WO1995007529A1 - Ultrasonic transducer with adapter - Google Patents
Ultrasonic transducer with adapter Download PDFInfo
- Publication number
- WO1995007529A1 WO1995007529A1 PCT/DE1994/001016 DE9401016W WO9507529A1 WO 1995007529 A1 WO1995007529 A1 WO 1995007529A1 DE 9401016 W DE9401016 W DE 9401016W WO 9507529 A1 WO9507529 A1 WO 9507529A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ultrasonic transducer
- adapter body
- annular groove
- pot
- transducer according
- Prior art date
Links
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 239000011324 bead Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000005266 casting Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
Definitions
- the present invention relates to an ultrasonic transducer with an adapter body, for example in the form of a ⁇ / 4 adapter layer.
- a matching layer is necessary to adapt piezoelectric ultrasonic transducers to media such as air.
- one side of the piezoceramic transducer covered with electrodes is glued to a matching body. This creates the problem of contacting this electrode without significantly changing the adhesive joint, which affects the properties of the transducer.
- the pot transducers have to make high demands on the processing of the bottom of the pot so that the piezoelectric vibrator lies flush on the bottom of the pot.
- rejects can be made because the piezoceramic disk no longer lies exactly against the bottom of the pot.
- the Adhesive layer inserted thin connecting wires that connect the electrode of the piezo element at the adhesive point with a metal ring. This metal ring in turn must be connected to the connecting wire, which experience has also shown to be problematic.
- the present invention has for its object to provide an ultrasonic transducer in which the piezoceramic disk, when fully contacted, can be inserted into the adapter body in any insertion rotational position without the contacting point of the piezoceramic disk facing the adapter body ensuring that the piezoceramic disk sits flush on the transducer ⁇ pot bottom hampers.
- the object is achieved by an ultrasonic transducer according to claim 1.
- the recess consists of a concentric annular groove formed in the adapter body, which can accommodate the volume of the contact point in any rotational position of insertion of the piezoceramic disk.
- FIGS. 1 a, b and c show schematically the cross section of an RU converter
- an annular groove RN is introduced into the bottom of the cup-shaped adapter body T to remove the problems mentioned above, that of the solder joint KS, regardless of the rotational position between the piezoelectric Schwinger S and the adapter body T, the space required.
- a rounding of the edge between the pot base and the pot wall no longer has a disruptive effect because the edge of the piezoelectric vibrator S no longer lies directly on the pot base.
- the cup-shaped adapter body T is filled with a potting compound V in the exemplary embodiment shown. These should have sound absorbing properties. Materials such as Silicone rubber with lead oxide - or tungsten oxide - parts. In addition to silicone rubber, other materials that remain soft after being mixed with heavier particles can also be used.
- a concentric annular groove RN is let into the adapter body T, which is designed here in the form of a disk, to achieve the object.
- the annular groove is dimensioned such that the contacting point KS is accommodated independently of the rotational position of the piezoelectric vibrator S.
- Behind the bead W there is a second ring groove RN2 the dimensions of which are dimensioned such that there is a burr which the metal ring M may have its lower inner edge has to come to rest.
- the ring groove RN can be relatively narrow and flat in the case of thin connecting wires D arranged near the ring edge.
- Contacting is not limited to soldering. Further contact options are welding, bonding, gluing with conductive silver, gluing and contacting with conductive silver lacquer. Also stoving silver or a sputter layer, which around the
- the edge of the disc is pulled around can be used for contacting. Furthermore, thin wires inserted into the adhesive layer for contacting are possible.
Abstract
An ultrasonic transducer provided with an adapter (T) has a concentric ring-shaped groove (RN) at the side of the adapter (T) that faces the piezoelectric oscillator (S). The ring-shaped groove (RN) is sized to receive the volume of the contact point (KS) between the connecting wire (D) and the piezoelectric oscillator (S).
Description
Ultraschallwandler mit AnpaßkörperUltrasonic transducer with adapter body
Die vorliegende Erfindung betrifft einen Ultraschallwandler mit einem Anpaßkörper, beispielsweise in Form einer λ/4-Anpaß- schicht.The present invention relates to an ultrasonic transducer with an adapter body, for example in the form of a λ / 4 adapter layer.
Zur Anpassung von piezoelektrischen Ultraschallwandlern an Me- dien, wie Luft, ist eine Anpaßschicht notwendig. Bei Ultra- schallwandlern mit Anpaßschicht ist eine, mit Elektroden be¬ legte Seite des piezokera isehen Schwingers mit einem Anpaßkör¬ per verklebt. Daraus entsteht das Problem, diese Elektrode zu kontaktieren, ohne die Klebefuge, die die Eigenschaften des Wandlers beeinflußt, wesentlich zu verändern. Dies gilt insbe¬ sondere für die in den Schriften EP 04 77 575 AI, DE 39 41 933 AI und DE 38 32 947 AI beschriebenen Topfwandler, wie sie für Luftmengenmesser oder Gaszähler vorgesehen sind. Darüber hinaus sind bei den Topfwandlern hohe Anforderungen an die Bearbeitung des Topfbodens zu stellen, damit der piezoelektrische Schwinger flächenbündig auf dem Topfbodeή aufliegt. Bei bisher bekannten Ultraschallwandlern kann es wegen fertigungsbedingter Verrun- dungen der Kante zwischen Boden und Innenwand zu Ausschußexem¬ plaren kommen, weil dann die Piezokeramikscheibe nicht mehr ex- akt am To fboden anliegt.A matching layer is necessary to adapt piezoelectric ultrasonic transducers to media such as air. In the case of ultrasonic transducers with a matching layer, one side of the piezoceramic transducer covered with electrodes is glued to a matching body. This creates the problem of contacting this electrode without significantly changing the adhesive joint, which affects the properties of the transducer. This applies in particular to the pot converters described in the documents EP 04 77 575 AI, DE 39 41 933 AI and DE 38 32 947 AI, as are provided for air flow meters or gas meters. In addition, the pot transducers have to make high demands on the processing of the bottom of the pot so that the piezoelectric vibrator lies flush on the bottom of the pot. In the case of previously known ultrasonic transducers, because of the manufacturing-related rounding of the edge between the floor and the inner wall, rejects can be made because the piezoceramic disk no longer lies exactly against the bottom of the pot.
Bisher wurde im Topfboden eine Ansenkung zur Aufnahme der Löt¬ stelle vorgesehen, mit der der betreffende Anschlußdraht mit der Piezokeramikscheibe verbunden ist. Dies führt zu Positio- nierungsproblemen, weil dabei blind mit der Lötstelle genau auf die mit dem Kleber gefüllte Ansenkung getroffen werden muß.So far, a countersink has been provided in the base of the pot for receiving the soldering point, by means of which the connecting wire in question is connected to the piezoceramic disk. This leads to positioning problems because the solder joint must be hit blindly with the countersink filled with the adhesive.
Bei den beispielsweise aus der DE 25 41 492 bekannten richt¬ scharfen Ultraschall (RU) -Wandlern, werden in die
Kleberschicht dünne Anschlußdrähte eingelegt, welche die Elek¬ trode des Piezoelements an der Klebestelle mit einem Metallring verbinden. Dieser Metallring muß seinerseits mit dem Anschlu߬ draht verbunden werden, was erfahrungsgemäß ebenfalls proble- matisch ist.In the directional sharp ultrasound (RU) transducers known for example from DE 25 41 492, the Adhesive layer inserted thin connecting wires that connect the electrode of the piezo element at the adhesive point with a metal ring. This metal ring in turn must be connected to the connecting wire, which experience has also shown to be problematic.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, einen Ultraschallwandler zu schaffen, bei dem die Piezokeramikscheibe fertig kontaktiert in beliebiger Einsetzdrehlage in den Anpaß- körper eingesetzt werden kann, ohne daß die dem Anpaßkörper zu¬ gewandte Kontaktierungsstelle der Piezokeramikscheibe einen flächenbündigen Sitz der Piezokeramikscheibe auf dem Wandler¬ topfboden behindert.The present invention has for its object to provide an ultrasonic transducer in which the piezoceramic disk, when fully contacted, can be inserted into the adapter body in any insertion rotational position without the contacting point of the piezoceramic disk facing the adapter body ensuring that the piezoceramic disk sits flush on the transducer ¬ pot bottom hampers.
Die Aufgabe wird erfindungsgemäß durch einen Ultraschallwandler gemäß dem Patentanspruch 1 gelöst.The object is achieved by an ultrasonic transducer according to claim 1.
Vorteilhafte Weiterbildungen der Erfindung sind in den abhängi¬ gen Ansprüchen angegeben.Advantageous developments of the invention are specified in the dependent claims.
Die Aufgabe wird erfindungsgemäß dadurch gelöst, daß die Aus¬ sparung aus einer im Anpaßkörper ausgebildeten konzentrischen Ringnut besteht, die das Volumen der Kontaktierungsstelle in beliebiger Einsetzdrehlage der Piezokeramikscheibe aufnehmen kann.The object is achieved in that the recess consists of a concentric annular groove formed in the adapter body, which can accommodate the volume of the contact point in any rotational position of insertion of the piezoceramic disk.
Im folgenden wird die Erfindung anhand mehrerer Figuren be¬ schrieben.The invention is described below with reference to several figures.
Figur la, b, c zeigt schematisch verschiedene Ansichten derFigure la, b, c shows schematically different views of the
Komponenten des Ultraschallwandlers gemäß einem Ausführungsbei- spiel der vorliegenden Erfindung vor und nach dem Zusammenbau. Figur 2 zeigt schematisch den Querschnitt eines RU-Wandlers
Entsprechend der vorliegenden Erfindung wird zur Behebung der obengenannten Probleme eine Ringnut RN, wie in Figur la, b und c zu sehen, in den Boden des topfförmigen Anpaßkörpers T einge¬ bracht, die der Lötstelle KS, unabhängig von der Drehlage zwi¬ schen dem piezoelektrischen Schwinger S und dem Anpaßkörper T, den benötigten Platz gibt. Zudem wirkt sich eine Verrundung der Kante zwischen dem Topfboden und der Topfwand nicht mehr stö¬ rend aus, weil die Kante des piezoelektrischen Schwingers S nicht mehr direkt auf den Topfboden aufliegt.Components of the ultrasound transducer according to an exemplary embodiment of the present invention before and after assembly. Figure 2 shows schematically the cross section of an RU converter According to the present invention, an annular groove RN, as can be seen in FIGS. 1 a, b and c, is introduced into the bottom of the cup-shaped adapter body T to remove the problems mentioned above, that of the solder joint KS, regardless of the rotational position between the piezoelectric Schwinger S and the adapter body T, the space required. In addition, a rounding of the edge between the pot base and the pot wall no longer has a disruptive effect because the edge of the piezoelectric vibrator S no longer lies directly on the pot base.
Der topfförmige Anpaßkörper T ist in dem gezeigten Ausführungs¬ beispiel mit einer Vergußmasse V ausgefüllt. Diese sollten schalldämpfende Eigenschaften haben. Geeignet sind Materialien, wie z.B. Silikongummi mit Bleioxid - oder Wolframoxid - Antei- len. Neben Silikongummi sind auch andere Werkstoffe, die nach einer Vermengung mit schwereren Partikeln weich bleiben, ver¬ wendbar.The cup-shaped adapter body T is filled with a potting compound V in the exemplary embodiment shown. These should have sound absorbing properties. Materials such as Silicone rubber with lead oxide - or tungsten oxide - parts. In addition to silicone rubber, other materials that remain soft after being mixed with heavier particles can also be used.
Bei einem RU-Wandler, wie in Figur 2 gezeigt, wird zur Lösung der Aufgabe eine konzentrische Ringnut RN in den Anpaßkörper T, der hier scheibenförmig gestaltet ist, eingelassen. Die Ringnut ist so dimensioniert, daß die Kontaktierungsstelle KS unabhän¬ gig von der Drehlage des piezoelektrischen Schwingers S Platz findet. Konzentrisch zur Ringnut RN liegt ein Wulst W zur Zen- trierung des piezoelektrischen Schwingers S und des Metallrings M. Hinter dem Wulst W folgt eine zweite Ringnut RN2, deren Ab¬ messungen so dimensioniert sind, daß darin ein Grat, den der Metallring M möglicherweise auf seiner unteren Innenkante auf¬ weist, zu liegen kommt. Durch diese konstruktiven Maßnahmen ist sowohl ein planarer Sitz des Metallrings M und des piezoelek¬ trischen Schwingers S, als auch eine einfache Montage gewähr¬ leistet. Wie bereits oben beschrieben, wirkt sich auch hier ei¬ ne Verrundung der Kanten Kl und K2 nicht mehr störend aus, weil
die Kanten des Schwingers S und des Metallrings M nicht mehr direkt auf dem Anpaßkörper T aufliegen.In the case of an RU converter, as shown in FIG. 2, a concentric annular groove RN is let into the adapter body T, which is designed here in the form of a disk, to achieve the object. The annular groove is dimensioned such that the contacting point KS is accommodated independently of the rotational position of the piezoelectric vibrator S. Concentric to the ring groove RN there is a bead W for centering the piezoelectric vibrator S and the metal ring M. Behind the bead W there is a second ring groove RN2, the dimensions of which are dimensioned such that there is a burr which the metal ring M may have its lower inner edge has to come to rest. These constructive measures ensure both a planar fit of the metal ring M and the piezoelectric vibrator S and simple assembly. As already described above, a rounding of the edges K1 and K2 no longer has a disruptive effect here either, because the edges of the vibrator S and the metal ring M no longer lie directly on the adapter body T.
Für die Abmessungen der Ringnut RN gibt es keine Einschränkun- gen. Die Ringnut RN kann bei in Ringrandnähe angeordneten dün¬ nen Anschlußdrähten D relativ schmal und flach sein. Die Kontaktierung ist nicht auf Löten beschränkt. Weitere Kon- taktierungsmöglichkeiten sind Schweißen, Bonden, Aufkleben mit Leitsilber, Aufkleben und Kontaktieren mit Leitsilber-Lack. Auch Einbrennsilber oder eine Sputterschicht, welche um denThere are no restrictions on the dimensions of the ring groove RN. The ring groove RN can be relatively narrow and flat in the case of thin connecting wires D arranged near the ring edge. Contacting is not limited to soldering. Further contact options are welding, bonding, gluing with conductive silver, gluing and contacting with conductive silver lacquer. Also stoving silver or a sputter layer, which around the
Scheibenrand herumgezogen ist, ist zur Kontaktierung verwend¬ bar. Weiterhin sind, in die Klebeschicht eingelegte, dünne Drähte zur Kontaktierung möglich.
The edge of the disc is pulled around can be used for contacting. Furthermore, thin wires inserted into the adhesive layer for contacting are possible.
Claims
1. Ultraschallwandler, bei dem ein piezoelektrischer Schwinger (S) ein Kontaktierungselement aufweist, bei dem der piezoelektrische Schwinger (S) mit einem Anpaßkörper (T) verbunden ist, und bei dem eine, wenigstens teilweise von dem piezoelektrischen Schwinger (S) überdeckte erste Ringnut (RN) auf einer dem piezoelektrischen Schwinger (S) zugewandten Seite des1. Ultrasonic transducer, in which a piezoelectric oscillator (S) has a contacting element, in which the piezoelectric oscillator (S) is connected to an adapter body (T), and in which a first annular groove, at least partially covered by the piezoelectric oscillator (S) (RN) on a side of the piezoelectric vibrator (S) facing the
Anpaßkörpers (T) vorgesehen ist, um das Kontaktierungselement aufzunehmen.Adapting body (T) is provided to accommodate the contacting element.
2. Ultraschallwandler nach Anspruch 1, bei dem die erste Ringnut (RN) konzentrisch auf der dem Schwinger (S) zugewandten Seite angeordnet ist.2. Ultrasonic transducer according to claim 1, wherein the first annular groove (RN) is arranged concentrically on the side facing the oscillator (S).
3. Ultraschallwandler nach Anspruch 1 oder 2, bei dem der piezoelektrische Schwinger (S) mit dem Anpaßkörper (T) durch eine Verklebung verbunden ist.3. Ultrasonic transducer according to claim 1 or 2, wherein the piezoelectric vibrator (S) is connected to the adapter body (T) by an adhesive bond.
4. Ultraschallwandler nach einem der Ansprüche 1 bis 3, bei dem der Anpaßkörper (T) die Form einer Scheibe hat, und bei dem der ersten Ringnut (RN) ein Wulst (W) folgt.4. Ultrasonic transducer according to one of claims 1 to 3, in which the adapter body (T) has the shape of a disc, and in which the first annular groove (RN) is followed by a bead (W).
5. Ultraschallwandler nach Anspruch 4, bei dem dem Wulst (W) eine zweite Ringnut (RN2) folgt.5. Ultrasonic transducer according to claim 4, wherein the bead (W) is followed by a second annular groove (RN2).
6. Ultraschallwandler nach einem der Ansprüche 1 bis 3, bei dem der Anpaßkörper (T) die Form eines Topfes hat, und bei dem die erste Ringnut (RN) sich auf der Innenseite des Topfbodens befindet.6. Ultrasonic transducer according to one of claims 1 to 3, in which the adapter body (T) has the shape of a pot, and in which the first annular groove (RN) is located on the inside of the pot base.
7. Ultraschallwandler nach Anspruch 6, bei dem die verbleibende Öffnung des Topfes mit einer Vergu߬ masse (V) ausgefüllt ist. 7. Ultrasonic transducer according to claim 6, wherein the remaining opening of the pot is filled with a casting compound (V).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19934330745 DE4330745C1 (en) | 1993-09-10 | 1993-09-10 | Ultrasonic transducer with adapter body |
| DEP4330745.0 | 1993-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1995007529A1 true WO1995007529A1 (en) | 1995-03-16 |
Family
ID=6497392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/DE1994/001016 WO1995007529A1 (en) | 1993-09-10 | 1994-09-05 | Ultrasonic transducer with adapter |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE4330745C1 (en) |
| WO (1) | WO1995007529A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011085872A3 (en) * | 2010-01-18 | 2013-01-31 | Robert Bosch Gmbh | Ultrasound transducer for use in a fluid medium |
| WO2016184952A1 (en) * | 2015-05-20 | 2016-11-24 | Valeo Schalter Und Sensoren Gmbh | Ultrasonic sensor for a motor vehicle, motor vehicle, and method for producing an ultrasonic sensor |
| CN111312203A (en) * | 2020-02-28 | 2020-06-19 | 清华大学 | Flexible acoustic metamaterial structure |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE29611678U1 (en) * | 1996-07-04 | 1997-08-07 | Siemens Ag | Sound transducers, in particular ultrasound transducers |
| DE19725717C2 (en) * | 1997-06-18 | 2001-08-02 | Hydrometer Gmbh | Ultrasonic transducer for liquid flow meters |
| DK172871B1 (en) * | 1997-08-22 | 1999-08-23 | Danfoss As | An ultrasonic transducer |
| DE19811982C5 (en) * | 1998-03-19 | 2011-02-03 | Microsonic Gesellschaft für Mikroelektronik und Ultraschalltechnik mbH | Ultrasonic air spring assembly |
| DE10216037A1 (en) * | 2002-04-11 | 2003-10-23 | Endress & Hauser Gmbh & Co Kg | Sound or ultrasonic sensor |
| DE10356114A1 (en) * | 2003-11-27 | 2005-06-23 | Endress + Hauser Flowtec Ag, Reinach | Device for determining and / or monitoring the volume and / or mass flow rate of a measuring medium |
| CN103776497B (en) * | 2014-01-26 | 2017-09-01 | 哈尔滨工业大学（威海） | A kind of flowmeter ultrasonic sensor |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2325266A1 (en) * | 1975-09-17 | 1977-04-15 | Siemens Ag | ULTRASONIC TRANSDUCER |
| EP0178346A1 (en) * | 1984-02-21 | 1986-04-23 | NGK Spark Plug Co. Ltd. | Ultrasonic transducer |
| DE3823477A1 (en) * | 1988-07-11 | 1990-01-18 | Siemens Ag | Process for producing ultrasonic transducers |
| DE3832947A1 (en) * | 1988-09-28 | 1990-03-29 | Siemens Ag | Ultrasonic (ultrasound) transducer, in particular for airflow sensors (air volume meters) |
| DE3941933A1 (en) * | 1989-12-19 | 1991-06-20 | Siemens Ag | ULTRASONIC CONVERTER FOR AIR FLOW MEASUREMENT, IN PARTICULAR FOR AIR QUANTITY MEASUREMENT IN COMBUSTION ENGINES |
| EP0477575A1 (en) * | 1990-09-25 | 1992-04-01 | Siemens Aktiengesellschaft | Ultrasonic converter, in particular for air and gas flow measurement, and process of manufacturing the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH054339Y2 (en) * | 1988-10-04 | 1993-02-03 |
-
1993
- 1993-09-10 DE DE19934330745 patent/DE4330745C1/en not_active Expired - Fee Related
-
1994
- 1994-09-05 WO PCT/DE1994/001016 patent/WO1995007529A1/en active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2325266A1 (en) * | 1975-09-17 | 1977-04-15 | Siemens Ag | ULTRASONIC TRANSDUCER |
| EP0178346A1 (en) * | 1984-02-21 | 1986-04-23 | NGK Spark Plug Co. Ltd. | Ultrasonic transducer |
| DE3823477A1 (en) * | 1988-07-11 | 1990-01-18 | Siemens Ag | Process for producing ultrasonic transducers |
| DE3832947A1 (en) * | 1988-09-28 | 1990-03-29 | Siemens Ag | Ultrasonic (ultrasound) transducer, in particular for airflow sensors (air volume meters) |
| DE3941933A1 (en) * | 1989-12-19 | 1991-06-20 | Siemens Ag | ULTRASONIC CONVERTER FOR AIR FLOW MEASUREMENT, IN PARTICULAR FOR AIR QUANTITY MEASUREMENT IN COMBUSTION ENGINES |
| EP0477575A1 (en) * | 1990-09-25 | 1992-04-01 | Siemens Aktiengesellschaft | Ultrasonic converter, in particular for air and gas flow measurement, and process of manufacturing the same |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011085872A3 (en) * | 2010-01-18 | 2013-01-31 | Robert Bosch Gmbh | Ultrasound transducer for use in a fluid medium |
| US9097569B2 (en) | 2010-01-18 | 2015-08-04 | Robert Bosch Gmbh | Ultrasonic transducer for use in a fluid medium |
| WO2016184952A1 (en) * | 2015-05-20 | 2016-11-24 | Valeo Schalter Und Sensoren Gmbh | Ultrasonic sensor for a motor vehicle, motor vehicle, and method for producing an ultrasonic sensor |
| CN111312203A (en) * | 2020-02-28 | 2020-06-19 | 清华大学 | Flexible acoustic metamaterial structure |
| CN111312203B (en) * | 2020-02-28 | 2021-03-12 | 清华大学 | Flexible acoustic metamaterial structure |
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| DE4330745C1 (en) | 1995-04-27 |
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