WO1994002962A1 - Fermi threshold silicon-on-insulator field effect transistor - Google Patents

Abstract

A silicon-on-insulator (SOI) field effect transistor (FET) operates in the enhancement mode without requiring inversion by setting the device's threshold voltage to twice the Fermi potential of the thin semiconductor layer in which the transistor is fabricated. The FET, referred to as a Fermi Threshold SOI FET or Fermi SOI FET, has a threshold voltage which is independent of oxide thickness, channel length, drain voltage and substrate channel doping. The vertical electric field in the substrate channel becomes zero, thereby maximizing carrier mobility, and minimizing hot electron effects. The thin silicon layer in which the devices are formed is sufficiently thick such that the channel is not fully depleted at pinch-off. A high speed device, substantially independent of device dimensions is thereby provided, which may be manufactured using relaxed groundrules, to provide low cost, high yield devices. Temperature dependence of threshold voltage may also be eliminated by providing a semiconductor gate contact which neutralizes the effect of substrate contact potential. Multiple gate devices may be provided. An accelerator gate, adjacent the drain, may further improve performance.

Description

FERMI THRESHOLD SILICON-ON-INSULATOR

FIELD EFFECT TRANSISTOR

Field Of The Invention

This invention relates to field effect transistor devices fabricated with semiconductor or silicon-on-insulator technology, and more particularly to high speed silicon--on-insulator field effect

transistors having operational characteristics which are independent of device dimensions, operating

temperature and doping concentrations. Background Of The Invention

Field Effect Transistors (FET's) have become the dominant active device for Very Large Scale

Integration (VLSI) and Ultra Large Scale Integration (ULSI) applications, because the integrated circuit FET is by nature a high impedance, high density, low power device. Much research and development activity has focused on improving speed and density of FETs, and on lowering the power consumption thereof.

As is well known to those having skill in the art there are two types of FET devices: the Insulated Gate FET (IGFET) and the Junction FET (JFET). Most present day integrated circuit technology employs the IGFET because of its simplified construction for integrated circuit applications. An IGFET typically comprises source and drain regions in a semiconductor substrate at a first surface thereof, and a gate region therebetween. The gate comprises an insulator on the first substrate surface between the source and drain regions, with a gate electrode or contact on the insulator. A channel is formed in the semiconductor substrate beneath the gate electrode, and the channel current is controlled by a voltage at the gate

electrode.

In the most common configuration of an IGFET, an oxide layer is grown or otherwise formed on the first semiconductor surface, between the source and drain regions, and a metal or other gate electrode is formed on the oxide layer. This structure is commonly called a Metal Oxide Semiconductor Field Effect

Transistor (MOS or MOSFET). The terms MOS and MOSFET are now used interchangeably with IGFET to include devices in which the insulator is a material other than an oxide (for example a nitride), and the gate

electrode is a material other than metal (for example polysilicon). These terms will be used interchangeably herein.

Two types of channels may be provided in MOS devices. The first is referred to as an "induced channel", in which gate voltage induces a field in the substrate under the gate to thereby draw electrons (for a P-type substrate) into the region beneath the gate. As a result, this region changes conductivity type (e.g. P-type to N-type), and an induced channel is formed. The induced change of semiconductor material from one conductivity type to opposite conductivity type is called "inversion". Increasing gate voltage enhances the availability of electrons in the channel, so that an induced channel MOS device is referred to as operating in an "enhancement" mode.

The second type of channel is a "diffused channel" in which a channel having conductivity

opposite that of the substrate is formed beneath the gate electrode. In such a device current flows between source and drain even in the absence of gate voltage. Decreasing gate voltage causes current to decrease as the diffused channel is depleted of carriers.

Increasing gate voltage causes the gate current to increase as the diffused channel is enhanced.

Accordingly, a diffused channel MOS device may operate in "enhancement" or "depletion" modes.

Enhancement mode (induced channel) devices are preferred for digital integrated circuit

applications because these devices are off at zero gate voltage. Both enhancement and depletion mode devices have a threshold voltage associated therewith. The threshold voltage is the value of gate voltage needed to initiate device conduction. Threshold voltage is an important MOS characteristic and must be well

controlled to provide satisfactory integrated circuit devices.

Unfortunately, the threshold voltage of known MOS devices typically varies as a function of the oxide thickness, the length of the channel, drain voltage, and the substrate doping concentration. Since each of these parameters can vary dramatically from one integrated circuit to another, very strict

manufacturing tolerances (often referred to as

"groundrules") must be provided to ensure device uniformity. However, strict manufacturing ground rules lower device yields. Moreover, since device dimensions and doping levels become more difficult to control as the devices become smaller, increases in device density and operating speed are difficult to obtain.

The threshold voltage of conventional MOS devices also varies as a function of device

temperature. Unfortunately, device operating

temperature varies considerably from one integrated circuit to another, depending upon the application. In fact, operating temperatures vary considerably within an integrated circuit, depending upon the duty cycle of the individual devices. MOS devices must be designed to operate properly despite the variation in threshold voltage with temperature. As such, lower performance and lower speed must be specified to ensure proper operation at all operating temperatures.

Many techniques have been proposed in an attempt to control threshold voltage while maintaining acceptable process groundrules; however such techniques cannot fully overcome the inherent variability of threshold voltage in the conventional FET structure. Other attempts have been made to improve the basic structure of the FET to provide improved

characteristics. For example, a publication entitled A Normally-Off Type Buried Channel MOSFET For VLSI Circuits , by K. Nishiuchi et al. (IEDM Technical

Digest, 1979, pages 26-29) discloses a buried channel MOSFET that uses a bulk region as a conducting channel in contrast with the surface channel of a conventional device. Another publication entitled The Junction MOS (JMOS) Transistor - A High Speed Transistor For VLSI, by E. Sun et al. (IEDM Digest, 1980, pages 791-794) discloses a MOS device using a layered N-P P-junction structure beneath a MOS gate region. The art has heretofore not exhaustively investigated the origin of threshold voltage in FETs and the reasons for variation of threshold voltage with device characteristics.

Accordingly, the art has heretofore not provided an FET design which minimizes variations of threshold voltage by eliminating those characteristics which contribute to this variation.

Miniaturization of MOS devices for VLSI and ULSI designs has also created other problems. For example, short channel devices are increasingly prone to breakdown due to well known punch-through and impact ionization effects. In order to prevent such

breakdown, short channel devices have employed scaled down input (supply) voltage, for example, 3V instead of the standard 5V supplies heretofore employed. However, as is well known to those having skill in the art, decreasing supply voltage causes threshold voltage to become a greater fraction of the supply voltage, thereby reducing device speed and negating the

advantage of short channel devices.

Finally, as device density further increases, it has become more difficult to provide ohmic (i.e.

non-rectifying) contacts to these devices. Complex contact metallurgy schemes have been developed in an attempt to provide satisfactory, high density ohmic contacts. Complex contact metallurgy creates

manufacturing problems and cannot fully compensate for poor ohmic contacts themselves.

In an effort to improve the performance of FET devices, the art has also focused on Semiconductor-On-Insulator (SOI) technology. In SOI technology, the FET devices are formed in a thin monocrystalline semiconductor layer which is formed on an insulating layer. The insulating layer is typically formed on a substrate which may be silicon. In other words, rather than forming active devices in bulk semiconductor, the active devices are formed in a thin semiconductor on insulator layer. In the present state of the art, silicon is most often used for the monocrystalline semiconductor layer in which devices are formed.

However, it will be understood by those having skill in the art that other monocrystalline layers such as germanium or gallium arsenide may be used.

Accordingly, any subsequent references to silicon will be understood to encompass any semiconductor.

An SOI FET typically includes a source and drain region of a first conductivity type, typically extending the entire depth of the thin silicon film, and a channel region of opposite conductivity between the source and drain regions, with the channel region typically extending the entire depth of the silicon layer.

The first application of SOI technology was, silicon-on-sapphire. More recent efforts have been directed towards growing monocrystalline silicon on top of a silicon dioxide layer grown on a silicon wafer. See for example the publications entitled Ultra-High Speed CMOS Circuits In Thin SIMOX Films to Camgar et al. published in Volume 89 of IEDM, pp. 829-832 (1989) and Fabrication of CMOS on Ultrathin SOI Obtained by Epitaxial Lateral Overgrowth and Chemical-Mechanical Polishing to Shahidi et al. published in Volume 90 of IEDM, pp. 587-590, 1990. SOI technology has several potential advantages compared to bulk FET devices. For example, MOS fabrication processes in SOI are

compatible with and may be simpler than MOS fabrication processes in bulk silicon. In SOI technology, shallow source and drain regions can be easily obtained and source and drain capacity can be reduced below typical bulk values. Moreover, both P- and N- channel devices may be fabricated without requiring a contra doped tub implant which is necessary for bulk substrate devices. Also, because the devices are formed in a thin silicon layer on an insulating layer, latchup conditions are eliminated and isolation between devices is enhanced. Finally, avalanche breakdown is also eliminated below the drain and source diffusions.

Unfortunately, conventional SOI technology does have a number of problems. A major problem is the need to grow a high quality, monocrystalline silicon film on top of an insulator. Moreover, carrier

mobility in the channel region of SOI FETs is reduced from its bulk value due to the increase in the channel dopant concentration which is required to prevent punchthrough and which is needed to accommodate the depletion effects which are required to control the device pinch off properties. Moreover, the depth of the silicon film grown on the insulator must be shallow (i.e. on the order of a 1,000Å or less) in order to avoid a "kink" in the drain current versus voltage properties of the FET devices. The need for a thin silicon film requires high doping concentrations (on the order of 1E17 or greater) that results in lowering the effective carrier mobility in the channel region. Finally, threshold voltage of typical SOI devices is low, typically around 200mV. This low value renders SOI devices susceptible to noise induced errors in VLSI operation.

Summary Of The Invention

It is therefore an object of the invention to provide improved Silicon-on-Insulator (SOI) Field

Effect Transistor (FET) devices.

It is another object of the invention to provide improved SOI MOS FET devices.

It is yet another object of the invention to provide high speed SOI MOS devices.

It is still another object of the invention to provide high speed SOI MOS devices having a

threshold voltage which is independent of insulator thickness, channel length, drain voltage, substrate doping and temperature.

It is a further object of the invention to provide high density high speed SOI MOS devices which may be manufactured with relaxed ground rules to thereby increase device yields.

It is yet a further object of the invention to provide high density SOI MOS devices which operate at full supply voltage without the risk of breakdown due to punch through or impact ionization.

It is still a further object of the invention to provide high density ohmic contacts for high density SOI MOS devices. These and other objects are provided by a SOI FET device according to the present invention, which operates in the enhancement mode without requiring inversion, by setting the device's threshold voltage to twice the Fermi potential of the semiconductor

material. As is well known to those having skill in the art, Fermi potential is defined as that potential for which a semiconductor material has a probably of one half of being occupied by an electron.

Accordingly, the SOI FET device according to the present invention may be referred to as a Fermi

Threshold SOI FET or Fermi SOI FET.

It has been found, according to the invention, that when the threshold voltage is set to twice the Fermi potential, the dependance of the threshold voltage on oxide thickness, channel length, drain voltage and substrate channel doping is

eliminated. It has also been found, according to the invention, that when the threshold voltage is set to twice the Fermi potential, the vertical electric field at the first surface of the semiconductor substrate in the channel is minimized, and is in fact substantially zero. Carrier mobility in the channel is thereby maximized, leading to a high speed SOI MOS device with greatly reduced hot electron effects.

Stated another way, according to the invention it has been found that dependance of

threshold voltage on oxide thickness, channel length, drain voltage and doping level is a result of the voltage developed across the gate oxide layer which is necessary to establish inversion in conventional SOI MOSFET' s. According to the invention, by providing a threshold voltage equal to twice the Fermi potential, inversion is prevented, leading to a high speed device substantially independent of device dimensions.

For bulk formed Fermi-FETs it has been found that the above described Fermi-FET criteria may be met by forming a contra doped channel region having a carrier concentration or dopant density a times the dopant density of the substrate and having a channel depth Y₀ which is specified as:

where e_s is the dielectric constant of the semiconductor material (Farads/cm), q is the electric charge (1.6×10-

¹⁹C), and N_s is the substrate doping density.

According to the present invention, for SOI Fermi-FETs it has been found that the above described Fermi-FET criteria may be met by forming source and drain regions of first conductivity type in the thin silicon layer, preferably extending the depth of the silicon layer. A "channel substrate" of second

conductivity type is formed between the source and drain regions. A channel region having the first conductivity type is formed in the channel substrate, with the channel having a carrier concentration or dopant density α times the dopant density of the channel substrate and having a channel depth A which is specified as:

where N_a is the channel substrate doping density.

According to another aspect of the present invention, for the Fermi SOI FET it has been found that the thin silicon layer must have a minimum thickness in order to insure proper operation of the Fermi-FET and to insure that punchthrough between source and drain is prevented. In particular, the doping concentration within the channel substrate must be above a certain value, N_a, in order to prevent punchthrough. With this value of N_a the minimum thickness of D of the thin silicon layer must equal at least

where V_dd is the power supply voltage for the SOI FET. This minimum thickness ensures that the channel

substrate is not fully depleted during carrier

conduction when the drain is close to supply voltage V_dd. The pinch off mechanism thereby remains intact.

A relationship between the channel doping concentration and the minimum depth for the silicon layer of a conventional (non-Fermi) SOI device has also been found to be

This minimum depth for the conventional SOI device also ensures that the channel substrate is not fully depleted, and is contrary to the teachings of the prior art such as the aforementioned Shahidi et al. publication which states that the substrate channel should be fully depleted.

According to another aspect of the invention it has been found that the contact potentials (referred to as a "flat-band voltages") generated by conventional FET substrate and gate contacts may adversely effect the threshold voltage of SOI FET devices, in a manner not accounted for in previous FET designs. According to the invention it has been found that the FET gate contact may be selected to be a semiconductor having a conductivity type and dopant density which generates a gate contact potential which is equal and opposite to that of the substrate contact potential, thereby neutralizing the effect of flat-band voltages.

Dependence of threshold voltage on temperature is thereby eliminated. In order to neutralize the

substrate flat band voltage, the gate electrode is selected to be the same semiconductor as the substrate, having the same conductivity type and similar doping density as the substrate. In a preferred embodiment, when the substrate is monocrystalline silicon, the gate electrode is polysilicon.

Flat-band voltage compensation may be

employed to improve the performance of conventional FET's, to make P- and N-channel threshold voltages symmetric and less dependent upon temperature.

Moreover, since the threshold voltage of the SOI Fermi-FET is already independent of other device parameters, the use of flat-band voltage compensation further enhances the performance thereof.

The Fermi SOI FET of the present invention particularly lends itself to the use of multiple gate electrodes, for use in complementary MOS (CMOS) or other logic technologies which require connecting of transistors in series to achieve the desired logic function while maintaining essentially zero idle power. When multiple gate Fermi SOI FET devices are employed, it has been found that performance is improved when the gate immediately adjacent the drain is maintained at a full on value. This gate, referred to as an

accelerator electrode, reduces the threshold voltage for the remaining gate or gates in the multi-gate Fermi SOI FET device.

Brief Description Of The Drawings

Figures 1A-1D illustrate cross-sectional views of the Fermi-FET device of the invention of U.S. Patent No. 4,990,794 under various operating

conditions.

Figures 2A-2D are graphical representations of various device parameters of the invention of U.S. Patent No. 4,990,794, for the operating conditions of Figures 1A-1D.

Figures 3A-3B graphically illustrate gate voltage as a function of carrier density factor

according to the invention of U.S. Patent No.

4,990,794.

Figure 4A-4D illustrate cross-sectional views of a process for fabricating Fermi-FET devices

according to the invention of U.S. Patent No.

4,990,794.

Figures 5A-5C graphically illustrate drain current versus drain voltage for various values of gate voltage according to the invention of U.S. Patent No. 4,990,794.

Figures 6A-6B graphically illustrate drain current as a function of the channel implant factor for various values of gate voltage according to the

invention of U.S. Patent No. 4,990,794.

Figure 7 graphically illustrates junction depletion for Fermi-FET devices of the invention of U.S. Patent No. 4,990,794.

Figure 8 illustrates a cross-sectional view of an FET having source and drain subdiffusion regions according to the invention of U.S. Patent No.

4,990,794.

Figures 9A-9F graphically illustrate maximizing avalanche and punch-through breakdown voltages according to the invention of U.S. Patent No. 4,990,794.

Figures 10A-10D illustrate cross-sectional views of flat-band voltage compensation according to the invention of U.S. Patent No. 4,990,794.

Figures 11A-11C graphically illustrate the use of a dose factor to vary the threshold voltage of the Fermi-FET of the invention of U.S. Patent No.

4,990,794.

Figures 12A-12B illustrate cross-sectional views of effective channel length of FET's according to the invention of U.S. Patent No. 4,990,794.

Figure 13 graphically illustrates channel penetration into the drain depletion region according to the invention of U.S. Patent No. 4,990,794.

Figure 14 graphically illustrates variation of threshold voltage with distance according to the invention of U.S. Patent No. 4,990,794.

Figure 15 illustrates a cross-sectional view of a Fermi-FET according to the invention of U.S.

Patent No. 4,990,794, including an accelerator

electrode.

Figures 16A-16B illustrate cross-sectional views of multiple gate Fermi-FET's according to the invention of U.S. Patent No. 4,990,794.

Figure 17 illustrates a cross-sectional view of a Silicon-on-Insulator (SOI) FET according to the present invention.

Figure 18 illustrates a cross-sectional view of a Fermi SOI FET according to the present invention.

Figure 19 is a graphical representation of the minimum channel substrate doping concentration as a function of the channel length according to the present invention.

Figure 20 graphically illustrates the minimum depth of the silicon layer as a function of channel length and Fermi FET channel factor α according to the present invention.

Figure 21 graphically illustrates the nominal depth of the Fermi channel as a function of channel length and Fermi FET channel factor α according to the present invention.

Figure 22 graphically illustrates a nominal value of the vertical electric field function of channel length according to the present invention.

Figures 23-26 illustrate cross-sectional views of the Fermi SOI FET of the present invention under various operating conditions.

Figures 27A-27C illustrate the drain current properties of an N-channel Fermi FET, Fermi SOI FET and a MOSFET respectively.

Figures 28A-28C illustrate the drain current properties of a P-channel Fermi FET, Fermi SOI FET and MOSFET respectively.

Figure 29 graphically illustrates SOI FET channel substrate depth versus channel substrate doping and maximum drain voltage according to the present invention.

Detailed Description Of The Invention

The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which a preferred embodiment of the invention is shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiment set forth herein; rather, applicant provides this embodiment so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. For ease of illustration the thickness of layers has been exaggerated. Like numbers refer to like elements throughout. It will be

understood by those having skill in the art that the Fermi-FET of the present invention is applicable to both P and N channel devices and to silicon, germanium and other semiconductor materials.

FET Design Analysis

Before describing the Fermi-FET of the invention of U.S. Patent No. 4,990,794, an analysis of FET design relationships will be developed. Throughout this specification, the terms MOS, FET, MOSFET and IGFET will be employed as synonyms to describe a field effect transistor structure having an insulated gate, wherein the insulation may be, but is not necessarily, an oxide, and wherein the gate may be, but is not necessarily, metal.

An induced channel MOSFET requires a gate voltage to induce an inversion layer of minority carriers that act to conduct current between the source and drain. A gate threshold voltage condition is achieved when the surface potential ∅_s of the

semiconductor substrate, below the gate, is elevated sufficiently to bend the intrinsic energy band of the semiconductor material, down below the Fermi level.

This rise in substrate surface potential is the result of increasing gate voltage V_g to induce a depletion layer, with depth W_do, in the substrate below the gate.

Using Poisson's equation, the potential rise across the depletion layer is ∅_s = (q/2e_s) (N_aW_do ²), where q is the electron charge in Coulombs, e_s is the

dielectric constant of the semiconductor material (Farads/cm), N_a is the substrate acceptor concentration level, and W_do is the depletion depth. Depletion depth W_do is defined as W_do = √(2e_s ∅_s/(qN_a)). The electric field at the substrate surface is E_s = √(2∅_sqN_a/e_s).

When the surface potential ∅_s reaches twice the Fermi potential 2∅_f, the ionization concentration N_p, within a p- substrate, becomes equal to the substrate acceptor concentration N_a. Surface potential ∅_s need only be increased slightly above threshold voltage 2∅_f in order to achieve inversion.

Unfortunately, charge is accumulated on the gate as a result of creating the inversion layer. The density of this gate charge is qN_aW_do Coulombs per cm². Gate threshold voltage V_t is the sum of the voltage developed across the gate oxide layer and the rise in substrate potential 2∅_f. The gate oxide field is qN_aW_do/e_i and the voltage V_ox is qN_aW_do/C_i where C_i = e_i/T_ox and T_ox is the oxide thickness. Therefore,

Where;

∅_s = 2∅_f ,

L* = Effective channel length, as described in detail below,

V_cs = substrate contact potential, and

V_cg = gate contact potential.

When voltage is applied to the drain and source regions, a potential V(X) is introduced at position X along the channel between the drain and source. This potential is described in detail below. The oxide threshold voltage term in Equation 1

increases with voltage V(X) in accordance with Equation 2 :

Thus, the threshold voltage contribution due to gate charge Equation 2 is complex and causes

difficulties in both digital and analog circuit design and device fabrication. In particular, high speed short channel C-MOS logic design is severely

compromised by this threshold voltage term. Threshold voltage sensitivity to substrate surface doping also hinders corrective measures needed to eliminate

drain-source punch-through in conventional short channel MOSFET devices.

The Fermi - FET Concept

According to the invention of Application

Serial No. 07/318,153 Fermi-FET design is achieved by a grounded source FET device devoid of the complex threshold voltage term shown in Equation 1 above. The basic N-Channel Fermi-FET is illustrated by Figure 1A. A P-channel Fermi-FET is fabricated the same way but with opposite conductivity materials.

Referring now to Figure 1A a Fermi-FET 10 according to the invention of Application Serial No. 07/318,153 is fabricated in a semiconductor substrate 11 having an acceptor concentration N_a. It will be understood by those having skill in the art that semiconductor substrate 11 may be silicon, gallium arsenide or other semiconductors, and may be an

epitaxial or "tub" region formed in a semiconductor substrate. Source region 12 and drain region 13 are formed in the semiconductor substrate. Source and drain regions 12 and 13 are of opposite conductivity from substrate region 11 and have a higher donor concentration (i.e. they are doped N_d ⁺). Source

electrode 19 and drain electrode 20 form external contacts for these regions. A thin gate oxide layer 14 is formed on the surface of substrate 11. A gate contact is formed on the gate oxide 14. In the

embodiment illustrated gate contact comprises a

polysilicon gate contact 18 and a metal gate electrode 23 for reasons described more fully below. A substrate contact region 21 is formed within the semiconductor substrate 11. Contact 21 is typically of the same conductivity as substrate 11 but more highly doped (e.g. it is doped N_a ⁺). Finally, field oxide regions 17 isolate devices from one another.

According to the invention of U.S. Patent No.

4,990,794, a channel having the same conductivity type as the source and drain regions and opposite

conductivity to the substrate is formed for example by implanting through thin gate oxide layer 14. The channel has a depth Y_o and a donor doping level N_d. The depth and doping and channel are critical for forming the Fermi-FET device of the present invention. In one embodiment, the substrate is a P-type substrate while source drain and channel regions are N-type.

It will be shown according to the invention of U.S. Patent No. 4,990,794 that when channel 15 has the proper doping level and depth that a depletion region 16 is formed in substrate 11 and the channel 15 is completely self -depleted as shown in Figure 1A.

Still referring to Figure 1A, the basic criteria for an N-channel Fermi-FET will now be

described. The criteria for P-channel devices are the same except donor and acceptor ion types are

interchanged. The nominal implant depth Y_o of the channel is governed by Equation 3A and the effective donor concentration N_d ^* is defined by Equation 3C.

Given proper dose and depth, the implanted channel 15 is completely self-depleted as shown in Figure 1A. Complete channel self-depletion is the result of electron and hole diffusion across the junction between the channel 15 and the substrate 11. This carrier diffusion process is required to establish a constant Fermi potential across that P-N junction region. There are critical conditions for the implant depth and dose. The entire implanted channel with depth Y_o, (Equation 3A), must be depleted of mobile electrons when the electric field E_o at the

channel-substrate junction reaches the value needed to terminate carrier diffusion across that junction. The total voltage V_o developed across the depleted

substrate 16 and channel region 15 (Equation 3B) raises the substrate surface potential ∅_s to twice the Fermi potential 2∅_f, if and only if N_p ^* = N_a. In general, N_s defines the substrate doping density and N_c, the channel doping density. This threshold voltage condition 2∅_f is achieved without introducing charge on the gate. This condition is true since the normal component of

electric field, due to depletion effects, is zero at the surface of the semiconductor below the gate. The total threshold voltage expression for the Fermi-FET is therefore;

Where V_s = Source voltage. , and

α = N_p*/Na

Given the special condition N_p* = N_a, i.e. α=1, the correct implant depth (Equation 3A) becomes

Where:

e_s = dielectric constant of silicon,

N_s = Acceptor concentration of substrate

(N-channel), and

N_i = Intrinsic carrier concentration. Table 1 lists nominal values for implant depth Y_o in silicon as a function of substrate doping for α=1. The correct implant depth is subject to the condition N_d* = N_as for an N-channel device or N_a* = N_ds for a P-channel device, Subscript s denotes

substrate.

The Fermi-FET design of the invention of Application Serial No. 07/318,153 achieves the

objective of eliminating the complex oxide threshold voltage first term (Equation 1) typical of conventional enhancement MOSFET's. It will be shown subsequently that fabrication of the Fermi-FET is relatively simple and is applicable to long, medium, and short P- and N-channel devices. The benefits of the Fermi-FET are: high manufacturing yield, high speed circuit

capabilities (low giga-hertz range), control of

punch-through and avalanche breakdown, minimization of hot electron effects, and greatly simplified user design groundrules for both analog and digital

circuits. Fermi - FET Operation

Referring again to Figures 1A through Fig 1C, as gate voltage V_g is increased above threshold voltage V_t, electric field and potential increase at the substrate surface directly below the gate. This rise in surface electric field and potential occurs as mobile electrons fill the holes in the depleted implant channel region 15. The holes in the depleted channel 15 are uniformly filled as gate voltage is increased above threshold. The half full and full channel conditions are illustrated by Figures IB and Figure 1C respectively. For each hole filled in the depleted channel 15, a unit of positive charge (1.6×10^-19

Coulombs) appears on the gate electrode in order to conserve charge. Filling the empty donor sites of the implanted channel with electrons allows conduction current to flow between the source and drain. The channel is totally charge neutral when all of the empty holes are filled with electrons. When charge

neutrality occurs, the volume density of conduction carriers corresponds to the donor concentration N_d. Increasing gate voltage to induce the full channel value, V_g ^*, fills the entire depleted channel region with electrons.

The full channel condition is illustrated by

Fig. 1C. When "full" channel conditions are achieved, positive charge density on the gate electrode is uniform and has the value qN_aY_o Coulombs/cm² for α=1. The electric field developed across the oxide layer is, E_ox = (qN_aY_o)/e_i and the electric field at the surface of the semiconductor and across the "full" implanted region is (qN_aY_o)/e_s since ∇ · D = 0 there and in the oxide layer. The oxide potential is V_ox = (qN_aY_oT_ox)/e_i. Gate voltage V_g*, at "full" channel conditions, is the sum of the oxide potential V_ox and potential ∅_s

developed across the channel 15 and the ionized region of the substrate below the channel. Referring now to Figure ID, when gate voltage V exceeds the "full" channel value V_g* excess charge (mobile carriers) becomes available in the implanted channel region 15. These excess carriers account for the increase in channel current in proportion to gate over-drive voltage, V_g>V_g*. A unit of positive charge also appears on the gate electrode for each excess electron created in the channel.

Figures 2A-2D illustrate the charge distribution, electric field, and potential for the "empty", "half-full", "full", and "enhanced" channel conditions illustrated in Figures 1A-1D respectively, for the case N_d ^* = N_a. These conditions depend on gate voltage V_g.

Referring to the "full" channel condition,

(Figure 2C) gate to substrate voltage V_g ^*, is given by:

V_g* = V_ox + V_ch + V_j ( 6)

Where in general :

For the special case, N_d* = N_a, the following relations apply:

V_ch = EY_o = 2∅_f (8B)

V_j = ∅_f (8D)

Φ_s = 2∅_f

(8E)

Y_no = Y_o (8F) (8G) Y_po = Y_o

Substituting the appropriate Equation 8A-8H into Equation 6 , the following relationship is

obtained:

Accordingly, for the depleted (empty) channel conditions, (Figure 2A), the potential rise ∅_s at the first semiconductor surface, under the gate, is ∅_s = 2∅_f volts given N_d ^* = N_a and no source voltage. Therefore the potential applied to the gate electrode must exceed the surface potential (∅_s = 2∅_f) in order to start filling the depleted channel with conduction electrons. The gate threshold voltage is ∅_s in general (Equation 7F) and 2∅_f in particular when N_d ^* = N_a. This is a very simple criterion for threshold voltage when compared to the threshold criteria for a conventional MOSFET. The nominal grounded source Fermi-FET configuration

completely eliminates the oxide voltage term (Equation 10) characteristic of conventional MOS device

threshold voltage. (Note that the origin of L^* will be described in detail below):

The nominal Fermi-FET has a threshold voltage expression given by Equation 4 that includes effects of source voltage V_s. Elimination of the conventional MOSFET oxide threshold voltage component significantly enhances Fermi-FET performance. This is a result of eliminating threshold voltage dependance on channel length, oxide thickness, drain voltage, and the doping level of the semiconductor surface.

One method of preventing punch-through in short channel devices is to simply increase substrate doping. Threshold voltage for the Fermi-FET does not include the complex term Equation 10 and therefore low threshold voltage can be maintained virtually

independent of substrate doping. Substrate doping affects threshold voltage in the Fermi-FET only

slightly due to the logarithmic dependence of the Fermi potential term∅_f . A method for further enhancing the resistance to punch-through will be described below.

Referring to Equation 9, the net gate voltage

V_g ^* - V_t required to fill the I-channel with conduction electrons may be obtained. Since threshold voltage is 2∅_f, it follows that:

When drain voltage V_d is increased, (source at ground potential), a critical drain ("pinch-off") saturation condition is attained (described in detail below) for a given gate voltage V_g. Carrier concentration within the conduction channel diminishes to a minimum value at the drain. When "pinch-off" is achieved, drain current saturates. The saturation condition is illustrated by Figure 1D.

The effects in the channel when gate voltage

V_g exceeds the "full" channel value V_g ^* will now be described. This analysis assumes an N-channel Fermi-FET device with source and substrate voltage at ground potential. When gate voltage V_g > V_g ^*, channel

conduction capability is enhanced by increasing the volume density of conduction electrons N ^* in the channel 15 above the donor value N_d ^* = N_a. See Figure 2D. Gate oxide potential V_ox is proportional to the total channel charge qN_p ^*Y_o where N_p ^* is the total volume concentration of conduction carriers in the enhanced channel. Since the implanted channel is N-type, the Fermi level is already close to the conduction band. The conduction energy band need not be bent down very far to increase the number of conduction carriers in the implanted channel region. The increase in surface potential ∅_s needed to realize a carrier concentration N_p ^* greater than N_a is ∅_s = KT/q ln(N_p ^*/N_a). An

increase in surface potential of 18 mv is required for the case where N_p ^* = 2N_a.

In view of the Fermi-FET structure, it follows that most of the enhanced carrier concentration (N_p ^* - N_a) will be confined to a maximum depth

prescribed by depth Y_o of the implanted channel, because the ionized P-substrate region 16, located below the channel implant region 15, has a maximum potential ∅_f at the junction between the implanted channel and the substrate when N_d* = N_a. The remote location of the ionized substrate region from the surface and the junction potential ∅_f results in a carrier concentration near the intrinsic value N_i = 1.5×10¹⁰ cm^-3 for silicon. Thus a majority of the gate enhanced excess carrier concentration (N_p ^* - N_a) is located below the surface of the substrate and resides within the critical implant depth Y_o. If gate voltage V is less than N_p ^*, the implanted channel is only partially filled, a factor F ≤ 1 applies. For enhanced channel conditions, F > 1. For the general condition 0 < F:

where

F = N_p /N_a ,

V_ch = ∅_f(1+F), and

V_j = ∅_f.

From Equation 12 it may be seen that V_g = V_t = 2∅_f when the channel filling factor F = N_p ^*/N_a = 0.

Evaluating Equation 12 for the full channel condition, F = 1, under the following conditions.

Na = 5X10¹⁶ cm^-3

∅_f = .39 volts

e_s = 1X10^-12 Farads/cm

q = 1.6X10^-19 Coulombs

C_i = 1.5X10^-7 Farads/cm²

Y_o = 9.87X10^-6 cm

F = 1.0

the following results are obtained:

V_g ^* = 1.69 Volts = 4.34∅_f

V_g ^* - V_t = .916 Volts = 2.43∅_f

V_t = 2∅_f= .78 Volts

Figure 3A is a plot of Equation 12 as a function 0 ≤ F ≤ 1 for different values for acceptor concentration N_a. Figure 3B is a plot of gate voltage V_g as a function of F in the range 0 ≤ F ≤ 10 and different substrate acceptor concentration N_a. When F > 1, excess carriers exist in the implanted channel and account for

increased channel current. The linear behavior of V with F > 1 should be noted. This linear relationship is a distinct and useful advantage of the Fermi-FET.

Equations 13A - 13D present a comparison of threshold voltage for a conventional MOSFET with the ideal Fermi-FET and the deep and shallow versions resulting from errors introduced during channel implant. 0

V_t = 2∅_f Nominal Fermi-FET ( 13B)

Method of Fabricating the Fermi-FET

Referring now to Figure 4, a method of fabricating a Fermi-FET according to the invention of Application Serial No. 07/318,153 will now be described. In the method illustrated herein, a P-type polysilicon gate is provided for an N-channel Fermi-FET. Conversely, an N-type polysilicon gate is

provided for a P-channel Fermi-FET. As described in detail below metal-semiconductor contact potentials may significantly influence threshold voltage of any FET including the Fermi-FET. To avoid this extraneous variation in threshold voltage, a polysilicon gate is provided.

Referring now to Figure 4A. A portion of p-substrate region 11 having acceptor concentration N_a is illustrated. This substrate region may be formed by implanting and driving in a dopant in an unmasked area of an intrinsic 4μ silicon epitaxial layer grown on a silicon, sapphire or other substrate. Thick and thin oxide layers 17 and 14 respectively are also shown. All P-channel devices are covered with photo-resist material (not shown) while low energy N-type ions

(phosphorous or arsenic for example) are implanted in the direction shown by arrows 26 through the thin oxide layer 14, into the surface of the P-doped substrate. This implant provides an N-type channel region 15 with proper depth Y₀. The implant dose must also be

controlled such that the average doping value achieves the condition; N_d ^* = αN_a, where N_d ^* is defined by

Equation 3C. P-channel implant follows similar

procedures except opposite ions are implanted. This implant step is critical for both the P- and N-channel devices. Care must be exercised to achieve the proper implant energy and dose.

Referring to Figure 4B, after appropriate masking and implanting both P- and N-channels 15 through the thin oxide region 14, all photoresist material is removed and intrinsic polysilicon 18 is deposited over the entire surface of the wafer.

It will be understood that the wafer may contain both P- and N-channel areas. While these figures show only N-channel areas, the P-channel areas may be formed as follows: Regions of the wafer

containing intended P-channel devices, for example, may be masked with photoresist material leaving polysilicon exposed that overlays the N-channel devices. P-type ions (e.g. Boron) may then be implanted into the exposed polysilicon layer converting intrinsic

polysilicon to P⁺⁺ type. Then the photoresist masking material, covering the P-channel devices, may be removed and a new masking layer of photoresist material may be deposited over all N-channel devices. N-type ions are then implanted into the exposed polysilicon overlaying the P-channel devices, converting those polysilicon regions to N⁺⁺ type. The energy of both doping implants must be low enough for the given thickness of the polysilicon layer, not to penetrate the full depth of that layer. The next step in the process is to remove the photoresist material. This step is then followed by covering the entire exposed polysilicon surface with photoresist material. The depth must be thick enough to block subsequent

implantation from penetrating non-etched regions of this barrier layer.

Referring now to Figure 4C, a self-aligned poly gate mask 27 is applied next. This gate mask is aligned to lie in the center region of the implanted P-and N-channel devices, and provides the definition for the polysilicon gate. Next all of the exposed barrier and polysilicon layers are etched away leaving the appropriately doped polysilicon gate region with an overlaying photoresist layer as shown in Figure 4C.

Referring now to Figure 4D, photoresist material is then applied to mask the P-channel devices while drain and source contact regions 12 and 13 respectively and optional field reducing regions 28 and 29 are implanted in the N-channel devices. The

functions of field reducing regions 28 and 29 will be described below. Then this photoresist material is removed from the P-channel devices and new material applied over the N-channel devices. The

P-type source and drain regions of the P-channel devices are then implanted. The photoresist used to mask the N-channel devices is then removed and the source and drain regions of the P-channel devices are formed. An oxidation step may then form oxide on the side-walls of the polysilicon gates previously defined and to anneal the implants. This oxidation also thickens the oxide layer over the source and drain regions. The remaining steps in the process need not be described here since they comprise well known and conventional steps for fabricating FET devices. These process steps include removal of oxide over the source, drain, gate, and substrate contact regions, and the application of surface passivation and contact metal to these exposed regions.

An alternative method of fabricating Fermi-FETs according to the invention of Application Serial No. 07,318,153, using in-situ poly-gate doping will now be described. According to this method, after appropriate masking and implanting both P- and N- channels through the thin oxide region, all photoresist material is removed and in-situ P⁺ doped polysilicon layer is deposited over the entire surface of the wafer as shown in Figure 4B. The dopant density of the P⁺ polysilicon should be high enough to permit Ohmic-metal contact to it's surface. P-channel areas may be formed in these same processes as follows. Regions of the wafer containing intended N-channel devices are masked with photo-resist material leaving polysilicon exposed that overlays the P-channel devices.

N-type ions such as phosphorous or arsenic are then implanted into the exposed polysilicon layer converting the in-situ doped P⁺ poly-silicon to N⁺ type. The dopant density of the N-polysilicon should be high enough to permit Ohmic-metal contact to it's surface.

Then the photo-resist masking material, covering the N-channel devices, is removed. The energy of the doping implant must be low enough for the given thickness of the polysilicon layer, not to penetrate the full depth of that layer. A subsequent anneal activates and homogenizes this implant concentration. The next step in the process is to remove the

photo-resist material. This step is then followed by covering the entire exposed polysilicon surface with photoresist material. The depth of this barrier must be thick enough to block subsequent implantation from penetrating non-etched regions. The self-aligning poly gate mask is applied next. The remaining steps are the same as previously described.

Fermi-FET Channel Doping Considerations

The effects of channel implant concentration N_c = αN_s has a significant effect on drain current properties of the Fermi-FET device. Pinch-off voltage has already been described for the special case where α=l. This restricted the implant concentration

(Equation 3C) to equal the substrate concentration with a critical depth characteristic of that condition.

Below, the general expression for pinch-off Voltage V for α in the range 1>α>1 is provided (Figure 6).

Computer plots of n-channel devices are also presented for N_a=1e¹⁷ and α = 0.2, 1.0, and 5.0 (Figure 5).

Referring to these figures, it will be seen that

Fermi-FET devices with low pinch-off voltage are attained when α>l. A preferred value is α=2. This value for α leads to high transconductance and low saturation drain conductance for sub-micron channel length devices.

The general expression for pinch-off voltage is as follows:

where

V_t =∅_s

Referring now to Figure 5A, a plot of gate voltage as a function of drain current and drain voltage for channel length of 1μm, μ_o = 750, N_a = 1×10¹⁷, T_ox = 200Å, and α = 0.2 is provided. Gate voltage is shown in steps of 0.5V, starting at 0V. Figure 5B presents the same series of plots under the same conditions except that α=1.0. Figure 5C presents the same series of plots for α=5.0.

The computer generated plots of Figure 6 illustrate the influence of channel implant factor a on the rising current (low drain voltage) property of the Fermi-FET device. Figure 6A illustrates drain current as a function of channel implant factor α with V_d=1V, L=0.5μ, Z=3μ and 1 Volt per step for gate voltage, N_a=5×10¹⁶, μ_oo=1200, E_i=2.5×10⁵V/cm. Figure 6B shows drain current as a function of channel implant factor α with V_d=.5V, L=0.5μ, Z=3μ, 1 Volt per step for gate voltage, N_a=5×10¹⁶, μ_oo=1200, E_j=2.5×10⁵V/cm. It is apparent that most of the change occurs when α=N_c/N_s < 2. i.e.. Drain resistance decreases with increasing α . N_c is the implanted channel impurity concentration and N_s represents the substrate impurity concentration, Ions/cm³. Accordingly, in designing Fermi-FET devices, one should strive to use a channel implant factor α of about 2.0.

Figure 7 illustrates the junction between the implanted channel 15 and the substrate 11 of Figure 1A. The peak electric field E₀ and potential ∅₀ are shown at the stochastic junction between the implant and the substrate. The depletion depth developed in the substrate is Y and the depleted implant depth is defined as Y_n. Since

therefore

∅_o may be expressed In terms of surface potential ∅_s. From Figure 7 the following is obtained:

Substituting for E_o:

Based on the definition of ∅_o the following is obtained :

Similarly

Now, if the implant concentration varies in depth N_d(Y), then:

Multiplying Equation 24 top and bottom by Y_n

The last integral in Equation 25 represents an average value. Thus,

Accordingly, the necessary conditions for the channel implant at depth Y_n are;

After an anneal process depth spreading may be expected, so that

The integrals of Equations 28 and 29 must be the same since charge is conserved. Therefore,

Y_nN_a = Y'_n N_p*' (30)

The depth of the depletion region in the substrate, Y remains the same, before and after the anneal, since the total implant charge is unaltered.

Tables 2 and 3 illustrate values of implant channel depth Y_o in cm for various values of α and N_a.

TABLE 2

α = N_c/N_s Y_o@N_a=1×10¹⁶ Y_o@N_a=1×10¹⁷

1.0000000 2.0876457e-05 7.1460513e-06

1.2500000 1.7677658e-05 6.0474366e-06

1.5000000 1.5360821e-05 5.2522975e-06

1.7500000 1.3597864e-05 4.6475990e-06

2.0000000 1.2207786e-05 4.1710276e-06

2.2500000 1.1081721e-05 3.7851283e-06

2.5000000 1.0149919e-05 3.4659164e-06

2.7500000 9.3654684e-06 3.1972686e-06

3.0000000 8.6955825e-06 2.9679200e-06

3.2500000 8.1166127e-06 2.7697490e-06

3.5000000 7.6110519e-06 2.5967449e-06

3.7500000 7.1656491e-06 2.4443597e-06

4.0000000 6.7701829e-06 2.3090859e-06

4.2500000 6.4166374e-06 2.1881738e-06

4.5000000 6.0986353e-06 2.0794361e-06

4, .7500000 5.8110371e-06 1.9811105e-06

5.0000000 5.5496537e-06 1.8917608e-06

5.2500000 5.3110354e-06 1.8102046e-06

5.5000000 5.0923150e-06 1.7354593e-06

5, .7500000 4.8910894e-06 1.6667014e-06 TABLE 3

α = N_c/N_s Y_o2N_a=3×10¹⁶ Y_o@N_a=6×10¹⁶

0.50000000 2.0226885e-05 1.4648398e-05

0.75000000 1.5399139e-05 1.1148451e-05

1.0000000 1.2537030e-05 9.0743104e-06

1.2500000 1.0612724e-05 7.6801600e-06

1.5000000 9.2194980e-06 6.6709817e-06

1.7500000 8.1596633e-06 5.9034214e-06

2.0000000 7.3241990e-06 5.2984395e-06

2.2500000 6.6475555e-06 4.8085218e-06

2.5000000 6.0877463e-06 4.4032386e-06

2.7500000 5.6165406e-06 4.0621323e-06

3.0000000 5.2142104e-06 3.7709088e-06

3.2500000 4.8665300e-06 3.5192616e-06

3.5000000 4.5629693e-06 3.2995624e-06

3.7500000 4.2955597e-06 3.1060392e-06

4.0000000 4.0581550e-06 2.9342402e-06

4.2500000 3.8459362e-06 2.7806752e-06

4.5000000 3.6550694e-06 2.6425677e-06

4.7500000 3.4824655e-06 2.5176806e-06

5.0000000 3.3256069e-06 2.4041908e-06

5.2500000 3.1824202e-06 2.3005973e-06

Controlling Punch-throuoh and Avalanche Breakdown Voltage

There are two voltage breakdown phenomenon that plague the success of short channel FET

technology. Punch- through occurs when the depletion boundary surrounding the drain touches the depletion boundary surrounding a grounded source. This

condition causes injection to occur at the

source-substrate junction. Impact ionization occurs when drain voltage reaches a value that stimulates the generation of electron-hole pairs at the junction between the drain diffusion and substrate. Electron-hole pair generation gives rise to an avalanche

break-down mechanism that produces a rapid increase in drain current. Substrate current flows when avalanche breakdown occurs in support of the increase in drain current.

According to the invention of U.S. Patent No. 4,990,794, substrate dopant level and the

subdiffusion - drain implant doping factor K_d, may be used simultaneously to control both voltage breakdown mechanisms.

Referring now to Figure 8 an FET structure having subdiffusion regions to minimize punch-through and avalanche breakdown is shown. P-doped substrate 11 has an acceptor concentration N_a. Source and drain regions 12 and 13 respectively are heavily doped N-type regions. N-doped channel 15 has doping concentration N_d. In a preferred embodiment channel 15 meets the requirements of a Fermi-FET Equation 3A, although a conventional FET may also be employed. Associated with source 12 and drain 13 are source and drain

subdiffusion regions 28 and 29 respectively, having donor doping concentrations N_d = K_dN_a. It will be understood by those having skill in the art that punch-through and avalanche breakdown are more likely to occur at the drain rather than the source, so that a drain subdiffusion 29 alone may be employed.

The value of the subdiffusion implant doping factor K_d will now be described. Increasing

punch-through break-down requires raising substrate doping N_a. On the other hand, break down voltage due to impact ionization is inversely dependant on substrate doping. The solution to this dilemma is to control the dopant concentration K_d of the subdiffusion region,

Figure 8, in the vicinity of the substrate such that the peak field crossing the substrate to subdiffusion junction is minimized for a given drain voltage. The ionization field of approximately 3×10⁵ Volts per cm is eventually reached for some drain voltage. The object is to operate Fermi-FET devices below this field value with as high a drain voltage as possible. Equation 33 below describes avalanche break-down as a function of the ionizing field E_i, substrate doping N_a, and

Diffusion dopant factor K_d.

Equation (34) describes breakdown voltage V due to the punch-through mechanism. The dependance of these breakdown mechanisms on substrate doping have opposite effects. One voltage increases while the other decreases. Maximum substrate doping occurs when

Equations 34 and 35 are equal for a given subdiffusion concentration factor K_d. The drain sub-diffusion concentration factor K_d, for dopant concentration below the depth of the implanted channel region of the

Fermi-FET, has a pronounced effect on drain breakdown voltage. This effect is illustrated in Figure 9A. Break-down is illustrated for several values for the concentration factor K_d. The nominal value E_i for silicon is 2.5×10⁵ V/cm at room temperature for the computed range of substrate doping _Na. Channel length L was 0.5μ. The minimum value for the subdiffusion implant depth W_no, (Figure 8), was computed assuming complete depletion at a drain voltage V_d =10V and 6V and is defined in Figure 9D and 9E respectively as a function of N_a and K_d.

Referring to Figure 9A, both punch-through (rising curve) and avalanche breakdown voltage

(falling curve) are shown as a function of K_d and N_a. Their intersection specifies the maximum substrate doping level N_a that simultaneously maximizes both breakdown voltages. Factor K_d is shown in the range 0.2 < K_d < 1. Higher breakdown voltage occurs when K_d=0.2. The channel is 0.5μ long. It is apparent that a breakdown of 20 Volts is quite possible for this channel length. Ionization field E_i= 2.5×10⁵ V/cm.

Referring to Figure 9B both punch-through (rising curve) and avalanche breakdown voltage (falling curve) is shown. Their intersection specifies the maximum substrate doping level N_a that maximizes both breakdown voltages. K_d is shown in the range 0.2 < K_d < 1. The highest breakdown voltage occurs when K_d=0.2. The channel is 0.3μ long. It is apparent that a breakdown of 20 Volts is quite possible for this channel length.

Referring now to Figure 9C both punch-through (rising curve) and avalanche breakdown voltage (falling curve) are shown for a channel L=lμm. Figures 9D and 9E illustrate the minimum depth W_no of the sub-diffusion region given 10 and 6 Volts on the drain for full depletion respectively. The highest running parameter is K_d= 0.2. The lowest is K_d = 1.0

Subdiffusion concentration factor K_d should correspond approximately to twice the channel length L in number value. For example, if L=0.5μ then K_d=l.

Under these circumstances, break-down voltage is about 10V for E_j=2.5×10⁵V/cm. The nominal substrate dopant concentration N_a is about 4.6×10¹⁶ cm^-3 for a channel length, L=0.5μ , N_a=8×10¹⁶ for L=0.3μ, and N_a=2×10¹⁶ for a channel length of 1μm.

The channel implant factor α for the

Fermi-FET is based on substrate concentration N_s and the desired channel depth Y_o. The nominal value for α is about 2.0. The heavily doped drain and source contact diffusions. Figure 8, should have the same depth as the channel, and have resistance less than 200Ω per square. Some latitude in this depth is provided by the choice of the channel implant factor α. For example, the source and drain contact

diffusions may be up to twice as deep as the channel depth Y₀.

The Fermi-FET body effect, threshold voltage variation with substrate voltage, is dramatically influenced by the channel implant factor α. This effect with factor α is unique to the Fermi-FET and is illustrated in Figure 9F for N_s=N_a = 5×10¹⁶/cm³. Figure 9F illustrates threshold voltage as a function of substrate voltage given N_a=5×10¹⁶ and channel factor α as the running parameter; α=a^*n, a=0.5. Note that threshold is fairly flat if α=0.7, T_ox=120A.

Ohmic Contact Junction Potential Compensation

The effect of junction potentials of ohmic metal semiconductor contacts on threshold voltage and FET design will now be described. Figures 10A-10D illustrate various contact potentials that occur at the substrate-metal, diffusion-metal, and polysilicon gate-metal junctions. Figures 10A-10B illustrate

N-channel devices and Figures 10C-10D illustrate

P-channel devices.

The analysis presented heretofore assumes that drain, source, and gate voltages are referenced to the substrate potential. No provisions were made to include effects of metal contact potentials. It will become apparent from the following analysis that metal-polygate contact potential may be employed to compensate for metal-substrate flat-band voltage for both conventional and Fermi-FET devices. It will be shown that the doping polarity and concentration of the polysilicon gates, for both P- and N-channel devices may be chosen to compensate for substrate contact potential, thus eliminating this undesired source of threshold voltage.

Referring to the N-channel technology,

Figures 10A and 10B, contact to the substrate 11 is made by depositing metal 22 on a heavily doped P⁺⁺ region 21 provided at the surface of the substrate 11. A potential is developed across this P⁺⁺ metal junction. The potential V. is given below for metal to P- and N-type diffusions.

N_a is the acceptor concentration of the P⁺⁺ pocket, N_d is the donor concentration, and N^{^} is the effective density of conduction electrons in the contacting metal. The depletion depth within the P⁺⁺ pocket region, resulting from metal contact, must be shallow by design to allow electron tunneling to occur in order to achieve Ohmic-contact properties of the metal-semiconductor junction. Depletion depth within the P⁺⁺ pocket region is approximated by:

This depletion depth needs to be less than about 1.5X10^-6 cm in order to support the tunneling mechanism. Assuming N_d ^{^} = 10²¹ cm^-3 and N_a = 10¹⁹ cm^-3 then V_jx = 1.17 Volts, X_d = 1.17X10^-6 cm, and the

electric field at the junction is q N_aX_d/e_s =

1.87X10⁶V/cm. A significant result is realized when the aluminum - substrate contact is grounded. This ground connection places the substrate potential below true ground potential, i.e. -V_js.

Accordingly, to assess true MOSFET threshold voltage one of the quiescent substrate to gate voltage must be considered. Referring to Figure 10A, the N-polysilicon gate-metal contact potential, KT/q ln(N^{^}/N_d), is negligible, 150mv, and assumed to be small compared to V_js. Therefore grounding the gate yields a net positive gate to substrate voltage V_js = 1.02 Volts. Therefore the total MOSFET threshold voltage is reduced by the difference in contact potential V_js-V_jg. Given a grounded source N-channel Fermi-FET provided with a

N-poly gate, threshold voltage V_t would be V_t= 2∅_f - V. and quite likely, threshold voltage will have a net negative value.

Referring now to Figure 10B, it is shown that the poly-gate 18 is doped P⁺⁺. If the doping density of the polysilicon gate body region is identical to the substrate doping, and aluminum is used in both cases for contacts 22 and 23, the polysilicon-aluminum contact potential will match the metal-substrate junction voltage V_jx. For this case, when the gate electrode 23 is grounded, the net contact induced threshold potential is V_jg - V_js = 0. Thus, no extraneous threshold potential exists, due to contacts, for any N-channel MOSFET configured with a

P-polysilicon gate. The grounded source Fermi-FET device will simply have a threshold voltage V_t = 2∅_f. Thus, an N-channel Fermi-FET structure needs a

P-polysilicon gate to eliminate contact potentials from affecting threshold voltage.

The unconnected source and drain diffusion potential V_j of the N-channel device is V_j= V_o - V_js where V_o is the source or drain diffusion-substrate junction potential. The potential contour integral through the substrate, from contact 19 to contact 22 is zero if the same metal is used for both contacts.

Grounding the diffusion - aluminum contact and

substrate contact slightly reverse biases the diffusion - substrate junction.

Referring now to Figures 10C and 10D, a

P-channel device is illustrated. Substrate contact is made by depositing aluminum 22 on an N⁺⁺ pocket 21 implanted at the surface of an N-type substrate 11.

The junction potential V_j of this Ohmic contact is given by Equation 38B since both materials are majority

N-type. Therefore, grounding the aluminum contact 22, places the substrate surface,under the gate, slightly below ground potential.

Referring to Figure 10C an aluminum contact 23 is made to a P-polysilicon gate. A junction

potential V_jg is developed across this contact that is similar in value to V_js developed at the

P-substrate-aluminum contact Figure 10B. Therefore, grounding the P-channel gate places the gate potential, -V_jg below the surface potential of the substrate. The effect is to lower threshold voltage of the P-channel device by this junction potential. This offset in threshold voltage is eliminated by the structure shown in Figure 10D, In that structure an N-poly gate is used with a P-channel device. Any junction potential V, developed across the aluminum - N-polysilicon junction can be made to be identical to the aluminum - substrate junction potential V_js. Grounding the aluminum contact on the N-poly gate eliminates gate to substrate potential and therefore no extraneous

threshold voltage term exists due to metal contacts.

In conclusion, a significant contact

potential exists between aluminum and P⁺⁺ semiconductor material. In order to avoid introducing this contact potential as part of the threshold voltage, the

following FET conditions must be met: N-channel FET's require a P-polysilicon gate, while P-channel FET's require a N-polysilicon gate.

The above described matching of implant doping eliminates extraneous threshold voltage as well as thermally introduced variations. It will be

understood by those having skill in the art that the prior art has ignored or not totally understood the full implications of metal - semiconductor contact potentials (flat-band voltage).

Threshold Voltage Sources - Summary

Equations (40) and (46) reveal all important sources of threshold voltage for N- and P-channel FET devices.

N-Channel Technology

V_cg =0 if metal gate (43)

P-Channel Technology

V_cg =0 if metal gate (49)

For the conventional grounded source

enhancement FET, there are four separate threshold voltage terms. From left to right they are; surface potential ∅_s, oxide potential V_ox, flat-band voltage at the substrate-metal Ohmic contact V_cs, and flat-band voltage at the polysilicon gate Ohmic contact V_cg.

Comparing Equation 40 with Equation 46, for N- and P-channel devices, it is evident that the polarity of both flat-band voltage terms is unaltered. Their magnitudes however are different.

Fermi-FET device design according to the invention of U.S. Patent No. 4,990,794 completely eliminates oxide potential V_ox, the second term in

Equations 40 and 46. However if the channel of the Fermi-FET is implanted with a dose greater than the nominal value, a fraction of the oxide potential term reappears but with a polarity opposite that indicated in Equation 40 and 46, as will be described below in connection with modifying Fermi-FET threshold voltage.

By examining Equations 40 and 46 it may be seen that threshold voltage for the Fermi-FET reduces to surface potential ∅_s if both substrate and poly-gate flat-band voltages cancel one another. Equations 43 through 45 give expressions for poly-gate flat-band voltage V_cg for N-channel devices given; a metal gate, and N⁺ or P⁺ polysilicon gates. Equations 48 through 51 give the appropriate expressions for p-channel

devices. The net flat-band voltage, V_fb - V_cs - V_cg, approaches zero if the N-channel device is provided with a P-poly gate and the P- channel device is

provided with an N-poly gate. Note that the dopant concentration at the surface of the poly gates must be high enough to achieve ohmic-metal contacts. The intrinsic carrier concentration N_i ^* of polysilicon is greater than that in crystalline silicon by about an order of magnitude. It is estimated that the intrinsic carrier concentration N_i ^* in polysilicon is about l.8×10¹¹cm^-3 at 300 degrees Kelvin. This value should be used when calculating flat-band voltage at metal - poly gate junctions.

Finally, it will be understood from the above analysis that conventional N- and P-channel FET devices should avoid use of metal gates. Instead they should be provided with contra-doped poly gates in order to achieve symmetric fabrication and equal threshold voltage. However, only the Fermi-FET device design eliminates oxide voltage from the threshold expression thereby attaining all of the performance advantages previously described.

The above analysis may be applied to specific examples as follows:

Case 1: Metal gate P- and N-channel MOS devices.

Threshold voltage for metal gate N- and

P-channel devices becomes;

N-Channel

P-Channel

Flat-band voltage at the N-channel - substrate contact V_cs is approximately 1.0 Volt, and depends on substrate acceptor concentration N_a. For the P-channel device, V_cs is about 0.2V depending on donor concentration N_d, assuming that surface potential ∅_s = 2∅_f and therefore about 0.7V. For the N-channel device, threshold voltage becomes;

Threshold voltage for the P-channel device becomes;

The oxide potential term is all that remains to control threshold voltage. For the N-channel case, oxide potential needs to be about 1.0 V at inversion. Two options are available to attain this voltage; i.e. use thick oxide, and/or implant additional acceptor ions at the channel surface. This solution for the N-channel threshold voltage yields a device very sensitive to short channel and hot electron effects. The P-channel device has a different problem. Threshold voltage is too high even if oxide potential is zero. The only practical solution for a conventional P-channel device is to use an N-poly-gate to eliminate flat-band voltage effects. The result is;

Case 2: N-Poly gates used for both P- and N-channel devices.

As in Case 1, the net flat-band voltage is zero for the p-channel device. It's threshold voltage expression reduces to the following:

To reduce the contribution of the oxide potential term, the surface of the substrate, in the channel region, can be compensated with donor ions to reduce the effects of the oxide potential term.

The N-channel device has a different problem.

The net flat-band voltage (-V_cs+V_cg) is about 0.8 volts. Threshold voltage becomes:

The oxide potential term can be adjusted as in Case 1 by increasing the donor concentration N_a in the channel region. As in Case 1, this is a poor solution since the device is still sensitive to short channel and hot electron effects because of the large oxide potential term.

Case 3: N-channel device with P-poly gate and

P-channel device with N-poly gate.

These combinations eliminate flat-band voltage and lead to balanced threshold voltages for the P- and N-channel devices.

Increasing substrate doping N_a for the N-channel device and N_d for the P-channel device, is one method to control punch-through voltage for short channel

devices. Unfortunately this technique, when used for conventional FET devices, increases oxide potential thus requiring channel surface compensation to be used to minimize the effect. Case 4: Fermi-FET with contra doped polysilicon gates.

The threshold voltage for the N- and P-channel devices are;

V_tn = +∅_s = 2∅_f

V_tp = -∅_s = -2∅_f

This simplicity comes about since oxide potential is zero by design and all flat-band voltages are canceled. Under these ideal circumstances, both P- and N-channel Fermi-FET's can be optimized for punch-through and avalanche breakdown and maximized for transconductance without affecting threshold voltage. Of great

importance is the insensitivity to short channel effects including hot electron trapping. Finally, Fermi-FET devices fabricated with channel length's as short as 0.3μ should not require scaling down the standard power supply voltage of 5volts.

Modifying Fermi-FET Threshold Voltage

For some circuit designs, it is desirable to fabricate depletion mode Fermi-FET devices. A

depletion mode device is fabricated like an enhancement Fermi-FET device except the channel implant dose is increased by factor G_i while maintaining the same implant energy needed to achieve the critical implant depth prescribed by Equation 3A. By using Poisson's Equation to calculate surface potential at X=0 when excess dose factor G_i is present, and given the nominal implant depth Y₀, we conclude that the threshold voltage V_td for a depletion mode or low threshold device may be defined in terms of the excess implant factor G_i as follows: d

Where

Equation 52 is plotted in Figure 11A as a function of G_i for different values of channel implant factor α and a silicon substrate doped with 5e¹⁶ acceptor ions per cm³ and oxide thickness of 120A. All threshold voltage values that are negative, correspond to an equivalent imaginary gate voltage responsible for conduction of the undepleted portion of the implant channel. For N-channel devices, a negative voltage is required to shut-off the channel. For example, given a substrate impurity concentration of 5e¹⁶ cm^-3 and G_i=4, and α=2, the channel conducts as though it were an enhancement device supplied with an effective gate voltage 1.3 volts above threshold. A gate voltage of -1.3 Volts is required to terminate N-channel

conduction. Accordingly, Figure 11A defines the additional implant dose factor G, required to modify a Fermi-FET device to have depletion mode properties or to lower it's positive threshold voltage below the Fermi value ∅_s.

Referring to Figures 11B and 11C, it is shown that a positive threshold voltage may be achieved, for an N-channel Fermi-FET device, that is below the Fermi value ∅_s. This is accomplished by using an excess implant dose factor G_i, restricted to a value less than about 2.0. Figure 11B uses the same parameters as Figure 11A, except the V_t and G_i scales are changed. Figure 11C uses the same parameters as Figures 11A and 11B, except that N_a=2e¹⁶. The same excess dose

procedure may be employed to lower threshold voltage of P-channel Fermi-FET devices. Opposite voltage

polarities apply for P-channel devices.

Effective Channel Length In FETs

Previous analysis employed an effective channel length L^*. The origin of this term will now be described in connection with the formation of a channel by application of gate voltage V_g when the depletion regions already surround the drain and source

diffusions.

Referring now to Figure 12A, a MOSFET is shown having a depletion configuration without a channel, and with source 12 and drain 13 at ground potential and gate 23 below threshold. Figure 12A illustrates depletion regions 31 and 32 respectively in the substrate 11 surrounding the source and drain diffusions 12 and 13 respectively, resulting from these P-N junctions. A junction voltage V_o appears on the diffusion at the stochastic junction between the diffusion and the substrate. This voltage is the result of achieving a constant Fermi potential across the junction. Junction voltage V_o is given below for an abrupt junction:

The width W_d of the depletion region (31 or 32)

extending into the P-substrate from the drain or source diffusions is expressed as follows:

If the donor concentration N_d of the drain and source diffusions is much greater than acceptor concentration N_a, Equation 53 may be simplified. This simplification has been used above:

The effect of these depletion regions upon channel formation will now be described. When gate voltage is applied, a uniform equipotential situation must occur that blends the equipotential contours, below the channel, with those contours already surrounding the diffusions. The result is illustrated in Figure 12B. In order to satisfy the equipotential criteria, the ionized P-region under the gate oxide layer, as a result of gate voltage, does not extend all the way to the diffusions. Neither does the channel 15.

The penetration distance X_c of the channel and it's associated depletion region, into the drain and source depletion regions may be calculated as follows: Assuming an abrupt junction. Figure 13 illustrates the potential versus distance from the stochastic junction of the source or drain depletion regions.

From Poisson's equation the following expression describes junction contact potential V_o and potential V(X) at position X measured from the end of the diffusion depletion region:

where

V_o = KT/q L_n(N_aN_d/N_i ²) (58A)

X = W_d -s, and (58B)

S = Channel to diffusion spacing. (58C) Solving Equations 56 and 57 for V(X) in terms of W_d and V_o:

Using the expression given by Equation 58B, Equation 59 becomes

Solving for S, the channel spacing distance S may be described in terms of depletion potential V(X) at position X as follows:

In order to establish the equipotential contours within the depletion region surrounding the drain and source diffusions. Figure 12B, Voltage V(X) must be equal to the potential ∅_s(X) at the ends of the channel region. The expression for ∅_s has been

previously obtained and is repeated below for

convenience:

where W_dc is the depth of the depletion region in the substrate below the oxide layer.

Potential ∅_s must be equal to diffusion potential V (X) Thus from Equations 62 and 60 :

Solving Equation 64 for S/W_d, the following expression for the ratio of spacing to depletion width is

obtained:

It will be understood from Equation 65 that channel spacing disappears when ∅_s = V_o. This condition

requires that N_p* = N_d and is a situation that never occurs. In fact surface potential ∅_s remains close to twice the Fermi potential, 2∅_f, for all practical values of gate voltage. Therefore Equation 65 may be conveniently approximated as:

Thus, at threshold, there is a channel-to-diffusion spacing at each end of the channel having the value specified by Equation 66. This channel-diffusion spacing distance S may be minimized by diminishing depletion width W_d by increasing acceptor concentration N_a and or using lightly doped drain and source extension regions.

The analysis presented above assumes that no voltage is applied to the drain or source diffusions. If voltage V is applied, the width of the diffusion depletion region increases. This effect is given by Equation 66.

The above analysis may be repeated for an applied voltage V_o. The result is that spacing distance S_d, has the same form as Equation 66 except that depletion width W_d > W_do due to voltage V.

Accordingly, the effective channel length L^* may be defined as follows:

L^* = L - (S_d+S_s), (69) where S_s is the channel - diffusion spacing at the source, and S_d is the channel - diffusion spacing at the drain.

For long-channel devices, S_d and S_s remain a small fraction of length L. However, for

short-channel devices, (S_s+S_d) can be a significant fraction of diffusion spacing length L particularly when drain voltage is applied. The increase in voltage at the drain end of the channel, for example, resulting from drain voltage V_d < V_dsat, is modified by the factor 2∅_f/V₀. Thus; V(X) = (2∅_f/V_o)V_d (70)

At pinch-off , the following condition applies :

(20_f/V_o) V_d = (V_g-V_t) (71)

Solving Equation 70 for pinch-off voltage, one obtains a value greater than that reported in the literature:

When drain voltage exceeds pinch-off voltage, the depletion region around the drain diffusion expands and the end-of-the-channel region must slip back toward the source to maintain potential equilibrium, such that V(X) = (V_g-V_t). This effect is the origin of drain conductance:

Note that if 2∅_f = V_o, drain conductance would be zero. If acceptor concentration N_a is too high, in the

vicinity of the drain diffusion adjacent the channel, impact ionization break-down will occur at relatively low drain voltage. To summarize the results of

effective channel length L^*, it appears that in

conventional FETs, the inversion channel never touches the drain or source diffusions due to the self

depletion regions surrounding these diffusions in the vicinity of the intended channel region. Channel conduction requires injection at the source. It would also appear that the channel L^* is shorter than L by the sum of the channel spacing factors S_s+S_d. Thus, the channel shrinking effect may be significant in short channel conventional FET devices if substrate doping is not increased to accommodate the effect. L^* is the origin of threshold voltage variation with channel length and drain voltage. It will be understood by those having skill in the art that the Fermi-FET totally eliminates this problem. Finally, it would appear that in conventional FET designs that pinch-off voltage is greater than (V_g-V_t) by the factor V_o/2∅_f.

Multiple Gate Fermi-FET

It will be understood by those having skill in the art that many applications of FET's require transistors to be connected in series. For example, CMOS (complementary MOS) logic technology requires connecting transistors in series to achieve the desired logic function while maintaining essentially zero idle power. For typical (non-Fermi) FET's, a series

arrangement of transistors limits circuit performance in several ways. First, the threshold voltage for each of the series transistors, at best, corresponds to the threshold voltage along the gate of a single transistor whose total channel length is equal to the sum of the channel length's of all series transistors. In

contrast, threshold voltage computed for the Fermi-FET is shown in Figure 14 as a function of position along the channel, for a typical P- and N-Channel device. It is apparent that threshold voltage remains below V_dd/2 along 80% of the total channel length. Based on the above, according to the invention of Application Serial No. 07/318,153 a separate gate may be provided at the drain end of the channel in a Fermi-FET, whose

potential is always at the full "on" value. In

particular, the potential is the power supply voltage, V_dd, for N-channel devices and is at ground for P- channel devices. This gate is called an accelerator electrode and is illustrated in Figure 15, at 23a. The polysilicon gate contact is illustrated at 18a.

The threshold voltage for the remaining gate or gates located along the channel of a Fermi-FET device, is reduced substantially by use of the

accelerator gate technique. Turn on delay is thereby minimized. Variance in threshold voltage of series connected transistors adds delay to the response time of the circuit and depends on the rise time of each of the gate input functions of a conventional CMOS

configuration. The current capabilities of the series transistor configuration is diminished by factor N from the current conduction capability of a single

transistor. It may be shown that switching frequency depends inversely on the square of the channel length and therefore on N², where N is the number of

transistors connected in series. Therefore, response time varies directly with the square of the CMOS Fan-in factor, i.e. N². Part of the voltage drop along conventional FET transistors, includes differences in the depletion potential at both ends of the channel due to diffusions contacting the substrate. The Fermi-FET device completely eliminates this source of potential drop and therefore is better suited for CMOS than conventional FET devices.

The non-inversion mechanism of filling the self depleted implant channel of the Fermi-FET with conduction carriers, permits construction of the multi-gate FET design shown in Figure 16A. Figure 16B illustrates the multi-gate structure operating at pinch-off.

This plural gate structure is ideal for use in logic circuits or other applications requiring transistors connected in series, such as CMOS. The multi-gate structure has diffusion rails 33a, 33b that separate one transistor channel region from another. These diffusion rails need not have contact metal as needed by individual transistors connected in series. The depth of the diffusion rails are the same as the source and drain regions and nominally have the same depth Y_o as the implemented channel. The resistance of the source, drain and rail regions should be less than 200Ω per square. Alternatively, the source drain and rails may be deeper than the channel, for example, up to twice as deep. The diffusion rail design lowers diffusion capacity and eliminates one diffusion per transistor region thus minimizing space occupied by the circuit. The ends of each poly gate region overlap the rails of width W and length L to ensure proper gate induced channel filling with conduction carriers.

Figure 16A does not illustrate a minimum geometry configuration. In that case, rail width W would be the same as channel length L.

The SOI FET

Referring now to Figure 17, a semiconductor

(or silicon)-on-insulator (SOI) field effect transistor (FET) having a critical relationship among the source and drain depth and the channel substrate doping density according to the present invention will now be described. SOI FET 40 is formed on a thin insulating layer 42 which is formed on a substrate 41. Typically the substrate 41 is a silicon wafer and the insulating layer 42 is a thin layer of silicon dioxide (SiO₂) on the order of 3500A thick, which is formed on substrate 41. However, it will be understood by those having skill in the art that other substrates and/or

insulating layers 41 and 42 respectively, may be used.

SOI FET 40 is formed in a thin

monocrystalline semiconductor layer 44 having a

thickness D. It will be understood by those having skill in the art that semiconductor layer 44 is typically silicon, although other semiconductor materials may also be used. Preferably silicon layer 44 is grown with near intrinsic properties.

To form the SOI FET, source and drain regions 12 and 13 respectively, are formed in the silicon layer 44. The source and drain regions are of a first conductivity type, for example N++ conductivity with a doping concentration of approximately lE20cm^-3. A source electrode 19 and drain electrode 20 form

external contacts for these regions. A substrate channel 43 of length L_o having the opposite conductivity type from the source and drain regions, for example P type conductivity with a dopant concentration of approximately 5E16cm^-3, is formed between the source and drain regions 12 and 13. A thin gate insulating

(typically oxide) layer 14 is formed on the first surface of the silicon layer 44 opposite the second surface of the silicon layer 44 adjacent insulating layer 42. A gate contact is formed on the gate oxide 14.

According to the present invention the gate contact comprises a polysilicon gate contact 18 and a metal gate electrode 23 for the reasons already

described above in connection with the Fermi-FET. In particular, the polysilicon gate contact 18 for the P-channel SOI FET is N-type, and P-type for the N-channel SOI FET. The polysilicon gate contact produces a symmetric threshold voltage for both P and N-channel devices. Finally, field oxide regions 17 isolate the contacts from one another. It will be understood by those skilled in the art that the doping concentration examples described above apply to an N-channel device. A P-channel device may be formed by exchanging N for P and P for N. However, for the sake of simplicity, the present description will continue to describe N doped source and drain regions and a P-channel substrate 43.

SOI-FET 40 may be fabricated using well known SOI fabrication techniques which need not be described further herein. It will also be understood by those having skill in the art that after forming the SOI-FET 40, insulating layer 42 and/or substrate 41 may be removed or detached to form a freestanding thin film FET.

In order to prevent punchthrough between the source and drain at a chosen drain to source voltage, the dopant (acceptor) concentration within the P-channel substrate 43 must be above a certain value. This value N_a is given by Equation 74 as follows:

If N_d is much greater than N_a, Equation (74) reduces to the following simplified equation:

In both Equations (74) and (75);

V_o = KT/q ln(N_dN_a/N_j ²),

e_s = capacitive constant for silicon

(lE-12F/cm),

L_o = Channel length in microns,

N_d = Diffusion impurity doping (e.g. lE20cm^-3)

^Na = Channel substrate doping cm^-3 V_dd = Supply voltage

According to the invention, for proper operation of the SOI-FET the silicon depth D must satisfy the following relationship:

Equation (76) is obtained by solving Poisson's equation to compute the surface potential of a depleting channel substrate region at the drain end during channel conduction. According to the invention, the channel substrate 43 must not be completely

depleted in the depth direction during carrier

conduction when the drain is close to supply voltage V_dd. In other words, the channel substrate 43 must not be fully depleted at pinch-off. If the channel

substrate 43 is completely depleted, the pinch off mechanism will be impaired. Pinch off is the result of a unique threshold voltage condition that normally occurs at the drain end of a conducting channel.

This relationship between D and N_a (Equation 76) to ensure the channel substrate 43 is not

completely depleted, is directly contrary to the teachings of the art, such as the aforementioned

Shahidi et al. publication which states the channel should be fully depleted, i.e. the SOI thickness should be less than the depletion width.

Equation (76) is plotted in Figure 29 as a function of drain voltage V_d and channel substrate doping N_a, per cubic cm. For example, if the silicon film is 0.1μ in depth and drain voltage is above 3V, then N_a must be greater than lE17cm^-3. This high dopant concentration reduces carrier mobility within the inverted channel region.

Accordingly, when the above described

relation between D and N_a is maintained, a sufficient dopant concentration in the substrate channel 43 may be produced to avoid punchthrough effects while allowing thicker silicon films to be grown without experiencing a "kinking" in the voltage/current characteristics of the SOI FET.

Fermi SOI FET

Referring now to Figure 18 a Fermi SOI FET according to the present invention is illustrated. The structure of the Fermi SOI FET 50 corresponds to the structure of SOI FET 40 except that a contra doped channel region 15 is formed. For example, if channel substrate region 43 is doped P-type, then channel 15 is doped N-type with N-type donors such as arsenic and/or phosphorous. The depth of the channel region 15 is labelled A in Figure 24. A is the requisite depth to satisfy the Fermi-FET criteria described above in connection with the Fermi-FET. In particular, for the SOI Fermi-FET the proper Fermi depth is given by equation 77 below:

Where

∅_s = (2KT/q)ln(N_a/N,-)

α = N_dc/N_a

N_dc = Donor concentration in the Fermi Channel N_a = Channel substrate doping concentration q = electron charge

The depth B of the remaining channel substrate region 43 has the same requirements stated in Equation (76) for the SOI FET. That is, B must be sufficiently thick to ensure that channel substrate 43 is not completely depleted during carrier conduction when the drain is close to supply voltage V_dd. Thus, the total depth D of the silicon layer 44 for the Fermi SOI FET is at least:

Figure 19 is a plot of Equation (74) that defines a required minimum channel substrate doping concentration N_a plotted as a function of the channel length L_o in microns. For example, a 0.6μ Fermi SOI FET device requires doping the channel substrate region with 4.3E16cm^-3 donor or acceptor ions in order to prevent punchthrough with six volts on the drain.

Figure 20 is a plot of Equation (78) that defines the minimum depth D of the silicon layer 44 as a function of channel length L_o and Fermi channel factor a as a running parameter. Figure 21 is a plot of

Equation (77), the nominal depth of the Fermi channel 15, as a function of channel length L_o and the Fermi FET channel factor α as a running parameter.

Figure 22 is a graph of the nominal value of the vertical electric field that occurs at the junction between the bottom of the Fermi channel 15 and the channel substrate region 43. This electric field is plotted as a function of the channel length L_o. For channel lengths as short as 0.4μ, the junction field remains below the impact ionization value for silicon for the dopant concentration value used. This

contrasts sharply with conventional SOI FETs, for example as described in the aforementioned Shahidi et al. publication wherein much higher vertical electric field is present at the gate oxide-channel substrate interface. This high vertical field in conventional SOI FET devices partially accounts for the reduced hole mobility characteristic of this technology. Figure 23 illustrates the depleted and undepleted portions of the channel substrate region 43 given zero volts on the gate, source and drain. The Fermi channel 15 is shown completely depleted of mobile carriers for gate voltage below threshold. The channel substrate region 43 is only partially depleted. This illustrates the basic Fermi condition that the vertical electric field is zero at the junction of the gate oxide 14 and the Fermi channel 15. Equipotential lines are shown by dotted lines. Figure 24 illustrates depletion conditions in the Fermi channel 15 and channel substrate region where the gate voltage is above threshold and drain and source voltage are at ground potential. Specifically, the Fermi channel is partially filled with conduction electrons. A

substrate voltage compensating region 21, and a

substrate contact 22 as already described above for the Fermi FET is also illustrated.

Figure 25 illustrates the same drain and source conditions as Figure 29 with the gate voltage equal to supply voltage V_dd. In this case, the Fermi channel 15 contains the maximum density of conduction electrons, i.e. it is filled. Figure 26 illustrates the pinch off mechanism that occurs in the Fermi SOI FET. In Figure 26, depletion in the channel substrate 43 increases towards the drain 13 and carrier

concentration in the Fermi channel depletes toward the drain and pinches off at the drain. If the minimum depth of the silicon on the insulator and dopant concentrations given above (Equation (78)) are not obeyed, proper pinch off will not occur and kinking will be evident.

Figures 27A-27C illustrate the drain current properties of an N-channel Fermi FET, Fermi SOI FET and a MOS FET respectively that all use the substrate or channel substrate 43 doping level of 5E16cm^-3, a thin oxide layer 14 165A thick, a channel length of 0.6μ and a channel width of 20μ. Finally, Figures 28A-28C compare drain current properties of P-channel devices given the same technologies.

The initial drain conductance of the Fermi FET devices is far greater than the MOS device and gate capacity for the Fermi FET is less than 30% of MOS devices. In other words, gate capacitance is reduced by a factor of three. Gate capacity of an MOS device in Fared's per centimeter square may be expressed as follows:

Fermi FET and Fermi SOI FET gate capacitance may be represented as follows:

Where;

C_g ^* = effective gate capacitance per square centimeter,

d = depth of inversion layer in MOS or

conventional SOI devices,

A = depth of Fermi Channel,

T_ox = gate insulator (oxide thickness), and e_i = capacitive constant for the oxide,

Farads/centimeter It will be understood by those having skill in the art that the Fermi SOI FET may be fabricated with multiple gates, as already described above for the bulk Fermi FET. In a multi-gate embodiment, the gates are separated from one another by rail regions, preferably of thickness D. The threshold voltage of the Fermi SOI FET may also be modified using the implant dose factor G₁, as already described above for the bulk Fermi FET.

The Fermi SOI FET and the Fermi FET are very fast devices primarily due to their low gate capacity and high effective carrier mobility. The drain current properties of the Fermi SOI FET closely match those of the bulk Fermi FET.

In the drawings and specification, there have been disclosed typical preferred embodiments of the invention and, although specific terms are employed, they are used in a generic and descriptive sense only and not for purposes of limitation, the scope of the invention being set forth in the following claims.

Claims

THAT WHICH IS CLAIMED

1. A field effect transistor comprising: a thin semiconductor layer having a first surface and a second surface opposite said first surface;

source and drain regions of first

conductivity type in said thin semiconductor layer;

a channel substrate of second conductivity type, in said thin semiconductor layer at said second surface, between said source and drain regions;

a channel of said first conductivity type in said thin semiconductor layer at said first surface, between said source and drain regions, said channel having a predetermined depth from said first surface;

a gate insulating layer on said thin semiconductor layer at said first surface adjacent said channel, at least one of the source doping, source depth, drain doping, drain depth, channel substrate doping, channel substrate depth, channel doping and channel depth being selected to produce zero static electric field perpendicular to said first surface at said first surface between said channel and said gate insulating layer; and

source, drain and gate contacts for electrically contacting said source and drain regions and said gate insulating layer, respectively.

2. The field effect transistor of Claim 1 wherein said channel substrate is doped at a first dopant density, wherein said channel is doped at a second dopant density, and wherein at least one of said first and second dopant densities and said

predetermined depth are selected to produce zero static electric field perpendicular to said first surface at said first surface between said channel and said gate insulating layer.

3. The field effect transistor of Claim 1 further comprising:

an insulating layer on said thin

semiconductor layer at said second surface; and

a substrate on said insulating layer, to thereby produce a semiconductor-on-insulator field effect transistor.

4. The field effect transistor of Claim 1 wherein said thin semiconductor layer, said source and said drain are all a first predetermined thickness, and wherein said channel substrate and said channel are, in combination, said first predetermined thickness.

5. The field effect transistor of Claim 4 wherein said first predetermined thickness is

sufficiently thick such that said channel substrate is not fully depleted at pinch-off.

6. The field effect transistor of Claim 1 wherein said channel comprises a plurality of channels separated from one another by rail regions; and wherein said gate contact comprises a plurality of gate

contacts, a respective one of which overlies a

respective one of said plurality of channels.

7. The field effect transistor of Claim 3 wherein said channel substrate comprises a first semiconductor material in monocrystalline form, and being doped at a first doping density;

wherein said gate contact comprises said first semiconductor material of said second

conductivity type and being doped at said first dopant density; and

wherein said field effect transistor further comprises a substrate contact for electrically

contacting said substrate.

8. The field effect transistor of Claim 1 wherein said thin semiconductor layer comprises a thin layer of monocrystalline silicon.

9. A field effect transistor comprising: a thin semiconductor layer having a first surface and a second surface opposite said first surface;

source and drain regions of first

conductivity type in said thin semiconductor layer;

a channel substrate of second conductivity type, in said thin semiconductor layer at said second surface, between said source and drain regions;

a channel of said first conductivity type in said thin semiconductor layer at said first surface, between said source and drain regions, said channel having a predetermined depth from said first surface;

a gate insulating layer on said thin semiconductor layer at said first surface adjacent said channel, at least one of the source doping, source depth, drain doping, drain depth, channel substrate doping, channel substrate depth, channel doping and channel depth being selected to produce a threshold voltage for said field effect transistor which is twice the Fermi potential of said channel substrate; and

source, drain and gate contacts for electrically contacting said source and drain regions and said gate insulating layer, respectively.

10. The field effect transistor of Claim 9 wherein said channel substrate is doped at a first dopant density, wherein said channel is doped at a second dopant density, and wherein at least one of said first and second dopant densities and said

predetermined depth are selected to produce a threshold voltage for said field effect transistor which is twice the Fermi potential of said channel substrate.

11. The field effect transistor of Claim 9 further comprising:

an insulating layer on said thin

semiconductor layer at said second surface; and

a substrate on said insulating layer, to thereby produce a semiconductor-on-insulator field effect transistor.

12. The field effect transistor of Claim 9 wherein said thin semiconductor layer, said source and said drain are all a first predetermined thickness, and wherein said channel substrate and said channel are, in combination, said first predetermined thickness.

13. The field effect transistor of Claim 12 wherein said first predetermined thickness is

sufficiently thick such that said channel substrate is not fully depleted at pinch-off.

14. The field effect transistor of Claim 9 wherein said channel comprises a plurality of channels separated from one another by rail regions; and wherein said gate contact comprises a plurality of gate

contacts, a respective one of which overlies a

respective one of said plurality of channels.

15. The field effect transistor of Claim 11 wherein said channel substrate comprises a first semiconductor material in monocrystalline form, and being doped at a first doping density;

wherein said gate contact comprises said first semiconductor material of said second

conductivity type and being doped at said first dopant density; and

wherein said field effect transistor further comprises a substrate contact for electrically

contacting said substrate.

16. The field effect transistor of Claim 9 wherein said thin semiconductor layer comprises a thin layer of monocrystalline silicon.

17. A field effect transistor comprising: a thin semiconductor layer having a first surface and a second surface opposite said first surface;

source and drain regions of first

conductivity type in said thin semiconductor layer;

a channel substrate of second conductivity type, in said thin semiconductor layer at said second surface, between said source and drain regions;

a channel of said first conductivity type in said thin semiconductor layer at said first surface, between said source and drain regions, said channel having a predetermined depth from said first surface and a predetermined length from said source to said drain;

a gate insulating layer on said thin semiconductor layer at said first surface adjacent said channel and having a predetermined thickness, at least one of the source doping, source depth, drain doping, drain depth, channel substrate doping, channel

substrate depth, channel doping and channel depth being selected to produce a threshold voltage for said field effect transistor which is independent of said

predetermined length and said predetermined thickness; and

source, drain and gate contacts for electrically contacting said source and drain regions and said gate insulating layer, respectively.

18. The field effect transistor of Claim 17 wherein said channel substrate is doped at a first dopant density, wherein said channel is doped at a second dopant density, and wherein at least one of said first and second dopant densities and said

predetermined depth are selected to produce a threshold voltage for said field effect transistor which is independent of said predetermined length and said predetermined thickness.

19. The field effect transistor of Claim 17 further comprising:

an insulating layer on said thin

semiconductor layer at said second surface; and

a substrate on said insulating layer, to thereby produce a semiconductor-on-insulator field effect transistor.

20. The field effect transistor of Claim 17 wherein said thin semiconductor layer, said source and said drain are all a first predetermined thickness, and wherein said channel substrate and said channel are, in combination, said first predetermined thickness.

21. The field effect transistor of Claim 20 wherein said first predetermined thickness is

sufficiently thick such that said channel substrate is not fully depleted at pinch-off.

22. The field effect transistor of Claim 17 wherein said channel comprises a plurality of channels separated from one another by rail regions; and wherein said gate contact comprises a plurality of gate contacts, a respective one of which overlies a

respective one of said plurality of channels.

23. The field effect transistor of Claim 19 wherein said channel substrate comprises a first semiconductor material in monocrystalline form, and being doped at a first doping density;

wherein said gate contact comprises said first semiconductor material of said second

conductivity type and being doped at said first dopant density; and

wherein said field effect transistor further comprises a substrate contact for electrically

contacting said substrate.

24. The field effect transistor of Claim 17 wherein said thin semiconductor layer comprises a thin layer of monocrystalline silicon.

25. A field effect transistor comprising: a thin semiconductor layer having a first surface and a second surface opposite said first surface, said thin semiconductor layer having an intrinsic carrier concentration N_i at temperature T degrees Kelvin, and a dielectric constant e_s;

source and drain regions of first

conductivity type in said thin semiconductor layer;

a channel substrate of second conductivity type, in said thin semiconductor layer at said second surface, between said source and drain regions, and being doped at a first dopant density N_a;

a channel of said first conductivity type in said thin semiconductor layer at said first surface between said source and drain regions, said channel being doped at a second dopant density which is a factor a times said first dopant density N_a, said channel having a predetermined depth A from said first surface, with A being√(2e_s∅_s)/(qN_aα(α+1)), where ∅_s is

(2KT/q)ln(N_a/N_i), q is equal to 1.6×10"¹⁹ coulombs, and K is equal to 1.38×10^-23 Joules/ºKelvin;

a gate insulating layer on said thin semiconductor layer at said first surface adjacent said channel; and

source, drain and gate contacts for electrically contacting said source and drain regions and said gate insulating layer, respectively.

26. The field effect transistor of Claim 25 further comprising:

an insulating layer on said thin

semiconductor layer at said second surface; and

a substrate on said insulating layer; to thereby produce a semiconductor-on-insulator field effect transistor.

27. The field effect transistor of Claim 25 wherein said thin semiconductor layer, said source and said drain are all a first predetermined thickness, and wherein said channel substrate and said channel are, in combination, said first predetermined thickness.

28. The field effect transistor of Claim 27 wherein said first predetermined thickness is

sufficiently thick such that said channel substrate is not fully depleted at pinch-off.

29. The field effect transistor of Claim 25 wherein said channel comprises a plurality of channels separated from one another by rail regions; and wherein said gate contact comprises a plurality of gate contacts, a respective one of which overlies a

respective one of said plurality of channels.

30. The field effect transistor of Claim 28 wherein said first predetermined thickness is at least

where V_dd is the power supply voltage for said field effect transistor.

31. The field effect transistor of Claim 26 wherein said channel substrate comprises a first semiconductor material in monocrystalline form, and being doped at said first doping density;

wherein said gate contact comprises said first semiconductor material of said second

conductivity type in polycrystalline form and being doped at said first dopant density; and

wherein said field effect transistor further comprises a substrate contact for electrically

contacting said substrate.

32. The field effect transistor of Claim 25 wherein said thin semiconductor layer comprises a thin layer of monocrystalline silicon.

33. The field effect transistor of Claim 25 wherein said channel substrate is doped by an

additional dose factor G_i of additional dopant of said second conductivity type at an energy which achieves said predetermined depth A, to thereby provide a depletion mode field effect transistor.

34. The field effect transistor of Claim 33 wherein said additional dose factor G_i is controlled to maintain a threshold voltage V_t for said depletion mode field effect transistor which is greater than zero, where:

and where T_ox is the thickness of said gate insulating layer and e_i is the dielectric constant of said gate insulating layer.

35. The field effect transistor of Claim 33 wherein said additional dose factor G_i has a value of α.

36. The field effect transistor of Claim 33 wherein said additional dose factor G_i has a value equal to two times the length of said channel between said source and drain regions.

37. A field effect transistor comprising: a thin semiconductor layer having a first surface and a second surface opposite said first surface;

source and drain regions of first

conductivity type in said thin semiconductor layer;

a channel substrate of second conductivity type in said thin semiconductor layer at said second surface between said source and drain regions, at least one of the channel substrate thickness and channel substrate doping being selected such that said channel substrate is not fully depleted at pinch-off;

a gate insulating layer on said thin semiconductor layer at said first surface adjacent said channel; and

source, drain and gate contacts for electrically contacting said source and drain regions and said gate insulating layer respectively.

38. The field effect transistor of Claim 37 wherein said thin semiconductor layer, said source, said drain and said channel substrate are all a first predetermined thickness, said first predetermined thickness being greater than

where e_a is the dielectric constant of the thin

semiconductor layer, V_dd is the power supply voltage for said field effect transistor, q is equal to 1.6×10^-19 coulombs and N_a is the dopant density of said channel substrate.

39. The field effect transistor of Claim 37 further comprising:

an insulating layer on said thin

semiconductor layer at said second surface; and

a substrate on said insulating layer, to thereby produce a semiconductor-on-insulator field effect transistor.