WO1992014863A1 - Procede et dispositif de formation d'un alliage par diffusion en phase gazeuse - Google Patents

Procede et dispositif de formation d'un alliage par diffusion en phase gazeuse Download PDF

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Publication number
WO1992014863A1
WO1992014863A1 PCT/US1992/001132 US9201132W WO9214863A1 WO 1992014863 A1 WO1992014863 A1 WO 1992014863A1 US 9201132 W US9201132 W US 9201132W WO 9214863 A1 WO9214863 A1 WO 9214863A1
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Prior art keywords
stream
particles
gas
reactive gas
particle
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PCT/US1992/001132
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English (en)
Inventor
Ronald W. Smith
Zaher Z. Matasim
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Drexel University
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Publication of WO1992014863A1 publication Critical patent/WO1992014863A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases

Definitions

  • the invention relates to a method and apparatus for gas phase diffusion alloying of a material and, more particularly, for plasma spray- forming and synthesizing coatings and near net- shape, substantially homogeneous, dense alloys having improved mechanical properties and wear resistance.
  • particulate processing in which a material is mechanically mixed with a reactive material such as carbon or carbides prior to sintering of the mixture.
  • the resulting materials were unsatisfactory because of non- uniform distribution of the resulting reacted products in the material matrix.
  • a two-fluid atomizer is used to atomize a molten metal alloy with an inert gas. Droplets of molten alloy cool and partially solidify during spraying, and splatter when projected onto a substrate. The accumulating droplets form a solid layer having a fine grain size and relatively low porosity.
  • the molten metal alloy to be sprayed must have the same composition as the final product.
  • Conventional spray-forming does not allow for synthesis of materials.
  • This spray- forming process is not suitable for use with reactive metals because of difficulties in forming a reactive metal spray. A refinement on the spray-forming process
  • TH is spray casting, or the Osprey process.
  • a stream of molten metal is atomized with an atomizing gas to produce a spray of liquid droplets.
  • the atomizing gas comprises an inert gas and may further include a reactive component such as oxygen or methane for reaction with the molten metal.
  • this method has been used to produce dispersions of aluminum oxide and titanium carbide in ferrous matrices.
  • particles containing reactive elements such as carbon or boron, in solution may be injected into the spray.
  • the temperature at which the Osprey TM process is carried out is not sufficient to dissociate a reactive gas into ions. This process is not suitable for use with refractory metals or frnyr ceramics.
  • the droplets formed in the Osprey process are larger than the particles formed in the present method and reacted material is not as finely dispersed in the matrix.
  • the Osprey process is carried out in bulk and is not suitable for coating particles and producing powders and films.
  • Reinforced alloys having high strength and modulus and good elevated temperature stability may be formed by an in-situ vapor-liquid-solid (VLS) process, as discussed in U.S. Patent No. 4,808,372 of M. Koczak et al.
  • Gas is introduced into a molten composition comprising a matrix liquid and at least one refractory carbide-forming component.
  • a reactive component is also provided which reacts with the refractory component to form a refractory material dispersed in the matrix liquid.
  • the liquid is cooled to form a solid composite material.
  • the VLS process is not well-suited for ionizing a reactive gas nor for use with reactive metals.
  • the present method provides a much greater particle surface area and enhanced mixing to produce a more homogeneous and finely distributed product at a faster rate.
  • Plasma spraying involves introducing a powdered material such as a metal into high temperature inert plasma, such as the plasma generated by a plasma gun.
  • the powder rapidly melts and is projected onto a cool substrate.
  • This process has a number of drawbacks.
  • the powder must be of the same composition as the desired product, thereby eliminating the possibility of synthesizing materials.
  • Plasma- spray forming is carried out at rates substantially less than those of conventional spray-forming processes and is therefore less efficient. Plasma spraying is most often employed for application of coatings or formation of small near net-shape products.
  • One aspect of the present invention comprises a method for gas phase diffusion alloying of a material.
  • the material may be selected from the group consisting of metals and ceramics.
  • Solid particles of the material are injected into a high temperature inert gas stream, or plasma jet. The temperature of the jet is sufficient to substantially liquefy the particles.
  • a reactive gas is injected into the high temperature stream for dissociation and reaction with the particles while the particles are suspended in the stream and are at least partially in a liquid state.
  • the reactive gas is injected into the stream after the stream has been heated to the high temperature.
  • At least one element of the reactive gas diffuses into the liquid particle to form a compound of the material and the element in at least a portion of the particle.
  • the alloyed material is cooled.
  • the plasma jet may propel the alloyed material against a substrate while the material is still partially liquid and thereby disperse the compound and material as a coating on the substrate. Alternatively, the alloyed material may be collected as a coated particle.
  • the apparatus includes a means for supplying a stream of inert gas and a means for heating the gas to a temperature sufficient to liquefy particles of the material.
  • the supply and heating means comprise a plasma gun.
  • the apparatus further includes means for injecting solid particles of the material into the heated stream.
  • Means for injecting a reactive gas containing the element into the heated stream are also provided, the heated stream having a temperature sufficient to dissociate the reactive gas.
  • the apparatus includes means for cooling the alloyed material, preferably by directing the stream into an environmentally controlled area and collecting the particles in a collection system or depositing the particles on a substrate.
  • Fig. 1 is a schematic diagram of a portion of the gas phase diffusion alloying process in accordance with the present invention
  • Fig. 2 is a simplified representation of the particulate/reactive gas phase reaction and consolidation in accordance with the present invention.
  • Fig. 3 is a schematic diagram of a process chamber and plasma gun for high temperature gas phase diffusion alloying in accordance with the present invention.
  • Fig. 4 is a cross-sectional side view of a suitable plasma gun and plasma reactor for gas phase diffusion alloying in accordance with the present invention.
  • Fig. 1 a diagram of the preferred method for gas phase diffusion alloying. This method will be discussed with reference to a schematic apparatus 10, it being understood, however, that the method may be carried out with apparatuses having various configurations in keeping with the spirit and scope of the present invention.
  • the material 12 to be alloyed is provided in the form of particles of materials selected from the group consisting of metals and ceramics.
  • the material 12 must possess a melting point and must not decompose at reaction temperatures on the order of 5000*K to 10,000*K.
  • the material 12 is selected from the group consisting of transition metals, aluminum, silicon, and combinations and oxides thereof.
  • transition metals which may be used in accordance with the present method are tungsten, titanium, molybdenum, aluminum, niobium, nickel, chromium, cobalt, iron, hafnium, and yttrium.
  • Ceramics for use in the present method include alumina, titania, yttria, and zirconia, it being understood, however, that the present method is not limited to use with only the examples set forth above.
  • the method comprises providing a high temperature stream 14 of inert gas, preferably a plasma jet 16.
  • the jet be provided by a direct current (d.c.) plasma gun 18 (best shown in Fig. 4), although the jet may be provided by a radio frequency induction coupled discharge or other suitable means.
  • the stream 14 is heated and expanded through a nozzle 20 (see Fig. 4) to form an intense plasma jet 16 having core temperatures which may reach up to 20,000 , K.
  • the plasma gun 18 heats the plasma jet 16 to temperatures ranging from 5,000*K to 20,000'K.
  • a suitable plasma gun 18 is a 120 k plasma spray system commercially available from Electro-Plasma as Model No. 03CA.
  • the gun 18 is equipped with gas spray nozzle 20 (Electro-Plasma Model No. 93) .
  • the gun 18 includes a cathode 22 and an anode 24 for forming a direct current arc (not shown) .
  • the cathode 22 may be formed from thiorated tungsten and the anode 24 from copper. although one skilled in the art would understand that the cathode 22 and anode 24 may be formed from other highly conductive materials.
  • the gun 18 may be actuated by a torch manipulator 26 (see Fig. 3) to facilitate deposit of the alloyed material onto a substrate 50, if desired.
  • the torch manipulator 26 may be controlled by a conventional controller (not shown) and may be powered by conventional means well within the knowledge of those skilled in the art.
  • the plasma jet 16 is electrically neutral but contains many thermally excited atomic states
  • the inert gas provides a medium for carrying out the reaction and for transferring energy to heat the reactants and propagate the reaction.
  • the inert gas may be selected from the group consisting of argon, helium, hydrogen, nitrogen and combinations thereof.
  • Helium and hydrogen gases may be included in the inert gas to increase the enthalpy and heat transfer in the stream 14.
  • the selection of an inert gas may be influenced by the melting point of the material.
  • a mixture of argon and hydrogen may be used with a material having a high melting point such as C103, a niobium alloy
  • the mixture of inert gases may be argon and helium.
  • the flow rate of the inert gas stream 14 ranges from 140 scfh to 400 scfh, although one skilled in the art would understand that the flow rate may vary based upon a number of factors, such as the flow rates of the reactant streams, spray distance, material particle size and melting point, input temperatures of the reactants, etc.
  • the method further comprises means for injecting solid particles 30 of the material 12 into the plasma jet 16.
  • the particles are injected through inlet ports 32 in the plasma gun 18, as shown in Figs. 1 and 4.
  • the inlet ports 32 are preferably located proximate the upstream end of the nozzle 20.
  • the particles 30 are preferably fed through a powder feeder 34 which is controlled by a controller (not shown) .
  • the preferred powder feeder 34 is an EPI volumetric feeder, however one skilled in the art would understand that one of many different types of feeders, too numerous to mention, could be employed.
  • the particles 30 are preferably injected with a carrier gas 28 (see Fig. 3) to facilitate injection.
  • the carrier gas 28 is preferably an inert gas, such as argon.
  • the particles 30 and carrier gas 28 are not preheated prior to injection, although they may be.
  • the particles 30 are injected with the carrier gas 28 into the hot plasma jet 16 where the particles 30 melt.
  • the flow rates of particles and carrier gas are not particularly critical to the present invention and will depend upon such factors as the particular apparatus employed, the plasma gas flow rate and the particular reaction and application being performed.
  • the diameter of the material particles 30 typically ranges from 5 to 45 microns, although greater conversion may be obtained using particles less than 5 microns. Smaller particles possess a higher surface-to-volume ratio, which enhances the reaction, and may be used where more complete alloying (as contrasted with coating) is desired.
  • the stream of inert gas must be heated to a temperature sufficient to substantially liquefy or melt the particles of material.
  • the method further comprises injecting a reactive gas 36 into the plasma jet 16.
  • the plasma gun 18 is equipped with a reactor 38 (see also Fig. 4) .
  • the reactor 38 has inlet ports 40 in its walls 42, through which the reactive gas 36 is injected into the plasma jet 16.
  • the reactive gas may be injected countercurrent to the flow of the plasma jet 16 to enhance mixing and reaction. It is preferred that the reactive gas be injected radially with a tangential swirl component.
  • the reactor 38 is shaped in the form of a cylindrical tube.
  • the reactive gas 36 is comprised of at least one element 44 which dissociates or ionizes in the high temperature plasma jet 16.
  • element 44 include silicon, nitrogen, carbon, oxygen, boron, fluorine, or sulfur, to name a few, which are reacted with particles of the material to form a coating or film of carbides, carbo-nitrides, silicon carbide, oxides, or fluorides on the particles.
  • the uniformity of the surface coating depends on the size of the molten particles 30, the particle surface temperature, and the diffusion of reactive gas element(s) 44 into the particle.
  • Suitable reactive gases 36 include, for example, methane, propylene, fluorine, nitrogen, acetylene, disilane, boron trifluoride, oxygen, and combinations thereof.
  • reactive gases comprising various other reactive elements may be used in the keeping with the spirit and scope of the present invention.
  • At least one element 44 of the reactive gas 36 diffuses into the liquid particle 30 to form a compound of the material and the element in at least a portion of the particle 30, thereby forming a film on the particle 30.
  • the thickness of the film is generally greater than 0.005 microns.
  • the center of the particle remains molten and the film takes the form of a hardened shell.
  • Fig; 2 is a highly simplified representation and that elements 44 form a diffusion coating on the particles, and actually penetrate the particles 30 to react with the material and form compounds between the elements 44 and the materials 12. Atoms of the elements migrate toward the center of the particles 30 to form alloys in the material matrix with a decreasing concentration gradient from the surface toward the center.
  • the term "alloyed" in reference to the material, after reaction of the element with the material particle and diffusion of the element into the particle, is intended to include both reacted states (i.e., where a compound of the element and material are formed) and alloyed states (i.e., where the element is present in the material matrix but does not actually form a compound) . It will be understood by those skilled in the art of diffusion coatings that a gradient of these "alloyed" states will exist in the particle from surface to center.
  • the plasma jet 16 propels the particles 48 of alloyed material against a substrate 50, causing the particles 48 to flatten and adhere to the substrate 50 or onto prior deposited particles 48.
  • the velocity of the particles 48 at impact may typically be in the range of several hundred m/s.
  • the film covering the particle of reacted material ruptures and produces on the substrate surface 52 a deposit of dispersoids 54 of the compounds comprised of reacted elements and the material 12, unreacted elements, if any, and unreacted material.
  • the density and microstructure of the dispersion are influenced by the temperature profiles of the plasma jet and the particle trajectories within the plasma jet and the reactor which determine each particle's degree of melting.
  • the degree of conversion of the surface of each particle also depends on the concentration of reactive gas as well as the residence time during which the particles and the elements are in contact.
  • a free-fall cooling zone may be provided with a powder collection system 64 as in Figure 3 to respectively freeze and collect reacted particles which have surface films as coatings.
  • the film on the particles may also be used to stabilize materials or may provide a catalytic particle surface for use in subsequent powder metallurgy components, as a sintering aid, or for use as surfactants on particles used in reactor beds. As best shown in Fig.
  • the reactive gas 36 is intimately contacted with the molten particles 30 of material 12 in the plasma jet 16.
  • the reactor 38 increases mixing and residence time to allow sufficient contact between the elements 44 and the particles 30 to form the alloyed material 46 (see also Fig. 2) .
  • the reactor 38 also allows the particles 30 to remain in a molten state for a longer period of time, thereby enhancing the completeness of the reaction.
  • the reactive gas 36 is introduced into the jet sufficiently downstream from the cathode 22 and anode 24 to protect the electrodes from reacting with the reactive gas.
  • the reactive gas 36 be injected into the reactor 38 as near to the distal end of the nozzle 20 of gun 18 as possible, such as by ring injector 43, in order to prolong the residence time of the particles 30 in the reactor 38. Residence times are typically on
  • the preferred concentric, cylindrical shape of the reactor 38 optimizes the mixing process. Addition of the reactive gas 36 in the reactor 38 minimizes any undesirable side reaction between the reactive gas 36 and the cathode 22 and anode 24.
  • tubular reactor 38 may be cooled by circulating water 56 through cooling jackets 57, although hot wall designs may also be used.
  • a shroud gas 58 may be injected, also by ring injector 43, to flow along the inside of the walls.
  • the shroud gas 58 is preferably an inert gas, such as argon, and may be the same as or different from the inert gas of the plasma jet 16.
  • the flow rate of shroud gas 58 ranges from 30 to 100 scfh, although this rate may be varied in response to changes in the reactive materials and other processing parameters.
  • the apparatus 10 further includes means for cooling or solidifying the alloyed material 16.
  • the plasma gun and reactor are preferably attached to and the inert gas stream directed into an environmentally controlled area such as a vacuum chamber 60.
  • the controlled area may be a shroud of inert gas or air in an open environment.
  • the chamber pressure may range from
  • the chamber 60 may contain an inert gas or air, preferably a mixture of argon and helium, i.e. the inert gas of the plasma stream which is continuously exhausted by a vacuum pump (not shown) .
  • the inert gas in the chamber 60 reduces the likelihood of uncontrolled reactions or contamination of the materials.
  • the vacuum chamber 60 has a means for mounting a substrate 50 (see Fig. 1) on which to form a deposit or a collector system 64 (see Fig. 3) to collect coated particles.
  • the substrate 50 is suitably formed from steel, although one skilled in the art would understand that the substrate 50 may be formed from any high temperature material to be coated in keeping with the spirit and scope of the present invention.
  • the substrate 50 is suitably positioned from 3 to 6 inches from the distal end of the reactor 38.
  • the substrate 50 may be fixed into a robotic manipulator (not shown) .
  • the particles 30 are injected at a feed rate of 100 grams per minute.
  • the current supplied to the arc is 1100 amperes.
  • the velocity of the plasma jet 16 is approximately 1000 m/s.
  • the temperature of the plasma jet 16 upon exiting the gun 18 is approximately 12,000 *K.
  • the temperature of the jet 16 is approximately 4000*K to 6000'K.
  • the present vacuum chamber 60 is similar to that disclosed by A. Ducati in U.S. Patent No. 3,010,009 and that which is commercially available from Electro-Plasma as Model No. LPPS (low pressure plasma spray) .
  • the pressure within the chamber 60 is 200 torr.
  • the substrate 50 is a rectangular steel coupon of 25 mm by 75 mm which is grit blasted with 60 mesh alumina to create a rough surface to facilitate adherence of the alloyed material 46.
  • the chamber pressure was maintained at 200 torr; (2) the plasma arc current was 1100 amps; (3) the material feed rate was 100 g/min with 18 scfh argon as a carrier gas; (4) the spray time was 1 minute.
  • titanium was fed into the plasma jet at a flow rate of 100 g/min.
  • the plasma jet consisted of argon and helium at flow rates of 140 scfh and 60 scfh. - 18 - respectively.
  • argon was used as the gas (non-reactive) at a flow rate of 16 scfh.
  • the argon shroud gas flow rate was 100 scfh.
  • the spray distance was 3 inches.
  • titanium was reacted with propylene at a flow rate of 20 scfh.
  • titanium was reacted with 20 scfh oxygen.
  • the shroud gas flow rate and spray distance were the same as that used in Run No. 17.
  • the room temperature microhardness (Vickers hardness number) of the alloyed material formed in Run No. 17, using argon as the "reactive" gas was 284 VHN (av.) at 300 g load.
  • the microhardness of the alloyed material produced in Run No. 21, using propylene as the reactive gas was 456 VHN (av.), also at a 300 g load.
  • the microhardness value, 693, when oxygen was used as the reactive gas (Run No. 22) was almost double the value obtained when argon was used.
  • the microhardness of the alloyed material formed in Run No. 31, using argon as the reactive gas was 308 VHN (av.) at 200 g load.
  • the microhardness of the alloyed material produced in Run No. 33, using disilane as the reactive gas, was 546 VHN (av.), also at a 200 g load. Similarly dramatic results were observed for other test materials.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

L'invention décrit un procédé et un dispositif servant à réaliser en phase gazeuse un alliage de métal ou de céramique fondus avec un élément (44) dissocié d'un gaz réactif (36). On utilise un canon à plasma (18) pour créer un courant de gaz inerte à température élevée liquéfiant pratiquement les particules de métal ou de céramique (30) injectées dans ledit courant. Le canon à (18) est équipé d'un réacteur (38) au moyen duquel on injecte un gaz réactif (36) dans le courant contenant les particules de métal ou de céramique (30). Un élément, au moins, dissocié du gaz réactif (36) réagit avec les particules liquides de métal ou de céramique (30) en suspension dans le courant par diffusion dans les particules liquides (30) pour former un composé de métal ou de céramique et dudit élément dans au moins une partie desdites particules. Les particules ainsi alliées peuvent être solidifiées et recueillies comme telles ou bien dispersées sur un substrat (50) et refroidies pour former un revêtement.
PCT/US1992/001132 1991-02-15 1992-02-12 Procede et dispositif de formation d'un alliage par diffusion en phase gazeuse WO1992014863A1 (fr)

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US65688691A 1991-02-15 1991-02-15
US656,886 1991-02-15

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2574947C1 (ru) * 2014-10-10 2016-02-10 Открытое Акционерное Общество "Уральский научно-исследовательский институт композиционных материалов" Устройство для объёмного металлирования

Citations (8)

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Publication number Priority date Publication date Assignee Title
GB1141775A (en) * 1965-06-25 1969-01-29 Ciba Ltd Production of particulate, non-pyrophoric metals
US3909241A (en) * 1973-12-17 1975-09-30 Gte Sylvania Inc Process for producing free flowing powder and product
US4731517A (en) * 1986-03-13 1988-03-15 Cheney Richard F Powder atomizing methods and apparatus
US4741286A (en) * 1985-05-13 1988-05-03 Onoda Cement Company, Ltd. Single torch-type plasma spray coating method and apparatus therefor
US4778515A (en) * 1986-09-08 1988-10-18 Gte Products Corporation Process for producing iron group based and chromium based fine spherical particles
US4818837A (en) * 1984-09-27 1989-04-04 Regents Of The University Of Minnesota Multiple arc plasma device with continuous gas jet
US4898748A (en) * 1988-08-31 1990-02-06 The Board Of Trustees Of Leland Stanford Junior University Method for enhancing chemical reactivity in thermal plasma processes
US5043548A (en) * 1989-02-08 1991-08-27 General Electric Company Axial flow laser plasma spraying

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1141775A (en) * 1965-06-25 1969-01-29 Ciba Ltd Production of particulate, non-pyrophoric metals
US3909241A (en) * 1973-12-17 1975-09-30 Gte Sylvania Inc Process for producing free flowing powder and product
US4818837A (en) * 1984-09-27 1989-04-04 Regents Of The University Of Minnesota Multiple arc plasma device with continuous gas jet
US4741286A (en) * 1985-05-13 1988-05-03 Onoda Cement Company, Ltd. Single torch-type plasma spray coating method and apparatus therefor
US4731517A (en) * 1986-03-13 1988-03-15 Cheney Richard F Powder atomizing methods and apparatus
US4778515A (en) * 1986-09-08 1988-10-18 Gte Products Corporation Process for producing iron group based and chromium based fine spherical particles
US4898748A (en) * 1988-08-31 1990-02-06 The Board Of Trustees Of Leland Stanford Junior University Method for enhancing chemical reactivity in thermal plasma processes
US5043548A (en) * 1989-02-08 1991-08-27 General Electric Company Axial flow laser plasma spraying

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2574947C1 (ru) * 2014-10-10 2016-02-10 Открытое Акционерное Общество "Уральский научно-исследовательский институт композиционных материалов" Устройство для объёмного металлирования

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