WO1986004692A1 - Moniteur de microaffichage - Google Patents

Moniteur de microaffichage Download PDF

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Publication number
WO1986004692A1
WO1986004692A1 PCT/US1986/000320 US8600320W WO8604692A1 WO 1986004692 A1 WO1986004692 A1 WO 1986004692A1 US 8600320 W US8600320 W US 8600320W WO 8604692 A1 WO8604692 A1 WO 8604692A1
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WO
WIPO (PCT)
Prior art keywords
mirror
microscope
camera
film
image
Prior art date
Application number
PCT/US1986/000320
Other languages
English (en)
Inventor
Richard Brice Hoover
Original Assignee
Micromega Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micromega Corporation filed Critical Micromega Corporation
Publication of WO1986004692A1 publication Critical patent/WO1986004692A1/fr

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/48—Details of cameras or camera bodies; Accessories therefor adapted for combination with other photographic or optical apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor

Definitions

  • This invention relates to photomicrographic camera systems, and more particularly is concerned with camera systems capable of producing direct first generation photomicrographic images of large format on photographic film and paper materials. Specifically, it relates to a photomicrographic/macrophotographic camera system employing a folded optical system which allows direct images of high resolution to be displayed in real time on a large screen in full color, and photographed when desired.
  • the Micro Display Monitor works with most conventional optical microscopes.
  • This patent also describes a drawing apparatus which employs a mirror to reflect the light to a drawing plane, the beam of light being received from the tube of the microscope which has been "laterally swung" for the purpose of making drawings of the object.
  • this tube is now at a sharp angle with respect to the microscope optical axis. Light received by the microscope objective will not enter this tube, unless special reflecting optics are included in the body of the microscope. Since no such optical elements are shown or described in this patent, it must be concluded that this aspect of the invention is also incapable of operating as described.
  • 4"X5" have also been coupled to microscopes by means of solid, plastic or metal, conical tubes that, serve both as the structural support for the camera, and also as the light tight bellows.
  • Devices such as this are currently available as photomicrographic cameras for the Olympus, Nikon, and other microscope systems. These devices are also provided with reflex view focussing means.
  • Other devices are available that allow a worker to connect a single lens reflex camera (such as a modern 35 mm camera) to the microscope.
  • Some of these, such as the Nikon F adapter were designed with the correct realization of the importance of a small, positive correcting lens when the microscope image must be focussed at a very short (4"-6") projection distance.
  • large format photomicrographs may be -produced by means of a camera employing a folded optical system that allows the beam from the microscope to travel first vertically upward to a flat mirror. This mirror deflects it horizontally across to another mirror which deviates the beam vertically downward toward the film plane.
  • the camera that is configured in this manner may be used with any conventional optical microscope which is illuminated with a high intensity light source used in accordance with the proper teachings of microscopy (e.g. Koehler illumination, critical illumination, Dark Field Illumination, Phase Contrast Illumination, etc.).
  • the camera in the preferred embodiment of the present invention involves a structural housing of three components.
  • a neck that provides optical and structural coupling with the microscope eyepiece and protrudes vertically upward, thus affording a light tight pathway through which the diverging beam from the microscope eyepiece propagates.
  • This neck is connected to a horizontal arm which also provides a light tight path for propagation of the microscope beam, after it has been reflected in this direction by means of a mirror situated at the top of the neck and oriented at substantially a 45 degree angle with respect to the vertical.
  • the arm is connected to a tall vertical box which houses a large mirror that deviates the expanding beam downward to the bottom of the box, upon which rests the easel or film plate holder which holds the photographic sensitive medium.
  • a properly machined spacer is inserted around each eyepiece to insure that the microscope objective is at the precise position at which it was designed to operate when optimum focus of the image is achieved on the photographic film. Since the projection distance is the sum of the distance from the eyepiece to the mirror vertically overhead, plus the length of the horizontal arm, plus the vertical downward distance from the large mirror to the film plane at the base of the housing, very great projection distances can be achieved in a camera that can easily sit on top of a desk or a standard laboratory work table. With the film holder lying flat on the camera base it has no tendency to creep downward under its own weight or be unduly sensitive to vibrations. Gravity helps flatten out large sheets of film or paper, rather than trying to pull them out of their holder.
  • the large • ⁇ image displayed on the focus sheet immediately beside the microscope may be directly viewed without holding the head rigidly fixed, as is necessary when looking into an eyepiece.
  • This freedom reduces strain and fatigue.
  • the worker can easily reach all ⁇ ontrols to adjust focus, specimen position, etc.
  • Direct viewing of the large image on the focus sheet by two or more persons at once also facilitates communication about specific features of the image, i.e., the worker can simply point to a particular feature rather than trying to describe the location of that feature in words so that a second person can see it in the microscope.
  • the present invention also allows the worker to readily alter film format and framing.
  • the photomicroscopist may de" ⁇ ire to lay a 4"X5" film holder on the base to photograph a small piece of his large image, for an inexpensive measurement of focus, color balance, " exposure time, etc.
  • the present invention also allows the photomicroscopist to record images on small format systems, such as video cameras and 35 mm cameras.
  • the present invention can also be employed in the production of microscopic images such as is desired for the fabrication of graticles, microdots and images which may be useful in the construction of microcircuit components.
  • Figure 1 is a diagramatic view of one embodiment of the invention.
  • Figure 2 is a perspective view of one embodiment of the invention, showing the interior parts.
  • Figure 3 is a diagram illustrating a portion of the present invention when it is used in conjunction with a small format device, such as a 35 mm camera or video camera.
  • Figure 4 is a diagram showing the path of light rays in a simple embodiment of the camera employing only 2 mirrors.
  • Figure 5 shows the ray path in the camera when the additional mirror is used to correct right to left orientation of the image, with mirrors 26 and 60 pivoted to proper positions for use in this mode of operation.
  • Figure 6 shows an alternative embodiment of the invention which is completely enclosed in a modified housing.
  • Figure 7 is a perspective view of an alternative embodiment of the invention shown in Fig. 2, with the optical path through the camera reversed, so as to make it capable of producing microphotographs, microdots or microelectronic circuits.
  • Figure 8 is a perspective view of the micro display monitor.
  • Figure 9 is a diagrammatic plan view of the micro display monitor, showing ho the image is reflected onto the rear projection screen.
  • Figure 10 is a diagrammatic side view of an alternative arrangement of the micro display monitor, showing how the image may be reflected downward to a film holder mounted in the base of the monitor.
  • Figure 11 is a side elevation of the holder frame which contains both the rear projection screen and the film holder .
  • Figure 12 is an end view of the holder frame shown in Fig. 11, showing the rear projection screen and the film holder.
  • Figure 13 shows a diagrammatic side view of an alternative arrangement of the micro display monitor, which allows selective use of either a primary mirror with one reflecting surface or a primary mirror with two reflecting surfaces.
  • Figure 14 is a plan view of the micro display monitor of Figure 13 showing how the primary mirror having one reflecting surface may be moved laterally to allow use of the primary mirror having two reflecting surf ces.
  • Figure 15 is a perspective view of an alternative embodiment of the invention shown in Figure 7 wherein the light table and original copy of Figure 7 are replaced by a video display monitor and screen, thus making it possible for the invention to produce a microphotograph of an image displayed on the screen of the monitor.
  • the camera housing 32 is a large box two to four feet high with an arm section 28 projecting out from the side of the box.
  • a neck section 24 projects downward to cover the eyepiece 20 of the microscope 10.
  • a rubber sleeve 22 may be used to make a light tight connection to the microscope 10.
  • the optical section comprises an eyepiece spacer 18 (to correct for short projection distance, since the microscope is focused at infinity), a primary mirror 26, and a secondary mirror 30. If desired a tertiary mirror 60 is placed between the primary and secondary mirrors. The tertiary mirror 60 is used to get the proper and correct orientation on standard photo paper and film.
  • a mirror image is satisfactory, or if Polaroid film is being used, then the tertiary mirror folds back out of th " e way and is not used.
  • Several additional optical components which may be included with the system are a shutter 48, a baffle system 57, a rotating polarizer 52, filter and holder 46, and film holder 36.
  • the device may be equipped with an attachment for small format still, motion picture, or video cameras ( Figure 3).
  • reference numeral 10 designates a standard, compound optical microscope with mirror 11 and substage condenser 17.
  • the specimen is on microscope slide 15 with a stage 13a capable of moving the slide by adjustment of the XY controls 13.
  • the specimen is illuminated by proper methods in accordance with the teachings of good microscopic technique (e.g. Koehler illumination, Critical illumination, etc.).
  • good microscopic technique e.g. Koehler illumination, Critical illumination, etc.
  • the image of the specimen is then refocussed by eyepiece 20 to a point at infinity, because modern compound microscopes are designed such that the optical system is properly corrected for infinity focus, since this has long been known to result in the least eye strain upon the observer.
  • a spacer 18 is provided for each eyepiece. The precise thickness of this spacer is determined by the magnification of the eyepiece and the distance of the projection required to properly record the image of the size dictated by the film size that has been selected.
  • the exact spacer width required can be determined experimentally, by first focussing the specimen sharply while looking through the eyepiece with the unaided eye, and then putting the microsope into the camera apparatus and focussing the image upon the film plane by simply extending the draw tube 19.
  • the distance that the draw tube had to be extended to achieve sharp focus is the correct width for spacer 18, when that particular eyepiece and objective system is used at that projection distance.
  • Failure to use the spacer will mean that the objective must be de-focussed to achieve a sharp image on the film plane. For short projection distances (less than 1 foot) this is critical and image degradation that is noticeable will result..
  • a light tight seal 22 which may be made of overlapping spirals of black rubber or other suitable material optically isolates the eyepiece and prevents stray light from entering the camera, and couples the eyepiece 20 to the camera neck 24 and insures that the microscope is essentially centered on neck 24 " and therefore is situated essentially on the optical exis of the camera.
  • the spiral rubber seal 22 may be easily parted to facilitate interchange of eyepiece ,20 and spacer 18, which allows magnification adjustment to be accomplished without changing the objective 12 being used and without altering the length of the horizontal arm 28.
  • the beam which exits the eyepiece then propagates vertically upward in camera neck 24 until it reaches mirror 26 that is oriented at a nominal 45 degree angle with respect to the neck.
  • this mirror it is desirable that this mirror be movable between two fixed positions, and this is accomplished by mounting the mirror on a pivot 23 and rotating it between the top and bottom positions of the curved slot 25. The mirror is locked into each desired position by means of the lock screw 27.
  • the optical beam is deflected horizontally toward secondary mirror 30 and it propagates along the light tight arm 28.
  • the large mirror 30 which is nominally oriented at a 45 degree angle with respect to the vertical, it is deflected vertically downward toward the base 35 of camera housing main body 32.
  • a photographic film holder 36 equipped with a dark slide and focus sheet 34.
  • Camera housing 32 may be equipped with a sliding opaque door 38, that can travel up and down in rails 40 and be held in place when in the elevated position by means of lock screws 42.
  • the photomicroscopist is able to move the film plate holder (or photographic paper easel) 36 around in the projected image so as to frame and crop the picture as he wishes, in much the same manner that the darkroom technician works with the photographic enlarger.
  • the dark slide and focus sheet 34 is painted black on the downward surface and white on the top, and the corners and center of this focus sheet are appropriately marked to aid the photomicroscopist in achieving the best possible large format photomicrograph.
  • the door 38 when the door 38 is raised, the operator may insert his head through the door to closely examine the image as it is projected on the focus sheet 34. Simultaneously he may adjust the microscope stage controls 13 and the course focus 16 or the fine focus 14.
  • a small format film holder such as a 4"X5" Polaroid film holder, may be inserted in place of the large film holder 36. This allows a sample of the image to be photographed before the large expensive piece of color paper or film is exposed. This ability to do exact small format test exposure of a small piece of the large format film should result in considerable savings of cost, as very large format color film is quite expensive.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • a small format camera (or video camera) adapter referring now to Figure 3, we see a camera adapter tube 79 with bayonet mount 78 and camera 77.
  • This tube 79 is mounted on the port for camera adapter 70.
  • This adapter 70 is of the bayonet mount configuration, and couples to a tube structure 79 that accepts either a standard 35 mm camera, video camera, 2 1/4 X3 1/4 camera, or small format movie camera.
  • the adapter port 70 is equipped with a small positive doublet correcting lens 72 that is precisely contoured to correct for the short projection distance required by the small format devices that will be employed at this port.
  • This adapter port is normally covered by an appropriate opaque cover (not shown) when it is not is use.
  • the desired small format photographic camera or video camera is affixed to the port by means of the adapter tube 79 bayonet mount 78.
  • the small mirror 64 is flipped into position by means of lever 67 and it stops at the furthermost position allowed by curved groove 66.
  • Mirror 64 then intercepts the primary beam emanating from eyepiece 20 and reflects it horizontally outward to correcting lens 72 in port 70.
  • Shuttering is accomplished either by means of .the built in focal plane shutters included in small format cameras or it is accomplished electronically in the video camera system.
  • lever 67 is moved to a position that removes mirror (or prism) 64 from the optical beam.
  • the beam propagates vertically upward. It passes through a hole in filter drawer 46, which may be slid out of the neck 24 to be l ' oaded with neutral density filters, color correcting filters, etc. If no filtration is desirable, drawer 46 is simply left empty.
  • shutter 48 which in the preferred embodiment is a conventional iris diaphram type shutter, of which many types are now commercially available. It should be pointed out that in the simplest embodiment, the shutter 48 is simply a sheet of opaque plastic or cardboard that can be slid in and out of the optical beam. In more sophisticated embodiments the shutter 48 used may be a more complex electro-optical device.
  • a simple iris diaphram type shutter when used, it may be activated by a device such as the traditional shutter cable release device 50 illustrated in Figure 2.
  • a removeable drawer 56 Above the shutter 48 is a removeable drawer 56 that contains a polarizer 52.
  • the drawer 56 When the drawer is slid to the fully “out” position, it is still held by the camera neck 24 but the polarizer 52 is out of the optical beam.
  • the drawer 56 When polarization studies are desirable the drawer 56 is slid closed such that the polarizing element 52 is in the optical beam.
  • it must be used to analyze the beam of polarized radiation emanating from the spcimen held on slide 13.
  • baffles can be used to eliminate any extraneous and unwanted radiation from reaching the film plane in holder 36. Since most photographic formats utilized today are rectangular, these baffles are movable straight edges, constructed of an opaque, plastic or metal material painted flat black. Indeed, to minimize unwanted reflection, the interior of camera neck 24, horizontal arm 28, and camera housing 32 are all painted flat black, although the exterior may be of any color or nature desired. In the preferred embodiment, the structural elements of the camera, comprising the neck 24, arm 28, and housing 32, are constructed of solid opaque plastic, sheet metal, or other suitable fabrication material.
  • the housing 32 must be sufficiently massive and strong to support the weight of the counterbalanced (although smaller) arm and neck along with the required optical elements and desirable photographic components that are housed in the neck, which may even include a beam splitter 68 which deviates a portion of the beam to exposure meter 69.
  • a flat mirror 26 which deviates the vertically ascending beam into a horizontal path along the arm 28.
  • Mirror 26 is pivotable in the preferred embodiment, as is mirror 60.
  • the beam reflected by mirror 26 is deviated into a horizontal path. It propagates directly to mirror 30, which may be protected from dust and particulates when not is use by a sliding dust cover 44. Since both mirrors 26 and 30 are situated at a nominal angle of 45 degrees with respect to the vertical, the beam which strikes mirror 30 is deflected vertically downward by mirror 30 toward the film plane 36 beneath focus sheet 34.
  • this image is recorded on black and white film, or- reversing media such as is now used in the Polaroid Polacolor ER 8X10 Land Film Type 809, a proper left or right orientation wil be realized in the finished photomicrograph.
  • the finished orientation is of no great importance. In other areas, such as photomicroscopy of electronic microcircuitry components, the orientation of the image can be of great importance.
  • the preferred embodiment is one in which mirror 26 is rigidly mounted at a 45 degree angle with respect to the vertical and mirror 60 is not included in the camera at all. Operation of this system involves deviation of the beam from the eyepiece onto a horizontal path by mirror 26 until it is intercepted by mirror 30. The beam is then reflected vertically downward until it strikes the film in holder 36 to record a sharply focussed large format image.
  • mirror 60 If left to right orientation is important and it is desired to record the image on standard black and white or colored paper, then it is necessary to use reversing mirror 60 to correct for the number of reflections employed. It is to be noted that an odd number of mirror reflections will give a proper image when viewed directly on the focus sheet or recorded on normal paper, whereas an even number of reflections will give a properly oriented image on reversing media such as that used in the Polaroid film. Hence, in order to obtain a properly oriented image with a standard photographic easel at film holder 36, holding paper such as Ektachrome RC or Cibachrome print material, mirror 60 is rotated into its proper functioning position by moving it counterclockwise until it reaches the end of slot 62.
  • Ektachrome RC or Cibachrome print material in order to obtain a properly oriented image with a standard photographic easel at film holder 36, holding paper such as Ektachrome RC or Cibachrome print material
  • Such an embodiment may have applications in classrooms and microelectronic plants, where it may be desirable to show a high quality image of a particular microscopic specimen or chip to one or more people simultaneously without taking the effort to photograph it.
  • Direct images can easily be taken with a film holder slid into an appropriate mounting position on the interior vertical wall of housing 32 in the same place as was occupied by the ground glass or rear projection screen of the preceding discussion.
  • this holder is not shown, the new 8"X10" device for the large format Polaroid sheet film functions well in this embodiment.
  • the entire housing 32 may be mounted on grooved wheels (not shown) that sit on triangular ways 37.
  • the housing will allow the housing to be adjusted horizontally, provided the camera arm 28 is appropriately configured such that it is capable of telescoping at junction 29.
  • This allows the camera to be moved closer to or farther away from the microscope as is dictated by needs of convenience and the desire to have the ability to make minor adjustments in the resultant magnification without altering either the microscope objective or eyepiece being used.
  • the entire camera and microscope may sit upon a solid common base 74, that is isolated from room vibrations by means of rubber pads 76 on support 75.
  • camera neck 24 may be vertically adjusted by telescoping it at junction 71 and locking it into place by means of lock screw 73. This adjustment allows for variations in height of the microscope 10 and also facilitates interchange of eyepiece 20 and spacer elements 18.
  • the camera structural components, neck 24, arm 28, and housing main body 3"2 are constructed out of a suitable opaque material that is both strong and lightweight, such as modern plastics, and/or sheet metal type materials.
  • the primary optical components of the camera, mirrors 26, 30, and 60 are made out of flat glass suitable polished, silvered, and front surface coated with an appropriate overcoat such as MgF or SiO for protection.
  • an appropriate overcoat such as MgF or SiO for protection.
  • mirrors of this type may be utilized in this Folded Optical Large Format Camera System in a low cost configuration.
  • Mirrors 26 and 30 are ideally trapezoidal, although they may be made oval, rectangular or any other shape as long as the full and complete diverging beam is intercepted by the mirror and reflected along the path wherein it ultimately falls upon the film plane in sharp focus.
  • microscope 10 with illumination means 83 is sitting on the base of a large housing 85 that is constructed of opaque sheet metal, plastic, or other suitable construction material.
  • Guide ways 82 of appropriaate width to receive the base of the microscope enable the microscope to easily be positioned and repositioned in exactly the same place with respect to the base 90 of the housing.
  • a baffle sytem 81 is erected around the microscope to prevent stray light emanating from source 83 from -reaching either mirror 30 or film plane 34.
  • the baffle 81 is constructed of suitable structural material to be opaque to visible light and to afford adequate mechanical support for any or all of the optical components which have been previously described as being housed in the ' neck of the camera in the preferred embodiment. Shown in Figure 6 is only the shutter 48, connected to a long shutter cable release 50 which allows the shutter to be activated from outside housing 85.
  • Baffle system 81 consists of three vertical panels joined at the seams and a top (with hole 97, through which the beam may pass) so as to form a box without a front panel.
  • baffle 92 With sliding door 38 in the up position, the operator can make necessary changes of specimen, focus or lighting conditions as he desires to the microscope through the open front of baffle 81.
  • door 38 When door 38 is closed by means of handle 80 the inner surface of door 38 forms the front panel of baffle 92.
  • Baffle 92 now has the form of a completely enclosed box with a hole 97 in its top through which the light beam from microscope 10 propagates vertically upward toward mirror 26. This mirror is mounted to structural elements within the interior of housing 38. The light beam is then deflected horizontally outward to mirror 30 which then deviates it vertically downward to focus sheet 34. Sheet 34 covers the film in film holder 36 except during times of exposure.
  • Door panel 38 may be closed by means of handle 80 during exposure of the image.
  • door panel 38 The purpose and function of door panel 38 is of course to keep unwanted external radiation from fogging the film or degrading the picture. Panel 38 can be omitted if the camera is to be used in a darkened room. Also, any number of other reasonable methods may be employed to accomplish its intended purpose.
  • the Folded Optical Large Format Photomicrographic Camera System may be modified so that it may be used as a device for producing mfcrophotographs , microdots, or microscopic images on photoresist material for the fabrication of microelectronic components.
  • the optical path through the camera is totally reversed.
  • the subject to be photographed (original copy) 84 is placed in the position normally occupied by the focus sheet 34 (Fig 2) and uniformly illuminated by an extended internal light source 86. If the originals are in the form of transparencies or photographic negatives, good uniform illumination may be achieved by replacing film holder 36 with a light table 86.
  • Such an extended internal light source may be produced by mounting a sheet of ground glass or translucent plexiglass above fluorescent light tubes. The light from a diffusely illuminated transparency placed upon the top surface of such a light table will then travel upward in the main body housing until it is reflected by secondary mirror 30 toward primary mirror 26. Thence the beam is deflected downward to eyepiece 20 and thence to microscope objective 12 which focusses it to a sharp image in the focal plane of the objective 12.
  • microscope slide 15 instead of microscope slide 15 we utilize high resolution photographic plate 85 with its emulsion side upward. If no precautions are taken to protect the photographic plate (by means such as a baffle around the plate connecting it with the objective), the microphotographs should be recorded in a darkened room to prevent undesirable fogging of plate 85.
  • the objective is sharply focussed on the emulsion surface of the photographic plate and an image is recorded whenever the shutter 48 is activated.
  • stage control 13 By moving the photographic plate by means of stage control 13, a great many microphotographs can be recorded on the same photographic plate 85.
  • minute images on the plate 85 may be viewed by means of the camera used in its normal "way.
  • Full size hard copies may be obtained at any time by simply producing a large format photomicrograph utilizing the earlier-described embodiments of the invention.
  • a microphotO'graph of a positive print may also be produced by placing the print on the camera base and providing uniform illumination from an external source. This can take the form of a beam projected through doorway 38, or by reflecting the light .
  • FIG. 15 the embodiment of the invention shown in Figure 7 has been modified to show a video display monitor 96 with screen 94 in the position occupied in Figure 7 by light table 86 covered by original copy 84.
  • Any image displayed on screen 94 of video display monitor 96 can now produce a microscopic image (microphotograph) onto the sensitized material on the stage of the microscope. Since the microscopic image can be recorded on any light sensitive medium placed in the focal plane of objective 12, this may take the form of photoresist materials such as are used in the production of microelectronic components.
  • Microphotographs can also be produced with a camera in the small format camera port 72.
  • Figure 8 shows a perspective view of an additional embodiment of the photomicrographic camera system, a modification to a Micro " Display Monitor 100.
  • the monitor 100 provides a large format, high resolution real time display of microscopic specimens of excellent color fidelity. It is envisioned that the primary use of this invention will be in the on-line inspection of wafers, chips, and other micro-electronic components at various stages in their fabrication and QC monitoring processes, as well as a valuable tool in the classroom, laboratory or hospital environment. Although the primary mode of operation of the device is for the provision of real time displays of photomicrographic specimens, it is also possible to produce high resolution, large format photomicrographs in color or black and white at any time. In an alternate embodiment, the large photomicrographic image can be digitized for immediate computer processing and enhancement of the photomicrographic image or for transmission via telecommunication links to distantly located experts.
  • Fig. 2 disclosed that mirror 30 (which is normally configured at 45 degrees with respect to the front face of the camera) can be pivoted or removed so that the large image could be viewed on a ground glass or other suitable rear projection screen. This has the disadvantage of placing the image away from the microscope and in a position so that it can not be easily viewed by an inspector or by a group in front of the camera. Micro Display Monitor 100 overcomes this disadvantage of the camera system shown in Fig. 2.
  • the secondary mirror 102 held by brackets 103 is situated at a nominal angle of 45 degrees (see Fig. 9) with respect to the top surface 104 of the camera housing 106, such that the image is formed by light rays
  • a film holder 114 (Fig. 12) is mounted in a spring loaded holder frame 112 to permit a film holder 114 (Fig. 12) to be inserted when it is desired to take a high resolution photomicrograph of the image.
  • a light guard 116 is provided to protect the screen 108 from overhead illumination and to provide greater visibility for viewing in a lighted room.
  • mirror 102 is rotated 45 degrees about a vertical axis, tilted forward 45 degrees about a horizontal axis and held in this position by brackets 105. Light rays 107 are thus directed downward to produce the image at the base when larger format photomicrographs are desired.
  • Film holder 117 is held in brackets 118 mounted in the base of this embodiment.
  • Film holder 117 may be installed and removed through light-tight access port 120 in the front face 110 of the camera housing.
  • an opaque sheet 115 is placed in holder frame 112 in the normal place of film holder 114 behind the translucent screen 108 to produce a light-tight configuration (see Fig. 12).
  • Fig. 11 is a side elevation of the holder frame 112 showing rear projection screen 108 within frame 112.
  • Fig. 12 is an end view of holder frame 112 showing both screen 108 and film holder 114 biased tightly in position against the back of frame 112 by springs 120.
  • springs 120 push screen 108 tightly against the back of holder frame 112.
  • film holder 114 may be replaced with an apaque screen 115, particularly when the film holder 117 is being used to expose film at the base of camera housing 106 and a light-tight configuration is desired.
  • Screen 108 is a high resolution, rear projection screen. It may be a fine ground glass screen, frosted mylar on glass, or other commercially available rear projection' material.
  • the image produced is not only of high spatial resolution but it has true color fidelity. This is of tremendous importance in the semiconductor industry, where the subtle variations in color constitute quantitative evidence of the thickness of oxide and nitride layers on the wafer, metallization layers, etc. Since video systems are subject to color drift and their colors are alterable at will, the Micro Display Monitor is superior to this type of prior art.
  • the large heads-up display allows the worker to view a large real image of the specimen, rather than a virtual image as is seen when one looks in the eyepiece of a microscope.
  • the Micro Display Monitor is also superior to another aspect of the prior-art which is embodied in the technology of the "conference microscopes".
  • the conference microscope uses an array of beam splitters and tubes to connect several separated microscope heads with binocular eyepieces to the objectives on a single master microscope.
  • the person using the master microscope moves and focusses the specimen for his eyes, while everyone views the image. He has available a small illuminated pointer that can be used to point to a desirable feature on the specimen, and the others see the pointer as well. Typically only 4 to 8 additional viewers can look at once. Since individual eyes differ, there is • no way of knowing for certain that any particular individual is seeing the same image plane in sharp focus. With the Micro Display Monitor, it is possible to use a screen large enough that it could be viewed by a group or an entire classroom at once.
  • Mirror 26 is configured and arranged to slide laterally so as to intercept light rays 107 when in a first position and to retract to a second position out of the line of light rays 107.
  • mirror 122 When mirror 26 is retracted to the second position, light rays 107 hit mirror 122 which is configured as a 45 V-shaped wedge having reflecting surfaces 124 and 126, which are located directly behind the first position of mirror 26. In this case, light rays 107 hit first reflecting surface 124, are reflected to second reflecting surface 126 and are then reflected to secondary mirror 102.
  • Fig. 14 is a plan view of the micro display monitor of Fig. 13, showing how the primary mirror 26 having one reflecting surface may be moved laterally to allow use of the primary mirror 122 having two reflecting surfaces 124 and 126 (shown in Fig. 13). Knob 128 may be pulled to move mirror 26 to its second (inactive) position, as shown in Fig. 14, thus causing the proper orientation for direct imagery or photomicroscopy on positive or negative films.
  • mirrors 26 and 122 With mirrors 26 and 122 in this configuration, no shift in image position will occur when knob 128 is used to change mirrors. If we desire the image size to undergo no change when we alter the left to right orientation of the image, mirror 124 is mounted below mirror 26 so that the path length of the light ray 107 is constant when mirror 124 is removed from the beam.
  • the present invention is a photomicrographic camera system and real time display monitor which is simpler, less expensive to manufacture, easier to adjust, and which provides greater mechanical stability than the commercially available vertical cameras which have been state of the art for the industry.
  • this invention conveniently provides the capability of handling very large format film sizes of the order of 16"X20" or larger. Ordinary vertical cameras could not handle these formats in a room with eight foot ceilings.
  • one person could not focus the image since to do so, he would have to be up on a stepladder to see the image closely and thus would be out of reach of the microscope focussing controls. Since the image falls onto the photographic material or rear projection display screen immediately beside the microscope, it is very easy for the worker to achieve critical focus by looking directly at the projected image while his hand controls the focus knobs 14 and 16 and/or stage translation knobs 13 of his microscope.
  • the preferred embodiment of this invention can be modified slightly so that is may be used to produce microphotographs, microdots,, or microscopic images on photoresist material to produce microelectronic components.
  • the optical path through the device is reversed.
  • the item to be photographed 84 is placed in the position of focus sheet 34 ( Figure 2) and illuminuated by a light table 86 or other external light source.
  • Microscope slide 15 is replaced by a high resolution photographic plate 85 with its emulsion side upward. After sharply focussing the image with the objective, the image is recorded by the shutter 48.
  • the device may be utilized as a simple and highly effective method and apparatus for producing microdots or microelectronic circuits. What is claimed is:

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Dans un système de caméra photomicrographique, un système à miroir (26, 30) est utilisé pour dévier le faisceau de lumière émanant de l'oculaire (20) d'un microscope optique composé, correctement illuminé (10) dans le sens horizontal vers l'extérieur vers un autre miroir qui ensuite dévie le faisceau verticalement vers le bas sur un porte-film (36) contenant un film photographique en papier sensibilisé. Une enceinte appropriée (32) contient le chemin optique et protège le film contre la lumière diffuse et constitue en même temps un support structural pour les miroirs et les composants photographiques auxiliaires tels que les déflecteurs (57), l'obturateur (48), les filtres (46) etc. Etant donné que la distance de projection est plus que doublée, il est possible d'obtenir aisément des images de grand format avec un système reposant sur une table dans une chambre dont la hauteur du plafond est conventionnelle. En inversant le chemin optique au travers des systèmes, il est possible d'obtenir en utilisant la même structure des microphotographies, des micropoints ou des images de haute résolution pour la fabrication de composants microélectroniques. L'invention peut également être matérialisée sous la forme d'un moniteur de microaffichage (100) ayant un écran de projection par transparence (108) qui peut être déplacé par un porte-film (114) de manière à assurer les fonctions d'un moniteur en temps réel et d'une caméra photomicrographique.
PCT/US1986/000320 1985-02-12 1986-02-12 Moniteur de microaffichage WO1986004692A1 (fr)

Applications Claiming Priority (2)

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US70064785A 1985-02-12 1985-02-12
US700,647 1985-02-12

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US893823A (en) * 1907-08-14 1908-07-21 Robert L Watkins Combined microscope and camera.
US1161556A (en) * 1907-05-16 1915-11-23 Robert L Watkins Photomicrographic camera.
US1458143A (en) * 1923-06-12 Best available copn
US2077809A (en) * 1933-11-18 1937-04-20 Ernst Leitz Optische Werke G M Microphotographic apparatus with mirrorscope camera
US3334541A (en) * 1964-07-28 1967-08-08 Jade Corp Precision art work machine
US3399593A (en) * 1965-05-14 1968-09-03 Jade Corp Precision artwork duplicating machine
US4206966A (en) * 1978-10-23 1980-06-10 Redken Laboratories, Inc. Projection microscope with film holder
US4453822A (en) * 1979-11-29 1984-06-12 Energy Conversion Devices, Inc. Apparatus for producing microform records from multiple data sources
US4498749A (en) * 1983-04-01 1985-02-12 Hoover Richard B Folded optical large format photomicrographic camera system

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1458143A (en) * 1923-06-12 Best available copn
US1161556A (en) * 1907-05-16 1915-11-23 Robert L Watkins Photomicrographic camera.
US893823A (en) * 1907-08-14 1908-07-21 Robert L Watkins Combined microscope and camera.
US2077809A (en) * 1933-11-18 1937-04-20 Ernst Leitz Optische Werke G M Microphotographic apparatus with mirrorscope camera
US3334541A (en) * 1964-07-28 1967-08-08 Jade Corp Precision art work machine
US3399593A (en) * 1965-05-14 1968-09-03 Jade Corp Precision artwork duplicating machine
US4206966A (en) * 1978-10-23 1980-06-10 Redken Laboratories, Inc. Projection microscope with film holder
US4453822A (en) * 1979-11-29 1984-06-12 Energy Conversion Devices, Inc. Apparatus for producing microform records from multiple data sources
US4498749A (en) * 1983-04-01 1985-02-12 Hoover Richard B Folded optical large format photomicrographic camera system

Also Published As

Publication number Publication date
EP0211947A1 (fr) 1987-03-04

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