USD664170S1 - Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass - Google Patents

Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass Download PDF

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Publication number
USD664170S1
USD664170S1 US29/386,850 US201129386850F USD664170S US D664170 S1 USD664170 S1 US D664170S1 US 201129386850 F US201129386850 F US 201129386850F US D664170 S USD664170 S US D664170S
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United States
Prior art keywords
processing chamber
turbulent flow
cleaning
inducing turbulent
cleaning plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/386,850
Inventor
Hua Chung
Xizi Dong
Kyawwin Jason Maung
Hiroji Hanawa
Sang Won Kang
David H. Quach
Donald J. K. Olgado
David Bour
Wei-Yung Hsu
Alexander Tam
Anzhong Chang
Sumedh Acharya
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Applied Materials Inc
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Applied Materials Inc
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Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/386,850 priority Critical patent/USD664170S1/en
Priority to TW100304292F priority patent/TWD147215S/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ACHARYA, SUMEDH, CHUNG, HUA, DONG, XIZI, OLGADO, DONALD J.K., HSU, WEI-YUNG, BOUR, DAVID, HANAWA, HIROJI, QUACH, DAVID H., CHANG, ANZHONG, KANG, SANG WON, MAUNG, KYAWWIN JASON, TAM, ALEXANDER
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Description

This invention was made with Government support under DE-EE0003331 awarded by DOE. The Government has certain rights in this invention.
FIG. 1 is a cleaning plate for inducing turbulent flow of a processing chamber cleaning gas.
FIG. 2 is a top plan view of the cleaning plate of FIG. 1.
FIG. 3 is a bottom isometric view of the cleaning plate of FIG. 1.
FIG. 4 is a bottom plan view of the cleaning plate of FIG. 1.
FIG. 5 is a side perspective view of the cleaning plate of 1; and,
FIG. 6 is an enlarged partial view of FIG. 3.
The broken lines in the figures form no part of the claimed design.

Claims (1)

  1. The ornamental design for a cleaning plate for inducing turbulent flow of a processing chamber cleaning glass, as shown.
US29/386,850 2011-03-04 2011-03-04 Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass Active USD664170S1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US29/386,850 USD664170S1 (en) 2011-03-04 2011-03-04 Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass
TW100304292F TWD147215S (en) 2011-03-04 2011-08-19 Cleaning plate for inducing turbulent flow of a processing chamber cleaning gas

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Application Number Priority Date Filing Date Title
US29/386,850 USD664170S1 (en) 2011-03-04 2011-03-04 Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass

Publications (1)

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USD664170S1 true USD664170S1 (en) 2012-07-24

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US29/386,850 Active USD664170S1 (en) 2011-03-04 2011-03-04 Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass

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US (1) USD664170S1 (en)
TW (1) TWD147215S (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD817753S1 (en) * 2017-03-09 2018-05-15 Woodward, Inc. Spring array
USD821863S1 (en) * 2017-05-22 2018-07-03 J. Juan, S.A. Washer
USD830161S1 (en) * 2016-11-04 2018-10-09 Russo Trading Company, Inc. Orientation washer
USD834922S1 (en) 2015-05-21 2018-12-04 Russo Trading Company, Inc. Threaded lippage cap
USD835979S1 (en) * 2017-06-09 2018-12-18 Simpson Strong-Tie Company Inc. Decorative washer
USD856111S1 (en) 2015-05-21 2019-08-13 Russo Trading Company, Inc. Tile lippage threaded post
USD862204S1 (en) 2015-05-21 2019-10-08 Russo Trading Company, Inc. Lippage cap
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid
USRE49567E1 (en) 2015-05-21 2023-07-04 Russo Trading Company, Inc. Tile lippage post
USD1037778S1 (en) 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate
USD1071103S1 (en) 2022-04-11 2025-04-15 Applied Materials, Inc. Gas distribution plate
USD1085029S1 (en) 2022-07-19 2025-07-22 Applied Materials, Inc. Gas distribution plate
USD1103948S1 (en) 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate
USD1104086S1 (en) 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD263678S (en) * 1979-11-07 1982-04-06 Illinois Tool Works Inc. Roof insulation washer
USD320361S (en) 1989-06-02 1991-10-01 Tokyo Electron Limited Wafer probe plate holder
USD327111S (en) * 1989-06-02 1992-06-16 ABU Garcia Production AB Spring washer for use in a fishing reel
USD414406S (en) * 1998-02-18 1999-09-28 Illinois Tool Works Inc. Washer assembly
US6155203A (en) * 1997-03-31 2000-12-05 Lam Research Corporation Apparatus for control of deposit build-up on an inner surface of a plasma processing chamber
US6277235B1 (en) 1998-08-11 2001-08-21 Novellus Systems, Inc. In situ plasma clean gas injection
US20020020429A1 (en) 2000-07-07 2002-02-21 Selbrede Steven C. Systems and methods for remote plasma clean
US6652712B2 (en) * 2001-12-19 2003-11-25 Applied Materials, Inc Inductive antenna for a plasma reactor producing reduced fluorine dissociation
JP2005072291A (en) 2003-08-26 2005-03-17 Dainippon Screen Mfg Co Ltd Heat treatment apparatus and cleaning method for heat treatment apparatus
USD528407S1 (en) * 2003-02-03 2006-09-19 Schwab Pierre P Snap disc element
US20060254519A1 (en) * 2003-11-19 2006-11-16 Jozef Brcka Locally-efficient inductive plasma coupling for plasma processing system
US7431772B2 (en) 2004-03-09 2008-10-07 Applied Materials, Inc. Gas distributor having directed gas flow and cleaning method
USD619152S1 (en) * 2009-12-18 2010-07-06 Techtronic Power Tools Technology Limited Adapter
US20110308551A1 (en) * 2010-06-18 2011-12-22 Applied Materials, Inc. Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas
USD651062S1 (en) * 2010-09-29 2011-12-27 Milwaukee Electric Tool Corporation Tool interface for an accessory
US20120000490A1 (en) * 2010-07-01 2012-01-05 Applied Materials, Inc. Methods for enhanced processing chamber cleaning
US20120037190A1 (en) * 2009-05-12 2012-02-16 Khs Gmbh Method and device for internally cleaning cans having corresponding openings

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD263678S (en) * 1979-11-07 1982-04-06 Illinois Tool Works Inc. Roof insulation washer
USD320361S (en) 1989-06-02 1991-10-01 Tokyo Electron Limited Wafer probe plate holder
USD327111S (en) * 1989-06-02 1992-06-16 ABU Garcia Production AB Spring washer for use in a fishing reel
US6155203A (en) * 1997-03-31 2000-12-05 Lam Research Corporation Apparatus for control of deposit build-up on an inner surface of a plasma processing chamber
USD414406S (en) * 1998-02-18 1999-09-28 Illinois Tool Works Inc. Washer assembly
US6277235B1 (en) 1998-08-11 2001-08-21 Novellus Systems, Inc. In situ plasma clean gas injection
US20020020429A1 (en) 2000-07-07 2002-02-21 Selbrede Steven C. Systems and methods for remote plasma clean
US6652712B2 (en) * 2001-12-19 2003-11-25 Applied Materials, Inc Inductive antenna for a plasma reactor producing reduced fluorine dissociation
USD528407S1 (en) * 2003-02-03 2006-09-19 Schwab Pierre P Snap disc element
JP2005072291A (en) 2003-08-26 2005-03-17 Dainippon Screen Mfg Co Ltd Heat treatment apparatus and cleaning method for heat treatment apparatus
US20060254519A1 (en) * 2003-11-19 2006-11-16 Jozef Brcka Locally-efficient inductive plasma coupling for plasma processing system
US7431772B2 (en) 2004-03-09 2008-10-07 Applied Materials, Inc. Gas distributor having directed gas flow and cleaning method
US20120037190A1 (en) * 2009-05-12 2012-02-16 Khs Gmbh Method and device for internally cleaning cans having corresponding openings
USD619152S1 (en) * 2009-12-18 2010-07-06 Techtronic Power Tools Technology Limited Adapter
US20110308551A1 (en) * 2010-06-18 2011-12-22 Applied Materials, Inc. Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas
US20120000490A1 (en) * 2010-07-01 2012-01-05 Applied Materials, Inc. Methods for enhanced processing chamber cleaning
USD651062S1 (en) * 2010-09-29 2011-12-27 Milwaukee Electric Tool Corporation Tool interface for an accessory

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
International Search Report dated Feb. 9, 2012 for International Application No. PCT/US2011/040197.
International Search Report dated Feb. 9, 2012, Application No. PCT/US2011/040197.
Japanese Office Action issued Feb. 21, 2012 for Japanese Application No. 2011-019695.
Taiwan Office Action dated Feb. 17, 2012 for Taiwan Design Patent Application No. 100304292.

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD862204S1 (en) 2015-05-21 2019-10-08 Russo Trading Company, Inc. Lippage cap
USD834922S1 (en) 2015-05-21 2018-12-04 Russo Trading Company, Inc. Threaded lippage cap
USD856111S1 (en) 2015-05-21 2019-08-13 Russo Trading Company, Inc. Tile lippage threaded post
USRE49567E1 (en) 2015-05-21 2023-07-04 Russo Trading Company, Inc. Tile lippage post
USD830161S1 (en) * 2016-11-04 2018-10-09 Russo Trading Company, Inc. Orientation washer
USD817753S1 (en) * 2017-03-09 2018-05-15 Woodward, Inc. Spring array
USD821863S1 (en) * 2017-05-22 2018-07-03 J. Juan, S.A. Washer
USD835979S1 (en) * 2017-06-09 2018-12-18 Simpson Strong-Tie Company Inc. Decorative washer
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid
USD1103948S1 (en) 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate
USD1104086S1 (en) 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate
USD1071103S1 (en) 2022-04-11 2025-04-15 Applied Materials, Inc. Gas distribution plate
USD1085029S1 (en) 2022-07-19 2025-07-22 Applied Materials, Inc. Gas distribution plate
USD1037778S1 (en) 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate

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Publication number Publication date
TWD147215S (en) 2012-05-21

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