USD625748S1 - Vacuum transfer robot - Google Patents
Vacuum transfer robot Download PDFInfo
- Publication number
- USD625748S1 USD625748S1 US29/361,136 US36113610F USD625748S US D625748 S1 USD625748 S1 US D625748S1 US 36113610 F US36113610 F US 36113610F US D625748 S USD625748 S US D625748S
- Authority
- US
- United States
- Prior art keywords
- transfer robot
- vacuum transfer
- view
- elevational view
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Description
Claims (1)
- The ornamental design for a vacuum transfer robot, as shown and described.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/361,136 USD625748S1 (en) | 2010-05-06 | 2010-05-06 | Vacuum transfer robot |
US29/409,384 USRE44567E1 (en) | 2009-11-17 | 2011-12-22 | Vacuum transfer robot |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/361,136 USD625748S1 (en) | 2010-05-06 | 2010-05-06 | Vacuum transfer robot |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/409,384 Reissue USRE44567E1 (en) | 2009-11-17 | 2011-12-22 | Vacuum transfer robot |
Publications (1)
Publication Number | Publication Date |
---|---|
USD625748S1 true USD625748S1 (en) | 2010-10-19 |
Family
ID=42941695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/361,136 Ceased USD625748S1 (en) | 2009-11-17 | 2010-05-06 | Vacuum transfer robot |
Country Status (1)
Country | Link |
---|---|
US (1) | USD625748S1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD639323S1 (en) * | 2010-05-06 | 2011-06-07 | Ulvac, Inc. | Vacuum transfer robot |
USRE43781E1 (en) * | 2009-11-17 | 2012-11-06 | Ulvac, Inc. | Vacuum transfer robot |
USRE44567E1 (en) * | 2009-11-17 | 2013-11-05 | Ulvac, Inc. | Vacuum transfer robot |
USD902276S1 (en) * | 2019-03-27 | 2020-11-17 | Daihen Corporation | Industrial robot |
USD902273S1 (en) * | 2019-03-27 | 2020-11-17 | Daihen Corporation | Industrial robot |
USD902275S1 (en) * | 2019-03-27 | 2020-11-17 | Daihen Corporation | Industrial robot |
USD902274S1 (en) * | 2019-03-27 | 2020-11-17 | Daihen Corporation | Industrial robot |
Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD323332S (en) * | 1988-07-25 | 1992-01-21 | Tel Sagami Limited | Handling arm for boats for thermal treatment of semiconductor wafers |
US5950495A (en) * | 1997-07-16 | 1999-09-14 | Daihen Corporation | Two-armed transfer robot |
US6102649A (en) * | 1997-12-26 | 2000-08-15 | Daihen Corporation | Two-armed transfer robot |
US6109860A (en) * | 1997-12-26 | 2000-08-29 | Daihen Corporation | Two-armed transfer robot |
US6155131A (en) * | 1996-02-02 | 2000-12-05 | Komatsu Ltd. | Handling robot |
US6190114B1 (en) * | 1998-05-29 | 2001-02-20 | Daihen Corporation | Transfer robot |
US6364599B1 (en) * | 1996-03-22 | 2002-04-02 | Komatsu Ltd. | Robot for handling |
USRE37731E1 (en) * | 1997-07-16 | 2002-06-11 | Daihen Corporation | Two-armed transfer robot |
US20020114690A1 (en) * | 2001-02-17 | 2002-08-22 | Tooru Ishigame | Transfer system |
US20030014155A1 (en) * | 2001-07-12 | 2003-01-16 | Applied Material, Inc. | High temperature substrate transfer robot |
US20030012631A1 (en) * | 2001-07-12 | 2003-01-16 | Pencis Christopher H. | High temperature substrate transfer robot |
US20050079043A1 (en) * | 2003-07-11 | 2005-04-14 | Daihen Corporation | Two-arm transfer robot |
US20050118010A1 (en) * | 2003-11-28 | 2005-06-02 | Daihen Corporation | Transfer robot |
US20050217053A1 (en) * | 2003-12-19 | 2005-10-06 | Samsung Electronics Co., Ltd. | Robot arm mechanism |
US20070004058A1 (en) * | 2005-07-04 | 2007-01-04 | Heok-Jae Lee | Semiconductor manufacturing device with transfer robot |
US20070183868A1 (en) * | 2006-02-06 | 2007-08-09 | Son Suck-Woon | Wafer transfer robot and semiconductor device manufacturing equipment comprising the same |
USD552138S1 (en) * | 2005-06-29 | 2007-10-02 | Tokyo Electron Limited | Arm transferring substrate to be processed |
US7306423B2 (en) * | 2003-04-16 | 2007-12-11 | Daihen Corporation | Linear moving mechanism and transfer robot using the same |
US20080023293A1 (en) * | 2006-07-28 | 2008-01-31 | Daihen Corporation | Linear transfer mechanism and transfer robot using the same |
US20080118338A1 (en) * | 2006-11-22 | 2008-05-22 | Foxsemicon Integrated Technology, Inc. | Transfer robot |
US20090093906A1 (en) * | 2007-10-04 | 2009-04-09 | Asm Japan K.K. | Position sensor system for substrate transfer robot |
US20090142163A1 (en) * | 2007-11-30 | 2009-06-04 | Novellus System, Inc. | Wafer position correction with a dual, side-by-side wafer transfer robot |
US20100101357A1 (en) * | 2007-03-19 | 2010-04-29 | Sota Aoki | Transfer robot |
US20100161124A1 (en) * | 2008-12-18 | 2010-06-24 | Kabushiki Kaisha Yaskawa Denki | Substrate transfer robot, substrate transfer apparatus including the same, and semiconductor manufacturing apparatus including the same |
-
2010
- 2010-05-06 US US29/361,136 patent/USD625748S1/en not_active Ceased
Patent Citations (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD323332S (en) * | 1988-07-25 | 1992-01-21 | Tel Sagami Limited | Handling arm for boats for thermal treatment of semiconductor wafers |
US6155131A (en) * | 1996-02-02 | 2000-12-05 | Komatsu Ltd. | Handling robot |
US6364599B1 (en) * | 1996-03-22 | 2002-04-02 | Komatsu Ltd. | Robot for handling |
US5950495A (en) * | 1997-07-16 | 1999-09-14 | Daihen Corporation | Two-armed transfer robot |
USRE37731E1 (en) * | 1997-07-16 | 2002-06-11 | Daihen Corporation | Two-armed transfer robot |
US6109860A (en) * | 1997-12-26 | 2000-08-29 | Daihen Corporation | Two-armed transfer robot |
US6102649A (en) * | 1997-12-26 | 2000-08-15 | Daihen Corporation | Two-armed transfer robot |
US6190114B1 (en) * | 1998-05-29 | 2001-02-20 | Daihen Corporation | Transfer robot |
US20020114690A1 (en) * | 2001-02-17 | 2002-08-22 | Tooru Ishigame | Transfer system |
US20030014155A1 (en) * | 2001-07-12 | 2003-01-16 | Applied Material, Inc. | High temperature substrate transfer robot |
US20030012631A1 (en) * | 2001-07-12 | 2003-01-16 | Pencis Christopher H. | High temperature substrate transfer robot |
US7306423B2 (en) * | 2003-04-16 | 2007-12-11 | Daihen Corporation | Linear moving mechanism and transfer robot using the same |
US7056080B2 (en) * | 2003-07-11 | 2006-06-06 | Daihen Corporation | Two-arm transfer robot |
US20050079043A1 (en) * | 2003-07-11 | 2005-04-14 | Daihen Corporation | Two-arm transfer robot |
US20050118010A1 (en) * | 2003-11-28 | 2005-06-02 | Daihen Corporation | Transfer robot |
US7114907B2 (en) * | 2003-11-28 | 2006-10-03 | Daihen Corporation | Transfer robot |
US20050217053A1 (en) * | 2003-12-19 | 2005-10-06 | Samsung Electronics Co., Ltd. | Robot arm mechanism |
USD552138S1 (en) * | 2005-06-29 | 2007-10-02 | Tokyo Electron Limited | Arm transferring substrate to be processed |
US20070004058A1 (en) * | 2005-07-04 | 2007-01-04 | Heok-Jae Lee | Semiconductor manufacturing device with transfer robot |
US20070183868A1 (en) * | 2006-02-06 | 2007-08-09 | Son Suck-Woon | Wafer transfer robot and semiconductor device manufacturing equipment comprising the same |
US20080023293A1 (en) * | 2006-07-28 | 2008-01-31 | Daihen Corporation | Linear transfer mechanism and transfer robot using the same |
US20080118338A1 (en) * | 2006-11-22 | 2008-05-22 | Foxsemicon Integrated Technology, Inc. | Transfer robot |
US20100101357A1 (en) * | 2007-03-19 | 2010-04-29 | Sota Aoki | Transfer robot |
US20090093906A1 (en) * | 2007-10-04 | 2009-04-09 | Asm Japan K.K. | Position sensor system for substrate transfer robot |
US20090142163A1 (en) * | 2007-11-30 | 2009-06-04 | Novellus System, Inc. | Wafer position correction with a dual, side-by-side wafer transfer robot |
US20100161124A1 (en) * | 2008-12-18 | 2010-06-24 | Kabushiki Kaisha Yaskawa Denki | Substrate transfer robot, substrate transfer apparatus including the same, and semiconductor manufacturing apparatus including the same |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE43781E1 (en) * | 2009-11-17 | 2012-11-06 | Ulvac, Inc. | Vacuum transfer robot |
USRE44567E1 (en) * | 2009-11-17 | 2013-11-05 | Ulvac, Inc. | Vacuum transfer robot |
USD639323S1 (en) * | 2010-05-06 | 2011-06-07 | Ulvac, Inc. | Vacuum transfer robot |
USD902276S1 (en) * | 2019-03-27 | 2020-11-17 | Daihen Corporation | Industrial robot |
USD902273S1 (en) * | 2019-03-27 | 2020-11-17 | Daihen Corporation | Industrial robot |
USD902275S1 (en) * | 2019-03-27 | 2020-11-17 | Daihen Corporation | Industrial robot |
USD902274S1 (en) * | 2019-03-27 | 2020-11-17 | Daihen Corporation | Industrial robot |
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