WO1994023547A1 - A method and a coupling for reducing the harmonic distortion of a capacitive transducer - Google Patents

A method and a coupling for reducing the harmonic distortion of a capacitive transducer Download PDF

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Publication number
WO1994023547A1
WO1994023547A1 PCT/DK1994/000142 DK9400142W WO9423547A1 WO 1994023547 A1 WO1994023547 A1 WO 1994023547A1 DK 9400142 W DK9400142 W DK 9400142W WO 9423547 A1 WO9423547 A1 WO 9423547A1
Authority
WO
WIPO (PCT)
Prior art keywords
capacity
preamplifier
transducer
negative
coupling
Prior art date
Application number
PCT/DK1994/000142
Other languages
French (fr)
Inventor
Erling Frederiksen
Original Assignee
A/S Brüel & Kjær
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by A/S Brüel & Kjær filed Critical A/S Brüel & Kjær
Priority to JP6521571A priority Critical patent/JPH08509327A/en
Priority to AU65346/94A priority patent/AU6534694A/en
Priority to EP94913038A priority patent/EP0694246A1/en
Publication of WO1994023547A1 publication Critical patent/WO1994023547A1/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00—Circuits for transducers, loudspeakers or microphones
    • H04R3/04—Circuits for transducers, loudspeakers or microphones for correcting frequency response
    • H04R3/06—Circuits for transducers, loudspeakers or microphones for correcting frequency response of electrostatic transducers

Definitions

  • the invention relates to a method of reducing the harmonic distortion of a capacitive transducer, such as a capacitor microphone, the capacity of which is altered in response to a sound pressure on the electrode (the membrane) of the capacitor microphone, said distortion originating from undesired capacities in the transducer, by means of a negative capacity connected to said transducer.
  • the invention relates furthermore to a coupling for carrying out the method.
  • Capacitor microphones present a very high fidelity and are therefore used in almost all professional systems. They are also used in consumer devices and in personal equipment, such as tape recorders and hearing aids.
  • the high fidelity is of particular importance in measuring systems and other professional systems, where large dynamic ranges free of noise and distortion are the object.
  • the dynamic range is limited at low sound levels by the noise of the microphone and by the noise of an amplifier placed after the micro ⁇ phone.
  • the limit is in practise set by a non-linear distortion uniformly increasing with the signal level and being caused by the micro ⁇ phone; or by an abrupt cutting of the microphone signal caused by the signal level in the succeeding amplifier. It is known that an electric capacity in parallel to the set noise of the microphone increases the distortion of the microphone, cf. for instance Br ⁇ el & Kjaer Technical Review No. 4, 1979, page 18.
  • the amplifier provides the necessary impedance matching and has typically a voltage gain of slightly below 1.
  • the amplifier is optimized to drive long cables and presents such a high input impedance that the micro- phone is only insignificantly loaded.
  • the input impedance is typically between 10 and 50 times 10 9 ⁇ , and the input capacity is typically between 0.3 and 1 pF. This low input capacity can for instance be provided by means of a preamplifier in form of a field effect transistor coupled as source follower.
  • a screen around the input terminal of the preamplifier can be connected to the output of the preamplifier, the signal voltage therein then being in phase with the input voltage and only being slightly lower than said voltage.
  • the resulting input capacity is reduced in the preamplifier because a stronger current in the capacity between the input terminal and the frame has then been replaced by a weaker current in the capacity between the input terminal and said screen.
  • Measuring microphones are cylindrical and often characterised by their external diameter. The most conventional sizes are 1 ", 1/2", 1/3", and 1/8" with capacities of 60 pF, 20 pF, 6.5 pF, and 23.5 pF, respectively. Some of the capacity is formed by the active signal-generating capacity between the membrane and the back electrode, whereas another portion of the capacity is passive and originates from the mounting of said back electrode in the microphone housing and from the output terminals of the microphone capsule.
  • the passive portion C s of the capacity, cf. Fig. 2, is almost the same for all microphone sizes, viz. 2 to 3 pF.
  • the ratio of the passive to the active capacity is typically 4% for the largest types of microphone and 200% for the smallest types of microphones.
  • the object of the invention is to provide a method of reducing the har ⁇ monic distortion of a capacity transducer by optimizing the load thereof.
  • a method of the above type is according to the invention characterised by the negative capacity being coupled in parallel to the transducer and being dimensioned such that it corresponds substantially to the sum of the undesired capacities.
  • the resulting optimizing is performed by neu ⁇ tralizing the effect of the dissipation capacity of the microphone and thereby minimizing the harmonic distortion.
  • the invention relates furthermore to a coupling for carrying out the method according to the invention for reducing the harmonic distortion of a capacity transducer, such as a capacitor microphone, the capacity of which is altered in response to a sound pressure on the electrode (the membrane) of the capacitor microphone, said distortion originating from undesired capacities in the transducer, by means of a negative capacity connected to said transducer.
  • a capacity transducer such as a capacitor microphone
  • the coupling is according to the invention characterised by the negative capacity being coupled in parallel to the transducer and substantially corresponding to the sum of the undesired capacities.
  • the resulting capacitive transducer presents a lower distor ⁇ tion than previously known.
  • the nega- tive capacity may according to the invention be provided by the preamplifier with a positive capacitive feedback implying that the preamplifier has a negative input capacity. In this manner the available preamplifier is utilized, and substantially no more than a single additional component is required for establishing the negative capacity.
  • the nega- tive input capacity of the preamplifier is preferably 2 to 3 pF.
  • the negative input capacity of the preamplifier may be variable, whereby the input capacity can be set until the harmonic distortion has a minimum value.
  • Fig. 1 illustrates a capacitive transducer with a coupling according to the invention
  • Fig. 2 illustrates the imperfections of the capacitor microphone.
  • the capacitive transducer of Fig. 1 can for instance be formed by a microphone 1 , such as a capacitor microphone, charged from for instance a DC source V charge through a resistance R.
  • a microphone 1 such as a capacitor microphone
  • V charge a DC source V charge through a resistance R.
  • R a resistance
  • the voltage increases proportional to the distance between the plates when said plates are removed from one another, and when said distance is reduced the voltage drops proportional thereto.
  • This is known and applies to a capacitor without rim effects and without a load.
  • This proportionality is the ideal for a capacitor microphone.
  • the ideal image is, however, disturbed both by unavoidable stray capacities and by the membrane not being moved to an equal extent across the entire surface, cf. Fig. 2.
  • V Q _ 2 - k
  • Q is the charge on the capacitor
  • C k is the capacity of the capacitor
  • d is the distance between the capacitor plates
  • k is a constant.
  • the above problem has been solved by a negative capacity being coupled in parallel to the microphone.
  • This negative capacity serves to eliminate the effect of undesired capacities and corresponds substantially to the sum thereof.
  • the negative capacity can be provided by means of a succeeding preamplifier 2 providing an impedance matching to a connecting cable.
  • the preamplifier 2 is coupled such that it has a negative input capacity C jnd .
  • the negative input capa- city C jnd is provided by means of a positive capacitive feedback, such as by a capacity C
  • the capacity C 1 can be variable in such a manner that an optimum value can be obtained in response to the microphone on which the coupling is used.
  • the sum of the passive parallel capacity and the input capacity must not become negative because the circuit may otherwise oscillate.
  • the positive capacitive feedback must be so strong that the preamplifier corresponds to a negative input capacity C jnd of a few pF, preferably 2 to 3 pF.
  • C can have a value of 25 pF if the ratio of R ⁇ to R 2 is 10.
  • R 2 can have a value of 5 K ⁇
  • C 1 is for instance set by a pure sinusoidal sound signal of for instance 1000 Hz being fed to the microphone 1. Then the harmonic distortion or the distortion is measured and C 1 is set until said harmonic distortion or distortion assumes a minimum. In connection with a typical capacitor microphone, the harmonic distortion should be reduced by approximately 10 to 20 dB. The improvement depends, however, on the size of the capacitor microphone. In order to determine the DC level on the input of the preamplifier and in order to isolate said level from a possible polarisation voltage V charge , a complex comprising a capacity C 2 and a resistance R 3 is in front of the preamplifier 2.
  • the capacity C 2 is situated in the current path from the microphone 1 to the preamplifier 2, whereas the resistance R 3 is coupled between the connection of the capacity to the preamplifier 2 and the frame. In this manner the DC level is determined on the input to frame, C 2 is for instance 100 times greater than C k .
  • the resistance R 3 must be very high as it together with C k it determines the lower limit frequency.
  • the principle can be used in connection with pressure and pressure gradient microphones. It can, however, also be used in connection with electrete microphones.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Circuit For Audible Band Transducer (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

A method and a coupling for reducing the harmonic distortion of a capacity transducer (1), such as a microphone, such as a capacitor microphone, the capacity (Ck) of which is altered in response to a sound pressure on the capacitor electrode (the membrane) by means of a negative capacity. According to the invention the negative capacity is coupled in parallel to the accoustic transducer (1) and dimensioned so as to eliminate the effect of the undesired capacities (CS) causing the distortion. In this manner the harmonic distortion of the capacity transducer (1) is reduced to a minimum.

Description

Title: A method and a coupling for reducing the harmonic distortion of a capacitive transducer
Technical Field
The invention relates to a method of reducing the harmonic distortion of a capacitive transducer, such as a capacitor microphone, the capacity of which is altered in response to a sound pressure on the electrode (the membrane) of the capacitor microphone, said distortion originating from undesired capacities in the transducer, by means of a negative capacity connected to said transducer. The invention relates furthermore to a coupling for carrying out the method.
Background Art
Capacitor microphones present a very high fidelity and are therefore used in almost all professional systems. They are also used in consumer devices and in personal equipment, such as tape recorders and hearing aids.
The high fidelity is of particular importance in measuring systems and other professional systems, where large dynamic ranges free of noise and distortion are the object.
The dynamic range is limited at low sound levels by the noise of the microphone and by the noise of an amplifier placed after the micro¬ phone.
At high sound levels, the limit is in practise set by a non-linear distortion uniformly increasing with the signal level and being caused by the micro¬ phone; or by an abrupt cutting of the microphone signal caused by the signal level in the succeeding amplifier. It is known that an electric capacity in parallel to the set noise of the microphone increases the distortion of the microphone, cf. for instance Brϋel & Kjaer Technical Review No. 4, 1979, page 18.
As capacitor microphones in practise present very high electric impe- dances compared to the succeeding connecting cables and amplifiers, it is usually necessary to place an amplifier close to the microphone. The amplifier provides the necessary impedance matching and has typically a voltage gain of slightly below 1. The amplifier is optimized to drive long cables and presents such a high input impedance that the micro- phone is only insignificantly loaded. The input impedance is typically between 10 and 50 times 109 Ω, and the input capacity is typically between 0.3 and 1 pF. This low input capacity can for instance be provided by means of a preamplifier in form of a field effect transistor coupled as source follower.
A screen around the input terminal of the preamplifier can be connected to the output of the preamplifier, the signal voltage therein then being in phase with the input voltage and only being slightly lower than said voltage. As a result, the resulting input capacity is reduced in the preamplifier because a stronger current in the capacity between the input terminal and the frame has then been replaced by a weaker current in the capacity between the input terminal and said screen.
Thus modern preamplifiers only load the microphones insignificantly.
Measuring microphones are cylindrical and often characterised by their external diameter. The most conventional sizes are 1 ", 1/2", 1/3", and 1/8" with capacities of 60 pF, 20 pF, 6.5 pF, and 23.5 pF, respectively. Some of the capacity is formed by the active signal-generating capacity between the membrane and the back electrode, whereas another portion of the capacity is passive and originates from the mounting of said back electrode in the microphone housing and from the output terminals of the microphone capsule.
The passive portion Cs of the capacity, cf. Fig. 2, is almost the same for all microphone sizes, viz. 2 to 3 pF. The ratio of the passive to the active capacity is typically 4% for the largest types of microphone and 200% for the smallest types of microphones.
It is known from German Auslegeschrift No. 2,928,203 that the passive portion of the capacity may cause harmonic distortion. Attempts have been made at solving this problem by means of two capacitors of the same value and coupled in series, where one capacitor is positive and the other capacitor is negative, said capacities being coupled in series with the microphone. This coupling is encumbered with the drawback that the microphone is loaded to a disadvantageous degree, which increases possible distortions.
Brief Description of the Invention
The object of the invention is to provide a method of reducing the har¬ monic distortion of a capacity transducer by optimizing the load thereof.
A method of the above type is according to the invention characterised by the negative capacity being coupled in parallel to the transducer and being dimensioned such that it corresponds substantially to the sum of the undesired capacities. The resulting optimizing is performed by neu¬ tralizing the effect of the dissipation capacity of the microphone and thereby minimizing the harmonic distortion.
The invention relates furthermore to a coupling for carrying out the method according to the invention for reducing the harmonic distortion of a capacity transducer, such as a capacitor microphone, the capacity of which is altered in response to a sound pressure on the electrode (the membrane) of the capacitor microphone, said distortion originating from undesired capacities in the transducer, by means of a negative capacity connected to said transducer. The coupling is according to the invention characterised by the negative capacity being coupled in parallel to the transducer and substantially corresponding to the sum of the undesired capacities. The resulting capacitive transducer presents a lower distor¬ tion than previously known.
When the capacitive transducer is connected to a preamplifier, the nega- tive capacity may according to the invention be provided by the preamplifier with a positive capacitive feedback implying that the preamplifier has a negative input capacity. In this manner the available preamplifier is utilized, and substantially no more than a single additional component is required for establishing the negative capacity. The nega- tive input capacity of the preamplifier is preferably 2 to 3 pF.
Finally according to the invention, the negative input capacity of the preamplifier may be variable, whereby the input capacity can be set until the harmonic distortion has a minimum value.
Brief Description of the Drawings
The invention is explained in greater detail below with reference to the accompanying drawings, in which
Fig. 1 illustrates a capacitive transducer with a coupling according to the invention, and
Fig. 2 illustrates the imperfections of the capacitor microphone.
Best Mode for Carrying Out the Invention The capacitive transducer of Fig. 1 can for instance be formed by a microphone 1 , such as a capacitor microphone, charged from for instance a DC source Vcharge through a resistance R. When it is a ques¬ tion of a capacitor with two parallel plates and a constant charge, the voltage increases proportional to the distance between the plates when said plates are removed from one another, and when said distance is reduced the voltage drops proportional thereto. This is known and applies to a capacitor without rim effects and without a load. This proportionality is the ideal for a capacitor microphone. The ideal image is, however, disturbed both by unavoidable stray capacities and by the membrane not being moved to an equal extent across the entire surface, cf. Fig. 2. This is equivalent to the situation where the most oscillating portion, i.e. the central portion, is loaded by the least oscillating portion, i.e. the rim portion which is a passive parallel capacity Cs. As a result, there is no proportionality between oscillations (sound pressure) and voltage, which means that a distortion occurs. The ideal ratio corre¬ sponds to
Q = C, • V
Ck = * and d
V = Q _ 2 - k
where
Q is the charge on the capacitor, Ck is the capacity of the capacitor, d is the distance between the capacitor plates, and k is a constant.
According to the invention the above problem has been solved by a negative capacity being coupled in parallel to the microphone. This negative capacity serves to eliminate the effect of undesired capacities and corresponds substantially to the sum thereof. The negative capacity can be provided by means of a succeeding preamplifier 2 providing an impedance matching to a connecting cable. The preamplifier 2 is coupled such that it has a negative input capacity Cjnd. The negative input capa- city Cjnd is provided by means of a positive capacitive feedback, such as by a capacity C| being coupled between the output of the preamplifier 2 and the positive input terminal.
The negative input capacity is thereby Cjnd = - C., (A-1 ), where A is the amplification before the feedback is provided through the capacity C-, , and C, is the capacity coupled between the input connected to the capacitor microphone 1 and the output being in phase therewith. The capacity C1 can be variable in such a manner that an optimum value can be obtained in response to the microphone on which the coupling is used. The sum of the passive parallel capacity and the input capacity must not become negative because the circuit may otherwise oscillate. Usually, the positive capacitive feedback must be so strong that the preamplifier corresponds to a negative input capacity Cjnd of a few pF, preferably 2 to 3 pF.
C can have a value of 25 pF if the ratio of R^ to R2 is 10. R2 can have a value of 5 KΩ, and R1 can have a value of 50 KΩ. Then Cind is -25 pF (1 + 5/50 - 1 ) = - 2.5 pF.
C1 is for instance set by a pure sinusoidal sound signal of for instance 1000 Hz being fed to the microphone 1. Then the harmonic distortion or the distortion is measured and C1 is set until said harmonic distortion or distortion assumes a minimum. In connection with a typical capacitor microphone, the harmonic distortion should be reduced by approximately 10 to 20 dB. The improvement depends, however, on the size of the capacitor microphone. In order to determine the DC level on the input of the preamplifier and in order to isolate said level from a possible polarisation voltage Vcharge, a complex comprising a capacity C2 and a resistance R3 is in front of the preamplifier 2. The capacity C2 is situated in the current path from the microphone 1 to the preamplifier 2, whereas the resistance R3 is coupled between the connection of the capacity to the preamplifier 2 and the frame. In this manner the DC level is determined on the input to frame, C2 is for instance 100 times greater than Ck. The resistance R3 must be very high as it together with Ck it determines the lower limit frequency.
The principle can be used in connection with pressure and pressure gradient microphones. It can, however, also be used in connection with electrete microphones.

Claims

Claims.
1. A method of reducing the harmonic distortion of a capacitive trans¬ ducer (1), such as a capacitor microphone, the capacity of which is altered in response to a sound pressure on the electrode (the membrane) of the capacitor microphone, said distortion originating from undesired capacities (Cs) in the transducer (1), by means of a negative capacity connected to said transducer (1), ch aracterised by the nega¬ tive capacity (Cjnd) being coupled in parallel to the transducer (1) and being dimensioned such that it corresponds substantially to the sum of the undesired capacities (Cs).
2. A method as claimed in claim 1 where a preamplifier is connected to the capacitive transducer (1), characterised by the negative capacity being provided by the preamplifier (2) with a capacitive feed¬ back implying that the preamplifier (2) has a negative input capacity (Cjnd).
3. A method as claimed in claim 2, ch a racteri sed by the capacitive feedback being a positive feedback.
4. A method as claimed in claim 2 or 3, c h a racterised by the preamplifier coupling being dimensioned to a negative input capacity (Cind) of 2 to 3 pF.
5. A coupling for carrying out the method as claimed in claims 1 to 4 for reducing the harmonic distortion of a capacity transducer (1), such as a capacitor microphone, the capacity of which is altered in response to a sound pressure on the electrode (the membrane) of the capacitor microphone, said distortion originating from undesired capacities (Cs) in the transducer (1), by means of a negative capacity (Cind) connected to said transducer (1), c h a r a ct e ri s e d by the negative capacity (Cjnd) being coupled in parallel to the transducer and substantially corre¬ sponding to the sum of the undesired capacities (Cs).
6. A coupling as claimed in claim 5 and connected to a preamplifier (2), c haracterised by the negative capacity being provided by the preamplifier (2) with a positive capacitive feedback implying that the preamplifier (2) has a negative input capacity (Cjnd).
7. A coupling as claimed in claim 5 or 6, c ha racte ri sed by the negative input capacity (Cind) of the preamplifier (2) being 2 to 3 pF.
8. A coupling as claimed in claim 5 or 6, characte rised by the negative input capacity (Cind) of the preamplifier (2) being variable.
PCT/DK1994/000142 1993-04-07 1994-04-06 A method and a coupling for reducing the harmonic distortion of a capacitive transducer WO1994023547A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP6521571A JPH08509327A (en) 1993-04-07 1994-04-06 Method and circuit configuration for reducing harmonic distortion of a capacitive transducer
AU65346/94A AU6534694A (en) 1993-04-07 1994-04-06 A method and a coupling for reducing the harmonic distortion of a capacitive transducer
EP94913038A EP0694246A1 (en) 1993-04-07 1994-04-06 A method and a coupling for reducing the harmonic distortion of a capacitive transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DK0415/93 1993-04-07
DK041593A DK170196B1 (en) 1993-04-07 1993-04-07 Method and coupling to reduce the harmonic distortion of a capacitive transducer

Publications (1)

Publication Number Publication Date
WO1994023547A1 true WO1994023547A1 (en) 1994-10-13

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PCT/DK1994/000142 WO1994023547A1 (en) 1993-04-07 1994-04-06 A method and a coupling for reducing the harmonic distortion of a capacitive transducer

Country Status (5)

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EP (1) EP0694246A1 (en)
JP (1) JPH08509327A (en)
AU (1) AU6534694A (en)
DK (1) DK170196B1 (en)
WO (1) WO1994023547A1 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19548041A1 (en) * 1994-12-28 1996-07-11 Yoshiro Tomikawa Driver for electrostatic transducer for use with piezoelectric oscillator
DE19600689A1 (en) * 1995-01-11 1996-07-25 Yoshiro Tomikawa Capacitive component reduction circuit e.g. in electrostatic converter
EP1426772A1 (en) * 2001-09-06 2004-06-09 Sumitomo Metal Industries, Ltd. Impedance measuring circuit, its method, and capacitance measuring circuit
EP1464967A2 (en) * 2001-09-06 2004-10-06 Tokyo Electron Limited Potential fixing device and potential fixing method
DE10052196B4 (en) * 2000-02-15 2005-07-14 Mitsubishi Denki K.K. microphone unit
US7110560B2 (en) 2001-03-09 2006-09-19 Sonion A/S Electret condensor microphone preamplifier that is insensitive to leakage currents at the input
EP2317645A1 (en) * 2009-10-16 2011-05-04 Nxp B.V. Capacitive sensor
WO2018013571A1 (en) * 2016-07-11 2018-01-18 Knowles Electronics, Llc Split signal differential mems microphone
US11112276B2 (en) 2017-03-22 2021-09-07 Knowles Electronics, Llc Arrangement to calibrate a capacitive sensor interface

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3116366A (en) * 1959-08-18 1963-12-31 Arnold L Seligson Capacitive source signal generators
US4281221A (en) * 1978-07-12 1981-07-28 Societa Italiana Telecomunicazioni Siemens S.P.A. Condenser microphone
US4361735A (en) * 1977-08-24 1982-11-30 The Post Office Electret microphone circuit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3116366A (en) * 1959-08-18 1963-12-31 Arnold L Seligson Capacitive source signal generators
US4361735A (en) * 1977-08-24 1982-11-30 The Post Office Electret microphone circuit
US4281221A (en) * 1978-07-12 1981-07-28 Societa Italiana Telecomunicazioni Siemens S.P.A. Condenser microphone

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Vol. 7, No. 208, E-198; & JP,A,58 103 291 (MATSUSHITA DENKI SANGYO K.K.), 20 June 1983 (20.06.83), see the whole document. *

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19548041C2 (en) * 1994-12-28 1999-04-29 Yoshiro Tomikawa Driver device for an electrostatic converter device
DE19548041A1 (en) * 1994-12-28 1996-07-11 Yoshiro Tomikawa Driver for electrostatic transducer for use with piezoelectric oscillator
DE19600689A1 (en) * 1995-01-11 1996-07-25 Yoshiro Tomikawa Capacitive component reduction circuit e.g. in electrostatic converter
DE19600689C2 (en) * 1995-01-11 1998-02-12 Yoshiro Tomikawa Circuit for reducing a capacitive component in an electrostatic converter device
DE10052196B4 (en) * 2000-02-15 2005-07-14 Mitsubishi Denki K.K. microphone unit
US7039202B1 (en) 2000-02-15 2006-05-02 Mitsubishi Denki Kabushiki Kaisha Microphone unit
US7110560B2 (en) 2001-03-09 2006-09-19 Sonion A/S Electret condensor microphone preamplifier that is insensitive to leakage currents at the input
EP1464967A2 (en) * 2001-09-06 2004-10-06 Tokyo Electron Limited Potential fixing device and potential fixing method
EP1426772A4 (en) * 2001-09-06 2005-08-03 Tokyo Electron Ltd Impedance measuring circuit, its method, and capacitance measuring circuit
US7005865B2 (en) 2001-09-06 2006-02-28 Tokyo Electron Limited Circuit and method for impedance detection
EP1464967A4 (en) * 2001-09-06 2005-01-26 Tokyo Electron Ltd Potential fixing device and potential fixing method
EP1426772A1 (en) * 2001-09-06 2004-06-09 Sumitomo Metal Industries, Ltd. Impedance measuring circuit, its method, and capacitance measuring circuit
US7368920B2 (en) 2001-09-06 2008-05-06 Tokyo Electron Limited Potential fixing device and potential fixing method
CN100432682C (en) * 2001-09-06 2008-11-12 东京毅力科创株式会社 Potential fixing device and potential fixing method
EP2317645A1 (en) * 2009-10-16 2011-05-04 Nxp B.V. Capacitive sensor
CN102045630A (en) * 2009-10-16 2011-05-04 Nxp股份有限公司 Capacitive sensor
US8242840B2 (en) 2009-10-16 2012-08-14 Nxp B.V. Capacitive sensor
WO2018013571A1 (en) * 2016-07-11 2018-01-18 Knowles Electronics, Llc Split signal differential mems microphone
US10153740B2 (en) 2016-07-11 2018-12-11 Knowles Electronics, Llc Split signal differential MEMS microphone
US10523162B2 (en) 2016-07-11 2019-12-31 Knowles Electronics, Llc Split signal differential MEMS microphone
US11112276B2 (en) 2017-03-22 2021-09-07 Knowles Electronics, Llc Arrangement to calibrate a capacitive sensor interface

Also Published As

Publication number Publication date
AU6534694A (en) 1994-10-24
DK170196B1 (en) 1995-06-06
DK41593D0 (en) 1993-04-07
DK41593A (en) 1994-10-08
JPH08509327A (en) 1996-10-01
EP0694246A1 (en) 1996-01-31

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