and simply connect to different functions on the conventional analog divider 161.
  • the DC restorer switches 142 are open only when the laser diode is active. They close when the diode is not emitting. This effectively shorts out any dark signal noise to a DC level of zero volts.
  • the processed difference signal is fed into the numerator of the analog divider, while the summation signal is fed into the denominator of the analog divider.
  • the intent of this circuit is to compensate for variations in the light output of the laser diode.
  • the function of this circuit may be summarized by the following formula: voltage 131 minus voltage 132, divided by the sum of voltage 131 plus
  • the output of the entire circuit is proportional to the output for the transimpedance amplifiers in a given ratio - for example, voltage 131 equals one
  • the analog device selected must be able to give both negative and positive outputs. Additionally, the circuit must never be confronted with a situation where it divides by zero, since if this happens the output of the amplifier will automatically attempt to go to infinity.
  • the output of the analog divider is fed to the sample- and-hold circuit.
  • the sample-and-hold is triggered to receive
  • Buffers are provided between the output devices and the remainder of the electronics. These buffers serve to match impedances and isolate the output
  • Each output device requires its own calibration control for individual and cross-calibration.
  • the particular output device shown is a
  • ADC analog-to-digital converter
  • the laser when the clock is HIGH the laser is emitting. Signal passes through the differential amplifier, summing amplifier, analog divider and into the sample and hold. When the clock is LOW the laser is OFF. Therefore, the signal is blocked from the analog divider. The sample and hold is holding the DC level of the display unit until another cycle occurs.
  • control/display unit also contains power conversion and regulation devices.
  • Transmitter Assembly The transmitter assembly depicted in FIG. 14
  • the transmitter includes laser 158 and modulator 154.
  • the transmitter receives power at modulator input 151 and a series of clock pulses (153) at modulator input 152.
  • Modulator 154 supplies power supply to the laser 158 via driver 157 and error amplifier 156 which receives a referencing signal at input 160.
  • Feedback loop
  • compensator 159 keeps the laser at a nominally constant output while protecting it from thermal overload.
  • the invention provides optical transceiver apparatus adapted for use in boresighting apparatus which can be used on aircraft during flight to correct for misalignment

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Un émetteur-récepteur optique permettant de mesurer le défaut d'alignement angulaire entre deux corps en élévation, azimut et roulis utilise un émetteur (40) de lumière couplé à un premier corps tel qu'un élément de repère de fuselage d'avion et un récepteur de lumière (12) couplé à un second corps tel qu'une aile ou une nacelle d'avion. Le récepteur présente un canal d'élévation/azimut (EL/AZ) et un canal de roulis partageant une lentille d'objectif commune. Un diviseur de faisceau (45) divise le faisceau produit par la diode laser (10) entre les deux canaux. Dans le canal EL/AZ, on utilise des lentilles pour faire converger la lumière sur un détecteur (46) sensible à la position alors que dans le canal de roulis, on utilise un prisme diviseur de faisceau (13') du type Thompson ou tout autre élément optique approprié pour assurer une séparation suivant les deux plans de polarisation et on fait ensuite converger la lumière sur des détecteurs optiques (16).
PCT/US1995/012668 1994-09-30 1995-09-29 Systeme ameliore de ligne de visee a mesure triaxiale utilisant un seul faisceau WO1996010729A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU38881/95A AU3888195A (en) 1994-09-30 1995-09-29 Improved boresight with single-beam triaxial measurement
JP8512112A JPH10506992A (ja) 1994-09-30 1995-09-29 単光線３軸測定を含む改良砲腔視線検査
EP95938138A EP0783663A4 (fr) 1994-09-30 1995-09-29 Systeme ameliore de ligne de visee a mesure triaxiale utilisant un seul faisceau

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Application Number Priority Date Filing Date Title
US31543894A 1994-09-30 1994-09-30
US08/315,438 1994-09-30

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WO1996010729A1 true WO1996010729A1 (fr) 1996-04-11
WO1996010729B1 WO1996010729B1 (fr) 1996-05-30

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JP (1) JPH10506992A (fr)
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EP0936445A2 (fr) * 1998-02-12 1999-08-18 DORNIER GmbH Procédé de mesure de l'angle de rotation entre deux systèmes reliés
CN101354243B (zh) * 2008-09-03 2010-06-16 西安理工大学 导轨滚转角的非接触激光检测方法
TWI473963B (zh) * 2011-03-04 2015-02-21 Univ Nat Formosa 一維掃瞄表面形貌量測裝置與方法
CN109579779A (zh) * 2019-01-11 2019-04-05 哈尔滨工业大学 高精度高频响抗干扰大工作距自准直装置与方法

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CN110749287B (zh) * 2019-11-27 2021-05-07 复旦大学 一种用于磁悬浮导轨悬浮间隙测量的光学方法及装置

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See also references of EP0783663A4 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0936445A2 (fr) * 1998-02-12 1999-08-18 DORNIER GmbH Procédé de mesure de l'angle de rotation entre deux systèmes reliés
EP0936445A3 (fr) * 1998-02-12 2001-11-21 Astrium GmbH Procédé de mesure de l'angle de rotation entre deux systèmes reliés
CN101354243B (zh) * 2008-09-03 2010-06-16 西安理工大学 导轨滚转角的非接触激光检测方法
TWI473963B (zh) * 2011-03-04 2015-02-21 Univ Nat Formosa 一維掃瞄表面形貌量測裝置與方法
CN109579779A (zh) * 2019-01-11 2019-04-05 哈尔滨工业大学 高精度高频响抗干扰大工作距自准直装置与方法
CN109579779B (zh) * 2019-01-11 2021-01-08 哈尔滨工业大学 高精度高频响抗干扰大工作距自准直装置与方法

Also Published As

Publication number Publication date
JPH10506992A (ja) 1998-07-07
AU3888195A (en) 1996-04-26
EP0783663A1 (fr) 1997-07-16
EP0783663A4 (fr) 1999-04-14

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