WO1990007690A1 - Sensor and system for setting three-dimensional position - Google Patents

Abstract

In three-dimensionally machining and assembling an object (9) which is a work being treated by a machining robot or the like, a three-dimensional position sensor measures a relative position and a tilt angle of a head (1) with respect to the object in a contactless manner. The three-dimensional position sensor is equipped with a plurality of projectors (31 to 34) that are provided in a teaching head (3) to slantly project light onto the object (9) in order to form a plurality of bright points (S1 to S4) that constitute apexes of a triangle on the object (9); an image pickup device (35) which takes an image that contains the bright points (S1 to S4), position setpoints (P) indicated on the object (9), and the surface of the object (9); and an image processing circuit (8a) which electrically reads the bright points (S1 to S4) imaged by the image pickup device (35) and the position setpoints (P), and detects a three-dimensional position and attitude of the head (1) relative to the position setpoint (P). According to a three-dimensional position setting system which employs the above three-dimensional position sensor, a laser machining head (2) is positioned on the object maintaining a predetermined three-dimensional position and attitude based upon the data detected by the three-dimensional position sensor in a contactless manner.

Description

 Incense

 Technical field of 3D position sensor and 3D position setting system

 The present invention, for example, in three-dimensional machining and assembling of a workpiece using a machining port or the like, determines the relative position of the sensor main body to the workpiece and the inclination angle of the sensor main body to the workpiece without contact. The present invention relates to a three-dimensional position sensor that can perform measurement, and also relates to a three-dimensional position setting system for teaching a working posture and an assembly posture on a rod or the like by using this three-dimensional position sensor.

Background technology

For example, in industrial robots that are installed in the product assembly process, material cutting process, and processing process in the manufacturing line, the robot must be operated before the actual operation. It is necessary to teach the movement path and operation procedure of the rod according to the three-dimensional shape of the workpiece. The task of teaching the three-dimensional movement of this work head is called teaching. Conventionally, this teaching is generally performed manually by an operator. For example, when teaching the C0 ₂ laser cutting robot, the operator should operate the teaching pendant while the machining head is the object. Approach the teaching point of the marking line drawn on the work surface of. After that, the three-dimensional position of the machining head with respect to the above-mentioned teaching point is the relative position Positioned to have a relationship. At this time, the above-mentioned three-dimensional position information is stored.]) Teaching is performed.

 Recently, in order to improve the efficiency of the touching operation, for example, a magnetic sensor placed near the processing head is used. With this magnetic sensor]) The size of the eddy current generated in the work is detected, and the distance between the machining head and the work surface is calculated from the detected value. Based on this calculated heddle, the facing distance of the machining head P to the workpiece is set.

 However, such conventional teaching work is performed while the operator directly visually checks the three-dimensional position of the machining head with respect to the teaching point. For this reason, there is a disadvantage in that it requires time and effort for the teaching, and that skill is required for accurate position setting.

When using a position setting device equipped with a conventional sensor such as a magnetic sensor, it is certainly easy to set the facing distance between the work and the head. However, since the magnetic sensor has a large detection area, the accuracy of measuring the facing distance of the work with respect to a minute area of the head is low, and the facing position of the machining head P with respect to the workpiece has not been measured before. However, the operator had no choice but to rely on the visual setting, and no significant improvement in teaching efficiency and accuracy could be expected. The present invention has been made in view of the above circumstances. Therefore, the purpose of the present invention is to accurately and accurately detect the position of the sensor body with respect to the workpiece and the inclination angle of the sensor body with respect to the workpiece. It provides a 3D position sensor that can be output. Another object of the present invention is to use the above-mentioned three-dimensional position sensor to accurately teach a robot or the like in a short time without requiring skill. It provides a positioning system.

Disclosure of the invention

 In order to achieve the above object, a three-dimensional position sensor according to the present invention detects a three-dimensional position and orientation with respect to a position set point displayed on an object, and a sensor body and an object. A projecting means for obliquely projecting light onto an object to form a plurality of bright spots forming at least the vertices of a triangular shape on the surface of the object; depending on the projecting means]? On the object An image pickup means for picking up an image including the formed bright spot, the position set point displayed on the object, and the surface of the object; the bright spot and the position set point picked up by the image pickup means The special feature is that it is equipped with an image processing means that electrically reads and, and detects the three-dimensional position and orientation of the sensor body with respect to the position set point.

In addition, the three-dimensional position setting system according to the present invention detects the three-dimensional position and orientation of the head with respect to the position set point displayed on the object, and sets the head arbitrarily. Is placed on the head and obliquely projects on the object, and at least a plurality of bright spots forming the vertices of a triangle are formed on the surface of the object. A light projecting means formed on the

 To: Imaging means for capturing an image including the bright spots formed on the object by the light projecting means provided on the y-axis, the position set points displayed on the object, and the surface of the object When ;

 Image processing means for electrically reading the imaged bright spots and position set points and detecting the three-dimensional position and orientation of the head with respect to the position set points;

 A storage means for storing information on the three-dimensional position and orientation of the head with respect to the position set point detected by this image processing means;

 As a special feature, it is provided with a driving means for reading the information stored in the storage means and causing the head to face the position set point in a predetermined three-dimensional position and posture based on the information. There is.

 Brief description of the drawings

Fig. 1 is a perspective view showing the head part of the mouth where the three-dimensional position sensor and the three-dimensional position setting system according to the present invention are adopted, and Fig. 2 shows the structure of the three-dimensional position sensor. The perspective views shown in Figs. 3 and 4 show the structure of the teaching head, and Fig. 3 is a sectional view taken along the line III-1 in Fig. 2 and shown in Fig. 4. Is shown in Figure 3. Fig. 5 is a sectional view taken along the line, Fig. 5 is a block diagram showing the structure of the image processing circuit, Fig. 6A and Fig. 6B, Fig. 7A, Fig. 7B and Fig. Figures 8A and 8B are used to explain the operation, respectively, so Figures 6A, 7A, and 8A are cross-sections showing the position and engagement of the head and work. Figures, 6B, 7B, and 8B are front views showing images displayed on the image display, and FIGS. 9A to 9C are diagrams showing the forms of image signals, respectively. Figure 10 is a front view showing an example of the arrangement of conventional reference position marks and bright spots used to explain the effect, and Figures 11A and 11B are the head and work position gaps, respectively. FIG. 12 is a cross-sectional view showing a second embodiment of the present invention in a cross-section similar to FIG. 4 and a front view showing a display image of an image display, and FIG. Fig. 3 is a front view showing the three-dimensional position sensor of the third embodiment, Fig. 14 is a vertical sectional view of the teaching head, and Fig. 15 is a view taken along the line XV-XV in Fig. 14. Sectional views shown by cutting, FIGS. 16A and 16B are sectional views and front views respectively for explaining the operation of the third embodiment, and FIG. 17 is a view of the fourth embodiment. A cross-sectional view in the same cross section as in Fig. 4 showing the three-dimensional position sensor, Fig. 18 is a cross-sectional view taken along the line X tt-XVi in Fig. 17 and Fig. 19 and FIG. 20 is a sectional view and a front view respectively for explaining the operation of the fourth embodiment, and FIG. 21 is a three-dimensional positioning system according to the invention. — A perspective view showing the entire configuration of the embodiment, FIG. 22A, FIG. 22B and FIG. 23 are diagrams for explaining the operation principle of the three-dimensional position setting system, and FIG. Fig. 25 is a front view showing the display screen of the image display ⁷ , Fig. 25 is a flow chart showing the teaching processing operation, and Fig. 26 is a teaching of the tertiary position setting system of another embodiment. Flow chart showing the processing operation, Figure 27 is a flow chart showing the subroutine of step Q17, Figure 28 is a flow chart showing the subroutine of step QIS, and Figure 29 is Flowchart showing the teaching processing operation in an embodiment without using an image display

BEST MODE FOR CARRYING OUT THE INVENTION

 An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows an example of the structure of the hem P portion of the cutting lock equipped with the three-dimensional position sensor and the three-dimensional position setting system according to the present invention.

In Fig. 1, reference symbol J indicates the body of the head P. The laser processing head 2 is attached to one mounting surface of this head * body J] 3, and the teaching head ♦ 3 is mounted to the other mounting surface. Is being worn. Further, the head * main body J is rotatably connected to the mouth end 4 through the turning mechanism 6. The head body J is rotated via the rotation mechanism 6! ), The target is the teaching head 3 during teaching. It is now possible to face the surface of all workpieces ₉ and the laser processing head 2 to face the surface of the workpiece S during cutting.

 Fig. 2 shows a schematic example of the overall configuration of the three-dimensional position sensor and the three-dimensional position setting system of this embodiment.

 That is, the three-dimensional positioning system is attached to the teaching head 3 as shown in Fig. 2], and the details provided in the teaching head 3 are provided. The image pickup device 35 that will be described later, the image display device τ that displays the image taken by the image pickup device 35, and the reference position pattern that displays the reference position turn on the image display device 7. The generation circuit S and the image signal of the light point for setting the facing distance and the facing posture of the teaching head 3 with respect to the work are mixed with the image signal of the background light such as illumination. It has an image processing circuit S a that separates the image signal of the point and measures the position.

The tee one ^ to ring head 3 to the head casing 3 0, this to the: four projector provided in the housing 3 in 0 3 13 4 and imaging device ³⁵ and word over It is equipped with an illuminator 3 that illuminates the surface of the ground. The structure is as shown in Figs. 3 and 4.

], And each of the projectors 3 1 to 3 4 respectively connect the semiconductor laser device 3 1 & to 3 4 a and the reflecting mirror 3 1 b to 3 4 b. I'm crying. The semiconductor laser devices 3 1 Λ to 3 4 * are mounted and fixed on the inner wall surface of the head housing 30 at equal intervals, and the heads * 3 1 b to 3 4 b are heads. The holders 31c to 3 "are fixed to the tip of the housing 30 so that the laser light from the semiconductor laser devices 3 1 to 3 4a can be reflected by the work. The projectors ³ 1 to 3 ⁴ of the semiconductor laser device »reflect the laser light generated from the semiconductor laser device» to 3 4 * by reflecting mirrors 3 1 b to 3 4 b, respectively, and project the laser light onto the surface of the work. ]? A light spot is formed on the surface of the work S. The projector 3 J has a bright spot S 1 for setting the distance as shown in Fig. 2 and other projectors 3 2 to 3 4 Bright points S 2 to S 4 for posture setting are formed respectively.

On the other hand, the image pickup device 35 is composed of a solid-state image pickup device camera using the solid-state image pickup device 35a. Camera holder to the center of the imager 3 ⁵ Wae' de housing 3 in 0

Fixed by 3 S b. This image pickup device 35 is mounted on the surface of the smoke 9 using the above-mentioned respective projectors 3 J to 34! ) The bright points S 1 to S 4 formed and the teaching point P on the marking line K previously displayed on the surface of the work are respectively imaged. A plurality of illuminators ³ S that illuminate the surface of the work 9 are fixed to the tip of the head housing 30 by a holder 36 a.

In addition, 3 7 is an optical filter for protection against fire, 3 β is a teaching head, and a mounting part for mounting 3 on the main body J. It is a material.

 The reference position turn generating circuit S has a first reference position mark used to set the facing distance of the head with respect to the work 9 and three reference position marks used to set the head posture with respect to the work. The second reference position marks M2 to M4 are generated respectively. This reference position turn generation circuit S] ?, and each of these reference position marks M1 to M4 is located at a predetermined position on the display screen of the image display 7 as shown in Fig. 2. 3 Displayed by superimposing on the captured image signal from 5.

 The image processing circuit S a detects the positions of the bright spots S 1 to S 4 on the image display 7 based on the imaged image signal from the imager 35, and the details are shown in FIG. 5)) To do.

Figure 5 shows an example of the block configuration of the image processing circuit S a. In FIG. 5, reference numeral 40 is a clock V signal generator that generates a clock signal as a reference for determining the horizontal position of the screen for extracting an image from the imager 35, and reference numeral 4 J is a horizontal sync signal generator that counts the number of scanning lines on the display screen and generates a horizontal sync signal as a reference for determining the vertical position of the screen.Reference numeral 42 indicates the number of screens. Each of the vertical sync signal generators generates a vertical sync signal to be output. The clock signal, horizontal sync signal and vertical sync signal output from these are It is supposed to be input to the image pickup device 35.

 Further, reference numeral 4 S indicates an image memory input unit to which the clock signal, the horizontal synchronizing signal and the vertical synchronizing signal are input. This image memory counter 4 S is for determining the memory address to be stored when the image signal is digitized.

 Reference numeral 4 indicates an image memory counter to which the above clock signal, horizontal synchronizing signal and vertical synchronizing signal are input. This image memory down counter 49 is for counting the address for reading out data from the image memory 5 1 described later.

Further, reference numeral 50 refers to an analog-digital converter in which the image signal from the image pickup device 35 and the address of the image signal are input from the image memory counter 48. The code ⁵ J is a digital signal output from the analog digital converter 50 and an image memory based on a write signal 5 2 b from a computer 5 2 which will be described later. It is stored in the address specified by the counter 48 and is read by the readout signal 5 2 * from the computer 5 2 described later. The image memory from which the data corresponding to the installed address is read out is shown. Also, reference numeral 5 3 is an analog data. Refer to the image signal differentiator for extracting the difference between the output signal of the converter ⁵ 0 and the data read from the image memory 5 J. Reference numeral 5 5 indicates an image signal level compensator that performs a Lepel comparison between the output signal of the image signal differentiator 5 3 and the reference signal output from the reference signal generator 5 4.

 Further, reference numeral 57 counts the clock signal output from the clock signal generator 4 as the horizontal position and outputs it from the horizontal synchronization signal generator 4 J. By horizontal sync signal]? The horizontal position counter is a horizontal position counter that is cleared for each scanning line. Reference numeral 60 is the horizontal sync signal generator 4 J and vertical sync signal. The vertical sync signal output from the signal generator 4 2] 9 The vertical position is output and the horizontal sync signal is applied]} The vertical position count is cleared for each screen. Each position counter is shown. Reference numeral 5 is a latching control tf unit for the output signal of the image signal level comparator 5 5 according to the horizontal position signal output from the horizontal position counter 5 7. A horizontal position latch that is cleared by the latch clear signal 5 2 c from the device 5 2 and a reference numeral 2 indicates the output signal of the image signal repel comparator 5 5 in the vertical position counter. Depending on the vertical position signal output from the input device 6 2 depending on the latch clear signal 5 2 c from the computer 5 2]? It shows a chi.

Further, reference numeral 52 represents the data of the light spots corresponding to the horizontal and vertical positions latched by the horizontal position latch 5 and the vertical position latch 6 as a screen number force counter. It shows a computer that takes in together with the vertical sync signal output from the direct sync signal generator 42. This computer 52 calculates the facing distance and facing posture of the work 9 from the data of the spots by the method described later, and sends the calculation result to the image display 7 or the robot.

 A three-dimensional position sensor is configured by the projectors 3 to 3 4, the imager 35, and the image processing circuit Sa.

 Next, the operation of the 3D position sensor configured as described above will be described.

Now, in FIG. 2, it is assumed that the teaching head 3 is fixed in the illustrated state, and that the work S can adjust the facing position and the facing posture of the teaching head 3. .. In such a state, when laser light is emitted from the semiconductor laser devices 31a to 34a, the laser light is reflected by the reflecting mirrors 31b to 34b, respectively, and the oblique beam is emitted. Then, the work S is irradiated. Here, a state where the facing distance of the work 9 is a predetermined value and the facing posture is in a correct posture is defined as a work ^ shown by a dashed line in Fig. 6A and a teaching point PO. The bright spots SJ to S4 can be formed at the intersection of the oblique beam and the workpiece 9 at the peak 9 located at the solid line in the figure. Therefore, the change of the facing distance or the facing posture of the work 9 appears as the deviation of the bright points SJ to S 4 on the image display 7. For example, if the work 9 is at the reference position and the work distance is long, the bright spots are located outside the reference marks M 1 to M 4 as shown in FIG. 6B. Yo. Further, when the work S is tilted in the vertical direction of the image display 7 in the facing posture, as shown in Figs. 7A and 7B. Therefore, the bright spot S is arranged inside the reference mark M 2. Furthermore, when the work P is tilted in the left-right direction of the image display machine in the facing position relative to the work at the reference position ^, as shown in Figs. 8A and 8B, 3 and S 4 are arranged so as to be offset in the negative direction with respect to the reference marks M 3 and M 4.

 That is, the bright spot occurs at the intersection of the oblique beam and the work 9, so if the deviation of the bright spot on the image display 7 is measured, the reference triangle is determined from the triangle similarity rule. By doing so, it is possible to obtain the coordinates of each bright point S 1 to S 4 in the three-dimensional space by proportional calculation. Moreover, the facing distance of the work can be calculated from the three-dimensional position of the bright point S ί, and the facing posture of the work can be calculated from the bright points S 1 to S 4.

 Here, the operation of the image processing circuit S a shown in FIG. 5 will be described with reference to FIGS. 9A to 9C.

First, an image in which no bright spots have been captured, such as the image shown in Fig. 9A, is stored in the image memory 51, and then an image in which each bright spot is sequentially captured, for example, 9B. An image like the one shown in the figure is captured. The image signal differentiator 53 calculates the difference between the image in which these bright spots are not captured and the image in which these bright spots are captured. Therefore, the image signal differencer 53 obtains an image of only bright spots from which the background light component has been removed, for example, the image shown in Fig. 9C.

 Therefore, the image signal level comparator 55 can compare the reference signal output from the reference signal generator 5 4 with the bright spot image signal. That is, when an image signal including background light, for example, the image signal of the image shown in Fig. 6B is input to the image signal level comparator 55, the background light that is not at the correct bright spot position is detected. There is a possibility that it may be mistakenly detected as a bright spot position. However, it is possible to detect the correct luminescent spot position by the signal processing as described above.

In this way, when a bright spot is detected by the image signal level comparator 5 5, the bright spot is detected by the horizontal position latch ⁵ 9 which outputs the detected signal at the horizontal position of the bright spot. The vertical position of the bright spot is transmitted to the vertical position latch 62 that is counting, and the correct position of the bright spot is maintained. The bright spot position data stored in the horizontal position latch ⁵ 9 and the vertical position latch 5 2 are read by the computer 5 2 as appropriate, and the bright spots S 1 ~ The horizontal and vertical position data of S 4 are the same as the facing distance of workpiece 9 based on the above-mentioned triangle similarity rule. The facing posture is obtained by substituting it into a predetermined mathematical formula. Then, the calculation result is displayed on the image display 7 through an appropriate signal line.

 Therefore, the operator sees the data of the facing distance and the facing posture of the work 9 displayed on the image display 7], and sees the deviation between the reference marks M 1 to M 4 and the bright spots S 1 to S 4. The position of the mouth can be corrected so that the mouth has the correct facing distance and facing attitude on the teaching point P 0 of the work station.

 In the above, the case was described where the operator repositioned the image displayed on the image display 7 while considering it. However, in the 3D position sensor, the data of the facing distance and facing posture of the workpiece 9 calculated by the image processing circuit S a in the 3D position sensor is transmitted to the robot controller. It is also possible to have the mouth port automatically correct the heading distance and the facing posture.

As described above, in the present embodiment, the operator reads the facing distance and the facing attitude data of the work 9 while visually observing the display image of the image display 7], each bright point SJ to S 4 and the teaching point. The three-dimensional position of the main body 3 is adjusted so that P 0 is aligned with the reference marks MJ to M 4. Therefore, it is possible to perform the work as in the conventional way. It is possible to perform the touching accurately and in a short time without the intuition of the operator. You can improve it. 7690 P

 16 Also, the facing distance and facing attitude data of the work S by the image processing circuit S a is sent to the rotor controller, and the three-dimensional position of the head main body 3 is automatically adjusted. By doing so, the efficiency of the teaching can be greatly improved.

 Further, in the image processing circuit S a, the influence of background light is removed by the image signal differentiator 53, so the accurate bright spot position can be measured, and the teaching gamma of the operator due to erroneous measurement can be measured. It is also possible to prevent runaway due to erroneous measurement when the measurement data is sent to the robot controller and the three-dimensional position is automatically adjusted. Can be o

 The present invention is not limited to the configuration of the above-mentioned embodiment.

-Instead of, for example, the operation of the image processing circuit shown in Fig. 5 makes it so short that the human eye does not notice it by instantaneous lighting or extinguishing of less than 30 ms. Is turned off momentarily, and the clock signal, horizontal sync signal, and vertical sync signal synchronized with the image signal are also speeded up accordingly to prevent erroneous measurement due to illumination light. it can . Furthermore, in the present invention, as shown in FIG. 10, the bright points SJ to S4 are arranged around the teaching point P0, and the facing distance and the facing attitude are measured from the average value of each bright point. In particular, in this embodiment, the bright spot SJ and the first reference position mark MJ dedicated to the setting of the facing distance are provided. It has the following effects.

 That is, there are small irregularities depending on the surface shape of the work 9. For example, as shown in FIG. 11A, the teaching point P may be set on such a convex portion. In such a case, for example, without providing the bright spots and reference position marks for setting the facing distance, the facing distance and facing posture are determined from the four bright spots and the reference position marks as shown in FIG. When setting each of these, the teaching point P on the convex

Even if the facing distance to P 3 is not the specified distance, the positions of the bright spots and the reference position mark will match.

If teaching is performed in this state, the distance from the machining head to the teaching point will differ from the specified value when laser cutting is performed. As a result, the laser was out of focus and the prescribed cutting could not be performed.] In some cases, the tip of the processing head touches the convex part of the work and the head is removed. If damaged, it may cause malfunctions. In the configuration of this embodiment, the position of the teaching point P and the reference position mark MJ are made to coincide with each other, and the bright point SJ is made to coincide with this reference position mark. J? The facing distance is set. Therefore, even if the teaching point P is on a small convex portion as shown in Fig. 11A, it is possible to set the facing distance to the teaching point P on this convex portion. .. others Therefore, it is possible to prevent the problem of teaching in the wrong position, and as a result, it is possible to always perform accurate teaching without affecting the condition of the work surface.

As a second embodiment of the present invention, as shown in FIG. 12, a semiconductor laser having the same wavelength is used for the projectors 3 i to 3 4 and the illuminator 36, and an optical filter 39 is used. the solid-state imaging device ³⁵ may be disposed in front of a. With this optical filter 39, only the wavelength component of the output light of the projectors 3 1 to 3 4 is guided to the image sensor 35 a. Therefore, even if the ambient light such as sunlight is strong, the extraneous light is not filtered by the optical filter.

 It becomes extinct at 3 S and reaches an extremely small level] 3, so that the bright spots from the projectors 3 1 to 3 4 are clearly displayed on the image display 7 without being affected by the above-mentioned disturbance light. It can be displayed. The same applies to the illumination light of the illuminator 36. [3] As a result, each bright spot can be displayed clearly without suppressing the illuminance of the illumination light. In this way, it is possible to adjust the position of the teaching head 3 while always illuminating with sufficient illuminance, which allows smooth operation and good operability. You can perform various teaching.

In addition, as a third embodiment, as shown in FIGS. 13 to 16 the teaching heads 3 may be constructed by using an optical fiber. In the following description, the same components as those in the configuration of the third embodiment, which are the same as those in the first embodiment, are designated by the same reference numerals, and the description thereof will be omitted. 7 0

 19 As shown in FIGS. 13 to 15, the three-dimensional position sensor of the third embodiment is constructed with the teaching head 3 and the teaching head S. An optical fiber optical system for imaging and an optical fiber optical system for projection, which will be described later in detail, and a sensor and a lyper which are optically coupled to the optical system. J 0 4, a sensor controller that incorporates the image processing circuit S a and the reference position pattern generation circuit S for controlling the sensor and the repeater device J 0 4. Image sensor J 0 5 and this sensor controller J 0 5]? Based on the reference position turn of the measurement light created and the touching head 3]? The image display 7 is composed of a CRT display for displaying the displayed image.

Next, referring to Figs. 14 and 15], the internal structure of the teaching head ³ will be described in detail. Fig. 14 shows

 Figure 13 shows the teaching head, the longitudinal section of Figure 3, and Figure 15 shows the section taken along the line D-Π in Figure 4. As shown in Fig. 14 and Fig. 15, as shown in Fig. 14 and Fig. 15, the inside of the teaching head * 3 is equipped with four projection optical fiber optics J 3 1 to 1 3 4 and an imaging device. It contains the optical fiber optics i 3 2 for use. It should be noted that in Fig. 15 the projection optical fiber optics system J 3 2 is hidden and located directly under 13 J.

The projection optical fiber optics J 3 J to J 3 4 are provided with reflecting mirrors 3 fixed in grooves and holes formed inside the teaching head 3, respectively. 1 b, 1 3 2 b, 1 3 3 b, 1 3 3 b-1 _r 1 3 4 b, J 3 4 b-J and light collecting lens 1 3 1 d, 1 3 2 ά, 1 3 3 ά, 1 3 4 d. As shown in Fig. 13, each projection optical fiber optics system J 3 1 to _ί 3 4 is an optical system with the semiconductor laser devices 3 1 to 3 4 a of the sensor drive unit 0 4. Are combined with. In this case, the reflectors J 3 1 b, I 3 2 b, 1 33 b, 1 3 3 b-1, 1 3 4 b, J 3 4 b-J are holders.

1 3 1 c, 1 3 2 c, 1 3 3 c, 1 3 3 c-1 _f 134 c, ■ Due to Z 34 c-J]?

These optical fiber optics J3 1 to 1 3 ⁴ for projecting light are laser beams emitted from the semiconductor laser devices ³ 1 to 3 4 », and are narrow lenses 1 3 1 d to J 3 4 d. The mirrors 3 1 b, I 3 2 b, 1 3 3 b, 1 3 3 b-1, 1 3 4 b, 1 3 4 b-! And the light is projected onto the surface of the work S to form bright spots. As shown in Fig. 16, the projection optical fiber optics system J 3 J uses the projection point S 1 for setting the facing distance and the other projection optical fiber optics J 3 2 ~ J. 3 and 4 respectively form the bright spots S 2 to S 4 for posture setting.

 On the other hand, the imaging optical fiber optical system J 3 5 has an imaging lens 3 5 -... Ζ as shown in Fig. 14 and a reflecting mirror.

1 3 ⁵ - 2 and through the image of the work S first 3 IMAGING device shown in FIG. J ^{3 5} - and guides the 3. The imager 1 3 5-3 is placed on the surface of the work 9 as shown in Fig. 16. Each of the bright spots SJ to S4 formed by the above-mentioned light-projecting optical fiber optical systems J3i to J34 and the teaching point P on the marking line K drawn in advance on the work surface are imaged. It does.

 Returning to Fig. 13 again, the sensor controller J (? 5 is the head for the work: the first reference position mark used to set the facing distance of the X Three second reference position marks M2 to M4, which are used to set the head posture, are generated respectively. Each of these reference position marks MJ to M4 is the first reference position mark. As shown in Fig. 3, the image is displayed at a predetermined position on the display screen of the image display 7 by being superimposed on the imaged image signal from the imager 1 3 5-3. In the third embodiment, According to the above, the four light beams for projection for irradiating the surface of the work 9 with the light emitted from the semiconductor laser devices J 3 1 a to J 3 4 a, the optical systems J 3 1 to 1 3 4 and the work The optical fiber optics system for imaging 1 3 5 is provided inside the taper to image each light point and position set point formed above by the imager J 3 5-3. It is designed to form a hinge head *. Therefore, the head itself is small]), and there is less interference with the work compared to laser processing heads.] You can easily perform the touching operation.

In addition, in the third embodiment described above, the same operation as described above is performed even if a part of the configuration is set as follows. It is possible. That is, in order to illuminate the work, the illumination optical fiber optical system is provided between the teaching head 3 and the sensor / liver unit 04. It is also possible to provide it in parallel with the system J 3 S and to illuminate the work 9 by reflecting the illumination light with the reflecting mirror 1 3S 5-2.

 By providing the illumination optical fiber optical system in this way, it is possible to brightly display the marking line K and the teaching point P on the surface of the work P on the image display 7. so

It is possible to accurately judge the position of teaching point P when I D). In addition, a semiconductor laser light is used as the illumination light for the illumination light optical system to illuminate the teaching point, etc., and a clear image is obtained without being affected by ambient light. I can do it.

15 Furthermore, in the fourth embodiment, as shown in FIGS. 17 to 20, the three-dimensional position sensor has an autofocus mechanism and a measurement beam irradiation direction switching mechanism. You can also do so. In the first 7 figures and first FIG. 8, Tsu preparative to Te I Ichichi Sunda, 3, sliding the imager ³⁵ back and forth

20 Threaded part 2 0 9 and the lead screw ² attached to the screw part ² 0 9 and the end of the lead screw 2 20 Bearing part 21 1 fixed to 30 0, shaft coupling 2 i 2 attached to one end of lead screw 2 J 0, and one end attached to shaft coupling 2 1 2 The moke ² 1 3 part of which is fixed to the head housing 3 0 and the positioning pin 2 2 ^3- mounted on the head housing 3 to limit the sliding distance of the imager 3 5. · Τ and the mirror 32 2b described above are located on the center axis of the solid-state image sensor 35 a and are far away from each of the mirrors 32 b, and the point P of Figure 20 on the surface of the workpiece or a close distance is obtained. Fig. 20 on the front surface of the cursor 9 Holds the seesaw mechanism part 2 1 9 h to hold the light reflected at the point Q 1 9 and the diaphragm part of the reflected light attached to the tip of the seesaw mechanism part ² 1 1 9 -1, the shaft 2 20 fitted in the center of rotation of the seesaw structure 21 1 and the head housing 3 0 that presses one end of the seesaw mechanism 2 1 9 Installed in the head housing 30 to push the other end of the seesaw mechanism installed on the opposite side from the above-mentioned solenoid 220. 2 2 3, a rotation mechanism 2 2 4 and a 2 2 5 unit for rotating the mechanism unit 21. The operation of the fourth embodiment will be described with reference to FIGS. As shown in Fig. 19 we will explain the case of measuring the distance between the teaching head and the workstation with two distances]. Focusing is automatically performed by first rotating the motor 2 J ³ and adjusting the movement of the imager 35 along the axial direction. In addition, the far-near distance is set, and the thesis mechanism 2 19 is rotated by the expansion and contraction action of the solenoid 2 20], and is generated from the semiconductor laser device 3 1 »~ 3 4 a It is possible to change the reflection direction of laser light. Therefore, as an effect of this embodiment, the teaching head 3 is located at a distance in Fig. 19 and the reflection direction of the laser beams (L-1), (L-2) is reduced. and, and by the and this for the focusing of the image pickup device ³⁵ to a distant] 3 each rather entire Wa chromatography click 9 of the second 0 diagram Ru be imaged. In this way, coarse teaching can be performed. Then, the head 3 is positioned close to the work S to increase the reflection direction of the laser beams (L-l), (L-2) "'and the focusing of the image pickup device 35 is made closer. By doing so, there is an effect that the same precise teaching as in the above-mentioned embodiment can be performed.

 Next, one embodiment of the three-dimensional position setting system according to the present invention will be described with reference to FIGS. 21 to 24. In this three-dimensional position setting system, j? Is read by a joystick or the like, the teaching point position imaged on the image display is read, and the facing distance and facing attitude data obtained by the measuring beam are combined and automatically set. Will be tailored o

The second 1 figure, since showing the structure of this embodiment, for indicating an arbitrary position of the images display ⁷ 'click ₃ Lee stearyl I Tsu and click 3 JS, di 3 Lee stearyl I data click 3 IS The control unit 3 17 that outputs the tailing data by summing the specified position and the facing distance and facing attitude calculated by the image processing circuit S a is supported. The operation of this embodiment is as follows. First, in Fig. 21, the line connecting the projectors ³ 3 and 3 4 is the X axis, and the line connecting the projectors ³ 1 and 32 is the γ axis. , The plane containing the Y axis is orthogonal to the optical axis of the camera 35. _Let this optical axis 9 be the Z axis, and let the focal point F on the Z axis be the coordinate of this point of the Z axis, the intersection point P _0Y (reference position) with respect to the surface be Ζ 0, and each projector 3 1 ~ 3 Let the angle at which the spot ray from 4 intersects the Ζ axis be, and the cutaway views in the plane including the Υ axis and the: X axis are shown in Figures 2 2 Α and 22 2B. .. The general relationship between the X-axis, Y-axis and Z-axis is shown in Fig. 23.

In Fig. 2 2A, the Y coordinates of each spot light S ₂ and S 4 are Y ₂ and Y 4, respectively. As shown in the figure, the inclination angle of the X-axis rotation]? At the intersection Ρθ on the surface of the work 9 is set to 0. In the figure, the actual value of Y 4 is (one) value. Since the irradiation angle is a constant value, the intersection point

The Z coordinate value of P 0 Ζογ is based on a simple geometrical consideration using the similarity of triangles i? , It is calculated by the equation (1).

Ζο γ = 2 Υ ₂ Ϊ / (Υ _2- Υ 4) tan ............ (1) The sign of the Z axis is positive in the direction toward the imager 35.

Similarly, in a 2 2 B diagram, scan pop DOO light, the X-coordinate of S _3, X 3 (the actual value is negative value), and the exchange If the inclination angle of the Y-axis of the work 9 surface at the point P o]) is <?, the value of the Ζ-axis coordinate Ζ _0Χ of the intersection Ρ 0 is _expressed by equation ( ² ).

Zox = 2Xi Xs / (Xi-Xs) tan ― (2) The above Z coordinate values Ζοττ and ζ _{ο χ} should theoretically match, but since they were obtained from the measured values, they may not match. is there . Therefore, the intersection Ρ. The Ζ coordinate value Ζ 0 of is expressed by the average value of Eqs. (1) and (2) as in Eq. (3).

Ζ 0 = (Ζοτ + Ζοχ) / 2

- _{[Υ 2 Υ 4 Ζ (Υ 2} - Υ4)

+ Χι Χ ₃ / (Χι 1 Xs) D / tan ··· (3) Note that the distance Zs between the imager 35 and the focus F depends on the mechanical configuration]? It is a predetermined value. ..

 Also, the intersections in Figures 22A and 22B

 Rotate the X axis of the work surface at P 0! ? , The Y-axis rotation tilt angles << 5, 0 are obtained by the same simple geometrical considerations as above]? Eqs. (4) and (5).

«5 =-tan"'C (Y ₂ + Y4) /

(Υ ₂ -Υ ₄ ) tan] (4) tan " ¹ 〔(Xi + X ₃ )

(Xi- ₃ ) t »n not) (5) However, the sign of Φ, is negative when it is tilted as shown in Figs. 22 2 A and 22 2 B.

In this way, the coordinate values X l, Y 2 f of each spot light S i, S ₂ , S ₃ , S 4 represented on the Brown tube as the image display 7 are displayed. By obtaining X 3 and Υ 4, the coordinate value Ζ of the intersection Ρ 0 of the optical axis (Ζ axis) 3 1 with respect to the workpiece ⁵ surface is obtained. Crossing point of day ⁹ and work Ρ. It is possible to calculate the tilt angle at (,?

Next, as shown in Fig. 24, the teaching point 3 I 3 (Ρ) (ΧΡ, Υ _Ρ , Ζ _Ρ ) of the teaching point 3 I 3 (Ρ) (ΧΡ, Υ _Ρ , Ζ _Ρ ) displayed on the image display 7 is calculated as Ζ coordinate value Ζ Ρ. Ask . The instruction of teaching point Ρ is given by operating the joystick S connected to the control unit 3 J 7 on the image display 7. Therefore, if the teaching point P is near the intersection P o] ?, and the above-mentioned tilt angle 0, 0 does not change significantly between P and P 0, the Z coordinate value of the teaching point P Z _P is the Z coordinate value Z of the intersection point P o. In addition, the variation (—YP tan Φ, -XP tan θ) due to the above slope is added. Since each tilt angle, is calculated by Eqs. (4) and (5), the Ζ coordinate value Ζ _Ρ of the teaching point Ρ finally becomes Eq. (6).

ζ ρ = (ΥΡ γ ₂ + Υ ₂ Υ 4 + y Yp) /

(y ₂ -Υ *) tan

 + (XP XI + X1 X3 + Xs Xp) /

(Xi -X ₃ ) tan ····· '(6) Therefore, the three-dimensional coordinates (XP, Υρ, ΖΡ) of teaching point P are the two-dimensional positional relationship of each spot light S i ~ S _4.

 (1 .Y 2, X 3, Y 4) and the irradiation angle (Ct) of the light beam. Therefore, the machining head 2 of the mouth is moved from the position above the intersection point P o, which is currently stopped, to the position above the teaching point P, based on the coordinate relationship between the intersection point P 0 and the teaching point P. Information will be obtained.

 Based on such an operation principle, the control unit 317 is configured to execute the teaching process for the rotor according to the flowchart of FIG.

That is, when the power is turned on and the various initial processing is completed, the four spot lights S i, S 2 shown in Fig. 24 displayed on the image display 7 are displayed on the step QJ. The value of each coordinate position X i, Y 2, X 3, Υ * of S ₃ , S ₄ is read via the image discrimination circuit S a. Next, using the coordinate values read above at step ° Q 2, use the equations (4) and (5) to find the intersection point Ρ with the optical axis 3 19 (Z axis) on the surface of S ark S. Each tilt angle 0, 0 in the is calculated. When the calculation of the tilt angle is completed, the value Z a of the Z coordinate of the intersection point PQ is calculated by step (Eq. (3)) in step Q 3.

■ When the process on fe is completed, wait for the teaching point P to be instructed by operating joystick 3 JS in step Q4. When the instruction of the teaching point P is inputted, stearyl-up Q ⁵ at coordinates chi _[rho of the designated teaching point P, Upushironro is above It is read via the image identification circuit S a of. When the coordinate values X _P, is obtained, Z-coordinate value Z _P of the teaching point P with stearyl Tsu at up Q ff (6) equation is calculated. When the coordinates of the teaching point P (XP, YP, Ζ Ρ) are obtained, the teaching point of the mouth port is determined from the coordinate relationship between the intersection point Ρ ο and the teaching point Ρ at step Q 7. The movement information consisting of the direction and the distance with respect to code 3 is calculated. According to the movement information, the teaching head 3 is moved to a position above the teaching point Ρ. In this case, the distance between the focus F and the teaching point Ρ is the first focus F and the intersection Ρ. The position is controlled so as to match the distance with. Next, the posture of the teaching head 3 is controlled to a predetermined value according to the inclination angle ø, 0 at step. When the posture control ends, in step Q9, the teaching head corresponding to this teaching point Ρ, the three-dimensional coordinates of 3 and the posture angle data are stored in the storage unit. .. This is the end of the teaching process for the teaching points.

In the case of the three-dimensional teaching device of the robot configured in this way, the operator of the robot turns on the power of the teaching device and turns on each projector 3 1, After illuminating 3 2, 3, 3 and 3 ⁴ , move teaching head 3 to a position near teaching point Ρ formed on marking line Κ, for example, and teach point Ρ is displayed on image display 7 Check that it is displayed in. Then, it is only necessary to specify the teaching point P with the joystick 3 JS. Teaching point P is specified Then, the teaching head 3 automatically moves to a position above the teaching point P, keeps a predetermined distance from the teaching point P, and stops at a predetermined posture angle. Then, the coordinates and posture data of the teaching head ♦ 3 for this teaching point P are stored in the storage unit.

 In this way, the operator automatically executes the teaching simply by pointing at the teaching point P, and it is possible to greatly improve the teaching work efficiency. As a result, the operating rate of the robot can be significantly improved.

Further, since the operator does not need to visually set the position and orientation of the machining head ^{2 with} respect to each teaching point P, it is possible to improve the teaching accuracy and the machining accuracy of the work S.

 In this embodiment, the joystick 3 1 S is used as the means for designating the teaching point P, but it is possible to use a lite pen, a digitizer, a truck #, etc. It is okay if any position (coordinates) can be electrically specified on the image display 7.

As the three-dimensional position setting system of the present invention, the teaching point position imaged on the image display is electrically read by the same configuration as that shown in FIG. Another example will be explained in which the method of automatically tracking the continuous teaching point mark is adopted by combining the facing distance and the facing attitude data by the camera. The three-dimensional coordinate (XP j, Υρι, Zpi :) of the first teaching point P i is the two-dimensional positional relationship of each spot light S i to S _4.

(X 1 .Y 2 .X 3, Y 4) and the irradiation angle () of the light beam. Therefore, from the coordinate relationship between the intersection point Ρο and the first teaching point ΡΡ, the teaching head ³ of the robot is set to The movement information for moving to the upper position will be obtained.

 Based on this operation principle, the control unit 317 is configured to execute the teaching process for the slot according to the flowchart of FIG.

That is, when the power is turned on and various initial processes are completed, the four spot lights S i, shown in Fig. 2 displayed on the image display Γ are displayed on the step display. The values of the coordinate positions X i, Y ₂ , X a, and Y 4 of S 2, S ₃ , and S ₄ are read via the image discrimination circuit S a. Next step

At the intersection point P with the optical axis 329 (Z axis) on the work surface in Eqs. (4) and (5), using each coordinate value read above. Each tilt angle ø, is calculated. When the calculation of the inclination angle, Θ <D is completed, the value Z n of the Z coordinate of the intersection point P o is calculated using the formula in Step 23.

When the above processing is completed, the instruction of the first teaching point P i is given by the operation of'Good stick 3 1 S'at step QJ. When the instruction of the first teaching point P i is input, The coordinate values Χρι, Υρι of the teaching point P 1 designated as the first teaching point in step QJ 5 are read via the image discrimination circuit S a described above. Coordinates Kairoiota, the ΡΙ is obtained at stearyl-up Q 1 6 using (6) Z-coordinate value Z _{P 1} of the first teaching point P i is calculated. Coordinates of first teaching point P i

When (XPI, Υρι, Ζρι) is obtained, the direction of the teaching point * 3 of the robot is determined from the coordinate relationship between the intersection point P o and the first teaching point Pp at step QJ 7. And the movement information consisting of distance is calculated as ffi. According to the movement information, the teaching head 3 is moved to the position above the first teaching point P i. In this case, the position is controlled so that the distance between the focus F and the first teaching point P i matches the distance between the first focus F and the intersection point P 0.

 Next, at step Q J S, is the posture of the teaching pendant F3 tilted? It is controlled to a predetermined value according to 5, 0. When the posture control is completed, the data of the three-dimensional coordinate and the posture angle of the machining head corresponding to the first teaching point P i of the stepper are stored in the storage unit. This is the end of the teaching process for the first teaching point P i.

When the teaching process for the first teaching point P i is completed, other teaching points near the first teaching point P i displayed on the image display 7 at step Q 2 (? Sway P. In this swaying motion, step i ~ As shown in Q 25, when the bright and dark level of the first teaching point P i is identified by the image identification circuit S a, the timing when the teaching head 3 moves to this teaching point P i Then this first teaching point P i becomes the new intersection P o. Next, the image identification circuit 8 * identifies the pixel closest to the light / dark level from the adjacent pixels as the adjacent teaching point P _N. The teaching point PN is automatically designated as a new teaching point P 1 after the teaching head 3 finishes moving as described above.

Then, the above-mentioned teaching process is executed for the new first teaching point P i and the teaching point P _N automatically designated. When the teaching point PN reaches the final teaching point PE in step Q26, all the teaching processing for this mouth ends.

In the case of a three-dimensional teaching device with a lot configured in this way, the operation of the mouth port should be considered by turning on the power of the teaching device and observing each projector 3 1, 3 After 2, 3, 3 and 3 4 are lit up, move the teaching head ³ to, for example, the position near the first teaching point P i of the marking line K and move to this first teaching point. All you have to do is to confirm that P i is displayed on the image display 7 and then point to the first teaching point P i in the ‘good check 3 J β’. When this first teaching point P i is specified, the teaching head 3 automatically moves to a position above the first teaching point, maintains a predetermined distance from the teaching point P i, and of Stop at the posture angle. Then, the coordinate and posture data of teaching head 3 for this teaching point P i are stored in the storage unit. Then, when the storage is completed, the next bright teaching point P is automatically designated as the first teaching point P i, and the teaching head 3 moves to this new first teaching point. In this way, teaching head 3 moves to new teaching point PN one after another.

 The details of the contents of step Q J 7 and step Q JT S are shown as subroutines in Figures 27 and 28, respectively.

 In this way, since the operator only needs to point the first teaching point P i and the teaching is automatically executed, it is possible to greatly improve the teaching work efficiency. .. As a result, the operating rate of the mouth can be significantly improved.

 Further, since the operator does not need to visually set the position and posture of the teaching head * 3 for each teaching point P, the teaching accuracy can be improved and the machining accuracy of the work S can be improved. Can be improved.

Also, in the operation shown in Fig. 26, the spot coordinates were automatically measured from the spots displayed on the Brown tube. As shown by 3 J to step Q 4 €, the spot imaged by the imager is directly image-processed and its coordinates are automatically measured. However, the same effect can be obtained.

Industrial availability

 According to the present invention, the facing distance and the facing posture of the head and the object can be measured electrically by measuring each bright spot for measurement, and the fixed distance is fixed on the image display. It is possible to check the teaching position by making a measurement, and by matching the position set point on the object with the mark fixedly displayed on the image display. By using an image pickup device at the same time as these measurements, you can observe the surface condition of the target object with an image display, and by using image processing, you can also use position processing points such as marking lines. ? It is possible to achieve a number of effects such as electrical detection.

Claims

The scope of the claims

(1) In the three-dimensional position sensor that detects the three-dimensional position and orientation with respect to the position set point displayed on the object, the sensor main body;

 Projecting means for obliquely projecting light onto the object to form a plurality of bright spots forming at least the vertices of a triangle on the surface of the object;

 An image pickup means for picking up an image including a bright spot formed on the object by the light projecting means, a position set point displayed on the object, and the surface of the object;

 An image processing means for electrically reading the radiant point and the position set point imaged by the image pickup means and detecting the three-dimensional position and orientation of the sensor main body with respect to the position set point. 3D position sensor.

(2) The light projecting means includes a first light projector for projecting a dedicated optical beam for detecting the distance between the sensor body and the position set point onto the object,

 The image processing means is characterized in that the distance between the sensor body and the position set point is detected via the first bright spot formed on the object, which is projected from the projector. The three-dimensional position sensor described in the first item of the range.

(3) The three-dimensional position sensor according to claim 2, characterized in that the first projector mentioned above projects the light beam obliquely onto the object.

(4) The light projecting means is provided in the sensor main body, projects a plurality of light beams onto an object, and forms a plurality of first light spots and at least a triangular shape. It has multiple second floodlights to form two bright spots] ?,

 4. The three-dimensional position sensor according to claim 3, wherein the image processing means detects the attitude of the sensor body with respect to the object from the first and second bright spots.

 (5) The tertiary display device according to claim 1, further comprising: an image display unit that is connected to the image capturing unit and has a screen for displaying the captured image. Original position sensor.

 (6) The image processing means is connected to the image display means, and is characterized in that the bright spot and the position set point imaged by the image pickup means are electrically read from the screen of the image display means. Range Three-dimensional position sensor described in item 5.

 (7) The image display means,

 When the three-dimensional position of the main body of the sensor with respect to the position set point on the object reaches a predetermined relative position, The three-dimensional position sensor according to claim 6, characterized in that it is provided with a plurality of reference position marks that are fixedly displayed at predetermined positions on the screen so as to coincide with each other.

(8) Each of the projectors includes a supporting unit that supports the light projecting direction so that the projecting direction can be changed, and a driving unit that changes the projecting direction. Tertiary element position sensor according to claim 4 characterized by having o

 (9) The light projecting means is

 The scope of claim 4 characterized in that it is provided with an illumination means for illuminating the surface of the object with a brightness between the brightness of the first and second bright spots and the brightness of the ambient light. The three-dimensional position sensor shown.

 α The image processing means subtracts the image signal showing the contrast of the ambient light and the illumination light from the illumination means from the image signal showing the contrast of the object and each bright spot captured by the image capturing means, The three-dimensional position sensor according to claim 4, characterized in that only the image signal is taken out and the position of each light spot is electrically detected.

ω The imaging means is

 An imaging body that has a shooting lens and that captures an image through the shooting lens;

 The driving means for moving the photographing lens along the optical axis in accordance with the distance from the position set point of the object to adjust the focal point of the imaging main body. The three-dimensional position sensor described in item 1.

 0¾

An image pickup main body having a light-receiving surface for receiving light from an image, and an optical beam output from the light-projecting means which is attached to the image pickup main body so as to be positioned in front of the light-receiving surface. The three-dimensional position sensor according to claim 1, further comprising an optical filter that blocks passage of light having a component other than a wavelength component.

 Each of the projectors is

 A light source provided outside the sensor body,

 A light source provided in the sensor body,

 The three-dimensional position sensor according to claim 4, further comprising an optical fiber optical system that connects the light emitting source and the light emitting source so that light can be transmitted.

 The imaging means is

 An image sensor provided outside the sensor body,

 No. 1 of the claim, which is characterized in that it is provided with a photographing lens provided in the sensor body and an optical fiber optical system for connecting the image pickup device and the photographing lens so that light can be transmitted. The three-dimensional position sensor described in Section.

 $ The imaging means,

 A light source that is provided outside the sensor body and that can adjust the luminous intensity of the emitted light,

 An illumination lens provided inside the sensor body,

 The three-dimensional position sensor according to claim 1, characterized in that the light source and the illumination lens are connected to each other so that they can transmit light.

It detects the three-dimensional position and orientation of the head with respect to the position set point displayed on the object, and positions the head arbitrarily. In a three-dimensional position setting system that can be opposed to the position setting,

 A projection means provided on the head for obliquely projecting light onto the object to form a plurality of bright spots forming at least the vertices of a triangle on the surface of the object;

 It is provided on the head and depends on the light emitting means.)) Imaging that captures an image including the bright spots formed on the object, the position set points displayed on the object, and the surface of the object Means; image processing means for electrically reading the imaged bright spots and position set points i>, and detecting the three-dimensional position and orientation of the head with respect to the position set points;

 A storage means for storing information on the three-dimensional position and orientation of the head with respect to the position set point detected by this image processing means;

 The special feature is to read out the information stored in this storage means, and to provide a consulting means for causing the head to face the position set point in a predetermined three-dimensional position and posture based on this information. 3D position setting system.

 The three-dimensional position according to claim 16, further comprising: an image display unit that is connected to the image capturing unit and has a screen for displaying an image captured by the image capturing unit. Setting system.

 The image processing means,

Two-dimensional of each bright spot displayed on the screen of the image display means Of the head position to the position setting point and the inclination of the head V with respect to the object, which are determined from the relative position and the irradiation angle of the light projecting means, depending on the positional relationship between each of the light points on the object. Reference position calculating means for calculating an angle;

 Designating means for designating teaching points on the screen of the image display means

 Automatic measuring means for automatically measuring the secondary positional relationship between the teaching point and the position setting point designated by j?

 The movement information to the teaching point of the head is calculated using the position checker measured by this automatic measuring means, the distance between the position set point and the head, and the inclination angle of the head. The three-dimensional position setting system according to claim 17, characterized in that it is provided with a motion inertial information calculating means.

 L9) The drive means is a movement means for moving the head to a teaching point based on the movement information calculated by the movement information calculation means.

 The three-dimensional position according to claim 18, characterized in that it is provided with a posture control means for controlling the posture of the moved head P based on the tilt angle. Setting system.

 The image processing means,

From the two-dimensional positional relationship and irradiation angle of each bright spot displayed on the screen of the image display means, the position between each bright spot on the object A reference position calculating means for calculating the distance to the head P of the reference position determined by the positional relationship and the inclination angle of the head with respect to the surface of the object;

 Image identifying means for identifying the brightness of each teaching point displayed on the screen in a plurality of stages.

 Of the teaching points displayed on the screen, designation means for designating the first teaching point,

 With this designating means]? Automatic measuring means for automatically measuring the two-dimensional positional relationship between the designated first teaching point and the reference position;

 A movement information generating means for calculating movement information up to the first teaching point of the head by using the positional relationship measured by the automatic measuring means, the distance between the head at the reference position and the inclination angle. The three-dimensional position setting system according to claim 17, characterized in that

 The drive means is

 A movement means for moving the head to the first teaching point based on the movement information calculated by the movement information calculation means;

 By this moving means]) First attitude control means for controlling the attitude of the moved head based on the inclination angle,

From the pixels around the first teaching point by the image identifying means, the pixel having the brightness closest to that of the teaching point is searched for, the adjacent teaching point is identified, and the adjacent teaching point is identified. Automatic designating means that automatically designates the teaching point to be replaced with the first teaching point,

 By this automatic designating means]? The feature is that the head * is sequentially moved to the designated teaching point and the second posture controlling means for sequentially controlling the posture of the head is provided. Scope of request The three-dimensional positioning system described in item 20.

¾ The three-dimensional position setting system according to claim 16, characterized in that the head is provided with a processing head.