USD825501S1 - Air flow controller for heater of substrate processing apparatus - Google Patents

Air flow controller for heater of substrate processing apparatus Download PDF

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Publication number
USD825501S1
USD825501S1 US29/596,953 US201729596953F USD825501S US D825501 S1 USD825501 S1 US D825501S1 US 201729596953 F US201729596953 F US 201729596953F US D825501 S USD825501 S US D825501S
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US
United States
Prior art keywords
heater
processing apparatus
air flow
substrate processing
flow controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/596,953
Inventor
Takatomo Yamaguchi
Tetsuya Kosugi
Shuhei SAIDO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KOSUGI, TETSUYA, SAIDO, SHUHEI, YAMAGUCHI, TAKATOMO
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Publication of USD825501S1 publication Critical patent/USD825501S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
Active legal-status Critical Current
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Description

FIG. 1 is a front, bottom and right side perspective view of an air flow ontroller for heater of substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is a cross-sectional view taken in the direction of line 8-8 in FIG. 2.
The broken lines immediately adjacent to the shaded areas represent the bounds of the claimed design while all other broken lines are directed to environment; the broken lines form no part of the claimed design.

Claims (1)

    CLAIM
  1. We claim the ornamental design for an air flow controller for heater of substrate processing apparatus, as shown and described.
US29/596,953 2016-10-14 2017-03-13 Air flow controller for heater of substrate processing apparatus Active USD825501S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2016-22414F JP1582474S (en) 2016-10-14 2016-10-14
JP2016-022414 2016-10-14

Publications (1)

Publication Number Publication Date
USD825501S1 true USD825501S1 (en) 2018-08-14

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ID=59385073

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/596,953 Active USD825501S1 (en) 2016-10-14 2017-03-13 Air flow controller for heater of substrate processing apparatus

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US (1) USD825501S1 (en)
JP (1) JP1582474S (en)
TW (1) TWD186999S (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD851592S1 (en) * 2014-06-05 2019-06-18 Abb Schweiz Ag Power distribution device
USD947185S1 (en) * 2020-12-31 2022-03-29 Mitutoyo Corporation Data reader
USD956004S1 (en) * 2020-03-27 2022-06-28 Auras Technology Co., Ltd. Liquid-cooling heat dissipation module
USD973603S1 (en) * 2020-07-15 2022-12-27 Rootech Inc. Electric relay
USD973604S1 (en) * 2021-01-13 2022-12-27 Rootech Inc. Electric relay

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD288685S (en) * 1984-05-29 1987-03-10 Matsushita Electric Industrial Co., Ltd. TV tuner for video tape recorder
USD371113S (en) * 1995-05-12 1996-06-25 Northern Technologies, Inc. Integrated power distribution and transient voltage surge supression system
US6307153B2 (en) * 1996-11-29 2001-10-23 Omron Corporation Controller
US20080006617A1 (en) * 2006-07-05 2008-01-10 Harris Randy A Thermal wafer processor
USD605120S1 (en) * 2008-07-14 2009-12-01 Watlow Electric Manufacturing Company Power controller cover with terminal block
USD605119S1 (en) * 2008-07-14 2009-12-01 Watlow Electric Manufacturing Company Power controller cover
USD706232S1 (en) * 2012-12-21 2014-06-03 Fuji Electric Co., Ltd. Semiconductor device
USD739353S1 (en) * 2013-10-22 2015-09-22 Abb Technology Ag Module-mounting base for an industrial control system
USD758365S1 (en) * 2014-05-13 2016-06-07 Mitsubishi Electric Corporation Signal relay device
USD772184S1 (en) * 2014-12-24 2016-11-22 Fuji Electric Co., Ltd. Semiconductor module
USD773427S1 (en) * 2015-03-18 2016-12-06 Mitsubishi Electric Corporation Signal relay device
USD776077S1 (en) * 2014-12-04 2017-01-10 Mitsubishi Electric Corporation Electrical signal relay

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD288685S (en) * 1984-05-29 1987-03-10 Matsushita Electric Industrial Co., Ltd. TV tuner for video tape recorder
USD371113S (en) * 1995-05-12 1996-06-25 Northern Technologies, Inc. Integrated power distribution and transient voltage surge supression system
US6307153B2 (en) * 1996-11-29 2001-10-23 Omron Corporation Controller
US20080006617A1 (en) * 2006-07-05 2008-01-10 Harris Randy A Thermal wafer processor
USD605120S1 (en) * 2008-07-14 2009-12-01 Watlow Electric Manufacturing Company Power controller cover with terminal block
USD605119S1 (en) * 2008-07-14 2009-12-01 Watlow Electric Manufacturing Company Power controller cover
USD706232S1 (en) * 2012-12-21 2014-06-03 Fuji Electric Co., Ltd. Semiconductor device
USD739353S1 (en) * 2013-10-22 2015-09-22 Abb Technology Ag Module-mounting base for an industrial control system
USD758365S1 (en) * 2014-05-13 2016-06-07 Mitsubishi Electric Corporation Signal relay device
USD776077S1 (en) * 2014-12-04 2017-01-10 Mitsubishi Electric Corporation Electrical signal relay
USD772184S1 (en) * 2014-12-24 2016-11-22 Fuji Electric Co., Ltd. Semiconductor module
USD773427S1 (en) * 2015-03-18 2016-12-06 Mitsubishi Electric Corporation Signal relay device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD856936S1 (en) * 1920-06-05 2019-08-20 Abb Schweiz Ag Power distribution device
USD851592S1 (en) * 2014-06-05 2019-06-18 Abb Schweiz Ag Power distribution device
USD956004S1 (en) * 2020-03-27 2022-06-28 Auras Technology Co., Ltd. Liquid-cooling heat dissipation module
USD973603S1 (en) * 2020-07-15 2022-12-27 Rootech Inc. Electric relay
USD947185S1 (en) * 2020-12-31 2022-03-29 Mitutoyo Corporation Data reader
USD973604S1 (en) * 2021-01-13 2022-12-27 Rootech Inc. Electric relay

Also Published As

Publication number Publication date
TWD186999S (en) 2017-12-01
JP1582474S (en) 2017-07-31

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