GB2300066A - Charged particle energy analyser - Google Patents

Charged particle energy analyser

Info

Publication number
GB2300066A
GB2300066A GB9409425A GB9409425A GB2300066A GB 2300066 A GB2300066 A GB 2300066A GB 9409425 A GB9409425 A GB 9409425A GB 9409425 A GB9409425 A GB 9409425A GB 2300066 A GB2300066 A GB 2300066A
Authority
GB
United Kingdom
Prior art keywords
electrodes
charged particle
hemispherical
particle energy
analyser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB9409425A
Other versions
GB2300066B (en
Inventor
Ian Robert Holton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fisons Ltd
Original Assignee
Fisons Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fisons Ltd filed Critical Fisons Ltd
Publication of GB2300066A publication Critical patent/GB2300066A/en
Application granted granted Critical
Publication of GB2300066B publication Critical patent/GB2300066B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

A charged particlee analyser (1) comprises an inner electrode (2) and an outer electrode (3) defining a gap between opposed curved surfaces of the electrodes for the passage of charged particles deflected on application of an electric field from a source to a detector (12) in surface analysis techniques. The electrodes are preferably hemispherical or part-hemispherical and are formed from a sheet of metal by a pressing technique. Preferably the electrodes (2, 3) are each formed to a tolerance of within about 0.13 mm so as to achieve a high transmission at a high resolution. A base plate (4) for the electrodes (2, 3) is preferably formed of two spaced, relatively thin sheets (29, 30) joined at a plurality of discrete points.
GB9409425A 1991-11-12 1992-11-11 Charged particle energy analyser Expired - Lifetime GB2300066B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB919123984A GB9123984D0 (en) 1991-11-12 1991-11-12 Charged particle energy analyser
PCT/GB1992/002083 WO1993010554A2 (en) 1991-11-12 1992-11-11 Charged particle energy analyser

Publications (2)

Publication Number Publication Date
GB2300066A true GB2300066A (en) 1996-10-23
GB2300066B GB2300066B (en) 1997-03-19

Family

ID=10704472

Family Applications (2)

Application Number Title Priority Date Filing Date
GB919123984A Pending GB9123984D0 (en) 1991-11-12 1991-11-12 Charged particle energy analyser
GB9409425A Expired - Lifetime GB2300066B (en) 1991-11-12 1992-11-11 Charged particle energy analyser

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB919123984A Pending GB9123984D0 (en) 1991-11-12 1991-11-12 Charged particle energy analyser

Country Status (4)

Country Link
EP (2) EP0612437A1 (en)
JP (1) JPH07501418A (en)
GB (2) GB9123984D0 (en)
WO (1) WO1993010554A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228190A1 (en) * 1992-08-25 1994-03-03 Specs Ges Fuer Oberflaechenana Charged particle analyzer
CN112147667A (en) * 2020-09-11 2020-12-29 兰州空间技术物理研究所 Sensor for space low-energy ion detection

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB869239A (en) * 1958-06-10 1961-05-31 Mullard Ltd Improvements in or relating to the manufacture of metallic grid structures
JPS6084755A (en) * 1983-10-14 1985-05-14 Seiko Instr & Electronics Ltd Hot-cathode electron impact type ion source
US4742224A (en) * 1986-12-22 1988-05-03 American Telephone And Telegraph Company At&T Bell Laboratories Charged particle energy filter
EP0397032A2 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Method for manufacturing metal cylinder members of electron tubes and method for manufacturing magnetron anodes

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1303136A (en) * 1970-02-27 1973-01-17

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB869239A (en) * 1958-06-10 1961-05-31 Mullard Ltd Improvements in or relating to the manufacture of metallic grid structures
JPS6084755A (en) * 1983-10-14 1985-05-14 Seiko Instr & Electronics Ltd Hot-cathode electron impact type ion source
US4742224A (en) * 1986-12-22 1988-05-03 American Telephone And Telegraph Company At&T Bell Laboratories Charged particle energy filter
EP0397032A2 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Method for manufacturing metal cylinder members of electron tubes and method for manufacturing magnetron anodes

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
Journal of Physics E Scientific Instruments, vol 10, 1977, pages 134-139 *
Journal of Physics E Scientific Instruments, vol 20, no 6, June 1987, pages 721-731 *
Patent Abstracts of Japan, vol 9, no 230 (E-343), 17 September 1985 & JP 60 084 755 A *
Review of Scientific Instruments, vol 35, no 12, December 1964, pages 1698-1704 *
The Journal of Chemical Physics, vol 53, no 2, 15 July 1970,pages 768-782 *

Also Published As

Publication number Publication date
EP0612437A1 (en) 1994-08-31
GB9123984D0 (en) 1992-01-02
EP0713244A1 (en) 1996-05-22
JPH07501418A (en) 1995-02-09
GB2300066B (en) 1997-03-19
WO1993010554A3 (en) 1993-06-24
WO1993010554A2 (en) 1993-05-27

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)