WO1994010512B1 - Gas heater for processing gases - Google Patents
Gas heater for processing gasesInfo
- Publication number
- WO1994010512B1 WO1994010512B1 PCT/US1993/010532 US9310532W WO9410512B1 WO 1994010512 B1 WO1994010512 B1 WO 1994010512B1 US 9310532 W US9310532 W US 9310532W WO 9410512 B1 WO9410512 B1 WO 9410512B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gas
- chamber
- heater
- inlet
- diversion plate
- Prior art date
Links
- 239000007789 gas Substances 0.000 title abstract 4
- 238000010438 heat treatment Methods 0.000 claims abstract 2
- 239000002184 metal Substances 0.000 claims 3
- 239000007787 solid Substances 0.000 claims 3
- 239000011810 insulating material Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 abstract 1
Abstract
A heater (11) for heating processing gases used in semiconductor processing equipment; the heater (11) including a chamber (14) whose walls (17 and 18) are heated by a strip heater (29) whereby gases flowing through the chamber (14) are heated by said heated walls.
Claims
1. A gas heater comprising
a chamber defined by chamber walls having a gas inlet and a gas outlet;
a diversion plate in said chamber for increasing the heat exchange between said chamber walls and the gas flowing from said inlet to said outlet, said diversion plate separating said inlet and said outlet and having a solid portion directly opposite said inlet for diverting the gas flow entering said chamber toward said chamber wall between said inlet and said diversion plate and a perforated portion remote from said inlet for the flow of gas through said diversion piare from said inlet to said outlet; and
a heater adjacent the exterior of the wails of said chamber for heating the walls of said chamber to thereby heat gas flowing in the chamber between the inlet and the outlet.
2. A gas heater as in Claim 1 in which said chamber comprises two cup-shaped metal portions joined to said diversion plate.
3. A gas heater as in Claim 1 in which said gas inlet and outlet are connected to fittings, whereby the heater can be installed in a processing gas line.
4. A gas heater as in Claim 1 including a well shaped to receive a thermocouple extending into said gas outlet.
5. A gas heater as in Claim 1 including a housing formed of a thermally insulating material enclosing said heater.
6. A gas heater as in Claim 5 in which said housing includes two portions which are removable from said heater.
7. A gas heater comprising
a chamber including two cup-shaped metal walls and a diversion plate with the rims of the cup-shaped walls welded to the diversion plate, said diversion plate having a solid portion and a perforated portion,
a strip heater surrounding the chamber to heat the chamber walls, and a fitting welded to each of said cup-shaped metal walls for connecting the chamber in series with a processing gas line to cause the gas to flow through and be heated by the chamber walls,
said diversion plate separating said fittings, said solid portion of said diversion plate being positioned directly opposite one of said fittings for diverting the gas flow entering said chamber through said one of said fittings and saidperf orated portion being positioned remote from said one of said fittings for flow of the diverted gas through said diversion plate toward the other of said fittings.
8. A gas heater as in Claim 7 including a housing formed of a thermally insulating material enclosing said chamber and said heater.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP94900500A EP0666972B1 (en) | 1992-11-04 | 1993-11-03 | Gas heater for processing gases |
| DE69322975T DE69322975T2 (en) | 1992-11-04 | 1993-11-03 | GAS HEATER FOR PROCESS GAS |
| JP6511396A JPH08501020A (en) | 1992-11-04 | 1993-11-03 | Gas heater for process gas |
| KR1019950701790A KR0163256B1 (en) | 1992-11-04 | 1993-11-03 | Gas heater for processing gases |
| HK98114622A HK1014206A1 (en) | 1992-11-04 | 1998-12-22 | Gas heater for processing gases |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/971,490 US5377300A (en) | 1992-11-04 | 1992-11-04 | Heater for processing gases |
| US07/971,490 | 1992-11-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1994010512A1 WO1994010512A1 (en) | 1994-05-11 |
| WO1994010512B1 true WO1994010512B1 (en) | 1994-06-23 |
Family
ID=25518457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1993/010532 WO1994010512A1 (en) | 1992-11-04 | 1993-11-03 | Gas heater for processing gases |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5377300A (en) |
| EP (1) | EP0666972B1 (en) |
| JP (1) | JPH08501020A (en) |
| KR (1) | KR0163256B1 (en) |
| DE (1) | DE69322975T2 (en) |
| HK (1) | HK1014206A1 (en) |
| WO (1) | WO1994010512A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4300163C1 (en) * | 1993-01-07 | 1994-03-17 | Boellhoff Verfahrenstech | Electric through flow water heater for use in explosive area - has pressure tight encapsulation space around electric surface heating element in contact with water heater housing |
| US6200389B1 (en) | 1994-07-18 | 2001-03-13 | Silicon Valley Group Thermal Systems Llc | Single body injector and deposition chamber |
| AT404600B (en) | 1997-03-12 | 1998-12-28 | Voest Alpine Ind Anlagen | METHOD AND DEVICE FOR TREATING REDUCING GAS FOR REDUCING ORES |
| TWI220540B (en) * | 2003-07-18 | 2004-08-21 | Au Optronics Corp | Buffer of pressure gauge sensor used in dry etching reaction chamber |
| DE102012109546A1 (en) * | 2012-10-08 | 2014-04-10 | Ebm-Papst Mulfingen Gmbh & Co. Kg | "Wall ring for an axial fan" |
| EP2992123B1 (en) * | 2013-05-03 | 2018-10-10 | United Technologies Corporation | Cold spray material deposition system with gas heater and method of operating such |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE564986C (en) * | 1932-11-25 | Eloy Cignolo | Device for electrical heating of flowing gases | |
| US3338476A (en) * | 1965-10-24 | 1967-08-29 | Texas Instruments Inc | Heating device for use with aerosol containers |
| US3666918A (en) * | 1971-03-11 | 1972-05-30 | Patterson Kelley Co | Electric powered water heating system |
| US3968346A (en) * | 1973-06-01 | 1976-07-06 | Cooksley Ralph D | Method and apparatus for electrically heating a fluid |
| DE3434772A1 (en) * | 1984-09-21 | 1986-04-03 | Stihler Medizintechnik GmbH, 7000 Stuttgart | DEVICE FOR HEATING INFUSION AND TRANSFUSION SOLUTIONS |
| US4899032A (en) * | 1987-03-12 | 1990-02-06 | Siemens Aktiengesellschaft | Electric heating element utilizing ceramic PTC resistors for heating flooring media |
| DE9103209U1 (en) * | 1990-04-03 | 1991-06-13 | Geberit Ag, Jona, St.Gallen | Thermostatically controlled heating device for an under-shower of a water closet |
-
1992
- 1992-11-04 US US07/971,490 patent/US5377300A/en not_active Expired - Lifetime
-
1993
- 1993-11-03 WO PCT/US1993/010532 patent/WO1994010512A1/en active IP Right Grant
- 1993-11-03 KR KR1019950701790A patent/KR0163256B1/en not_active IP Right Cessation
- 1993-11-03 EP EP94900500A patent/EP0666972B1/en not_active Expired - Lifetime
- 1993-11-03 DE DE69322975T patent/DE69322975T2/en not_active Expired - Fee Related
- 1993-11-03 JP JP6511396A patent/JPH08501020A/en active Pending
-
1998
- 1998-12-22 HK HK98114622A patent/HK1014206A1/en not_active IP Right Cessation
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