USD654883S1 - Top plate for reactor for manufacturing semiconductor - Google Patents
Top plate for reactor for manufacturing semiconductor Download PDFInfo
- Publication number
- USD654883S1 USD654883S1 US29/389,558 US201129389558F USD654883S US D654883 S1 USD654883 S1 US D654883S1 US 201129389558 F US201129389558 F US 201129389558F US D654883 S USD654883 S US D654883S
- Authority
- US
- United States
- Prior art keywords
- reactor
- top plate
- manufacturing semiconductor
- view
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Claims (1)
- The ornamental design for top plate for reactor for manufacturing semiconductor, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010025238 | 2010-10-21 | ||
JP2010-025238 | 2010-10-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD654883S1 true USD654883S1 (en) | 2012-02-28 |
Family
ID=45694810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/389,558 Active USD654883S1 (en) | 2010-10-21 | 2011-04-13 | Top plate for reactor for manufacturing semiconductor |
Country Status (1)
Country | Link |
---|---|
US (1) | USD654883S1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150329964A1 (en) * | 2014-05-16 | 2015-11-19 | Tokyo Electron Limited | Film Forming Apparatus |
US20160027674A1 (en) * | 2013-03-15 | 2016-01-28 | Kevin Griffin | Carousel Gas Distribution Assembly With Optical Measurements |
USD766850S1 (en) * | 2014-03-28 | 2016-09-20 | Tokyo Electron Limited | Wafer holder for manufacturing semiconductor |
US10508340B2 (en) * | 2013-03-15 | 2019-12-17 | Applied Materials, Inc. | Atmospheric lid with rigid plate for carousel processing chambers |
USD916037S1 (en) * | 2018-05-18 | 2021-04-13 | Kokusai Electric Corporation | Cover of seal cap for reaction chamber for semiconductor |
USD924823S1 (en) * | 2018-07-19 | 2021-07-13 | Kokusai Electric Corporation | Adiabatic plate for substrate processing apparatus |
USD981972S1 (en) * | 2021-03-22 | 2023-03-28 | Kokusai Electric Corporation | Adiabatic plate for substrate processing appratus |
-
2011
- 2011-04-13 US US29/389,558 patent/USD654883S1/en active Active
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160027674A1 (en) * | 2013-03-15 | 2016-01-28 | Kevin Griffin | Carousel Gas Distribution Assembly With Optical Measurements |
US10508340B2 (en) * | 2013-03-15 | 2019-12-17 | Applied Materials, Inc. | Atmospheric lid with rigid plate for carousel processing chambers |
USD766850S1 (en) * | 2014-03-28 | 2016-09-20 | Tokyo Electron Limited | Wafer holder for manufacturing semiconductor |
US20150329964A1 (en) * | 2014-05-16 | 2015-11-19 | Tokyo Electron Limited | Film Forming Apparatus |
US10344382B2 (en) * | 2014-05-16 | 2019-07-09 | Tokyo Electron Limited | Film forming apparatus |
USD916037S1 (en) * | 2018-05-18 | 2021-04-13 | Kokusai Electric Corporation | Cover of seal cap for reaction chamber for semiconductor |
USD924823S1 (en) * | 2018-07-19 | 2021-07-13 | Kokusai Electric Corporation | Adiabatic plate for substrate processing apparatus |
USD981972S1 (en) * | 2021-03-22 | 2023-03-28 | Kokusai Electric Corporation | Adiabatic plate for substrate processing appratus |
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