WO1989000294A1 - Accelerometre - Google Patents
Accelerometre Download PDFInfo
- Publication number
- WO1989000294A1 WO1989000294A1 PCT/EP1988/000619 EP8800619W WO8900294A1 WO 1989000294 A1 WO1989000294 A1 WO 1989000294A1 EP 8800619 W EP8800619 W EP 8800619W WO 8900294 A1 WO8900294 A1 WO 8900294A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- accelerometer
- piezoelectric material
- silicon
- wafer
- bonded
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000010703 silicon Substances 0.000 claims abstract description 35
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 35
- 239000000463 material Substances 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 claims description 2
- 239000007767 bonding agent Substances 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 11
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 239000011787 zinc oxide Substances 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000002305 electric material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
Accéléromètre comprenant une poutre (1) en silicium supportée à une extrémité, à laquelle est liée une couche de matière piézo-électrique (2). On fabrique simultanément une pluralité de poutres, par découpage en cubes d'une tranche de silicium à laquelle a été liée la matière piézo-électrique. On décape la surface de la tranche opposée à la couche liée, de manière à ce que les poutres ainsi réalisées comportent une partie (3) de corps de support facilitant le montage.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB878716093A GB8716093D0 (en) | 1987-07-08 | 1987-07-08 | Accelerometer |
GB8716093 | 1987-07-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1989000294A2 WO1989000294A2 (fr) | 1989-01-12 |
WO1989000294A1 true WO1989000294A1 (fr) | 1989-01-12 |
Family
ID=10620316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1988/000619 WO1989000294A1 (fr) | 1987-07-08 | 1988-07-08 | Accelerometre |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB8716093D0 (fr) |
WO (1) | WO1989000294A1 (fr) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991011722A1 (fr) * | 1990-01-24 | 1991-08-08 | Sensonor A.S | Agencement dans un accelerometre a semiconducteurs |
EP0567535A1 (fr) * | 1991-01-17 | 1993-11-03 | ADELMAN, Roger A. | Prothese auditive amelioree |
EP0664531A1 (fr) * | 1994-01-20 | 1995-07-26 | Cerberus Ag | Transducteur sonique pour détecter une effraction |
EP0793103A2 (fr) * | 1996-02-27 | 1997-09-03 | Seiko Instruments R&D Center Inc. | Capteur d'accélération semi-conducteur |
WO1998050794A1 (fr) * | 1997-05-07 | 1998-11-12 | Pacesetter Ab | Accelerometre |
WO1998050795A1 (fr) * | 1997-05-07 | 1998-11-12 | Pacesetter Ab | Detecteur |
US6158283A (en) * | 1996-02-28 | 2000-12-12 | Seiko Instruments R&D Center Inc. | Semiconductor acceleration sensor |
EP1227327A2 (fr) * | 2001-01-24 | 2002-07-31 | Fujitsu Limited | Capteur d'accélération |
WO2012109259A3 (fr) * | 2011-02-07 | 2013-07-04 | Ion Geophysical Corporation | Procédé et appareil de détection de signaux sous-marins |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1078228A (en) * | 1964-02-19 | 1967-08-09 | Kistler Instrumente Ag | Acceleration measuring device |
GB2053348A (en) * | 1979-06-06 | 1981-02-04 | Nissan Motor | Device for detecting engine knock |
EP0047660A1 (fr) * | 1980-09-06 | 1982-03-17 | Peter Kellett | Accéléromètres |
US4494409A (en) * | 1981-05-29 | 1985-01-22 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Engine vibration sensor |
-
1987
- 1987-07-08 GB GB878716093A patent/GB8716093D0/en active Pending
-
1988
- 1988-07-08 WO PCT/EP1988/000619 patent/WO1989000294A1/fr unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1078228A (en) * | 1964-02-19 | 1967-08-09 | Kistler Instrumente Ag | Acceleration measuring device |
GB2053348A (en) * | 1979-06-06 | 1981-02-04 | Nissan Motor | Device for detecting engine knock |
EP0047660A1 (fr) * | 1980-09-06 | 1982-03-17 | Peter Kellett | Accéléromètres |
US4494409A (en) * | 1981-05-29 | 1985-01-22 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Engine vibration sensor |
Non-Patent Citations (1)
Title |
---|
IEEE Transactions on Electron Devices, vol. ED-26, no. 12, December 1979 (New York, US) L.M. Roylance et al.: "A batch-babricated silicon accelerometer", pages 1911-1917 * |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991011722A1 (fr) * | 1990-01-24 | 1991-08-08 | Sensonor A.S | Agencement dans un accelerometre a semiconducteurs |
EP0567535A1 (fr) * | 1991-01-17 | 1993-11-03 | ADELMAN, Roger A. | Prothese auditive amelioree |
EP0567535A4 (fr) * | 1991-01-17 | 1995-03-08 | Roger A Adelman | Prothese auditive amelioree. |
EP0664531A1 (fr) * | 1994-01-20 | 1995-07-26 | Cerberus Ag | Transducteur sonique pour détecter une effraction |
US5602529A (en) * | 1994-01-20 | 1997-02-11 | Cerberus Ag | Structure-borne sound detector for an intruder alarm system |
EP0793103A2 (fr) * | 1996-02-27 | 1997-09-03 | Seiko Instruments R&D Center Inc. | Capteur d'accélération semi-conducteur |
EP0793103A3 (fr) * | 1996-02-27 | 1998-10-07 | Seiko Instruments R&D Center Inc. | Capteur d'accélération semi-conducteur |
US6158283A (en) * | 1996-02-28 | 2000-12-12 | Seiko Instruments R&D Center Inc. | Semiconductor acceleration sensor |
US6252335B1 (en) | 1997-05-07 | 2001-06-26 | Pacesetter Ab | Beam-type accelerometer |
WO1998050795A1 (fr) * | 1997-05-07 | 1998-11-12 | Pacesetter Ab | Detecteur |
WO1998050794A1 (fr) * | 1997-05-07 | 1998-11-12 | Pacesetter Ab | Accelerometre |
US7021141B1 (en) | 1997-05-07 | 2006-04-04 | Pacesetter Ab | Beam-type accelerometer |
EP1227327A2 (fr) * | 2001-01-24 | 2002-07-31 | Fujitsu Limited | Capteur d'accélération |
EP1227327A3 (fr) * | 2001-01-24 | 2004-01-21 | Fujitsu Limited | Capteur d'accélération |
US6823735B2 (en) | 2001-01-24 | 2004-11-30 | Fujitsu Limited | Acceleration sensor |
WO2012109259A3 (fr) * | 2011-02-07 | 2013-07-04 | Ion Geophysical Corporation | Procédé et appareil de détection de signaux sous-marins |
CN103547895A (zh) * | 2011-02-07 | 2014-01-29 | 离子地球物理学公司 | 用于感测水下信号的方法和设备 |
AU2012214506B2 (en) * | 2011-02-07 | 2015-12-17 | Ion Geophysical Corporation | Method and apparatus for sensing underwater signals |
US9294011B2 (en) | 2011-02-07 | 2016-03-22 | Ion Geophysical Corporation | Method and apparatus for sensing underwater signals |
CN103547895B (zh) * | 2011-02-07 | 2016-08-24 | 离子地球物理学公司 | 用于感测水下信号的方法和设备 |
US9502993B2 (en) | 2011-02-07 | 2016-11-22 | Ion Geophysical Corporation | Method and apparatus for sensing signals |
Also Published As
Publication number | Publication date |
---|---|
GB8716093D0 (en) | 1987-08-12 |
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