USD674366S1 - Wafer holding member - Google Patents

Wafer holding member Download PDF

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Publication number
USD674366S1
USD674366S1 US29/396,050 US201129396050F USD674366S US D674366 S1 USD674366 S1 US D674366S1 US 201129396050 F US201129396050 F US 201129396050F US D674366 S USD674366 S US D674366S
Authority
US
United States
Prior art keywords
holding member
wafer holding
view
wafer
ornamental design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/396,050
Inventor
Hideki Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KAJIWARA, HIDEKI
Application granted granted Critical
Publication of USD674366S1 publication Critical patent/USD674366S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is front perspective view of a wafer holding member illustrating my new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom view thereof;
FIG. 4 is a front view thereof, the rear view being a mirror image;
FIG. 5 is a left side view thereof;
FIG. 6 is a right side view thereof;
FIG. 7 is a sectional view taken along line 7-7 of FIG. 2; and,
FIG. 8 is an enlarged view of portion 8 encircled in FIG. 7.

Claims (1)

  1. The ornamental design for wafer holding member, as shown and described.
US29/396,050 2011-01-20 2011-06-24 Wafer holding member Active USD674366S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011001006 2011-01-20
JP2011-001006 2011-01-20

Publications (1)

Publication Number Publication Date
USD674366S1 true USD674366S1 (en) 2013-01-15

Family

ID=47471228

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/396,050 Active USD674366S1 (en) 2011-01-20 2011-06-24 Wafer holding member

Country Status (2)

Country Link
US (1) USD674366S1 (en)
TW (1) TWD147588S (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD691974S1 (en) * 2011-12-22 2013-10-22 Tokyo Electron Limited Holding pad for transferring a wafer
USD693319S1 (en) * 2011-12-22 2013-11-12 Tokyo Electron Limited Holding pad for transferring a wafer
USD695240S1 (en) * 2011-10-20 2013-12-10 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD701498S1 (en) * 2011-10-20 2014-03-25 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD703162S1 (en) * 2012-10-17 2014-04-22 Sumitomo Electric Industries, Ltd. Wafer holder for stepper
USD703161S1 (en) * 2012-10-15 2014-04-22 Sumitomo Electric Industries, Ltd. Wafer holder for ion implantation
USD749531S1 (en) * 2014-06-09 2016-02-16 Gudeng Precision Industrial Co., Ltd. Diffusion assembly for front opening unified pod
USD766850S1 (en) * 2014-03-28 2016-09-20 Tokyo Electron Limited Wafer holder for manufacturing semiconductor
USD803283S1 (en) * 2016-05-16 2017-11-21 Veeco Instruments Inc. Wafer handling assembly
USD1023984S1 (en) * 2022-02-03 2024-04-23 Omron Corporation Gripper for wafer cassette
USD1035600S1 (en) * 2022-02-23 2024-07-16 Rf Scientific, Llc Semiconductor test fixture
USD1035599S1 (en) * 2022-02-03 2024-07-16 Omron Corporation Gripper for wafer cassette
USD1036399S1 (en) * 2023-06-22 2024-07-23 Omron Corporation Gripper for wafer cassette
USD1046798S1 (en) * 2020-12-17 2024-10-15 Omron Corporation Gripper for semiconductor wafer housing cassette

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4938166A (en) * 1986-03-31 1990-07-03 Hughes Aircraft Company Device for growing multi-layer crystals employing set of masking elements with different aperature configurations
US5643366A (en) * 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
US5851041A (en) * 1996-06-26 1998-12-22 Ontrak Systems, Inc. Wafer holder with spindle assembly and wafer holder actuator
US5881668A (en) * 1995-11-07 1999-03-16 Sputtered Films, Inc. System for providing a controlled deposition on wafers
US6244641B1 (en) * 1999-12-02 2001-06-12 M.E.C. Technology, Inc. Wafer transfer arm
US6267423B1 (en) * 1995-12-08 2001-07-31 Applied Materials, Inc. End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector
US6409453B1 (en) * 1998-02-18 2002-06-25 Applied Materials, Inc. End effector for wafer handler in processing system
US6491330B1 (en) * 1999-05-04 2002-12-10 Ade Corporation Edge gripping end effector wafer handling apparatus
US6558562B2 (en) * 2000-12-01 2003-05-06 Speedfam-Ipec Corporation Work piece wand and method for processing work pieces using a work piece handling wand
US7100954B2 (en) * 2003-07-11 2006-09-05 Nexx Systems, Inc. Ultra-thin wafer handling system
USD589474S1 (en) * 2007-06-06 2009-03-31 Tokyo Electron Limited Wafer holding member
USD589912S1 (en) * 2007-06-06 2009-04-07 Tokyo Electron Limited Wafer holding member
US7644968B2 (en) * 2004-01-23 2010-01-12 Kawasaki Jukogyo Kabushiki Kaisha Substrate holding device
US7694647B2 (en) * 2004-12-22 2010-04-13 Applied Materials, Inc. Cluster tool architecture for processing a substrate
USD639253S1 (en) * 2010-09-10 2011-06-07 Cheng Uei Precision Industry Co., Ltd. Mounting frame for printed circuit board of a mouse
US7980611B2 (en) * 2008-01-24 2011-07-19 Kabushiki Kaisha Yaskawa Denki Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4938166A (en) * 1986-03-31 1990-07-03 Hughes Aircraft Company Device for growing multi-layer crystals employing set of masking elements with different aperature configurations
US5643366A (en) * 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
US5881668A (en) * 1995-11-07 1999-03-16 Sputtered Films, Inc. System for providing a controlled deposition on wafers
US6117238A (en) * 1995-11-07 2000-09-12 Applied Science And Technology, Inc. End effector assembly for inclusion in a system for producing uniform deposits on a wafer
US6267423B1 (en) * 1995-12-08 2001-07-31 Applied Materials, Inc. End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector
US5851041A (en) * 1996-06-26 1998-12-22 Ontrak Systems, Inc. Wafer holder with spindle assembly and wafer holder actuator
US6409453B1 (en) * 1998-02-18 2002-06-25 Applied Materials, Inc. End effector for wafer handler in processing system
US6491330B1 (en) * 1999-05-04 2002-12-10 Ade Corporation Edge gripping end effector wafer handling apparatus
US6244641B1 (en) * 1999-12-02 2001-06-12 M.E.C. Technology, Inc. Wafer transfer arm
US6558562B2 (en) * 2000-12-01 2003-05-06 Speedfam-Ipec Corporation Work piece wand and method for processing work pieces using a work piece handling wand
US7100954B2 (en) * 2003-07-11 2006-09-05 Nexx Systems, Inc. Ultra-thin wafer handling system
US7644968B2 (en) * 2004-01-23 2010-01-12 Kawasaki Jukogyo Kabushiki Kaisha Substrate holding device
US7694647B2 (en) * 2004-12-22 2010-04-13 Applied Materials, Inc. Cluster tool architecture for processing a substrate
USD589474S1 (en) * 2007-06-06 2009-03-31 Tokyo Electron Limited Wafer holding member
USD589912S1 (en) * 2007-06-06 2009-04-07 Tokyo Electron Limited Wafer holding member
US7980611B2 (en) * 2008-01-24 2011-07-19 Kabushiki Kaisha Yaskawa Denki Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus
USD639253S1 (en) * 2010-09-10 2011-06-07 Cheng Uei Precision Industry Co., Ltd. Mounting frame for printed circuit board of a mouse

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD695240S1 (en) * 2011-10-20 2013-12-10 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD701498S1 (en) * 2011-10-20 2014-03-25 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD693319S1 (en) * 2011-12-22 2013-11-12 Tokyo Electron Limited Holding pad for transferring a wafer
USD691974S1 (en) * 2011-12-22 2013-10-22 Tokyo Electron Limited Holding pad for transferring a wafer
USD703161S1 (en) * 2012-10-15 2014-04-22 Sumitomo Electric Industries, Ltd. Wafer holder for ion implantation
USD703162S1 (en) * 2012-10-17 2014-04-22 Sumitomo Electric Industries, Ltd. Wafer holder for stepper
USD766850S1 (en) * 2014-03-28 2016-09-20 Tokyo Electron Limited Wafer holder for manufacturing semiconductor
USD749531S1 (en) * 2014-06-09 2016-02-16 Gudeng Precision Industrial Co., Ltd. Diffusion assembly for front opening unified pod
USD803283S1 (en) * 2016-05-16 2017-11-21 Veeco Instruments Inc. Wafer handling assembly
USD1046798S1 (en) * 2020-12-17 2024-10-15 Omron Corporation Gripper for semiconductor wafer housing cassette
USD1023984S1 (en) * 2022-02-03 2024-04-23 Omron Corporation Gripper for wafer cassette
USD1035599S1 (en) * 2022-02-03 2024-07-16 Omron Corporation Gripper for wafer cassette
USD1035600S1 (en) * 2022-02-23 2024-07-16 Rf Scientific, Llc Semiconductor test fixture
USD1036399S1 (en) * 2023-06-22 2024-07-23 Omron Corporation Gripper for wafer cassette

Also Published As

Publication number Publication date
TWD147588S (en) 2012-06-11

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