Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
  • F16L11/00—Hoses, i.e. flexible pipes
  • F16L11/04—Hoses, i.e. flexible pipes made of rubber or flexible plastics
  • F16L11/12—Hoses, i.e. flexible pipes made of rubber or flexible plastics with arrangements for particular purposes, e.g. specially profiled, with protecting layer, heated, electrically conducting
  • F16L11/127—Hoses, i.e. flexible pipes made of rubber or flexible plastics with arrangements for particular purposes, e.g. specially profiled, with protecting layer, heated, electrically conducting electrically conducting
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
  • F16L11/00—Hoses, i.e. flexible pipes
  • F16L11/04—Hoses, i.e. flexible pipes made of rubber or flexible plastics
  • F16L11/10—Hoses, i.e. flexible pipes made of rubber or flexible plastics with reinforcements not embedded in the wall

Definitions

• Connection element between a "working tool and a vacuum network is Connection element between a "working tool and a vacuum network.
• the invention relates more particularly but not exclusively to the vacuum pipettes used in particular for the transfer of silicon wafers.
• connection between the body of the pipette and the like and a vacuum pump for example takes place by means of a hose.
• Problems can arise with the generation of particles resulting from static electricity.
• the said wafers are charged with static electricity which can cause micro-discharges.
• the pipettes or the like are generally executed in organic materials which are lightly loaded with carbon fiber so that the electrical conduction is insufficient.
• the hose can be bent and create a bend capable of temporarily interrupting the effect of the vacuum, which can cause breakage of the wafer, the latter being no longer mainte ⁇ naked.
• the problem posed is to have a non-particle generating connection element, which cannot interrupt the vacuum when it is folded while being of a reduced weight and capable of ensuring electrical conduction.
• the element consists of a hose of conductive material housed inside a tube of flexible and insulating material, said hose being arranged to be non-generator of particles by ensuring continuity. electrical contact with the pipette body.
• hose tré ities receives a coupling member made of conductive material capable of cooperating with a part of the pipette body, the other end of said flexible hose receiving a coupling member made of conductive material capable of being connected to the vacuum network .
• each of the coupling members consists of a bushing, one of the ends of which allows the hose to be fixed while the other extremity has a fitting surface.
• the ends of the tube are projecting from the coupling or ⁇ gans to be adapted on connection parts in which are engaged the fitting surfaces of said members.
• the problem posed of avoiding the formation of a bend capable of momentarily interrupting the effect of the vacuum is solved in that the hose is produced in the form of a spring with contiguous turns to ensure a large urn flexibility of the tube without generation of restoring stresses when bent or otherwise deformed.
• the tube receiving the hose is made of silicone.
• FIG. 1 shows an embodiment of a tool in the form of a pipette, connected according to the characteristics of the invention of a vacuum pump;
• FIG. 2 is a large scale a longitudinal sectional view showing one connecting element considered as such;
• Figure 3 is a cross-sectional view taken along line 3.3. of Figure 2;
• FIG. 4 is a partial sectional view on a large scale showing the coupling of the connecting element according to the invention with a part of the body of the pipette.
• FIG. 1 illustrates a working tool in the form of a pipette (A) coupled by a connecting element (E) to a vacuum network such as a pump (P).
• a pipette is given by way of non-limiting indication, it being underlined that the invention applies to any member or tool having to be connected to a vacuum network.
• a pipette co-takes a body (1) receiving at one of its ends a gripping tip (2) for in particular the manipulation of silicon wafers. The other end of the body (1) is arranged to be coupled via the connecting element (E) to the vacuum network (P).
• the connecting element (E) consists of a hose (3) made of conductive material housed inside a tube (4) made of flexible and insulating material.
• the hose (3) is shaped and arranged in particular at each of its ends to be non-generator of particles by ensuring continuity of electrical contact with the body of the pipette in the example considered.
• the lexible (3) is produced in the form of a spring with contiguous turns to ensure great flexibility of the tube (4) without generation of restoring stresses when it is bent or otherwise deformed.
• the tube (4) is made of silicone or other material having the same characteristics.
• One of the ends of the spring (3) receives a coupling member (5) of conductive material capable of cooperating with a part of the body (1) of the pipette.
• the other end of the spring (3) receives a coupling member (6) identical to the member (5) to be connected to the vacuum network (P).
• each of the coupling members (5) and (6) consists of a socket one of whose ends (5a-6a) allows the fixing of the spring (3) while the other end (5b-6b) has a fitting surface.
• Each end of the spring (3) is screwed into the corresponding parts (5a-6a) of the sockets (5) and (6).
• connection parts (la) and (PI) that respectively presents l end of the pipette body (1) and of the vacuum pump (P) and in which are engaged the fitting surfaces (5b- 6b) of said members (5) and (6).
• connection parts (la) and (PI) that respectively presents l end of the pipette body (1) and of the vacuum pump (P) and in which are engaged the fitting surfaces (5b- 6b) of said members (5) and (6).
• the characteristics of the spring used are suitably determined to solve the problem posed and achieve the desired objectives.

Landscapes

• Engineering & Computer Science (AREA)
• General Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Devices For Use In Laboratory Experiments (AREA)
• Joints Allowing Movement (AREA)
• Pipe Accessories (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=9381421

Family Applications (1)

Country Status (4)

Citations (5)

• 1989
  • 1989-04-26 FR FR8905943A patent/FR2646492B1/fr not_active Expired - Fee Related
• 1990
  • 1990-04-25 WO PCT/FR1990/000292 patent/WO1990012975A1/fr not_active Application Discontinuation
  • 1990-04-25 EP EP90907129A patent/EP0423298A1/fr not_active Withdrawn
  • 1990-04-25 KR KR1019900702679A patent/KR920700373A/ko not_active Application Discontinuation

Patent Citations (5)

Non-Patent Citations (1)

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