WO1993010554A3 - Charged particle energy analyser - Google Patents

Charged particle energy analyser Download PDF

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Publication number
WO1993010554A3
WO1993010554A3 PCT/GB1992/002083 GB9202083W WO9310554A3 WO 1993010554 A3 WO1993010554 A3 WO 1993010554A3 GB 9202083 W GB9202083 W GB 9202083W WO 9310554 A3 WO9310554 A3 WO 9310554A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrodes
charged particle
hemispherical
particle energy
analyser
Prior art date
Application number
PCT/GB1992/002083
Other languages
French (fr)
Other versions
WO1993010554A2 (en
Inventor
Ian Robert Holton
Original Assignee
Fisons Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fisons Plc filed Critical Fisons Plc
Priority to EP92923029A priority Critical patent/EP0612437A1/en
Priority to JP5509069A priority patent/JPH07501418A/en
Priority to GB9409425A priority patent/GB2300066B/en
Publication of WO1993010554A2 publication Critical patent/WO1993010554A2/en
Publication of WO1993010554A3 publication Critical patent/WO1993010554A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

A charged particlee analyser (1) comprises an inner electrode (2) and an outer electrode (3) defining a gap between opposed curved surfaces of the electrodes for the passage of charged particles deflected on application of an electric field from a source to a detector (12) in surface analysis techniques. The electrodes are preferably hemispherical or part-hemispherical and are formed from a sheet of metal by a pressing technique. Preferably the electrodes (2, 3) are each formed to a tolerance of within about 0.13 mm so as to achieve a high transmission at a high resolution. A base plate (4) for the electrodes (2, 3) is preferably formed of two spaced, relatively thin sheets (29, 30) joined at a plurality of discrete points.
PCT/GB1992/002083 1991-11-12 1992-11-11 Charged particle energy analyser WO1993010554A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP92923029A EP0612437A1 (en) 1991-11-12 1992-11-11 Charged particle energy analyser
JP5509069A JPH07501418A (en) 1991-11-12 1992-11-11 charged particle energy analyzer
GB9409425A GB2300066B (en) 1991-11-12 1992-11-11 Charged particle energy analyser

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9123984.8 1991-11-12
GB919123984A GB9123984D0 (en) 1991-11-12 1991-11-12 Charged particle energy analyser

Publications (2)

Publication Number Publication Date
WO1993010554A2 WO1993010554A2 (en) 1993-05-27
WO1993010554A3 true WO1993010554A3 (en) 1993-06-24

Family

ID=10704472

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1992/002083 WO1993010554A2 (en) 1991-11-12 1992-11-11 Charged particle energy analyser

Country Status (4)

Country Link
EP (2) EP0713244A1 (en)
JP (1) JPH07501418A (en)
GB (2) GB9123984D0 (en)
WO (1) WO1993010554A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228190A1 (en) * 1992-08-25 1994-03-03 Specs Ges Fuer Oberflaechenana Charged particle analyzer
CN112147667A (en) * 2020-09-11 2020-12-29 兰州空间技术物理研究所 Sensor for space low-energy ion detection

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB869239A (en) * 1958-06-10 1961-05-31 Mullard Ltd Improvements in or relating to the manufacture of metallic grid structures
US4742224A (en) * 1986-12-22 1988-05-03 American Telephone And Telegraph Company At&T Bell Laboratories Charged particle energy filter
EP0397032A2 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Method for manufacturing metal cylinder members of electron tubes and method for manufacturing magnetron anodes

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1303136A (en) * 1970-02-27 1973-01-17
JPS6084755A (en) * 1983-10-14 1985-05-14 Seiko Instr & Electronics Ltd Hot-cathode electron impact type ion source

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB869239A (en) * 1958-06-10 1961-05-31 Mullard Ltd Improvements in or relating to the manufacture of metallic grid structures
US4742224A (en) * 1986-12-22 1988-05-03 American Telephone And Telegraph Company At&T Bell Laboratories Charged particle energy filter
EP0397032A2 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Method for manufacturing metal cylinder members of electron tubes and method for manufacturing magnetron anodes

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF PHYSICS E. SCIENTIFIC INSTRUMENTS vol. 10, 1977, BRISTOL GB pages 134 - 139 J.N.H. BRUNT ET AL 'THE REALIZATION OF HIGH ENERGY RESOLUTION USING THE HEMISPHERICAL ELECTROSTATIC ENERGY SELECTOR IN ELECTRON IMPACT SPECTROMETRY' cited in the application *
JOURNAL OF PHYSICS E. SCIENTIFIC INSTRUMENTS vol. 20, no. 6, June 1987, BRISTOL GB pages 721 - 731 H. REME ET AL 'THE GIOTTO ELECTRON PLASMA EXPERIMENT' *
PATENT ABSTRACTS OF JAPAN vol. 9, no. 230 (E-343)17 September 1985 *
REVIEW OF SCIENTIFIC INSTRUMENTS. vol. 35, no. 12, December 1964, NEW YORK US pages 1698 - 1704 J. AROL SIMPSON 'HIGH RESOLUTION , LOW ENERGY ELECTRON SPECTROMETER' cited in the application *
THE JOURNAL OF CHEMICAL PHYSICS vol. 53, no. 2, 15 July 1970, pages 768 - 782 B.P. PULLEN 'PHOTOELECTRON SPECTRA OF METHANE, SILANE, GERMANE, METHYL FLUORIDE, DIFLUOROMETHANE, AND TRIFLUOROMETHANE' cited in the application *

Also Published As

Publication number Publication date
GB2300066B (en) 1997-03-19
EP0612437A1 (en) 1994-08-31
GB9123984D0 (en) 1992-01-02
GB2300066A (en) 1996-10-23
JPH07501418A (en) 1995-02-09
EP0713244A1 (en) 1996-05-22
WO1993010554A2 (en) 1993-05-27

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