WO1992016962A2 - Single quantum well led - Google Patents
Single quantum well led Download PDFInfo
- Publication number
- WO1992016962A2 WO1992016962A2 PCT/US1992/001963 US9201963W WO9216962A2 WO 1992016962 A2 WO1992016962 A2 WO 1992016962A2 US 9201963 W US9201963 W US 9201963W WO 9216962 A2 WO9216962 A2 WO 9216962A2
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- WO
- WIPO (PCT)
- Prior art keywords
- gain
- current density
- saturation region
- emitting diode
- light emitting
- Prior art date
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- 230000003287 optical effect Effects 0.000 claims abstract description 24
- 239000004065 semiconductor Substances 0.000 claims abstract description 8
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 claims description 2
- 244000042038 Tropaeolum tuberosum Species 0.000 claims 1
- 238000000034 method Methods 0.000 description 10
- 238000002310 reflectometry Methods 0.000 description 7
- 230000001629 suppression Effects 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 6
- 238000013459 approach Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 238000005253 cladding Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910017401 Au—Ge Inorganic materials 0.000 description 1
- 235000008694 Humulus lupulus Nutrition 0.000 description 1
- 244000025221 Humulus lupulus Species 0.000 description 1
- 230000005374 Kerr effect Effects 0.000 description 1
- OCYROESYHWUPBP-CIUDSAMLSA-N Pro-Ile Chemical compound CC[C@H](C)[C@@H](C([O-])=O)NC(=O)[C@@H]1CCC[NH2+]1 OCYROESYHWUPBP-CIUDSAMLSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 108010015796 prolylisoleucine Proteins 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- VLCQZHSMCYCDJL-UHFFFAOYSA-N tribenuron methyl Chemical compound COC(=O)C1=CC=CC=C1S(=O)(=O)NC(=O)N(C)C1=NC(C)=NC(OC)=N1 VLCQZHSMCYCDJL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/0045—Devices characterised by their operation the devices being superluminescent diodes
Definitions
- the present invention relates to light-emitting diodes (LEDs) and superluminescent diodes (SLDs), and in particular to LEDs and SLDs having a single quantum well structure.
- LEDs light-emitting diodes
- SLDs superluminescent diodes
- LEDs and particularly SLDs
- SLDs have found an increasing number of applications, including optical fiber gyroscopes and various other optical sensors.
- the expanded use of SLDs is due to the characteristics of high-coupled power, short coherence length, and broad emission spectrum.
- the broad band emission characteristics of the SLD reduce backscatter noise in these hybrid gyroscopes, and mitigate the nonlinear Kerr effect.
- SLDs show much less polarization of the output power, as compared to laser diodes, which helps further in reducing noise in the gyroscope. These characteristics are also very desirable for use in multimode fiber communication systems, where they help reduce modal noise.
- a key concern in the design of an LED or SLD is the suppression of lasing, and the avoidance of the corresponding reduction in the width of the emission spectrum which accompanies lasing.
- Several lasing suppression techniques have been successfuDy used in the past, but many of these techniques suffer as a result of low temperature operation.
- Common techniques for preventing lasing include suppressing optical feedback from the device facets, and increasing intercavity loss. Suppression of optical feedback is usually achieved by using low reflectivity facet coatings. Increasing cavity losses is usually accomplished by pumping only a portion of the cavity length.
- An example of a lasing suppression technique that relies upon facet reflectivity to prevent lasing is set forth in U.S. Patent 4,730,331.
- the present invention provides a light-emitting diode that comprises a single quantum well active layer, and that relies upon the gain saturation feature of a quantum well to prevent lasing.
- the terms "light-emitting diode” and “LED” will be used hereafter to include superluminescent diodes.
- the light-emitting diode of the present invention comprises a layered semiconductor structure having a single quantum well active layer surrounded by first and second confinement layers.
- the active layer is characterized by a confinement factor r, and by a gain vs. current density function that includes a gain saturation region in which the differential gain is small compared to the differential gain at other values of current density.
- a stripe electrode is formed on a first surface of the semiconductor structure, such that the length of the semiconductor structure along the direction of the stripe electrode defines an optical cavity.
- the optical cavity is characterized by a threshold gain required to produce lasing in the optical cavity, the threshold gain being greater than the gain in the gain saturation region.
- the stripe electrode has an area that defines a current density range corresponding to the operating current range of the device. The area of the electrode is selected such that the current density range is within the gain saturation region.
- the length of the stripe electrode is less than the length of the optical cavity, such that the optical cavity includes an unpumped region.
- the gain vs. current density function includes first and second gain saturation regions, and the device is operated in the second gain saturation region.
- This embodiment produces a broad band emission spectrum that is particularly suitable for use in a WDM optical fiber-based sensing system.
- FIGURE 1 is a schematic perspective view of an LED according to the present invention
- FIGURE 2 is a graph showing the band gap, thickness, and composition of portions of the device shown in FIGURE 1;
- FIGURE 3 is a graph illustrating the density of states function for a quantum well device
- FIGURES 4a and 4b are graphs comparing the confinement factor of a conventional LED and a quantum well LED;
- FIGURE 5 is a graph illustrating the mode gain as a function of current density for a quantum well device, illustrating the gain saturation region;
- FIGURE 6 is a graph illustrating the mode gain as a function of current density for a second embodiment of the invention.
- FIGURE 7 is a spectrum for the device of FIGURE 6.
- FIGURES 1 and 2 illustrate a light-emitting diode (LED) in accordance with the present invention.
- LED 10 comprises a layered semiconductor structure 12 of length L, the structure comprising substrate 14, n-cladding layer 16, waveguide region 18, p-cladding layer 20, and contact layer 22.
- the lower surface of substrate 14 comprises electrode 30 that typically extends for the full area of the lower surface of the substrate.
- Stripe electrode 32 is formed on the upper surface of the semiconductor structure on contact layer 22. Electrodes 30 and 32 define an optical cavity 34 of length L in waveguide region 18. For reasons explained below, the length of electrode 32 is typically less than L, such that optical cavity 34 includes an unpumped region.
- Waveguide region 18 is illustrated in greater detail in the energy level diagram shown in FIGURE 2, for a gallium arsenide/gallium aluminum arsenide system.
- cladding layers 16 and 20 have relatively high band gaps, and an aluminum content, of 5096.
- Waveguide region 18 comprises confinement layers 40 and 42 positioned on opposite sides of quantum well active layer 44.
- Active layer 44 comprises GaAs (0% aluminum), and has the lowest band gap.
- the aluminum content and band gap of the confinement layers provides a gradual transition between quantum well active layer 44 and clad ⁇ ng layers 16 and 20.
- Typical thicknesses are 1.2 u for the cladding layers, 2000 A for the confinement layers, and 100 A for the active layer.
- the principal difference between a quantum well LED or SLD and a conventional LED or SLD lies in the thickness of the active layer of the device.
- the active layer is a reduced band gap layer into which electrons and holes are injected from adjacent, higher band gaps n and p regions.
- the electrons and holes reco bine in the active hiyer, producing photons.
- the active layer thickness is in the range of 100 A, the electrons and holes display quantum size effects. Such effects lead to major qualitative differences in the energy distribution of the electrons and holes, and thus to major modifications of the basic properties of the device.
- FIG U RE 3 This difference is illustrated in FIG U RE 3, in which the density of states in the active region is shown as a function of electron energy.
- the density of states exhibits a smooth parabolic dependence on electron energy, indicated by curve 50.
- the density of states function takes on a staircase shape, indicated by curve 52.
- shaded region 54 provides an example of the states would be filled at a given density of current flowing through the quantum well layer. As the current density is increased, the size of region 54 expands in an upward direction.
- FIGURE 4A is a schematic diagram of a conventional double heterostructure LED, including confinement layers 60 and 62 and active layer 64. Curve 66 represents the evanescent wave profile for light traveling along the cavity formed by active layer 64.
- FIGURE 4B represents a quantum well LED comprising confinement layers 70 and 72 and quantum well layer 74. Again, evanescent wave pro ile 76 is shown.
- the confinement factor of an LED or SLD for a given optical mode is defined as the fraction of the evanescent- wave contained within the active layer.
- FIGURES 4A and 4B demonstrate the much smaller confinement factor that can be achieved with quantum well devices, because of the small thickness of the quantum well layer with respect to the evanescent wave profile.
- a key concern in the design of an LED or SLD is the suppression of lasing.
- the lasing condition can be expressed as follows:
- r is the confinement factor
- t ⁇ is the gain at the lasing threshold
- L is the length of the cavity
- R is the reflectivity of the facets at the ends of the cavity.
- Known techniques for lasing suppression include pumping only a portion of the optical cavity, to thereby increase intercavity absorption ⁇ -, decreasing the facet reflectivity R, or decreasing the cavity length L. All of these changes increase the gain g ⁇ required for the device to reach the threshold and lase.
- FIGURE 5 illustrates the variation of the mode gain rg for a first preferred embodiment of the single quantum well LED of the present invention.
- the mode gain of the LED is represented by curve 80, while the mode gain for a conventional double heterostructure LED is represented by curve 82.
- Line 84 represents the mode gain rg ⁇ required for the device to reach threshold and lase. Because of the low confinement factor of the single quantum well device, large peak gain is usually required to achieve threshold conditions. This is a key aspect of using the single quantum well as the active layer for the LED or SLD.
- curve 82 for a double heterostructure, there is an essentially linear variation of the mode gain with current density. This is to be expected, since the larger the number of electrons injected into the active layer, the greater the opportunity for recombination and optical gain.
- Curve 80 demonstrates a number of the unique features of quantum well LEDs and SLDs.
- the mode gain commences at a low current density Jp and rises rapidly as the current density is increased above that level. This portion of curve 80 corresponds to the sudden availability of states at energy E, in FIGURE 3.
- the mode gain curve then flattens out, producing region 86 in which the differential gain approaches zero. This phenomenon is termed gain saturation, and region 86 is referred to as a gain saturation region.
- the mode gain again begins to increase rapidly. Referring to FIGURE 3, the second- rapid increase is associated with the step at energy level E 2 -
- An LED or SLD according to the present invention operates within gain saturation region 86, the gain saturation region being below the threshold gain required for lasing. As a result, as the current density is increased, the corresponding increase in differential gain from the additional carriers approaches zero.
- By engineering the waveguide layer it is possible to change the confinement factor, and thus change the gain required at threshold.
- By utilizing the gain saturation effect and confinement factor design, an LED or SLD can be made to remain below threshold over a large temperature range.
- the design of an LED or SLD according to the present invention may proceed by first specifying the overall device parameters, including an operating current range for the device.
- the quantum well layer and associated waveguide region e.g., the parameters shown in FIGURE 2 are then defined, to determine the confinement factor of the quantum well layer. This in turn will define the mode gain versus current density curve, i.e., curve 80 in FIGURE 5.
- the area of the stripe electrode is adjusted such that the current density (i.e., the current per unit area) through the quantum well layer will be within gain saturation region 84.
- the length of electrode 32 can be made less than the full length L of the optical cavity. This creates an unpumped absorbing region in the cavity, thereby increasing the intercavity absorption a-, shown in Equation 1 above- An increase in ⁇ : forces a corresponding increase in the threshold gain.
- a second technique for increasing the threshold gain is to decrease the facet reflectivity R, which decrease again causes the right-hand side of Equation 1 to increase.
- decreasing the facet reflectivity allows more light to escape from the cavity, thereby increasing the degree of pumping needed to reach threshold conditions.
- the threshold gain can be increased by decreasing the overall length L of the optical cavity.
- Other techniques for lasing suppression can also be used, as well as combinations of techniques.
- a suitable technique for fabricating the device shown in FIGURES 1 and 2 is by metallorganic chemical vapor deposition (MOCVD) on an n-type gallium arsenide substrate. Silicon nitride is then deposited on the wafer surface by means of plasma-enhanced chemical vapor deposition, e.g., at 300°C.
- the silicon nitride is then patterned by standard photolithographic techniques, and eight micron-wide stripes are opened in the silicon nitride film by plasma etching in a mixture of CF ⁇ and O2.
- Ti/Pt/Au is then deposited on the wafer surface, the wafer is thinned to 100 microns, and Au-Ge/Ni/Au deposited on the backside to create the lower electrode.
- the wafer is cleaved into bars with a total cavity length of 400 microns. Suitable values for the pumped/unpumped cavity lengths are 100/300, 200/200, and 300/100 microns. Generally, no antireflection coatings are required.
- the described device is but one possible way of producing the LED of the present invention.
- the use of short cavity lengths or low reflectivity facet coatings can also be used, rather than an unpumped absorbing region.
- the graded index confinement layers illustrated in FIGURE 2 tend to increase the confinement factor, thus reducing the threshold gain as compared to a step index profile.
- a device having a more simple, step index waveguide region, thus reducing the confinement factor would also be favorable.
- FIGURE 6 A second preferred embodiment of the LED of the present invention is illustrated in FIGURE 6.
- curve 90 illustrates the mode gain of the LED as a function of current density, in a manner similar to that of curve 80 in FIGURE 5.
- the mode gain begins to rise at a relatively low current density J , and rises rapidly as the current density is increased above that level. This corresponds to the sudden availability of states at energy E j in FIGURE 3.
- the mode gain curve then flattens out, producing a first gain saturation region 96 in which the differential gain approaches zero.
- the current density curve 90 again begins to rapidly increase at current density J3, this rapid increase being associated with the step at energy level E2 in FIGURE 3.
- FIGURE 7 presents a graph of the actual spectrum of an LED according to the present invention, operating within the second gain saturation region.
- 100 has a width of about 96 nanometers, much broader than typical LEDs and
- typical surface emitting LEDs have spectral widths in the
- LED of the present invention and the second gain saturation region is to ensure that the mode gain at threshold 94 is substantially above the mode gain in the second saturation region 98.
- the broad output spectrum shown in FIGURE 7 will begin to develop narrow peaks characteristic of stimulated emission, as the device approaches lasing
- the LED whose spectrum is shown in FIGURE 7 had the epitaxial structure shown in FIGURES 1 and 2, and its power output was 3.5 mW at 200 mA. Due to the device's edge-emitting structure, power coupled into an optical fiber was much higher than surface-emitting While the LED did not emit the high power (10-15 m W) of many SLDs, the combination of the broad spectral width and good output power make this an extremely useful device. In particular, the described device is extremely useful for multimode fiber communication systems, where modal noise is a key concern and for wavelength division multiplexed systems, in which a broadband source is needed.
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Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US66741191A | 1991-03-11 | 1991-03-11 | |
US667,411 | 1991-03-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1992016962A2 true WO1992016962A2 (en) | 1992-10-01 |
WO1992016962A3 WO1992016962A3 (en) | 1992-11-12 |
Family
ID=24678105
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1992/001963 WO1992016962A2 (en) | 1991-03-11 | 1992-03-11 | Single quantum well led |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU1877492A (en) |
WO (1) | WO1992016962A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010022526A2 (en) * | 2008-08-26 | 2010-03-04 | Exalos Ag | Superluminescent diode, or amplifier chip |
-
1992
- 1992-03-11 AU AU18774/92A patent/AU1877492A/en not_active Abandoned
- 1992-03-11 WO PCT/US1992/001963 patent/WO1992016962A2/en active Application Filing
Non-Patent Citations (5)
Title |
---|
APPLIED PHYSICS LETTERS. vol. 56, no. 14, 2 April 1990, NEW YORK US pages 1345 - 1346 T. R. CHEN ET AL. 'Quantum well superluminescent diode with very wide emission spectrum' * |
ELECTRONICS LETTERS vol. 13, no. 10, 12 May 1977, ENAGE GB page 291 W. HARTH ET AL. 'Modulation characteristics of double-heterostructure superluminescent diodes' * |
ELECTRONICS LETTERS vol. 19, no. 25/2, 8 December 1983, ENAGE GB pages 1082 - 1084 M.KRAKOWSKI ET AL. 'Low threshold current GaAs/GaAlAs GRIN-SCH stripe lasers grown by OMVPE' * |
FREQUENZ vol. 33, no. 10, October 1979, BERLIN DE pages 278 - 283 J. BOECK ET AL. 'AlGaAs/GaAs double-heterostructure superluminescent diodes for optical transmission systems' * |
PATENT ABSTRACTS OF JAPAN vol. 14, no. 496 (E-996)29 October 1990 & JP,A,22 05 365 ( NIPPON TELEGRAPH & TELEPHON CORP. ) 15 August 1990 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010022526A2 (en) * | 2008-08-26 | 2010-03-04 | Exalos Ag | Superluminescent diode, or amplifier chip |
WO2010022526A3 (en) * | 2008-08-26 | 2010-07-15 | Exalos Ag | Superluminescent diode, or amplifier chip |
Also Published As
Publication number | Publication date |
---|---|
WO1992016962A3 (en) | 1992-11-12 |
AU1877492A (en) | 1992-10-21 |
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