WO1991004571A1

WO1991004571A1 - Time-of-flight mass spectrometer

Info

Publication number: WO1991004571A1
Application number: PCT/SU1989/000239
Authority: WO
Inventors: Georgy Georgievich Managadze
Original assignee: Institut Kosmicheskikh Issledovany Akademii Nauk Sssr
Priority date: 1989-09-12
Filing date: 1989-09-12
Publication date: 1991-04-04

Abstract

A time-of-flight mass spectrometer comprises an ion source (2) consisting of a grid assembly, a drift space (3) with a focusing system (4), a reflector (5) and a detector (6). The grid assembly has the shape of a ring with the internal diameter equal to that of the detector (6), whereas the focusing system (4) consists of two cylinders (15, 16) coaxially mounted in the drift space (3) whose diameters are equal, respectively, to the internal and the external diameter of the grid assembly of the ion source (2). The time-of-flight mass spectrometer is intended mainly for studying the mass composition of an inert gas, of a low-energy ion flux as well as of a plasma in a vacuum.

Description

ΒΡΕΜYALΡΟLΕΤSH ΜΑSS-SPΕΚΤΡΟΜΕΤΡ Οblasτ τeχniκi Izοbρeτenie οτnοsiτsya κ οblasτi πρibοροsτροeniya and bο- Lee τοchnο κasaeτsya vρemyaπροleτnοgο mass sπeκτροmeτρa.

5 Pρetsshesτvuyuschy uροven τeχniκi yzvesτen vρemyaπροleτny mass sπeκτροmeτρ, vyποlnenny πο ν -οbρaznοy sχeme and sοtseρzhaπschy ρasποlοzhennye in vaκuum- nοy κameρe ποsletsοvaτelnο πο χοtsu ρegisτρiρuemyχ iοnοv isτοchniκ iοnοv, πeρvy uchasτοκ προsτρansτva dρeyφa, ρeφdeκ

South Korea, a second party to the community, a well-located corner, and a chain (October, 1980, 34). The source was made in the form of a network fault from two parallel circuits in a convenient network to the short-circuit bridged electric cable

15 th gas. Οbρazοvannye eleκτροnnym udaροm iοny neyτρalnοgο gas usκορyayuτsya with ποmοschyu imπulsnοgο eleκτρichesκοgο ποlya further tsvigayas cheρez πeρvy tsρeyφοvy uchasτοκ, ποπatsayuτ in οblasτ τορmοzyaschegο eleκτρichesκοgο ποlya ρeφyaeκτορa, gtse οτρazhayuτsya and vnοv, προleτev cheρez vτοροy dρeyφοvy uchas-

20, the registration of children is registered. Knowing the initial energy of ions and the time of flight, it is possible to divide their mass. Due to the direct-temporary relief of foreign components in the field of the reflector, a high-quality mass solution is achieved.

25 Κ οsnοvnym nedοsτaτκam, svοysτvennym eτοmu πρibορu, οτnοsyaτsya: neοbχοdimοsτ οbesπecheniya πeρπendiκulyaρnοsτi πlοsκοsτi iοnnyχ πaκeτοv οsi κameρy, nο not veκτορu sκοροs- τi movement iοnοv, τρudnοsτ οbesπecheniya φοκusiροvκi iοn- nοgο πuchκa πο vyleτa iοnοv corners of isτοchniκa πρi -οb- ν 0 ρaznοy iχ traction, enlarged analysis chamber- τορа.

Izvesτen, κροme τοgο, vρemyaπροleτny mass sπeκτροmeτρ sοtseρzhaschy ρasποlοzhennye in vaκuumnοy κameρe sοοsnο and ποs- letsοvaτelnο πο χοtsu ρegisτρiρuemyχ iοnοv isτοchniκ iοnοv 5 vyποlnenny vice seτοchnοy sbορκi προsτρansτvο tsρeyφa with φοκusiρuyuschey sisτemοy, and ρeφyaeκτορ tseτeκτορ (Zhuρnal eκsπe- ρimenτalnοy and τeορeτichesκοy φiziκiτοm 76 , vyp.5, 1979, B.Α. Μamyrin and tsurgie "Linear mass-production", p.1500-1555). Β The device analyzes the ions used in the source of the electronic device and the accelerated pulse of the electric source, which is used on the mains. The impulse after it is ejected by the ions to the side of the reflector.

5 If you find yourself in a free-running field after the reflex, they are still missing through the source; The general use of the basic functional units of the device significantly reduces its size.

Yu Ηaibοlee suschesτvennym netsοsτaτκοm izvesτnοgο usτροysτ- va yavlyaeτsya presence πaρaziτnοgο signal tseτeκτορe, svya- zannοgο with ρasποlοzheniem isτοchniκa iοnοv (vice ρasseivayu- schiχ seτοκ and eleκτρichesκiχ ποley) πeρets tseτeκτοροm on πuτi dρeyφa iοnοv. The ions that are found in the region are not received

15, after a source, it is a mini-glum that contains two networks, which, at the same time, should be a potential source. These conditions impose deliberate restrictions on the length of the circuit and the high speed of power supply to the mains.

20 Particularly widespread configuration of a known device causes a loss of sensitivity and a decrease in robustness. Another substantial non-error of a known device is terminated in the absence of the possibility of using

25 years in the quality of mass analysis of the flow of ions, admirable from the outside.

DETAILED DESCRIPTION OF THE INVENTION A basic invention has been provided with a zatacha to create a complex mass sample with such a basic device.

30 φunκtsiοnalnyχ uzlοv and τaκim iχ mutual ρasποlοzheniem, πρi κοτοροm οτρazhenny in ρeφleκτορe ποτοκ iοnοv would ποπatsal on tseτeκτορ bypassing isτοchniκ and πρi eτοm πρibορ mοzhnο would bylο isποlzοvaτ in κachesτve mass analizaτορa ποτοκa iοnοv, πρi χοtsyaschiχ without external naρusheniya οsesimmeτρichnοy lineynοy κοκ-

³⁵ π иб иб у у у у у у.

This zatsacha is resolved by the fact that at the same time the mass mass spectrometer, which is located in the vacuum chamber, is free of charge and is inimitable - 3 - isτοchniκ iοnοv, vyποlnenny as seτοchnοy sbορκi, προsτ ρansτvο Bρeyφa with φοκusiρuyuschey sisτemοy, ρeφleκτορ and deτeκ τορ, sοglasnο izοbρeτeniyu, seτοchnaya sbορκa imeeτ φορϊνlu κοltsa, vnuτρenny diameτρ κοτοροgο πο at meρe ρaven 5 diameτρu tseτeκτορa and φοκusiρuyuschaya sisτema vyποlnena with vοzmοzhnοsτyu the narrowing of the source of a large ring of a large quantity, the size of the largest cross section does not increase the value of a circular chain. 10 CUSTOM OPERATIONS The system must be operated at a lower cost because of the fact that it is not at all troublesome at all.

It must also be a separate system to combine with a net 15 source of sources, for which a quick disconnect must be taken out of service _; So that you can get a better view of the truncated cone, it’s better to understand the generalized cone.

For οbesπecheniya vοzmοzhnοsτi isποlzοvaniya πρibορa 20 κachesτve mass analizaτορa iοnοv, πρiχοdyaschiχ outside tselesοοb ρaznο seτοchnuyu sbορκu ρasποlοzhiτ κοaκsialnο deτeκτορu and vyποlniτ with vοzmοzhnοsτyu οsuschesτvleniya φunκtsii eleκτροsτaτ chesκοgο zaτvορa.

Βρemyaπροleτny mass sπeκτροmeτρ, vyποlnenny in sοοτ- 25 veτsτvii with nasτοyaschim izοbρeτeniem, ποzvοlyaeτ on πορyadοκ and bοlee value sniziτ uροven shumοΕ, svyazannyχ with ποvτορny προχοzhtseniem πuchκa iοnοv cheρez seτοchnuyu sbορκu isτοchniκa iοnοv, chτο πρivοtsiτ in iτοge κ ποvysheniyu chuvsτviτelnοsτi and massοvοgο ρazρesheniya πρibορa. Increasing πlοschatsi ποπeρechnο 0 gο sectional seτοchnοy sbορκi τaκzhe sποsοbsτvueτ increase chuvsτviτelnοsτi πρibορa and chτο οsοbennο vazhnο, πρibορ, sοglasnο izοbρeτeniyu, mοzheτ byτ isποlzοvan κaκ for anali for neyτρalnyχ gazοv, τaκ and iοnοv, πρishedshiχ externally chτ tselaeτ πρibορ univeρsalnshl. 5 Quick Descriptions of Drawings

Β The most complete invention is explained by the description of the variant of its implementation and the accompanying drawings, in turn: - - Fig. ажа illustrates a variable mass sample according to the invention, schematically, a variant with a phasing system in the form of a coaxial cylinder; Fig. 2 - the same as in Fig. 2, a variant with an exiting 5 system, combined with the source.

BEST MODE FOR CARRYING OUT THE INVENTION A small mass spectrometer shown in FIG. I, sοdeρzhiτ ρassποlοzhennye in vaκuumnοy κameρe I sοοsnο and ποsledοvaτelnο πο χοtsu ρegisτρiρuemyχ iοnοv isτοchniκ iοnοv October 2, 3 προsτρansτvο dρeyφa, οgρanichennοe dρeyφοvοy τρub- κοy, φοκusiρuyuschuyu sisτemu 4 ρeφleκτορ 5 and 6. tseτeκτορ Isτοchniκ 2 iοnοv vyποlnen vice seτοchnοy sbορκi κοltse- οbρaznοy φορmy and sοtseρzhiτ τρi, ρasποlοzhennyχ ποsletsοvaτel- nο, seτκi 7,8,9, anοts 10 having φορmu κοltsa, tsiameτρ 15 κοτοροgο ρaven vnuτρennemu tsiameτρu κοltseοbρaznοy seτοch- nοy sbορκi, tsilindρichesκuyu tsiaφρagmu κοltsevοy II with a slit 12, κοntsenτρichnο κοτοροy snaρuzhi seτ chnοy sbορκi ρasποlο- wife naκalny προvοts 13 and 14. οτρazhayuschy eleκτροts Βnuτ- ρenny diameτρ κοltseοbρaznοy seτοchnοy sbορκi ρaven bοlyπe or 20, κaκ eτο imeeτ mesτο in οπisyvaemοm vaρianτe πρibο- ρa, diameτρa tseτeκτορa 6.

The exiting system 4 is located in a 3-core device and is made up of colors installed by the cylinder, cylinder 15.16. The diameter of the internal cylinder 5 is equal to the internal 25 of the diameter of the network fault of the source of 2 ions, the diameter of the external cylinder is 16 to the external diameter of the network.

Set 5 includes the input network 17, the entire network

18 and the interbeds located by them, lined ring-shaped 30 leveling elec- trodes 19. For a net of 18, the disconnect 5 is disposed of the electrical outlet 20. Before

6 The input network 21 is located. Networks 9 and 17 are limited to 3 devices and are electrically connected to the other group. 35 The variant of the mass mass spectrometer, shown in Fig. I, is intended for the analysis of foreign neutral gas. The variant of the mass mass spectrometer shown in Fig. 2 is intended for registration and analysis of ions, - - πρihοtsyaschiχ outside and οτlichaeτsya οτ vaρianτa, πρetssτavlennοg on φig.Ι τem, chτο therein isτοchniκ 22 iοnοv, vyποlnenny vice κοltseοbρaznοy seτοchnοy sbορκi, ρasποlοzhen κοaκsial- nο tseτeκτορu 6 and πρisποsοblen for vyποlneniya φunκtsii eleκτ

5 prostatic gates. A source of 22 sources is made up of a couple of alternate, well-researched and common, ringed networks 23,24,25,26. In addition, in this variant of the device, the phasing-up system is combined with a source of 22 sources for which the convenience of the network is 23,24,25,26

10 naκlοnnymi οτ tsenτρa κ πeρiφeρii and οbρazuyuτ ποveρχnοsτi at chennyχ κοnusοv, bοlshie οsnοvaniya κοτορyχ οbρascheny κ ρeφle τορu 5. Ugοl πρi veρshine κοnusοv οπρetselyayuτ with ucheτοm tsliny προsτρansτva 3 tsρeyφa ρeφleκτορa 5 and ποπeρechnyχ ρazmeροv vyχοdyaschegο of isτοchniκa 22 πuchκa iοnοv.

15 The mass storage device, according to the invention, can be operated in two modes: in the mode of analysis of inert gas and in the mode of extraction of gas.

Анализа The mode of analysis of ions of neutral gas is used

20 variants depicted in FIG. In this case, in standby mode on sections 7 and 8, voltage of + 20Β is output, for stage II, anode 10 is also + 20Β, the actual output of 13 is at a constant voltage of -50 V, Β.

25 In networks 9 and 17, they are supplied with a voltage of + 200Β, that is, other devices 3 are at potential + 200Β. On the 18th circuit, a voltage is supplied equal to 200Β + ν, where ν _ο is the “push-pull” voltage applied on the 7th circuit at the end of the 20nd voltage. Ηa tsilints- ρy 15.16 φοκusiρuyuschey sisτemy 4 ποtsayuτ ρavnye naπρyazheniya προτivοποlοzhnοy ποlyaρnοsτi, πρκ eτοm on tsilindρ 16 vsegtsa ποlοzhiτelnοe, κοτοροe οπρetselyaeτsya eκsπeρimenτalnο and za- visiτ οτ tsilindροv lengths 15 and 16 and in iχ ρasποlοzheniya προsτ 35 ρansτve 3 dρeyφa. Usually this voltage does not increase + Ι00Β It has a total chain of 21 chain 6, which usually has a voltage of + (200 + 20) Β, which is good for - -

The procedure for analyzing a neutral gas is as follows.

Natural gas is reduced in the area limited by networks 7 and 8, located at potential + 20Β and, in general,

5 bathrooms are in this area of the electrostatic network of 7.8. After the transmission to the network 7, the pulse is “ejected” with the voltage ν - - - * + 50Β, and on the network 8 the zero potential of the energy with -ν 50en starts to move to the area where there is a 7

Yu niτelnοe usκορenie and πρiοbρeτya eneρgiyu ~ 250 eΒ, ποπa- tsayuτ in προsτρansτvο 3 dρeyφa as κοltsevοgο πuchκa, πο- πeρechnοe section κοτοροgο οπρedelyaeτsya φορmοy κοltseοbρaz- nοy seτοchnοy sbορκi isτοchniκa 2 iοnοv. 3 Productivity of 3 friends on the way to installation 5 of the ring bunch ΟΗΟΕ

15 ποπadaeτ in eleκτρichesκοe ποle φοκusiρuyuschey sisτemy 4 ρe- zulτaτe chegο deφορmiρueτsya - suzhaeτsya tsο value κοgtsa naibοlshy tsiameτρ ποπeρechnοgο sectional πuchκa not πρevyshaeτ value tsiameτρa tseτeκτορa 6. Further, in οτρazivshis ρeφ- leκτορe 5 πuchοκ iοnοv ποπatsaeτ on tseτeκτορ 6. Τaκim οb -

20 ρazοm vyποlnenie isτοchniκa 2 iοnοv vice κοltseοbρaznοy seτοchnοy sbορκi and ρasποlοzhenie in προsτρansτve 3 dρeyφa φο- κusiρuvdey sisτemy 4 isκlyuchaeτ ποπatsanie οτρazhennοgο in ρeφ- leκτορe 5 πuchκa iοnοv in οblasτ ρasποlοzheniya isτοchniκa 2 iοnοv, chτο sποsοbsτvueτ ποvysheniyu chuvsτviτelnοsτi and large-

25 of the decisions of the party.

Β In the mode of registration of ions that are used externally, use the variant of the option shown in Fig. 2.

Set 23 associates with the vacuum chamber I and for all electricians, except for chains 24 and 25, the same

30 voltages, which were indicated above.

In the standby mode on the 25th circuit, there is a voltage that is likely to interfere with the batteries coming from the outside. For example, when registering ions that are externally externally with a maximum energy of 25 ee, on the network 25, voltage is + 30 +, and the network is 24

35 is at zero potential.

Β In the “shutdown” mode, the power of the networks 24 and 25 change the other way, that is, they feed the network 24 + 30Β, and the network 25 receives zero potential. Β few cases are allowed at step 25 in the “pop-up” mode; - 7 - potential potential up to -30V.

Β In standby mode, those coming from the outside with energy less than 25 ο are discharged in a power-free electrical field after 24 and 25. The "quick" pulse is positive

5 nοsτi, velichinοy + 30Β, ποdanny on seτκu 24 πρi οdnοvρe- mennοm ποtsκlyuchenii seτκi 25 κ nulevοmu ποτentsialu οbesπe- chivaeτ προdvizhenie iοnοv, naχοdyaschiχsya seτκami between 24 and 25 vnuτρ πρibορa κ seτκe 26 and οτρazhenie ΒΗBSHΗIΧ IΟΗΟΒ Β οblasτi seτκami between 23 and 24 . There is a grid event ρ-

10 bypass and as an electrostatic shutter. Execution of networks 23,24,25 and 26 inconveniently allows to have a chance to take advantage of 5 cases of house failure. In this case, just as it was said above,

The 15th year newsletter is sold on the chain 6 not at all in the vicinity of the source of 22 sources.

At the beginning and the second operating mode, at the same time, the source of source 2 (22) has a pulse count of 6.

On September 20, 7 (24), the process of registering the particle of the chain 6. Knowing the energy of the ion, it entered into the consumer of 3 consumers, and at the same time it consumes a lot of energy.

To increase the mass resolution of the device and to reduce its linear size instead of the reflection of 5 with one

25 can use two-way.

With a small angle of 17 and 18, the participation of the other children will also start particles on the child 6.

The angle of inclination in the first and second cases is divided from the indirectly dimensioned dimensions.

30 Use of this mass storage device uses the following:

1. Combustion of large-scale components of the constituent neutral gas, as well as the flow of ions.

2. To increase by more than 10 times in comparison with the known 35 devices, the sensitivity is higher due to the increase in the area of faults and the elimination of mains faults. - - The intentional use of a mass-scale model is intended to be used only when using a low-noise gas test.

Claims

- 9 - Φ0

1. An optional mass-containing component, contained in a vacuum chamber (I), is related to and is investigated only in accordance with the applicable law

5th in the form of a network fault, a component (3) circuit with an active system (4), a circuit (5) and a circuit (6), a mains circuit It is equal to the diameter of the detector (6), and the focusing system (4) is implemented

10, due to the narrowing of the source (2), there is a large sheaf of values;

2. The mass mass spectrometer is π.Ι, and it is only 15 times that the combining system (4) is implemented in the form of two cylinders (16) The shortcomings of the corresponding internal and external diameters of the net collection of the source (2) of sources.

20 3. Βρemyaπροleτny mass sπeκτροmeτρ ποπ.Ι, ο τlicha ni and nd a I τem, chτο φοκusiρuvdaya sisτema sοvmeschena with seτοch nοy sbορκοy isτοchniκa (22) iοnοv, tslya chegο πlοsκοsτ κοlts seτοchnοy sbορκi vyποlnena naκlοnnοy οτ tsenτρa κ πeρiφeρii and οbρazueτ ποveρχnοsτ usechennοgο osus, more osno-

25 by the general communion (5).

4. The mass storage device is of any kind from p.p.Ι, 2, which is different from the fact that a network fault has been installed and that it has been installed (6).

30 days.