USD616396S1 - Pedestal of heat insulating cylinder for manufacturing semiconductor wafers - Google Patents
Pedestal of heat insulating cylinder for manufacturing semiconductor wafers Download PDFInfo
- Publication number
- USD616396S1 USD616396S1 US29/342,858 US34285809F USD616396S US D616396 S1 USD616396 S1 US D616396S1 US 34285809 F US34285809 F US 34285809F US D616396 S USD616396 S US D616396S
- Authority
- US
- United States
- Prior art keywords
- pedestal
- heat insulating
- semiconductor wafers
- manufacturing semiconductor
- insulating cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 title claims description 4
- 239000004065 semiconductor Substances 0.000 title claims description 4
- 235000012431 wafers Nutrition 0.000 title claims description 4
Images
Description
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Claims (1)
- The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-005525 | 2009-03-12 | ||
| JP2009005525 | 2009-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD616396S1 true USD616396S1 (en) | 2010-05-25 |
Family
ID=42184701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/342,858 Expired - Lifetime USD616396S1 (en) | 2009-03-12 | 2009-09-02 | Pedestal of heat insulating cylinder for manufacturing semiconductor wafers |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | USD616396S1 (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090321372A1 (en) * | 2008-06-30 | 2009-12-31 | Memc Electronic Materials, Inc. | Low thermal mass semiconductor wafer support |
| US20100098519A1 (en) * | 2008-10-17 | 2010-04-22 | Memc Electronic Materials, Inc. | Support for a semiconductor wafer in a high temperature environment |
| USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD725053S1 (en) * | 2011-11-18 | 2015-03-24 | Tokyo Electron Limited | Outer tube for process tube for manufacturing semiconductor wafers |
| USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
| USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
| USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD908102S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
| USD908103S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
| USD939459S1 (en) * | 2019-08-07 | 2021-12-28 | Kokusai Electric Corporation | Boat for wafer processing apparatus |
| USD1110288S1 (en) * | 2024-03-20 | 2026-01-27 | Kokusai Electric Corporation | Heat insulation pedestal of a semiconductor manufacturing apparatus |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4872554A (en) * | 1987-07-02 | 1989-10-10 | Fluoroware, Inc. | Reinforced carrier with embedded rigid insert |
| US5897311A (en) * | 1995-05-31 | 1999-04-27 | Tokyo Electron Limited | Support boat for objects to be processed |
| USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
| US6110285A (en) * | 1997-04-15 | 2000-08-29 | Toshiba Ceramics Co., Ltd. | Vertical wafer boat |
| US6488497B1 (en) * | 2001-07-12 | 2002-12-03 | Saint-Gobain Ceramics & Plastics, Inc. | Wafer boat with arcuate wafer support arms |
| US7033168B1 (en) * | 2005-01-24 | 2006-04-25 | Memc Electronic Materials, Inc. | Semiconductor wafer boat for a vertical furnace |
| US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
| US7501370B2 (en) * | 2004-01-06 | 2009-03-10 | Saint-Gobain Ceramics & Plastics, Inc. | High purity silicon carbide wafer boats |
-
2009
- 2009-09-02 US US29/342,858 patent/USD616396S1/en not_active Expired - Lifetime
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4872554A (en) * | 1987-07-02 | 1989-10-10 | Fluoroware, Inc. | Reinforced carrier with embedded rigid insert |
| US5897311A (en) * | 1995-05-31 | 1999-04-27 | Tokyo Electron Limited | Support boat for objects to be processed |
| US6110285A (en) * | 1997-04-15 | 2000-08-29 | Toshiba Ceramics Co., Ltd. | Vertical wafer boat |
| USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
| US6488497B1 (en) * | 2001-07-12 | 2002-12-03 | Saint-Gobain Ceramics & Plastics, Inc. | Wafer boat with arcuate wafer support arms |
| US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
| US7501370B2 (en) * | 2004-01-06 | 2009-03-10 | Saint-Gobain Ceramics & Plastics, Inc. | High purity silicon carbide wafer boats |
| US7033168B1 (en) * | 2005-01-24 | 2006-04-25 | Memc Electronic Materials, Inc. | Semiconductor wafer boat for a vertical furnace |
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8042697B2 (en) * | 2008-06-30 | 2011-10-25 | Memc Electronic Materials, Inc. | Low thermal mass semiconductor wafer support |
| US20120077138A1 (en) * | 2008-06-30 | 2012-03-29 | Memc Electronic Materials, Inc. | Low Thermal Mass Semiconductor Wafer Boat |
| US8220646B2 (en) | 2008-06-30 | 2012-07-17 | Memc Electronic Materials, Inc. | Low thermal mass semiconductor wafer plate |
| US8220647B2 (en) * | 2008-06-30 | 2012-07-17 | Memc Electronic Materials, Inc. | Low thermal mass semiconductor wafer boat |
| US20090321372A1 (en) * | 2008-06-30 | 2009-12-31 | Memc Electronic Materials, Inc. | Low thermal mass semiconductor wafer support |
| US20100098519A1 (en) * | 2008-10-17 | 2010-04-22 | Memc Electronic Materials, Inc. | Support for a semiconductor wafer in a high temperature environment |
| USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD725053S1 (en) * | 2011-11-18 | 2015-03-24 | Tokyo Electron Limited | Outer tube for process tube for manufacturing semiconductor wafers |
| USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
| USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
| USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD908102S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
| USD908103S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
| USD939459S1 (en) * | 2019-08-07 | 2021-12-28 | Kokusai Electric Corporation | Boat for wafer processing apparatus |
| USD1110288S1 (en) * | 2024-03-20 | 2026-01-27 | Kokusai Electric Corporation | Heat insulation pedestal of a semiconductor manufacturing apparatus |
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