WO1989005707A1 - Traitement de surfaces au laser - Google Patents

Traitement de surfaces au laser Download PDF

Info

Publication number
WO1989005707A1
WO1989005707A1 PCT/US1988/004537 US8804537W WO8905707A1 WO 1989005707 A1 WO1989005707 A1 WO 1989005707A1 US 8804537 W US8804537 W US 8804537W WO 8905707 A1 WO8905707 A1 WO 8905707A1
Authority
WO
WIPO (PCT)
Prior art keywords
reflectivity
radiation
selected areas
pulses
laser
Prior art date
Application number
PCT/US1988/004537
Other languages
English (en)
Inventor
Walter Winston Duley
Grant Kinsman
Original Assignee
Cohn, Ronald, D.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cohn, Ronald, D. filed Critical Cohn, Ronald, D.
Publication of WO1989005707A1 publication Critical patent/WO1989005707A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/356—Working by laser beam, e.g. welding, cutting or boring for surface treatment by shock processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/3568—Modifying rugosity
    • B23K26/3584—Increasing rugosity, e.g. roughening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/38—Selection of media, e.g. special atmospheres for surrounding the working area

Definitions

  • the present invention relates to a method of modifying the reflectivity and/or of a surface of a metal.
  • Most surfaces reflect radiation over a wide range of wavelengths and do so with a varying reflectivity at different wavelengths. This characteristic can be used in a number of ways and has differing effects. For example, in an armaments environment, a laser is used to interrogate a vehicle and the signature of the vehicle is determined by the reflectivity of the surface. This is used to identify an enemy and the type of vehicle.
  • the emissivity of a surface which is related physically to the surface reflectivity is also an important parameter in determining the rate with which a surface loses or gains heat by radiation.
  • the emissivity of a surface is for example critical in the cooling of spacecraft where maximum emissivity is desirable to reduce the temperature of the spacecraft and avoid damage to the vehicle. Such surfaces would have a low reflectivity at wavelengths in the infrared.
  • the emissivity of a surface can be modified in a number of ways. To enhance cooling of a surface in a spacecraft it is known to use special paints but these are prone to erosion due to the radiation, atoms and ions present in space. Similarly, specific materials or paints have been used on armaments to change their reflective characteristics and reduce their reflectivity to radar and laser range-finding devices. However, these treatments tend to be expensive and not permanent. It is, therefore, an object of the present invention to provide a method of modifying the reflectivity and hence the emissivity of a surface that obviates or mitigates the above disadvantages.
  • a method of modifying the reflectivity of a surface of a material comprising the steps of irradiating the surface with coherent pulsed radiation at a power sufficient to generate a surface plasma and scanning said radiation across said surface.
  • the present invention modifies the reflectivity of a surface by generating a surface plasma which, combined with the pulsed nature of the radiation, produces fine surface irregularities and leads to a change, typically a reduction, in the reflectivity of the surface.
  • a chemical change is also enhanced with the surface plasma that is generated.
  • This chemical change at the surface can be promoted by providing a localized atmosphere of a specific gas, for example oxygen to promote oxidation of the surface.
  • This processing also has the effect of modifying the thermal emissivity of these surfaces.
  • Figure 1 is a perspective representation of a laser surface treatment technique
  • Figure 2 is a graph illustrating the reflective characteristics of the surface of one type of material
  • Figure 3 is a graph illustrating the wavelength dependence of the reflectivity of the surface represented in Figure 2 after the laser treatment technique of Figure 1;
  • Figure 4 is a graph illustrating the reflective characteristics of a surface of a second material (aluminum).
  • Figure 5 is a graph illustrating the reflective characteristics of the surface represented in Figure 4 following the laser treatment technique represented in Figure 1;
  • Figure 6 is a graph illustrating the effect on the reflective characteristics of an aluminum surface caused by varying the periods of treatment by the technique represented in Figure 1;
  • Figure 7 is a curve similar to Figure 6 showing the relationship between emissivity efficiency and the number of pulses of laser radiation where the pulses partially overlap.
  • Figure 8 is a curve similar to Figure 7 showing relationship between emissivity efficiency and number of pulses for a stationary sample of material.
  • Figure 9 is a curve showing the effect of different energies of the incident beam on the absorptivity of an aluminum surface.
  • Figure 10 is a curve showing the effect of varying amounts of the treatment of Figure 1 on the convective loss of the material used in Figures 6 to 9.
  • Figure 11 is a graph similar to Figure 6 showing the effect of the treatment on copper
  • Figures 12 to 22 are reproductions and electron microscope scans of samples described in chart 1 below.
  • Figure 23 is a schematic representation of an alternative apparatus to that shown in Figure 1;
  • Figure 24 is a representation of a material having selected areas of its surface treated by the technique of Figure 1.
  • Figure 1 there is shown a laser 10 irradiating a surface 12 of a material.
  • the laser is finely focused to a point 14 typically having a surface area in the order of 1 mm 2 .
  • the material 12 can be moved relative to the laser 10 about two mutually perpendicular axes so that the laser can be moved to any point on the surface 12.
  • the laser 10 is operated to produce pulsed radiation and focused to the point 14 so that the intensity of the beam is sufficient to generate a laser supported detonation wave.
  • the threshold for plasma ignition leading to a detonation wave is about 5 ⁇ 10 8 watts/cm 2 , i.e. a fluence in the order of 20J/cm 2 .
  • the laser 20 produces pulsed radiation and the material within the spot 14 irradiated at a sufficient intensity so as to form a surface plasma. Focussing of this radiation to produce an intensity exceeding the threshold for plasma production results in an evaporation and melting of surface material. Material removed forms a vapor over the surface that is heated by the laser beam to form a plasma. The shock wave associated with this plasma impacts onto the heated surface and produces a surface roughening as liquid material is ejected away from the focal spot. It is this surface roughening together with oxidation of the hot material that produces a change in the reflectivity and emissivity of the material. As the laser 10 is operated, the spot 14 is scanned across the surface 12 by movement about one of the axes.
  • the preferred apparatus is an Excimer laser, operating at a wavelength of 308 nm and providing an energy per pulse of between 10 and 1000 mJ and a pulse width of less than 100 ns, typically in the order of 30 ns. This is operated at a repetition rate of 50 Hz with scan speed across the surface of 7 in/min.
  • each area on the treated surface will be irradiated by a plurality of pulses, preferably more than 5 and more preferably more than 7.
  • the number of pulses is 17.
  • the effect of irradiating the surface as noted above is to provide a number of overlapping pits indicated at 16 arranged in lines indicated at 18 across the surface.
  • the surfaces produced exhibit a characteristic roughness with gross features produced by the overlapping pulses and, within the gross features, a small scale structure with a scale of less than 50 microns.
  • Figure 2 shows a plot of reflectivity versus wave number (1/ (cm)) for untreated material. It will be seen that the reflectivity varies between 67% and 80%, between 4000 and 400 wavenumbers with characteristic peaks exhibited at particular wavenumbers.
  • Figures 4 and 5 show the effect of the treatment on aluminum.
  • the reflectivity for untreated material varies between 47 and 57% between 4000 and 400 wavenumbers.
  • the reflectivity has been reduced over the entire range between 4000 and 400 wavenumbers.
  • the dramatic reduction in reflectivity at 3600 wavenumbers and at 800 wavenumbers may be attributed to the formation of surface hydroxide during treatment.
  • the formation of a surface oxide causes a corresponding reduction in the reflectivity of the treated sample at 800 wavenumbers.
  • the surface treatment can be enhanced by providing a localized atmosphere, such as an oxygen-rich atmosphere, at the focal point of the laser beam during irradiation. This would promote the formation of oxides and reduce the reflectivity further. Similarly, it may be preferred to utilize nitrogen-rich atmospheres to generate nitrides at the surface if they show a significant reduction in surface reflectivity at useful wavelengths.
  • a localized atmosphere such as an oxygen-rich atmosphere
  • FIG. 6 The effect of the number of overlapping pulses is best illustrated in Figure 6.
  • This curve shows the reflectivity at a fixed wavelength, typically that used by a laser radar, i.e. 10.6 micron versus the number of overlapping laser pulses for aluminum treated with a pulsed excimer laser operating under the conditions noted above an energy of 160 mJ/pulse.. It will be seen that as the number of pulses increases, i.e. the scanning speed is reduced or the pulse repetition rate increased, the reflectivity of the surface to radiation at a wavelength of 10.6 micron is progressively decreased, i.e. the emissivity at 10.6 micron is progressively increased.
  • Figure 8 shows similar results where successive pulses are coincident, i.e. the laser and material are relatively fixed and shows that whilst a similar effect is obtained its magnitude is approximately 50% of that produced with partially overlapping pulses. Accordingly it is believed that relative movement between the laser and the material surface is beneficial for producing the optimum surface effect as well as facilitating processing.
  • the effect of intensity of the incident beam is illustrated in Figure 9. It will be noted that with higher energy levels, the initial change in reflectivity is increased but rapidly reaches a limit. The lower energy level also shows a dramatic increase but continues to increase the absorptivity (i.e. reduce the reflectivity over a greater number of pulses). This effect may be attributed the material removal that occurs at higher energy levels that inhibits the formation or deposition of oxides. In this plot the absorbivity to radiation emitted from a CO 2 laser is plotted.
  • FIG. 10 A further beneficial effect is illustrated in Figure 10 where the effect of the resultant surface on the convective loss is shown. It will be seen that after relatively few pulses a significant increase in convective loss occurs, in the order of 300% to 400%. Thereafter the convective loss is relatively constant.
  • the initial exposure of the surface produces a surface roughening that increases surface area and reduces reflectivity.
  • Progressively increasing numbers of pulses maintain the increased surface area but also promote formation of chemical compounds, particularly oxides that contribute to the further reduction in reflectivity.
  • the surfaces showing reduced reflectivity and increased emissivity each have a roughness with small scale structures with a scale of less than 50 microns and it will be observed that as the number of pulses increases, oxides are formed further contributing to the reduction in reflectivity.
  • the primary effect appears to be the production of a surface plasma.
  • This plasma is created when vapourized target material is heated by incident radiation via inverse bremsstrahlung. This appears to be followed by the formation of a laser supported absorption wave that further couples laser energy into the target, increasing the material removal rate. Under these conditions, liquid is expelled from the focus by the shock wave associated with this plasma.
  • the hot liquid droplets are oxidized during the process, likely by reaction with atomic oxygen in the greakdown plasma.
  • the roughened surface contains small oxide particles that have been entrained in a rough metal matrix. Increased coupling of 10.6 micron radiation to this surface is believed to be due to this roughening and to the presence of entrained oxide particles.
  • the treatment When used on an armament, the treatment can be applied selectively to alter the silhouette of the vehicle or to change the signature obtained from the vehicle under laser radar interrogation. Such treatment is effectively a form of electronic camouflage.
  • the overlapping of the pits 18 produces fine grooves on the surface and with repeated scans a bulk surface area of the desired characteristics may be produced.
  • a particularly beneficial effect may be obtained if the radiation does not impinge normally to the surface.
  • the axis of the last 10a is inclined to the surface of the material 12a to produce lines 18a as noted above. It has been found that when the laser radiation does not impinge normally on the surface, then the grooves created are undercut or angled with respect to the surface. Such angled grooves produce a change due to both components of reflectivity, that is spectral and diffuse reflectivity, being altered. This again can produce a pronounced effect leading to a reduction in the reflectivity of the surface.
  • the treated areas may be arranged in random patterns across the surface or may follow a predetermined pattern to produce a desired effect. Different areas may be treated in different ways to provide a maximum effect at different wavelengths.
  • the treated areas may be applied to selected areas to change the silhouette of a vehicle when interrogated by laser radar.
  • the surface treatment may be used in a number of ways to provide a change in the reflectivity of a surface.
  • the exact nature of the treatment is variable to produce particularly desirable effects such as a minimum reflectivity to a particular wavelength or a black oxide coating to maximize emissivity for black body radiation.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laser Beam Processing (AREA)

Abstract

Selon un procédé de modification du pouvoir réfléchissant et de l'émittance de la surface d'un matériau, on irradie la surface avec un faisceau de rayonnements cohérents pulsés avec une puissance suffisante pour générer un plasma de surface, en balayant ladite surface avec ledit faisceau. On provoque le chevauchement d'impulsions successives de rayonnement et on active les modifications chimiques de la surface en créant une atmosphère localisée. La surface ainsi produite présente des motifs de l'ordre de moins de 50 microns et une profondeur limitée à moins de 10-3 cm. Le corps du matériau n'est pas affecté.
PCT/US1988/004537 1987-12-17 1988-12-19 Traitement de surfaces au laser WO1989005707A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13404087A 1987-12-17 1987-12-17
US134,040 1987-12-17

Publications (1)

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WO1989005707A1 true WO1989005707A1 (fr) 1989-06-29

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996028574A1 (fr) * 1995-03-13 1996-09-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Procede et dispositif d'accroissement du degre d'absorption lors de la trempe superficielle en phase solide de pieces par rayonnement laser
EP0745450A2 (fr) * 1995-05-27 1996-12-04 Audi Ag Procédé d'usinage des surfaces de pièces
WO1997007925A1 (fr) * 1995-08-31 1997-03-06 Pechiney Rhenalu Procede pour ameliorer la reflectivite d'une tole d'aluminium
EP1249505A1 (fr) * 2001-04-12 2002-10-16 Index-Werke Gmbh & Co. Kg Hahn & Tessky Procédé pour le durcissement d'une zone superficielle d'une pièce
WO2003076061A2 (fr) * 2002-03-07 2003-09-18 Hewlett-Packard Company Structure de systeme d'echange d'ions dotee d'une surface microgranuleuse, son procede de fabrication et son procede d'utilisation
DE10339443A1 (de) * 2003-04-11 2004-10-21 Dirk Richter Walzenbeschichtungsverfahren und Walzenbeschichtung
WO2013091606A3 (fr) * 2011-12-20 2013-08-15 Eads Deutschland Gmbh Procédé de structuration et de modification chimique d'une surface d'une pièce
WO2013091607A3 (fr) * 2011-12-20 2013-08-22 Eads Deutschland Gmbh Procédé de structuration d'une surface d'une pièce d'œuvre
EA023676B1 (ru) * 2012-07-27 2016-06-30 Владимир Владимирович Жарский Способ поверхностного упрочнения металлических изделий перемещающимся лазерным лучом
US10261025B2 (en) 2016-11-04 2019-04-16 Industrial Technology Research Institute Workpiece surface detection method and system using the same
EP3789157A1 (fr) 2019-09-04 2021-03-10 Leibniz-Institut für Oberflächenmodifizierung e.V. Procédé de traitement d'une surface de solide

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103624402B (zh) * 2013-11-14 2015-05-13 中国科学院上海光学精密机械研究所 提高光学元件小光斑扫描激光预处理效率的方法

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US3663793A (en) * 1971-03-30 1972-05-16 Westinghouse Electric Corp Method of decorating a glazed article utilizing a beam of corpuscular energy
US3700850A (en) * 1970-09-04 1972-10-24 Western Electric Co Method for detecting the amount of material removed by a laser
US4028523A (en) * 1974-12-10 1977-06-07 Steigerwald Strahltechnik Gmbh Energy-beam engraving method and an apparatus for carrying it out
US4087672A (en) * 1975-07-08 1978-05-02 United Kingdom Atomic Energy Authority Laser removal of material from workpieces
US4377735A (en) * 1981-05-28 1983-03-22 Nippon Steel Corporation Laser working treatment process capable of controlling the form of heated portion of a steel material
US4377736A (en) * 1981-08-14 1983-03-22 General Electric Company Method and apparatus for removing material from a surface
US4500771A (en) * 1982-10-20 1985-02-19 Westinghouse Electric Corp. Apparatus and process for laser treating sheet material
US4535218A (en) * 1982-10-20 1985-08-13 Westinghouse Electric Corp. Laser scribing apparatus and process for using
US4547649A (en) * 1983-03-04 1985-10-15 The Babcock & Wilcox Company Method for superficial marking of zirconium and certain other metals

Patent Citations (9)

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US3700850A (en) * 1970-09-04 1972-10-24 Western Electric Co Method for detecting the amount of material removed by a laser
US3663793A (en) * 1971-03-30 1972-05-16 Westinghouse Electric Corp Method of decorating a glazed article utilizing a beam of corpuscular energy
US4028523A (en) * 1974-12-10 1977-06-07 Steigerwald Strahltechnik Gmbh Energy-beam engraving method and an apparatus for carrying it out
US4087672A (en) * 1975-07-08 1978-05-02 United Kingdom Atomic Energy Authority Laser removal of material from workpieces
US4377735A (en) * 1981-05-28 1983-03-22 Nippon Steel Corporation Laser working treatment process capable of controlling the form of heated portion of a steel material
US4377736A (en) * 1981-08-14 1983-03-22 General Electric Company Method and apparatus for removing material from a surface
US4500771A (en) * 1982-10-20 1985-02-19 Westinghouse Electric Corp. Apparatus and process for laser treating sheet material
US4535218A (en) * 1982-10-20 1985-08-13 Westinghouse Electric Corp. Laser scribing apparatus and process for using
US4547649A (en) * 1983-03-04 1985-10-15 The Babcock & Wilcox Company Method for superficial marking of zirconium and certain other metals

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996028574A1 (fr) * 1995-03-13 1996-09-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Procede et dispositif d'accroissement du degre d'absorption lors de la trempe superficielle en phase solide de pieces par rayonnement laser
US5902420A (en) * 1995-03-13 1999-05-11 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Process and device for increasing the degree of absorption during superficial solid phase hardening of workpieces by laser radiation
EP0745450A2 (fr) * 1995-05-27 1996-12-04 Audi Ag Procédé d'usinage des surfaces de pièces
EP0745450A3 (fr) * 1995-05-27 1997-12-03 Audi Ag Procédé d'usinage des surfaces de pièces
WO1997007925A1 (fr) * 1995-08-31 1997-03-06 Pechiney Rhenalu Procede pour ameliorer la reflectivite d'une tole d'aluminium
FR2738173A1 (fr) * 1995-08-31 1997-03-07 Pechiney Recherche Procede pour ameliorer la reflectivite d'une tole d'aluminium
EP1249505A1 (fr) * 2001-04-12 2002-10-16 Index-Werke Gmbh & Co. Kg Hahn & Tessky Procédé pour le durcissement d'une zone superficielle d'une pièce
WO2003076061A3 (fr) * 2002-03-07 2004-02-05 Hewlett Packard Co Structure de systeme d'echange d'ions dotee d'une surface microgranuleuse, son procede de fabrication et son procede d'utilisation
WO2003076061A2 (fr) * 2002-03-07 2003-09-18 Hewlett-Packard Company Structure de systeme d'echange d'ions dotee d'une surface microgranuleuse, son procede de fabrication et son procede d'utilisation
US6869712B2 (en) 2002-03-07 2005-03-22 Hewlett-Packard Development Company, L.P. Ion exchange system structure with a microtextured surface, method of manufacture, and method of use thereof
DE10339443A1 (de) * 2003-04-11 2004-10-21 Dirk Richter Walzenbeschichtungsverfahren und Walzenbeschichtung
WO2013091606A3 (fr) * 2011-12-20 2013-08-15 Eads Deutschland Gmbh Procédé de structuration et de modification chimique d'une surface d'une pièce
WO2013091607A3 (fr) * 2011-12-20 2013-08-22 Eads Deutschland Gmbh Procédé de structuration d'une surface d'une pièce d'œuvre
EA023676B1 (ru) * 2012-07-27 2016-06-30 Владимир Владимирович Жарский Способ поверхностного упрочнения металлических изделий перемещающимся лазерным лучом
US10261025B2 (en) 2016-11-04 2019-04-16 Industrial Technology Research Institute Workpiece surface detection method and system using the same
EP3789157A1 (fr) 2019-09-04 2021-03-10 Leibniz-Institut für Oberflächenmodifizierung e.V. Procédé de traitement d'une surface de solide

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