USD719199S1 - Substrate cleaning tool - Google Patents

Substrate cleaning tool Download PDF

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Publication number
USD719199S1
USD719199S1 US29/466,453 US201329466453F USD719199S US D719199 S1 USD719199 S1 US D719199S1 US 201329466453 F US201329466453 F US 201329466453F US D719199 S USD719199 S US D719199S
Authority
US
United States
Prior art keywords
cleaning tool
substrate cleaning
view
substrate
elevation view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/466,453
Inventor
Kento Kurusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KURUSU, KENTO
Application granted granted Critical
Publication of USD719199S1 publication Critical patent/USD719199S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a front, left and top perspective view of the substrate cleaning tool showing the new design;
FIG. 2 is a front elevation view thereof;
FIG. 3 is a rear elevation view thereof;
FIG. 4 is a left side elevation view thereof;
FIG. 5 is a top plan view thereof; and,
FIG. 6 is a cross-sectional view taken along line 6-6 in FIG. 2.
The right side elevation view is a mirror image of the left side, and the bottom view is a mirror image of the top plan view.
The broken lines illustrate portions of the substrate cleaning tool that form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a substrate cleaning tool, as shown and described.
US29/466,453 2013-04-17 2013-09-09 Substrate cleaning tool Active USD719199S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013008651 2013-04-17
JP2013-008651 2013-04-17

Publications (1)

Publication Number Publication Date
USD719199S1 true USD719199S1 (en) 2014-12-09

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ID=52002109

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/466,453 Active USD719199S1 (en) 2013-04-17 2013-09-09 Substrate cleaning tool

Country Status (2)

Country Link
US (1) USD719199S1 (en)
TW (1) TWD163179S (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD738178S1 (en) * 2014-05-16 2015-09-08 Nomis Llc Tool adaptor plate
USD817736S1 (en) * 2017-02-21 2018-05-15 Jui-Chien Kao Tool mount
USD843118S1 (en) * 2016-12-16 2019-03-19 Tokyo Electron Limited Cleaning brush
USD871877S1 (en) * 2018-04-24 2020-01-07 Hole Dynamics, LLC Hole saw arbor
USD898879S1 (en) * 2017-05-01 2020-10-13 Norgren Automation Solutions, Llc Modular tooling coupler
USD907156S1 (en) * 2018-11-30 2021-01-05 Leatherman Tool Group, Inc. Sight adjustment tool
USD982407S1 (en) * 2019-10-31 2023-04-04 Dino Paoli S.R.L. Impact tool component
USD1092170S1 (en) * 2023-05-03 2025-09-09 Techtronic Cordless Gp Hand tool connection interface

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5647083A (en) * 1994-06-30 1997-07-15 Dainippon Screen Mfg. Co., Ltd. Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus
US20020035763A1 (en) * 2000-09-22 2002-03-28 Keizo Hirose Substrate cleaning tool and substrate cleaning apparatus
US6412134B1 (en) * 1998-12-08 2002-07-02 Ebara Corporation Cleaning device and substrate cleaning apparatus
US6554010B1 (en) * 1999-07-26 2003-04-29 Tokyo Electron Limited Substrate cleaning tool, having permeable cleaning head
USD563186S1 (en) * 2006-03-17 2008-03-04 Ehwa Diamond Industrial Co., Ltd. Tip for a grinding wheel
USD619152S1 (en) * 2009-12-18 2010-07-06 Techtronic Power Tools Technology Limited Adapter
USD623034S1 (en) * 2009-12-18 2010-09-07 Techtronic Power Tools Technology Limited Tool arbor
USD630656S1 (en) * 2010-01-26 2011-01-11 Longyear Tm, Inc. Drill bit
USD646542S1 (en) * 2010-09-29 2011-10-11 Milwaukee Electric Tool Corporation Accessory interface for a tool
USD648762S1 (en) * 2010-06-16 2011-11-15 Roehm Gmbh Chuck
US8522799B2 (en) * 2005-12-30 2013-09-03 Lam Research Corporation Apparatus and system for cleaning a substrate

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5647083A (en) * 1994-06-30 1997-07-15 Dainippon Screen Mfg. Co., Ltd. Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus
US6412134B1 (en) * 1998-12-08 2002-07-02 Ebara Corporation Cleaning device and substrate cleaning apparatus
US6554010B1 (en) * 1999-07-26 2003-04-29 Tokyo Electron Limited Substrate cleaning tool, having permeable cleaning head
US20020035763A1 (en) * 2000-09-22 2002-03-28 Keizo Hirose Substrate cleaning tool and substrate cleaning apparatus
US8522799B2 (en) * 2005-12-30 2013-09-03 Lam Research Corporation Apparatus and system for cleaning a substrate
USD563186S1 (en) * 2006-03-17 2008-03-04 Ehwa Diamond Industrial Co., Ltd. Tip for a grinding wheel
USD619152S1 (en) * 2009-12-18 2010-07-06 Techtronic Power Tools Technology Limited Adapter
USD623034S1 (en) * 2009-12-18 2010-09-07 Techtronic Power Tools Technology Limited Tool arbor
USD633769S1 (en) * 2009-12-18 2011-03-08 Techtronic Power Tools Technology Limited Tool arbor
USD630656S1 (en) * 2010-01-26 2011-01-11 Longyear Tm, Inc. Drill bit
USD648762S1 (en) * 2010-06-16 2011-11-15 Roehm Gmbh Chuck
USD646542S1 (en) * 2010-09-29 2011-10-11 Milwaukee Electric Tool Corporation Accessory interface for a tool

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD738178S1 (en) * 2014-05-16 2015-09-08 Nomis Llc Tool adaptor plate
USD843118S1 (en) * 2016-12-16 2019-03-19 Tokyo Electron Limited Cleaning brush
USD817736S1 (en) * 2017-02-21 2018-05-15 Jui-Chien Kao Tool mount
USD898879S1 (en) * 2017-05-01 2020-10-13 Norgren Automation Solutions, Llc Modular tooling coupler
USD871877S1 (en) * 2018-04-24 2020-01-07 Hole Dynamics, LLC Hole saw arbor
USD926008S1 (en) * 2018-04-24 2021-07-27 Hole Dynamics, LLC Hole saw arbor
USD907156S1 (en) * 2018-11-30 2021-01-05 Leatherman Tool Group, Inc. Sight adjustment tool
USD982407S1 (en) * 2019-10-31 2023-04-04 Dino Paoli S.R.L. Impact tool component
USD1026599S1 (en) * 2019-10-31 2024-05-14 Dino Paoli S.R.L. Impact tool component
USD1026598S1 (en) * 2019-10-31 2024-05-14 Dino Paoli S.R.L. Impact tool component
USD1092170S1 (en) * 2023-05-03 2025-09-09 Techtronic Cordless Gp Hand tool connection interface

Also Published As

Publication number Publication date
TWD163179S (en) 2014-09-21

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