WO1988009945A1 - Appareil de positionnement destine a etre utilise en particulier dans un espace sous vide - Google Patents

Appareil de positionnement destine a etre utilise en particulier dans un espace sous vide Download PDF

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Publication number
WO1988009945A1
WO1988009945A1 PCT/GB1988/000433 GB8800433W WO8809945A1 WO 1988009945 A1 WO1988009945 A1 WO 1988009945A1 GB 8800433 W GB8800433 W GB 8800433W WO 8809945 A1 WO8809945 A1 WO 8809945A1
Authority
WO
WIPO (PCT)
Prior art keywords
output member
positioning apparatus
movable part
movement
tape
Prior art date
Application number
PCT/GB1988/000433
Other languages
English (en)
Inventor
Philip Martin Tucker
Brian Elliott Hayden
Original Assignee
Renishaw Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw Plc filed Critical Renishaw Plc
Publication of WO1988009945A1 publication Critical patent/WO1988009945A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H02N2/046—Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment

Definitions

  • the present invention relates to positioning apparatus for positioning a movable part of a device relative to a fixed part thereof.
  • actuators are available for accurate positioning of a movable part relative to a fixed part. Many suffer to greater or lesser degrees from inaccuracies related to friction between relatively movable contacting surfaces which give rise to stick-slip phenomena and a requirement for lubrication. Other inaccuracies stem from manufacturing tolerances which give rise to backlash and a lack of precision in the positioning of the movable part.
  • a positioning apparatus for positioning a movable part of a device relative to a fixed part thereof comprising:
  • transmission means for connecting the driven output member to the movable part and for transmitting said movement of the driven output member to the movable part
  • the positioning apparatus of the invention is of general application. However, because relative sliding motion between any contacting surfaces of relatively movable components of the apparatus is eliminated, the apparatus is vacuum compatible, and has particular application to devices which require positioning of a movable member accurately in a high vacuum environment.
  • applications for the positioning apparatus can be found in vacuum chambers of devices used, for example, in semi-conductor manufacturing processes in which masks must be positioned accurately on silicon chips in a high vacuum environment, or in monochromators for use in devices utilising electromagnetic radiation or charged particles, for example, spectrometers or synchrotons.
  • the drive means may be disposed externally of the vacuum environment and the support means may include a magnetic or electro-magnetic coupling to levitate the movable part of the device.
  • the transmission means may also be electro-magnetic whereby there is no contact at all between the drive means and the movable part.
  • the drive means is disposed within the chamber.
  • the drive means may provide a rotary or linear movement which may be continuous or stepped.
  • vacuum compatible positioning apparatus for use with a device including a vacuum chamber and for accurate angular positioning of a rotatable part of the device relative to a fixed part thereof within the chamber said apparatus comprising:
  • transmission means for positively connecting the driven output member to the rotatable part and for producing an amount of rotational movement of the rotatable part which is directly equivalent to the linear movement of the driven output member
  • a preferred form of vacuum compatible drive means for vacuum operation is an electrically operated stepped linear piezo-electric drive of the type known as an INCHWORM and. manufactured by Burleigh Instruments Inc. of U.S.A. which fulfils the requirement of having no relatively sliding movement between any of its relatively movable contacting surfaces and hence requires no lubricant.
  • the use of a linear drive means requires that the transmission means must be capable of converting linear movement of the output of the drive means into rotary movement of the movable part.
  • a preferred form of vacuum compatible transmission means for mounting in a vacuum chamber which converts linear to rotary motion with great accuracy and no lost motion comprises a tensioned tape wound around a cylindrical surface on the movable part, both ends of the tape being connected to the output of the drive means so that the tape rotates the movable part with no sliding between the tape and the movable part.
  • the tape may -be fastened to the movable part to ensure that there is no slippage between the tape ' and surface of the movable part on which it bears.
  • the apparatus also preferably includes a detector for determining the movement of the movable part and for providing a signal indicative thereof.
  • the detector is preferably arranged to determine the actual movement of the movable part rather than the movement of the drive means.
  • a second tape in the form of a graduated scale may be attached to the cylindrical surface and an opto-electronic scale reader may be provided inside the chamber to register the movement of the scale.
  • a laser interferometer may be used to provide accurate measurements of the movement of the output of the drive means and the angle through which the cylindrical surface has moved can then be obtained by calculation.
  • Fig. 1 is a schematic plan view of an infra-red spectrometer device including a monochromator which utilises positioning apparatus of the present invention.
  • Fig. 2 is an exploded view of the positioning apparatus of the invention used for rotating one of the optical components of the monochromator of Fig.l
  • Fig. 3 is a plan view on arrow III-III of the apparatus of Fig. 2 with all of the components assembled
  • Fig. 4 is a sectional end elevation on the line IV-IV of Fig. 3,
  • Fig. 5 illustrates the transmission means of the positioning apparatus of Fig 2 which connects the drive means to the movable part
  • Fig. 6 is an enlarged view of the movable part together with the tapes for the transmission means and the encoder of the detector.
  • the device in Fig. 1 the device is of modular construction and comprises a source chamber 1, a main (or sample) chamber 2, and a detector chamber 3. All three chambers are equipped with means (not shown) whereby they can be evacuated to pressure levels in the ultra-high vacuum range (defined above) , and optical communication is established between them by means of vacuum-compatible infra-red transmissive windows 4 and 5.
  • the main chamber 2 simply contains a manipulator 6 on which the sample is to be placed. Infra-red radiation is directed at the sample from the source chamber 1 through the window 4 and the reflected radiation passes through window 5 to the detector chamber 3.
  • the detector chamber 3 houses a Cerny-Turner monochromator, which is known per se, together with the associated focussing optics and is not therefore described in detail.
  • the arrangement consists of a first optical system including a concave mirror 30 onto which reflected infra-red radiation from the sample is directed, plane mirror 31, a slit 32, plane mirror 33, and concave mirror 34 which co-operate to provide a collimated beam of light which is directed onto a diffraction grating 35.
  • the radiation from the diffraction grating is focussed through a second concave mirror 36 and a plane mirror 37 and leaves the chamber through a second slit 38 to be focussed onto a detector 39.
  • the diffraction grating 35 has to be mounted for rotation within the chamber, and the rotation has to be very accurately controlled and measured in order to obtain useful results from the monochromator.
  • Hitherto vacuum levels in monochromators have been limited to relatively low levels of around 10 ⁇ 4 Torr because of the lack of a vacuum compatible drive system for rotating the table which has the required level of accuracy.
  • the invention in one of its aspects provides such a drive system and thus enables the monochromator to operate at the same ultra-high vacuum conditions as the sample chamber and to achieve the associated benefits as described below.
  • the monochromator includes an optical table 40 forming part of the fixed structure and the diffraction grating support assembly, which constitutes a movable part of the device, is attached to the underside of the table 40 by means of screws 41 which screw into a housing 42 of the assembly.
  • a swivel block 44 to which the diffraction grating mount 53 is attached by means of screws 45 and a locating spigot 46.
  • the swivel block 44 is supported for rotation on top and bottom flexural pivots 48 and 49 respectively, of the type known as FREE-FLEX (RTM) and supplied by the Electric and Power Division of the Bendix Corporation.
  • Each of the pivots 48,49 has two axially separate portions 48a,48b, and 49a,49b respectively, which are interconnected by a flexible portion 48c,49c respectively which allows twisting of the pivot about its longitudinal axis.
  • the top pivot 48 is fitted by press fitting the portions 48a and 48b into suitable aligned holes 50 and 51 in the housing and swivel block respectively.
  • the bottom pivot 49 is fitted by press fitting the portions 49a and 49b into aligned holes 51 and 52 respectively in the swivel block and a closure member 54 which extends across the open end of the recess 43 and is attached to the housing 42 by means of screws 56.
  • the longitudinal axes of the flexural pivots 48 and 49 are thus aligned with the rotational axis of the swivel block. It can be seen that there is no relative sliding between contacting surfaces of the pivots 48,49 and the surfaces of the holes in the housing, swivel block and closure member. Relative rotation of each pivot to the extent required by the swivel block is allowed by twisting of the flexible portions 48c respectively.
  • the swivel block itself consists of a circular base 58 and a crescent shaped flange 59 which in the assembled position protrudes from the housing 42 through a crescent shaped slot therein.
  • the diffraction grating 35 which is itself a flat glass square is attached to the mount 53 by clips 55 so that its axis of rotation lies accurately on the rotation axis 58a of the swivel block.
  • the swivel block is rotated by means of a transmission system which is positively connected to the output member of a drive means so as to ensure that there is no lost motion between the two.
  • the amount of rotation of the swivel block is directly equivalent to the movement of the output member of the drive means. Movement of the base is measured by an encoder 70 which is described in more detail with reference to Fig. 6.
  • the transmission system consists of a stainless steel tape 61 of a fixed length connected between a pair of brackets 62 and 63.
  • the two brackets are carried by a plunger 64 which constitutes the output member of the drive means 60, which is a piezo-electric linear translator of the type sold under the trade name INCHWORM by Burleigh Instruments Inc.
  • the precise length of the tape and the tension to be applied thereto is controlled by a spring 65 which separates two parts 67 and 68 of an extension 66 attached to the plunger and carrying the bracket 63.
  • the tape is wrapped around the circular base 58 of the swivel block, and it can be seen from the Figure that any translational movement of the INCHWORM will move both brackets 62 and 63 together thus rotating the swivel block about the axis 58a.
  • One form of encoding device suitble for low vacuum application is that sold under the trade designation EN-830 by Burleigh Instruments Inc. and as can be seen in Fig. 6 it is connected to a second stainless steel tape wrapped around the circular base 58.
  • the second tape 71 is connected to the encoder by a tensioning system exactly like the tensioning system of the INCHWORM including a plunger attached to a two part extension which includes a spring tensioner.
  • each of the tapes 61,71 are provided with a narrow portion 61a.,71a and a slotted portion 6lb,7lb through which the narrow portion extends so that they can overlap on the base 58 to completely surround it, and the tapes are attached to the base 58 by screws 61c,71c.
  • the complete positioning apparatus is vacuum compatible and can operate within the ultra-high vacuum environment of the monochromator and convert the precise linear motion of the INCHWORM to equally precise angular motion of the diffraction grating.
  • the swivel block rotates about its axis 58a with substantially zero transverse centre shift and there is no lost motion between the Inchworm output and the rotation of the diffraction grating.
  • the grating can be positioned with extremely high accuracy.
  • the detector required to determine the movement of the grating has to be of a type having no lubricated parts.
  • a suitable detector includes a metallic tape scale for example as described in our international application published under number WO88/00331 in association with an opto-electronic scale reader made from ultra-high vacuum compatible materials. Such a detector is shown diagrammatically in Fig. 3 wherein the tape 71 and encoder 70 are replaced by a tape scale 73 and a scale reader 74.
  • a laser interferometer may be used to detect the motion of the INCHWORM output.
  • All three chambers may be evacuated to the same level of vacuum so that the windows between the chambers may be eliminated, thus further reducing signal degradation and enhancing sensitivity.
  • the additional option is available for pressurising the sample chamber while still operating the light source and detection system at ultra-high vacuum thus increasing the flexibility of the system. Since the chambers are isolated the pressure in the sample chamber can be changed without affecting the pressures in the other two chambers.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

L'appareil de positionnement décrit sert à positionner avec précision une pièce d'un dispositif par rapport à une autre et est destiné à être compatible avec des espaces sous-vide, de façon à pouvoir être utilisé dans des chambres sous ultravide. A cet effet, aucune lubrification n'est permise sur les pièces en mouvement les unes par rapport aux autres, de sorte que tous les contacts coulissants au niveau des surfaces en mouvement les unes par rapport aux autres doivent être évitées. Le mode de réalisation préféré est destiné à être utilisé pour faire tourner un réseau de diffraction à l'intérieur d'une source lumineuse monochromatique du type Cerny, Turner sous ultravide. Un organe de translation piézoélectrique linéaire de type INCHWORM (60) est utilisé à l'intérieur de la chambre à vide pour effectuer l'entraînement d'un élément de sortie (64) en paliers croissant à très petits pas avec une très grande précision. Une bande (61) est utilisée pour transformer le mouvement linéaire de l'élément de sortie en mouvement rotatif du support (53) du réseau de diffraction, ce qui est obtenu par enroulement de la bande autour d'un support cylindrique (58) du réseau de diffraction et par fixation des deux extrémités de la bande par l'intermédiaire d'un dispositif de tension (65) à l'élément de sortie (64), produisant ainsi une transmission du mouvement sans dérapage. Un pivot flexible (48, 49) est utilisé pour soutenir le support cylindrique à partir d'une structure fixe, de façon à permettre la rotation du support sans glissement ou sans jeu. Un détecteur, constitué par exemple par un lecteur à échelle optoélectronique (74), lit la position du support rotatif directement à d'une échelle de bande (73) enroulée autour dudit support, de façon à fournir une indication sur le mouvement du réseau.
PCT/GB1988/000433 1987-06-04 1988-06-03 Appareil de positionnement destine a etre utilise en particulier dans un espace sous vide WO1988009945A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB878713050A GB8713050D0 (en) 1987-06-04 1987-06-04 Positioning apparatus
GB8713050 1987-06-04

Publications (1)

Publication Number Publication Date
WO1988009945A1 true WO1988009945A1 (fr) 1988-12-15

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PCT/GB1988/000433 WO1988009945A1 (fr) 1987-06-04 1988-06-03 Appareil de positionnement destine a etre utilise en particulier dans un espace sous vide

Country Status (4)

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EP (1) EP0316396A1 (fr)
JP (1) JPH01503491A (fr)
GB (1) GB8713050D0 (fr)
WO (1) WO1988009945A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007068790A2 (fr) * 2005-12-09 2007-06-21 Iprbox Oy Système de détecteur pour étudier des particules
CN102903593A (zh) * 2012-10-11 2013-01-30 中国地质科学院地质研究所 一种密闭腔体中的样品台
CN113109949A (zh) * 2021-04-09 2021-07-13 长春长光格瑞光电技术有限公司 宽谱段高分辨中阶梯光栅单色器的针孔装调方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870416A (en) * 1974-01-09 1975-03-11 Bell Telephone Labor Inc Wafer alignment apparatus
FR2308465A1 (fr) * 1975-04-21 1976-11-19 Nippon Telegraph & Telephone Dispositif de positionnement fin d'une piece
US4019109A (en) * 1974-05-13 1977-04-19 Hughes Aircraft Company Alignment system and method with micromovement stage
US4516029A (en) * 1983-04-28 1985-05-07 Control Data Corporation E beam stage with below-stage X-Y drive
EP0147169A2 (fr) * 1983-12-21 1985-07-03 Hewlett-Packard Company Appareil de flexion pour l'alignement d'un plateau
EP0166499A2 (fr) * 1984-06-25 1986-01-02 Kabushiki Kaisha Toshiba Mécanisme de déplacement de précision
US4585337A (en) * 1985-01-14 1986-04-29 Phillips Edward H Step-and-repeat alignment and exposure system
JPS61159349A (ja) * 1985-12-06 1986-07-19 Hitachi Ltd 微小変位移動装置
JPS61244432A (ja) * 1985-04-19 1986-10-30 Matsushita Electric Ind Co Ltd 回動装置
JPS62103528A (ja) * 1985-10-31 1987-05-14 Shimadzu Corp 分光器の波長送り機構

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870416A (en) * 1974-01-09 1975-03-11 Bell Telephone Labor Inc Wafer alignment apparatus
US4019109A (en) * 1974-05-13 1977-04-19 Hughes Aircraft Company Alignment system and method with micromovement stage
FR2308465A1 (fr) * 1975-04-21 1976-11-19 Nippon Telegraph & Telephone Dispositif de positionnement fin d'une piece
US4516029A (en) * 1983-04-28 1985-05-07 Control Data Corporation E beam stage with below-stage X-Y drive
EP0147169A2 (fr) * 1983-12-21 1985-07-03 Hewlett-Packard Company Appareil de flexion pour l'alignement d'un plateau
EP0166499A2 (fr) * 1984-06-25 1986-01-02 Kabushiki Kaisha Toshiba Mécanisme de déplacement de précision
US4585337A (en) * 1985-01-14 1986-04-29 Phillips Edward H Step-and-repeat alignment and exposure system
JPS61244432A (ja) * 1985-04-19 1986-10-30 Matsushita Electric Ind Co Ltd 回動装置
JPS62103528A (ja) * 1985-10-31 1987-05-14 Shimadzu Corp 分光器の波長送り機構
JPS61159349A (ja) * 1985-12-06 1986-07-19 Hitachi Ltd 微小変位移動装置

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
IBM Technical Disclosure Bulletin, vol. 15, no. 12 May 1973 J. Aronstein et al.: "Frictionless, X,Y,Z and theta micropositioning table", pages 3889,3890 *
Patent Abstracts of Japan, vol. 10, no. 365, (M-542)(2422) 6 December 1986; & JP-A-61159349 (HITACHI) 19 July 1986 *
Patent Abstracts of Japan, vol. 11, no. 311, (P-625)(2758) 12 October 1987; & JP-A-62103528 (SHIMADZU) 14 May 1987 *
Patent Abstracts of Japan, vol. 11, no. 90, (M-573)(2537) 20 March 1987; & JP-A-61244432 (MATSUSHITA) 30 October 1986 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007068790A2 (fr) * 2005-12-09 2007-06-21 Iprbox Oy Système de détecteur pour étudier des particules
WO2007068790A3 (fr) * 2005-12-09 2007-08-23 Iprbox Oy Système de détecteur pour étudier des particules
CN102903593A (zh) * 2012-10-11 2013-01-30 中国地质科学院地质研究所 一种密闭腔体中的样品台
CN113109949A (zh) * 2021-04-09 2021-07-13 长春长光格瑞光电技术有限公司 宽谱段高分辨中阶梯光栅单色器的针孔装调方法
CN113109949B (zh) * 2021-04-09 2022-09-02 长春长光格瑞光电技术有限公司 宽谱段高分辨中阶梯光栅单色器的针孔装调方法

Also Published As

Publication number Publication date
GB8713050D0 (en) 1987-07-08
JPH01503491A (ja) 1989-11-22
EP0316396A1 (fr) 1989-05-24

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