WO1989004586A3 - Procede et appareil de production de faisceaux de particules - Google Patents
Procede et appareil de production de faisceaux de particules Download PDFInfo
- Publication number
- WO1989004586A3 WO1989004586A3 PCT/GB1988/000938 GB8800938W WO8904586A3 WO 1989004586 A3 WO1989004586 A3 WO 1989004586A3 GB 8800938 W GB8800938 W GB 8800938W WO 8904586 A3 WO8904586 A3 WO 8904586A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- particles
- particle beams
- ionised
- generating particle
- source
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
- H05H3/02—Molecular or atomic beam generation
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3856268T DE3856268T2 (de) | 1987-10-30 | 1988-10-28 | Verfahren und vorrichtung zur erzeugung von teilchenbündeln |
EP88909791A EP0534935B1 (fr) | 1987-10-30 | 1988-10-28 | Procede et appareil de production de faisceaux de particules |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB878725459A GB8725459D0 (en) | 1987-10-30 | 1987-10-30 | Generating particle beams |
GB8725459 | 1987-10-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1989004586A2 WO1989004586A2 (fr) | 1989-05-18 |
WO1989004586A3 true WO1989004586A3 (fr) | 1989-06-15 |
Family
ID=10626179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB1988/000938 WO1989004586A2 (fr) | 1987-10-30 | 1988-10-28 | Procede et appareil de production de faisceaux de particules |
Country Status (6)
Country | Link |
---|---|
US (1) | US5111042A (fr) |
EP (1) | EP0534935B1 (fr) |
JP (1) | JPH03500829A (fr) |
DE (1) | DE3856268T2 (fr) |
GB (2) | GB8725459D0 (fr) |
WO (1) | WO1989004586A2 (fr) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05251408A (ja) * | 1992-03-06 | 1993-09-28 | Ebara Corp | 半導体ウェーハのエッチング装置 |
US5352899A (en) * | 1992-08-18 | 1994-10-04 | Ruxam, Inc. | Method and apparatus for fabricating a device/circuit pattern by a converging atomic beam |
US6627874B1 (en) * | 2000-03-07 | 2003-09-30 | Agilent Technologies, Inc. | Pressure measurement using ion beam current in a mass spectrometer |
WO2002006556A1 (fr) * | 2000-07-14 | 2002-01-24 | Epion Corporation | Procede et dispositif servant a diagnostiquer les dimensions d'agregats ionises preformes en phase gazeuse et a traiter une piece |
WO2002006557A1 (fr) | 2000-07-14 | 2002-01-24 | Epion Corporation | Diagnostic de taille de gcib et traitement de pieces |
US20050092595A1 (en) * | 2003-10-31 | 2005-05-05 | Infineon Technologies Richmond, Lp | Ion gauge condition detector and switching circuit |
EP2259664B1 (fr) | 2004-07-21 | 2017-10-18 | Mevion Medical Systems, Inc. | Générateur programmable de forme d'onde à radiofréquence pour un synchrocyclotron |
US7358484B2 (en) * | 2005-09-29 | 2008-04-15 | Tokyo Electron Limited | Hyperthermal neutral beam source and method of operating |
US7893397B2 (en) * | 2005-11-07 | 2011-02-22 | Fibics Incorporated | Apparatus and method for surface modification using charged particle beams |
CN101361156B (zh) | 2005-11-18 | 2012-12-12 | 梅维昂医疗系统股份有限公司 | 用于实施放射治疗的设备 |
US7888630B2 (en) * | 2006-04-06 | 2011-02-15 | Wong Alfred Y | Reduced size high frequency quadrupole accelerator for producing a neutralized ion beam of high energy |
US8003964B2 (en) | 2007-10-11 | 2011-08-23 | Still River Systems Incorporated | Applying a particle beam to a patient |
US8581523B2 (en) | 2007-11-30 | 2013-11-12 | Mevion Medical Systems, Inc. | Interrupted particle source |
US8933650B2 (en) | 2007-11-30 | 2015-01-13 | Mevion Medical Systems, Inc. | Matching a resonant frequency of a resonant cavity to a frequency of an input voltage |
JP6523957B2 (ja) | 2012-09-28 | 2019-06-05 | メビオン・メディカル・システムズ・インコーポレーテッド | 磁場を変更するための磁性シム |
JP6254600B2 (ja) | 2012-09-28 | 2017-12-27 | メビオン・メディカル・システムズ・インコーポレーテッド | 粒子加速器 |
EP2901821B1 (fr) | 2012-09-28 | 2020-07-08 | Mevion Medical Systems, Inc. | Régénérateur de champ magnétique |
TW201438787A (zh) | 2012-09-28 | 2014-10-16 | Mevion Medical Systems Inc | 控制粒子治療 |
US9681531B2 (en) | 2012-09-28 | 2017-06-13 | Mevion Medical Systems, Inc. | Control system for a particle accelerator |
US10254739B2 (en) | 2012-09-28 | 2019-04-09 | Mevion Medical Systems, Inc. | Coil positioning system |
WO2014052709A2 (fr) | 2012-09-28 | 2014-04-03 | Mevion Medical Systems, Inc. | Contrôle de l'intensité d'un faisceau de particules |
EP2900325B1 (fr) | 2012-09-28 | 2018-01-03 | Mevion Medical Systems, Inc. | Réglage de l'énergie d'un faisceau de particules |
JP6121544B2 (ja) | 2012-09-28 | 2017-04-26 | メビオン・メディカル・システムズ・インコーポレーテッド | 粒子ビームの集束 |
US8791656B1 (en) | 2013-05-31 | 2014-07-29 | Mevion Medical Systems, Inc. | Active return system |
US9730308B2 (en) | 2013-06-12 | 2017-08-08 | Mevion Medical Systems, Inc. | Particle accelerator that produces charged particles having variable energies |
US10258810B2 (en) | 2013-09-27 | 2019-04-16 | Mevion Medical Systems, Inc. | Particle beam scanning |
US9962560B2 (en) | 2013-12-20 | 2018-05-08 | Mevion Medical Systems, Inc. | Collimator and energy degrader |
US10675487B2 (en) | 2013-12-20 | 2020-06-09 | Mevion Medical Systems, Inc. | Energy degrader enabling high-speed energy switching |
US9661736B2 (en) | 2014-02-20 | 2017-05-23 | Mevion Medical Systems, Inc. | Scanning system for a particle therapy system |
US9950194B2 (en) | 2014-09-09 | 2018-04-24 | Mevion Medical Systems, Inc. | Patient positioning system |
US10786689B2 (en) | 2015-11-10 | 2020-09-29 | Mevion Medical Systems, Inc. | Adaptive aperture |
EP3481503B1 (fr) | 2016-07-08 | 2021-04-21 | Mevion Medical Systems, Inc. | Planification de traitement |
US11103730B2 (en) | 2017-02-23 | 2021-08-31 | Mevion Medical Systems, Inc. | Automated treatment in particle therapy |
EP3645111A1 (fr) | 2017-06-30 | 2020-05-06 | Mevion Medical Systems, Inc. | Collimateur configurable commandé au moyen de moteurs linéaires |
US11291861B2 (en) | 2019-03-08 | 2022-04-05 | Mevion Medical Systems, Inc. | Delivery of radiation by column and generating a treatment plan therefor |
CN112242049A (zh) * | 2019-07-19 | 2021-01-19 | 开利公司 | 警报发声部件的状态检测 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3665182A (en) * | 1969-08-18 | 1972-05-23 | Minnesota Mining & Mfg | Elemental analyzing apparatus |
FR2212044A5 (fr) * | 1972-12-22 | 1974-07-19 | Anvar | |
US4090077A (en) * | 1969-03-05 | 1978-05-16 | Siemens Aktiengesellschaft | Particle beam device with a deflection system and a stigmator |
US4261698A (en) * | 1980-01-23 | 1981-04-14 | International Business Machines Corporation | Trace oxygen detector |
DE3130276A1 (de) * | 1981-07-31 | 1983-02-17 | Hermann Prof. Dr. 6301 Fernwald Wollnik | Einrichtung zur vollelektrischen justierung von teilchenspektrometern und abbildungssystemen |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2816243A (en) * | 1956-04-09 | 1957-12-10 | High Voltage Engineering Corp | Negative ion source |
US3136908A (en) * | 1960-07-28 | 1964-06-09 | Weinman James Adolf | Plurally charged ion beam generation method |
FR1352167A (fr) * | 1962-11-28 | 1964-02-14 | Ct Nat De La Rech Scient Et Cs | Nouveau dispositif de microanalyse par émission ionique secondaire |
US3424904A (en) * | 1965-05-03 | 1969-01-28 | Lake Forest College | Process for producing negative hydrogen ions from protons |
US3585397A (en) * | 1968-10-04 | 1971-06-15 | Hughes Aircraft Co | Programmed fine ion implantation beam system |
US3723733A (en) * | 1971-05-12 | 1973-03-27 | Hughes Aircraft Co | Stigmatic, crossed-field velocity filter |
US3757114A (en) * | 1972-03-08 | 1973-09-04 | Bell Telephone Labor Inc | Atoms or molecules apparatus and method for measuring the intensity of a beam of neutral |
US3845312A (en) * | 1972-07-13 | 1974-10-29 | Texas Instruments Inc | Particle accelerator producing a uniformly expanded particle beam of uniform cross-sectioned density |
NL7317436A (nl) * | 1973-12-20 | 1975-06-24 | Philips Nv | Inrichting voor massa-analyse en structuur-analyse van een oppervlaklaag door middel van ionenver- strooiing. |
JPS5628499A (en) * | 1979-08-16 | 1981-03-20 | Mitsubishi Electric Corp | Neutron particle generator |
US4383180A (en) * | 1981-05-18 | 1983-05-10 | Varian Associates, Inc. | Particle beam accelerator |
DE3275679D1 (en) * | 1981-05-26 | 1987-04-16 | Hughes Aircraft Co | Focused ion beam microfabrication column |
JPS596024B2 (ja) * | 1981-06-17 | 1984-02-08 | 株式会社東芝 | イオン源用電源装置 |
US4385946A (en) * | 1981-06-19 | 1983-05-31 | Bell Telephone Laboratories, Incorporated | Rapid alteration of ion implant dopant species to create regions of opposite conductivity |
JPS6062045A (ja) * | 1983-09-14 | 1985-04-10 | Hitachi Ltd | イオンマイクロビ−ム打込み装置 |
GB8419768D0 (en) * | 1984-08-02 | 1984-09-05 | Manchester Inst Science Tech | Atom beams |
JPS6186698A (ja) * | 1984-10-05 | 1986-05-02 | 日本電信電話株式会社 | 収束性高速原子線源 |
-
1987
- 1987-10-30 GB GB878725459A patent/GB8725459D0/en active Pending
-
1988
- 1988-10-28 EP EP88909791A patent/EP0534935B1/fr not_active Expired - Lifetime
- 1988-10-28 DE DE3856268T patent/DE3856268T2/de not_active Expired - Fee Related
- 1988-10-28 GB GB8825249A patent/GB2211984B/en not_active Expired - Fee Related
- 1988-10-28 JP JP63509077A patent/JPH03500829A/ja active Pending
- 1988-10-28 US US07/469,481 patent/US5111042A/en not_active Expired - Fee Related
- 1988-10-28 WO PCT/GB1988/000938 patent/WO1989004586A2/fr active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4090077A (en) * | 1969-03-05 | 1978-05-16 | Siemens Aktiengesellschaft | Particle beam device with a deflection system and a stigmator |
US3665182A (en) * | 1969-08-18 | 1972-05-23 | Minnesota Mining & Mfg | Elemental analyzing apparatus |
FR2212044A5 (fr) * | 1972-12-22 | 1974-07-19 | Anvar | |
US4261698A (en) * | 1980-01-23 | 1981-04-14 | International Business Machines Corporation | Trace oxygen detector |
DE3130276A1 (de) * | 1981-07-31 | 1983-02-17 | Hermann Prof. Dr. 6301 Fernwald Wollnik | Einrichtung zur vollelektrischen justierung von teilchenspektrometern und abbildungssystemen |
Non-Patent Citations (8)
Title |
---|
Anal. Chem., volume 59, no. 13, July 1987, American Chemical Society, A.D. Appelhans et al.: "Focused, rasterable, high-energy neutral molecular beam probe for secondary ion mass spectrometry", pages 1685-1691 * |
Instruments and Experimental Techniques, volume 23, no. 3, part 2, May-June 1981, Plenum Publishing Corporation, E.N. Evlanov et al.: "Characteristics of a cooled shf source of O, H and D atomic beams", pages 733-736 * |
Japanese Journal of Applied Physics, volume 5, no. 6, June 1966, (Tokyo, JP), K. Morita et al.: "Secondary electron emission type neutral particle detector", pages 511-518 * |
Journal of Vacuum Science & Technology/B, volume 3, no. 1, Second Series, January/February 1985, American Vacuum Society, (Woodbury, New York, US), H. Paik et al.: "Systematic design of an electrostatic optical system for ion beam lithography", pages 75-81 * |
Nuclear Instruments and Methods, volume 149, 1978, North-Holland Publishing Co., (Amsterdam, NL), C.W. Magee et al.: "Hydrogen ion implantation profiles as determined by SIMS", pages 529-533 * |
Physical Review A, volume 8, no. 5, November 1973, (New York, US), R. Morgenstern et al.: "Differential scattering of metastABLE He(23S) on He(11S) at energies between 5 and 10 eV", pages 2372-2379 see page 2373 * |
Review of Scientific Instruments, volume 51, no. 4, April 1980, American Institute of Physics, (New York, US), D. Brisson et al.: "Low energy H atom analyzer using a cesium heat pipe", pages 511-515 * |
Review of Scientific Instruments, volume 56, no. 8, August 1985, American Institute of Physics, (Woodbury, New York, US), P.M. Thompson et al.: "Retarding-field differential-output energy prefilter for high-performance secondary ion mass spectrometry", pages 1557-1563 * |
Also Published As
Publication number | Publication date |
---|---|
GB2211984B (en) | 1992-06-03 |
DE3856268D1 (de) | 1999-01-07 |
JPH03500829A (ja) | 1991-02-21 |
EP0534935B1 (fr) | 1998-11-25 |
WO1989004586A2 (fr) | 1989-05-18 |
GB2211984A (en) | 1989-07-12 |
GB8725459D0 (en) | 1987-12-02 |
US5111042A (en) | 1992-05-05 |
GB8825249D0 (en) | 1988-11-30 |
EP0534935A1 (fr) | 1993-04-07 |
DE3856268T2 (de) | 1999-04-22 |
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