USD666979S1 - Substrate holder - Google Patents

Substrate holder Download PDF

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Publication number
USD666979S1
USD666979S1 US29/393,934 US201129393934F USD666979S US D666979 S1 USD666979 S1 US D666979S1 US 201129393934 F US201129393934 F US 201129393934F US D666979 S USD666979 S US D666979S
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US
United States
Prior art keywords
substrate holder
view
substrate
ornamental design
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/393,934
Inventor
Akihiro TERAMOTO
Norifumi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SATO, NORIFUMI, TERAMOTO, AKIHIRO
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Publication of USD666979S1 publication Critical patent/USD666979S1/en
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Description

FIG. 1 is a top perspective view of a substrate holder showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof, the right side being a mirror image;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is an enlarged cross-sectional view taken along line 7-7 of FIG. 5 thereof.
The article is a substrate holder exchangeably attached to a substrate transfer arm holding and transferring a circular substrate, for example, a semiconductor wafer or the like.

Claims (1)

  1. What is claimed is the ornamental design for a substrate holder, as shown and described.
US29/393,934 2010-12-14 2011-06-10 Substrate holder Active USD666979S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-029766 2010-02-15
JP2010029766 2010-12-14

Publications (1)

Publication Number Publication Date
USD666979S1 true USD666979S1 (en) 2012-09-11

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US29/393,934 Active USD666979S1 (en) 2010-12-14 2011-06-10 Substrate holder

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD785578S1 (en) * 2016-03-22 2017-05-02 Asm Ip Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
USD805044S1 (en) * 2015-10-30 2017-12-12 Hirata Corporation Adhesive sheet for substrate
USD811457S1 (en) * 2015-11-02 2018-02-27 Hirata Corporation Substrate conveyance arm
USD938373S1 (en) * 2019-10-25 2021-12-14 Applied Materials, Inc. Substrate transfer structure

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6117238A (en) * 1995-11-07 2000-09-12 Applied Science And Technology, Inc. End effector assembly for inclusion in a system for producing uniform deposits on a wafer
US6578891B1 (en) * 1999-07-08 2003-06-17 Ebara Corporation Substrate holder and substrate transfer apparatus using the same
US6874515B2 (en) * 2001-04-25 2005-04-05 Tokyo Electron Limited Substrate dual-side processing apparatus
US20070076345A1 (en) * 2005-09-20 2007-04-05 Bang Won B Substrate placement determination using substrate backside pressure measurement
USD552138S1 (en) * 2005-06-29 2007-10-02 Tokyo Electron Limited Arm transferring substrate to be processed
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6117238A (en) * 1995-11-07 2000-09-12 Applied Science And Technology, Inc. End effector assembly for inclusion in a system for producing uniform deposits on a wafer
US6578891B1 (en) * 1999-07-08 2003-06-17 Ebara Corporation Substrate holder and substrate transfer apparatus using the same
US6874515B2 (en) * 2001-04-25 2005-04-05 Tokyo Electron Limited Substrate dual-side processing apparatus
USD552138S1 (en) * 2005-06-29 2007-10-02 Tokyo Electron Limited Arm transferring substrate to be processed
US20070076345A1 (en) * 2005-09-20 2007-04-05 Bang Won B Substrate placement determination using substrate backside pressure measurement
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD805044S1 (en) * 2015-10-30 2017-12-12 Hirata Corporation Adhesive sheet for substrate
USD811457S1 (en) * 2015-11-02 2018-02-27 Hirata Corporation Substrate conveyance arm
USD785578S1 (en) * 2016-03-22 2017-05-02 Asm Ip Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
USD938373S1 (en) * 2019-10-25 2021-12-14 Applied Materials, Inc. Substrate transfer structure

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